CN114429929A - Substrate transfer device - Google Patents

Substrate transfer device Download PDF

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Publication number
CN114429929A
CN114429929A CN202210074403.5A CN202210074403A CN114429929A CN 114429929 A CN114429929 A CN 114429929A CN 202210074403 A CN202210074403 A CN 202210074403A CN 114429929 A CN114429929 A CN 114429929A
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China
Prior art keywords
air
substrate
air blowing
power element
bearing surface
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CN202210074403.5A
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Chinese (zh)
Inventor
王振忠
陈熠
周锐
苏坚毅
姚宇超
洪明辉
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Xiamen University
Tan Kah Kee Innovation Laboratory
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Xiamen University
Tan Kah Kee Innovation Laboratory
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Priority to CN202210074403.5A priority Critical patent/CN114429929A/en
Publication of CN114429929A publication Critical patent/CN114429929A/en
Pending legal-status Critical Current

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/6773—Conveying cassettes, containers or carriers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

The application discloses a substrate transfer device, which comprises a vacuum generator, a gas blower, a transfer mechanism and a blower; the transfer mechanism comprises a bracket; the bracket is suitable for translation and is provided with a bearing surface for bearing the substrate; the bearing surface is provided with a plurality of adsorption holes; each adsorption hole is communicated with a vacuum generator; the blower is arranged on the bracket and is provided with an air blowing channel; the air blowing channel is communicated with the air blower, the air blowing channel inclines upwards relative to the bearing surface and extends, and the air outlet faces to one side of the bearing surface; the lower end of an air outlet of the air blowing channel is provided with a first air guide surface which inclines downwards; the intersection line of the plane of the first air guide surface and the plane of the bearing surface is relatively close to the air outlet of the air blowing channel at any position of the substrate adsorbed on the bearing surface. The substrate transfer device adopting the technical scheme can reliably transfer the substrate, reduce the damage risk of the substrate and ensure the cleanliness of the substrate and the photoresist on the surface of the substrate.

