CN111076087A - Vacuum chamber gas introduction system - Google Patents
Vacuum chamber gas introduction system Download PDFInfo
- Publication number
- CN111076087A CN111076087A CN201910072353.5A CN201910072353A CN111076087A CN 111076087 A CN111076087 A CN 111076087A CN 201910072353 A CN201910072353 A CN 201910072353A CN 111076087 A CN111076087 A CN 111076087A
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- Prior art keywords
- vacuum chamber
- adapter
- side wall
- sealing
- port
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17D—PIPE-LINE SYSTEMS; PIPE-LINES
- F17D1/00—Pipe-line systems
- F17D1/02—Pipe-line systems for gases or vapours
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17D—PIPE-LINE SYSTEMS; PIPE-LINES
- F17D5/00—Protection or supervision of installations
- F17D5/02—Preventing, monitoring, or locating loss
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Drying Of Semiconductors (AREA)
- Quick-Acting Or Multi-Walled Pipe Joints (AREA)
- Gasket Seals (AREA)
Abstract
The invention relates to the technical field of vacuum chamber gas introduction, and discloses a vacuum chamber gas introduction system which comprises a vacuum chamber side wall, a sealing cover and a switching mechanism, wherein the switching mechanism comprises a switching body, a diversion channel is arranged in the switching body, a first port of the diversion channel is in sealing connection with the vacuum chamber side wall, a second port of the diversion channel is in sealing connection with the inner side wall of the sealing cover, the first port is in butt joint with an external introduction joint arranged on the outer side of the vacuum chamber side wall, the second port is in butt joint with an external leading-out joint arranged on the outer side of the sealing cover, the external leading-out joint is connected with one end of a switching pipeline, and the other end of the switching pipeline is communicated with a cavity. The maintenance process is simplified, the maintenance time is shortened, the maintenance workload is reduced, the maintenance efficiency is improved, the gas path leakage risk is reduced, and meanwhile, the parallel introduction of multiple paths of gas can be realized.
Description
Technical Field
The invention relates to the technical field of vacuum chamber gas introduction, in particular to a vacuum chamber gas introduction system.
Background
In many existing vacuum chamber systems, gas (process gas, shielding gas, or the like) is required to be introduced from an upper cover of the vacuum chamber, and most of the systems are directly connected with a gas pipeline from a special gas cabinet or a plant end to the upper cover of the vacuum chamber and then introduced from the upper cover into the vacuum chamber.
In daily equipment maintenance, the upper cover is often required to be opened, and a gas pipeline, a water path, a cable and the like are required to be disconnected before the cover is opened. The water route is quick connector, and the cable also is the plug, does not need special operation, and the gas line need leak hunting to whole pipeline after reconnecting, and work is loaded down with trivial details and waste time and energy.
Disclosure of Invention
Technical problem to be solved
The invention aims to provide a vacuum chamber gas introduction system to solve the problems that in the existing vacuum chamber maintenance, gas pipelines need to be subjected to leak detection, the work is complicated, and the efficiency is low.
(II) technical scheme
In order to solve the technical problem, the invention provides a vacuum chamber gas introduction system, which comprises a vacuum chamber side wall, a sealing cover and an adapter mechanism, wherein the vacuum chamber side wall is encircled to form a cavity, the sealing cover is matched with the vacuum chamber side wall in a covering manner, and the adapter mechanism is hermetically arranged on the inner side of the vacuum chamber side wall; the switching mechanism comprises a switching body, a diversion channel is arranged in the switching body, a first port of the diversion channel is in sealing connection with the side wall of the vacuum chamber, a second port of the diversion channel is in sealing connection with the inner side wall of the sealing cover, the first port is in butt joint with an external leading-in connector arranged on the outer side of the side wall of the vacuum chamber, the second port is in butt joint with an external leading-out connector arranged on the outer side of the sealing cover, the external leading-out connector is connected with one end of a switching pipeline, and the other end of the switching pipeline is communicated with the cavity.
The direction changing channel is a right-angle direction changing channel and comprises a first channel and a second channel which are vertically communicated, the first channel is perpendicular to the side wall of the vacuum chamber, and the second channel is perpendicular to the sealing cover.
The outer peripheral surface of the first port of the first channel is provided with an inner sealing ring and an outer sealing ring, and the inner sealing ring is arranged on the inner side of the outer sealing ring.
The vacuum chamber side wall is provided with a through hole, the central axis of the through hole is superposed with the central axis of the first channel, and the external leading-in connector is communicated with the first channel through the through hole.
