CN111850499A - Built-in structure compact type rotary cathode device - Google Patents
Built-in structure compact type rotary cathode device Download PDFInfo
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- CN111850499A CN111850499A CN202010908163.5A CN202010908163A CN111850499A CN 111850499 A CN111850499 A CN 111850499A CN 202010908163 A CN202010908163 A CN 202010908163A CN 111850499 A CN111850499 A CN 111850499A
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- coolant liquid
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- 230000005540 biological transmission Effects 0.000 claims abstract description 33
- 239000000110 cooling liquid Substances 0.000 claims abstract description 16
- 230000003068 static effect Effects 0.000 claims abstract description 13
- 238000007789 sealing Methods 0.000 claims abstract description 12
- 238000005096 rolling process Methods 0.000 claims abstract description 10
- 238000001816 cooling Methods 0.000 claims abstract description 4
- 239000002826 coolant Substances 0.000 claims description 37
- 239000007788 liquid Substances 0.000 claims description 35
- 230000007246 mechanism Effects 0.000 claims description 28
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 13
- 229910052799 carbon Inorganic materials 0.000 claims description 13
- 230000008676 import Effects 0.000 claims description 5
- 239000000758 substrate Substances 0.000 abstract description 12
- 230000015572 biosynthetic process Effects 0.000 abstract description 4
- 238000002360 preparation method Methods 0.000 abstract description 2
- 238000001755 magnetron sputter deposition Methods 0.000 description 9
- 238000000576 coating method Methods 0.000 description 4
- 239000000498 cooling water Substances 0.000 description 4
- 239000011248 coating agent Substances 0.000 description 3
- 230000008878 coupling Effects 0.000 description 3
- 238000010168 coupling process Methods 0.000 description 3
- 238000005859 coupling reaction Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 2
- 240000000111 Saccharum officinarum Species 0.000 description 1
- 235000007201 Saccharum officinarum Nutrition 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 239000000575 pesticide Substances 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
- 230000007306 turnover Effects 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The invention relates to the technical field of film preparation, in particular to a built-in type rotary cathode device with a compact structure, which comprises a cathode shell, a target tube, a rotary driving device, a cooling liquid pipeline, a conductive electric brush and an external power supply device, wherein the target tube is arranged in the cathode shell and is in transmission connection with the rotary driving device through a single rolling bearing so as to enable the target tube to rotate under the driving of the rotary driving device, the conductive electric brush is connected with the rotary driving device and is communicated with the external power supply device, and the cooling liquid pipeline is used for cooling the target tube. The invention has the advantages that: 1) the sealing structure of the single rolling bearing and the dynamic and static rings is matched to use, so that the size space of the end part of the cathode is greatly compressed, and the film forming uniform area of the substrate is improved; 2) the tail part cancels a fixing or supporting structure to increase the uniform area of the film formation of the substrate; 3) the device can be upgraded in a limited space without reducing the substrate uniformity area of the planar cathode device.
Description
Technical Field
The invention relates to the technical field of film preparation, in particular to a built-in type structure compact type rotary cathode device.
Background
Increasing the length of the uniform zone for substrate film formation has been a sought goal in the film production process, which requires that the "dead" space of the cathode end and tail fixture or support structures be compressed as much as possible to leave the space in the chamber to the sputtering zone of the target tube, given the determined height or length of the vacuum chamber.
The magnetron sputtering device popular in the market mainly comprises a rotary magnetron sputtering device and a planar magnetron sputtering device. For the traditional rotary magnetron sputtering device, due to the requirement of the vacuum production process on the leakage rate, in order to ensure the stability of rotation, a double-bearing structure is often adopted in the internal structure of the cathode end, so that the occupied space of the end structure of the cathode is larger, a tail fixing or supporting structure is configured, an effective coating area in a vacuum cavity is occupied, the height or the length of the cavity is the same, and a coating uniform area is relatively shorter. And for the plane magnetron sputtering device, because the plane magnetron sputtering device does not have a rotating mechanism, the effective coating area of the target is relatively longer in the vacuum cavity with the same height or length. Because of the problem of target utilization rate, when a user upgrades the planar cathode to the rotary cathode, the planar cathode is often affected by limited end space, and thus the planar cathode can only be realized by sacrificing a uniform area for film formation of the substrate.
Disclosure of Invention
The invention aims to provide a built-in type structure compact rotary cathode device according to the defects of the prior art, which adopts a single rolling bearing, a moving and static ring sealing structure and a split type brush array conducting structure and is mainly used for solving the problems that the cathode end and the tail fixed end of a rotary magnetron sputtering device occupy large space and cause a substrate film forming uniform region to be short; the planar cathode is upgraded and reconstructed to sacrifice the uniform film forming area of the substrate.
