CN114464512A - Emission device for emitting electrons, preparation method thereof and electron gun - Google Patents
Emission device for emitting electrons, preparation method thereof and electron gun Download PDFInfo
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- CN114464512A CN114464512A CN202210124227.1A CN202210124227A CN114464512A CN 114464512 A CN114464512 A CN 114464512A CN 202210124227 A CN202210124227 A CN 202210124227A CN 114464512 A CN114464512 A CN 114464512A
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J23/00—Details of transit-time tubes of the types covered by group H01J25/00
- H01J23/02—Electrodes; Magnetic control means; Screens
- H01J23/06—Electron or ion guns
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J23/00—Details of transit-time tubes of the types covered by group H01J25/00
- H01J23/12—Vessels; Containers
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J25/00—Transit-time tubes, e.g. klystrons, travelling-wave tubes, magnetrons
- H01J25/34—Travelling-wave tubes; Tubes in which a travelling wave is simulated at spaced gaps
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/02—Manufacture of electrodes or electrode systems
- H01J9/18—Assembling together the component parts of electrode systems
Abstract
An electron gun, and an emission device for emitting electrons. An emission device for emitting electrons, comprising a body portion comprising: the electrode positioning rings are coaxially and sequentially sleeved, and comprise a central positioning ring positioned in the center, an outer positioning ring positioned on the outermost side and a plurality of middle positioning rings positioned between the central positioning ring and the outer positioning ring; the at least three ceramic rings are respectively arranged between the two adjacent electrode positioning rings; the cathode heat shield assembly is arranged in the central positioning ring; the control electrode is arranged on the central positioning ring; at least one anode disposed on the intermediate positioning ring; and an end cap bonded to the outer positioning ring, the control electrode and the anode extending into a receiving groove of the end cap facing the body portion.
Description
Technical Field
At least one embodiment of the present invention relates to an electron gun, and more particularly, to an electron gun, and an emission device for emitting electrons.
Background
With the continuous development of vacuum electronic technology, the requirements for the performance of the traveling wave tube in the military electronic industry and the civil industry are higher and higher. Traveling wave tubes have irreplaceable positions in related industries as high-power broadband microwave sources and important microwave signal amplifiers. The development of modern satellite communication, space communication, phased array radar and other technologies puts higher requirements on the traveling wave tube from the aspects of high wave band, long service life, high reliability and the like.
Currently, the difficulty of the manufacturing process is a core problem limiting the application of the device. Due to the characteristics of high power, high frequency and the like of the traveling wave tube, no other device can be substituted at present. The traveling wave tube works by applying a mechanism that a high-frequency electromagnetic field interacts with an electron beam, the electron gun is a basic component for generating the electron beam in the traveling wave tube and forming the electron beam, and the structural design of the electron gun determines that the gun body has good geometric accuracy, insulating property, assembling efficiency, vacuum tightness, weight, volume and the like to meet the design requirements. Therefore, the method has very important significance for the research of the traveling wave tube electron gun.
However, in the case of the conventional electron gun, the electron gun for the traveling wave tube is very sensitive to the parameter changes of the cathode, the anode and the focusing electrode with the increase of the operating frequency, which puts very high requirements on the processing and assembling of the electron gun.
Disclosure of Invention
In view of the above, the present invention provides a solution to at least partially solve at least one of the above technical problems.
As one aspect of the present invention, there is provided an emission device for emitting electrons, comprising:
a main body portion comprising:
the electrode positioning rings are coaxially and sequentially sleeved, and comprise a central positioning ring positioned in the center, an outer positioning ring positioned on the outermost side and a plurality of middle positioning rings positioned between the central positioning ring and the outer positioning ring; and
at least three ceramic rings respectively arranged between two adjacent electrode positioning rings;
a cathode heat shield assembly mounted in the centering ring;
the control electrode is arranged on the central positioning ring;
at least one anode disposed on the intermediate positioning ring; and
an end cap bonded to the outer positioning ring, the control electrode and anode extending into a receiving groove of the end cap facing the body portion.
According to an embodiment of the invention, the cathode heat shield assembly comprises:
a cathode assembly adapted to generate electrons; and
a heat shield assembly adapted to support the cathode assembly is disposed within the lower end of the center positioning ring.
According to an embodiment of the present invention, the center positioning ring and the middle positioning ring are electrically connected to the control electrode and the anode, respectively, in a spot welding manner, and the end cap is combined with the outer positioning ring in a spot welding manner.
According to an embodiment of the invention, each of the outer and intermediate positioning rings is provided with a first boss projecting radially inwardly towards a respective one of the ceramic rings;
each of the ceramic rings is provided with a second boss projecting radially inwardly toward a corresponding one of the intermediate positioning rings or the center positioning ring.
According to an embodiment of the invention, each of said first bosses is joined to a respective one of the ceramic rings by a furnace brazing process,
and each second boss is combined with a corresponding middle positioning ring or central positioning ring by adopting a furnace brazing process.
According to the embodiment of the invention, a plurality of vent holes are formed in the vertical wall of each electrode positioning ring.
