CN113280986B - Method for detecting leakage rate of furnace tube vacuum pump - Google Patents
Method for detecting leakage rate of furnace tube vacuum pump Download PDFInfo
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- CN113280986B CN113280986B CN202110414850.6A CN202110414850A CN113280986B CN 113280986 B CN113280986 B CN 113280986B CN 202110414850 A CN202110414850 A CN 202110414850A CN 113280986 B CN113280986 B CN 113280986B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
- G01M3/26—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E30/00—Energy generation of nuclear origin
- Y02E30/30—Nuclear fission reactors
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Abstract
The invention belongs to the field of photovoltaic crystalline silicon batteries. A method for detecting leakage rate of vacuum pump of furnace tube includes vacuumizing the same furnace tube by using vacuum pump, applying pressure in furnace tube of 300mTorr to furnace tubeVentilating the tube, keeping the pressure in the furnace tube unchanged, measuring the corresponding relation between the ventilation flow S and the opening gamma of the butterfly valve of the vacuum pump every one minute, and fitting to obtain a straight line with the slope beta; the vacuum pump to be measured is arranged on a furnace tube, the vacuum pump to be measured is started to be started for vacuumizing, when the pressure in the furnace tube is 300mTorr, the furnace tube is ventilated, the pressure in the furnace tube is kept unchanged, the opening gamma of a butterfly valve of the vacuum pump to be measured is observed, and the opening gamma of the butterfly valve of the vacuum pump is obtained after the butterfly valve is stabilized 0 Vacuum pump leakage rate Q to be measured Leakage device =P stp *(β/γ 0 ) If Q Leakage device And (3) obtaining the leak rate Q of the vacuum pump to be detected if the leak rate Q is greater than or equal to 800PaL/S Leakage device The true leak rate of the vacuum pump to be measured is obtained.
Description
Technical Field
The invention relates to the field of solar cell production.
Background
In the production process of the industrialized photovoltaic cells, the integrity of the equipment can ensure the stability of the process, and the leakage rate problem of a vacuum pump of the coating process equipment is directly related to the quality of the coating, and the professional side leakage equipment is high in price and complex in operation, so that the method is not beneficial to the application in the production process.
Disclosure of Invention
The technical problems to be solved by the invention are as follows: how to provide a method for rapidly detecting the leakage rate of a furnace tube vacuum pump.
The technical scheme adopted by the invention is as follows: a method for detecting leakage rate of a furnace tube vacuum pump comprises the following steps of
Step one, installing a vacuum pump to be tested on a furnace tube, starting the vacuum pump to be tested to vacuumize, detecting whether the internal pressure of the furnace tube can be lower than 50mTorr, and if not, indicating that the leak rate of the vacuum pump is more than or equal to 2000PaL/S;
secondly, for the same furnace tube, firstly vacuumizing the furnace tube by adopting a perfect vacuum pump, ventilating the furnace tube when the pressure in the furnace tube is 300mTorr, keeping the pressure in the furnace tube unchanged, measuring the corresponding relation between the ventilation flow S and the opening gamma of a butterfly valve of the vacuum pump every one minute, establishing a direct coordinate system by taking gamma as an abscissa and S as an ordinate, and fitting to obtain a straight line with the slope beta;
step three, installing a vacuum pump to be tested on the furnace tube, starting the vacuum pump to be tested for vacuumizing, ventilating the furnace tube when the pressure in the furnace tube is 300mTorr, keeping the pressure in the furnace tube unchanged, observing the opening gamma of a butterfly valve of the vacuum pump to be tested, and obtaining the opening gamma of a butterfly valve of the vacuum pump after the butterfly valve is stabilized 0 Vacuum pump leakage rate Q to be measured Leakage device =P stp *(β/γ 0 ) Wherein P is stp P is the pressure difference between the inside and outside of the furnace tube stp Atmospheric pressure is taken, if Q Leakage device And (3) obtaining the leak rate Q of the vacuum pump to be detected if the leak rate Q is greater than or equal to 800PaL/S Leakage device The true leak rate of the vacuum pump to be measured is obtained, otherwise, the fourth step is carried out;