Wherein, be equipped with the adapter in the second passageway, the adapter is equipped with annular boss, be close to in the second passageway second port department be equipped with the spacing platform of annular boss installation adaptation.
Wherein, annular boss with be equipped with first sealing washer and sealed the pad between the spacing platform, the up end of adapter is equipped with the second sealing washer, under the natural state the up end of adapter is higher than the up end of vacuum chamber lateral wall makes the second sealing washer with the closing cap dead weight pushes down sealed adaptation.
Wherein, gland is established to second port outside lid, gland is equipped with the perforation, the fenestrate diameter with the diameter of adapter is the same, the adapter can reciprocate in the perforation.
The sealing gland is fixed on the adapter body through a fixing screw.
Wherein the adapter body is installed inside the sidewall of the vacuum chamber by a mounting screw.
The inner side of the sealing cover is provided with an air distribution plate, and the switching pipeline is connected with the air distribution plate through an external introduction sealing joint.
(III) advantageous effects
According to the vacuum chamber gas introducing system provided by the invention, the gas is transferred to the upper side of the sealing cover from one side of the side wall of the vacuum chamber by arranging the transfer mechanism, the gas is input into the vacuum chamber by the transfer pipeline, the first port of the transfer mechanism is hermetically arranged with the side wall of the vacuum chamber, and the second port is pressed down by the self weight of the sealing cover to realize sealing, so that the sealing circulation of the gas is ensured, when the vacuum chamber is maintained, the sealing cover is opened, the gas pipeline does not need to be disconnected, the maintenance flow is simplified, the maintenance time is shortened, the maintenance workload is reduced, the maintenance efficiency is improved, the gas path leakage risk is reduced, and the parallel introduction of multiple paths of gas can.
Drawings
FIG. 1 is a schematic structural diagram of an embodiment of the present invention;
FIG. 2 is a cross-sectional view of an embodiment of the present invention;
FIG. 3 is an exploded view of an adapter mechanism according to an embodiment of the present invention;
fig. 4 is a cross-sectional view of an adapter mechanism according to an embodiment of the present invention.
In the figure, 1: a vacuum chamber sidewall; 2: sealing the cover; 3: an external service coupling; 4: a transfer mechanism; 5: an external lead-out connector; 6: switching pipelines; 7: an external lead-in sealing joint; 8: a first positioning pin; 9: a switching body; 10: a first seal ring; 11: a gasket; 12: an adapter; 13: a second seal ring; 14: a sealing gland; 15: a set screw; 16: mounting screws; 17: a second positioning pin; 18: an outer sealing ring; 19: an inner seal ring; 20: a gas distribution plate.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all, embodiments of the present invention. All other embodiments, which can be obtained by a person skilled in the art without any inventive step based on the embodiments of the present invention, are within the scope of the present invention.
In the description of the present invention, it should be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
In addition, in the description of the present invention, unless otherwise specified, "plurality", "plural groups" means two or more, and "several", "several groups" means one or more.
As shown in fig. 1 to 4, an embodiment of the present invention provides a vacuum chamber gas introducing system, which includes a vacuum chamber sidewall 1, a cover 2 and an adapting mechanism 4, wherein the vacuum chamber sidewall 1 encloses a cavity, the cover 2 is adapted to the vacuum chamber sidewall 1, and is positioned and installed by a first positioning pin 8, so as to ensure that a vacuum chamber with good sealing performance is assembled. The switching mechanism 4 is hermetically installed on the inner side of the side wall 1 of the vacuum chamber and is positioned and installed through a second positioning pin 17, so that the installation precision is ensured.
Further, the adapting mechanism 4 includes an adapting body 9, and a diversion channel is disposed inside the adapting body 9, in an example, the diversion channel is a right-angle diversion channel and includes a first channel and a second channel which are perpendicular and communicated, the first channel is perpendicular to the vacuum chamber sidewall 1, and the second channel is perpendicular to the sealing cover 2. The first port of the diversion channel is hermetically connected with the side wall 1 of the vacuum chamber, namely the air inlet of the first channel, the second port of the diversion channel is hermetically connected with the inner side wall of the sealing cover 2, namely the air outlet of the second channel.
