CN114457417B

CN114457417B - Ceramic coating graphite tray rotating assembly

Info

Publication number: CN114457417B
Application number: CN202210271334.7A
Authority: CN
Inventors: 邹明蓓; 朱佰喜; 薛抗美; 雷宏涛; 董志江
Original assignee: Guangzhou Zhicheng Semiconductor Co ltd
Current assignee: Guangzhou Zhicheng Semiconductor Co ltd
Priority date: 2022-03-18
Filing date: 2022-03-18
Publication date: 2022-11-11
Anticipated expiration: 2042-03-18
Also published as: CN114457417A

Abstract

The invention provides a ceramic coating graphite tray rotating assembly which comprises a bearing disc and a cover plate, wherein a first positioning structure is arranged on the bearing disc, a second positioning structure is arranged at the bottom of the cover plate, and the first positioning structure and the second positioning structure are matched with each other. The first positioning structure is a first groove or a first boss, the second positioning structure is a second boss or a second groove, the first groove and the second boss are matched with each other, and the first boss and the second groove are matched with each other. The bearing plate and the cover plate are positioned by using the excircle skirt edge as the center, and the concave-convex groove is used for positioning the rotating angle direction between the bearing plate and the cover plate, so that the existing method for limiting through gravity and friction between the two plates is replaced, and the defect that the growth condition of a product is changed due to relative displacement between the bearing plate and the cover plate caused by inertia and airflow during rotation is overcome, thereby effectively improving the growth quality and yield of the product.

Description

Ceramic coating graphite tray rotating assembly

Technical Field

The invention relates to the technical field of semiconductor device or material manufacturing, in particular to a ceramic coating graphite tray rotating assembly which is suitable for all graphite trays used for SiC epitaxial wafer reaction chambers or high-temperature CVD epitaxial growth furnaces.

Background

In recent years, with the high national importance of the third generation semiconductor industry and the promotion of new industries such as new energy automobiles, AI, ioT, 5G and the like, the domestic third generation semiconductor industry is rapidly developing.

The silicon carbide power semiconductor device provides an opportunity for the improvement of the next generation power electronic technology with smaller volume, higher speed, lower cost and higher efficiency, and has important application prospect and industrial value in the fields of smart grids, rail transit, electric vehicles, new energy grid connection, switching power supplies, industrial motors, household appliances and the like.

At present, the Si C epitaxial wafer growth technology mainly adopts a chemical vapor deposition method, an epitaxial wafer reaction chamber is the most core device in the chemical vapor deposition process, and a graphite tray component is the basis of the reaction chamber.

The graphite tray assembly generally comprises a bearing tray and a cover plate, and the bearing tray is driven by a mechanical rotating mechanism to rotate. The prior art mainly has the following defects: the incomplete positioning between the bearing disc and the cover plate, when the rotation movement is carried out, the relative displacement is generated between the bearing disc and the cover plate due to the inertia and the action of the air flow in the reaction cavity, so that the growth condition of the product is changed, and the yield of the product is influenced.

Disclosure of Invention

The invention provides a ceramic coating graphite tray rotating assembly, which is used for solving the technical problems in the background technology: the incomplete positioning between the bearing disc and the cover plate, when the rotation movement is carried out, the relative displacement is generated between the bearing disc and the cover plate due to the inertia and the action of the air flow in the reaction cavity, so that the growth condition of the product is changed, and the yield of the product is influenced.

In order to solve the technical problem, the invention discloses a ceramic coating graphite tray rotating assembly which comprises a bearing disc and a cover plate, wherein a first positioning structure is arranged on the bearing disc, a second positioning structure is arranged at the bottom of the cover plate, and the first positioning structure and the second positioning structure are matched with each other.

Preferably, the first positioning structure is a first groove or a first boss, the second positioning structure is a second boss or a second groove, the first groove and the second boss are matched with each other, and the first boss and the second groove are matched with each other.

Preferably, the first groove and the second groove are both kidney-shaped grooves, and the first boss and the second boss are both kidney-shaped bosses;

or the first groove and the second groove are both circular hole grooves, and the first boss and the second boss are both cylindrical bosses;

or the first groove and the second groove are both triangular grooves, and the first boss and the second boss are both kidney-shaped bosses and are triangular bosses.

Preferably, the first positioning structure is arranged at a non-central position of the carrying tray, and the second positioning structure is arranged at a non-central position of the bottom of the cover plate.

Preferably, bear dish and apron and use the excircle shirt rim of central location to carry out the central point and put the restriction, first location structure and second location structure all set up on the excircle shirt rim that corresponds.

Preferably, the coating material of the carrier tray and the cover plate is Si C material.

