CN114323588A - Device and method for measuring fluorescence distribution in laser crystal of LD side pump module - Google Patents
Device and method for measuring fluorescence distribution in laser crystal of LD side pump module Download PDFInfo
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- 238000003384 imaging method Methods 0.000 claims abstract description 41
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- 239000004065 semiconductor Substances 0.000 claims description 3
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Abstract
The invention discloses a device and a method for measuring the fluorescent distribution in a laser crystal of an LD side pump module, comprising the LD side pump module, a light filter, an imaging system and a CCD photosensitive element which are sequentially arranged along the light propagation direction, wherein the CCD photosensitive element is arranged on a mobile platform; moving the mobile platform, adjusting until a clear and complete image formed by fluorescence on the CCD photosensitive element is obtained, and recording the fluorescence distribution at the position as A; continuously moving the moving platform towards the imaging system, and recording the fluorescence distribution B when the moving step length delta l; and executing exclusive OR operation on the images A and B to obtain the fluorescence distribution of the delta l area in the laser crystal of the LD side pump module. The invention can measure the fluorescence distribution in the LD side pump module laser crystal with low cost, and carry out the XOR operation to obtain the fluorescence distribution in different areas in the LD side pump module crystal, and has simple structure and convenient equipment.
Description
Technical Field
The invention relates to the technical field of laser, in particular to a device and a method for measuring the fluorescence distribution in a laser crystal of an LD side pump module.
Background
With the rapid development of the laser industry, laser processing is widely applied to various industries, and high-precision laser processing equipment and measuring equipment are rapidly developed and widely applied; the requirements on the laser are higher and higher, and the beam quality is an important parameter of the laser and determines the performance of the laser to a great extent. The distribution of fluorescence inside the laser crystal of the LD side pump module plays a crucial role in the quality of the light beam to a great extent, so that when the laser is built, it is very important to select and use a proper LD side pump module.
However, the currently used methods for measuring the internal fluorescence distribution of the laser crystal of the LD side pump module are few, so that an instrument capable of measuring the internal fluorescence distribution of the laser crystal of the LD side pump module is expensive like a fluorescence spectrometer, and the use cost is high.
Disclosure of Invention
In view of the above problems in the prior art, the present invention provides an apparatus and method for measuring the internal fluorescence distribution of a laser crystal of an LD-side pump module, which can obtain the internal fluorescence distribution of a crystal in different regions by measuring the fluorescence distribution at different positions in the crystal and performing an xor process.
The invention discloses a device for measuring the fluorescent distribution in a laser crystal of an LD side pump module, which comprises the LD side pump module, a light filter, an imaging system and a CCD photosensitive element which are sequentially arranged along the light propagation direction, wherein the CCD photosensitive element is arranged on a moving platform; wherein the content of the first and second substances,
moving the moving platform, adjusting the moving platform to a clear and complete image formed by fluorescence on the CCD photosensitive element, and recording the fluorescence distribution at the position as A;
continuously moving the moving platform towards the imaging system, and recording the fluorescence distribution B when the moving step length delta l;
and executing exclusive OR operation on the images A and B to obtain the fluorescence distribution of the delta l area in the laser crystal of the LD side pump module.
As a further improvement of the invention, the device also comprises an attenuation sheet;
the attenuation sheet is arranged on the light incident side of the CCD photosensitive element.
As a further improvement of the invention, the LDs of the LD-side pump module are semiconductor laser diode bars which are distributed around the side face of the laser crystal bar in an arrangement mode.
As a further improvement of the invention, the optical filter is used for filtering the wavelength of stray light generated by the LD by transmitting the fluorescent light emitted by the laser crystal.
As a further improvement of the present invention, the size of the clear complete image is consistent with the crystal diameter of the LD-side pump module, and the fluorescence distribution a is the fluorescence distribution of the laser crystal end face.
As a further improvement of the invention, the moving direction of the moving platform is consistent with the direction of the propagation axis of the light beam, and the photosensitive area of the CCD photosensitive element is larger than the end face size of the laser crystal rod.
