CN103926945B - Cavity intelligent pressure control system and pressure control method of the same - Google Patents
Cavity intelligent pressure control system and pressure control method of the same Download PDFInfo
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- CN103926945B CN103926945B CN201410138285.5A CN201410138285A CN103926945B CN 103926945 B CN103926945 B CN 103926945B CN 201410138285 A CN201410138285 A CN 201410138285A CN 103926945 B CN103926945 B CN 103926945B
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Abstract
A cavity intelligent pressure control system comprises a cavity body, a nitrogen gas inletting pipeline, an exhaust pipeline, a pressure sensor, an intelligent adjusting valve and a control unit, wherein the cavity body is a technological process cavity chamber; the nitrogen gas inletting pipeline is connected with the cavity body through a first valve; one end of the exhaust pipeline is connected with the cavity body, and the other end of the exhaust pipeline is connected with an external exhaust valve; the pressure sensor is arranged at the end, close to the external exhaust valve, of the exhaust pipeline and is used for testing exhaust pressure of the external exhaust valve; the intelligent adjusting valve is arranged at the overpressure pipeline section which is between the cavity body and the pressure sensor of the exhaust pipeline; the control unit is used for receiving pressure detection signals from the pressure sensor, and controlling the opening degree of an intelligent pressure adjusting valve, so that the pressure of the cavity body of 760 Torr is obtained in a set time range. According to the cavity intelligent pressure control system and a pressure control method of the same, the pressure sensor is arranged at the position, close to the external exhaust valve, of the exhaust pipeline, and the intelligent pressure adjusting valve which is controlled by the control unit is arranged at the overpressure pipeline section of the exhaust pipeline, so that the cavity body forms a pressure closed loop control system, and quick and precise control of the cavity body pressure can be achieved.
Description
Technical field
The present invention relates to technical field of semiconductors, more particularly, to a kind of cavity intelligent control pressurer system and its Stress control
Method.
Background technology
At present, for ensureing product quality, extension device service life, common complete necessarily to work in described vacuum chamber
It is required to after cycle carry out regular servicing maintenance.When carrying out maintenance, vacuum breaker is needed to open described vacuum chamber；Complete
After becoming maintenance, need to close described vacuum chamber, open described pumping unit, and leak rate inspection is carried out to equipment.
When carrying out described leak rate inspection, described main engine bed software can execute the process conditions of leak rate inspection automatically.Described
After the completion of process conditions, described vacuum chamber is carried out with ten cycle purge, is subsequently passed the nitrogen of 5000slm, and opens simultaneously
Open the valve of described overvoltage pipeline, by the Stress control of described chamber in 760Torr.
But, due to be passed through chamber and for leak rate check described nitrogen flow less, described overvoltage pipeline valve
It is only standard-sized sheet mode, and the pressure at expulsion of periphery such as is susceptible to the overall pressure lifting of system and fluctuates at the impact of factor, leads
The rate of air sucked in required causing described overvoltage pipeline is more than the nitrogen flow being passed through described chamber, thus causing described chamber pressure in setting
It is unable to reach 760Torr in time, and then causes described board to report to the police, terminate described leak rate Inspection.In order to continue to complete
Described leak rate Inspection, generally using manually adjusting peripheral exhaust valve so that the pressure at expulsion of described periphery reduces, to protect
Card is passed through the rate of air sucked in required more than described overvoltage pipeline for the nitrogen flow of described chamber, and controls described chamber to maintain 760Torr,
Complete described leak rate Inspection.
It is apparent that pass through the pressure at expulsion adjusting peripheral exhaust valve and then adjusting described periphery using manual type, with
The leak rate maintaining chamber 760Torr checks condition, and not only complex operation, and the individual variation because of people, to described drain tap
Adjustment there is certain deviation, precision not, time and effort consuming.
Therefore it is directed to the problem that prior art exists, this case designer, by being engaged in the industry experience for many years, actively studies
Improvement, then has a kind of present invention cavity intelligent control pressurer system and its compress control method.
Content of the invention
The present invention be directed in prior art, traditional leak rate Inspection adopts manual type to pass through to adjust peripheral exhaust
Valve so adjust described periphery pressure at expulsion, with maintain chamber 760Torr leak rate check condition, not only complex operation,
And the individual variation because of people, there is certain deviation in the adjustment to described drain tap, precision not, the defect such as time and effort consuming
A kind of cavity intelligent control pressurer system is provided.