Preferably, the lower extreme circumference of bearing the dish evenly has laid a plurality of installation mechanisms, installation mechanism includes:

the left side and the right side of the upper end of the mounting shell are symmetrically provided with supporting legs, the supporting legs are fixedly arranged at the lower end of the bearing plate, an adjusting cavity is arranged in the mounting shell, the left side and the right side of the upper end and the lower end of the mounting shell are communicated with a sliding cavity, the right side of the lower end of the mounting shell is provided with a first opening in a through mode, the right side of the upper end of the mounting shell is provided with a second opening in a through mode, the first opening and the second opening are located on different vertical planes, and the adjusting cavity is respectively communicated with the sliding cavity, the first opening and the second opening;

the two fixed shells are symmetrically arranged at the upper end and the lower end of the mounting shell, a movable cavity is arranged inside the fixed shells, one end, far away from the mounting shell, of each fixed shell is provided with a third opening in a penetrating manner, the third opening is communicated with the movable cavity, and a rotating shaft is rotatably arranged inside the movable cavity;

the four first matching wheels are symmetrically arranged in the movable cavities at the upper side and the lower side in a two-in-two mode, and the first matching wheels are fixedly connected with the rotating shaft;

the four matching wheels II correspond to the four matching wheels I one by one, the matching wheels II are matched with the matching wheels I, the matching wheels II are rotatably connected with the mounting seat, the mounting seat is fixedly connected with the supporting rod, the supporting rod penetrates through the opening III to be communicated with the outside, a spring I is fixedly arranged between one end of the mounting seat, far away from the matching wheels II, and one end of the fixing shell, provided with the opening III, and is sleeved on the supporting rod;

the two working discs are respectively arranged corresponding to the fixing shells on the upper side and the lower side, the left side and the right side of one end, close to the fixing shells, of each working disc are provided with a first clamping groove, the first clamping grooves are matched with the supporting rods outside, and the left end and the right end of each working disc are symmetrically provided with a second clamping groove.

Preferably, the mounting mechanism further comprises: the connecting shaft is rotatably arranged inside the adjusting cavity, the left side and the right side of the connecting shaft are symmetrically provided with thread sections, the thread sections are in threaded connection with sliding blocks, the sliding blocks are slidably arranged inside the adjusting cavity, the upper end and the lower end of each sliding block are symmetrically connected with connecting blocks, the connecting blocks penetrate through the sliding cavity to be communicated with the outside, the connecting blocks are in sliding connection with the sliding cavity, a plurality of clamping blocks are uniformly distributed at intervals along the vertical direction at one end, close to the working disc, of the outside connecting block, and the clamping blocks are matched with the clamping grooves II;

the first operating block is fixedly connected with the rotating sleeve, a sliding groove is formed in one end, far away from the first operating block, of the rotating sleeve, the rotating sleeve penetrates through the side end of the mounting shell to enter the adjusting cavity, the sliding groove is in sliding connection with the cylindrical section of the connecting shaft, a second spring is arranged between the first operating block and the mounting shell, and the second spring is sleeved on the rotating sleeve;

the second gear is arranged in the adjusting cavity and fixedly connected with a rotating sleeve in the adjusting cavity, the second gear is meshed with the first gear and the third gear, the first gear penetrates through the first opening, the rotating shaft on the lower side penetrates through the side end of the movable cavity on the lower side and is fixedly connected with the first gear, the third gear penetrates through the second opening, and the rotating shaft on the upper side penetrates through the side end of the movable cavity on the upper side and is fixedly connected with the third gear;

the clamping block on the right side is connected with the rotating shaft in a sliding mode.

Preferably, bear the dish lower extreme and be connected with the mounting disc through a plurality of cooperation mechanisms, a plurality of cooperation mechanisms along bear dish lower extreme week side interval arrangement, cooperation mechanism includes:

the upper end of the supporting column is fixedly connected with the lower end of the bearing disc;

the matching block is fixedly connected with the lower end of the supporting column, a connecting groove is formed in the upper end of the mounting disc, the supporting column and the matching block are used for being inserted into the connecting groove, a placing groove is formed in the upper side of the right end of the matching block, a matching opening is formed in the lower side of the right end of the matching block, a matching cavity I is formed in the upper side of the interior of the matching block, a matching cavity II is formed in the lower side of the interior of the matching cavity I, the placing groove is communicated with the matching cavity I, the matching opening is communicated with the matching cavity II, the matching cavity II is communicated with a matching cavity III, and the matching cavity III is arranged in the matching block;

the guide wheel is arranged inside the placing groove and is in rotating connection with the mounting block, the mounting block penetrates through the left end of the placing groove to enter the first matching cavity and is fixedly connected with the first pushing block, the first pushing block is in sliding connection with the second pushing block, and one end, far away from the second pushing block, of the first pushing block is in sliding connection with the upper end of the first matching cavity;

the first fixing block penetrates through the matching port to enter the second matching cavity and is fixedly connected with the buffer plate, the buffer plate is slidably arranged in the second matching cavity, and a plurality of springs III are fixedly arranged between the buffer plate and the second matching cavity;

the second fixing block is arranged in the third matching cavity in a sliding mode, penetrates through the lower end of the third matching cavity, enters the second matching cavity to be matched with the first fixing block, a cavity is formed in one side, away from the first fixing block, of the second fixing block, a limiting plate is arranged inside the cavity in a sliding mode along the left-right direction, and a plurality of springs IV are fixedly arranged between the limiting plate and the cavity;

the end, far away from the first pushing block, of the second pushing block penetrates through the lower end of the first matching cavity to enter the third matching cavity, and the second pushing block, entering the third matching cavity, penetrates through the upper end of the cavity and is in contact with the limiting plate.