Description

Substrate transfer device
Technical Field
The application relates to the technical field of substrate processing equipment, in particular to a substrate transfer device.
Background
Semiconductor substrates and Micro-LED epitaxial wafer substrates are used as common materials for exposure processing of microlens arrays, and during the processing, the substrates are usually transferred in different processing areas (glue spreading area, drying area, exposure area, etc.) to implement different types of processing treatment on wafers or substrates.
At present, a transfer robot is mainly used for transferring substrates in the processing process of the substrates, the cost is high, the vibration phenomenon is obvious in the transfer process, the pose change range of the substrates is large, and therefore the quality of the substrates cannot be guaranteed.
In order to solve the above problems, the prior art mainly solves the problems by establishing a clean room, in which the substrates are transported in the clean room, but the construction of the clean room requires high cost, and in addition, the clean room consumes a large amount of electric power, consumes a large amount of energy, has extremely high maintenance cost, and is not beneficial to improving the production efficiency.
In view of this, how to reliably fix the substrate and avoid the occurrence of mechanical damage to the substrate and how to maintain the cleanliness of the substrate in the substrate processing process is an urgent problem to be solved in the industry at present.
Disclosure of Invention
It is an object of the present application to overcome the above-mentioned drawbacks or problems of the background art and to provide a substrate transfer apparatus that can reliably transfer a substrate, reduce the risk of damage to the substrate, and ensure the cleanliness of the substrate and the photoresist on the surface thereof.
In order to achieve the purpose, the following technical scheme is adopted:
the first technical scheme relates to a substrate transfer device, which comprises a vacuum generator, a gas blower, a transfer mechanism and a blower, wherein the transfer mechanism comprises a bracket; the bracket is suitable for translation and is provided with a bearing surface for bearing the substrate; the bearing surface is provided with a plurality of adsorption holes, and each adsorption hole is communicated with the vacuum generator; the blower is arranged on the bracket and is provided with an air blowing channel; the blowing channel is communicated with the gas blower, the blowing channel extends upwards in an inclined way relative to the bearing surface, and the gas outlet faces to one side of the bearing surface; the lower end of an air outlet of the air blowing channel is provided with a first air guide surface which inclines downwards; the intersection line of the plane of the first air guide surface and the plane of the bearing surface is relatively adsorbed to any position of the substrate on the bearing surface and is close to the air outlet of the air blowing channel.
The second technical scheme is as follows: based on the first technical scheme, the air outlet of the air blowing channel is a horizontally extending strip-shaped opening, and the length extending direction of the air blowing channel is perpendicular to the extending direction of the air blowing channel.
The third technical scheme is as follows: based on a second technical scheme, a second air guide surface is arranged at the upper end of an air outlet of the air blowing channel; the plane of the second air guide surface is inclined upwards relative to the extending direction of the air blowing channel.
The fourth technical proposal is as follows: the blower is based on the third technical scheme and comprises a blowing piece and a pitching power element; the air blowing piece is provided with the air blowing channel; the pitching power element is arranged on the bracket, and the output end of the pitching power element is fixedly connected with the part of the air blowing piece, which is far away from the air outlet of the air blowing channel, and is suitable for driving the air blowing piece to rotate around a horizontal axis which is vertical to the extending direction of the air blowing channel within a preset angle range; when the air blowing piece rotates, the intersection line of the plane of the first air guide surface and the plane of the bearing surface is always closer to the air outlet of the air blowing channel relative to any position on the substrate.
The fifth technical scheme is as follows: the control device is based on any one of the first technical scheme to the fourth technical scheme, and further comprises a vacuum pressure sensor, a throttle valve and a controller; the vacuum pressure sensor is arranged on the vacuum generator and is used for detecting the vacuum degree of the vacuum generator during working; the throttle valve is arranged at a positive pressure gas source end of the vacuum generator; the controller is electrically connected with the vacuum pressure sensor and the throttle valve and is used for receiving signals of the vacuum pressure sensor and controlling the throttle valve to work when control conditions are met.
The sixth technical proposal: based on the fifth technical scheme, the dust sensor is also included; the dust sensor is arranged on the bracket and is suitable for detecting the concentration of particulate matters in the air; the controller is also electrically connected with the pitching power element and the dust sensor and is used for controlling the air blower and the pitching power element to work in a preset mode based on the signal of the dust sensor; the preset mode comprises the air blowing amount of the air blower, and the rotation angle and the rotation speed of the output end of the pitching power element.
The seventh technical proposal: the controller is based on a fifth technical scheme, and the controller further comprises a level sensor electrically connected with the controller; the level sensor is arranged on the bracket and used for detecting the levelness of the bearing surface; the transfer mechanism further comprises a moving body and a rotating power element; the rotating power element is arranged on the moving main body and is suitable for being driven by the moving main body to translate, and the output end of the rotating power element is fixedly connected with the bracket and is suitable for driving the bracket to rotate around the horizontal axial direction; the controller is also suitable for controlling the rotary power element to operate based on the signal of the level sensor so that the bearing surface is always kept horizontal.
The eighth technical proposal: the bracket comprises a fixed seat and a supporting arm; the fixed seat is fixedly connected with the output end of the rotating power element; the support arm extends along the direction parallel to the rotating shaft of the output end of the rotating power element, one end of the support arm is fixedly connected with the fixed seat, and the upper surface of the other end of the support arm is provided with the bearing surface.
The ninth technical proposal: the device is based on a seventh technical scheme and also comprises a rack; the moving main body comprises a first horizontal driving assembly, a vertical driving assembly, a second horizontal driving assembly, a first moving seat, a second moving seat and a third moving seat; the first horizontal driving component is arranged on the rack, and the output end of the first horizontal driving component is fixedly connected with the first moving seat and is suitable for driving the first moving seat to move along a horizontal first direction; the vertical driving assembly is arranged on the first moving seat, and the output end of the vertical driving assembly is fixedly connected with the second moving seat and is suitable for driving the second moving seat to move along the vertical direction; the second horizontal driving component is arranged on the second movable seat, and the output end of the second horizontal driving component is fixedly connected with the third movable seat and is suitable for driving the third movable seat to move along a horizontal second direction vertical to the first direction; the rotating power element is arranged on the third movable seat.
The tenth technical proposal: the system is based on the eighth technical scheme and also comprises a vibration sensor electrically connected with the controller; the vibration sensor is arranged on the bracket and is suitable for detecting the vibration condition of the bracket; the controller is adapted to receive a signal of the vibration sensor and control the gas blower, the pitching power element, the rotating power element, and the moving body to stop operating when a control condition is satisfied.
Compared with the prior art, the scheme has the following beneficial effects:
