TWM534798U - Gas-exhaust pipeline monitoring system capable of monitoring whether pipeline is blocked or not - Google Patents

Description

Exhaust pipe monitoring system that monitors pipeline blockage

The present invention relates to an exhaust pipe monitoring system, and more particularly to an exhaust pipe monitoring system for semiconductor process equipment and capable of monitoring whether a pipeline is blocked.

Semiconductors are indispensable core components of electronic products on the market, so the demand is huge. However, in the semiconductor process, harmful exhaust gas with flammable, explosive, and corrosive properties will be generated. If it is not treated, it will be directly discharged into the atmosphere. Not only will it cause harm to the human body, but it will also have a great impact on the natural ecology. Therefore, exhaust pipe systems are often used to treat harmful gases generated by semiconductor process equipment.

Referring to FIG. 1 , a general exhaust line system 1 includes an exhaust unit 11 , an exhaust gas processing unit 12 connected to the exhaust unit 11 , and a temperature detecting unit 13 disposed on the exhaust unit 11 . The exhaust unit 11 includes a vacuum pump 111 for providing pumping power, an air duct 112 connecting the vacuum pump 111 and the exhaust gas processing unit 12, and an electromagnetic unit connected to the air duct 112 and controllably opened and closed. A valve 113, and an intake pipe 114 connected to the solenoid valve 113. The temperature detecting unit 13 includes a temperature detector 131 connected to the air duct 112 for detecting temperature, and a temperature alarm 132 electrically connected to the temperature detector 131 and the electromagnetic valve 113.

The vacuum pump 111 can introduce harmful gases into the air duct 112 and flow along the air duct 112 to the exhaust gas treatment unit 12 for processing. The temperature detector 131 can monitor the temperature of the air duct 112. When the temperature exceeds the set value, the temperature alarm 132 controls the solenoid valve 113 to open to connect the air inlet tube 114 to the air duct 112, and introduces A large amount of nitrogen gas is used to dilute the gas in the gas pipe 112, thereby achieving the effect of lowering the temperature to avoid tempering. At the same time, the temperature alert 132 can display the temperature and alert.

However, the harmful gas flowing in the air guiding tube 112 often carries various types of dust, and it is easy to accumulate in the air guiding tube 112 under long-term use, causing blockage of the pipeline, causing damage to the implement and causing safety problems.

Accordingly, it is an object of the present invention to provide an exhaust line monitoring system that monitors whether a line is blocked.

Therefore, the novel exhaust pipe monitoring system capable of monitoring whether the pipeline is blocked includes an exhaust unit, an exhaust gas processing unit, a sensing unit, and a monitoring unit.

The exhaust unit includes an air guiding tube, a vacuum pump connected to the air guiding tube for pumping gas along the air guiding tube, a solenoid valve connected to the air guiding tube and can be controlled to open and close, and a connection to the electromagnetic valve The valve can be introduced into the intake manifold of nitrogen. When the solenoid valve is opened, the air inlet pipe is connected to the air pipe to feed nitrogen into the air inlet pipe, and when the electromagnetic valve is closed, the air inlet pipe is not connected to the air pipe.

The exhaust gas treatment unit is configured to communicate with the air conduit and process the gas input by the air conduit. The sensing unit includes a temperature detector connected to the air pipe to detect temperature, a temperature alarm electrically connected to the temperature detector and a solenoid valve of the exhaust unit, and a connecting air pipe to detect pressure a pressure detector and a pressure alarm electrically connected to the pressure detector. The temperature warning device can display the temperature measured by the temperature detector, and control the opening and closing of the electromagnetic valve according to the temperature, and the pressure warning device can display the pressure measured by the pressure detector. The monitoring unit includes a controller disposed on the exhaust gas processing unit and electrically connected to the temperature alarm and the pressure alarm, and a central monitor electrically connected to the controller.

The utility model has the following effects: the pressure detector can measure the pressure value of the air guiding tube, and display the pressure condition of the air guiding tube through the pressure warning device, so that the user can evaluate whether the air guiding tube is blocked or not. exclude. The temperature warning device and the measurement information received by the pressure alarm device are sent to the controller for use by the exhaust gas processing unit, and then the measurement information is communicated to the exhaust gas processing unit to be sent to the central unit. Monitor application.

Referring to FIG. 2, an embodiment of the exhaust pipe monitoring system 2 for monitoring whether a pipeline is blocked or not includes an exhaust unit 3, an exhaust gas processing unit 4 connected to the exhaust unit 3, and a row disposed in the row. The sensing unit 5 on the gas unit 3 and a monitoring unit 6 electrically connected to the sensing unit 5.

The exhaust unit 3 includes an air guiding tube 31, a vacuum pump 32 connected to the air guiding tube 31 for pumping gas along the air guiding tube 31, a vacuum pump 32 connected to the air guiding tube 31, and can be opened and closed by electronic signal control. A solenoid valve 33, and an intake pipe 34 that connects the solenoid valve 33 and can introduce nitrogen gas. When the solenoid valve 33 is controlled to open, the air guiding tube 31 is in communication with the air inlet tube 34, and when the electromagnetic valve 33 is closed, the air guiding tube 31 is not in communication with the air inlet tube 34. The exhaust gas treatment unit 4 is connected to the air guide tube 31.

The sensing unit 5 includes a temperature detector 51 connected to the air guiding tube 31 for detecting temperature, a temperature alarm 52 electrically connected to the temperature detector 51 and the electromagnetic valve 33 of the exhaust unit 3, and a connection. The air duct 31 is a pressure detector 53 for detecting pressure, and a pressure alarm 54 electrically connected to the pressure detector 53. The temperature warning device 52 can display the temperature measured by the temperature detector 51 and control the opening and closing of the electromagnetic valve 33 according to the temperature. The pressure alert 54 can display the pressure measured by the pressure detector 53. The monitoring unit 6 includes a controller 61 disposed on the exhaust gas processing unit 4 and electrically connected to the temperature alarm 52 and the pressure alarm 54 , and a central monitor 62 electrically connected to the controller 61 .