As a further improvement of the invention, the imaging system is a single lens or a lens group, the focal length of the imaging system ensures that the CCD photosensitive element can clearly distinguish the light intensities with different intensities, the depth of field of the imaging system is equal to the step length, and the moving step length is at least less than half of the laser crystal bar length of the LD side pump module.
As a further improvement of the invention, the CCD photosensitive element is provided with light beam quality analysis software for converting the fluorescence light intensity distribution obtained on the CCD photosensitive element into a visible image.
The invention also discloses a method for measuring the internal fluorescence distribution of the laser crystal of the LD side pump module, which comprises the following steps:
step 1, constructing a measuring device, wherein the measuring device comprises an LD side pump module, an optical filter, an imaging system and a CCD photosensitive element which are sequentially arranged along a light propagation direction, and the CCD photosensitive element is arranged on a moving platform;
step 4, adjusting the moving platform to a clear and complete image formed by fluorescence on the CCD photosensitive element, and recording the fluorescence distribution at the position as A;
and 6, executing exclusive OR operation on the images A and B to obtain the fluorescence distribution of the delta l area in the laser crystal of the LD side pump module.
As a further improvement of the invention, the method also comprises the following steps:
and 7, repeating the steps 5 and 6, and executing the exclusive OR operation on the fluorescence distribution images at the two adjacent positions to obtain the fluorescence distribution of different areas in the laser crystal of the LD side pump module.
Compared with the prior art, the invention has the beneficial effects that:
the invention adopts the optical filter to filter stray light inside the laser crystal of the LD side pump module, enters the imaging system, and records a fluorescence image under the observation of the CCD photosensitive element; horizontally moving the CCD photosensitive element to an imaging system by delta l, repeating the operation to obtain A, B, C, D … … fluorescence distribution, and performing XOR operation based on the fluorescence image; the invention can measure the fluorescence distribution in the LD side pump module laser crystal with low cost, and carry out the XOR operation to obtain the fluorescence distribution in different areas in the LD side pump module crystal, and has simple structure and convenient equipment.
Drawings
Fig. 1 is a schematic structural diagram of an apparatus for measuring fluorescence distribution inside a laser crystal of an LD-side pump module according to an embodiment of the present invention;
FIG. 2 is a flowchart of a method for measuring the internal fluorescence distribution of a laser crystal of an LD side pump module according to an embodiment of the present invention;
FIG. 3 is a schematic diagram of the fluorescence distribution of step 3 in FIG. 2;
FIG. 4 is a graph showing the fluorescence distribution at step 4 of FIG. 2;
FIG. 5 is a graph showing the fluorescence distribution at step 5 in FIG. 2.
In the figure:
1. an LD side pump module; 2. an optical filter; 3. an imaging system; 4. an attenuation sheet; 5. a CCD light sensing element; 6. and (4) moving the platform.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all, embodiments of the present invention. All other embodiments, which can be obtained by a person skilled in the art without any inventive step based on the embodiments of the present invention, are within the scope of the present invention.
The invention is described in further detail below with reference to the attached drawing figures:
as shown in fig. 1, the present invention provides a device for measuring the fluorescence distribution inside a laser crystal of an LD-side pump module, which comprises an LD-side pump module 1, an optical filter 2, an imaging system 3 and a CCD photosensitive element 5, which are sequentially arranged along the light propagation direction; the CCD photosensitive elements 5 are arranged on the moving platform 6, and the distance between the CCD photosensitive elements 5 is adjusted by moving the moving platform 6 so as to obtain fluorescence distribution images at different distances on the CCD photosensitive elements 5; besides the above adjustment modes, the present invention can also select the CCD photosensitive element 5 to be fixed in position, the imaging system 3 to be arranged on the movable platform 6, and the movable imaging system 3 to achieve the same or similar functions.
The LD of the LD side pump module 1 is a semiconductor laser diode bar which is distributed around a laser crystal bar in an arrangement way; the central wavelength of LD emission is 808nm, and the laser crystal is Nd: YAG side pumping module bar, the fluorescence center wavelength of the laser crystal is 1.06 μm.
The optical filter 2 of the present invention is used for transmitting the fluorescence wavelength emitted by the laser crystal, such as the fluorescence with the central wavelength of 1.06 μm; the wavelength of stray light generated by the LD, such as stray light with a center wavelength of 808nm, is filtered.