step four, for the same furnace tube, firstly vacuumizing the furnace tube by adopting a perfect vacuum pump, when the pressure in the furnace tube is lower than 50mTorr, closing the vacuum pump, ventilating the furnace tube, gradually increasing the ventilation flow to 500sccm at maximum, recording the ventilation flow of the furnace tube once every 50sccm of the ventilation flow, and simultaneously calculating the pressure increasing rate omega of the furnace tube ΔP To increase the pressure of the furnace tube by the rate omega ΔP On the abscissa, the ventilation flow of the furnace tube is the ordinate, and a straight line with a slope alpha is obtained by establishing direct coordinate system fitting;
step five, installing a vacuum pump to be tested on the furnace tube, starting the vacuum pump to be tested for vacuumizing, closing the vacuum pump when the pressure in the furnace tube is lower than 50mTorr, recording the furnace tube pressure increasing value per minute, and taking an average value as the average furnace tube pressure increasing rate omega ΔP all Real leak rate Q of vacuum pump to be measured Leakage repair =P stp *(ω ΔP all /α)，P stp P is the pressure difference between the inside and outside of the furnace tube stp Taking the atmospheric pressure, Q Leakage repair Less than 800PaL/S.
The beneficial effects of the invention are as follows: the invention provides a method for detecting the leakage rate of a furnace tube vacuum pump, which can be used for different leakage rates, has low cost and simple operation, and is favorable for popularization and application in industrial production.
Detailed Description
A method for detecting leakage rate of vacuum pump of furnace tube comprises the following steps
Step one, installing a vacuum pump to be tested on a furnace tube, starting the vacuum pump to be tested to vacuumize, detecting whether the internal pressure of the furnace tube can be lower than 50mTorr, and if not, indicating that the leak rate of the vacuum pump is more than or equal to 2000PaL/S; when the leak rate of the vacuum pump is more than or equal to 2000PaL/S, the leak rate can be directly observed manually without testing and detecting.
Secondly, for the same furnace tube, firstly vacuumizing the furnace tube by adopting a perfect vacuum pump, ventilating the furnace tube when the pressure in the furnace tube is 300mTorr, keeping the pressure in the furnace tube unchanged, measuring the corresponding relation between the ventilation flow S and the opening gamma of a butterfly valve of the vacuum pump every one minute, establishing a direct coordinate system by taking gamma as an abscissa and S as an ordinate, and fitting to obtain a straight line with the slope beta; the ventilation flow S is in linear relation with the opening gamma of the butterfly valve of the vacuum pump.
Step three, installing a vacuum pump to be tested on the furnace tube, starting the vacuum pump to be tested for vacuumizing, ventilating the furnace tube when the pressure in the furnace tube is 300mTorr, keeping the pressure in the furnace tube unchanged, observing the opening gamma of a butterfly valve of the vacuum pump to be tested, and obtaining the opening gamma of a butterfly valve of the vacuum pump after the butterfly valve is stabilized 0 Vacuum pump leakage rate Q to be measured Leakage device =P stp *(β/γ 0 ) Wherein P is stp For the pressure difference inside and outside the furnace tube (the pressure in the furnace tube is 300mTorr and the atmospheric pressure relative to the outside is very small), P is calculated stp Atmospheric pressure is taken, if Q Leakage device And (3) obtaining the leak rate Q of the vacuum pump to be detected if the leak rate Q is greater than or equal to 800PaL/S Leakage device The true leak rate of the vacuum pump to be measured is obtained, otherwise, the fourth step is carried out;
step four, for the same furnace tube, firstly vacuumizing the furnace tube by adopting a perfect vacuum pump, closing the vacuum pump when the pressure in the furnace tube is equal to 30mTorr, ventilating the furnace tube, gradually increasing the ventilation flow to 500sccm at maximum, recording the ventilation flow of the furnace tube once every 50sccm of the ventilation flow, and simultaneously calculating the pressure increasing rate omega of the furnace tube ΔP To increase the pressure of the furnace tube by the rate omega ΔP On the abscissa, the ventilation flow of the furnace tube is the ordinate, and a straight line with a slope alpha is obtained by establishing direct coordinate system fitting;
step five, installing a vacuum pump to be tested on the furnace tube, starting the vacuum pump to be tested for vacuumizing, closing the vacuum pump when the pressure in the furnace tube is lower than 50mTorr, recording the furnace tube pressure increasing value per minute, and taking an average value as the average furnace tube pressure increasing rate omega ΔP all Real leak rate Q of vacuum pump to be measured Leakage repair =P stp *(ω ΔP all /α)，P stp P is the pressure difference between the inside and the outside of the furnace tube (the pressure in the furnace tube is very small relative to the atmospheric pressure outside) stp Taking the atmospheric pressure, Q Leakage repair Less than 800PaL/S.