According to the embodiment of the invention, the centers of the end cover, the anode and the anode control electrode are provided with the axially extending emission holes.
As another aspect of the present invention, the present invention provides an electron gun comprising:
a mounting seat; and
the launch apparatus according to any of the preceding embodiments, mounted on the mount.
According to an embodiment of the invention, the mount comprises:
a base having a chamber formed therein;
a sealed barrel mounted on the base, the lower end of the barrel being in communication with the chamber, the end cap of the launching device being coupled to the upper end of the barrel, the body portion of the launching device extending into the barrel;
a cathode heat shield assembly extending from a lower end of a center positioning ring of the emitter device into the center positioning ring; and
and the external terminals are respectively and electrically connected with the cathode heat shield assembly and the middle positioning ring.
According to an embodiment of the present invention, each of the external terminals includes:
a ceramic body mounted on the base; and
and the conductor penetrates through the ceramic body, one end of the conductor is electrically connected with an external matching conductor, and the other end of the conductor is electrically connected with the corresponding cathode heat shield assembly or the middle electrode positioning ring.
According to the embodiment of the invention, the end cover is provided with an annular flange which protrudes outwards in the radial direction, and the annular flange abuts against the upper end of the cylinder body and is combined with the upper end of the cylinder body in a sealing mode.
As a further aspect of the present invention, there is provided a method of manufacturing a transmitting device as described in any one of the preceding embodiments, comprising the steps of:
providing a sealing mold, the sealing mold comprising:
two cylindrical support seats;
a plurality of positioning posts extending from an inner side of at least one of the two support seats, the plurality of positioning posts being arranged on a plurality of coaxially arranged circumferences; and
the positioning screw rod penetrates through the supporting seat;
placing one end of a plurality of electrode positioning rings and one end of a ceramic ring on one of the support seats so that positioning columns located on the same circumference are inserted between adjacent electrode positioning rings and support the ceramic ring to position the electrode positioning rings and the ceramic ring in a radial direction, and enabling the positioning screw to pass through a central positioning ring;
solder is preset at the joint of the adjacent electrode positioning ring and the ceramic ring;
placing the other one of the two supporting seats on the other end of the electrode positioning ring, and locking two ends of the positioning screw rod through nuts, so that the two supporting seats position the electrode positioning ring and the ceramic ring in the axial direction and form a primary main body part;
placing the preliminary main body part in a welding furnace for primary welding to form a main body part; and
and sequentially assembling the control electrode, the anode and the end cap onto the main body part by a second welding, wherein the control electrode and the anode are welded to the central positioning ring and the intermediate positioning ring, respectively.
According to an embodiment of the present invention, the control electrode, the anode, and the end cap are sequentially assembled to the main body part by a second welding:
providing a coaxiality adjusting device which comprises a positioning cylinder body, wherein a first accommodating part and a second accommodating part are formed in the positioning cylinder body, the inner diameter of the second accommodating part is larger than that of the first accommodating part, and a plurality of positioning holes and welding holes are formed in the vertical wall of the second accommodating part;
inserting at least a portion of a body portion of an emitting device into the first receptacle such that the control electrode, anode, and end cap are located in the second receptacle;
sequentially buckling protective caps with different sizes on the control electrode, the anode and the end cap; respectively enabling positioning ends of a plurality of positioning devices to penetrate through the positioning holes to abut against the protective cap, and adjusting the concentricity of the main body part, the control electrode, the anode and the end cover by operating the positioning devices;
and removing the protective cap after the second welding.
According to the embodiment of the invention, after the second welding is completed, the transmitting device is assembled into the mounting seat and is in sealing combination with the mounting seat through third welding.
According to the embodiment of the invention, the welding mode of the second welding comprises laser welding and pulsed argon arc welding so as to reduce the influence of welding deformation on the concentricity of the main body part.
According to an embodiment of the present invention, a coefficient of thermal expansion of the positioning screw is not lower than a coefficient of thermal expansion of the main body portion.
According to the embodiment of the invention, the welding mode of the third welding comprises continuous laser welding, argon arc welding, high-frequency brazing and the like.
According to the transmitting device provided by the embodiment of the invention, the control electrode, the at least one anode and the end cover obtain coplanar positioning surfaces during assembly by arranging the at least four electrode positioning rings which have the same axial length and are coaxially and sequentially sleeved, so that the sealing and assembling difficulty is reduced; meanwhile, based on the coaxial arrangement of the electrode positioning ring, the control electrode, the at least one anode and the end cover also have good concentricity after simple adjustment, and the assembly precision is improved.
According to the electron gun provided by the embodiment of the invention, the mounting base is additionally arranged and is combined with the end cover in an airtight manner, so that the emitting device does not need high-power welding any more, and only needs simple spot welding for fixation, the occurrence of thermal stress and thermal deformation of the emitting device is reduced, and the coaxiality of the cathode, the control electrode, each anode and the end cover is effectively improved. In addition, because the geometric position of the mounting seat can not interfere the emission hole of the emission device, when sealing welding is carried out, the power and parameters of the welding process are easy to adjust and realize, a complex composite process is converted into a plurality of simple basic processes, the geometric precision of the electron gun is improved, and the manufacturing difficulty of the electron gun is reduced.