The further object of the present invention is that traditional leak rate Inspection adopts manual type to pass through to adjust in prior art
Whole peripheral exhaust valve and then the pressure at expulsion of the described periphery of adjustment, check condition with the leak rate maintaining chamber 760Torr, not only
Complex operation, and the individual variation because of people, there is certain deviation in the adjustment to described drain tap, precision not, takes
The defect such as laborious provides a kind of compress control method of cavity intelligent control pressurer system.
In order to solve the above problems, the present invention provides a kind of cavity intelligent control pressurer system, described cavity intelligent pressure
Control system includes：Cavity, described cavity is manufacturing process chamber；Nitrogen inlet duct road, institute is passed through on described nitrogen inlet duct road
State the first valve to be connected with described cavity, and when leak rate checks by inputting nitrogen in cavity described in described nitrogen inlet duct road direction
Gas；Gas exhaust piping, one end of described gas exhaust piping is connected with described cavity, and the other end of described gas exhaust piping is arranged with the described external world
Air valve connects；Pressure transducer, described pressure transducer be arranged on described gas exhaust piping close on described the external world drain tap
One end, and be used for detecting the pressure at expulsion of described external world drain tap；Intelligent regulating valve, described intelligent regulating valve is arranged on institute
State at the over-pressed line segments between described cavity and described pressure transducer of gas exhaust piping；Control unit, described control
Unit real-time reception is derived from the pressure detecting signal of described pressure transducer, and controls described intelligence according to described pressure detecting signal
Can pressure regulator valve aperture, with obtain described cavity in the range of setting time pressure as 760Torr.
Alternatively, the nitrogen flow that described nitrogen inlet duct road enters described cavity is 500slm.
Alternatively, the overvoltage line segments of described gas exhaust piping when the pressure in described cavity be more than atmospheric pressure when, described
The relief valve of over-pressed line segments automatically turns on, and carries out pressure release to described cavity.
Alternatively, described leak rate Inspection, and when being passed through nitrogen, the relief valve of described overvoltage line segments automatically turns on,
The pressure obtaining described cavity is 760Torr.
For realizing the further object of the present invention, the present invention provides a kind of Stress control side of cavity intelligent control pressurer system
Method, the compress control method of described cavity intelligent control pressurer system includes：
Execution step S1：By input and nitrogen, the flow of described nitrogen in cavity described in described nitrogen inlet duct road direction
For 500slm；
Execution step S2：The relief valve of the overvoltage line segments of described gas exhaust piping is opened, and passes through described pressure transducer
Pressure at expulsion at extraneous drain tap described in real-time detection, when the pressure at expulsion of described external world drain tap increases, described
Described detection signal is fed back to described control unit by pressure transducer；
Execution step S3：Described control unit controls the aperture of described intelligent pressure regulating valve so that the pumping speed of described aerofluxuss subtracts
Little, to ensure to flow into the rate of air sucked in required more than described aerofluxuss for the nitrogen amount of described cavity, thus obtaining cavity within the time setting
Pressure is 760Torr.
In sum, cavity intelligent control pressurer system of the present invention passes through closing on outside described in described gas exhaust piping
At boundary's drain tap, described pressure transducer is set, and arranges by control unit control at the overvoltage line segments of described gas exhaust piping
The described intelligent pressure regulating valve of system is so that described cavity constitutes the closed-loop control system of pressure, and then can fast, accurately control institute
State the pressure of cavity.
Brief description
Fig. 1 show the circuit theory schematic diagram of cavity intelligent control pressurer system of the present invention.
Specific embodiment
For describing technology contents, structural features, institute's reached purpose and effect of the invention in detail, below in conjunction with reality
Apply example and coordinate accompanying drawing to be described in detail.
