CN209672062U - Vacuum chamber gas introducing system - Google Patents
Vacuum chamber gas introducing system Download PDFInfo
- Publication number
- CN209672062U CN209672062U CN201920129470.6U CN201920129470U CN209672062U CN 209672062 U CN209672062 U CN 209672062U CN 201920129470 U CN201920129470 U CN 201920129470U CN 209672062 U CN209672062 U CN 209672062U
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- China
- Prior art keywords
- vacuum chamber
- port
- capping
- side wall
- channel
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17D—PIPE-LINE SYSTEMS; PIPE-LINES
- F17D1/00—Pipe-line systems
- F17D1/02—Pipe-line systems for gases or vapours
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17D—PIPE-LINE SYSTEMS; PIPE-LINES
- F17D5/00—Protection or supervision of installations
- F17D5/02—Preventing, monitoring, or locating loss
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Drying Of Semiconductors (AREA)
- Gasket Seals (AREA)
- Quick-Acting Or Multi-Walled Pipe Joints (AREA)
Abstract
The utility model relates to vacuum chamber gases to introduce technical field, disclose a kind of vacuum chamber gas introducing system, including vacuum chamber side wall, capping and changeover mechanism, the changeover mechanism includes switching ontology, the switching body interior is equipped with deflecting channel, the first port in the deflecting channel and the vacuum chamber side wall are tightly connected, the second port in the deflecting channel and the inner sidewall of the capping are tightly connected, the first port is docked with the external connector that introduces that the vacuum chamber side-wall outer side is arranged in, the second port is docked with the external connector of drawing that the closure skirt is arranged in, the external connector of drawing is connect with the one end for pipeline of transferring, the other end of the switching pipeline is connected to the cavity.Maintenance process is simplified, maintenance time is shortened, reduces maintenance workload, maintenance efficiency is improved, reduces gas circuit disclosure risk, while the parallel introducing of multipath gas may be implemented.
Description
Technical field
The utility model relates to vacuum chamber gases to introduce technical field, introduce system more particularly to a kind of vacuum chamber gas
System.
Background technique
In existing vacuum chamber system, many system requirements introduce gas (process gas or protection gas from vacuum chamber upper cover
Body etc.), be all mostly directly from special gas storage tank or factory service end be directly connected to gas piping to vacuum chamber upper cover, then from upper cover
It is introduced into internal vacuum chamber.
In daily plant maintenance, it is often necessary to open upper cover, just need to disconnect gas piping, water route and electricity before uncapping
Cable etc..Water route is quick connector, and cable is also plug, does not need special operation, and gas piping needs pair after being again coupled to
Entire pipeline leak detection, intricate operation and time-consuming and laborious.
Utility model content
(1) technical problems to be solved
The purpose of the utility model is to provide a kind of vacuum chamber gas introducing systems, to solve in existing vacuum chamber maintenance,
It needs to hunt leak to gas piping, the problem of intricate operation, low efficiency.
(2) technical solution
In order to solve the above-mentioned technical problem, the utility model provides a kind of vacuum chamber gas introducing system, including vacuum chamber
Side wall, capping and changeover mechanism, the vacuum chamber side wall surround cavity, and the capping is set with the vacuum chamber side wall lid to be adapted to,
The changeover mechanism is sealingly mounted at the vacuum chamber inside sidewalls；The changeover mechanism includes switching ontology, and the switching is originally
Internal portion is equipped with deflecting channel, and the first port in the deflecting channel and the vacuum chamber side wall are tightly connected, and the deflecting is logical
The second port in road and the inner sidewall of the capping are tightly connected, and the first port and setting are in the vacuum chamber side-wall outer side
It is external introduce connector docking, the second port is docked with the external connector of drawing that the closure skirt is arranged in, it is described outside
Portion draws connector and connect with the one end for pipeline of transferring, and the other end of the switching pipeline is connected to the cavity.
Wherein, the deflecting channel is right angle deflecting channel, and first passage and second channel including vertical connection are described
First passage is vertical with the vacuum chamber side wall, and the second channel is vertical with the capping.
Wherein, the outer peripheral surface of the first port of the first passage is equipped with inner seal ring and exterior seal ring, the interior sealing
The inside of the exterior seal ring is arranged in circle.
Wherein, the vacuum chamber side wall is equipped with through-hole, the central axes weight of the central axes of the through-hole and the first passage
It closes, the external connector that introduces is connected by the through-hole with the first passage.