1. in the first technical scheme, the bracket is provided with a bearing surface, the bearing surface is provided with a plurality of adsorption holes, and each adsorption hole is communicated with the vacuum generator, so that when the substrate is placed on the bearing surface, the vacuum generator is started to suck air in each adsorption hole and enable the interior of each adsorption hole to be in a vacuum state, the substrate can be reliably adsorbed on the bearing surface of the bracket under the action of atmospheric pressure, and the risk of damage to the substrate is low in a vacuum adsorption fixing mode, so that the quality of the substrate is favorably ensured.
2. In the first technical scheme, the blowing device is provided with a blowing channel, the blowing channel extends upwards in an inclined mode relative to the bearing surface and is communicated with the gas blowing device, a gas outlet of the blowing channel faces one side of the bearing surface, and a first wind guide surface facing downwards in an inclined mode is arranged at the lower end of the gas outlet of the blowing channel; in the process of transferring, the air blower is started, the air blowing channel can blow air towards one side of the bearing surface and form a reliable air flow barrier in the space above the bearing surface, specifically, the air flow output by the air blowing channel is mainly divided into two parts, wherein one part of the air flow is directly obliquely output upwards from the air outlet of the air blowing channel and gradually diffuses, and the flow velocity of the air flow in the part is high, so that the air can be effectively prevented from entering the flow path of the air flow; the other part of the air flow flows downwards in an inclined way under the guidance of the first air guide surface and gradually diffuses, and because the intersection line of the plane of the first air guide surface and the plane of the bearing surface is relatively close to the air outlet of the air blowing channel relative to any part of the substrate adsorbed on the bearing surface, the air flow guided out by the first air guide surface can completely cover the substrate on the bearing surface and form a reliable air flow barrier on the surface of the substrate, and in addition, the part of the air flow can also prevent the outside air from being sucked into the upper area of the bearing surface due to the negative pressure phenomenon formed by the air flow with higher output flow velocity of the air outlet of the air blowing channel, therefore, in the technical scheme, the air flow blown out by the air blowing channel can form a reliable air flow barrier in the upper area of the bearing surface, thereby effectively preventing the air from reaching the bearing surface and the substrate and preventing particles in the air from falling onto the photoresist on the surface of the substrate, the cleanness of the surface of the substrate, the photoetching precision and the quality of the substrate are ensured, the structure is simple, and the manufacturing cost is low.
3. In practical application, in the process that the substrate sequentially circulates in the photoresist uniformizing process, the drying process and the exposure process, because the photoresist on the upper surface of the substrate is always in an undried or incompletely dried state, under the condition, if the photoresist on the upper surface of the substrate is blown by the airflow with high flow rate, the phenomenon that the photoresist layer on the surface is rapidly cured and the inner photoresist layer is not cured yet occurs can occur, at the moment, the defects of ripples, folds and the like easily occur on the photoresist, and in addition, if the airflow with high flow rate is blown vertically towards the surface of the photoresist, the ripples and the folds of the photoresist can be further strengthened due to the pressure effect of the airflow.
In the first technical scheme of the application, the air flow directly output from the air outlet of the air blowing channel is inclined upwards, and the air flow of the part does not directly face the bearing surface, so that the photoresist on the upper surface of the substrate is not affected although the air flow of the part has higher flow velocity, and the photoresist can be prevented from forming ripples, folds and the like; in the technical scheme, although the airflow guided out by the first air guide surface completely sweeps over the photoresist on the substrate, the airflow is obliquely blown downwards and does not directly act on the substrate due to the low flow rate of the airflow, so that the airflow does not generate downward pressure on the photoresist, and the phenomenon that the photoresist is corrugated and wrinkled can be avoided.
Based on the above reasons, the first technical scheme of this application provides an air current blows scheme, and it still can not cause the influence to the quality of the photoresist on the substrate when realizing forming reliable air current barrier for the upper region of substrate, consequently, it can guarantee the quality of the cleanliness, the photoetching precision and the substrate of substrate surface effectively.
4. Among the first technical scheme, the purger is installed on the bracket, and its occupation space is little, and because it can take place the displacement along with the bracket, therefore, no matter where the bracket transports, the purger homoenergetic forms the air current barrier in order to protect the substrate, and the real-time of its protection is good, and the protection is more in place.
5. In the second technical scheme, the air outlet of the air blowing channel is a horizontally extending strip-shaped opening, the size of the air outlet in the height direction is smaller, and the air outlet is ensured to have a smaller area so as to form airflow with a larger flow speed; the size of the air outlet in the horizontal direction is larger, so that the air flow output by the air outlet can form a larger coverage area on the horizontal plane, and the air flow can be ensured to cover the whole bearing surface.
6. In the third technical scheme, the upper end of the air outlet of the air blowing channel is provided with a second air guide surface, the plane where the second air guide surface is located is inclined upwards relative to the extending direction of the air blowing channel, and a part of air flow can be guided out upwards, so that the thickness of the air flow barrier in the height direction is enlarged, the volume of the air flow barrier is improved, and the protection strength to the substrate is increased.
7. In the fourth technical scheme, the blower comprises an air blowing piece and a pitching power element, the pitching power element is used for driving the air blowing piece to rotate, and then the air outlet of the air blowing channel is driven to swing up and down, so that the air flow output by the air blowing channel can cover a larger range in the height direction, and a larger air flow barrier is formed, and the protection strength on the substrate is further enhanced.
8. In the fifth technical scheme, the vacuum pressure sensor and the throttle valve are arranged on the vacuum generator, the controller detects the negative pressure value of the vacuum generator and controls the working state of the vacuum generator according to the detection result, so that the vacuum generator can always provide reliable negative pressure for the substrate, and the substrate can be reliably adsorbed and has good stability in the transferring process.
9. In the sixth technical scheme, the controller controls the gas blower and the pitching power element to work in a preset mode through the concentration information of the particulate matters in the air fed back by the dust sensor, if the concentration of the particulate matters in the air is high, the gas blowing amount of the gas blower can be increased, the rotating range and the rotating speed of the pitching power element can be increased, and if the concentration of the particulate matters in the air is low, the gas blowing amount of the gas blower and the rotating range and the rotating speed of the pitching power element can be correspondingly reduced.
10. In the seventh technical scheme, the controller controls the rotary power element to move through levelness information fed back by the level sensor, so that the substrate can be always in a horizontal posture and stably adsorbed on the bearing surface in the transferring process, and the probability that the substrate is damaged due to the change of the posture in the transferring process is reduced.
11. In the eighth technical scheme, the bracket has small occupied space, so that the bracket can enter a narrow area to transfer the substrate, and the flexibility is strong. The bearing surface is arranged at one end of the support arm far away from the rotating power element, and the surrounding obstruction is small, so that the substrate can be conveniently loaded or unloaded.
12. In the ninth technical scheme, first horizontal drive subassembly, vertical drive assembly and second horizontal drive subassembly can realize driving the position change that the bracket carries out three dimensions, and its flexibility ratio is high, and the scope that can transport is great, is favorable to satisfying the production demand.