According to the manufacturing method of the emitting device of the embodiment of the invention, the plurality of positioning columns are arranged on the supporting seat of the packaging mold, so that each electrode positioning piece can realize better coaxial effect through simple adjustment; the sealing mould is supplemented with a nut and a positioning screw rod, so that the main body part is in a locked state in the sealing mould to resist thermal deformation generated in the first welding process.
Drawings
FIG. 1 is a perspective view of an electron gun according to an embodiment of the present invention;
FIG. 2A is a perspective view of another embodiment of the present invention;
FIG. 2B is a top view of FIG. 2A;
FIG. 3 is a cross-sectional view of an electron gun in an embodiment of the present invention;
FIG. 4A is a cross-sectional view of a launching device in an embodiment of the invention;
FIG. 4B is an enlarged partial view of the flange of FIG. 4A;
FIG. 5 is a cross-sectional view of a mount in an embodiment of the invention;
FIG. 6 is a cross-sectional view of a body portion in an embodiment of the invention;
FIG. 7 is a perspective view of an electrode positioning ring in an embodiment of the present invention;
FIG. 8 is a perspective view of a ceramic ring in an embodiment of the present invention;
FIG. 9 is a schematic perspective view of a portion of a sealing mold in an embodiment of the invention;
FIG. 10 is a perspective view of a sealing mold assembly in an embodiment of the invention;
FIG. 11 is an axial cross-sectional view of FIG. 10;
FIG. 12 is a perspective view of a coaxiality adjustment apparatus according to an embodiment of the present invention; and
fig. 13 is an axial cross-sectional view of fig. 12.
Description of the reference numerals
1: a mounting seat;
11: a base;
12: a barrel;
13: an external terminal;
131: a ceramic body;
132: a conductor;
14: an exhaust pipe;
2: a main body portion;
21: an electrode positioning ring;
211: a first boss;
212: a vent hole;
213: a central positioning ring;
214: a middle positioning ring;
215: an outer locating ring;
22: a ceramic ring;
221: a second boss;
3: a cathode heat shield assembly;
31: a heat shield assembly;
32: a cathode assembly;
4: a control electrode;
5: an anode;
6: an end cap;
61: accommodating grooves;
62: a flange;
7: sealing the mold;
71: a supporting seat;
72: a positioning column;
73: positioning a screw rod;
74: a nut;
8: a coaxiality adjusting device;
81: positioning the cylinder;
811: a first accommodating portion;
812: a second accommodating portion;
813: positioning holes;
814: welding the hole;
82: a protective cap;
83: a positioning device; and
9: an emission aperture.
Detailed Description
In order that the objects, technical solutions and advantages of the present invention will become more apparent, the present invention will be further described in detail with reference to the accompanying drawings in conjunction with the following specific embodiments.
The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. The terms "comprises," "comprising," and the like, as used herein, specify the presence of stated features, steps, operations, and/or components, but do not preclude the presence or addition of one or more other features, steps, operations, or components.
All terms (including technical and scientific terms) used herein have the same meaning as commonly understood by one of ordinary skill in the art unless otherwise defined. It is noted that the terms used herein should be interpreted as having a meaning that is consistent with the context of this specification and should not be interpreted in an idealized or overly formal sense.
According to the general inventive concept of one aspect of the present invention, there is provided an emission device for emitting electrons, including: a body portion, the body portion comprising: the electrode positioning rings are coaxially and sequentially sleeved, and comprise a central positioning ring positioned in the center, an outer positioning ring positioned on the outermost side and a plurality of middle positioning rings positioned between the central positioning ring and the outer positioning ring; the at least three ceramic rings are respectively arranged between two adjacent electrode positioning rings; a cathode heat shield assembly mounted in the centering ring; the control electrode is arranged on the central positioning ring; at least one anode respectively arranged on the middle positioning rings; and an end cap sealingly bonded to the outer positioning ring, the control electrode and anode extending into a receiving groove of the end cap facing the body portion.
According to an inventive concept of another aspect of the present invention, there is provided an electron gun including: a mounting seat; and the emitting device is arranged on the mounting seat.
According to the inventive concept of a further aspect of the present invention, there is provided a manufacturing method based on the foregoing emitting device, including the steps of:
providing a sealing mold, the sealing mold comprising: two cylindrical support seats; a plurality of positioning posts extending from an inner side of at least one of the two support seats, the plurality of positioning posts being arranged on a plurality of coaxially arranged circumferences; the positioning screw penetrates through the supporting seat;
placing one end of a plurality of electrode positioning rings and one end of a ceramic ring on one of the support seats, so that positioning columns positioned on the same circumference are inserted between the adjacent electrode positioning rings and the adjacent ceramic rings to position the electrode positioning rings and the ceramic rings in the radial direction, and enabling the positioning screw to pass through the central positioning ring;
solder is preset at the joint of the adjacent electrode positioning ring and the ceramic ring;
placing the other one of the two supporting seats on the other end of the electrode positioning ring, and locking two ends of the positioning screw rod through nuts, so that the two supporting seats position the electrode positioning ring and the ceramic ring in the axial direction and form a primary main body part;
placing the preliminary main body part in a welding furnace for primary welding to form a main body part; and
and sequentially assembling the control electrode, the anode and the end cap onto the main body part by a second welding, wherein the control electrode and the anode are welded to the central positioning ring and the intermediate positioning ring, respectively.