The adapter body 9 is provided with a plurality of screw holes, in one example, the adapter body 9 is provided with 6 screw holes, mounting screws 16 are arranged in the screw holes, and the adapter body 9 is mounted on the inner side of the vacuum chamber side wall 1. An inner sealing ring 19 and an outer sealing ring 18 are arranged on the outer peripheral surface of the first port, and the inner sealing ring 19 is arranged on the inner side of the outer sealing ring 18 and used for ensuring the sealing performance between the adapter body 9 and the side wall 1 of the vacuum chamber.
Wherein, real empty room lateral wall 1 is equipped with the through-hole, and the axis of through-hole coincides with the axis of first passageway, and outside introduction joint 3 communicates with first passageway butt joint through the through-hole. The external lead-in connector 3 is fixedly installed on the outer side of the side wall 1 of the vacuum chamber through a bolt with a sealing elastic gasket, and the central axis of the external lead-in connector 3 is superposed with that of the through hole. The external air enters the switching mechanism 4 through the conduction of the external lead-in connector 3 and the first channel.
Further, a joint 12 is arranged in a second channel of the adapter body 9, the diameter of the joint 12 is the same as that of the second channel, and the joint 12 can move in the second channel along the axis direction of the second channel. An annular boss is arranged at the outer end part of the adapter 12, and a limiting table matched with the annular boss is arranged in the second channel close to the second port and used for limiting the moving distance of the adapter 12 in the second channel. Be equipped with first sealing washer 10 and sealed 11 between annular boss and the spacing platform, first sealing washer 10 locates sealed downside and the spacing contact of platform of filling up 11, and when adapter 12 received decurrent pressure, annular boss extrusion sealed 11 and first sealing washer 10 downwards, and first sealing washer 10 atress warp, realizes sealing connection between adapter 12 and the second passageway.
Wherein, the up end of adapter 12 is equipped with the recess, installs second sealing washer 13 in the recess, and under the natural state, the up end of adapter 12 is higher than the up end of vacuum chamber lateral wall 1, covers and establishes closing cap 2 back, because the dead weight of closing cap 2 pushes down and makes second sealing washer 13 take place to warp, and then realizes the sealing connection between adapter 12 and the closing cap 2. The second sealing ring 12 on the upper end surface of the adapter 12 is deformed by the downward pressure generated by the self weight of the sealing cover 2, so that the sealing between the sealing cover 2 and the adapter 12 is realized; the adapter 12 is pushed downwards by the downward pressure, the annular boss extrudes the first sealing ring 10 and the sealing gasket 11, the first sealing ring 10 deforms, and sealing between the adapter and the adapter body 9 is achieved. The whole sealing process does not need to additionally apply pressure, and the sealing between the sealing cover 2 and the adapter 12 and between the adapter 12 and the adapter body 9 can be realized only by the dead weight of the sealing cover 2.
Wherein, the outside of the second port is covered with a sealing gland 14, and the sealing gland 14 is fixed on the adapter body through a fixing screw 15 which is arranged on the periphery and is provided with a sealing elastic gasket. The sealing gland 14 is provided with a through hole, the diameter of the through hole is the same as that of the adapter 12, so that the adapter 12 can move up and down in the through hole after being pressed by the sealing cover 2. The diameter of the through hole is smaller than that of the annular boss, so that the adapter 12 is clamped and limited, and the adapter 12 is prevented from falling off in the second channel.
Furthermore, a through hole is formed in the sealing cover 2, the central axis of the through hole coincides with the central axis of the second channel, the central axis of the external leading-out connector 5 coincides with the central axis of the through hole, and the external leading-out connector 5 is in butt joint conduction with the second channel through the through hole, so that gas in the switching mechanism 4 is led out to the outer side of the vacuum chamber. The external lead-out connector 5 is fixed to the outside of the cover 2 by a bolt with a sealing elastic pad.
The external leading-out connector 5 is connected with one end of the switching pipeline 6, the other end of the switching pipeline 6 is communicated with the cavity, specifically, the switching pipeline 6 is arranged above the sealing cover 2, one end of the switching pipeline is communicated with the external leading-out connector 5, the other end of the switching pipeline is communicated with the gas distribution plate 20 arranged on the inner side wall of the sealing cover 2 through the external leading-in sealing connector 7, and therefore gas in the switching mechanism 4 is led into the cavity of the vacuum chamber. The external lead-in sealing joint 7 is in sealing connection with the cover 2.
In one example, the first seal ring 10, the second seal ring 13, the outer seal ring 18, and the inner seal ring 19 are all O-rings.
