CN103926945A - Cavity intelligent pressure control system and pressure control method of the same - Google Patents
Cavity intelligent pressure control system and pressure control method of the same Download PDFInfo
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- CN103926945A CN103926945A CN201410138285.5A CN201410138285A CN103926945A CN 103926945 A CN103926945 A CN 103926945A CN 201410138285 A CN201410138285 A CN 201410138285A CN 103926945 A CN103926945 A CN 103926945A
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Abstract
A cavity intelligent pressure control system comprises a cavity body, a nitrogen gas inletting pipeline, an exhaust pipeline, a pressure sensor, an intelligent adjusting valve and a control unit, wherein the cavity body is a technological process cavity chamber; the nitrogen gas inletting pipeline is connected with the cavity body through a first valve; one end of the exhaust pipeline is connected with the cavity body, and the other end of the exhaust pipeline is connected with an external exhaust valve; the pressure sensor is arranged at the end, close to the external exhaust valve, of the exhaust pipeline and is used for testing exhaust pressure of the external exhaust valve; the intelligent adjusting valve is arranged at the overpressure pipeline section which is between the cavity body and the pressure sensor of the exhaust pipeline; the control unit is used for receiving pressure detection signals from the pressure sensor, and controlling the opening degree of an intelligent pressure adjusting valve, so that the pressure of the cavity body of 760 Torr is obtained in a set time range. According to the cavity intelligent pressure control system and a pressure control method of the same, the pressure sensor is arranged at the position, close to the external exhaust valve, of the exhaust pipeline, and the intelligent pressure adjusting valve which is controlled by the control unit is arranged at the overpressure pipeline section of the exhaust pipeline, so that the cavity body forms a pressure closed loop control system, and quick and precise control of the cavity body pressure can be achieved.
Description
Technical field
The present invention relates to technical field of semiconductors, relate in particular to a kind of cavity intelligent control pressurer system and compress control method thereof.
Background technology
At present, be to ensure product quality, extension device serviceable life, commonly after completing certain work period, described vacuum chamber all needs to carry out regular servicing maintenance.In the time carrying out maintenance, need vacuum breaker to open described vacuum chamber; Complete after maintenance, need to close described vacuum chamber, opening described pump and take out unit, and equipment is carried out to leak rate inspection.
In the time carrying out described leak rate inspection, described main engine bed software can automatically perform the process conditions that leak rate checks.After described process conditions complete, described vacuum chamber is carried out to cycle purge ten times, pass into subsequently the nitrogen of 5000slm, and open the valve of described overvoltage pipeline simultaneously, the pressure of described chamber is controlled to 760Torr.
But, because the described nitrogen flow that passes into chamber and check for leak rate is less, the valve of described overvoltage pipeline is only standard-sized sheet mode, and peripheral discharge pressure is easy to be subject to the pressure lifting of entire system and the impact of the factors such as fluctuation, cause the rate of air sucked in required of described overvoltage pipeline to be greater than the nitrogen flow that passes into described chamber, thereby cause described chamber pressure cannot reach 760Torr within the time of setting, and then cause described board warning, stop described leak rate Inspection.In order to have continued described leak rate Inspection, conventionally adopt the artificial peripheral drain tap of adjusting, the discharge pressure of described periphery is reduced, to ensure that the nitrogen flow that passes into described chamber is greater than the rate of air sucked in required of described overvoltage pipeline, and control described chamber and maintain 760Torr, complete described leak rate Inspection.
Significantly, adopt manual type by adjusting peripheral drain tap and then adjusting the discharge pressure of described periphery, check condition with the leak rate that maintains chamber 760Torr, not only complex operation, and because of people's individual difference, the adjustment of described drain tap is existed to certain deviation, and precision is inadequate, time and effort consuming.
Therefore the problem existing for prior art, this case designer relies on the industry experience for many years of being engaged in, and active research improvement, so had a kind of cavity intelligent control pressurer system of the present invention and compress control method thereof.
Summary of the invention
The present invention be directed in prior art, traditional leak rate Inspection adopts manual type by adjusting peripheral drain tap and then adjusting the discharge pressure of described periphery, check condition with the leak rate that maintains chamber 760Torr, not only complex operation, and because of people's individual difference, the adjustment of described drain tap is existed to certain deviation, and precision is inadequate, time and effort consuming etc., and defect provides a kind of cavity intelligent control pressurer system.