The purpose of the invention is realized by the following technical scheme:
a built-in structure compact type rotary cathode device is characterized in that: the target tube is arranged in the cathode shell and is in transmission connection with the rotary driving device through a single rolling bearing so that the target tube rotates under the driving of the rotary driving device, the conductive electric brush is connected with the rotary driving device and is communicated with the external power device, and the cooling liquid pipeline is used for cooling the target tube.
The rotary driving device comprises a servo motor, a transmission mechanism and a mandrel transmission mechanism, wherein the servo motor is in transmission fit with the mandrel transmission mechanism through the transmission mechanism, the mandrel transmission mechanism is fixed with a target pipe connecting flange, and the target pipe connecting flange is connected and fixed with the target pipe, so that the target pipe is driven by the servo motor to rotate.
The target tube is provided with a magnetic rod fixing seat, one end of the magnetic rod fixing seat is fixed with the cathode shell, the other end of the magnetic rod fixing seat supports the magnetic rod in the target tube, and the magnetic rod fixing seat form limiting constraint to enable the target tube to be in a static state when the target tube is driven to rotate by the rotary driving device.
The coolant liquid pipeline includes coolant liquid pipe joint, coolant liquid inlet channel, coolant liquid return passage, wherein coolant liquid pipe joint sets up respectively the coolant liquid import and the coolant liquid exit position of negative pole casing, coolant liquid import intercommunication coolant liquid inlet channel, coolant liquid inlet channel passes through the bar magnet reaches the target pipe intercommunication coolant liquid return passage.
And a dynamic and static ring for sealing is arranged at the inlet and outlet positions of the cooling liquid inlet channel and the cooling liquid return channel on the target pipe.
The external power supply device comprises an external conductive block, an internal conductive plate and an insulating base, the external conductive block is communicated with the internal conductive plate, the internal conductive plate is communicated with the conductive electric brush through the cathode shell, and the target tube is electrified when the split type carbon brush passes through the mandrel transmission mechanism.
The conductive electric brush is a split type electric brush array mechanism.
The split carbon brush is pressed on the mandrel transmission mechanism through a carbon brush spring.
The conductive electric brush and the movable and static rings for realizing the sealing of the cooling liquid are positioned at the same height.
The invention has the advantages that: 1) the sealing structure of the single rolling bearing and the dynamic and static rings is matched to use, so that the size space of the end part of the cathode is greatly compressed, and the film forming uniform area of the substrate is improved; 2) the tail part cancels a fixing or supporting structure to increase the uniform area of the film formation of the substrate; 3) the device can be upgraded in a limited space without reducing the substrate uniformity area of the planar cathode device.
Drawings
FIG. 1 is a schematic structural diagram of the present invention.
Detailed Description
The features of the present invention and other related features are described in further detail below by way of example in conjunction with the following drawings to facilitate understanding by those skilled in the art:
as shown in fig. 1, the symbols 1-22 in the figure are respectively represented as: the cathode structure comprises a cathode mounting flange 1, a cathode shell 2, a target tube 3, a magnetic rod 4, a transmission mechanism 5, a servo motor 6, a mandrel transmission mechanism 7, a rolling bearing 8, a split type carbon brush 9, a moving ring 10, an external conductive block 11, an internal conductive plate 12, an insulating base 13, a vacuum sealing ring 14, a cathode shield 15, a carbon brush spring 16, a cooling liquid inlet and outlet pipe connector 17, a magnetic rod fixing seat 18, a cooling liquid inlet channel 19, a cooling liquid return channel 20, a target tube connecting flange 21 and a target tube grommet 22.
Example (b): as shown in fig. 1, the built-in compact rotary cathode device in this embodiment is applied to a magnetron sputtering coating process, and is mainly used to solve the problem that a cathode end and a tail fixed end of a rotary magnetron sputtering device occupy a large space, resulting in a short uniform film-forming region of a substrate; the planar cathode is upgraded and reconstructed to sacrifice the uniform film forming area of the substrate.
As shown in fig. 1, the internal structure compact type rotating cathode device in this embodiment includes a cathode housing 2, a target tube 3, a rotation driving device, a coolant pipeline, a split carbon brush 9 and an external power supply device, wherein the target tube 3 is disposed in the cathode housing 2 and is in transmission connection with the rotation driving device through a single rolling bearing 8 so that the target tube 3 rotates under the driving of the rotation driving device, the split carbon brush 9 serving as a conductive brush is connected with the rotation driving device and is conducted with the external power supply device, and the coolant pipeline is used for cooling the target tube 3 to ensure that it is prevented from being damaged due to heat generated during operation.