Wherein, adapter is equipped in the second channel, the adapter is equipped with annular convex platform, leans in the second channel
It is equipped at the nearly second port and the limiting stand being adapted to is installed with the annular convex platform.
Wherein, the first sealing ring and gasket are equipped between the annular convex platform and the limiting stand, the adapter
Upper surface is equipped with the second sealing ring, and the upper surface of the adapter is higher than the upper surface of the vacuum chamber side wall under natural conditions,
Means of press seals is adapted under so that second sealing ring is self-possessed with the capping.
Wherein, the second port outboard cover sets sealing gland, and the sealing gland is equipped with perforation, the diameter of the perforation
Identical as the diameter of the adapter, the adapter can move up and down in the perforation.
Wherein, the sealing gland is fixed on the switching ontology by fixing screws.
Wherein, the switching ontology is mounted on the vacuum chamber inside sidewalls by mounting screw.
Wherein, the inside of the capping is equipped with air distribution plate, the switching pipeline by external introducing seal nipple with it is described
Air distribution plate connection.
(3) beneficial effect
A kind of vacuum chamber gas introducing system provided by the utility model, by the way that changeover mechanism is arranged, by gas by vacuum
Room side wall side be forwarded to capping upside, gas is input in vacuum chamber by switching pipeline, the first port of changeover mechanism with
The sealing installation of vacuum chamber side wall, second port push realization sealing by the self weight covered, guarantee that the sealing circulation of gas, maintenance are true
When empty room, capping is opened, without disconnecting gas piping, maintenance process is simplified, shortens maintenance time, reduce maintenance work
Amount improves maintenance efficiency, reduces gas circuit disclosure risk, while the parallel introducing of multipath gas may be implemented.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the utility model embodiment；
Fig. 2 is the cross-sectional view of the utility model embodiment；
Fig. 3 is the explosive view of the changeover mechanism of the utility model embodiment；
Fig. 4 is the cross-sectional view of the changeover mechanism of the utility model embodiment.
In figure, 1: vacuum chamber side wall；2: capping；3: outside introduces connector；4: changeover mechanism；5: drawing connector in outside；6:
Switching pipeline；7: outside introduces seal nipple；8: the first positioning pins；9: switching ontology；10: the first sealing rings；11: gasket；
12: adapter；13: the second sealing rings；14: sealing gland；15: fixing screws；16: mounting screw；17: the second positioning pins；18:
Exterior seal ring；19: inner seal ring；20: air distribution plate.
Specific embodiment
It is practical new below in conjunction with this to keep the objectives, technical solutions, and advantages of the embodiments of the present invention clearer
Attached drawing in type embodiment, the technical scheme in the utility model embodiment is clearly and completely described, it is clear that is retouched
The embodiment stated is a part of the embodiment of the utility model, instead of all the embodiments.Based on the reality in the utility model
Apply example, those of ordinary skill in the art's every other embodiment obtained without making creative work, all
Belong to the range of the utility model protection.
In the description of the present invention, it should be noted that unless otherwise clearly defined and limited, term " is pacified
Dress ", " connected ", " connection " shall be understood in a broad sense, for example, it may be being fixedly connected, may be a detachable connection, or integrally
Connection；It can be mechanical connection, be also possible to be electrically connected；Can be directly connected, can also indirectly connected through an intermediary,
It can be the connection inside two elements.For the ordinary skill in the art, above-mentioned art can be understood with concrete condition
The concrete meaning of language in the present invention.
In addition, in the description of the present invention, unless otherwise indicated, " multiple ", " more ", " multiple groups " are meant that two
A or more than two, " several ", " several ", " several groups " are meant that one or more.
As shown in Figures 1 to 4, the utility model embodiment provides a kind of vacuum chamber gas introducing system, including vacuum chamber
Side wall 1, capping 2 and changeover mechanism 4, vacuum chamber side wall 1 surround cavity, and capping 2 sets with the lid of vacuum chamber side wall 1 and is adapted to, and passes through
First positioning pin, 8 location and installation, guarantee are assembled into the good vacuum chamber of airtightness.Changeover mechanism 4 is sealingly mounted at vacuum chamber side
1 inside of wall, and by 17 location and installation of the second positioning pin, guarantee installation accuracy.
Further, changeover mechanism 4 includes switching ontology 9, deflecting channel is equipped with inside ontology 9 of transferring, in an example
In, deflecting channel is right angle deflecting channel, including vertical and connection first passage and second channel, first passage and vacuum chamber
Side wall 1 is vertical, and second channel is vertical with capping 2.The first port and vacuum chamber side wall 1 in deflecting channel are tightly connected, first end
Mouth is the air inlet of first passage, and the second port in deflecting channel and the inner sidewall of capping 2 are tightly connected, second port i.e. second
The gas outlet in channel.
