CN103604573A - Vacuum container sectional pressure raising quantitative leakage rate test method - Google Patents
Vacuum container sectional pressure raising quantitative leakage rate test method Download PDFInfo
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- CN103604573A CN103604573A CN201310544680.9A CN201310544680A CN103604573A CN 103604573 A CN103604573 A CN 103604573A CN 201310544680 A CN201310544680 A CN 201310544680A CN 103604573 A CN103604573 A CN 103604573A
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- vacuum
- leak
- vacuum tank
- pressure
- leak rate
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Abstract
The invention relates to a method for obtaining a leakage rate by using a static pressure raising method. A standard leak is connected with a vacuum container to be tested through an introduction valve, a vacuum system is started to pump the vacuum container to have stable pressure, the pressure change in each time section is measured, a vacuum container leakage rate Q is obtained through formula calculation, and the unit is Pa*m3/s. The method has the advantages of simplicity and low needed resources, the vacuum container leakage expressed by an international unit system can be obtained in one time of pressure raising process, the method is rapid and convenient, the resources can be conveniently obtained in the field, and so the cost is low.
Description
Technical field
The invention belongs to vacuum and leak hunting technology field, specifically, relate to the method for a kind of vacuum tank integral leakage quantitative measurment, can be for the quantitative measurment of vacuum tank integral leakage.
Background technology
At present, the leakage rate measurement that adopts the static method of boosting to carry out vacuum tank, the leak rate unit generally obtaining is Pa/s, rather than leak rate International System of Units Pam3/s.This is mainly the irregular structure due to vacuum tank in engineering, and internal tank generally exist volume not etc., baroque operation element, cause the inner active volume of vacuum tank to calculate.Therefore the leak rate, obtaining often has to adopt the unit of Pa/s.The leak rate of the vacuum tank that this method obtains, can only be as product export check or the semiquantitative qualitative index of both sides of supply and demand agreement.Because vacuum tightness is subject to many-sided factor restriction, and be not only the discharge quantity size of vacuum tank own, also comprise the exhaust capacity of working gas load, slip and vacuum pump.From vacuum tank, be mainly for obtaining the functional perspective of certain vacuum degree, with the unit representation leak rate of Pa/s, aspect application scalability, have greatly restriction.For example, 1 vacuum coating equipment leak rate is 2Pa/s, and gas load is 5Pam3/s, and vacuum unit is bled to equipment, can maintenance work pressure at 2E-2Pa, working pressure the most very much not allows to surpass 4E-2Pa, if increase by the workpiece of plated film, need to increase gas load is 12Pam3/s, and now can be lower than 4E-2Pa for working pressure, obviously, take leak rate that Pa/s is unit is to calculate that to increase the ，Ruo leak rate unit of the working pressure after gas load be Pam
3/ s, being easy to calculate increases working pressure after gas load.Therefore the leak rate, representing with International System of Units is great for engineering application value.The present invention has provided a kind of method of utilizing the static state method of boosting can obtain the leak rate of International System of Units, simple to operate, with low cost, to expansion leak rate, applies, raises the efficiency significant.
Summary of the invention
The object of this invention is to provide a kind of method of utilizing static state to boost to obtain the leak rate represent with International System of Units, with expand leak rate application, reduce leak detection cost, raise the efficiency.
To achieve these goals, the present invention has adopted following technical scheme:
A kind of method of utilizing the static state method of boosting to obtain leak rate of the present invention, comprises the following steps:
1) test is prepared:
A. be ready to one through calibration, to the known channel-style vacuum standard small opening of air leak rate;
B. referance leak is connected with vacuum tank to be measured by introducing valve, closes introducing valve;
C. start vacuum system to above-mentioned evacuating atmosphere in vacuum vessel to pressure stability;
2) DATA REASONING:
A. close the main valve of above-mentioned tested vacuum system, tested vacuum tank pressure starts to rise, and sets this constantly for 0 o'clock time state, records original pressure p
0;
B. through Δ t after a while
1, p when tested vacuum tank pressure rise arrives a certain pressure
1, now open referance leak valve;
C. after referance leak valve opening, through Δ t after a while
2after, vacuum tank pressure rise is to p
2;
3) calculate leak rate:
By following formula, calculate vacuum tank leak rate Q, unit is Pam
3/ s;
Q=Q
0·(p
1-p
0)·Δt
2/(p
2-p
1)·Δt
1-(p
1-p
0)·Δt
2
Q wherein
0for the leak rate of referance leak, the Pam of unit
3/ s is known quantity.
