CN114381363B - Preparation method of PCR rapid detection system and PCR rapid detection system - Google Patents
Preparation method of PCR rapid detection system and PCR rapid detection system Download PDFInfo
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Abstract
The invention discloses a preparation method of a PCR rapid detection system and the PCR rapid detection system, and relates to the technical field of semiconductors and bioengineering. The preparation method of the PCR rapid detection system comprises the following steps: providing or preparing a biochip; depositing a metal layer on the surface of the biochip; providing or preparing a light emitting chip having a light emitting array; providing or preparing a driving chip for electrical connection with the light emitting chip; bonding the light-emitting chip with the driving chip, and bonding one side of the biochip provided with the metal layer with the light-emitting chip to obtain the PCR rapid detection system; the light emitted by the light emitting chip can irradiate the metal layer, so that the temperature of the metal layer is changed. The invention solves the technical problem of lower heating efficiency of the PCR rapid detection system in the prior art.
Description
Technical Field
The invention relates to the technical field of semiconductors and bioengineering, in particular to a preparation method of a PCR rapid detection system and the PCR rapid detection system.
Background
Currently, DNA detection techniques based on PCR (optical polymerase chain reaction) require tens of thermal cycles to complete the detection. The slow temperature change speed of the traditional PCR reaction scheme based on the micro heater is a main reason for long time consumption of the thermal cycle of the whole DNA detection system, and the detection efficiency is low.
Disclosure of Invention
In view of the above, the invention provides a preparation method of a PCR rapid detection system and the PCR rapid detection system, which are used for solving the technical problem of long heat cycle time consumption of the PCR rapid detection system in the prior art.
In order to solve the technical problems, the first technical scheme adopted by the invention is as follows:
the preparation method of the PCR rapid detection system comprises the following steps:
Providing or preparing a biochip;
depositing a metal layer on the surface of the biochip;
Providing or preparing a light emitting chip having a light emitting array;
Providing or preparing a driving chip for electrical connection with the light emitting chip; and
Bonding the light-emitting chip with the driving chip, and bonding one side of the biochip provided with a metal layer with the light-emitting chip to obtain the PCR rapid detection system; the light emitted by the light emitting chip can irradiate the metal layer, so that the temperature of the metal layer is changed.
In some embodiments of the method of preparing a PCR rapid detection system, the method of preparing a PCR rapid detection system further comprises the steps of: and etching micropores on the metal layer.
In some embodiments of the method of preparing a PCR rapid detection system, the method of preparing a PCR rapid detection system further comprises the steps of:
obtaining parameters of an ion-sensitive sensor and a temperature sensor in the biochip based on analysis and simulation design; and
The ion sensitive sensor and the temperature sensor are integrated in the same carrier to form a sensor system.
In some embodiments of the method for preparing a rapid PCR detection system, the metal layer is made of any one of Au, ag and Al.
In some embodiments of the method of preparing a PCR rapid detection system, the sensitivity of the ion sensitive sensor is not less than 190mV/pH and the temperature sensor accuracy is not less than 0.2 ℃.
In some embodiments of the method for preparing a rapid PCR detection system, the light emitting chip is a Micro-LED chip, and the wavelength range of light emitted by the light emitting chip is 400-850nm.
In some embodiments of the method for preparing a rapid PCR detection system, the method for preparing the light emitting chip comprises the steps of:
Providing or preparing an epitaxial wafer;
Cleaning the epitaxial wafer;
drying the cleaned epitaxial wafer, and performing mesa etching;
Removing photoresist from the epitaxial wafer after the mesa etching, and cleaning and drying;
Forming a current spreading layer on the mesa; and
And evaporating an electrode on the current expansion layer.
In some embodiments of the method for preparing a PCR rapid detection system, the light emitting chip is flip-chip bonded to the driving chip, and the biochip is flip-chip bonded to the light emitting chip.
In some embodiments of the method for preparing a rapid PCR detection system, the number of the micropores is plural, and each of the micropores is uniformly distributed on the metal layer.