The process principle of the embodiment of the invention is as follows:
the switching mechanism 4 is arranged on the inner side of the side wall 1 of the vacuum chamber through a second positioning pin 17 and a mounting screw 16, an outer sealing ring 18 and an inner sealing ring 19 are arranged at a first port, so that the switching mechanism 4 is hermetically connected with the side wall 1 of the vacuum chamber, and the external lead-in connector 3 is in butt joint conduction with a diversion channel of the switching mechanism 4;
the second port of the switching mechanism 4 is provided with an adapter, the adapter 12 is provided with an annular boss, the adapter 12 is sleeved with a first sealing ring 10 and a sealing gasket 11 and clamped with a limit table at the second port, the upper end face of the adapter 12 is provided with a second sealing ring 13, the upper end face of the adapter 12 is higher than the upper end face of the side wall 1 of the vacuum chamber, when the sealing cover 2 is covered on the upper end face of the side wall 1 of the vacuum chamber through a first positioning pin 8, downward pressure is generated on the adapter by the dead weight of the sealing cover 2, the second sealing ring 13 deforms under stress to realize sealing between the adapter 12 and the inner side of the sealing cover 2, the adapter 12 moves downwards under stress, the annular boss presses the first sealing ring 10 and the sealing gasket 11, the first sealing ring 10 deforms to realize sealing between the adapter 12 and the switching mechanism;
an external leading-out joint 5 on the outer side of the sealing cover 2 is in butt joint conduction with a second port of the switching mechanism, the external leading-out joint 5 is connected with a switching pipeline 6, and the switching pipeline 6 is communicated with an air distribution plate 20 positioned in the vacuum chamber through an external leading-in sealing joint 7.
Gas flow direction:
the gas enters a diversion channel of the switching mechanism 4 from the external leading-in connector 3, enters a switching pipeline 5 through the external leading-out connector 5, enters a gas distribution plate 20 through the external leading-in sealing connector 7, and then is input into a vacuum chamber.
And (3) maintenance process:
the sealing cover 2 is opened, the vacuum chamber is maintained, and the connection of any gas pipeline is not required to be disconnected; accomplish the maintenance back, establish the up end at vacuum chamber lateral wall 1 with closing cap lid 2 through the accurate location of first locating pin 8, the leakproofness of the first port department of switching body 9 is not influenced, and closing cap 2 is pressed down by the dead weight, realizes closing cap 2 and adapter 12, adapter 12 and switching body 9 sealed, saves the leak hunting work to gas piping.
According to the vacuum chamber gas introducing system provided by the invention, the gas is transferred from one side of the side wall 1 of the vacuum chamber to the upper side of the sealing cover 2 by arranging the transferring mechanism 4, the gas is input into the vacuum chamber by the transferring pipeline 6, the first port of the transferring mechanism 4 is hermetically installed with the side wall 1 of the vacuum chamber, and the second port is pressed down by the self weight of the sealing cover 2 to realize sealing, so that the sealing circulation of the gas is ensured, when the vacuum chamber is maintained, the sealing cover 2 is opened, the gas pipeline does not need to be disconnected, the maintenance flow is simplified, the maintenance time is shortened, the maintenance workload is reduced, the maintenance efficiency is improved, the gas path leakage risk is reduced, and the parallel introduction of multiple paths of gas can be.
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the invention, and any modifications, equivalents, improvements and the like that fall within the spirit and principle of the present invention are intended to be included therein.
Claims (10)
1. A vacuum chamber gas introduction system is characterized by comprising a vacuum chamber side wall, a sealing cover and an adapter mechanism, wherein the vacuum chamber side wall is enclosed into a cavity, the sealing cover is matched with the vacuum chamber side wall in a covering manner, and the adapter mechanism is hermetically arranged on the inner side of the vacuum chamber side wall; the switching mechanism comprises a switching body, a diversion channel is arranged in the switching body, a first port of the diversion channel is in sealing connection with the side wall of the vacuum chamber, a second port of the diversion channel is in sealing connection with the inner side wall of the sealing cover, the first port is in butt joint with an external leading-in connector arranged on the outer side of the side wall of the vacuum chamber, the second port is in butt joint with an external leading-out connector arranged on the outer side of the sealing cover, the external leading-out connector is connected with one end of a switching pipeline, and the other end of the switching pipeline is communicated with the cavity.
2. The vacuum chamber gas introduction system of claim 1, wherein the diversion channel is a right angle diversion channel comprising a first channel and a second channel in vertical communication, the first channel being perpendicular to the vacuum chamber sidewall and the second channel being perpendicular to the cover.