Preferably, the fitting mechanism further includes:

the reel is arranged inside the matching block and is connected with a connecting rope, one end of the connecting rope is fixedly connected with the limiting plate, and the end, far away from the required limiting plate, of the connecting rope is fixedly connected with the second operation block;

the support column is provided with a first inner cavity for the connection rope to pass through.

The technical solution of the present invention is further described in detail by the accompanying drawings and embodiments.

Drawings

The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the principles of the invention and not to limit the invention. In the drawings:

FIG. 1 is a perspective view showing a high temperature resistant ceramic coated graphite tray assembly of the present invention positioned using a skirt and semi-kidney shaped groove bosses.

FIG. 2 is a perspective view showing a high temperature resistant ceramic coated graphite tray assembly of the present invention positioned using a skirt and cylindrical groove bosses.

FIG. 3 is a perspective view showing a high temperature resistant ceramic coated graphite tray assembly of the present invention positioned using a skirt and triangular groove bosses;

FIG. 4 is a schematic view of a connection structure of a carrier tray and a mounting mechanism according to the present invention;

FIG. 5 is a front view of the mounting mechanism of the present invention;

FIG. 6 is a side view of the mounting mechanism of the present invention;

fig. 7 is an enlarged schematic view of the area a in fig. 4.

In the figure: 1. a carrier tray; 2. a cover plate; 3. a first positioning structure; 31. a kidney-shaped groove; 32. a circular hole groove; 33. a triangular groove; 4. a second positioning structure; 41. a waist-shaped boss; 42. a cylindrical boss; 43. a triangular boss; 5. mounting a shell; 501. an adjustment chamber; 502. a sliding cavity; 503. a first opening; 504. a second opening; 505. connecting blocks; 506. a working plate; 507. a card slot; 508. a second clamping groove; 509. a clamping block; 510. a first gear; 511. a second gear; 512. a third gear; 513. a connecting shaft; 514. a slider; 515. a stationary case; 516. a first matching wheel; 517. a support leg; 518. rotating the sleeve; 519. a sliding groove; 520. a first operation block; 521. a second spring; 522. a movable cavity; 523. a second matching wheel; 524. a support bar; 525. opening three; 526. a first spring; 527. a mounting seat; 528. a rotating shaft; 6. a matching block; 601. a mating port; 602. leading to sleepiness; 603. mounting blocks; 604. a limiting plate; 605. a first matching cavity; 606. a first pushing block; 607. a second pushing block; 608. a matching cavity III; 609. a second fixed block; 610. a cavity; 611. a fourth spring; 612. a first fixed block; 613. a buffer plate; 614. a third spring; 615. a second matching cavity; 616. a reel; 617. connecting ropes; 618. a second operation block; 619. a placement groove; 620. fixing grooves; 7. installing a disc; 71. a connecting groove; 8. and (4) a support column.

Detailed Description

The preferred embodiments of the present invention will be described in conjunction with the accompanying drawings, and it will be understood that they are described herein for the purpose of illustration and explanation and not limitation.

In addition, the descriptions related to the first, the second, etc. in the present invention are only used for description purposes, do not particularly refer to an order or sequence, and do not limit the present invention, but only distinguish components or operations described in the same technical terms, and are not understood to indicate or imply relative importance or implicitly indicate the number of indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature. In addition, technical solutions and technical features between various embodiments can be combined with each other, but must be realized by a person skilled in the art, and when the technical solutions are contradictory or cannot be realized, the combination of the technical solutions should be considered to be absent and not be within the protection scope of the present invention.

The prior art mainly has the following defects: the mechanical rotating mechanism holds the bearing tray to rotate, and the cover plate and the bearing tray are limited in the center and have no limitation in the direction of relative rotation angle, so that the cover plate can shift in the relative angle direction. Meanwhile, the reaction chamber has airflow flowing from front to back, the cover plate is slightly suspended and has poor contact due to the airflow, and irregular slight shaking and sliding are easy to occur between the bearing plate and the cover plate. In the process, the position deviation of the cover plate and the wafer chip relative to the angular direction of the bearing plate occurs to influence the change of local growth process parameters and conditions of the product, thereby influencing the uniformity of process indexes of the product and causing the reduction of the yield of the product.

Aiming at the defects, the invention limits the sliding and deflection in the angle direction through the center positioning structure (the following or other existing center positioning structures can be adopted) between the cover plate and the bearing plate and the concave-convex structure, solves the problem that the product generates uncontrollable position movement, ensures the stability of the growth environment and parameters of the product, and improves the uniformity of the process index of the product and the yield of the product; the following examples are specific:

example 1:

the embodiment of the invention provides a ceramic coating graphite tray rotating assembly which is used for a high-temperature CVD epitaxial growth furnace for epitaxial growth of a high-temperature Si C wafer. As shown in fig. 1, a first positioning structure 3 is disposed on the bearing tray 1, a second positioning structure 4 is disposed at the bottom of the cover plate 2, and the first positioning structure 3 and the second positioning structure 4 are matched with each other.