In order to solve the technical problems, the second technical scheme adopted by the invention is as follows:
a PCR rapid detection system is prepared by the preparation method of the PCR rapid detection system described in the embodiment.
The implementation of the embodiment of the invention has the following beneficial effects:
Compared with the traditional mode of heating the substrate to be detected by adopting the traditional heater, the PCR rapid detection system prepared by the preparation method of the PCR rapid detection system has the advantages that the time required by the thermal cycling reaction is greatly reduced, and the technical problem of long thermal cycling time consumption of the PCR rapid detection system in the prior art is solved. Specifically, the preparation method of the PCR rapid detection system of the invention comprises providing or preparing a biochip; depositing a metal layer on the surface of the biochip; providing or preparing a light emitting chip having a light emitting array; providing or preparing a driving chip for electrical connection with the light emitting chip; and bonding the light-emitting chip and the driving chip, and bonding one side of the biochip provided with the metal layer to the light-emitting chip to obtain the PCR rapid detection system. The temperature of the metal layer can be changed by irradiating the light emitted by the light emitting chip onto the metal layer, and the temperature of the metal layer can be quickly adjusted by the light emitting chip, so that the thermal cycling capacity is accelerated, and the time of thermal cycling reaction is shortened. According to the invention, the luminous chip, the biochip and the driving chip are integrated to form the PCR rapid detection system, and the heat circulation efficiency is improved in a manner that the temperature of the metal layer is rapidly changed by the luminous chip, so that the technical problem of long heat circulation time consumption of the PCR rapid detection system in the prior art is solved.
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In order to more clearly illustrate the embodiments of the invention or the technical solutions in the prior art, the drawings that are required in the embodiments or the description of the prior art will be briefly described, it being obvious that the drawings in the following description are only some embodiments of the invention, and that other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic diagram of a PCR rapid detection system according to the present invention;
FIG. 2 is an exploded view of a part of the PCR rapid detection system according to the present invention;
FIG. 3 is a graph of time versus temperature for thirty thermal cycles of the present invention;
FIG. 4 is a flow chart of the preparation method of the present invention.
Wherein: 1. a biochip; 2. a light emitting chip; 3. a driving chip; 4. a metal layer.
Detailed Description
In order that the invention may be readily understood, a more complete description of the invention will be rendered by reference to the appended drawings. Preferred embodiments of the present invention are shown in the drawings. This invention may, however, be embodied in many other different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete.
It will be understood that when an element is referred to as being "fixed to" another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. The terms "vertical," "horizontal," "left," "right," and the like are used herein for illustrative purposes only.
Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. The terminology used herein in the description of the invention is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. The term "and/or" as used herein includes any and all combinations of one or more of the associated listed items.
Currently, DNA detection techniques based on PCR (optical polymerase chain reaction) require tens of thermal cycles to complete the detection. The traditional PCR reaction scheme based on the micro heater is low in speed, is a main reason for long time consumption of the whole DNA detection system, and is low in detection efficiency.
Referring to fig. 1-2 and fig. 4, in an embodiment of a method for preparing a PCR rapid detection system, the method comprises the following steps:
Providing or preparing a biochip 1;
Depositing a metal layer 4 on the surface of the biochip 1;
Providing or preparing a light emitting chip 2 having a light emitting array;
providing or preparing a driving chip 3 for electrical connection with the light emitting chip 2; and
The light-emitting chip 2 is bonded with the driving chip 3, and then one side of the biochip 1 provided with the metal layer 4 is bonded with the light-emitting chip 2 to obtain a PCR rapid detection system, and the light emitted by the light-emitting chip 2 can irradiate on the metal layer 4, so that the temperature of the metal layer 4 is changed.
In the preparation method of the PCR rapid detection system in the embodiment, the metal layer 4 deposited on the surface of the biochip 1 can receive light from the light-emitting chip 2, and the temperature of the metal layer 4 can be changed by adjusting the driving chip 3, so that the thermal cycling capacity of the whole PCR rapid detection system can be quickened, the time of thermal cycling reaction is shortened, and the technical problem of long thermal cycling time consumption of the PCR rapid detection system in the prior art is further solved.