FIG. 1 is a perspective view of an electron gun according to an embodiment of the present invention; FIG. 2A is a perspective view of another embodiment of the present invention; FIG. 2B is a top view of FIG. 2A; FIG. 3 is a cross-sectional view of an electron gun in an embodiment of the present invention; FIG. 4A is a cross-sectional view of a launching device in an embodiment of the invention; FIG. 4B is an enlarged partial view of the flange of FIG. 4A; fig. 6 is a cross-sectional view of a main body portion in an embodiment of the present invention.
According to an embodiment of an aspect of the present invention, as shown in fig. 1 to 4A and 4B, there is provided an emission device for emitting electrons, including: a main body portion 2, a cathode heat shield assembly 3, a control electrode 4, at least one anode 5, and an end cap 6.
Fig. 6 is a cross-sectional view of a main body portion in an embodiment of the present invention.
Specifically, referring to fig. 3, 4A and 6, the main body portion 2 includes: at least four cylindrical electrically conductive electrode positioning rings 21, said electrode positioning rings 21 having the same axial length and height and being arranged to coaxially and sequentially fit, said electrode positioning rings 21 comprising a central positioning ring 213 at the center, an outer positioning ring 215 at the outermost side, and a plurality of intermediate positioning rings 214 between the central positioning ring 213 and the outer positioning ring 215; the at least three cylindrical ceramic rings 22 are respectively arranged between two adjacent electrode positioning rings 21, and the ceramic rings 22 are arranged to block the electric paths of the two adjacent electrode positioning pieces to form an insulation effect; the axial height of the ceramic ring 22 is lower than that of the electrode positioning piece, so that oil pollution caused by mistaken touch in the assembling process can be avoided, and excellent surface breakdown resistance is always kept.
Further, the cathode heat shield assembly 3 includes a cathode assembly 32 adapted to generate electrons, the cathode assembly 32 in turn including a cathode and a filament, mounted in the center positioning ring 213. The control electrode 4 is arranged on said central positioning ring 213. At least one anode 5 is arranged on the intermediate positioning rings 214, respectively. The end cap 6 is bonded to the outer positioning ring 215 and the control electrode 4 and anode 5 extend into the receiving groove 61 of the end cap 6 facing the body part 2.
In an embodiment of the present invention, as shown in fig. 3 to 4B, after the filament of the cathode assembly 32 is heated by energization, a large number of electrons are generated on the surface of the cathode, and the electrons are collected by the control electrode 4 under the action of the high-voltage electric field formed between the cathode and each anode 5 and then emitted to the outside of the electron gun.
According to the embodiment of the invention, at least four electrode positioning rings 21 which have the same axial length and are coaxially and sequentially sleeved are arranged, so that the control electrode 4, at least one anode 5 and the end cover 6 can obtain a coplanar positioning surface during assembly, and the assembly difficulty is reduced; meanwhile, based on the coaxial arrangement of the electrode positioning ring 21, the control electrode 4, the at least one anode 5 and the end cover 6 also have good concentricity after simple adjustment, and the assembly precision is improved.
In an embodiment of the present invention, as shown in fig. 3, the number of anodes 5 may include one or more, such as the first anode 51, the second anode 52, or even more, respectively, disposed on the upper portion of the intermediate positioning ring 214. The number of the anodes is adaptively set, and the number of the anodes can be increased or reduced (at least one anode is ensured) according to production requirements so as to adjust the shape and the microscopic path of the electron beam.
In an embodiment of the present invention, as shown in fig. 3 to 4A, the cathode heat shield assembly 3 further includes a heat shield assembly 31 for supporting the cathode assembly 32, disposed inside the lower end of the center positioning ring 213, contacting and welded with the main body 2. In an exemplary embodiment, as shown in fig. 3 and 4A, the lower end of the center positioning ring 213 forms a radially outwardly projecting enlarged portion in which the heat shield assembly 31 is received.
In one embodiment of the present invention, as shown in fig. 3-4A, the central positioning ring 213 and the intermediate positioning ring 214 are electrically connected to the control electrode 4 and the anode 5, respectively, by spot welding, and the end cap 6 is joined to the outer positioning ring 215 by spot welding. The connection is carried out in a spot welding mode without air tightness requirements, heat input during welding can be effectively reduced, welding deformation and welding stress are reduced, the defect that a thin-wall structure is easy to deform is overcome, and the concentricity and the coaxiality of the control electrode 4, the anode 5 and the end cover 6 are guaranteed. In one exemplary embodiment, each anode includes a top portion, and a cylindrical skirt extending downwardly from the top portion, the lower end of the skirt being welded to an intermediate locating ring 214, the center of the top portion forming an emitter aperture.