Preferably, the first positioning structure 3 is a first groove or a first boss, the second positioning structure 4 is a second boss or a second groove, the first groove and the second boss are matched with each other, and the first boss and the second groove are matched with each other.

Specifically, the first groove and the second groove are both kidney-shaped grooves 31, and the first boss and the second boss are both kidney-shaped bosses 41;

preferably, the first positioning structure 3 is disposed at a non-central position of the carrier tray 1, and the second positioning structure 4 is disposed at a non-central position of the bottom of the cover plate 2.

Preferably, the bearing disc 1 and the cover plate 2 are limited in central position by using a centrally positioned outer circular skirt, and the first positioning structure 3 and the second positioning structure 4 are both arranged on the corresponding outer circular skirt. The ring may also be used to centre the cover plate 2 using a ring-shaped configuration.

Preferably, the coating material of the graphite tray rotating assembly is a Si C material.

The use of the separated concave-convex groove can protect the high-temperature resistant ceramic (such as Si C) coating disk from the problems of poor product process stability, poor yield and the like caused by relative displacement caused by the influence of rotary motion and air flow.

The beneficial effects of the above technical scheme are: through the mutual spacing of recess and boss/tongue, prevent to bear between dish 1 and the apron 2, under the disturbance of mechanical rotation and side direction air current, the relative position's between apron 2, the dish 1 and the product of bearing that the relative slip that takes place leads to change, guarantee the technological stability and the yield of product.

According to the technical scheme, the excircle skirt edge is used for positioning between the bearing disc 1 and the cover plate 2, the concave-convex groove is used for positioning in the direction of the rotating angle between the bearing disc 1 and the cover plate 2, the existing method for limiting through gravity and friction between the two discs is replaced, and the defect that the growth condition of a product is changed due to relative displacement between the bearing disc 1 and the cover plate 2 caused by inertia and air flow during rotation is overcome, so that the growth quality and the yield of the product are effectively improved.

Example 2

On the basis of embodiment 1, as shown in fig. 2, the first groove and the second groove are both circular hole grooves 32, and the first boss and the second boss are both cylindrical bosses 42; other technical contents refer to example 1.

Example 3

On the basis of embodiment 1, as shown in fig. 3, both the first groove and the second groove are triangular grooves 33, and both the first boss and the second boss are kidney-shaped bosses 41 and triangular bosses 43; other technical contents refer to example 1.

Example 4

On the basis of any one of embodiments 1 to 3, as shown in fig. 4 to 6, a plurality of mounting mechanisms are uniformly distributed on the lower end of the carrier tray 1 in the circumferential direction, and each mounting mechanism includes:

the left side and the right side of the upper end of the mounting shell 5 are symmetrically provided with supporting legs 517, the supporting legs 517 are fixedly arranged at the lower end of the bearing disc 1, an adjusting cavity 501 is arranged inside the mounting shell 5, the left side and the right side of the upper end and the lower end of the mounting shell 5 are communicated with a sliding cavity 502, the right side of the lower end of the mounting shell 5 is provided with a first opening 503 in a penetrating manner, the right side of the upper end of the mounting shell 5 is provided with a second opening 504 in a penetrating manner, the first opening 503 and the second opening 504 are located on different vertical planes, and the adjusting cavity 501 is respectively communicated with the sliding cavity 502, the first opening 503 and the second opening 504;

the two fixed shells 515 are symmetrically arranged at the upper end and the lower end of the mounting shell 5, a movable cavity 522 is arranged in each fixed shell 515, one end, far away from the mounting shell 5, of each fixed shell 515 is provided with a third opening 525 in a penetrating manner, the third openings 525 are communicated with the movable cavity 522, and a rotating shaft 528 is rotatably arranged in each movable cavity 522;

the four first matching wheels 516 are symmetrically arranged in the movable cavities 522 at the upper side and the lower side in a pairwise group, and the first matching wheels 516 are fixedly connected with the rotating shaft 528;

the four fitting wheels 523, the four fitting wheels 523 correspond to the four fitting wheels 516 one by one, the fitting wheels 523 are fitted (slidably connected) with the fitting wheels 516 one, the fitting wheels 523 are rotatably connected with the mounting seat 527, the mounting seat 527 is fixedly connected with the supporting rod 524, the supporting rod 524 penetrates through the opening three 525 and is communicated with the outside, a first spring 526 is fixedly arranged between one end of the mounting seat 527, which is far away from the fitting wheels 523, and one end of the fixing shell 515, which is provided with the opening three 525, and the first spring 526 is sleeved on the supporting rod 524;