The present invention's another object is in prior art, traditional leak rate Inspection adopts manual type by adjusting peripheral drain tap and then adjusting the discharge pressure of described periphery, check condition with the leak rate that maintains chamber 760Torr, not only complex operation, and because of people's individual difference, the adjustment of described drain tap is existed to certain deviation, and the defect such as precision is inadequate, time and effort consuming provides a kind of compress control method of cavity intelligent control pressurer system.
In order to address the above problem, the invention provides a kind of cavity intelligent control pressurer system, described cavity intelligent control pressurer system comprises: cavity, described cavity is manufacturing process chamber; Nitrogen air inlet pipeline, described nitrogen air inlet pipeline is connected with described cavity by described the first valve, and in described cavity, inputs nitrogen by described nitrogen air inlet pipeline in the time that leak rate checks; Gas exhaust piping, one end of described gas exhaust piping is connected with described cavity, and the other end of described gas exhaust piping is connected with described extraneous drain tap; Pressure transducer, described pressure transducer is arranged on one end of closing on described extraneous drain tap of described gas exhaust piping, and for detection of the discharge pressure of described extraneous drain tap; Intelligent regulating valve, described intelligent regulating valve is arranged on the overvoltage line segments place between described cavity and described pressure transducer of described gas exhaust piping; Control module, described control module receives in real time the pressure detecting signal from described pressure transducer, and according to the aperture of intelligent pressure regulating valve described in described pressure detecting signal control, taking the pressure that obtains described cavity within the scope of setting-up time as 760Torr.
Alternatively, to enter the nitrogen flow of described cavity be 500slm to described nitrogen air inlet pipeline.
Alternatively, the overvoltage line segments of described gas exhaust piping is in the time that the pressure in described cavity is greater than atmospheric pressure, and the blowdown valve of described overvoltage line segments is opened automatically, and described cavity is carried out to pressure release.
Alternatively, described leak rate Inspection, and while passing into nitrogen, the blowdown valve of described overvoltage line segments is opened automatically, the pressure that obtains described cavity is 760Torr.
For realizing the present invention's another object, the invention provides a kind of compress control method of cavity intelligent control pressurer system, the compress control method of described cavity intelligent control pressurer system comprises:
Execution step S1: input and nitrogen in described cavity by described nitrogen air inlet pipeline, the flow of described nitrogen is 500slm;
Execution step S2: the blowdown valve of the overvoltage line segments of described gas exhaust piping is opened, and by the discharge pressure at described pressure transducer detection in real time described extraneous drain tap place, in the time that the discharge pressure of described extraneous drain tap increases, described detection signal is fed back to described control module by described pressure transducer;
Execution step S3: the aperture of intelligent pressure regulating valve described in described control module control, the pumping speed of described exhaust is reduced, to ensure that the nitrogen amount of the described cavity of inflow is greater than the rate of air sucked in required of described exhaust, be 760Torr thereby obtain chamber pressure within the time of setting.
In sum, cavity intelligent control pressurer system of the present invention is by arranging described pressure transducer at the described extraneous drain tap of closing on of described gas exhaust piping place, and at the overvoltage line segments place of described gas exhaust piping, the described intelligent pressure regulating valve by control module control is set, make described cavity form the closed-loop control system of pressure, and then can control fast, accurately the pressure of described cavity.
Brief description of the drawings
Figure 1 shows that the framed structure schematic diagram of cavity intelligent control pressurer system of the present invention.
Embodiment
By describe in detail the invention technology contents, structural attitude, reached object and effect, below in conjunction with embodiment and coordinate accompanying drawing to be described in detail.