FIG. 7 is a perspective view of an electrode positioning ring in an embodiment of the present invention; fig. 8 is a perspective view of a ceramic ring in an embodiment of the invention.
In one embodiment of the present invention, as shown in connection with FIGS. 3-4A and 6-8, each of the outer retaining ring 215 and the intermediate retaining ring 214 is provided with a first boss 211 projecting radially inwardly toward a corresponding one of the ceramic rings 22; each of the ceramic rings 22 is provided with a second boss 221 projecting radially inwardly toward a respective one of the intermediate positioning rings 214 or the central positioning ring 213. By arranging the first boss 211 and the second boss 221, on one hand, a wetting platform and a carrying platform can be provided for the solder, the solder presetting and flow scattering rules are met, and more molten solder is ensured to spread at the welding seam; on the other hand, the vacuum insulation distance is increased, and the voltage resistance is improved. In an embodiment of the present invention, the outer side of each ceramic ring 22 may further include at least one groove, and the groove is arranged to increase a creepage distance of the ceramic surface, so as to improve the insulating capability and the electrical breakdown resistance.
In one embodiment of the present invention, as shown in fig. 4 and 6, each of the first bosses 211 is bonded to a corresponding one of the ceramic rings 22 using a furnace brazing process, and each of the second bosses 221 is bonded to a corresponding one of the intermediate positioning rings 214 or the center positioning ring 213 using a furnace brazing process.
In one embodiment of the present invention, as shown in fig. 7, a plurality of vent holes 212 are provided on the vertical wall of each electrode positioning ring 21, and the first bosses 211 are divided by the vent holes 212 and adapted to form an axial heat dissipation channel for exhausting the gas generated during operation. In one embodiment of the present invention, as shown in fig. 3, the centers of the end cap 6, the anode 5 and the control electrode 4 are provided with axially extending emitting holes 9, and due to the good coaxiality, the reflecting holes are all in a straight line. Fig. 5 is a cross-sectional view of a mount in an embodiment of the invention.
According to another aspect of the present invention, as shown in FIGS. 1 to 5, there is provided an electron gun comprising: the method comprises the following steps: a mounting base 1; and the launching device of any one of the preceding embodiments, mounted on the mount 1. The mounting base 1 wraps the transmitting device in a sealed mode, and can well shield a focusing magnetic field from a high-frequency system.
In one embodiment of the present invention, as shown in fig. 5, the mount 1 includes: a base 11, wherein a cavity is formed in the base 11; a sealed cylinder 12 mounted on the base 11, the lower end of the cylinder 12 communicating with the chamber, the end cap 6 of the launching device being coupled to the upper end of the cylinder 12, the body 2 of the launching device extending into the cylinder 12; a cathode heat shield assembly 3 extending from the lower end of the central positioning ring 213 of the emitter into the central positioning ring 213; and a plurality of external terminals 13 electrically connected to the cathode heat shield assembly 3 and the intermediate positioning ring 214, respectively.
According to the embodiment of the invention, the electron gun is additionally provided with the mounting base 1 and is combined with the end cover 6 in an airtight manner, so that the emitting device does not need high-power welding any more, and only needs simple spot welding for fixation, the occurrence of thermal stress and thermal deformation of the emitting device is reduced, and the coaxiality of the control electrode 4 and each anode 5 is effectively improved. In addition, because the geometric position of the end cover 6 can not interfere the emission hole 9 of the emission device, when sealing welding is carried out, the power and parameters of the welding process are easy to adjust and realize, a complex composite process is creatively converted into a plurality of simple basic processes, the geometric precision of the electron gun is improved, and the manufacturing difficulty of the electron gun is reduced.
In an embodiment of the present invention, as shown in fig. 2A, 2B and 5, each of the external terminals 13 includes a ceramic body 131 and a conductor 132, the ceramic body 131 is mounted on the base 11 to provide an insulating property and effectively avoid the occurrence of arc charging or induction charging; a conductor 132 penetrates the ceramic body 131, one end of the conductor 132 is electrically connected to an external mating conductor, and the other end of the conductor 132 is electrically connected to the corresponding cathode heat shield assembly 3 or the intermediate electrode positioning ring 214, so as to directly or indirectly guide electrons externally connected to the terminal 13 to the cathode heat shield assembly 3 or the electrode positioning ring 21. The method comprises the following specific steps: the cathode structure comprises at least five external terminals 13, wherein the conductors 132 of three external terminals 13 are respectively connected with the first anode 51, the second anode 52 and the control electrode 4 through the electrode positioning piece, and the conductors 132 of two external terminals 13 are directly connected with the filament and the cathode.
In one embodiment of the invention, as shown in fig. 5, an exhaust pipe 14 is further included, adapted to conduct gas out of the chamber.