Wherein, switching ontology 9 is equipped with multiple screw holes, and in one example, switching ontology 9 is equipped with 6 screw holes, screw
It is equipped with mounting screw 16 in hole, switching ontology 9 is mounted on 1 inside of vacuum chamber side wall.The outer peripheral surface of first port is equipped with interior
The inside of the exterior seal ring 18 is arranged in sealing ring 19 and exterior seal ring 18, inner seal ring 19, to guarantee transfer ontology 9 with
Leakproofness between vacuum chamber side wall 1.
Wherein, vacuum chamber side wall 1 is equipped with through-hole, and the central axes of through-hole are overlapped with the central axes of first passage, and outside introduces
Connector 3 docks conducting with first passage by through-hole.Outside introduces connector 3 and is fixedly mounted on by the bolt of included sealing spring washer
The outside of vacuum chamber side wall 1, the central axes that outside introduces connector 3 are overlapped with the central axes of through-hole.By outside introduce connector 3 with
The conducting of first passage realizes that extraneous gas enters in changeover mechanism 4.
Further, transfer ontology 9 second channel in be equipped with adapter 12, the diameter of adapter 12 and second channel
Diameter is identical, adapter 12 can the axis direction in second channel along second channel move.The outer end of adapter 12 is equipped with
Annular convex platform is equipped in second channel at second port and installs limiting stand be adapted to annular convex platform, transfers to limit
First 12 moving distance in second channel.The first sealing ring 10 and gasket 11 are equipped between annular convex platform and limiting stand, the
The downside that one sealing ring 10 is set to gasket 11 is contacted with limiting stand, when adapter 12 is by downward pressure, annular convex platform
Be pressed down against gasket 11 and the first sealing ring 10,10 stress deformation of the first sealing ring, realize adapter 12 and second channel it
Between be tightly connected.
Wherein, the upper surface of adapter 12 is equipped with groove, is equipped with the second sealing ring 13 in groove, under natural conditions, turns
The upper surface of connector 12 is higher than the upper surface of vacuum chamber side wall 1, after lid sets capping 2, due to the self weight pushing of capping 2 make it is second close
Seal 13 deforms, and then realizes the sealed connection between adapter 12 and capping 2.Under being generated by the self weight of capping 2
Pressure makes the deformation of the second sealing ring 12 of 12 upper surface of adapter, realizes the sealing between capping 2 and adapter 12；Adapter
12 are moved down by lower pressure, and annular convex platform squeezes the first sealing ring 10 and gasket 11, and the deformation of the first sealing ring 10 is realized
Sealing between adapter and switching ontology 9.Entire seal process applies pressure without additional, it is only necessary to cover 2 self weight
Realize the sealing between capping 2 and adapter 12, adapter 12 and switching ontology 9.
Wherein, second port outboard cover sets sealing gland 14, the included sealing spring washer that sealing gland 14 is arranged by border
Fixing screws 15 be fixed on switching ontology on.Sealing gland 14 is equipped with perforation, the diameter of perforation and the diameter of adapter 12
It is identical, it can be moved up and down in perforation after making pushing of the adapter 12 by capping 2.The diameter of perforation is less than the straight of annular convex platform
Diameter plays the role of card limit to adapter 12, prevents adapter 12 from falling off in second channel.
Further, capping 2 is equipped with through-hole, and the central axes of through-hole are overlapped with the central axes of second channel, and outside is drawn
The central axes of connector 5 are overlapped with the central axes of through-hole, and outside extraction connector 5 docks conducting with second channel by through-hole, are realized
Gas in changeover mechanism 4 is led on the outside of vacuum chamber.It draws connector 5 and is fixed on by the bolt of included sealing spring washer in outside
2 outside of capping.
Wherein, external connector 5 of drawing is connect with the one end for pipeline 6 of transferring, and the other end of switching pipeline 6 is connected to cavity,
Specifically, switching pipeline 6 is set to the top of capping 2, one end is drawn connector 5 with outside and is connected to, and the other end is introduced by external
Seal nipple 7 is connected to the air distribution plate 20 being arranged on 2 inner sidewalls of capping, realizes the gas in changeover mechanism 4 introducing vacuum
In the cavity of room.Outside introduces between seal nipple 7 and capping 2 and is tightly connected.
In one example, the first sealing ring 10, the second sealing ring 13, exterior seal ring 18 and inner seal ring 19 are O-shaped
Circle.
