CN114459449A - 一种半球谐振陀螺谐振子与平板电极装配质量检测方法 - Google Patents
一种半球谐振陀螺谐振子与平板电极装配质量检测方法 Download PDFInfo
- Publication number
- CN114459449A CN114459449A CN202210142159.1A CN202210142159A CN114459449A CN 114459449 A CN114459449 A CN 114459449A CN 202210142159 A CN202210142159 A CN 202210142159A CN 114459449 A CN114459449 A CN 114459449A
- Authority
- CN
- China
- Prior art keywords
- equivalent
- assembly
- capacitance
- equivalent assembly
- hemispherical resonator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001514 detection method Methods 0.000 title abstract description 6
- 238000000034 method Methods 0.000 claims abstract description 42
- 239000003990 capacitor Substances 0.000 claims abstract description 39
- 239000013078 crystal Substances 0.000 claims description 18
- 238000005259 measurement Methods 0.000 abstract description 13
- 238000011156 evaluation Methods 0.000 description 9
- 238000006243 chemical reaction Methods 0.000 description 6
- 238000013461 design Methods 0.000 description 4
- 238000004364 calculation method Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000013507 mapping Methods 0.000 description 2
- 238000000691 measurement method Methods 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000008358 core component Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000005350 fused silica glass Substances 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Gyroscopes (AREA)
Abstract
Description
Claims (10)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202210142159.1A CN114459449B (zh) | 2022-02-16 | 2022-02-16 | 一种半球谐振陀螺谐振子与平板电极装配质量检测方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202210142159.1A CN114459449B (zh) | 2022-02-16 | 2022-02-16 | 一种半球谐振陀螺谐振子与平板电极装配质量检测方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN114459449A true CN114459449A (zh) | 2022-05-10 |
CN114459449B CN114459449B (zh) | 2023-03-24 |
Family
ID=81412803
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN202210142159.1A Active CN114459449B (zh) | 2022-02-16 | 2022-02-16 | 一种半球谐振陀螺谐振子与平板电极装配质量检测方法 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN114459449B (zh) |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103644901A (zh) * | 2013-12-05 | 2014-03-19 | 中国电子科技集团公司第二十六研究所 | 用于半球谐振陀螺敏感表头的装配夹具及装配检测系统 |
CN109813340A (zh) * | 2019-02-21 | 2019-05-28 | 哈尔滨工业大学 | 半球谐振陀螺信号检测系统及考虑检测电极形位误差的检测方法 |
CN211346826U (zh) * | 2019-11-11 | 2020-08-25 | 中国船舶重工集团公司第七一七研究所 | 一种半球谐振陀螺精密装调和检测装置 |
CN113432590A (zh) * | 2021-06-25 | 2021-09-24 | 中国船舶重工集团公司第七0七研究所 | 基于光谱共焦的半球谐振陀螺精密装配装置及其调整方法 |
CN113514082A (zh) * | 2021-07-14 | 2021-10-19 | 中国人民解放军国防科技大学 | 微半球谐振陀螺结构装配夹具、装配系统及装配方法 |
CN113624220A (zh) * | 2021-08-06 | 2021-11-09 | 大连理工大学 | 自动化原位成像半球谐振陀螺仪装配装置及装配方法 |
CN113804172A (zh) * | 2021-09-29 | 2021-12-17 | 中国船舶重工集团公司第七0七研究所 | 平面电极结构半球谐振陀螺精密装配装置及方法 |
US20220049959A1 (en) * | 2019-11-13 | 2022-02-17 | National University Of Defense Technology | Micro hemispherical resonator gyroscope, and an assembly method and wafer fixture |
-
2022
- 2022-02-16 CN CN202210142159.1A patent/CN114459449B/zh active Active
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103644901A (zh) * | 2013-12-05 | 2014-03-19 | 中国电子科技集团公司第二十六研究所 | 用于半球谐振陀螺敏感表头的装配夹具及装配检测系统 |
CN109813340A (zh) * | 2019-02-21 | 2019-05-28 | 哈尔滨工业大学 | 半球谐振陀螺信号检测系统及考虑检测电极形位误差的检测方法 |
CN211346826U (zh) * | 2019-11-11 | 2020-08-25 | 中国船舶重工集团公司第七一七研究所 | 一种半球谐振陀螺精密装调和检测装置 |
US20220049959A1 (en) * | 2019-11-13 | 2022-02-17 | National University Of Defense Technology | Micro hemispherical resonator gyroscope, and an assembly method and wafer fixture |
CN113432590A (zh) * | 2021-06-25 | 2021-09-24 | 中国船舶重工集团公司第七0七研究所 | 基于光谱共焦的半球谐振陀螺精密装配装置及其调整方法 |
CN113514082A (zh) * | 2021-07-14 | 2021-10-19 | 中国人民解放军国防科技大学 | 微半球谐振陀螺结构装配夹具、装配系统及装配方法 |