13. In the tenth technical scheme, the controller monitors the environmental state of the substrate in the conveying process through information fed back by the vibration sensor, and when the vibration condition exceeds a preset control condition, the controller controls the gas blower, the pitching power element, the rotating power element and the moving body to stop operating so as to avoid the substrate from being cracked due to overlarge vibration intensity.
Drawings
In order to more clearly illustrate the technical solution of the embodiments, the drawings needed to be used are briefly described as follows:
FIG. 1 is a schematic view of a partially exploded perspective view of an embodiment of a substrate transport apparatus;
FIG. 2 is a schematic partial perspective view of an embodiment of a substrate transport apparatus;
FIG. 3 is a schematic view of a structure of a support arm in an embodiment of a substrate transport apparatus;
FIG. 4 is a schematic side view of a moving body in an embodiment of a substrate transport apparatus;
FIG. 5 is a schematic view of the front side of a moving body in an embodiment of a substrate transport apparatus;
FIG. 6 is a schematic diagram of a purge unit in an embodiment of a substrate transport apparatus;
FIG. 7 is a schematic sectional view showing a structure of a blowing member in an embodiment of a substrate transfer apparatus.
Description of the main reference numerals:
a transfer mechanism 1; a bracket 11; a fixed base 111; a bracket arm 112; an installation slot 1121; a step surface 11211; an intake passage 1122; a suction cup 113; a bearing surface 1131; an adsorption hole 1132; a moving body 12; a first horizontal driving assembly 121; a vertical drive assembly 122; the second horizontal driving assembly 123; a first movable base 124; a second movable base 125; a third movable base 126; a rotary power element 13; a blower 2; a blowing member 21; an air blowing passage 211; an air outlet 2111; a first air guide surface 212; a second air guide surface 213; a pitch power element 22; a dust sensor 3; a level sensor 4; the vibration sensor 5.
Detailed Description
In the claims and specification, unless otherwise specified, the terms "central," "lateral," "longitudinal," "horizontal," "vertical," "top," "bottom," "inner," "outer," "upper," "lower," "front," "rear," "left," "right," "clockwise," "counterclockwise," and the like are used in the orientation and positional relationship indicated in the drawings and are used for ease of description only and do not imply that the referenced device or element must have a particular orientation or be constructed and operated in a particular orientation.
In the claims and the description, unless otherwise specified, the terms "fixedly connected" or "fixedly connected" should be understood in a broad sense to mean any connection between the two without a relative displacement or a relative rotation, that is to say including non-detachably fixed connection, integrated and fixedly connected by other means or elements.
In the claims and specification, unless otherwise defined, the terms "comprising", "having" and variations thereof mean "including but not limited to".
The technical solutions in the embodiments will be clearly and completely described below with reference to the accompanying drawings.
Referring to fig. 1 to 7, fig. 1 to 7 show a substrate transfer device in an embodiment. As shown in fig. 1 to 7, the substrate transfer apparatus includes a vacuum generator (not shown), a gas blower (not shown), a transfer mechanism 1, a blower 2, a vacuum sensor (not shown), a throttle valve (not shown), a controller (not shown), a dust sensor 3, a level sensor 4, a frame (not shown), and a vibration sensor 5.
The vacuum generator is a device which utilizes a positive pressure gas source to generate negative pressure and realizes air suction; the gas blower can output a positive pressure gas source; since the vacuum generator and the gas blower are conventional devices for sucking and blowing air and gas, respectively, in the mechanical field, the structure thereof will not be described herein.
As shown in fig. 1, 2, 4, and 5, the transfer mechanism 1 includes a carriage 11, a moving body 12, and a rotary power element 13.
The carrier 11 is suitable for translation, and has a carrying surface 1131 for carrying the substrate, the carrying surface 1131 has a plurality of suction holes 1132, and each suction hole 1132 is connected to the vacuum generator.
The carriage 11 is translated by the moving body 12, and the carriage 11 includes a fixing base 111, a supporting arm 112 and a suction cup 113. Specifically, as shown in fig. 1 and fig. 2, the fixing seat 111 is in an L-shaped structure, a vertical portion of which is fixedly connected to the output end of the rotating power element 13, and a horizontal portion of which is fixedly connected to the supporting arm 112. The supporting arm 112 extends along a direction parallel to the rotating shaft of the output end of the rotating power element 13, one end of the supporting arm is fixedly connected with the fixed seat 111, and the upper surface of the other end of the supporting arm is provided with a bearing surface 1131; specifically, as shown in fig. 1 to 3, in the present embodiment, the supporting arm 112 extends horizontally and the extending direction thereof is the same as the extending direction of the horizontal portion of the fixing base 111, one end portion thereof is placed on the horizontal portion of the fixing base 111 and is fixedly connected with the horizontal portion of the fixing base 111 through a locking member such as a screw or a bolt, and the upper surface of the other end portion thereof is concavely provided with an installation groove 1121; the mounting groove 1121 is used for mounting the suction cup 113 and communicating the vacuum generator, and specifically, the side groove wall of the mounting groove 1121 is provided with an annular step surface 11211 and a vent hole; the vent hole is arranged below the step surface 11211; in addition, the bracket 112 is further provided with an air suction channel 1122, one end of the air suction channel 1122 is used for communicating with the vacuum generator through a hose, and the other end of the air suction channel 1122 is provided with a vent hole and is used for communicating with the mounting groove 1121, so that when the vacuum generator works, air in the mounting groove 1121 and the suction hole 1132 is sucked through the air suction channel 1122; the supporting arm 112 provided by this embodiment occupies a small space, so that the supporting arm can enter a narrow space to transfer a substrate, and has high flexibility, and since the bearing surface 1131 is disposed at an end of the supporting arm 112 far away from the rotating power element 13, the surrounding obstruction is small, so that the substrate can be conveniently loaded or unloaded. The suction cup 113 is disposed in the mounting groove 1121 in a matching manner, the bottom surface of the suction cup is abutted against the step surface 11211, a plurality of suction holes 1132 penetrating in the vertical direction are formed in the suction cup, the upper surface of the suction cup forms a carrying surface 1131, and when the substrate is placed in place on the carrying surface 1131 and the air in the mounting groove 1121 and the suction holes 1132 is sucked, the upper surface of the substrate bears the atmospheric pressure which is greater than the air pressure borne by the lower surface of the substrate, so that the substrate can be reliably sucked on the carrying surface 1131. It should be understood that, in order to improve the stability of the suction cup 113 on the bracket 112 and ensure the sealing property of the suction cup 113 in the fitting of the mounting groove 1121, the periphery of the suction cup 113 in this embodiment may be fixedly connected to the side wall of the mounting groove 1121 and/or the step surface 11211 by gluing.
The moving body 12 is adapted to move the carriage 11 in three latitudes perpendicular to each other, namely XYZ, where the three latitudes are translational motion. Specifically, as shown in fig. 4 and 5, the moving body 12 includes a first horizontal driving assembly 121, a vertical driving assembly 122, a second horizontal driving assembly 123, a first moving seat 124, a second moving seat 125, and a third moving seat 126.
The first horizontal driving assembly 121 is mounted on the frame, and an output end thereof is fixedly connected to the first moving seat 124 and adapted to drive the first moving seat 124 to move along a horizontal first direction, which may be a path disposed between two processing regions of the substrate. The first horizontal driving assembly 121 may specifically be a linear direct-drive motor or a screw rod slider mechanism, in this embodiment, the first horizontal driving assembly 121 employs a linear direct-drive motor, and has a fast driving speed and a higher displacement precision.
