CN114321720B - Fast valve control system of accelerator beam line - Google Patents

Fast valve control system of accelerator beam line Download PDF

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Publication number
CN114321720B
CN114321720B CN202210007797.2A CN202210007797A CN114321720B CN 114321720 B CN114321720 B CN 114321720B CN 202210007797 A CN202210007797 A CN 202210007797A CN 114321720 B CN114321720 B CN 114321720B
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vacuum
branch pipe
vacuum valve
pipeline
valve
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CN114321720A (en
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谭映雷
熊慎寿
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Shanghai Mitsui Guangzhong Vacuum Equipment Co ltd
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Shanghai Mitsui Guangzhong Vacuum Equipment Co ltd
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Abstract

The invention belongs to the technical field of quick valve control, and particularly discloses an accelerator beam line quick valve control system, which comprises a vacuum chamber, wherein a first pipeline and a second pipeline are respectively arranged on the left side and the right side of the vacuum chamber; an accelerator is arranged at one end of the first pipeline far away from the vacuum chamber, and a quick valve is arranged on the first pipeline close to the accelerator; an explosion-proof membrane is arranged at one end of the second pipeline far away from the vacuum chamber, a first ion pump and a second ion pump are arranged on the second pipeline from left to right, and a first branch pipe and a second branch pipe are respectively arranged on the left side and the right side of the first ion pump; a third branch pipe is arranged on the right side of the second ion pump on the second pipeline, and one ends of the third branch pipe, the first branch pipe and the second branch pipe, which are far away from the second pipeline, are communicated with the vacuum chamber; according to the invention, when vacuum leakage occurs, the quick valve is closed, so that the continuous decline of the vacuum degree in the accelerator is avoided, and the operation of a beam line is not easily affected; in addition, the fault maintenance range can be reduced, and the fault maintenance efficiency is improved.

Description

Fast valve control system of accelerator beam line
Technical Field
The invention relates to the technical field of quick valve control, in particular to a beam line quick valve control system of an accelerator.
Background
The beam line is a set of optical and vacuum compound systems for transmitting synchrotron radiation rays to an experiment station. The vacuum system is the basic engineering of various beam lines, and the optical element can transmit the synchrotron radiation light to a corresponding test station only in a vacuum environment. Thus, the main objective of the beam line vacuum system is to obtain and maintain a proper vacuum level, ensuring the operation of the beam line. In order to meet the scientific experiment requirements of experiment stations on various beam lines, the beam line vacuum system is required to have the characteristics of high vacuum degree and the like in operation, so the design work of the beam line vacuum system must be accurate and adapt to the complex environment in the beam lines.
Once vacuum leakage occurs in the existing vacuumizing system, the vacuum leakage in the accelerator cannot be quickly prevented, so that the vacuum degree in the accelerator cannot be ensured, and the operation of a beam line in the accelerator is influenced; in addition, the failure can not be removed rapidly, the failure maintenance efficiency is affected, and further an accelerator beam line quick valve control system is provided.
Disclosure of Invention
The invention aims to provide an accelerator beam line fast valve control system for solving the problems in the background art.