the two working discs 506 are respectively arranged corresponding to the fixed shells 515 on the upper side and the lower side, the left side and the right side of one end, close to the fixed shells 515, of each working disc 506 are provided with a first clamping groove 507, each clamping groove 507 is matched with the supporting rod 524 outside, and the left end and the right end of each working disc 506 are symmetrically provided with a second clamping groove 508;

the connecting shaft 513 is rotatably arranged in the adjusting cavity 501, threaded sections are symmetrically arranged on the left side and the right side of the connecting shaft 513, the threaded sections are in threaded connection with the sliding block 514, the sliding block 514 is slidably arranged in the adjusting cavity 501, the upper end and the lower end of the sliding block 514 are symmetrically connected with the connecting block 505, the connecting block 505 penetrates through the sliding cavity 502 to be communicated with the outside, the connecting block 505 is in sliding connection with the sliding cavity 502, a plurality of clamping blocks 509 are uniformly distributed at intervals along the vertical direction at one end, close to the working disc 506, of the outside connecting block 505, and the clamping blocks 509 are matched with the clamping grooves II 508;

the first operating block 520 is fixedly connected with the rotating sleeve 518, a sliding groove 519 is formed in one end, away from the first operating block 520, of the rotating sleeve 518, the rotating sleeve 518 penetrates through the side end of the mounting shell 5 to enter the adjusting cavity 501, the sliding groove 519 is in sliding connection with the cylindrical section of the connecting shaft 513 (the sliding groove can be in key fit with the connecting shaft 513 to drive the connecting shaft to rotate through the rotating sleeve), a second spring 521 is rotatably arranged between the first operating block 520 and the mounting shell 5, and the second spring 521 is sleeved on the rotating sleeve 518; the connecting shaft can also be driven to rotate by the driving motor independently, and is not driven to rotate by the rotating sleeve.

The second gear 511 is arranged in the adjusting cavity 501, the second gear 511 is fixedly connected with the rotating sleeve 518 in the adjusting cavity 501, the second gear 511 is meshed with the first gear 510 and the third gear 512, the first gear 510 penetrates through the first opening 503, the rotating shaft 528 on the lower side penetrates through the side end of the movable cavity 522 on the lower side and is fixedly connected with the first gear 510, the third gear 512 penetrates through the second opening 504, and the rotating shaft 528 on the upper side penetrates through the side end of the movable cavity 522 on the upper side and is fixedly connected with the third gear 512;

the right latch 509 is slidably coupled to the rotation shaft 528.

The beneficial effects of the above technical scheme are:

the installation mechanism is arranged for installing and adjusting the position of the working disc 506, the working disc 506 is used for cultivating semiconductor devices (or products of the products/epitaxial reaction), the working disc 506 is arranged on the upper side and the lower side of the installation mechanism, so that the working disc 506 is arranged in a double-layer mode, the production quantity of the semiconductor devices is improved, when the working disc 506 needs to be disassembled, the first operation block 520 is firstly rotated to drive the rotating sleeve 518 to rotate, the rotating sleeve 518 drives the connecting shaft 513 to rotate, the connecting shaft 518 rotates to drive the sliding block 514 to move, the sliding block 514 moves to drive the connecting block 505 to move, the clamping block 509 is separated from the matching with the clamping groove II 508, and then the working disc 506 can be disassembled;

if the height of the lower working disc 506 needs to be adjusted, after the clamping block 509 is disengaged from the clamping groove II 508, the first operating block 520 is pulled, so that the rotating sleeve 518 moves, the gear II 511 is driven to be meshed with the gear I510, then the first operating block 520 is rotated to drive the gear II 511 to rotate, the gear I510 is driven to rotate, the rotating shaft 528 on the lower side drives the matching wheel I516 on the upper side to rotate, the diameter of the matching wheel I516 continuously changes, the matching wheel II 523 matched with the rotating shaft is pushed to move in the up-down direction, the supporting rod 524 on the lower side is driven to move in the up-down direction, the movement of the supporting rod 524 is kept stable by arranging the spring I526, the working disc 506 on the lower side is driven to move up and down, and the purpose of adjusting the height of the working disc 506 on the lower side is achieved; similarly, if the position of the upper working plate 506 needs to be adjusted, the first operating block 520 is pulled, so that the second gear 511 is meshed with the third gear 512; when the height position of the working disc 506 is adjusted or the working disc 506 is installed, the first operation block 520 is rotated after the first clamping groove 507 of the working disc 506 is matched with the supporting rod 524, so that the clamping block 509 is matched with the second clamping groove 508, the purpose of fixing the working disc 506 is achieved, a semiconductor device can be conveniently installed on the working disc 506 by adjusting the position of the upper working disc 506 and the lower working disc 506, and the working disc 506 and the installation mechanism can be detachably connected to facilitate replacement of the working disc 506.