The first moving base 124 is a base structure extending along the vertical direction, and the bottom end thereof is fixedly connected to the output end of the first horizontal driving component 121 and can be driven by the first horizontal driving component to move horizontally along the first direction. Preferably, in this embodiment, a sliding groove is disposed at a lower end of the first moving seat 124, a guide rail slidably engaged with the sliding groove and extending along the first direction is disposed on an upper surface of the frame, and the sliding groove is engaged with the guide rail, so that the first moving seat 124 is supported by the frame and the load at the output end of the first horizontal driving assembly 121 can be reduced, and in addition, the movement of the first moving seat 124 can be guided, thereby improving the stability of the first moving seat 124 during movement.
The vertical driving assembly 122 is installed on the first movable seat 124, an output end of the vertical driving assembly 122 is fixedly connected to the second movable seat 125 and is suitable for driving the second movable seat 125 to move along the vertical direction, the vertical driving assembly 122 may specifically be a linear direct-drive motor or a screw rod slider mechanism, in this embodiment, the vertical driving assembly 122 employs a linear direct-drive motor, a driving speed of the vertical driving assembly is fast, and a displacement precision of the vertical driving assembly 122 is higher, specifically, a fixing portion of the vertical driving assembly 122 is installed on the first movable seat 124, and an output end of the vertical driving assembly extends along the vertical direction.
The second moving base 125 is a base structure extending along the horizontal direction, and the middle of one side surface thereof is fixedly connected to the output end of the vertical driving assembly 122 and can move along the vertical direction relative to the first moving base 124 under the driving of the second moving base. Preferably, in this embodiment, a sliding groove is disposed on a side surface of the second movable seat 125, the first movable seat 124 is provided with a guide rail that is slidably engaged with the sliding groove and extends in the vertical direction, and the engagement of the sliding groove and the guide rail can guide the movement of the second movable seat 125, so as to achieve the effect of improving the stability of the second movable seat 125 during movement.
The second horizontal driving assembly 123 is installed on the second movable base 125, and an output end of the second horizontal driving assembly is fixedly connected to the third movable base 126 and adapted to drive the third movable base 126 to move along a horizontal second direction perpendicular to the first direction. The second horizontal driving assembly 123 may specifically be a linear direct-drive motor or a screw-slider mechanism, in this embodiment, the second horizontal driving assembly 123 also employs a linear direct-drive motor, which has a faster driving speed and a higher displacement precision, specifically, a fixed portion of the second horizontal driving assembly 123 is installed on the second moving seat 125, and an output end thereof extends along the second direction.
The third moving base 126 is used for mounting the rotating power element 13, and is in a block structure, and a middle portion of one side surface of the third moving base is fixedly connected to the output end of the second horizontal driving assembly 123 and can move relative to the second moving base 125 along the second direction under the driving of the third moving base. Preferably, in this embodiment, a sliding groove is disposed on a side surface of the third moving seat 126, the second moving seat 125 is provided with a guide rail that is slidably engaged with the sliding groove and extends along the second direction, and the engagement of the sliding groove and the guide rail can guide the movement of the third moving seat 126, so as to achieve the effect of improving the stability of the third moving seat 126 during movement.
Based on the above structure, the mobile main body 12 can realize the motion output of two mutually perpendicular horizontal directions and a vertical direction, that is, the mobile main body 12 can drive the bracket 11 to carry out the position switching of three dimensions, and its flexibility ratio is high, the scope angle that can transport, therefore can satisfy the transportation demand and the production needs of substrate well.
The rotating power element 13 is installed on the moving body 12 and is suitable for being driven by the moving body 12 to translate, and an output end of the rotating power element 13 is fixedly connected with the bracket 11 and is suitable for driving the bracket 11 to rotate around the horizontal axis.
Specifically, the rotary power element 13 is a servo motor or a steering engine, a fixing portion of the rotary power element is mounted on the third moving seat 126, an output shaft of the rotary power element 13 extends horizontally, an extending direction of the output shaft of the rotary power element 13 is parallel to the first direction, and the extending direction of the output shaft of the rotary power element 13 is also consistent with the extending directions of the horizontal portion of the fixing seat 111 and the support arm 112. The vertical part of the fixing seat 111 is fixedly connected with the output shaft of the rotating power element 13, and is suitable for being driven by the rotating element to rotate, so as to drive the support arm 112 to rotate, so that the bearing surface 1131 is leveled, the posture of the substrate adsorbed on the bearing surface 1131 is ensured not to be changed too much, and the probability of damage to the substrate is reduced.
The blower 2 is mounted on the bracket 11 and is provided with an air blowing channel 211; the blowing channel 211 is communicated with the gas blower, the blowing channel 211 extends upwards in an inclined way relative to the bearing surface 1131, and the gas outlet 2111 faces to one side of the bearing surface 1131; the lower end of an air outlet 2111 of the air blowing channel 211 is provided with a first air guide surface 212 which inclines downwards; the intersection line of the plane of the first wind guide surface 212 and the plane of the bearing surface 1131 is closer to the air outlet 2111 of the air blowing channel 211 relative to any position of the substrate adsorbed on the bearing surface 1131.
In this embodiment, the bracket 11 is provided with the bearing surface 1131, the bearing surface 1131 is provided with a plurality of adsorption holes 1132, each adsorption hole 1132 all communicates vacuum generator, therefore, the substrate is when placing on the bearing surface 1131, through opening vacuum generator, make vacuum generator suck the air in each adsorption hole 1132 and make each adsorption hole 1132 inside present vacuum state, can make the substrate adsorb on the bearing surface 1131 of bracket 11 under the effect of atmospheric pressure reliably, with vacuum adsorption's fixed mode, it is little to cause the risk of damage to the substrate, therefore be favorable to guaranteeing the quality of substrate. The blowing device 2 is provided with a blowing channel 211, the blowing channel 211 extends upwards in an inclined manner relative to the bearing surface 1131 and is communicated with the gas blowing device, an air outlet 2111 of the blowing channel 211 faces one side of the bearing surface 1131, and the lower end of the air outlet 2111 of the blowing channel 211 is provided with a first air guide surface 212 facing downwards in an inclined manner; during the transportation process, by turning on the air blower, the air blowing channel 211 can blow air towards the side of the bearing surface 1131 and form a reliable air flow barrier in the space above the bearing surface 1131, specifically, the air flow output by the air blowing channel 211 is mainly divided into two parts, wherein one part of the air flow is output obliquely upwards and gradually diffused by the air outlet 2111 of the air blowing channel 211, and the flow rate of the air flow in the part is relatively high, so that air can be effectively prevented from entering the flow path of the air flow; the other part of the air flow flows downwards in an inclined manner under the guidance of the first air guiding surface 212 and gradually diffuses, because the intersection line of the plane of the first air guiding surface 212 and the plane of the bearing surface 1131 is relatively close to the air outlet 2111 of the air blowing channel 211 at any position of the substrate adsorbed on the bearing surface 1131, the air flow guided out by the first air guiding surface 212 does not directly blow to the substrate, and on the contrary, the air flow guided out by the first air guiding surface 212 can sweep over the substrate on the bearing surface 1131 and form a reliable air flow barrier on the substrate surface, and the part of the air flow can prevent the outside air from being sucked into the upper area of the bearing surface 1131 due to the negative pressure phenomenon caused by the air flow with high output flow rate from the air outlet 2111 of the air blowing channel 211, therefore, the air flow blown out by the air blowing channel 211 can form a reliable air flow barrier on the upper area of the bearing surface 1131, therefore, the air can be effectively prevented from reaching the bearing surface 1131 and the substrate, particles in the air can be prevented from falling on the photoresist on the surface of the substrate, the cleanliness of the surface of the substrate, the photoetching precision and the quality of the substrate are ensured, the structure is simple, and the manufacturing cost is low.