In one embodiment of the present invention, as shown in fig. 3 and fig. 4A and 4B, the end cap 6 is provided with an annular flange 62 protruding radially outward, and the annular flange 62 abuts against the upper end of the cylinder 12 and is in sealing engagement with the upper end of the cylinder 12. FIG. 9 is a schematic perspective view of a portion of a sealing mold in an embodiment of the invention; FIG. 10 is a perspective view of a sealing mold assembly in an embodiment of the invention; FIG. 11 is an axial cross-sectional view of FIG. 10; FIG. 12 is a perspective view of a coaxiality adjustment apparatus according to an embodiment of the present invention; and fig. 13 is an axial cross-sectional view of fig. 12.
In an embodiment of the present invention, the end cap 6 and the mounting base 1 are designed for cooperation, including but not limited to the above-mentioned design, and it may also include that the axial height of the barrel 12 of the mounting base 1 is higher than the height of the assembled anode, that is, the main body 2 and the anode 5 can be completely embedded into the barrel 12 after assembly welding, and the end cap 6 has no accommodating groove.
As another aspect of the present invention, with reference to fig. 9 to 13, the present invention provides a method for manufacturing the emitting device according to any one of the previous embodiments, including the following steps:
providing a sealing mold 7, said sealing mold 7 comprising: two cylindrical support seats 71, a plurality of positioning posts 72, and a positioning screw 73. The positioning posts 72 include ceramic posts having equal heights and protruding from the inner side of at least one of the two support seats 71, and a plurality of the positioning posts 72 are arranged on a plurality of coaxially arranged circumferences, and at least three ceramic posts are arranged on each circumference for three-post positioning. In addition, each ceramic post not only provides an equal height surface for each ceramic ring 22, but also facilitates insertion or removal during molding or demolding. The positioning screw 73 is arranged through the support base 71.
Thereafter, one end of a plurality of electrode positioning rings 21 and one end of a ceramic ring 22 are placed on one of the support seats 71 such that the positioning posts 72 located on the same circumference are inserted between the adjacent electrode positioning rings 21 and support the ceramic ring 22 to position the electrode positioning rings 21 and the ceramic ring 22 in the radial direction and the positioning screws 73 pass through the center positioning ring 213.
Then, solder is preset at the joint of the adjacent electrode positioning ring 21 and the ceramic ring 22, namely the second boss 221 of the ceramic ring 22 and the first boss 211 of the electrode positioning piece, and the wetting angle of the solder is increased by the bosses.
Thereafter, the other of the two support seats 71 is placed on the other end of the electrode positioning ring 21, and both ends of the positioning screw 73 are locked by the nut 74, so that the two support seats 71 position the electrode positioning ring 21 and the ceramic ring 22 in the axial direction, and the preliminary main body portion 2 is formed. The thermal deformation generated during welding is resisted by the locking effect of the sealing mold 7 and the thermal expansion coefficient of the positioning screw 73 is not lower than that of the main body part 2.
Thereafter, the preliminary body portion 2 is placed in a welding furnace to perform first welding. In the first welding process, because the electrode positioning piece and the ceramic ring 22 have larger difference in material and thermal expansion coefficient, in order to avoid the phenomenon of cracking caused by stress concentration, the temperature of the primary main body part 2 is slowly raised to 900-1100 ℃ along with a welding furnace at the temperature rise rate of 1-3 ℃/min to form the main body part 2; then, carrying out heat preservation and furnace brazing, wherein the heat preservation time comprises 8-12 h, and ensuring element migration and atomic diffusion through long-time heat preservation so as to realize stable combination of the main body part 2; after heat preservation, the main body part 2 is slowly cooled along with the furnace, the cooling rate comprises 0.6-1 ℃/min, and as the element composition and the phase composition of the electrode positioning piece and the ceramic ring 22 have great difference, the cooling rate needs to be reduced as much as possible so as to avoid volume shrinkage caused by too fast phase transformation due to too large cooling speed and further avoid the occurrence of pulling crack of a welding part.
Thereafter, the control electrode 4, the anode 5, and the end cap 6 are sequentially assembled to the main body portion 2 by second welding, in which the control electrode 4 and the anode 5 are welded to the center positioning ring 213 and the intermediate positioning ring 214, respectively.
According to the embodiment of the invention, the plurality of positioning columns are arranged on the supporting seat of the packaging mold, so that each electrode positioning piece can realize a better coaxial effect through simple adjustment; the sealing mould is supplemented with a nut and a positioning screw rod, so that the main body part is in a locked state in the sealing mould to resist thermal deformation generated in the first welding process.
In an embodiment of the present invention, the welding manner of the second welding includes laser welding, pulsed argon arc welding, so as to reduce the influence of welding deformation on the concentricity of the main body portion 2.
In one embodiment of the present invention, as shown in fig. 12 to 13, the control electrode 4, the anode 5 and the end cap 6 are sequentially assembled to the main body 2 by a second welding.
Thereafter, referring to fig. 12 and 13, a coaxiality adjusting device 8 is provided, the coaxiality adjusting device 8 including a positioning cylinder 81, a first housing portion 811 and a first housing portion 812 formed in the positioning cylinder 81, an inner diameter of the first housing portion 812 being larger than an inner diameter of the first housing portion 811, and a plurality of positioning holes 813 and welding holes 814 formed in a standing wall of the first housing portion 812.