CN113624220A (zh) * | 2021-08-06 | 2021-11-09 | 大连理工大学 | 自动化原位成像半球谐振陀螺仪装配装置及装配方法 |
CN113804172A (zh) * | 2021-09-29 | 2021-12-17 | 中国船舶重工集团公司第七0七研究所 | 平面电极结构半球谐振陀螺精密装配装置及方法 |
Non-Patent Citations (2)
Title |
---|
宋祥彦: "《统计质量评价理论基础》", 31 December 2013 * |
杨峰等: "微型半球陀螺平面电极装配方法设计", 《压电与声光》 * |
Also Published As
Publication number | Publication date |
---|---|
CN114459449B (zh) | 2023-03-24 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US3753373A (en) | Transducer system | |
JP2805231B2 (ja) | 圧力センサ | |
CN110319971B (zh) | 一种用于测量双极电容式真空计内压力的测量电路 | |
CN204832352U (zh) | 一种相位延迟积分的小电容测量仪 | |
CN110044510B (zh) | Igbt模块测温电路、测温方法及计算机可读存储介质 | |
CN110501575A (zh) | 超高精度快速微电容测量系统 | |
CN111998841A (zh) | 一种半球谐振子芯轴振动检测电路及装置 | |
CN107643227B (zh) | 基于石英晶体微天平的液体密度和粘度的测量装置及方法 | |
CN114459449A (zh) | 一种半球谐振陀螺谐振子与平板电极装配质量检测方法 | |
CN106885948A (zh) | 一种激光调高器电容测量装置 | |
CN204177872U (zh) | 一种绝对电容和差动电容测量电路 | |
CN105806207A (zh) | 一种便携式两金属体间隙测量系统 | |
CN101441236A (zh) | 基于文氏电桥和锁相环的电容传感器电路 | |
CN207472707U (zh) | 基于石英晶体微天平的液体密度和粘度的测量装置 | |
CN210464785U (zh) | 一种双极电容式真空计及其对应的测量电路 | |
CN100468006C (zh) | 具有辅助敏感单元的谐振式硅微机械传感器 | |
CN114279626B (zh) | 一种基于薄膜电容器的气体真空度检测方法及系统 | |
WO2023134499A1 (zh) | 基于声表面波传感器的自供电压力测量系统及其工作方法 | |
CN210572495U (zh) | 自测量电路 | |
CN108896131B (zh) | 射频导纳物位仪中基于温度补偿的物位测量单元及物位仪 | |
CN110609180A (zh) | 一种基于振动电容式的非接触式静电测试传感器 | |
JP2001304945A (ja) | 高周波数水晶振動子を用いた超微量質量の検出装置及びその校正方法 | |
Xiong et al. | The design of film thickness measure system based on capacitance sensor | |
Shi et al. | A High-Precision Capacitive Absolute Angle Position Sensor with Improved Temperature Performance | |
Gang et al. | The research on high sensitivity and anti-saturation of capacitance sensors for measuring yarn evenness |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PB01 | Publication | ||
PB01 | Publication | ||
SE01 | Entry into force of request for substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
GR01 | Patent grant | ||
GR01 | Patent grant | ||
TR01 | Transfer of patent right |
Effective date of registration: 20250123 Address after: Room 1107, 11 / F, National University Science Park, Harbin Institute of technology, No. 434, youyou street, Nangang District, Harbin City, Heilongjiang Province Patentee after: Harbin Institute of Technology Asset Management Co.,Ltd. Country or region after: China Patentee after: Zeng Qingshuang Patentee after: Yi Guoxing Patentee after: Xi Boqi Patentee after: Fei Weidong Patentee after: Zhao Yu Patentee after: Xie Weinan Patentee after: Wei Zhennan Patentee after: Sun Yanyu Address before: 150001 No. 92 West straight street, Nangang District, Heilongjiang, Harbin Patentee before: HARBIN INSTITUTE OF TECHNOLOGY Country or region before: China |
|
TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20250219 Address after: Room 1107, 11 / F, National University Science Park, Harbin Institute of technology, No. 434, youyou street, Nangang District, Harbin City, Heilongjiang Province Patentee after: Harbin Institute of Technology Asset Management Co.,Ltd. Country or region after: China Patentee after: Harbin Yikun Intelligent Technology Co.,Ltd. Patentee after: Harbin Huichuang Information Technology Partnership Enterprise (L.P.) Address before: Room 1107, 11 / F, National University Science Park, Harbin Institute of technology, No. 434, youyou street, Nangang District, Harbin City, Heilongjiang Province Patentee before: Harbin Institute of Technology Asset Management Co.,Ltd. Country or region before: China Patentee before: Zeng Qingshuang Patentee before: Yi Guoxing Patentee before: Xi Boqi Patentee before: Fei Weidong Patentee before: Zhao Yu Patentee before: Xie Weinan Patentee before: Wei Zhennan Patentee before: Sun Yanyu |
|
TR01 | Transfer of patent right |