CN114352949A - Chemical supply device and alarm method thereof - Google Patents
Chemical supply device and alarm method thereof Download PDFInfo
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- CN114352949A CN114352949A CN202111444471.8A CN202111444471A CN114352949A CN 114352949 A CN114352949 A CN 114352949A CN 202111444471 A CN202111444471 A CN 202111444471A CN 114352949 A CN114352949 A CN 114352949A
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- gas
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- chemical supply
- supply device
- pressure gauge
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- 239000000126 substance Substances 0.000 title claims abstract description 31
- 238000000034 method Methods 0.000 title claims abstract description 20
- 238000004891 communication Methods 0.000 claims abstract description 22
- 230000001960 triggered effect Effects 0.000 claims abstract description 8
- 239000007789 gas Substances 0.000 claims description 40
- 239000011261 inert gas Substances 0.000 claims description 5
- 238000001514 detection method Methods 0.000 claims description 3
- 230000008878 coupling Effects 0.000 claims description 2
- 238000010168 coupling process Methods 0.000 claims description 2
- 238000005859 coupling reaction Methods 0.000 claims description 2
- 230000002159 abnormal effect Effects 0.000 abstract description 2
- 238000012545 processing Methods 0.000 description 4
- 238000012544 monitoring process Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000008054 signal transmission Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
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Abstract
The embodiment of the invention discloses a chemical supply device, which comprises a treatment tank, wherein the treatment tank is connected with an air inlet pipe, the treatment tank is also communicated with gas through the air inlet pipe, a pressure relief valve is arranged on the air inlet pipe, the pressure relief valve is also connected with an exhaust pipe, an adapter port is arranged on the exhaust pipe, a pressure gauge is fixedly connected to the adapter port, and the pressure gauge is in signal connection with a communication board; the embodiment of the invention also discloses an alarm method of the chemical supply device, wherein gas enters the adapter port through the pressure relief valve, and the pressure of the pressure gauge is triggered to rise so as to trigger the communication board to alarm. The chemical supply device and the alarm method thereof can detect the opening or abnormal opening of the pressure release valve through the pressure gauge and then alarm to avoid large-amount and long-time gas leakage.
Description
Technical Field
The invention relates to the technical field of chemical devices, in particular to a chemical supply device and an alarm method of the chemical supply device.
Background
As shown in fig. 1, in the conventional chemical supply device, firstly, chemicals supplied from the outside enter a processing tank through a feed pipe and a control Valve on the feed pipe, then, gas is input into the processing tank through a gas inlet pipe and a control Valve on the gas inlet pipe, and a mechanically operated Pressure Release Valve (Pressure Release Valve 1) is installed at a gas inlet end to protect the safety of a subsequent device and the chemicals. When the gas pressure exceeds the set value of the pressure relief valve or the pressure relief valve is abnormally damaged, the gas can flow into the power exhaust pipe. Without any monitoring, a large and long-term leakage of gas can result.
Disclosure of Invention
The technical problem to be solved by the invention is to provide a chemical supply device and an alarm method thereof, wherein a pressure gauge is used for detecting the opening or abnormal opening of a pressure relief valve, so that the large-amount and long-time leakage of gas is avoided.
In order to solve the technical problem, the invention provides a chemical supply device which comprises a treatment tank, wherein the treatment tank is connected with an air inlet pipe, the treatment tank is communicated with gas through the air inlet pipe, a pressure relief valve is arranged on the air inlet pipe, the pressure relief valve is also connected with an exhaust pipe, an adapter port is arranged on the exhaust pipe, a pressure gauge is fixedly connected to the adapter port, and the pressure gauge is in signal connection with a communication board.
Specifically, the treatment tank is further connected with a feeding pipe, and the treatment tank is communicated with a process machine table through the feeding pipe.
Specifically, the communication board comprises a TB15 communication board.
Specifically, the adapter interface is a bypass detection interface.
In particular, the gas is an inert gas.
The invention also provides an alarm method of the chemical supply device, which comprises the following specific steps:
1) introducing gas into an air inlet pipe;
2) when the gas pressure is overlarge, the gas enters the adapter through the pressure relief valve;
3) the gas entering the adapter port enters the pressure gauge so as to enable the pressure of the pressure gauge to rise;
4) when the pressure of the pressure gauge rises, the communication board is triggered to give an alarm.
Specifically, the gas in step 1) is an inert gas.
