CN204448453U - Glue spreader liquid feed device - Google Patents
Glue spreader liquid feed device Download PDFInfo
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- CN204448453U CN204448453U CN201420867656.9U CN201420867656U CN204448453U CN 204448453 U CN204448453 U CN 204448453U CN 201420867656 U CN201420867656 U CN 201420867656U CN 204448453 U CN204448453 U CN 204448453U
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- pressure
- exhaust piping
- gas exhaust
- glue spreader
- fluid supplier
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Abstract
The utility model belongs to semiconductor applications, be specifically related to the glue spreader liquid feed device in a kind of semiconductor lithography production technology, comprise the fluid supplier holding solution, the air inlet pipeline passed into for gas, for gas discharging gas exhaust piping and the liquid feeding pipeline of solution is provided to described glue spreader, air inlet pipeline, gas exhaust piping are communicated with fluid supplier respectively with liquid feeding pipeline, air inlet pipeline is provided with the pressure control means controlling admission pressure, and gas exhaust piping is provided with can according to the automatic leakage casting die of gas pressure automatic open close.The utility model can realize carrying out man-to-man feed flow to each gluing board, possesses releasing pressure automatically function when pressure is excessive simultaneously.
Description
Technical field
The utility model belongs to semiconductor applications, is specifically related to the glue spreader liquid feed device in the production of a kind of semiconductor lithography process.
Background technology
The supply mode of the chemicals of the gluing board used in semiconductor lithography coating technique adopts the mode of central fluid supply mostly, this central liquid supply system is once break down, affect the normal operating conditions of all relevant boards, and this system price is very expensive, be not too applicable to laboratory and small semiconductor factory.In addition, existing easy local liquid-supplying system, owing to having nitrogen pressure for a long time in pressure pot, once pressure-reducing valve fault easily causes system pressure to transship, thus causes security incident.
Utility model content
The purpose of this utility model is to provide a kind of glue spreader liquid feed device, carries out man-to-man feed flow to each gluing board, possesses releasing pressure automatically function when pressure is excessive simultaneously.
For achieving the above object, the technical scheme that the utility model adopts is: comprise the fluid supplier holding solution, the air inlet pipeline passed into for gas, for gas discharging gas exhaust piping and the liquid feeding pipeline of solution is provided to described glue spreader, air inlet pipeline, gas exhaust piping are communicated with fluid supplier respectively with liquid feeding pipeline, air inlet pipeline is provided with the pressure control means controlling admission pressure, and gas exhaust piping is provided with can according to the automatic leakage casting die of gas pressure automatically open and close.
Described glue spreader liquid feed device also comprises the liquid level sensor and alarm of measuring solution level in fluid supplier, and liquid level sensor is located in fluid supplier, and liquid level sensor is electrically connected with alarm.
Described gas exhaust piping comprises gas exhaust piping one and gas exhaust piping two, and automatic leakage casting die is arranged on gas exhaust piping one, and gas exhaust piping two is provided with can the manual pressure release part of manual opening-closing.
Described pressure control means comprises pressure-reducing valve and Pressure gauge, and pressure-reducing valve controls pressure stability in fluid supplier, force value in Pressure gauge display fluid supplier.
Described liquid level sensor is float type liquid level sensor.
After adopting technique scheme, the utility model has following good effect:
(1) glue spreader liquid feed device of the present utility model, man-to-man feed flow service is carried out to gluing board, in replacement prior art, a liquid feed device is to the mode of all gluing board central fluid supplies, and avoiding breaks down once central fluid supply device affects the duty of all relevant gluing boards on production line;
(2) glue spreader liquid feed device of the present utility model, by passing into inert gas pressurization, solution is supplied, air inlet pipeline is provided with pressure control means, can gas pressure be controlled in specified scope, gas exhaust piping is respectively equipped with automatic leakage casting die and manual pressure release part, can automatic or manual bleed off unnecessary gas, further ensuring equipment safety;
(3) glue spreader liquid feed device of the present utility model, is provided with float type liquid level sensor, can remind staff's fluid level condition at any time, avoids solution in fluid supplier too much or very few;
(4) the utility model is rational in infrastructure, designs ingenious, simple, has higher practical value, easy to utilize.
Accompanying drawing explanation
Fig. 1 is glue spreader liquid feed device structural representation of the present utility model;
Wherein: 1, fluid supplier, 2, air inlet pipeline, 21, pressure control means, 211, pressure-reducing valve, 212, Pressure gauge, 3, gas exhaust piping, 31, gas exhaust piping one, 32, gas exhaust piping two, 301, automatic leakage casting die, 302, manual pressure release part, 4, liquid feeding pipeline, 5, sensor, 6, alarm.
Detailed description of the invention
Below in conjunction with the drawings and specific embodiments, the utility model is described in further detail.
As shown in Figure 1, for glue spreader liquid feed device of the present utility model, comprise fluid supplier 1, air inlet pipeline 2, gas exhaust piping 3 and liquid feeding pipeline 4, air inlet pipeline 2, gas exhaust piping 3 are communicated with fluid supplier 1 respectively with liquid feeding pipeline 4, fluid supplier 1 needs the solution of supply in order to hold, gas exhaust piping 3 has two branch roads, is respectively gas exhaust piping 1 and gas exhaust piping 2 32.
The top of fluid supplier 1 is stretched in one end of giving vent to anger of air inlet pipeline 2, and in order to pass into inert gas, in the present embodiment, inert gas is nitrogen.Air inlet pipeline 2 is provided with pressure control means 21, and pressure control means 21 comprises pressure-reducing valve 211 and Pressure gauge 212, and pressure-reducing valve 211 controls pressure air inlet pipeline 2 passing into nitrogen, remains on safety value to control nitrogen pressure in fluid supplier 1.Pressure gauge 212 is in order to show the force value of nitrogen in fluid supplier 1.