3. The vacuum chamber gas introduction system according to claim 2, wherein an outer peripheral surface of the first port of the first passage is provided with an inner seal ring and an outer seal ring, the inner seal ring being disposed inside the outer seal ring.
4. The vacuum chamber gas introduction system according to claim 2, wherein the vacuum chamber sidewall is provided with a through hole having a central axis coinciding with a central axis of the first passage, and the external introduction joint is communicated with the first passage through the through hole.
5. The vacuum chamber gas introduction system of claim 2, wherein an adapter is disposed in the second channel, the adapter having an annular boss, and a stop block disposed in the second channel adjacent to the second port and adapted to fit the annular boss.
6. The vacuum chamber gas introduction system according to claim 5, wherein a first seal ring and a seal gasket are provided between the annular boss and the stopper, and a second seal ring is provided on the upper end surface of the adapter, and the upper end surface of the adapter is naturally higher than the upper end surface of the side wall of the vacuum chamber, so that the second seal ring is adapted to the cover by self-weight pressing seal.
7. The vacuum chamber gas introduction system of claim 6, wherein a gland is provided outside the second port, the gland having a bore with a diameter that is the same as the diameter of the adapter, the adapter being movable up and down within the bore.
8. The vacuum chamber gas introduction system of claim 7, wherein the gland is secured to the adapter body by a set screw.
9. The vacuum chamber gas introduction system of claim 1, wherein the adapter body is mounted inside the vacuum chamber sidewall by mounting screws.
10. The vacuum chamber gas introduction system according to claim 1, wherein a gas distribution plate is provided on an inner side of the cover, and the transfer line is connected to the gas distribution plate through an external introduction sealing system.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821702071 | 2018-10-19 | ||
| CN2018217020716 | 2018-10-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN111076087A true CN111076087A (en) | 2020-04-28 |
Family
ID=68567052
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910072353.5A Pending CN111076087A (en) | 2018-10-19 | 2019-01-25 | Vacuum chamber gas introduction system |
| CN201920129470.6U Active CN209672062U (en) | 2018-10-19 | 2019-01-25 | Vacuum chamber gas introducing system |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201920129470.6U Active CN209672062U (en) | 2018-10-19 | 2019-01-25 | Vacuum chamber gas introducing system |
Country Status (2)
| Country | Link |
|---|---|
| CN (2) | CN111076087A (en) |
| WO (1) | WO2020077754A1 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114472080A (en) * | 2022-03-28 | 2022-05-13 | 常州铭赛机器人科技股份有限公司 | Cooling system suitable for vacuum environment and use method thereof |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1112428A (en) * | 1964-05-08 | 1968-05-08 | Kpt Mfg Company | Elastic melt extruder having internal feed conveyor |
| US7445015B2 (en) * | 2004-09-30 | 2008-11-04 | Lam Research Corporation | Cluster tool process chamber having integrated high pressure and vacuum chambers |
| CN105695936B (en) * | 2014-11-26 | 2018-11-06 | 北京北方华创微电子装备有限公司 | Pre-cleaning cavity and plasma processing device |
| CN107086186B (en) * | 2016-02-15 | 2019-10-29 | 北京北方华创微电子装备有限公司 | A kind of reaction chamber and substrate processing apparatus |
| CN106483148B (en) * | 2016-10-11 | 2019-05-21 | 中国科学院上海应用物理研究所 | A kind of thermal station of ray microprobe, thermal station device and its experimental method |
-
2018
- 2018-11-30 WO PCT/CN2018/118512 patent/WO2020077754A1/en active Application Filing
-
2019
- 2019-01-25 CN CN201910072353.5A patent/CN111076087A/en active Pending
- 2019-01-25 CN CN201920129470.6U patent/CN209672062U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114472080A (en) * | 2022-03-28 | 2022-05-13 | 常州铭赛机器人科技股份有限公司 | Cooling system suitable for vacuum environment and use method thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| CN209672062U (en) | 2019-11-22 |
| WO2020077754A1 (en) | 2020-04-23 |
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Effective date of registration: 20210128 Address after: Unit 611, unit 3, 6 / F, building 1, yard 30, Yuzhi East Road, Changping District, Beijing 102208 Applicant after: Zishi Energy Co.,Ltd. Address before: Room a129-1, No. 10, Zhongxing Road, science and Technology Park, Changping District, Beijing Applicant before: DONGTAI HI-TECH EQUIPMENT TECHNOLOGY Co.,Ltd. |
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