Specifically, as shown in fig. 1, the rotation driving device mainly includes a servo motor 6, a transmission mechanism 5, and a spindle transmission mechanism 7, wherein the servo motor 6 transmits the rotation power to the spindle transmission mechanism 7 through the transmission mechanism 5. The transmission mechanism 5 which plays a role in transmission in the middle process can enable the multi-stage gear to transmit kinetic energy and can also use a synchronous belt to transmit the kinetic energy. The spindle transmission mechanism 7 is fixed with a target tube connecting flange 21 through screws, and the target tube connecting flange 21 is locked with the target tube 3 through a target tube locking ring 22 in a mechanical mode. The rotation of the target tube 3 in the vacuum chamber is driven by the rotation of the external servo motor 6. The periphery of the mandrel transmission mechanism 7 is provided with a single rolling bearing 8, the target tube 3 and the mandrel can be stably rotated through the single rolling bearing, and meanwhile, the space occupied by the end structure of the cathode device is reduced. A sugarcane pesticide sealing ring 14 for realizing sealing is arranged on the periphery of the target pipe connecting flange 21.
The magnetic rod fixing seat 18 is fixed inside the cathode shell 2 by means of screws, welding or machining. The magnetic rod 4 is placed on the upper part of the magnetic rod fixing seat 18 and supported by the magnetic rod fixing seat, and the magnetic rod 4 and the magnetic rod fixing seat are connected in a key way or a bayonet lock way, so that the magnetic rod 4 does not rotate along with the outer target tube 3. The target tube 2 is driven by the servo motor 6 to rotate relative to the magnetic rod 4, and the magnetic rod 4 is in a static state relative to the cathode shell 2.
Inside coolant liquid of coolant liquid pipeline got into the casing through business turn over coolant liquid coupling 17, there was the coolant liquid passageway casing inside, coolant liquid coupling 17 sets up the cooling water that cathode housing 2 promptly and advances, export the position, external cooling water gets into in the vacuum cavity through the position of cooling water import, behind its coolant liquid passageway again, flows from arranging coolant liquid coupling 17 department at the cooling water export position. The coolant liquid channel means that the coolant liquid enters the magnetic rod 4 through the coolant liquid inlet channel 19 of the internal pipeline of the magnetic rod fixing seat 18, flows back after reaching the top of the target tube 3, and the returned coolant liquid enters the internal pipeline of the cathode shell 2 through the coolant liquid return channel 20 and flows out of the device through the coolant liquid inlet and outlet pipe joint 17, so that heat exchange on the inner surface of the target tube 3 is realized, and most heat generated by discharge is taken away. And a moving and static ring 10 for sealing is arranged at the inlet and outlet positions of the target tube 3 of the cooling liquid inlet channel 19 and the cooling liquid return channel 20, the upper part of the moving and static ring 10 is connected with a rotary motion device, and the lower part of the moving and static ring is fixed with the cathode shell 2 by a connecting shell fixing device, thereby realizing the sealing of the cooling liquid.
The external power supply unit conducts current to the internal conductive plate 12 through the external conductive block 11, and the internal conductive plate 12 fixes the entire cathode structure to the cathode mounting flange 1 through the insulating base 13. After the current is led into the internal conductive plate 12, the current passes through the base of the cathode shell 2 and then is transmitted to the mandrel transmission mechanism 7 through the split carbon brush 9, so that the target tube 3 is electrified. The split carbon brush 9 is tightly pressed and driven to the mandrel transmission mechanism 7 by the carbon brush spring 16, so that the resistance of the whole system is basically kept unchanged, and the stable transmission of current is realized.
In the embodiment, in specific implementation: the cathode shell 2 is integrally mounted through a cathode mounting flange 1. A cathode shield 15 is provided at the periphery of the cathode housing 2, the cathode shield 15 being used to protect the cathode housing 2 and its internal structure.
Although the conception and the embodiments of the present invention have been described in detail with reference to the drawings, those skilled in the art will recognize that various changes and modifications can be made therein without departing from the scope of the appended claims, and therefore, they are not to be considered repeated herein.
Claims (9)
1. A built-in structure compact type rotary cathode device is characterized in that: the target tube is arranged in the cathode shell and is in transmission connection with the rotary driving device through a single rolling bearing so that the target tube rotates under the driving of the rotary driving device, the conductive electric brush is connected with the rotary driving device and is communicated with the external power device, and the cooling liquid pipeline is used for cooling the target tube.
2. The built-in compact rotary cathode assembly according to claim 1, wherein: the rotary driving device comprises a servo motor, a transmission mechanism and a mandrel transmission mechanism, wherein the servo motor is in transmission fit with the mandrel transmission mechanism through the transmission mechanism, the mandrel transmission mechanism is fixed with a target pipe connecting flange, and the target pipe connecting flange is connected and fixed with the target pipe, so that the target pipe is driven by the servo motor to rotate.