Thereafter, at least a part of the body portion 2 of the emitting device is inserted into the first housing portion 811 so that the control electrode 4, the anode 5, and the end cap 6 are located in the first housing portion 812.
Then, sequentially buckling the protective caps 82 with different sizes on the control electrode 4, the anode 5 and the anode 5 on the end cover 6; positioning ends of a plurality of positioning devices 83 are respectively passed through the positioning holes 813 to abut on the protective cap 82, and concentricity of the main body 2, the control electrode 4, the anode 5 and the end cap 6 is adjusted by sequentially operating the positioning devices 83.
Thereafter, the protective cap 82 is removed after a second weld is made.
According to the above embodiment of the present invention, a plurality of protective caps 82 of different sizes are processed in advance, the main body 2 is placed in the first accommodation portion 811, the protective caps 82 adapted to the control electrodes 4 are snapped onto the control electrodes 4, the positioning means 83 is inserted into the first accommodation portion 812 through the positioning holes 813 and abuts on the protective caps 82, the feed distance of the plurality of positioning means 83 is adjusted to adjust the concentricity of the control electrodes 4 and the main body 2, and thereafter, the positioning means 83 is fixed, and the protective caps 82 are spot-welded through the plurality of welding holes 814 and removed. The protective caps 82 of other sizes are selected and the previous operations are repeated to complete the assembly and welding of the plurality of anodes 5 and the end caps 6, and finally the complete emitting device for emitting electrons is obtained. After each welding is completed, a cooling period of 5-10 min is set to reduce heat accumulation and reduce the influence on concentricity accuracy.
In an embodiment of the present invention, as shown in fig. 3 to 4B, after the control electrode 4, the plurality of anodes 5, the end cap 6, and the main body 2 are welded into a whole, the whole is placed in the mounting seat 1 and welded for the third time, so that the annular flange 62 of the end cap 6 is hermetically connected to the positioning cylinder 81 of the mounting seat 1. The welding mode of the third welding comprises continuous laser welding.
In an embodiment of the present invention, after the third welding is completed, the bottom plate of the base 11 of the mounting socket 1 is removed to expose the conductors 132 of the external terminals 13, each of the conductors 132 is electrically connected to the control electrode 4, the first anode 51, the second anode 52, the cathode, and the filament, respectively, and then the bottom plate is mounted and the dust and gas in the assembled electron gun are pumped out through the exhaust pipe 14 by using a titanium pump, so that the inside of the electron gun is in a vacuum state.
Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or to implicitly indicate the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature.
The above-mentioned embodiments are intended to illustrate the objects, technical solutions and advantages of the present invention in further detail, and it should be understood that the above-mentioned embodiments are only exemplary embodiments of the present invention and are not intended to limit the present invention, and any modifications, equivalents, improvements and the like made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (17)
1. An emission device for emitting electrons, comprising:
a main body part (2) comprising:
at least four electrically conductive electrode positioning rings (21), said electrode positioning rings (21) having the same axial length and being arranged to coaxially nest in sequence, said electrode positioning rings (21) comprising a central positioning ring (213) located in the center, an outer positioning ring (215) located at the outermost side, and a plurality of intermediate positioning rings (214) located between the central positioning ring (213) and the outer positioning ring (215); and
at least three ceramic rings (22) respectively arranged between two adjacent electrode positioning rings (21);
a cathode heat shield assembly (3) mounted in the center positioning ring (213);
a control electrode (4) disposed on the central positioning ring (213);
at least one anode (5) arranged on said intermediate positioning ring; and
an end cap (6) bonded to the outer locating ring, the control electrode (4) and anode (5) extending into a receiving groove (61) of the end cap (6) facing the body portion (2).
2. The emitter device according to claim 1, wherein the cathode heat shield assembly (3) comprises:
a cathode assembly (32) adapted to generate electrons; and
a heat shield assembly (31) adapted to support the cathode assembly (32) is disposed within the lower end of the center positioning ring (213).
3. The emitter device according to claim 1, wherein said central positioning ring (213) and intermediate positioning ring (214) are electrically connected to said control electrode (4) and anode (5), respectively, by spot welding, said end cap (6) being joined to said outer positioning ring by spot welding.
4. The launch device according to any one of claims 1-3, wherein each of said outer positioning ring (215) and intermediate positioning ring (214) is provided with a first boss (211) protruding radially inwards towards the respective one ceramic ring (22);
each ceramic ring (22) is provided with a second projection (221) projecting radially inwards towards a respective one of the intermediate positioning rings (214) or the central positioning ring (213).
5. The emitting device of claim 4, wherein each of said first bosses (211) is bonded to a respective one of said ceramic rings (22) using a furnace brazing process,
each of the second bosses (221) is bonded to a corresponding one of the intermediate positioning rings (214) or the center positioning ring (213) using a furnace brazing process.