Claims (1)
1. A method for detecting the leakage rate of a furnace tube vacuum pump is characterized by comprising the following steps of: the method comprises the following steps of
Step one, installing a vacuum pump to be tested on a furnace tube, starting the vacuum pump to be tested to vacuumize, detecting whether the internal pressure of the furnace tube can be lower than 50mTorr, and if not, indicating that the leak rate of the vacuum pump is more than or equal to 2000PaL/S;
secondly, for the same furnace tube, firstly vacuumizing the furnace tube by adopting a perfect vacuum pump, ventilating the furnace tube when the pressure in the furnace tube is 300mTorr, keeping the pressure in the furnace tube unchanged, measuring the corresponding relation between the ventilation flow S and the opening gamma of a butterfly valve of the vacuum pump every one minute, establishing a direct coordinate system by taking gamma as an abscissa and S as an ordinate, and fitting to obtain a straight line with the slope beta;
step three, installing a vacuum pump to be tested on the furnace tube, starting the vacuum pump to be tested for vacuumizing, ventilating the furnace tube when the pressure in the furnace tube is 300mTorr, keeping the pressure in the furnace tube unchanged, observing the opening gamma of a butterfly valve of the vacuum pump to be tested, and obtaining the opening gamma of a butterfly valve of the vacuum pump after the butterfly valve is stabilized 0 Vacuum pump leakage rate Q to be measured Leakage device =P stp *(β/γ 0 ) Wherein P is stp P is the pressure difference between the inside and outside of the furnace tube stp Atmospheric pressure is taken, if Q Leakage device And (3) obtaining the leak rate Q of the vacuum pump to be detected if the leak rate Q is greater than or equal to 800PaL/S Leakage device The true leak rate of the vacuum pump to be measured is obtained, otherwise, the fourth step is carried out;
step four, for the same furnace tube, firstly vacuumizing the furnace tube by adopting a perfect vacuum pump, when the pressure in the furnace tube is lower than 50mTorr, closing the vacuum pump, ventilating the furnace tube, gradually increasing the ventilation flow to 500sccm at maximum, recording the ventilation flow of the furnace tube once every 50sccm of the ventilation flow, and simultaneously calculating the pressure increasing rate omega of the furnace tube ΔP To increase the pressure of the furnace tube by the rate omega ΔP On the abscissa, the ventilation flow of the furnace tube is the ordinate, and a straight line with a slope alpha is obtained by establishing direct coordinate system fitting;
step five, installing a vacuum pump to be tested on the furnace tube, starting the vacuum pump to be tested for vacuumizing, closing the vacuum pump when the pressure in the furnace tube is lower than 50mTorr, recording the furnace tube pressure increasing value per minute, and taking an average value as the average furnace tube pressure increasing rate omega ΔP all Real leak rate Q of vacuum pump to be measured Leakage repair =P stp *(ω ΔP all /α)，P stp P is the pressure difference between the inside and outside of the furnace tube stp Taking the atmospheric pressure, Q Leakage repair Less than 800PaL/S.
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