In order to achieve the above purpose, the present invention provides the following technical solutions: the accelerator beam line quick valve control system comprises a vacuum chamber, wherein a first pipeline and a second pipeline are respectively arranged on the left side and the right side of the vacuum chamber; an accelerator is arranged at one end of the first pipeline far away from the vacuum chamber, and a quick valve is arranged on the first pipeline close to the accelerator; an explosion-proof membrane is arranged at one end of the second pipeline far away from the vacuum chamber, a first centrifugal pump and a second centrifugal pump are arranged on the second pipeline at intervals from left to right, and a first branch pipe and a second branch pipe are respectively arranged on the left side and the right side of the first centrifugal pump; a third branch pipe is arranged on the second pipeline on the right side of the second centrifugal pump, one ends of the third branch pipe, the first branch pipe and the second branch pipe, which are far away from the second pipeline, are communicated with the vacuum chamber, a first vacuum valve, a second vacuum valve and a third vacuum valve are respectively arranged on the first branch pipe, the second branch pipe and the third branch pipe, a fourth vacuum valve is arranged between the first branch pipe and the vacuum chamber on the second pipeline, and a fifth vacuum valve is arranged between the second branch pipe and the second centrifugal pump on the second pipeline;
the ion detector is electrically connected with the first vacuum valve, the second vacuum valve, the third vacuum valve, the fourth vacuum valve and the fifth vacuum valve;
the execution method of the control system is as follows: firstly, opening a fourth vacuum valve and a fifth vacuum valve, closing a first vacuum valve, a second vacuum valve and a third vacuum valve, independently pumping air in a vacuum chamber 1 through a first centrifugal pump and a second centrifugal pump 8), judging the vacuum degree in the vacuum chamber 1 through a vacuum meter, judging whether ion flows exist in the first centrifugal pump and the second centrifugal pump through an ion detector, and if the ion flows exist, indicating that a second pipeline is normal, and no leakage exists; if no ion flow exists, closing a fifth vacuum valve, vacuumizing the vacuum chamber 1 through the first centrifugal pump, judging whether leakage exists or not through a vacuum meter and an ion detector, if not, indicating that the leakage position is on the right side of the first centrifugal pump, and if so, repairing the whole second pipeline;
when the second pipeline has no fault, the fourth vacuum valve, the fifth vacuum valve, the second vacuum valve and the third vacuum valve are closed, the first vacuum valve is opened, the vacuum chamber 1 is vacuumized through the first centrifugal pump, whether leakage exists or not is judged through the vacuum meter and the ion detector, if not, the first branch pipe is normal, and if so, the first branch pipe has fault and needs to be overhauled; then, the fourth vacuum valve, the fifth vacuum valve, the first vacuum valve and the third vacuum valve are closed, the vacuum chamber 1 is vacuumized through the first centrifugal pump, whether leakage exists or not is judged through the vacuum meter and the ion detector, if not, the second branch pipe is normal, and if so, the second branch pipe is faulty and needs to be overhauled; then, the fourth vacuum valve, the fifth vacuum valve, the first vacuum valve and the second vacuum valve are closed, the third vacuum valve is opened, the vacuum chamber 1 is vacuumized through the second centrifugal pump, whether leakage exists or not is judged through the vacuum meter and the ion detector, if not, the third branch pipe is normal, and if so, the third branch pipe is faulty and needs to be overhauled.
Preferably, a vacuum gauge is mounted on the vacuum chamber.
Preferably, the first centrifugal pump and the second centrifugal pump are provided with ion detectors for detecting ion flows.
Preferably, the first branch pipe, the second branch pipe and the third branch pipe are all connected with the second pipeline through flanges.
Compared with the prior art, the invention has the beneficial effects that:
the invention uses the existence of ion flow in vacuum of the ion pump to control the on-off of the fast valve, the ion pump is in vacuum, the ion flow is sent out, when the vacuum leaks, the ion pump does not send out the ion flow, the fast valve is controlled to be closed, the continuous decline of the vacuum degree in the accelerator is avoided, and the operation of the beam line is not easy to be influenced; in addition, can detect out the leakage pipeline, reduce the trouble maintenance scope, improve trouble maintenance efficiency.
Drawings
Fig. 1 is a schematic diagram of the overall structure of the present invention.