6. The launcher according to claim 4, wherein a plurality of vent holes (212) are provided in the vertical wall of each electrode positioning ring.
7. The emitter device according to any of claims 1-3, wherein the end cap (6), anode (5), control electrode (4) are provided with an axially extending emitter hole (9) in the centre.
8. An electron gun, comprising:
a mounting seat (1); and
the launch device according to any of claims 1-7, mounted on said mount (1).
9. The electron gun of claim 8, wherein the mount comprises:
a base (11), a cavity being formed in the base (11);
a sealed cylinder (12) mounted on the base (11), the lower end of the cylinder (12) communicating with the chamber, an end cap (6) of the launch device being coupled to the upper end of the cylinder (12), the body portion (2) of the launch device extending into the cylinder (12);
a cathode heat shield assembly (3) extending from a lower end of a center positioning ring (213) of the emitter device into the center positioning ring (213); and
and the external terminals (13) are respectively and electrically connected with the cathode heat shield assembly (3) and the middle positioning ring (214).
10. The electron gun according to claim 9, wherein each of the external terminals comprises:
a ceramic body (131) mounted on the base (11); and
and the conductor (132) penetrates through the ceramic body (131), one end of the conductor (132) is electrically connected with an external matching conductor, and the other end of the conductor is electrically connected with the corresponding cathode heat shield assembly (3) or the middle electrode positioning ring.
11. Electron gun according to claim 9, wherein the end cap (6) is provided with a radially outwardly projecting annular flange (62), the annular flange (62) abutting against the upper end of the barrel (12) and being sealingly engaged with the upper end of the barrel (12).
12. A method of manufacturing an emitter device according to claims 1-7, comprising the steps of:
providing a sealing mould (7), said sealing mould (7) comprising:
two cylindrical support seats (71);
a plurality of positioning posts (72) projecting from the inner side of at least one of the two support seats (71), the plurality of positioning posts (72) being arranged on a plurality of coaxially arranged circumferences; and
the positioning screw rod (73) penetrates through the supporting seat (71);
placing one end of a plurality of electrode positioning rings (21) and one end of a ceramic ring (22) on one of the support seats (71) so that positioning columns (72) located on the same circumference are inserted between adjacent electrode positioning rings (21) and support the ceramic ring (22) to position the electrode positioning rings (21) and the ceramic ring (22) in a radial direction and pass the positioning screws (73) through a central positioning ring;
solder is preset at the joint of the adjacent electrode positioning ring (21) and the ceramic ring (22);
placing the other one of the two supporting seats (71) on the other end of the electrode positioning ring (21), and locking two ends of the positioning screw rod (73) through a nut (74), so that the two supporting seats (71) position the electrode positioning ring (21) and the ceramic ring (22) in the axial direction and form a primary main body part;
placing the preliminary main body part in a welding furnace for first welding to form a main body part (2); and
and (3) sequentially assembling the control electrode (4), the anode (5) and the end cover (6) onto the main body part (2) through second welding, wherein the control electrode (4) and the anode (5) are respectively welded onto the central positioning ring and the middle positioning ring.
13. A production method according to claim 12, wherein the control electrode (4), the anode (5) and the end cap (6) are fitted onto the main body portion (2) in this order by a second welding:
providing a coaxiality adjusting device (8) which comprises a positioning cylinder body (81), wherein a first accommodating part (811) and a second accommodating part (812) are formed in the positioning cylinder body, the inner diameter of the second accommodating part (812) is larger than that of the first accommodating part (811), and a plurality of positioning holes (813) and welding holes (814) are formed in the vertical wall of the second accommodating part;
-inserting at least a part of the body part (2) of the emitting device in said first housing (811) so that said control electrode (4), anode (5) and end cap (6) are located in said second housing (812);
sequentially buckling protective caps (82) with different sizes on the control electrode (4), the anode (5) and the end cover (6); respectively enabling positioning ends of a plurality of positioning devices (83) to pass through the positioning holes (813) to abut against the protective cap (82), and adjusting the concentricity of the main body part (2), the control electrode (4), the anode (5) and the end cover (6) by operating the positioning devices (82);
the protective cap (82) is removed after the second weld is made.
14. The manufacturing method according to claim 13, after the second welding of the emitting device, assembling the emitting device into the mounting seat (1), and hermetically bonding the emitting device with the mounting seat (1) through third welding.
15. A manufacturing method according to claim 12, wherein the welding manner of the second welding includes laser welding, pulsed argon arc welding to reduce the influence of welding deformation on the concentricity of the main body portion (2).
16. The method of manufacturing according to claim 12, wherein the positioning screw (73) has a coefficient of thermal expansion not lower than that of the main body portion.
17. The manufacturing method according to claim 14, wherein the welding manner of the third welding includes continuous laser welding, argon arc welding, high-frequency brazing, and the like.
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| CN202210124227.1A CN114464512B (en) | 2022-02-10 | 2022-02-10 | Emission device for emitting electrons, preparation method thereof and electron gun |
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| CN114464512B (en) | 2023-08-01 |
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