Refer to Fig. 1, Fig. 1 show the circuit theory schematic diagram of cavity intelligent control pressurer system of the present invention.Described chamber
Body intelligent pressure control system 1, including：Cavity 11, described cavity 11 is manufacturing process chamber；Nitrogen inlet duct road 12, described
Nitrogen inlet duct road 12 is connected with described cavity 11 by described first valve 121, and passes through described nitrogen when leak rate checks
Air inlet pipeline 12 inputs nitrogen into described cavity 11；Gas exhaust piping 13, one end of described gas exhaust piping 13 and described cavity 11
Connect, the other end of described gas exhaust piping 13 is connected with described external world drain tap 14；Pressure transducer 15, described pressure sensing
Device 15 is arranged on one end closing on described external world drain tap 14 of described gas exhaust piping 13, and is used for detecting described external world's aerofluxuss
The pressure at expulsion of valve 14；Intelligent regulating valve 16, described intelligent regulating valve 16 be arranged on described gas exhaust piping 13 between described
At over-pressed line segments 131 between cavity 11 and described pressure transducer 15；Control unit 17, described control unit 17 connects in real time
Receive the pressure detecting signal from described pressure transducer 15, and described intelligent pressure regulating valve is controlled according to described pressure detecting signal
16 aperture, with obtain described cavity 11 in the range of setting time pressure as 760Torr.
Wherein, the nitrogen of described cavity 11 when carrying out leak rate Inspection, is entered by described nitrogen inlet duct road 12
Flow is 500slm.In the present invention, the setting time obtaining the pressure 760Torr of described cavity 11 is those skilled in the art
The routine techniquess means grasped, the scope that non-the art of this patent is advocated.The overvoltage line segments 131 of described gas exhaust piping 13 are being worked as
When pressure in described cavity 11 is more than atmospheric pressure, the relief valve of described overvoltage line segments 131（Not shown）Automatically turn on, and right
Described cavity 11 carries out pressure release.Carrying out described leak rate Inspection, and when being passed through nitrogen, the letting out of described overvoltage line segments 131
Pressure valve automatically turns on, and the pressure obtaining described cavity 11 is 760Torr.
In order to more intuitively disclose the technical scheme of the present invention, highlight the beneficial effect of the present invention, in conjunction with specific reality
It is illustrated as a example applying mode, in specific embodiment, involved numerical value is only enumerated, be not construed as the limit to the technical program
System.
Please continue to refer to Fig. 1, cavity intelligent control pressurer system 1 of the present invention when intelligent pressure controls, including with
Lower step：
Execution step S1：Inputted and nitrogen into described cavity 11 by described nitrogen inlet duct road 12, described nitrogen
Flow is 500slm；
Execution step S2：The relief valve of the overvoltage line segments 131 of described gas exhaust piping 13 is opened, and is passed by described pressure
Pressure at expulsion at extraneous drain tap 14 described in sensor 15 real-time detection, when the pressure at expulsion of described external world drain tap 14 increases
Added-time, described detection signal is fed back to described control unit 17 by described pressure transducer 15；
Execution step S3：Described control unit 17 controls the aperture of described intelligent pressure regulating valve 16 so that taking out of described aerofluxuss
Speed reduces, to ensure to flow into the rate of air sucked in required more than described aerofluxuss for the nitrogen amount of described cavity 11, thus obtaining within the time setting
Obtaining chamber pressure is 760Torr.
As those skilled in the art it is readily appreciated that ground, cavity intelligent control pressurer system 1 of the present invention is by institute
State closing on of gas exhaust piping 13 and at described external world drain tap 14, described pressure transducer 15 is set, and in described gas exhaust piping 13
Overvoltage line segments 131 at the described intelligent pressure regulating valve 16 that controlled by control unit 17 is set so that described cavity 11 constitutes pressure
The closed-loop control system of power, and then can fast, accurately control the pressure of described cavity 11.
In sum, cavity intelligent control pressurer system of the present invention passes through closing on outside described in described gas exhaust piping
At boundary's drain tap, described pressure transducer is set, and arranges by control unit control at the overvoltage line segments of described gas exhaust piping
The described intelligent pressure regulating valve of system is so that described cavity constitutes the closed-loop control system of pressure, and then can fast, accurately control institute
State the pressure of cavity.
Those skilled in the art all it will be appreciated that without departing from the spirit or scope of the present invention, can be to this
Bright carry out various modifications and variations.Thus, if any modification or modification fall into the protection of appended claims and equivalent
In the range of when it is believed that the present invention cover these modification and modification.