The chemical supply device and the alarm method thereof have the following beneficial effects:
according to the chemical supply device and the alarm method thereof, the three-way adapter is arranged behind the pressure relief valve on the exhaust pipe, the pressure gauge is connected to the three-way adapter, and then the pressure gauge is connected to the TB15 communication board; when the relief valve leaks a large amount of gas, make it get into the tee bend switching mouth, touch the pressure gauge pressure and rise and then trigger the communication board and report to the police, can remind the engineer to handle revealing of gas, avoid gaseous a large amount of, long-time leakage.
Drawings
FIG. 1 is a schematic diagram of a chemical supply apparatus in a prior art process;
fig. 2 is a schematic view of an apparatus for monitoring gas leakage in a chemical supply apparatus according to the present invention.
In the figure: 1. the device comprises a processing tank, 2. a process machine table, 3. a feeding pipe, 4. an air inlet pipe, 5. an exhaust pipe, 6. a pressure release valve, 7. a switching port, 8. a pressure gauge, 9. a communication board and 10. a transmission line.
Detailed Description
The technical solutions of the present invention will be described clearly and completely with reference to the accompanying drawings, and it should be understood that the described embodiments are some, but not all embodiments of the present invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments of the present invention without any inventive step, are within the scope of the present invention.
The chemical supply device provided by the invention comprises a treatment tank 1, wherein the treatment tank 1 is connected with an air inlet pipe 4, the treatment tank 1 is also communicated with gas through the air inlet pipe 4, a pressure relief valve 6 is arranged on the air inlet pipe 4, the pressure relief valve 6 is also connected with an exhaust pipe 5, an adapter port 7 is arranged on the exhaust pipe 5, a pressure gauge 8 is fixedly connected on the adapter port 7, and the pressure gauge 8 is in signal connection with a communication board 9.
The treatment tank 1 is also connected with an inlet pipe 3, and the treatment tank 1 is communicated with a process machine table 2 through the inlet pipe 3.
The feeding pipe 3 is further provided with a feeding valve, and the air inlet pipe 4 is further provided with an air inlet valve and an air inlet pressure gauge.
The gas enters the adapter port 7 through the pressure release valve 6, the pressure of the pressure gauge 8 is triggered to rise, and then the communication board 9 is triggered to give an alarm.
The communication board 9 includes a TB15 communication board.
The adapter 7 is a bypass detection interface.
The invention provides an alarm method of a chemical supply device, which comprises the following specific steps:
1) introducing gas into an air inlet pipe;
2) when the gas pressure is overlarge, the gas enters the adapter through the pressure relief valve;
3) the gas entering the adapter port enters the pressure gauge so as to enable the pressure of the pressure gauge to rise;
4) when the pressure of the pressure gauge rises, the communication board is triggered to give an alarm.
Specifically, the gas in step 1) is an inert gas.
According to the chemical supply device and the alarm method thereof provided by the invention, as shown in fig. 2, a feed valve arranged on a feed pipe 3 and an air inlet valve arranged on an air inlet pipe 4 are firstly opened, chemicals supplied on a process machine table 2 enter a treatment tank through the feed pipe 3, and then gas is input into the treatment tank 1 through the air inlet pipe 4. A mechanically operated pressure relief valve 6 is installed at the gas inlet end to protect the safety of the post-stage device and chemicals. When gas pressure surpassed the setting value of relief valve 6 or the unusual damage of relief valve 6, gas can get into blast pipe 5, because install switching mouth 7 on the blast pipe 5, rigid coupling pressure gauge 8 on the switching mouth 7, 8 signal connection on the pressure gauge have communication board 9, so gas gets into switching mouth 7 this moment, rethread switching mouth 7 transmits pressure to pressure gauge 8, touch 8 pressure of pressure gauge pressure and rise, pressure gauge 8 transmits the signal transmission for TB15 communication board 9 afterwards, trigger alarm system, alarm system can remind the engineer in time to handle the gas of revealing.
According to the chemical supply device and the alarm method thereof, the three-way adapter is arranged on the exhaust pipe after the pressure relief valve is arranged on the exhaust pipe, the pressure gauge is connected to the three-way adapter, and then the pressure gauge is connected to the TB15 communication board; when a large amount of gas leaks from the pressure relief valve, the pressure relief valve enters the three-way adapter, the pressure of the pressure gauge is triggered to rise, then the communication board is triggered to alarm the alarm system, an engineer can be reminded of timely processing the leaked gas, and the large-amount and long-time gas leakage is avoided.