In the figure: 1. a vacuum chamber; 2. a first pipe; 3. a second pipe; 4. an accelerator; 5. a quick valve; 6. an explosion-proof membrane; 7. a first centrifugal pump; 8. a second centrifugal pump; 9. a first branch pipe; 10. a second branch pipe; 11. a third branch pipe; 12. a vacuum gauge; 13. an ion detector; 14. a flange; 15. a first vacuum valve; 16. a second vacuum valve; 17. a third vacuum valve; 18. a fourth vacuum valve; 19. and a fifth vacuum valve.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
In the description of the present invention, it should be noted that the azimuth or positional relationship indicated by the terms "vertical", "upper", "lower", "horizontal", etc. are based on the azimuth or positional relationship shown in the drawings, and are merely for convenience of describing the present invention and simplifying the description, and do not indicate or imply that the apparatus or element referred to must have a specific azimuth, be constructed and operated in a specific azimuth, and thus should not be construed as limiting the present invention.
In the description of the present invention, it should also be noted that, unless explicitly specified and limited otherwise, the terms "disposed," "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present invention can be understood by those of ordinary skill in the art according to the specific circumstances.
Referring to fig. 1, the present invention provides a technical solution: the accelerator beam line quick valve control system comprises a vacuum chamber 1, wherein a first pipeline 2 and a second pipeline 3 are respectively arranged on the left side and the right side of the vacuum chamber 1; an accelerator 4 is arranged at one end of the first pipeline 2 far away from the vacuum chamber 1, and a quick valve 5 is arranged on the first pipeline 2 close to the accelerator 4; an explosion-proof film 6 is arranged at one end of the second pipeline 3 far away from the vacuum chamber 1 and is used for preventing the pipelines, the branch pipes and the like from bursting; a first centrifugal pump 7 and a second centrifugal pump 8 are arranged on the second pipeline 3 at intervals from left to right, and a first branch pipe 9 and a second branch pipe 10 are respectively arranged on the left side and the right side of the first centrifugal pump 7 on the second pipeline 3; a third branch pipe 11 is arranged on the second pipeline 3 on the right side of the second centrifugal pump 8, one ends of the third branch pipe 11, the first branch pipe 9 and the second branch pipe 10, which are far away from the second pipeline 3, are communicated with the vacuum chamber 1, a first vacuum valve 15, a second vacuum valve 16 and a third vacuum valve 17 are respectively arranged on the first branch pipe 9, the second branch pipe 10 and the third branch pipe 11, a fourth vacuum valve 18 is arranged on the second pipeline 3 between the first branch pipe 9 and the vacuum chamber 1, and a fifth vacuum valve 19 is arranged on the second pipeline 3 between the second branch pipe 10 and the second centrifugal pump 8;
further comprising a controller electrically connected to the fast valve 5, the ion detector 13, the first vacuum valve 15, the second vacuum valve 16, the third vacuum valve 17, the fourth vacuum valve 18 and the fifth vacuum valve 19.
Further, a vacuum gauge 12 is installed on the vacuum chamber 1.
Further, the first centrifugal pump 7 and the second centrifugal pump 8 are provided with ion detectors 13 for detecting ion flows.
Further, the first branch pipe 9, the second branch pipe 10 and the third branch pipe 11 are all connected with the second pipeline 3 through flanges 14.