Claims (5)
1. a kind of cavity intelligent control pressurer system is it is characterised in that described cavity intelligent control pressurer system includes：
Cavity, described cavity is manufacturing process chamber；
Nitrogen inlet duct road, described nitrogen inlet duct road is connected with described cavity by the first valve, and logical when leak rate checks
Cross input nitrogen in cavity described in described nitrogen inlet duct road direction；
Gas exhaust piping, one end of described gas exhaust piping is connected with described cavity, the other end of described gas exhaust piping and extraneous aerofluxuss
Valve connects；
Pressure transducer, described pressure transducer is arranged on one end closing on described external world drain tap of described gas exhaust piping,
And be used for detecting the pressure at expulsion of described external world drain tap；
Intelligent pressure regulating valve, described intelligent pressure regulating valve be arranged on described gas exhaust piping between described cavity and described pressure transducer
Between over-pressed line segments at；
Control unit, described control unit real-time reception is derived from the pressure detecting signal of described pressure transducer, and according to described
Pressure detecting signal controls the aperture of described intelligent pressure regulating valve, with the pressure obtaining described cavity in the range of setting time is
760Torr.
2. cavity intelligent control pressurer system as claimed in claim 1 is it is characterised in that described nitrogen inlet duct road enters institute
The nitrogen flow stating cavity is 500slm.
3. cavity intelligent control pressurer system as claimed in claim 1 is it is characterised in that the overvoltage pipeline of described gas exhaust piping
When the pressure in described cavity is more than atmospheric pressure, the relief valve of described overvoltage line segments automatically turns on section, and to described chamber
Body carries out pressure release.
4. cavity intelligent control pressurer system as claimed in claim 1 is it is characterised in that described leak rate Inspection, and leads to
When entering nitrogen, the relief valve of described overvoltage line segments automatically turns on, and the pressure obtaining described cavity is 760Torr.
5. a kind of compress control method of cavity intelligent control pressurer system as claimed in claim 1 is it is characterised in that described
Cavity intelligent compress control method includes：
Execution step S1：By input and nitrogen in cavity described in described nitrogen inlet duct road direction, the flow of described nitrogen is
500slm；
Execution step S2：The relief valve of the overvoltage line segments of described gas exhaust piping is opened, and real-time by described pressure transducer
Pressure at expulsion at detection described external world drain tap, when the pressure at expulsion of described external world drain tap increases, described pressure
Described detection signal is fed back to described control unit by sensor；
Execution step S3：Described control unit controls the aperture of described intelligent pressure regulating valve so that the pumping speed of described aerofluxuss reduces, with
Ensure flow into described cavity nitrogen amount be more than described aerofluxuss rate of air sucked in required, thus within the time setting acquisition chamber pressure as
760Torr.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410138285.5A CN103926945B (en) | 2014-04-08 | 2014-04-08 | Cavity intelligent pressure control system and pressure control method of the same |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201410138285.5A CN103926945B (en) | 2014-04-08 | 2014-04-08 | Cavity intelligent pressure control system and pressure control method of the same |
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| CN103926945A CN103926945A (en) | 2014-07-16 |
| CN103926945B true CN103926945B (en) | 2017-02-15 |
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Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN104950934B (en) * | 2015-06-11 | 2017-08-25 | 常熟市华技锅炉制造有限公司 | A kind of gas intelligent balance system |
| CN106086810A (en) * | 2016-06-29 | 2016-11-09 | 苏州新纳晶光电有限公司 | Regulation MOCVD chamber pressure overcomes the method and system on LED epitaxial structure mist limit |
| CN109340571A (en) * | 2018-11-30 | 2019-02-15 | 醴陵旗滨电子玻璃有限公司 | Nitrogen supply system and its control method |
| CN113280986B (en) * | 2021-04-17 | 2023-05-12 | 山西潞安太阳能科技有限责任公司 | Method for detecting leakage rate of furnace tube vacuum pump |
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| JPH11353032A (en) * | 1998-06-10 | 1999-12-24 | Matsushita Electric Ind Co Ltd | Mechanism and method for detecting leakage of cooling gas |
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| US20050279454A1 (en) * | 2004-06-17 | 2005-12-22 | Snijders Gert J | Pressure control system |
| CN1969241A (en) * | 2004-07-05 | 2007-05-23 | 喜开理株式会社 | Vacuum pressure control system |
| CN1609737A (en) * | 2004-09-03 | 2005-04-27 | 深圳迈瑞生物医疗电子股份有限公司 | Automatic testing method and apparatus for electromagnetic valve response time and leakage extent |
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