The feature of technical scheme of the present invention is as follows:
1. the present invention is very easy, and resource requirement is few, can in 1 process of boosting, obtain the vacuum tank leak rate representing with International System of Units, has quick and easy feature.
2. the present invention only needs 1,1 of referance leak that leak rate is known and valve, and these are all in vacuum and leak detection work, to be often the conventional article that use, can obtain at the scene very easily, so with low cost.
Accompanying drawing explanation
Fig. 1 is the boost schematic diagram of quantitative test leak rate method of vacuum tank segmentation of the present invention:
Wherein, 1-channel-style referance leak, 2-referance leak is introduced valve, 3-vacuum meter, the tested vacuum tank of 4-, 5-vacuum system main valve, 6-vacuum pump.
Fig. 2 is the test pressure-time curve in certain engineering practice.
Embodiment
What below introduce is the embodiment as content of the present invention, below by embodiment, described content of the present invention is further illustrated.Certainly, describing following embodiment is only the content of example different aspect of the present invention, and should not be construed as the restriction scope of the invention.
As shown in Figure 1, test process of the present invention is: channel-style referance leak 1 is introduced to valve 2 by referance leak and be connected on vacuum tank 4, on vacuum tank 4, be connected respectively with vacuum meter 3 with vacuum system valve 5, vacuum pump 6 is connected with vacuum system valve 5.Standard of closure is introduced valve 2, opens vacuum system valve 5, and 6 pairs of vacuum tanks 4 of operation vacuum pump are bled, by the pressure in vacuum meter 3 monitoring vacuum tanks 4.Until the pressure kept stable in vacuum tank 4 is closed vacuum system valve 5.When the pressure in vacuum tank 4 starts stable rising, mark is now 0 constantly, records the pressure in vacuum tank 4 now.Continue by the pressure a period of time Δ t in vacuum meter 3 monitoring vacuum tanks 4
1, now pressure rise is to p
1.Now, open referance leak and introduce valve 2, by pressure a period of time Δ t of vacuum meter 3 monitoring vacuum tanks 4
2, now vacuum tank pressure rise is to p
1.According to formula 3, calculate the leak rate of vacuum tank.
Vacuum tank sectional type provided by the invention is boosted the method for the quantitative test leak rate test data curve in certain engineering practice as shown in Figure 2, and concrete implementation step is as follows:
1) test is prepared:
A. prepare one through the referance leak 1 of calibration, to air leak rate 0.2Pam
3/ s;
B. referance leak 1 is connected with vacuum tank 4 by introducing valve 2, closes and introduce valve 2;
C. start 6 pairs of vacuum tanks 4 of vacuum pump and be evacuated to pressure stability 0.1Pa.
2) DATA REASONING:
A. close vacuum system valve 5, vacuum tank pressure starts to rise;
When b.19:15 vacuum tank pressure starts stable rising, setting is now 0 o'clock time, records original pressure p
0for 1.2Pa;
C. through 390 seconds, vacuum tank pressure rise, to 1.85Pa, was now opened referance leak and is introduced valve 2;
D. from referance leak valve opening, through 510 seconds, vacuum tank pressure rise was to 3.15Pa.
3) calculate the leak rate of vacuum tank 4:
Q=Q
0·(p
1-p
0)·Δt
1/(p
2-p
1)·Δt
1-(p
1-p
0)·Δt
1
=0.2×(1.85-1.2)×510(3.15-1.85)×390-(1.85-1.2)×510
=0.38（Pa·m
3/s）
Although above the specific embodiment of the present invention is described in detail and is illustrated, but what should indicate is, we can make various changes and modifications above-mentioned embodiment, but these do not depart from the scope that spirit of the present invention and appended claim are recorded.