In practical application, in the process that the substrate sequentially flows among the photoresist uniformizing process, the drying process and the exposure process, because the photoresist on the upper surface of the substrate is always in an undried or incompletely dried state, under the condition, if the photoresist on the upper surface of the substrate is blown by air flow with high flow rate, the phenomenon that the glue layer on the surface is rapidly cured and the inner glue layer is not cured yet occurs, and at the moment, the defects of corrugation, wrinkle and the like easily occur to the photoresist. In addition, if the gas flow with a large flow rate is also blown perpendicularly to the surface of the photoresist, the pressure of the gas flow can cause the occurrence of the corrugation and wrinkle defects of the photoresist more easily. In order to avoid the above defects of the photoresist, in this embodiment, the air outlet 2111 of the air blowing channel 211 is set to be inclined upward, the air flow directly output from the air outlet 2111 of the air blowing channel 211 is inclined upward, and the air flow of the portion does not directly face the carrying surface 1131, so that although the air flow velocity of the portion is relatively high, the portion does not affect the photoresist on the upper surface of the substrate, and thus, the photoresist can be prevented from forming ripples, folds and the like; although the air flow guided out from the first air guiding surface 212 sweeps over the photoresist on the substrate, the air flow is blown obliquely downwards, has a slow flow rate and is not directly blown to the substrate, so that the air flow does not generate downward pressure on the photoresist, and the phenomenon of corrugation and wrinkle of the photoresist can be avoided.
Specifically, as shown in fig. 1, 2, 6, and 7, the blower 2 includes a blower 21 and a pitch power element 22.
Wherein, the air blowing part 21 comprises an air blowing part and two connecting walls which are fixed into a whole; the air blowing part is provided with an air blowing channel 211 which extends straightly, an air inlet of the air blowing channel 211 is communicated with an air outlet end of the air blower through a hose, an air outlet 2111 of the air blowing channel 211 is a horizontally extending long-strip-shaped opening, the extending direction of the length of an air outlet 2111 of the air blowing channel 211 is vertical to the extending direction of the air blowing channel 211, the size of the air outlet 2111 of the air blowing channel 211 in the height direction is small, and the air outlet 2111 is ensured to have a small area so as to form air flow with a large flow rate; the outlet 2111 has a larger size in the horizontal direction, so that the airflow output by the outlet can form a larger coverage area on the horizontal plane, and the airflow can be ensured to cover the whole bearing surface 1131. The lower end and the upper end of an air outlet 2111 of the air blowing channel 211 are respectively provided with a first air guide surface 212 and a second air guide surface 213; the length of the first air guiding surface 212 is the same as the length of the air outlet 2111 of the air blowing channel 211, the first air guiding surface 212 is arranged obliquely downwards, and the intersection line of the plane of the first air guiding surface 212 and the plane of the bearing surface 1131 is closer to the air outlet 2111 of the air blowing channel 211 compared with any part of the substrate, so that the first air guiding surface 212 can obliquely guide part of the air flow flowing out of the air outlet 2111 of the air blowing channel 211 downwards to the upper surface of the support arm 112 and enable the part of the air flow to flow over the substrate towards the side of the bearing surface 1131. The length of the second air guide surface 213 is the same as the length of the air outlet 2111 of the air blowing channel 211, and the second air guide surface and the first air guide surface 212 are symmetrical to each other by taking a plane perpendicular to the air outlet 2111 of the air blowing channel 211 as a symmetry plane and are respectively connected with the upper end and the lower end of the air outlet 2111 of the air blowing channel 211, that is, in the embodiment, the plane where the second air guide surface 213 is located is inclined upwards relative to the extending direction of the air blowing channel 211, and the second air guide surface 213 can guide out a part of the air flow output by the air outlet 2111 of the air blowing channel 211 upwards, so that the thickness of the air flow barrier in the height direction is enlarged, and the volume of the air flow barrier is increased, so as to increase the protection strength of the substrate; in an example of the present embodiment, the first wind guide surface 212 and the second wind guide surface 213 may be provided at an angle of 30 to 60 ° with respect to the extending direction of the air blowing channel 211. The two connecting walls are arranged on the side face of the air inlet with the blowing-up channel in the air blowing part in parallel and at intervals, and the two connecting walls are both used for being fixedly connected with the output end of the pitching power element 22.
The pitching power element 22 is installed on the bracket 11, and may be a servo motor or a steering engine, an output end of the pitching power element extends along a horizontal direction perpendicular to the length direction of the supporting arm 112, and an output end of the pitching power element is fixedly connected to a portion, far away from the air outlet 2111 of the air blowing channel 211, of the air blowing element 21, and is suitable for driving the air blowing element 21 to rotate within a preset angle range around a horizontal axis (i.e., the length direction of the supporting arm 112) perpendicular to the extending direction of the air blowing channel 211. It should be noted that when the blowing member 21 is driven by the pitching power element 22 to rotate, the intersection line of the plane of the first air guiding surface 212 and the plane of the bearing surface 1131 is always closer to the air outlet 2111 of the blowing channel 211 relative to any position on the substrate, so as to ensure that the upper surface of the substrate has air flow with a small flow velocity to pass through all the time during the transfer process, so as to prevent the air beside the substrate from entering and prevent the photoresist and the substrate from being attached and polluted by particles; it should be understood that, in order to ensure the achievement of the above functions, in practical applications, the rotation range of the pitch power element 22 may be set based on the size of the included angle between the first air guiding surface 212 and the air blowing channel 211 and the distance between the air outlet 2111 of the air blowing channel 211 and the bearing surface 1131. In the example given in the present embodiment, the preset rotation range of the pitch power element 22 may be 10 to 30 °, and the rotation speed may be set within 0 to 30 °/s.
The controller constitutes a control center of the substrate transfer device, is electrically connected with the vacuum generator, the gas blower, the first horizontal driving assembly 121, the vertical driving assembly 122, the second horizontal driving assembly 123, the rotating power element 13, the pitching power element 22, the vacuum sensor, the throttle valve, the dust sensor 3, the horizontal sensor 4 and the vibration sensor 5 in the embodiment, and can control the operation of each component according to a predetermined program.
The vacuum pressure sensor is arranged on a part of the vacuum generator for forming negative pressure and is used for detecting the vacuum degree of the vacuum generator during working. The throttle valve is arranged at a positive pressure gas source end of the vacuum generator and used for controlling the flow of the input positive pressure gas source; since the vacuum pressure sensor and the throttle valve are conventional devices in the art, the structures of the two are not described in detail in this embodiment.