3. The built-in compact rotary cathode assembly according to claim 1, wherein: the target tube is provided with a magnetic rod fixing seat, one end of the magnetic rod fixing seat is fixed with the cathode shell, the other end of the magnetic rod fixing seat supports the magnetic rod in the target tube, and the magnetic rod fixing seat form limiting constraint to enable the target tube to be in a static state when the target tube is driven to rotate by the rotary driving device.
4. The built-in compact rotary cathode assembly according to claim 1, wherein: the coolant liquid pipeline includes coolant liquid pipe joint, coolant liquid inlet channel, coolant liquid return passage, wherein coolant liquid pipe joint sets up respectively the coolant liquid import and the coolant liquid exit position of negative pole casing, coolant liquid import intercommunication coolant liquid inlet channel, coolant liquid inlet channel passes through the bar magnet reaches the target pipe intercommunication coolant liquid return passage.
5. The built-in compact rotary cathode device according to claim 4, wherein: and a dynamic and static ring for sealing is arranged at the inlet and outlet positions of the cooling liquid inlet channel and the cooling liquid return channel on the target pipe.
6. The built-in compact rotary cathode assembly according to claim 1, wherein: the external power supply device comprises an external conductive block, an internal conductive plate and an insulating base, the external conductive block is communicated with the internal conductive plate, the internal conductive plate is communicated with the conductive electric brush through the cathode shell, and the target tube is electrified when the split type carbon brush passes through the mandrel transmission mechanism.
7. The built-in compact rotary cathode assembly according to claim 6, wherein: the conductive electric brush is a split type electric brush array mechanism.
8. The built-in compact rotary cathode assembly according to claim 7, wherein: the split carbon brush is pressed on the mandrel transmission mechanism through a carbon brush spring.
9. The built-in compact rotary cathode assembly according to claim 7, wherein: the conductive electric brush and the movable and static rings for realizing the sealing of the cooling liquid are positioned at the same height.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010908163.5A CN111850499A (en) | 2020-09-02 | 2020-09-02 | Built-in structure compact type rotary cathode device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010908163.5A CN111850499A (en) | 2020-09-02 | 2020-09-02 | Built-in structure compact type rotary cathode device |
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| Publication Number | Publication Date |
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| CN111850499A true CN111850499A (en) | 2020-10-30 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202010908163.5A Pending CN111850499A (en) | 2020-09-02 | 2020-09-02 | Built-in structure compact type rotary cathode device |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114717523A (en) * | 2022-03-03 | 2022-07-08 | 四川艾庞机械科技有限公司 | Columnar target water-cooling rotary unit |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1769515A (en) * | 2004-11-05 | 2006-05-10 | 应用菲林股份有限两合公司 | Cathode arrangement for atomizing a rotatable target pipe |
| CN101736297A (en) * | 2008-11-19 | 2010-06-16 | 苏州新爱可镀膜设备有限公司 | Rotatable sputtering cathode device for film coating |
| CN208791743U (en) * | 2018-07-19 | 2019-04-26 | 北京铂阳顶荣光伏科技有限公司 | It is a kind of conducive to cooling rotary target target pipe |
| CN213507172U (en) * | 2020-09-02 | 2021-06-22 | 光驰科技(上海)有限公司 | Built-in structure compact type rotary cathode device |
-
2020
- 2020-09-02 CN CN202010908163.5A patent/CN111850499A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1769515A (en) * | 2004-11-05 | 2006-05-10 | 应用菲林股份有限两合公司 | Cathode arrangement for atomizing a rotatable target pipe |
| CN101736297A (en) * | 2008-11-19 | 2010-06-16 | 苏州新爱可镀膜设备有限公司 | Rotatable sputtering cathode device for film coating |
| CN208791743U (en) * | 2018-07-19 | 2019-04-26 | 北京铂阳顶荣光伏科技有限公司 | It is a kind of conducive to cooling rotary target target pipe |
| CN213507172U (en) * | 2020-09-02 | 2021-06-22 | 光驰科技(上海)有限公司 | Built-in structure compact type rotary cathode device |
Non-Patent Citations (1)
| Title |
|---|
| 林崇德，姜璐，王德胜主编: "中国成人教育百科全书 物理•机电", 31 August 1994, 海口：南海出版公司, pages: 452 * |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114717523A (en) * | 2022-03-03 | 2022-07-08 | 四川艾庞机械科技有限公司 | Columnar target water-cooling rotary unit |
| CN114717523B (en) * | 2022-03-03 | 2024-05-31 | 四川艾庞机械科技有限公司 | Columnar target water-cooling rotary unit |
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