In summary, the above embodiments and drawings are only preferred embodiments of the present invention and are not intended to limit the scope of the present invention, and any modifications, equivalent substitutions, improvements and the like made within the spirit and principle of the present invention should be included in the scope of the present invention.
Claims (7)
1. The utility model provides a chemicals feeding mechanism, its characterized in that, is including handling jar (1), it is connected with intake pipe (4) to handle jar (1), it is gaseous still to handle jar (1) through intake pipe (4) intercommunication, install relief valve (6) on intake pipe (4), exhaust pipe (5) are still connected in relief valve (6), install switching mouth (7) on exhaust pipe (5), rigid coupling pressure gauge (8) on switching mouth (7), pressure gauge (8) signal connection has communication board (9).
2. A chemical supply device according to claim 1, wherein the treatment tank (1) is further connected with a feed pipe (3), and the treatment tank (1) is communicated with the process machine platform (2) through the feed pipe (3).
3. A chemical supply device according to claim 1, wherein said communication board (9) comprises a TB15 communication board.
4. A chemical supply device as claimed in claim 1, wherein said adaptor (7) is a bypass detection interface.
5. A chemical supply device as defined in claim 1, wherein said gas is an inert gas.
6. An alarm method of a chemical supply device is characterized by comprising the following specific steps:
1) introducing gas into an air inlet pipe;
2) when the gas pressure is overlarge, the gas enters the adapter through the pressure relief valve;
3) the gas entering the adapter port enters the pressure gauge so as to enable the pressure of the pressure gauge to rise;
4) when the pressure of the pressure gauge rises, the communication board is triggered to give an alarm.
7. The warning method of a chemical supply apparatus according to claim 6, wherein the gas in step 1) is an inert gas.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111444471.8A CN114352949A (en) | 2021-11-30 | 2021-11-30 | Chemical supply device and alarm method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111444471.8A CN114352949A (en) | 2021-11-30 | 2021-11-30 | Chemical supply device and alarm method thereof |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN114352949A true CN114352949A (en) | 2022-04-15 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202111444471.8A Pending CN114352949A (en) | 2021-11-30 | 2021-11-30 | Chemical supply device and alarm method thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN114352949A (en) |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20010076831A (en) * | 2000-01-28 | 2001-08-16 | 박종섭 | Recharger for fabricating semiconductor |
| US20020066410A1 (en) * | 2000-12-01 | 2002-06-06 | Applied Materials Inc. | Pressurized liquid delivery module |
| KR100505493B1 (en) * | 2004-11-26 | 2005-07-29 | (주)에스티글로벌 | Apparatus for automatically venting photoresist |
| CN204448453U (en) * | 2014-12-31 | 2015-07-08 | 苏州同冠微电子有限公司 | Glue spreader liquid feed device |
| CN207996788U (en) * | 2018-01-15 | 2018-10-23 | 深圳市曼恩斯特科技有限公司 | Pressure feeding system |
| KR101976429B1 (en) * | 2018-03-21 | 2019-05-10 | 주식회사 아리솔테크 | Photoresist bubble clear reclaim supply system |
| CN212928899U (en) * | 2020-08-24 | 2021-04-09 | 河南龙佰智能装备制造有限公司 | Ticl4 storage tank overpressure safety protection device |
-
2021
- 2021-11-30 CN CN202111444471.8A patent/CN114352949A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20010076831A (en) * | 2000-01-28 | 2001-08-16 | 박종섭 | Recharger for fabricating semiconductor |
| US20020066410A1 (en) * | 2000-12-01 | 2002-06-06 | Applied Materials Inc. | Pressurized liquid delivery module |
| KR100505493B1 (en) * | 2004-11-26 | 2005-07-29 | (주)에스티글로벌 | Apparatus for automatically venting photoresist |
| CN204448453U (en) * | 2014-12-31 | 2015-07-08 | 苏州同冠微电子有限公司 | Glue spreader liquid feed device |
| CN207996788U (en) * | 2018-01-15 | 2018-10-23 | 深圳市曼恩斯特科技有限公司 | Pressure feeding system |
| KR101976429B1 (en) * | 2018-03-21 | 2019-05-10 | 주식회사 아리솔테크 | Photoresist bubble clear reclaim supply system |
| CN212928899U (en) * | 2020-08-24 | 2021-04-09 | 河南龙佰智能装备制造有限公司 | Ticl4 storage tank overpressure safety protection device |
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