In an embodiment of the method for preparing the rapid PCR detection system, the method for preparing the rapid PCR detection system further comprises the following steps: micro holes are etched in the metal layer 4.
In this embodiment, specifically, the micropores are disposed on the side of the metal layer 4 facing the light emitting chip 2, and may be blind holes or through holes penetrating through the metal layer 4, so that the surface area of the metal layer 4 is increased, and when the light emitted by the light emitting chip 2 irradiates the metal layer 4, the contact area with the light can be increased, the heat conduction efficiency is improved, and the heat loss is reduced, thereby achieving the effect of enhancing the power consumption and the utilization rate of the PCR rapid detection system.
Preferably, the number of the micropores is plural, and each micropore is uniformly distributed on the metal layer 4. Specifically, a structure in which micropores constitute a matrix is arranged on the metal layer 4.
In one embodiment of a method for preparing a PCR rapid detection system, the steps for preparing the biochip 1 include:
Obtaining parameters of an ion-sensitive sensor and a temperature sensor in the biochip 1 based on analysis simulation design; and
The heater, the ion sensitive sensor and the temperature sensor are integrated in the same carrier, forming a sensor system.
In the embodiment, specifically, the analysis simulation adopts a gm/Id-based mode, and based on theoretical analysis, model simulation and experimental verification of gm/Id, the optimal bias voltage, working interval and other parameters of the ion bulk field effect transistor can be obtained, and the obtained parameters are used for design and development of a sensor system, so that the optimal performance can be conveniently obtained.
In addition, the carrier can be a wafer, and the interface circuits of the integral sensor system are also integrated on the same wafer, so that the sensitivity of the integral sensor system can be improved, and the accuracy and the reliability of the integral sensor system can be further improved.
In one embodiment of the method for preparing the rapid PCR detection system, the metal layer 4 is made of any one of Au, ag and Al.
In the present invention, the metal layer 4 is used to receive light emitted from the light emitting chip 2 and thereby change the temperature of the metal layer 4 itself. The preferred material is Au, and Au has good heat conductivity, can improve the efficiency of heat conduction and detection efficiency, and can be matched with the light-emitting chip 2 to achieve the effect of rapid heating and cooling and realize rapid thermal circulation.
In one embodiment of a method for preparing a PCR rapid detection system, the driver chip 3 is prepared based on a CMOS process.
In this embodiment, the CMOS process is simply called complementary metal oxide semiconductor, and is developed based on PMOS and NMOS processes, and the integrated circuit based on the CMOS process has the advantages of low power consumption, high speed, and high degree of anti-interference capability Jiang Heji.
In one embodiment of the method for preparing the PCR rapid detection system, the sensitivity of the ion-sensitive sensor is not lower than 190mV/pH, and the accuracy of the temperature sensor is not lower than 0.2 ℃.
In the embodiment, the sensitivity of the ion-sensitive sensor can determine the reading time of signals, and when the reading time reaches more than 190mV/pH, microsecond signal reading can be achieved, so that the accuracy and reliability of the whole sensor system are improved.
In one embodiment of a method for preparing a PCR rapid detection system, the light emitting chip 2 is a Micro-LED chip. The light wavelength range emitted by the light emitting chip 2 is 400nm-850nm.
Micro-LEDs are arrays of light emitting chips 2, typically LED chips of less than 50um in size, that thin and compact conventional LEDs. The Micro-LED has good monochromaticity, narrow half-wave width and high light efficiency, so that the structure for receiving light has higher heat receiving.
The size of the Micro-LED is nano-scale, and photon PCR based on the Micro-LED can prepare smaller size without being limited by the size of a light source, so that the Micro-LED has more application and development space.
The service life of the Micro-LED is ten times that of a common LED, the light source does not need to be replaced frequently, and the service life of PCR can be prolonged.