Refer to Fig. 1, Figure 1 shows that the framed structure schematic diagram of cavity intelligent control pressurer system of the present invention.Described cavity intelligent control pressurer system 1, comprising: cavity 11, and described cavity 11 is manufacturing process chamber; Nitrogen air inlet pipeline 12, described nitrogen air inlet pipeline 12 is connected with described cavity 11 by described the first valve 121, and in the time that leak rate checks by described nitrogen air inlet pipeline 12 to the interior input nitrogen of described cavity 11; Gas exhaust piping 13, one end of described gas exhaust piping 13 is connected with described cavity 11, and the other end of described gas exhaust piping 13 is connected with described extraneous drain tap 14; Pressure transducer 15, described pressure transducer 15 is arranged on one end of the described extraneous drain tap 14 of closing on of described gas exhaust piping 13, and for detection of the discharge pressure of described extraneous drain tap 14; Intelligent regulating valve 16, described intelligent regulating valve 16 is arranged on overvoltage line segments 131 places between described cavity 11 and described pressure transducer 15 of described gas exhaust piping 13; Control module 17, described control module 17 receives the pressure detecting signal from described pressure transducer 15 in real time, and according to the aperture of intelligent pressure regulating valve 16 described in described pressure detecting signal control, taking the pressure that obtains described cavity 11 within the scope of setting-up time as 760Torr.
Wherein, in the time carrying out leak rate Inspection, the nitrogen flow that enters described cavity 11 by described nitrogen air inlet pipeline 12 is 500slm.In the present invention, obtain the routine techniques means that the setting-up time of the pressure 760Torr of described cavity 11 is grasped for those skilled in the art, the scope that non-the art of this patent is advocated.The overvoltage line segments 131 of described gas exhaust piping 13 is in the time that the pressure in described cavity 11 is greater than atmospheric pressure, and the blowdown valve (not shown) of described overvoltage line segments 131 is opened automatically, and described cavity 11 is carried out to pressure release.Carrying out described leak rate Inspection, and while passing into nitrogen, the blowdown valve of described overvoltage line segments 131 is opened automatically, the pressure that obtains described cavity 11 is 760Torr.
In order to disclose more intuitively the present invention's technical scheme, highlight the present invention's beneficial effect, existing is that example is set forth in conjunction with concrete embodiment, in embodiment, related numerical value, only for enumerating, should not be considered as the restriction to the technical program.
Please continue to refer to Fig. 1, cavity intelligent control pressurer system 1 of the present invention, in the time of intelligent pressure control, comprises the following steps:
Execution step S1: to the interior input of described cavity 11 and nitrogen, the flow of described nitrogen is 500slm by described nitrogen air inlet pipeline 12;
Execution step S2: the blowdown valve of the overvoltage line segments 131 of described gas exhaust piping 13 is opened, and by the discharge pressure at described pressure transducer 15 detection in real time described extraneous drain tap 14 places, in the time that the discharge pressure of described extraneous drain tap 14 increases, described detection signal is fed back to described control module 17 by described pressure transducer 15;
Execution step S3: described control module 17 is controlled the aperture of described intelligent pressure regulating valve 16, the pumping speed of described exhaust is reduced, to ensure that the nitrogen amount of the described cavity 11 of inflow is greater than the rate of air sucked in required of described exhaust, be 760Torr thereby obtain chamber pressure within the time of setting.
As those skilled in the art, hold intelligibly, cavity intelligent control pressurer system 1 of the present invention is by arranging described pressure transducer 15 at the described extraneous drain tap of closing on of described gas exhaust piping 13 14 places, and at overvoltage line segments 131 places of described gas exhaust piping 13, the described intelligent pressure regulating valve 16 of being controlled by control module 17 is set, make described cavity 11 form the closed-loop control system of pressure, and then can control fast, accurately the pressure of described cavity 11.
In sum, cavity intelligent control pressurer system of the present invention is by arranging described pressure transducer at the described extraneous drain tap of closing on of described gas exhaust piping place, and at the overvoltage line segments place of described gas exhaust piping, the described intelligent pressure regulating valve by control module control is set, make described cavity form the closed-loop control system of pressure, and then can control fast, accurately the pressure of described cavity.
Those skilled in the art all should be appreciated that, in the situation that not departing from the spirit or scope of the present invention, can carry out various modifications and variations to the present invention.Thereby, if when any amendment or modification fall in the protection domain of appended claims and equivalent, think that the present invention contains these amendments and modification.