The technological principle of the utility model embodiment is as follows:
Changeover mechanism 4 is mounted on the inside of vacuum chamber side wall 1 by the second positioning pin 17 and mounting screw 16, at first port
Exterior seal ring 18 and inner seal ring 19 are set, realize the sealed connection between changeover mechanism 4 and vacuum chamber side wall 1, outside introduces
Connector 3 docks conducting with the deflecting channel of changeover mechanism 4；
Adapter is set at the second port of changeover mechanism 4, and annular convex platform is arranged in adapter 12, and adapter 12 is arranged first
Sealing ring 10 and gasket 11 are limited with the limit decometer at second port, and the upper surface of adapter 12 is equipped with the second sealing ring 13,
And the upper surface of adapter 12 is higher than the upper surface of vacuum chamber side wall 1, when capping 2 is located at vacuum by the first positioning pin 8 lid
When the upper surface of room side wall 1, the self weight by capping 2 generates lower pressure to adapter 12, and 13 stress deformation of the second sealing ring is realized
Sealing between 2 inside of adapter 12 and capping, 12 stress of adapter move down, and annular convex platform pushes 10 He of the first sealing ring
Gasket 11, the first sealing ring 10 deformation, realizes the sealing between adapter 12 and changeover mechanism 4；
The external connector 5 of drawing in 2 outside of capping dock conducting with the second port of changeover mechanism, external extraction connector 5 and
Pipeline 6 of transferring connects, and switching pipeline 6 introduces seal nipple 7 by outside and is connected to the indoor air distribution plate 20 of vacuum is located at.
Gas flow:
Entered in the deflecting channel of changeover mechanism 4 by the external connector 3 that introduces, draws connector 5 through outside and enter switching pipeline
6, seal nipple 7 is introduced through outside and enters air distribution plate 20, and then is inputted in vacuum chamber.
Maintenance process:
Capping 2 is opened, vacuum chamber is safeguarded, without disconnecting the connection of any gas piping；After completing maintenance, pass through first
The upper surface for being located at vacuum chamber side wall 1 is covered in capping 2 by the precise positioning of positioning pin 8, the sealing at the first port of ontology 9 of transferring
Property it is unaffected, capping 2 by self weight push, realize capping 2 with adapter 12, adapter 12 with transfer ontology 9 sealing, save
Leak detection work to gas piping.
A kind of vacuum chamber gas introducing system provided by the utility model, by the way that changeover mechanism 4 is arranged, by gas by vacuum
Side wall 1 side in room is forwarded to 2 upside of capping, gas is input in vacuum chamber by switching pipeline 6, the first end of changeover mechanism 4
Mouth is installed with the sealing of vacuum chamber side wall 1, and second port realizes sealing by the self weight pushing of capping 2, guarantees the sealing circulation of gas,
When safeguarding vacuum chamber, capping 2 is opened, without disconnecting gas piping, maintenance process is simplified, shortens maintenance time, reduce
Maintenance workload improves maintenance efficiency, reduces gas circuit disclosure risk, while the parallel introducing of multipath gas may be implemented.
The above is only the preferred embodiment of the utility model only, is not intended to limit the utility model, all at this
Within the spirit and principle of utility model, any modification, equivalent replacement, improvement and so on should be included in the utility model
Protection scope within.
Claims (10)
1. a kind of vacuum chamber gas introducing system, which is characterized in that described true including vacuum chamber side wall, capping and changeover mechanism
Empty room side wall surrounds cavity, and the capping is set with the vacuum chamber side wall lid to be adapted to, and the changeover mechanism is sealingly mounted at described
Vacuum chamber inside sidewalls；The changeover mechanism includes switching ontology, and the switching body interior is equipped with deflecting channel, the deflecting
The first port in channel and the vacuum chamber side wall are tightly connected, the second port in the deflecting channel and the inside of the capping
Wall is tightly connected, and the first port is docked with the external connector that introduces that the vacuum chamber side-wall outer side is arranged in, and described second
Port is docked with the external connector of drawing that the closure skirt is arranged in, and described external one end for drawing connector and pipeline of transferring connects
It connects, the other end of the switching pipeline is connected to the cavity.
2. vacuum chamber gas introducing system as described in claim 1, which is characterized in that the deflecting channel is logical for right angle deflecting
Road, first passage and second channel including vertical connection, the first passage is vertical with the vacuum chamber side wall, and described second
Channel is vertical with the capping.