Example 5

On the basis of any one of embodiments 1 to 4, as shown in fig. 4 and 7, the lower end of the carrier tray 1 is connected to the mounting tray through a plurality of engaging mechanisms, the plurality of engaging mechanisms are arranged at intervals along the circumferential side of the lower end of the carrier tray 1, and the engaging mechanisms include:

the upper end of the supporting column 8 is fixedly connected with the lower end of the bearing plate 1;

the matching block 6 is fixedly connected with the lower end of the supporting column 8, a connecting groove 71 is formed in the upper end of the mounting disc 7, the supporting column 8 and the matching block 6 are used for being inserted into the connecting groove 71, a placing groove 619 is formed in the upper side of the right end of the matching block 6, a matching opening 601 is formed in the lower side of the right end of the matching block 6, a matching cavity I605 is formed in the upper side of the interior of the matching block 6, a matching cavity II 615 is formed in the lower side of the interior of the matching cavity I605, the placing groove 619 is communicated with the matching cavity I605, the matching opening 601 is communicated with the matching cavity II 615, the matching cavity II 615 is communicated with a matching cavity III 608, and the matching cavity III 608 is formed in the matching block 6;

the guide wheel 602 is arranged inside the placing groove 619, the guide wheel 602 is rotatably connected with the mounting block 603, the mounting block 603 penetrates through the left end of the placing groove 619 to enter the first matching cavity 605 to be fixedly connected with the first pushing block 606, the first pushing block 606 is slidably connected with the second pushing block 607, and one end, far away from the second pushing block 607, of the first pushing block 606 is slidably connected with the upper end of the first matching cavity 605;

the first fixing block 612 penetrates through the matching hole 601 to enter the second matching cavity 615 to be fixedly connected with the buffer plate 613, the buffer plate 613 is slidably arranged in the second matching cavity 615, and a plurality of springs 614 are fixedly arranged between the buffer plate 613 and the second matching cavity 615;

the second fixing block 609 is arranged in the third matching cavity 608 in a sliding mode, the second fixing block 609 penetrates through the lower end of the third matching cavity 608 to enter the second matching cavity 615 to be matched with the first fixing block 612, a cavity 610 is formed in one side, away from the first fixing block 612, of the second fixing block 609, a limiting plate 604 is arranged inside the cavity 610 in a sliding mode along the left-right direction, and a plurality of springs four 611 are fixedly arranged between the limiting plate 604 and the cavity 610;

one end of the second pushing block 607 far away from the first pushing block 606 penetrates through the lower end of the first matching cavity 605 and enters the third matching cavity 608, and the upper end of the second pushing block 607 which enters the third matching cavity 608 penetrates through the cavity 610 and contacts with the limiting plate 604.

Preferably, the fitting mechanism further includes:

the winding reel 616 is arranged inside the matching block 6, the winding reel 616 is connected with a connecting rope 617, one end of the connecting rope 617 is fixedly connected with the limiting plate 604, and one end of the connecting rope 617, which is far away from the required limiting plate 604, is fixedly connected with a second operation block 618;

the matching block 6 is provided with a first inner cavity for the connecting rope 617 to pass through, and the supporting column 8 is provided with a second inner cavity for the connecting rope 617 to pass through.

The beneficial effects of the above technical scheme are:

bear 1 lower extreme of dish and be connected with mounting disc 7 through a plurality of cooperation mechanisms, a plurality of cooperation mechanisms along bear 1 lower extreme week side interval arrangement of dish, wherein the mounting disc is used for the installation, supports and bears dish 1, but the accessible cooperation mechanism realizes bearing the dismantlement of dish 1 and mounting disc 7 and is connected, can be convenient for change not unidimensional dish 1 that bears.

When the bearing disc 1 and the mounting disc 7 are used, the supporting column 8 and the matching block 6 which are connected with the bearing disc 1 are used for being inserted into the connecting groove 71 of the mounting disc 7, the matching block 6 which is fixedly connected with the supporting column 8 firstly enters the connecting groove 71, when the guiding wheel 602 is inserted into the connecting groove 71 along with the matching block 6, the guiding wheel 602 enters the placing groove 619 to drive the mounting block 603 to move towards the first matching cavity 605, so that the first pushing block 606 is driven to slide along the upper end of the first matching cavity 605, the second pushing block 607 is driven to move downwards in the sliding process of the first pushing block 606, the second pushing block 607 drives the second fixing block 609 to move downwards through the limiting plate 604, the second fixing block 609 can push the first fixing block 612 to move towards the direction of the matching opening 601, the sliding of the first fixing block 613 and the second matching cavity 615 plays a role in guiding the movement of the first fixing block 612, the third spring 614 arranged between the buffering plate 613 and the second matching cavity 615 enables the movement of the first fixing block 612 to be stable, after the guiding wheel 602 completely enters the placing groove 612, at the first fixing block is inserted into the fixing groove 20 at the moment, so that the first fixing block 6 cannot be inserted into the mounting disc 1 and the mounting disc 619 can be further limited in the up-down effect of the bearing disc 7, and the mounting disc 1 can be further improved, and the limiting effect of the mounting disc 7; when the first fixing block 612 is separated from the fixing groove 20, the second operating block 618 is pulled to drive the connecting rope 617 to move, the winding wheel 616 plays a role in guiding the movement of the connecting rope 617, the connecting rope 617 moves to pull the limiting plate 604 to move along the cavity 610 to be separated from the contact with the second pushing block 607, the first fixing block 612 is separated from the fixing groove 20 under the elastic action of the third spring 614, the second fixing block 609 is squeezed to move upwards, the second pushing block 607 enters the cavity 610, the first fixing block 612 is not limited by the second fixing block 609, then the bearing disc 1 is pulled upwards, and the bearing disc 1 and the mounting disc 7 can be detached.