Claims (6)
1. a cavity intelligent control pressurer system, is characterized in that, described cavity intelligent control pressurer system comprises:
Cavity, described cavity is manufacturing process chamber;
Nitrogen air inlet pipeline, described nitrogen air inlet pipeline is connected with described cavity by described the first valve, and in described cavity, inputs nitrogen by described nitrogen air inlet pipeline in the time that leak rate checks;
Gas exhaust piping, one end of described gas exhaust piping is connected with described cavity, and the other end of described gas exhaust piping is connected with described extraneous drain tap;
Pressure transducer, described pressure transducer is arranged on one end of closing on described extraneous drain tap of described gas exhaust piping, and for detection of the discharge pressure of described extraneous drain tap;
Intelligent regulating valve, described intelligent regulating valve is arranged on the overvoltage line segments place between described cavity and described pressure transducer of described gas exhaust piping;
Control module, described control module receives in real time the pressure detecting signal from described pressure transducer, and according to the aperture of intelligent pressure regulating valve described in described pressure detecting signal control, taking the pressure that obtains described cavity within the scope of setting-up time as 760Torr.
2. cavity intelligent control pressurer system as claimed in claim 1, is characterized in that, the nitrogen flow that described nitrogen air inlet pipeline enters described cavity is 500slm.
3. cavity intelligent control pressurer system as claimed in claim 1, it is characterized in that, the overvoltage line segments of described gas exhaust piping is in the time that the pressure in described cavity is greater than atmospheric pressure, and the blowdown valve of described overvoltage line segments is opened automatically, and described cavity is carried out to pressure release.
4. cavity intelligent control pressurer system as claimed in claim 1, is characterized in that, described leak rate Inspection, and while passing into nitrogen, the blowdown valve of described overvoltage line segments is opened automatically, the pressure that obtains described cavity is 760Torr.
5. a compress control method for cavity intelligent control pressurer system as claimed in claim 1, is characterized in that, described cavity intelligent compress control method comprises:
Execution step S1: input and nitrogen in described cavity by described nitrogen air inlet pipeline, the flow of described nitrogen is 500slm;
Execution step S2: the blowdown valve of the overvoltage line segments of described gas exhaust piping is opened, and by the discharge pressure at described pressure transducer detection in real time described extraneous drain tap place, in the time that the discharge pressure of described extraneous drain tap increases, described detection signal is fed back to described control module by described pressure transducer.
6. execution step S3: the aperture of intelligent pressure regulating valve described in described control module control, the pumping speed of described exhaust is reduced, to ensure that the nitrogen amount of the described cavity of inflow is greater than the rate of air sucked in required of described exhaust, be 760Torr thereby obtain chamber pressure within the time of setting.
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| CN201410138285.5A CN103926945B (en) | 2014-04-08 | 2014-04-08 | Cavity intelligent pressure control system and pressure control method of the same |
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| CN201410138285.5A CN103926945B (en) | 2014-04-08 | 2014-04-08 | Cavity intelligent pressure control system and pressure control method of the same |
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| CN103926945A true CN103926945A (en) | 2014-07-16 |
| CN103926945B CN103926945B (en) | 2017-02-15 |
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Cited By (4)
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| CN104950934A (en) * | 2015-06-11 | 2015-09-30 | 常熟市华技锅炉制造有限公司 | Intelligent fuel gas balance system |
| CN106086810A (en) * | 2016-06-29 | 2016-11-09 | 苏州新纳晶光电有限公司 | Regulation MOCVD chamber pressure overcomes the method and system on LED epitaxial structure mist limit |
| CN109340571A (en) * | 2018-11-30 | 2019-02-15 | 醴陵旗滨电子玻璃有限公司 | Nitrogen supply system and its control method |
| CN113280986A (en) * | 2021-04-17 | 2021-08-20 | 山西潞安太阳能科技有限责任公司 | Method for detecting leakage rate of furnace tube vacuum pump |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN106086810A (en) * | 2016-06-29 | 2016-11-09 | 苏州新纳晶光电有限公司 | Regulation MOCVD chamber pressure overcomes the method and system on LED epitaxial structure mist limit |
| CN109340571A (en) * | 2018-11-30 | 2019-02-15 | 醴陵旗滨电子玻璃有限公司 | Nitrogen supply system and its control method |
| CN113280986A (en) * | 2021-04-17 | 2021-08-20 | 山西潞安太阳能科技有限责任公司 | Method for detecting leakage rate of furnace tube vacuum pump |
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| CN103926945B (en) | 2017-02-15 |
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