The imaging system 3 of the invention is a single lens or a lens group, and the focal length of the imaging system ensures that the CCD photosensitive element 5 can clearly distinguish light intensities with different intensities; preferably, the depth of field of the imaging system 3 is equal to the step length, and the moving step length delta l is at least less than half of the laser crystal rod length of the LD side pump module; the specific moving step length is set according to actual requirements, for example, in the actual experiment process, the focal length of the imaging system is selected to be 100mm, the step length is 10mm, the length of the rod is 130mm, and the measuring range reaches 0-50 mm.
According to the invention, the attenuation sheet 4 is arranged on the light incident side of the CCD photosensitive element 5, and the attenuation multiplying power of the attenuation sheet 4 ensures that the CCD photosensitive element is not saturated under the incident fluorescence intensity and can ensure that the definition and the integrity of images in various regions are obtained A, B, C and D.
The moving direction of the moving platform 6 is consistent with the direction of a light beam propagation axis, and the photosensitive area of the CCD photosensitive element is larger than the size of the end face of the laser crystal rod.
The CCD photosensitive element 5 of the invention is provided with light beam quality analysis software for converting the fluorescence light intensity distribution obtained on the CCD photosensitive element into a visible image.
During measurement:
moving the moving platform 6, adjusting until a clear complete image formed by fluorescence on the CCD photosensitive element 5 is obtained, and recording the fluorescence distribution at the position as A; wherein, the size of the clear complete image is consistent with the crystal diameter of the LD side pump module, and the fluorescence distribution A is the fluorescence distribution of the laser crystal end face; continuously moving the moving platform 6 towards the imaging system 3, and recording the fluorescence distribution B when the moving step length delta l; and executing exclusive OR operation on the images A and B to obtain the fluorescence distribution of the delta l area in the laser crystal of the LD side pump module.
Specifically, the method comprises the following steps:
as shown in fig. 2, the present invention provides a method for measuring the internal fluorescence distribution of a laser crystal of an LD-side pump module, comprising:
step 1, constructing a measuring device, wherein the measuring device comprises an LD side pump module 1, an optical filter 2, an imaging system 3, an attenuation sheet 4 and a CCD photosensitive element 5 which are sequentially arranged along a light propagation direction, and the attenuation sheet 4 and the CCD photosensitive element 5 are arranged on a moving platform 6;
step 4, adjusting the size of a clear image formed by fluorescence from the mobile platform 6 to the CCD photosensitive element 5 to be consistent with the diameter of the crystal of the LD-side pump module 1, and recording the fluorescence distribution at the position as A, wherein the fluorescence distribution A is a fluorescence distribution image at the end part of the crystal, as shown in FIG. 3;
the running algorithm of the < XOR > operation is:
Algroithm 1 XOR the image
Input:A,B
Output:M
For all x,y do Mx,y＝Ax,y⊕Bx,y
end for
7, repeating the steps 5 and 6, and executing the exclusive OR operation on the fluorescence distribution images at the two adjacent positions to obtain the fluorescence distribution of different areas in the laser crystal of the LD side pump module;
for example, based on the position of step 4, moving Δ l to the direction of the imaging system, recording the fluorescence distribution C of the secondary position, and performing xor operation on the images B and C to obtain the fluorescence distribution of the Δ l region between the positions B and C; at this time, continuously moving the image system by delta l, recording the fluorescence distribution D of the secondary position, and executing the exclusive OR operation on the images C and D to obtain the fluorescence distribution of the delta l region between the position C and the position D.