Based on the excellent characteristics of GaN, micro-LEDs made of GaN can operate in extreme environments (such as strong acid and strong alkali, high and low temperatures) and are corrosion resistant, so that the Micro-LEDs have good stability and can operate in various environments.
The power consumption of the Micro-LED is low, the luminous efficiency is 6-7 times of that of the traditional light source, and the energy consumption is greatly reduced. In addition, the preparation process of the Micro-LED does not generate harmful substances and harmful substances in the use process, reduces the emission of pollutants and harmful substances, and is an ideal clean light source. The Micro-LED light source is used for driving the PCR, so that the experimental result is not influenced by chemical pollution.
In an embodiment of a method for preparing a rapid detection system for PCR, the method for preparing the light emitting chip includes the following steps:
Providing or preparing an epitaxial wafer;
Cleaning the epitaxial wafer;
drying the cleaned epitaxial wafer, and performing mesa etching;
Removing photoresist from the epitaxial wafer after the mesa etching, and cleaning and drying;
Forming a current spreading layer on the mesa; and
And evaporating an electrode on the current expansion layer.
Specifically, in this embodiment, the reagents used for cleaning the epitaxial wafer may be as follows H 2SO4：H2O2：H2 o=5: 1:1, cleaning for 10min, then cleaning for 5min with acetone, then cleaning for 5min with isopropanol, and finally cleaning with deionized water and then drying with nitrogen.
The specific method of mesa etching is that 300nm SiO 2 is deposited first and then dry etching is carried out. The specific process parameters are as follows: over etching is 40%, the SiO 2 etching rate is 30nm/min, and the etching rate of the photoresist is 18A/min.
The photoresist is removed by a plasma dry method, and the specific technological parameters are as follows: 400W, O 2 at a flow rate and time of 120sccm and 3min, respectively. And (3) after photoresist removal, cleaning for 5min by using acetone, cleaning for 5min by using isopropanol, and finally cleaning by using deionized water and drying by using nitrogen.
The current expansion layer is made of ITO or Ni or Au. The process of evaporating the electrode is an ELEC process.
The preparation method of the PCR rapid detection system comprises the steps of firstly inversely bonding the light-emitting chip 2 and the driving chip 3, and then inversely bonding the biochip 1 and the light-emitting chip 2 in the connection process of the light-emitting chip 2, the driving chip 3 and the biochip 1. Through the flip-chip bonding mode, the size of the whole PCR rapid detection system can be reduced.
The invention also relates to a PCR rapid detection system, which is prepared by the preparation method of the PCR rapid detection system in the embodiment. When the PCR rapid detection system is applied to the PCR equipment, the PCR rapid detection system can be arranged on a reaction container on the PCR equipment, and the reaction container is used for accommodating a substrate to be detected.
The cost of the PCR rapid detection system can be reduced by the CMOS process, so that the cost of the PCR rapid detection system is reduced, and the PCR rapid detection system can be received by consumers, is convenient for screening early cases and reduces middle-late severe symptoms. For example, early screening for cancer, cancer is currently still the leading cause of death worldwide, and its morbidity and mortality are still rising year by year. In our country, the incidence of cancer approaches world level, but the mortality rate is higher than world level. According to the latest statistics of the current situation of cancer, the overall cancer incidence rate of China reaches 5.5 per mill, one person is diagnosed as cancer every 6 minutes, 8550 people become cancer patients every day, and one person in seven to eight people dies from cancer. In the next 10 years, the incidence and mortality rate of cancer in China will continue to rise. Cancer mortality rate is high, and an important reason is that cancer findings in China are more in middle and late stages. By adopting the PCR rapid detection system, a consumer can be prepared at home, so that the consumer can conveniently screen family members, early discovery is realized, the occurrence of middle and later-stage cases is reduced, and life and property losses can be reduced in the long term.
According to the invention, the whole detection time can be compressed by heating the micro heater and the light-emitting chip 2, as shown in fig. 3, the thermal cycle time in the PCR rapid detection system can be compressed to be within 5 minutes, the time cost is reduced, and the rapid, accurate and on-site disease screening becomes more reliable.