It will be apparent to those skilled in the art that various changes and modifications may be made in the present invention without departing from the spirit and scope of the invention. Thus, if such modifications and variations of the present invention fall within the scope of the claims of the present invention and their equivalents, the present invention is also intended to include such modifications and variations.

Claims

1. A ceramic coating graphite tray rotating assembly comprises a bearing plate (1) and a cover plate (2), and is characterized in that a first positioning structure (3) is arranged on the bearing plate (1), a second positioning structure (4) is arranged at the bottom of the cover plate (2), and the first positioning structure (3) and the second positioning structure (4) are matched with each other;

the first positioning structure (3) is a first groove or a first boss, the second positioning structure (4) is a second boss or a second groove, the first groove and the second boss are matched with each other, and the first boss and the second groove are matched with each other;

bear dish (1) lower extreme and be connected with mounting disc (7) through a plurality of cooperation mechanisms, a plurality of cooperation mechanisms along bear dish (1) lower extreme week side interval arrangement, cooperation mechanism includes:

the upper end of the supporting column (8) is fixedly connected with the lower end of the bearing disc (1);

the mounting plate comprises a matching block (6) fixedly connected with the lower end of a supporting column (8), a connecting groove (71) is formed in the upper end of a mounting plate (7), the supporting column (8) and the matching block (6) are used for being inserted into the connecting groove (71), a placing groove (619) is formed in the upper side of the right end of the matching block (6), a matching opening (601) is formed in the lower side of the right end of the matching block (6), a matching cavity I (605) is formed in the upper side of the interior of the matching block (6), a matching cavity II (615) is formed in the lower side of the interior of the matching cavity I (605), the placing groove (619) is communicated with the matching cavity I (605), the matching opening (601) is communicated with the matching cavity II (615), the matching cavity II (615) is communicated with a matching cavity III (608), and the matching cavity III (608) is arranged in the matching block (6);

the guide wheel (602) is arranged inside the placing groove (619), the guide wheel (602) is rotatably connected with the mounting block (603), the mounting block (603) penetrates through the left end of the placing groove (619) to enter the first matching cavity (605) to be fixedly connected with the first pushing block (606), the first pushing block (606) is slidably connected with the second pushing block (607), and one end, far away from the second pushing block (607), of the first pushing block (606) is slidably connected with the upper end of the first matching cavity (605);

the first fixing block (612) penetrates through the matching opening (601) to enter a second matching cavity (615) and is fixedly connected with a buffer plate (613), the buffer plate (613) is arranged in the second matching cavity (615) in a sliding mode, and a plurality of springs III (614) are fixedly arranged between the buffer plate (613) and the second matching cavity (615);

the fixing block II (609) is arranged in the matching cavity III (608) in a sliding mode, the fixing block II (609) penetrates through the lower end of the matching cavity III (608) to enter the matching cavity II (615) to be matched with the fixing block I (612), a cavity (610) is formed in one side, away from the fixing block I (612), of the fixing block II (609), a limiting plate (604) is arranged inside the cavity (610) in a sliding mode along the left-right direction, and a plurality of springs IV (611) are fixedly arranged between the limiting plate (604) and the cavity (610);

one end of the second pushing block (607) far away from the first pushing block (606) penetrates through the lower end of the first matching cavity (605) and enters the third matching cavity (608), and the upper end of the second pushing block (607) entering the third matching cavity (608) penetrates through the cavity (610) and contacts with the limiting plate (604);

the cooperation mechanism still includes:

the winding wheel (616) is arranged inside the matching block (6), the winding wheel (616) is connected with a connecting rope (617), one end of the connecting rope (617) is fixedly connected with the limiting plate (604), and one end, away from the required limiting plate (604), of the connecting rope (617) is fixedly connected with the second operation block (618);

the matching block (6) is internally provided with a first inner cavity for the connection rope (617) to pass through, and the support column (8) is internally provided with a second inner cavity for the connection rope (617) to pass through.

2. The ceramic coated graphite tray rotating assembly according to claim 1,

the first groove and the second groove are both kidney-shaped grooves (31), and the first boss and the second boss are both kidney-shaped bosses (41);

or the first groove and the second groove are both round hole grooves (32), and the first boss and the second boss are both cylindrical bosses (42);

or the first groove and the second groove are both triangular grooves (33), and the first boss and the second boss are both kidney-shaped bosses (41) and triangular bosses (43).

3. A ceramic coated graphite tray rotating assembly according to claim 1, wherein the first positioning structure (3) is arranged at a non-central position of the carrier tray (1), and the second positioning structure (4) is arranged at a non-central position of the bottom of the cover plate (2).