In this embodiment, the controller is adapted to receive a signal of the vacuum pressure sensor, and controls the throttle valve to operate when the control condition is satisfied, and the specific control mode is that, when the vacuum degree value transmitted to the controller by the vacuum pressure sensor is smaller than the vacuum degree value set in the controller, the controller controls the throttle valve to operate and increases the flow of the positive pressure gas source until the controller detects a vacuum degree signal matched with the vacuum degree value set in the controller, that is, in this embodiment, the controller can monitor the negative pressure value of the vacuum generator in real time, and can control the operating state of the vacuum generator according to the monitoring result, and enable the vacuum generator to always provide a reliable negative pressure action for the substrate, thereby avoiding the situation that the substrate is not adsorbed in place, and ensuring that the substrate has good stability in the transferring process.
The dust sensor 3 is mounted on a bracket 11, which is adapted to detect the concentration of particulate matter in the air. In this embodiment, the dust sensor 3 is specifically installed on the bracket arm 112, and in order to improve the stability of the dust sensor 3, a first groove for placing the dust sensor 3 is formed in the bracket arm 112, and the dust sensor 3 can be fixed in the first groove in an adhesive manner. In view of the protection of the substrate and energy saving, the controller is further adapted to control the gas blower and the pitching power element 22 to operate in a preset mode based on the signal of the dust sensor 3; the preset mode includes the blowing amount of the gas blower and the rotation angle and the rotation speed of the output end of the pitching power element 22. In this embodiment, the preset mode may be any one of a cyclic swing mode and a fixed mode, and in the cyclic swing mode, the blower 2 is driven by the pitching power element 22 to swing back and forth within a specific angle range; in the fixed mode, the blower 2 is driven by the pitch power element 22 to be stopped at a specific angle.
The following description will be specifically made by a reference example in which the first wind guide surface 212 and the second wind guide surface 213 form an angle of 60 ° with the extending direction of the air blowing passage 211; the output end of the pitch power element 22 is at an angle of 20 ° to the horizontal at the initial position of the insufflation passage 211.
When the dust sensor 3 detects PM2.5>30, the controller controls the air blower and the pitch power element 22 to operate in either a cyclic swing mode or a fixed mode. Wherein, in the cyclic oscillation mode, the gas blowing amount of the gas blower is 99m3And h, the output end of the pitching power element 22 rotates upwards in a reciprocating mode by 20 degrees relative to the initial position, and the rotating speed is 20 degrees s. In the fixed mode, the blowing amount of the gas blower is 99m3And h, the output end of the pitching power element 22 rotates upwards by 20 degrees relative to the initial position, and the extending direction of the blowing channel forms an included angle of 40 degrees with the horizontal plane.
When the dust sensor 3 detects 20<When PM2.5 is less than or equal to 30, the controller controls the air blower and the pitching power element 22 to operate in a second cyclic swing mode or a second fixed mode. Wherein, in the second cyclic oscillation mode, the gas blowing amount of the gas blower is 85m3And h, the output end of the pitching power element 22 rotates upwards in a reciprocating mode by 20 degrees relative to the initial position, and the rotating speed is 15 degrees s. In the second fixed mode, the blowing amount of the gas blower was 85m3And h, the output end of the pitching power element 22 rotates upwards by 15 degrees relative to the initial position, and the included angle between the extending direction of the blowing channel and the horizontal plane is fixed at 35 degrees.
When the dust sensor 3 detects 10<When PM2.5 is less than or equal to 20, the controller controls the air blower and the pitching power element 22 to operate in a third cyclic swing mode or a third fixed mode. Wherein, in the third cyclic oscillation mode, the gas blowing amount of the gas blower is 85m3And h, the output end of the pitching power element 22 rotates upwards in a reciprocating mode by 20 degrees relative to the initial position, and the rotating speed is 10 degrees s. In the third fixed mode, the blowing amount of the gas blower was 85m3And h, the output end of the pitching power element 22 rotates upwards by 10 degrees relative to the initial position, and the extending direction of the blowing channel forms an included angle of 30 degrees with the horizontal plane.
When the dust sensor 3 detects that PM2.5 is less than or equal to 10, the controller controls the gas blower and the pitching power element 22 to operate in a four-cycle swinging mode or a four-fixed mode. It is composed ofIn the fourth cyclic oscillation mode, the gas blower has a gas blowing amount of 85m3And h, the output end of the pitching power element 22 rotates upwards in a reciprocating mode by 20 degrees relative to the initial position, and the rotating speed is 10 degrees s. In the fourth fixed mode, the gas blower blows a gas blow amount of 85m3And h, the output end of the pitching power element 22 rotates upwards by 10 degrees relative to the initial position, and the extending direction of the blowing channel forms an included angle of 30 degrees with the horizontal plane.
In this embodiment, the controller controls the air blower and the pitching power element 22 to operate in the preset mode according to the information of the concentration of the particulate matter in the air fed back by the dust sensor 3, for example, when the concentration of the particulate matter in the air is higher, the blowing amount of the air blower can be increased, and the rotation range and the rotation speed of the pitching power element 22 can be increased, and when the concentration of the particulate matter in the air is lower, the blowing amount of the air blower and the rotation range and the rotation speed of the pitching power element 22 can be correspondingly reduced, so that the formation of a reliable air flow protection barrier can be ensured, the energy can be reasonably utilized, and the energy waste can be reduced.
The level sensor 4 is mounted on the bracket 11 and is used for monitoring the levelness of the bearing surface 1131. In this embodiment, the level sensor 4 is specifically installed on the support arm 112, in order to improve the stability of the level sensor 4, a second groove for placing the level sensor 4 is provided on the support arm 112, and the level sensor 4 can be fixed in the second groove by using an adhesive method. The controller is also suitable for controlling the power elements to operate on the basis of signals transmitted by the level sensor 4 so as to enable the bearing surface 1131 to be kept level all the time and reduce the probability of damage to the substrate caused by the change of the pose in the transferring process.
The vibration sensor 5 is mounted on the bracket 11 and adapted to detect vibration of the bracket 11. In this embodiment, the vibration sensor 5 is specifically installed on the support arm 112, in order to improve the stability of the level sensor 4, a third groove for placing the level sensor 4 is provided on the support arm 112, and the level sensor 4 may be fixed in the third groove by using an adhesive method. The controller is further adapted to receive the signal of the vibration sensor 5 and control the gas blower, the pitching power element 22, the rotating power element 13 and the moving body 12 to stop operating when the control condition is satisfied, specifically, the controller controls the gas blower, the pitching power element 22, the rotating power element 13 and the moving body 12 to stop operating when the received vibration signal is greater than a preset value. The controller monitors the environmental state of the substrate in the transfer process through the information fed back by the vibration sensor 5 so as to avoid the fragmentation of the substrate due to the over-large vibration.
In practical application, the first horizontal driving assembly 121, the vertical driving assembly 122 and the second horizontal driving assembly 123 are controlled to move according to the position of the substrate, so that the supporting arm 112 moves below the substrate, then the supporting surface 1131 is kept horizontal and attached to the lower surface of the substrate by finely adjusting the vertical driving assembly 122 and rotating the power element 13, then the vacuum generator is started to make the substrate adsorbed on the supporting surface 1131, and meanwhile, the gas blower is started, so that the substrate can be transported.
The description of the above specification and examples is intended to be illustrative of the scope of the present application and is not intended to be limiting.