In a further preferred embodiment, as shown in fig. 4, the method for preparing the rapid detection system for PCR of the present invention comprises:
Theoretical analysis, model simulation and experimental verification based on gm/Id are carried out to obtain the optimal bias voltage and working interval parameters of the ion bulk field effect transistor;
designing an ion-sensitive sensor and a temperature sensor based on the obtained parameters, and integrating the ion-sensitive sensor and the temperature sensor into a sensor system;
applying the obtained sensor system to the design and manufacture of the biochip 1 to obtain the biochip 1;
Depositing a metal layer 4 made of any one of Au, ag and Al on the obtained biochip 1;
Preparing a Micro-LED chip, wherein the wavelength range of light emitted by the Micro-LED chip is 400nm to 850nm;
Preparing a driving chip 3 based on a CMOS process; and
Flip-chip bonding the Micro-LED chip to the driving chip 3, flip-chip bonding the biochip 1 to the Micro-LED chip, and making the metal layer 4 face the Micro-LED chip;
Wherein the sensitivity of the ion sensitive sensor is not lower than 190mV/pH, and the accuracy of the temperature sensor is not lower than 0.2 ℃.
The specific embodiment one of the preparation method of the PCR rapid detection system comprises the following steps:
Theoretical analysis, model simulation and experimental verification based on gm/Id are carried out to obtain the optimal bias voltage and working interval parameters of the ion bulk field effect transistor;
Designing an ion-sensitive sensor and a temperature sensor based on the obtained parameters, and integrating the ion-sensitive sensor and the temperature sensor into a sensor system;
applying the obtained sensor system to the design and manufacture of the biochip 1 to obtain the biochip 1;
depositing an Au metal layer 4 on the obtained biochip 1;
Preparing a Micro-LED chip, wherein the wavelength of light emitted by the Micro-LED chip is 450nm;
Preparing a driving chip 3 based on a CMOS process; and
Flip-chip bonding the Micro-LED chip to the driving chip 3, flip-chip bonding the biochip 1 to the Micro-LED chip, and making the metal layer 4 face the Micro-LED chip;
wherein the sensitivity of the ion sensitive sensor is 190mV/pH, and the accuracy of the temperature sensor is 0.2 ℃.
The PCR rapid detection system prepared by the above specific example was thermally cycled for thirty times for 250 seconds.
The preparation method of the PCR rapid detection system comprises the following steps:
Theoretical analysis, model simulation and experimental verification based on gm/Id are carried out to obtain the optimal bias voltage and working interval parameters of the ion bulk field effect transistor;
Designing an ion-sensitive sensor and a temperature sensor based on the obtained parameters, and integrating the ion-sensitive sensor and the temperature sensor into a sensor system;
applying the obtained sensor system to the design and manufacture of the biochip 1 to obtain the biochip 1;
depositing an Au metal layer 4 on the obtained biochip 1;
preparing a Micro-LED chip, wherein the wavelength of light emitted by the Micro-LED chip is 850nm;
Preparing a driving chip 3 based on a CMOS process; and
Flip-chip bonding the Micro-LED chip to the driving chip 3, flip-chip bonding the biochip 1 to the Micro-LED chip, and making the metal layer 4 face the Micro-LED chip;
wherein the sensitivity of the ion sensitive sensor is 190mV/pH, and the accuracy of the temperature sensor is 0.2 ℃.
The PCR rapid detection system prepared by the above specific example was thermally cycled for thirty times for 270 seconds.
The preparation method of the PCR rapid detection system comprises the following steps:
Theoretical analysis, model simulation and experimental verification based on gm/Id are carried out to obtain the optimal bias voltage and working interval parameters of the ion bulk field effect transistor;
Designing an ion-sensitive sensor and a temperature sensor based on the obtained parameters, and integrating the ion-sensitive sensor and the temperature sensor into a sensor system;
applying the obtained sensor system to the design and manufacture of the biochip 1 to obtain the biochip 1;
depositing an Ag metal layer 4 on the obtained biochip 1;
preparing a Micro-LED chip, wherein the wavelength of light emitted by the Micro-LED chip is 650nm;
Preparing a driving chip 3 based on a CMOS process; and
Flip-chip bonding the Micro-LED chip to the driving chip 3, flip-chip bonding the biochip 1 to the Micro-LED chip, and making the metal layer 4 face the Micro-LED chip;
Wherein the sensitivity of the ion sensitive sensor is 200mV/pH, and the accuracy of the temperature sensor is 0.1 ℃.