4. A ceramic coated graphite tray rotating assembly according to claim 1, wherein the bearing tray (1) and the cover plate (2) are centrally restricted by a centrally located outer circular skirt, and the first positioning structure (3) and the second positioning structure (4) are both arranged on the corresponding outer circular skirt.

5. Ceramic coated graphite tray rotating assembly according to claim 1, characterized in that the coating material of the carrier tray (1) and the cover plate (2) is SiC material.

6. The ceramic coating graphite tray rotating assembly as claimed in claim 1, wherein a plurality of mounting mechanisms are uniformly distributed on the lower end of the bearing tray (1) in the circumferential direction, and the mounting mechanisms comprise:

the left side and the right side of the upper end of the installation shell (5) are symmetrically provided with supporting legs (517), the supporting legs (517) are fixedly arranged at the lower end of the bearing disc (1), an adjusting cavity (501) is arranged inside the installation shell (5), the left side and the right side of the upper end and the lower end of the installation shell (5) are communicated with a sliding cavity (502), the right side of the lower end of the installation shell (5) is provided with a first opening (503) in a penetrating manner, the right side of the upper end of the installation shell (5) is provided with a second opening (504) in a penetrating manner, the first opening (503) and the second opening (504) are located on different vertical planes, and the adjusting cavity (501) is respectively communicated with the sliding cavity (502), the first opening (503) and the second opening (504);

the fixing device comprises two fixing shells (515), the two fixing shells (515) are symmetrically arranged at the upper end and the lower end of the mounting shell (5), a movable cavity (522) is arranged inside the fixing shells (515), one end, far away from the mounting shell (5), of each fixing shell (515) is provided with a third opening (525) in a penetrating mode, the third openings (525) are communicated with the movable cavity (522), and a rotating shaft (528) is rotatably arranged inside the movable cavity (522);

the four first matching wheels (516), the four first matching wheels (516) are symmetrically arranged in the movable cavities (522) on the upper side and the lower side in a group two by two, and the first matching wheels (516) are fixedly connected with the rotating shaft (528);

the four matching wheels II (523), the four matching wheels II (523) correspond to the four matching wheels I (516) one by one, the matching wheels II (523) are matched with the matching wheels I (516), the matching wheels II (523) are rotatably connected with the mounting seat (527), the mounting seat (527) is fixedly connected with the supporting rod (524), the supporting rod (524) penetrates through the opening III (525) to be communicated with the outside, a spring I (526) is fixedly arranged between one end, away from the matching wheels II (523), of the mounting seat (527) and one end, provided with the opening III (525), of the fixing shell (515), and the spring I (526) is sleeved on the supporting rod (524);

the two working discs (506) are respectively arranged corresponding to the fixed shells (515) on the upper side and the lower side, the left side and the right side of one end, close to the fixed shells (515), of each working disc (506) are provided with a first clamping groove (507), the first clamping grooves (507) are matched with the supporting rods (524) outside, and the left end and the right end of each working disc (506) are symmetrically provided with a second clamping groove (508);

the mounting mechanism further comprises:

the connecting shaft (513) is rotatably arranged inside the adjusting cavity (501), threaded sections are symmetrically arranged on the left side and the right side of the connecting shaft (513), the threaded sections are in threaded connection with the sliding block (514), the sliding block (514) is slidably arranged inside the adjusting cavity (501), connecting blocks (505) are symmetrically connected to the upper end and the lower end of the sliding block (514), the connecting blocks (505) penetrate through the sliding cavity (502) to be communicated with the outside, the connecting blocks (505) are in sliding connection with the sliding cavity (502), a plurality of clamping blocks (509) are uniformly distributed at intervals along the vertical direction at one end, close to the working disc (506), of the outside connecting block (505), and the clamping blocks (509) are matched with the clamping grooves II (508);

the first operation block (520) is fixedly connected with the rotation sleeve (518), a sliding groove (519) is formed in one end, far away from the first operation block (520), of the rotation sleeve (518), the rotation sleeve (518) penetrates through the side end of the installation shell (5) to enter the adjustment cavity (501), the sliding groove (519) is in sliding connection with the cylindrical section of the connection shaft (513), a second spring (521) is arranged between the first operation block (520) and the installation shell (5), and the second spring (521) is sleeved on the rotation sleeve (518);

the gear II (511) is arranged in the adjusting cavity (501), the gear II (511) is fixedly connected with a rotating sleeve (518) in the adjusting cavity (501), the gear II (511) is meshed with the gear I (510) and the gear III (512), the gear I (510) penetrates through the opening I (503), the rotating shaft (528) on the lower side penetrates through the side end of the movable cavity (522) on the lower side and is fixedly connected with the gear I (510), the gear III (512) penetrates through the opening II (504), and the rotating shaft (528) on the upper side penetrates through the side end of the movable cavity (522) on the upper side and is fixedly connected with the gear III (512);

the connecting block (505) on the right side is slidably connected with the rotating shaft (528).