3. vacuum chamber gas introducing system as claimed in claim 2, which is characterized in that the first port of the first passage
Outer peripheral surface is equipped with inner seal ring and exterior seal ring, and the inside of the exterior seal ring is arranged in the inner seal ring.
4. vacuum chamber gas introducing system as claimed in claim 2, which is characterized in that the vacuum chamber side wall is equipped with through-hole,
The central axes of the through-hole are overlapped with the central axes of the first passage, it is described it is external introduce connector by the through-hole with it is described
First passage conducting.
5. vacuum chamber gas introducing system as claimed in claim 2, which is characterized in that be equipped with switching in the second channel
Head, the adapter are equipped with annular convex platform, are equipped with and the annular convex platform at the second port in the second channel
The limiting stand of adaptation is installed.
6. vacuum chamber gas introducing system as claimed in claim 5, which is characterized in that the annular convex platform and the limiting stand
Between be equipped with the first sealing ring and gasket, the upper surface of the adapter is equipped with the second sealing ring, described under natural conditions to turn
The upper surface of connector is higher than the upper surface of the vacuum chamber side wall, means of press seals under making second sealing ring and the capping be self-possessed
Adaptation.
7. vacuum chamber gas introducing system as claimed in claim 6, which is characterized in that the second port outboard cover sets sealing
Gland, the sealing gland are equipped with perforation, and the diameter of the perforation is identical as the diameter of the adapter, and the adapter can be
It is moved up and down in the perforation.
8. vacuum chamber gas introducing system as claimed in claim 7, which is characterized in that the sealing gland passes through fixing screws
It is fixed on the switching ontology.
9. vacuum chamber gas introducing system as described in claim 1, which is characterized in that the switching ontology passes through mounting screw
It is mounted on the vacuum chamber inside sidewalls.
10. vacuum chamber gas introducing system as described in claim 1, which is characterized in that the inside of the capping is equipped with gas distribution
Plate, the switching pipeline are connect by the external sealing system that introduces with the air distribution plate.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821702071 | 2018-10-19 | ||
| CN2018217020716 | 2018-10-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209672062U true CN209672062U (en) | 2019-11-22 |
Family
ID=68567052
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201920129470.6U Active CN209672062U (en) | 2018-10-19 | 2019-01-25 | Vacuum chamber gas introducing system |
| CN201910072353.5A Pending CN111076087A (en) | 2018-10-19 | 2019-01-25 | Vacuum chamber gas introduction system |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910072353.5A Pending CN111076087A (en) | 2018-10-19 | 2019-01-25 | Vacuum chamber gas introduction system |
Country Status (2)
| Country | Link |
|---|---|
| CN (2) | CN209672062U (en) |
| WO (1) | WO2020077754A1 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114472080B (en) * | 2022-03-28 | 2022-06-24 | 常州铭赛机器人科技股份有限公司 | Cooling system suitable for vacuum environment and use method thereof |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1112428A (en) * | 1964-05-08 | 1968-05-08 | Kpt Mfg Company | Elastic melt extruder having internal feed conveyor |
| US7445015B2 (en) * | 2004-09-30 | 2008-11-04 | Lam Research Corporation | Cluster tool process chamber having integrated high pressure and vacuum chambers |
| CN105695936B (en) * | 2014-11-26 | 2018-11-06 | 北京北方华创微电子装备有限公司 | Pre-cleaning cavity and plasma processing device |
| CN107086186B (en) * | 2016-02-15 | 2019-10-29 | 北京北方华创微电子装备有限公司 | A kind of reaction chamber and substrate processing apparatus |
| CN106483148B (en) * | 2016-10-11 | 2019-05-21 | 中国科学院上海应用物理研究所 | A kind of thermal station of ray microprobe, thermal station device and its experimental method |
-
2018
- 2018-11-30 WO PCT/CN2018/118512 patent/WO2020077754A1/en active Application Filing
-
2019
- 2019-01-25 CN CN201920129470.6U patent/CN209672062U/en active Active
- 2019-01-25 CN CN201910072353.5A patent/CN111076087A/en active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| WO2020077754A1 (en) | 2020-04-23 |
| CN111076087A (en) | 2020-04-28 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20210126 Address after: Unit 611, unit 3, 6 / F, building 1, yard 30, Yuzhi East Road, Changping District, Beijing 102208 Patentee after: Zishi Energy Co.,Ltd. Address before: Room a129-1, No. 10, Zhongxing Road, science and Technology Park, Changping District, Beijing Patentee before: DONGTAI HI-TECH EQUIPMENT TECHNOLOGY Co.,Ltd. |