Gas exhaust piping 1 is provided with can according to the automatic leakage casting die 301 of nitrogen pressure automatic open close, the safe pressure setting value of automatic leakage casting die 301 when setting slightly larger than the adjustment fixed value of pressure-reducing valve 211, in the present embodiment, automatic leakage casting die 301 is safety relief valve.Gas exhaust piping 2 32 is provided with can the manual pressure release part 302 of manual opening-closing, and in the present embodiment, manual pressure release part 302 is hand-operated valve.
The bottom of fluid supplier 1 is stretched in liquid feeding pipeline 4 one end, and the other end is connected with described gluing board, realizes solution supply.
Liquid level sensor 5 is provided with in fluid supplier 1, in the utility model, liquid level sensor 5 is float type liquid level sensor, described float type liquid level sensor is vertically placed in fluid supplier 1, and the top of described float type liquid level sensor is provided with high liquid level induction point, and bottom is provided with low liquid level induction point.Described float type liquid level sensor is electrically connected with alarm 6, high liquid level induction point is in order to respond to the highest order of solution in fluid supplier 1, low liquid level induction point is in order to respond to the lowest order of solution in fluid supplier 1, and induction result is fed back to alarm 6 by high liquid level induction point and low liquid level induction point.
Glue spreader liquid feed device of the present utility model in use, passes into nitrogen from air inlet pipeline 2, and the pressure size passing into nitrogen is controlled by pressure-reducing valve 211.Be hyperbar state in fluid supplier 1, the solution in fluid supplier 1 is extruded from liquid feeding pipeline 4 flows to glue spreader.When pressure-reducing valve 211 breaks down, in fluid supplier 1, nitrogen pressure exceedes the adjustment fixed value of pressure-reducing valve 211, and reaches the safe pressure setting value of automatic leakage casting die 301, and automatic leakage casting die 301 is opened automatically, releases unnecessary nitrogen, makes constant pressure in fluid supplier 1.When in fluid supplier 1, liquid level of solution is lower than low liquid level induction point, low liquid level induction point senses now liquid level state, and by result feedback to alarm 6, alarm 6 is reported to the police, and in prompting staff fluid supplier 1, solution is about to finish using.When staff needs to add solution, first open manual pressure release part 302, unnecessary nitrogen in release fluid supplier 1, then open the filling opening of fluid supplier 1, add solution.When liquid level of solution is higher than high liquid level induction point, high liquid level induction point senses now liquid level state, and by result feedback to alarm 6, alarm 6 is reported to the police, and in prompting staff fluid supplier 1, solution adds complete.
To one skilled in the art, according to technical scheme described above and design, other various corresponding change and deformation can be made, and all these change and deformation all should belong within the protection domain that the utility model requires.
Claims (5)
1. a glue spreader liquid feed device, it is characterized in that: comprise the fluid supplier (1) holding solution, for the air inlet pipeline (2) that gas passes into, for gas discharging gas exhaust piping (3) and the liquid feeding pipeline (4) of solution is provided to described glue spreader, air inlet pipeline (2), gas exhaust piping (3) is communicated with fluid supplier (1) respectively with liquid feeding pipeline (4), air inlet pipeline (2) is provided with the pressure control means (21) controlling admission pressure, gas exhaust piping (3) is provided with can according to the automatic leakage casting die (301) of gas pressure automatically open and close.
2. glue spreader liquid feed device according to claim 1, it is characterized in that: described glue spreader liquid feed device also comprises the liquid level sensor (5) and alarm (6) of measuring fluid supplier (1) interior solution level, liquid level sensor (5) is located in fluid supplier (1), and liquid level sensor (5) is electrically connected with alarm (6).
3. glue spreader liquid feed device according to claim 1, it is characterized in that: gas exhaust piping (3) comprises gas exhaust piping one (31) and gas exhaust piping two (32), automatic leakage casting die (301) is arranged on gas exhaust piping one (31), and gas exhaust piping two (32) is provided with can the manual pressure release part (302) of manual opening-closing.
4. the glue spreader liquid feed device according to any one of claim 1-3, it is characterized in that: pressure control means (21) comprises pressure-reducing valve (211) and Pressure gauge (212), pressure-reducing valve (211) controls fluid supplier (1) interior pressure stability, Pressure gauge (212) display fluid supplier (1) interior force value.
5. glue spreader liquid feed device according to claim 2, is characterized in that: liquid level sensor (5) is float type liquid level sensor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420867656.9U CN204448453U (en) | 2014-12-31 | 2014-12-31 | Glue spreader liquid feed device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420867656.9U CN204448453U (en) | 2014-12-31 | 2014-12-31 | Glue spreader liquid feed device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204448453U true CN204448453U (en) | 2015-07-08 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420867656.9U Active CN204448453U (en) | 2014-12-31 | 2014-12-31 | Glue spreader liquid feed device |
Country Status (1)
| Country | Link |
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| CN (1) | CN204448453U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114352949A (en) * | 2021-11-30 | 2022-04-15 | 上海华力集成电路制造有限公司 | Chemical supply device and alarm method thereof |
-
2014
- 2014-12-31 CN CN201420867656.9U patent/CN204448453U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114352949A (en) * | 2021-11-30 | 2022-04-15 | 上海华力集成电路制造有限公司 | Chemical supply device and alarm method thereof |
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