Example (b):
selecting an imaging system with a focal length of 100mm, a step length delta l of 10mm, a rod length of 130mm and a measurement range of 0-50 mm;
the measuring method comprises the following steps:
step 1, adjusting a moving platform 6 to make the size of a clear image formed by fluorescence on a CCD photosensitive element 5 consistent with the diameter of a crystal of an LD side pump module 1, and recording fluorescence distribution A at the end position of the crystal;
step 4, continuously moving the imaging system for 10mm, and recording the fluorescence distribution D at the position of 30 mm; c ^ D, and obtaining the fluorescence distribution of 20-30 mm;
The invention has the advantages that:
the invention adopts the optical filter to filter stray light inside the laser crystal of the LD side pump module, enters the imaging system, and records a fluorescence image under the observation of the CCD photosensitive element; horizontally moving the CCD photosensitive element to an imaging system by delta l, repeating the operation to obtain A, B, C, D … … fluorescence distribution, and performing XOR operation based on the fluorescence image; the invention can measure the fluorescence distribution in the LD side pump module laser crystal with low cost, and carry out the XOR operation to obtain the fluorescence distribution in different areas in the LD side pump module crystal, and has simple structure and convenient equipment.
The above is only a preferred embodiment of the present invention, and is not intended to limit the present invention, and various modifications and changes will occur to those skilled in the art. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (10)
1. A device for measuring the fluorescent distribution in a laser crystal of an LD side pump module is characterized by comprising the LD side pump module, a light filter, an imaging system and a CCD photosensitive element which are sequentially arranged along the light transmission direction, wherein the CCD photosensitive element is arranged on a moving platform; wherein the content of the first and second substances,
moving the moving platform, adjusting the moving platform to a clear and complete image formed by fluorescence on the CCD photosensitive element, and recording the fluorescence distribution at the position as A;
continuously moving the moving platform towards the imaging system, and recording the fluorescence distribution B when the moving step length delta l;
and executing exclusive OR operation on the images A and B to obtain the fluorescence distribution of the delta l area in the laser crystal of the LD side pump module.
2. The apparatus of claim 1, further comprising an attenuation sheet;
the attenuation sheet is arranged on the light incident side of the CCD photosensitive element.
3. The apparatus of claim 1, wherein the LDs of the LD-side pump module are semiconductor laser diode bars arranged around the sides of the laser crystal bar.
4. The apparatus of claim 1, wherein the filter is configured to filter stray light wavelengths generated by the LD through fluorescent wavelengths emitted by the laser crystal.
5. The apparatus of claim 1, wherein the size of the clear complete image is consistent with the crystal diameter of the LD-side pump module, and the fluorescence distribution A is the fluorescence distribution of the laser crystal end face.
6. The apparatus of claim 5, wherein the moving direction of the moving platform is the same as the direction of the propagation axis of the light beam, and the photosensitive area of the CCD photosensitive element is larger than the end face size of the laser crystal rod.
7. The apparatus of claim 1, wherein the imaging system is a single lens or a lens set, the focal length of the imaging system ensures that the CCD photosensitive element can clearly distinguish the light intensity with different intensities, the depth of field of the imaging system is equal to the step length, and the moving step length is at least less than half of the length of the laser crystal rod of the LD-side pump module.
8. The apparatus according to claim 1, wherein the CCD photosensitive element is provided with beam quality analysis software for converting the fluorescence intensity distribution obtained on the CCD photosensitive element into a visible image.
9. A fluorescence distribution measurement method based on the device according to any one of claims 1 to 8, comprising:
step 1, constructing a measuring device, wherein the measuring device comprises an LD side pump module, an optical filter, an imaging system and a CCD photosensitive element which are sequentially arranged along a light propagation direction, and the CCD photosensitive element is arranged on a moving platform;
step 2, obtaining fluorescence with specific wavelength after light excited by the LD side pump module passes through the optical filter;
step 3, obtaining complete and clear fluorescence distribution by the fluorescence through an imaging system;
step 4, adjusting the moving platform to a clear and complete image formed by fluorescence on the CCD photosensitive element, and recording the fluorescence distribution at the position as A;
step 5, continuously adjusting the moving platform towards the direction of the imaging system, and recording the fluorescence distribution B when the moving step length delta l;
and 6, executing exclusive OR operation on the images A and B to obtain the fluorescence distribution of the delta l area in the laser crystal of the LD side pump module.
10. The fluorescence distribution measuring method according to claim 9, further comprising:
and 7, repeating the steps 5 and 6, and executing the exclusive OR operation on the fluorescence distribution images at the two adjacent positions to obtain the fluorescence distribution of different areas in the laser crystal of the LD side pump module.
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