The PCR rapid detection system prepared by the above specific example was thermally cycled for thirty times of 275 seconds.
The third embodiment of the preparation method of the PCR rapid detection system of the invention is as follows:
Theoretical analysis, model simulation and experimental verification based on gm/Id are carried out to obtain the optimal bias voltage and working interval parameters of the ion bulk field effect transistor;
Designing an ion-sensitive sensor and a temperature sensor based on the obtained parameters, and integrating the ion-sensitive sensor and the temperature sensor into a sensor system;
applying the obtained sensor system to the design and manufacture of the biochip 1 to obtain the biochip 1;
depositing an Al metal layer 4 on the resulting biochip 1;
Preparing a Micro-LED chip, wherein the wavelength of light emitted by the Micro-LED chip is 400nm;
Preparing a driving chip 3 based on a CMOS process; and
Flip-chip bonding the Micro-LED chip to the driving chip 3, flip-chip bonding the biochip 1 to the Micro-LED chip, and making the metal layer 4 face the Micro-LED chip;
wherein the sensitivity of the ion sensitive sensor is 190mV/pH, and the accuracy of the temperature sensor is 0.2 ℃.
The PCR rapid detection system prepared by the above specific example was thermally cycled for thirty times for 280 seconds.
The third embodiment of the preparation method of the PCR rapid detection system of the invention is as follows:
Theoretical analysis, model simulation and experimental verification based on gm/Id are carried out to obtain the optimal bias voltage and working interval parameters of the ion bulk field effect transistor;
Designing an ion-sensitive sensor and a temperature sensor based on the obtained parameters, and integrating the ion-sensitive sensor and the temperature sensor into a sensor system;
applying the obtained sensor system to the design and manufacture of the biochip 1 to obtain the biochip 1;
depositing an Al metal layer 4 on the resulting biochip 1;
Preparing a Micro-LED chip, wherein the wavelength range of light emitted by the Micro-LED chip is 460nm;
Preparing a driving chip 3 based on a CMOS process; and
Flip-chip bonding the Micro-LED chip to the driving chip 3, flip-chip bonding the biochip 1 to the Micro-LED chip, and making the metal layer 4 face the Micro-LED chip;
wherein the sensitivity of the ion sensitive sensor is not lower than 190mV/pH temperature sensor accuracy is not lower than 0.2 ℃.
The PCR rapid detection system prepared by the above specific example was thermally cycled for thirty times for 290 seconds.
The above specific examples are only some embodiments of the present invention, and in fact, many specific embodiments of the preparation method are still further described, so that all possible combinations of the technical features in the above embodiments are not described for the sake of brevity. In these embodiments, the metal layer 4 is made of Au, and the light emitting chip 2 has a wavelength of 450nm, which is the best combination. The sensitivity of the ion sensor and the accuracy of the temperature sensor are improved, the influence on the time reduction of the thermal cycle is small, the improvement cost is high, and specific selection can be selected according to actual conditions.
In combination with the illustration of FIG. 3, the PCR rapid detection system of the invention has a time of thirty thermal cycles (denaturation from 95 ℃ to 55 ℃ for annealing and extension) of less than 5 minutes in the PCR reaction process, and the extremely short PCR reaction time can greatly improve the response speed of the whole PCR rapid detection system, so that the rapid, accurate and on-site disease screening becomes more reliable.