Working principle: when the air pump is used, the quick valve 5, the first vacuum valve 15, the second vacuum valve 16, the third vacuum valve 17, the fourth vacuum valve 18 and the fifth vacuum valve 19 are in an open state, and air in the accelerator 4 and the vacuum chamber 1 is pumped out through the first centrifugal pump 7 and the second centrifugal pump 8, and when the air is pumped out, the first branch pipe 9, the second branch pipe 10 and the third branch pipe 11 are operated simultaneously, so that the air pumping efficiency can be accelerated; the ion detector 13 is used for detecting ion flows in the first centrifugal pump 7 and the second centrifugal pump 8, and controlling the on-off of the fast valve 5 by utilizing the existence of the ion flows, wherein the first centrifugal pump 7 and the first centrifugal pump 8 emit ion flows, and when vacuum leaks, the first centrifugal pump 7 and the first centrifugal pump 8 do not emit ion flows, the fast valve 5 is controlled to be closed, so that the continuous reduction of the vacuum degree in the accelerator 4 is avoided, and the operation of a light beam line is not easily affected;
when the vacuumizing pipeline is subjected to fault elimination, firstly, a fourth vacuum valve 18 and a fifth vacuum valve 19 are opened, a first vacuum valve 15, a second vacuum valve 16 and a third vacuum valve 17 are closed, air in the vacuum chamber 1 is independently vacuumized through a first centrifugal pump 7 and a second centrifugal pump 8, the vacuum degree in the vacuum chamber 1 is judged through a vacuum meter 12, whether ion flows exist in the first centrifugal pump 7 and the second centrifugal pump 8 or not is judged through an ion detector 13, and if the ion flows exist, the second pipeline 3 is normal, and no leakage condition exists; if no ion flow exists, the fifth vacuum valve 19 is closed again, the vacuum chamber 1 is vacuumized through the first centrifugal pump 7, whether leakage exists or not is judged through the vacuum gauge 12 and the ion detector 13, if no leakage exists, the leakage position is indicated to be on the right side of the first centrifugal pump 7, and if the leakage exists, the whole second pipeline 3 needs to be overhauled;
when the second pipeline 3 has no fault, the fourth vacuum valve 18, the fifth vacuum valve 19, the second vacuum valve 16 and the third vacuum valve 17 are closed, the first vacuum valve 15 is opened, the vacuum chamber 1 is vacuumized through the first centrifugal pump 7, whether the leakage condition exists or not is judged through the vacuum gauge 12 and the ion detector 13, if the leakage condition does not exist, the first branch pipe 9 is normal, and if the leakage condition exists, the first branch pipe 9 has fault and needs to be overhauled; then, the fourth vacuum valve 18, the fifth vacuum valve 19, the first vacuum valve 15 and the third vacuum valve 17 are closed, the vacuum chamber 1 is vacuumized through the first centrifugal pump 7, whether leakage exists or not is judged through the vacuum gauge 12 and the ion detector 13, if not, the second branch pipe 10 is normal, and if so, the second branch pipe 10 is faulty and needs to be overhauled; then, the fourth vacuum valve 18, the fifth vacuum valve 19, the first vacuum valve 15 and the second vacuum valve 16 are closed, the third vacuum valve 17 is opened, the vacuum chamber 1 is vacuumized through the second centrifugal pump 8, whether leakage exists or not is judged through the vacuum gauge 12 and the ion detector 13, if not, the third branch pipe 11 is normal, and if so, the third branch pipe 11 is faulty and maintenance is needed;
therefore, the fault maintenance range can be reduced, and the fault maintenance efficiency can be improved.
Notably, are: the whole device controls the realization of the device through the total control button, and because the equipment matched with the control button is common equipment, the device belongs to the prior art, and the electrical connection relation and the specific circuit structure of the device are not repeated here.
Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made therein without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims (4)

1. The accelerator beam line quick valve control system is characterized by comprising a vacuum chamber (1), wherein a first pipeline (2) and a second pipeline (3) are respectively arranged on the left side and the right side of the vacuum chamber (1); an accelerator (4) is arranged at one end, far away from the vacuum chamber (1), of the first pipeline (2), and a quick valve (5) is arranged on the first pipeline (2) close to the accelerator (4); an explosion-proof membrane (6) is arranged at one end, far away from the vacuum chamber (1), of the second pipeline (3), a first centrifugal pump (7) and a second centrifugal pump (8) are arranged on the second pipeline (3) at intervals from left to right, and a first branch pipe (9) and a second branch pipe (10) are respectively arranged on the left side and the right side of the first centrifugal pump (7) on the second pipeline (3); a third branch pipe (11) is arranged on the second pipeline (3) on the right side of the second centrifugal pump (8), one ends, far away from the second pipeline (3), of the third branch pipe (11), the first branch pipe (9) and the second branch pipe (10) are communicated with the vacuum chamber (1), a first vacuum valve (15), a second vacuum valve (16) and a third vacuum valve (17) are respectively arranged on the first branch pipe (9), the second branch pipe (10) and the third branch pipe (11), a fourth vacuum valve (18) is arranged between the first branch pipe (9) and the vacuum chamber (1) on the second pipeline (3), and a fifth vacuum valve (19) is arranged between the second branch pipe (10) and the second centrifugal pump (8) on the second pipeline (3);
the ion detector also comprises a controller electrically connected with the fast valve (5), the ion detector (13), the first vacuum valve (15), the second vacuum valve (16), the third vacuum valve (17), the fourth vacuum valve (18) and the fifth vacuum valve (19);
the execution method of the control system is as follows: firstly, a fourth vacuum valve (18) and a fifth vacuum valve (19) are opened, a first vacuum valve (15), a second vacuum valve (16) and a third vacuum valve (17) are closed, air in a vacuum chamber (1) is independently pumped out through a first centrifugal pump (7) and a second centrifugal pump (8), the vacuum degree in the vacuum chamber (1) is judged through a vacuum meter (12), whether ion flows exist in the first centrifugal pump (7) and the second centrifugal pump (8) or not is judged through an ion detector (13), and if the ion flows exist, the second pipeline (3) is normal, and no leakage condition exists; if no ion flow exists, the fifth vacuum valve (19) is closed, the vacuum chamber (1) is vacuumized through the first centrifugal pump (7), whether leakage exists or not is judged through the vacuum gauge (12) and the ion detector (13), if no leakage exists, the leakage position is indicated to be on the right side of the first centrifugal pump (7), and if the leakage exists, the whole second pipeline (3) needs to be overhauled;
when the second pipeline (3) has no fault, the fourth vacuum valve (18), the fifth vacuum valve (19), the second vacuum valve (16) and the third vacuum valve (17) are closed, the first vacuum valve (15) is opened, the vacuum chamber (1) is vacuumized through the first centrifugal pump (7), whether the leakage condition exists or not is judged through the vacuum gauge (12) and the ion detector (13), if the leakage condition does not exist, the first branch pipe (9) is normal, and if the leakage condition exists, the first branch pipe (9) has fault and needs to be overhauled; then, the fourth vacuum valve (18), the fifth vacuum valve (19), the first vacuum valve (15) and the third vacuum valve (17) are closed, the vacuum chamber (1) is vacuumized through the first centrifugal pump (7), whether leakage exists or not is judged through the vacuum gauge (12) and the ion detector (13), if not, the second branch pipe (10) is normal, and if so, the second branch pipe (10) has a fault and needs to be overhauled; then, the fourth vacuum valve (18), the fifth vacuum valve (19), the first vacuum valve (15) and the second vacuum valve (16) are closed, the third vacuum valve (17) is opened, the vacuum chamber (1) is vacuumized through the second centrifugal pump (8), whether the leakage condition exists or not is judged through the vacuum gauge (12) and the ion detector (13), if the leakage condition does not exist, the third branch pipe (11) is normal, and if the leakage condition exists, the third branch pipe (11) fails, and maintenance is needed.
2. An accelerator beam-line fast valve control system according to claim 1, wherein: a vacuum gauge (12) is arranged on the vacuum chamber (1).
3. An accelerator beam-line fast valve control system according to claim 1, wherein: the first centrifugal pump (7) and the second centrifugal pump (8) are provided with ion detectors (13) for detecting ion flows.
4. An accelerator beam-line fast valve control system according to claim 1, wherein: the first branch pipe (9), the second branch pipe (10) and the third branch pipe (11) are all connected with the second pipeline (3) through flanges (14).
CN202210007797.2A 2022-01-06 2022-01-06 Fast valve control system of accelerator beam line Active CN114321720B (en)

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CN114321720B true CN114321720B (en) 2023-12-19

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JP2003343436A (en) * 2002-05-24 2003-12-03 Jeol Ltd Super-high evacuation device, evacuation method, and sputter ion pump
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