Claims (10)

1. The substrate transfer device is characterized by comprising a vacuum generator, a gas blower, a transfer mechanism and a blower, wherein the transfer mechanism comprises a bracket; the bracket is suitable for translation and is provided with a bearing surface for bearing the substrate; the bearing surface is provided with a plurality of adsorption holes, and each adsorption hole is communicated with the vacuum generator; the blower is arranged on the bracket and is provided with an air blowing channel; the blowing channel is communicated with the gas blower, the blowing channel extends upwards in an inclined way relative to the bearing surface, and the gas outlet faces to one side of the bearing surface; the lower end of an air outlet of the air blowing channel is provided with a first air guide surface which inclines downwards; the intersection line of the plane of the first air guide surface and the plane of the bearing surface is relatively adsorbed to any position of the substrate on the bearing surface and is close to the air outlet of the air blowing channel.
2. A substrate transport apparatus according to claim 1, wherein the air outlet of the air blowing passage is a horizontally extending elongated opening, and the length of the air blowing passage extends in a direction perpendicular to the extending direction of the air blowing passage.
3. A substrate transport apparatus according to claim 2, wherein a second air guide surface is provided at an upper end of the air outlet of the air blowing passage; the plane where the second air guide surface is located is inclined upwards relative to the extending direction of the air blowing channel.
4. A substrate transport apparatus as recited in claim 3 wherein the purge means comprises a purge member and a pitch motive element; the air blowing piece is provided with the air blowing channel; the pitching power element is arranged on the bracket, and the output end of the pitching power element is fixedly connected with the part of the air blowing piece, which is far away from the air outlet of the air blowing channel, and is suitable for driving the air blowing piece to rotate around a horizontal axis which is vertical to the extending direction of the air blowing channel within a preset angle range; when the air blowing piece rotates, the intersection line of the plane of the first air guide surface and the plane of the bearing surface is always closer to the air outlet of the air blowing channel relative to any position on the substrate.
5. A substrate transport apparatus according to any one of claims 1 to 4, further comprising a vacuum pressure sensor and throttle valve and controller; the vacuum pressure sensor is arranged on the vacuum generator and is used for detecting the vacuum degree of the vacuum generator during working; the throttle valve is arranged at a positive pressure gas source end of the vacuum generator; the controller is electrically connected with the vacuum pressure sensor and the throttle valve and is used for receiving signals of the vacuum pressure sensor and controlling the throttle valve to work when control conditions are met.
6. The substrate transport apparatus of claim 5, further comprising a dust sensor; the dust sensor is arranged on the bracket and is suitable for detecting the concentration of particulate matters in the air; the controller is also electrically connected with the pitching power element and the dust sensor and is used for controlling the air blower and the pitching power element to work in a preset mode based on the signal of the dust sensor; the preset mode comprises the air blowing amount of the air blower, and the rotation angle and the rotation speed of the output end of the pitching power element.
7. A substrate transport apparatus as recited in claim 5 further comprising a level sensor electrically connected to said controller; the level sensor is arranged on the bracket and used for detecting the levelness of the bearing surface;
the transfer mechanism further comprises a moving body and a rotating power element; the rotating power element is arranged on the moving body and is suitable for being driven by the moving body to translate, and the output end of the rotating power element is fixedly connected with the bracket and is suitable for driving the bracket to rotate around the horizontal axial direction;
the controller is also suitable for controlling the rotary power element to operate based on the signal of the level sensor so that the bearing surface is always kept horizontal.
8. A substrate transport apparatus as claimed in claim 7 wherein the carrier comprises a mounting base and a bracket; the fixed seat is fixedly connected with the output end of the rotating power element; the supporting arm extends along the direction parallel to the rotating shaft of the output end of the rotating power element, one end of the supporting arm is fixedly connected with the fixed seat, and the upper surface of the other end of the supporting arm is provided with the bearing surface.
9. A substrate transport apparatus according to claim 7, further comprising a frame; the moving main body comprises a first horizontal driving assembly, a vertical driving assembly, a second horizontal driving assembly, a first moving seat, a second moving seat and a third moving seat; the first horizontal driving component is arranged on the rack, and the output end of the first horizontal driving component is fixedly connected with the first moving seat and is suitable for driving the first moving seat to move along a horizontal first direction; the vertical driving assembly is arranged on the first moving seat, and the output end of the vertical driving assembly is fixedly connected with the second moving seat and is suitable for driving the second moving seat to move along the vertical direction; the second horizontal driving component is arranged on the second movable seat, and the output end of the second horizontal driving component is fixedly connected with the third movable seat and is suitable for driving the third movable seat to move along a horizontal second direction vertical to the first direction; the rotating power element is arranged on the third movable seat.
10. A substrate transport apparatus as recited in claim 8 further comprising a vibration sensor electrically connected to said controller; the vibration sensor is arranged on the bracket and is suitable for detecting the vibration condition of the bracket; the controller is adapted to receive a signal of the vibration sensor and control the gas blower, the pitching power element, the rotating power element, and the moving body to stop operating when a control condition is satisfied.
CN202210074403.5A 2022-01-21 2022-01-21 Substrate transfer device Pending CN114429929A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202210074403.5A CN114429929A (en) 2022-01-21 2022-01-21 Substrate transfer device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202210074403.5A CN114429929A (en) 2022-01-21 2022-01-21 Substrate transfer device

Publications (1)

Publication Number Publication Date
CN114429929A true CN114429929A (en) 2022-05-03

Family

ID=81312697

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202210074403.5A Pending CN114429929A (en) 2022-01-21 2022-01-21 Substrate transfer device

Country Status (1)

Country Link
CN (1) CN114429929A (en)

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