The PCR rapid detection system and the PCR rapid detection system can be used for early cancer detection, epidemic rapid screening of new coronaries such as pneumonia and food sanitation detection, wherein, the template of the PCR reaction is DNA, so that RNA detection such as the new coronaries and the like needs to be reversely transcribed into DNA and then be tested. By the PCR rapid detection system and the PCR rapid detection system, the total reaction time is about 5 minutes, so that rapid diagnosis of early cancer is realized, and the time of a user is not wasted due to long-time waiting. The epidemic disease screening method can rapidly screen patients and healthy people, so that epidemic situation defense is more scientific. But can improve the detection rate of food in food sanitation and rapidly screen the problem food.
In addition, the existing PCR rapid detection system generally adopts a micro-heater as a heat source, such as a resistance type micro-heater and an electromagnetic induction type micro-heater, wherein the resistance type micro-heater generates heat by utilizing the resistance of a conductor to heat, current passes through the conductor, the conductor has a blocking effect on the current, the current overcomes the resistance of the conductor to do work, and the current is transmitted through electric energy, so that the electric energy is converted into heat energy, and the heating is slow; the electromagnetic induction heater adopts the heat effect generated by the induction current formed by the conductor in the alternating electromagnetic process to heat the conductor, the heating speed is also slower, and the detection time of thirty times of heat cycles is more than 40 minutes, and the time is long.
The technical features of the above embodiments may be arbitrarily combined, and all possible combinations of the technical features in the above embodiments are not described for brevity of description, however, as long as there is no contradiction between the combinations of the technical features, they should be considered as the scope of the description.
The foregoing examples illustrate only a few embodiments of the invention, which are described in detail and are not to be construed as limiting the scope of the claims. It should be noted that it will be apparent to those skilled in the art that several variations and modifications can be made without departing from the spirit of the invention, which are all within the scope of the invention. Accordingly, the scope of protection of the present invention is to be determined by the appended claims.
Claims (8)
1. The preparation method of the PCR rapid detection system is characterized by comprising the following steps of:
Providing or preparing a biochip;
depositing a metal layer on the surface of the biochip;
Providing or preparing a light emitting chip having a light emitting array;
Providing or preparing a driving chip for electrical connection with the light emitting chip; and
Bonding the light-emitting chip with the driving chip, and bonding one side of the biochip provided with the metal layer with the light-emitting chip to obtain a PCR rapid detection system; the light emitted by the light emitting chip can irradiate the metal layer, so that the temperature of the metal layer is changed;
The metal layer is made of any one of Au, ag and Al, the light-emitting chip is a Micro-LED chip, and the wavelength range of light emitted by the light-emitting chip is 400nm-850nm.
2. The method for preparing a rapid PCR detection system according to claim 1, further comprising the steps of: and etching micropores on the metal layer.
3. The method for preparing a rapid PCR detection system according to claim 2, further comprising the steps of:
obtaining parameters of an ion-sensitive sensor and a temperature sensor in the biochip based on analysis and simulation design; and
The ion sensitive sensor and the temperature sensor are integrated in the same carrier to form a sensor system.
4. The method for preparing a rapid PCR detection system according to claim 3, wherein the sensitivity of the ion sensitive sensor is not lower than 190mV/pH, and the accuracy of the temperature sensor is not lower than 0.2 ℃.
5. The method for preparing the rapid PCR detection system according to claim 1, wherein the method for preparing the light emitting chip comprises the steps of:
Providing or preparing an epitaxial wafer;
Cleaning the epitaxial wafer;
drying the cleaned epitaxial wafer, and performing mesa etching;
Removing photoresist from the epitaxial wafer after the mesa etching, and cleaning and drying;
Forming a current spreading layer on the mesa; and
And evaporating an electrode on the current expansion layer.
6. The method for preparing a rapid PCR detection system according to claim 1, wherein the light-emitting chip and the driving chip are flip-chip bonded, and the biochip and the light-emitting chip are flip-chip bonded.
7. The method for preparing a rapid PCR detection system according to claim 2, wherein the number of the micro-holes is plural, and each micro-hole is uniformly distributed on the metal layer.
8. A rapid PCR detection system prepared by the method of preparing a rapid PCR detection system according to any one of claims 1 to 7.
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