Claims (1)
1. utilize the static state method of boosting to obtain a method for leak rate, comprise the following steps:
1) test is prepared:
A. be ready to one through calibration, to the known channel-style vacuum standard small opening of air leak rate;
B. referance leak is connected with vacuum tank to be measured by introducing valve, closes introducing valve;
C. start vacuum system to above-mentioned evacuating atmosphere in vacuum vessel to pressure stability;
2) DATA REASONING:
A. close the main valve of above-mentioned tested vacuum system, tested vacuum tank pressure starts to rise, and sets this constantly for 0 o'clock time state, records original pressure p
0;
B. through Δ t after a while
1, p when tested vacuum tank pressure rise arrives a certain pressure
1, now open referance leak valve;
C. after referance leak valve opening, through Δ t after a while
2after, vacuum tank pressure rise is to p
2;
3) calculate leak rate:
By following formula, calculate vacuum tank leak rate Q, unit is Pam
3/ s;
Q=Q
0·(p
1-p
0)·Δt
2/(p
2-p
1)·Δt
1-(p
1-p
0)·Δt
2
Q wherein
0for the leak rate of referance leak, the Pam of unit
3/ s is known quantity.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310544680.9A CN103604573A (en) | 2013-11-05 | 2013-11-05 | Vacuum container sectional pressure raising quantitative leakage rate test method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310544680.9A CN103604573A (en) | 2013-11-05 | 2013-11-05 | Vacuum container sectional pressure raising quantitative leakage rate test method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN103604573A true CN103604573A (en) | 2014-02-26 |
Family
ID=50122818
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310544680.9A Pending CN103604573A (en) | 2013-11-05 | 2013-11-05 | Vacuum container sectional pressure raising quantitative leakage rate test method |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104568343A (en) * | 2014-12-31 | 2015-04-29 | 广州市型腔模具制造有限公司 | Vacuum degree detection method for vacuum die-casting die |
| CN106197887A (en) * | 2016-07-05 | 2016-12-07 | 北京航空航天大学 | A kind of determination method of sealed electrical connector low temperature leak criterion |
| CN111879481A (en) * | 2020-07-10 | 2020-11-03 | 山东国晶新材料有限公司 | Detection method for detecting water seepage of vacuum vapor deposition furnace |
| CN113280986A (en) * | 2021-04-17 | 2021-08-20 | 山西潞安太阳能科技有限责任公司 | Method for detecting leakage rate of furnace tube vacuum pump |
| CN114636516A (en) * | 2021-04-06 | 2022-06-17 | 上海东贝真空设备有限公司 | Positive sample calibration device and method for checking sealing integrity of medicine packaging container |
-
2013
- 2013-11-05 CN CN201310544680.9A patent/CN103604573A/en active Pending
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104568343A (en) * | 2014-12-31 | 2015-04-29 | 广州市型腔模具制造有限公司 | Vacuum degree detection method for vacuum die-casting die |
| CN104568343B (en) * | 2014-12-31 | 2018-03-09 | 广州市型腔模具制造有限公司 | A kind of vacuum die-casting mould vacuum detecting method |
| CN106197887A (en) * | 2016-07-05 | 2016-12-07 | 北京航空航天大学 | A kind of determination method of sealed electrical connector low temperature leak criterion |
| CN106197887B (en) * | 2016-07-05 | 2019-04-26 | 北京航空航天大学 | A kind of determination method of sealed electrical connector low temperature leak criterion |
| CN111879481A (en) * | 2020-07-10 | 2020-11-03 | 山东国晶新材料有限公司 | Detection method for detecting water seepage of vacuum vapor deposition furnace |
| CN114636516A (en) * | 2021-04-06 | 2022-06-17 | 上海东贝真空设备有限公司 | Positive sample calibration device and method for checking sealing integrity of medicine packaging container |
| CN113280986A (en) * | 2021-04-17 | 2021-08-20 | 山西潞安太阳能科技有限责任公司 | Method for detecting leakage rate of furnace tube vacuum pump |
| CN113280986B (en) * | 2021-04-17 | 2023-05-12 | 山西潞安太阳能科技有限责任公司 | Method for detecting leakage rate of furnace tube vacuum pump |
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Application publication date: 20140226 |