The exhaust gas discharged from the semiconductor processing equipment (not shown) is sent to the air duct 31 of the exhaust unit 3, and is pumped by the vacuum pump 32 to be input to the exhaust gas processing unit 4 for subsequent processing such as combustion. When the temperature detector 51 of the sensing unit 5 detects that the temperature in the air guiding tube 31 exceeds a certain value (in this embodiment, 70 degrees Celsius), the temperature warning device 52 issues a warning and turns on the electromagnetic The valve 33 is such that a large amount of nitrogen gas flows into the air guiding pipe 31 from the intake pipe 34 to prevent a tempering condition from occurring. When the pressure detector 53 detects that the pressure in the air guiding tube 31 exceeds a certain value (in this embodiment, 0.35 kPa is taken), the pressure warning device 54 issues a warning and displays the measured pressure value. The maintenance personnel are used to evaluate the clogging condition in the airway tube 31. The measurement information received by the temperature warning device 52 and the pressure alarm device 54 is sent to the controller 61 for use by the exhaust gas processing unit 4, and the measurement information is transmitted along with the signal of the exhaust gas processing unit 4. It is used by the central monitor 62.

The solenoid valve 33 is controlled by the temperature warning device 52 to introduce nitrogen gas, and the tempering condition can be avoided. The pressure warning device 54 can be used by the maintenance personnel to evaluate the pipeline clogging condition in the air guiding tube 31, and can be processed in one step. Prevent tube blockages from occurring. The temperature alarm 52 and the pressure alarm 54 are electrically connected to the controller 61 located in the exhaust gas processing unit 4, and the central monitor 62 connected to the controller 61 can cooperate with other devices to obtain the acquired information data. Do further application or presentation.

In summary, the present invention controls the solenoid valve 33 by the temperature warning device 52 to avoid the occurrence of a tempering situation, and firstly warns the maintenance personnel of the pipeline condition of the air guiding pipe 31 through the pressure warning device 54 to perform maintenance. Personnel can eliminate the pipeline before it is clogged and dangerous, so it can achieve the purpose of this new type.

However, the above is only the embodiment of the present invention, and when it is not possible to limit the scope of the present invention, all the simple equivalent changes and modifications according to the scope of the patent application and the contents of the patent specification are still This new patent covers the scope.

2‧‧‧Exhaust line monitoring system
3‧‧‧Exhaust unit
31‧‧‧ air duct
32‧‧‧vacuum pump
33‧‧‧ solenoid valve
34‧‧‧Intake pipe
4‧‧‧Exhaust gas treatment unit
5‧‧‧Sensor unit
51‧‧‧Temperature Detector
52‧‧‧Temperature warning device
53‧‧‧ Pressure detector
54‧‧‧pressure warning device
6‧‧‧Monitoring unit
61‧‧‧ Controller
62‧‧‧Central monitor

Other features and advantages of the present invention will be apparent from the embodiments of the drawings, wherein: Figure 1 is a schematic diagram illustrating a conventional exhaust line system; and Figure 2 is a schematic illustration of the present invention An embodiment of a new exhaust line monitoring system that monitors whether a line is blocked.

2‧‧‧Exhaust line monitoring system

3‧‧‧Exhaust unit

31‧‧‧ air duct

32‧‧‧vacuum pump

33‧‧‧ solenoid valve

34‧‧‧Intake pipe

4‧‧‧Exhaust gas treatment unit

5‧‧‧Sensor unit

51‧‧‧Temperature Detector

52‧‧‧Temperature warning device

53‧‧‧ Pressure detector

54‧‧‧pressure warning device

6‧‧‧Monitoring unit

61‧‧‧ Controller

62‧‧‧Central monitor

Claims (3)

An exhaust line monitoring system capable of monitoring whether a pipeline is blocked or not includes: an exhaust unit including an air guide tube, a vacuum pump connected to the air guide tube for pumping gas along the air guide tube, and a connection a gas valve that can be controlled to open and close, and an intake pipe that connects the solenoid valve and can introduce nitrogen gas. When the solenoid valve is opened, the air inlet pipe is connected to the air pipe to feed nitrogen gas. The intake pipe, when the solenoid valve is closed, the intake pipe is not connected to the air pipe; an exhaust gas processing unit is connected to the air pipe and processes the gas input by the air pipe; a sensing unit includes a connection The air pipe is a temperature detector for detecting temperature, a temperature warning device electrically connecting the temperature detector and a solenoid valve of the exhaust unit, a pressure detector connected to the air pipe to detect pressure, and a pressure warning device electrically connected to the pressure detector, the temperature warning device can display the temperature measured by the temperature detector, and control the opening and closing of the electromagnetic valve according to the temperature, the pressure warning device can display the pressure detection Measured pressure ; And a monitoring unit, comprising a disposed on the exhaust gas treating unit and electrically connected to the temperature and the pressure warning device warning a controller, and a central monitor connected to the electrical controller. The exhaust pipe monitoring system capable of monitoring whether the pipeline is blocked, as described in claim 1, wherein the temperature warning device of the sensing unit can issue an alarm when the air guiding pipe exceeds a set temperature. The exhaust pipe monitoring system capable of monitoring whether the pipeline is blocked, as described in claim 1, wherein the pressure warning device of the sensing unit can issue an alarm when the air guiding pipe exceeds a set pressure.