CN114313654A - Liquid medicine supply device for chip packaging process and use method - Google Patents
Liquid medicine supply device for chip packaging process and use method Download PDFInfo
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- CN114313654A CN114313654A CN202111681743.6A CN202111681743A CN114313654A CN 114313654 A CN114313654 A CN 114313654A CN 202111681743 A CN202111681743 A CN 202111681743A CN 114313654 A CN114313654 A CN 114313654A
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Abstract
The invention discloses a liquid medicine supply device for a chip packaging process and a use method thereof, wherein the liquid medicine supply device for the chip packaging process comprises a frame body, a cache tank, a supply tank, a transfusion pipe fitting and an exhaust pipe fitting; the frame body is provided with an upper supporting piece and a lower supporting piece which are arranged up and down; the buffer box is arranged on the lower support piece and is provided with a buffer liquid outlet with a downward opening; the supply tank is arranged on the upper support piece and is provided with a liquid outlet with a downward opening; infusion pipe fitting intercommunication buffer tank and supply case, infusion pipe fitting include that demountable installation fixes the closing cap on the liquid outlet, set up on the closing cap and with the drain pipe of supply case intercommunication, with the connecting pipe of buffer tank intercommunication and the valve body of setting between connecting pipe and drain pipe, the valve body can be dismantled with the connecting pipe and be connected fixedly. The invention reduces the bubbles contained in the liquid medicine entering the cache box after the liquid medicine is transferred, and meanwhile, the liquid outlet of the cache box is arranged at the bottom of the cache box, so that the residue of the liquid medicine in the cache box can be reduced.
Description
Technical Field
The invention relates to the technical field of chip packaging, in particular to a liquid medicine supply device for a chip packaging process and a use method.
Background
In the chip packaging process, various liquid medicines are required, such as etching liquid required during wet etching, cleaning liquid required during wet cleaning, crystal face protection liquid used on a laser grooving machine and the like.
The existing supply device generally comprises a buffer storage barrel, wherein a liquid inlet and a liquid outlet are arranged on the buffer storage barrel, a pipeline is inserted from the position of the liquid outlet, and the liquid medicine is conveyed to a machine table under the action of a pump body. The liquid medicine is easy to remain in the cache barrel when being supplied by adopting the mode, and because the liquid medicine is mostly imported and has relatively high price, the residue of the liquid medicine is easy to cause huge waste. In order to realize the supply of incessant liquid medicine among the prior art, need add new liquid medicine in advance before the liquid medicine extraction in the buffer memory bucket finishes, new liquid medicine is generally directly bought from the producer, then pour into the buffer memory bucket through the inlet in, in above-mentioned in-process because the liquid medicine of different batches is different, the remaining liquid medicine in the buffer memory bucket can take place to mix with the liquid medicine of newly adding, cause the liquid medicine batch to trace back the management and control difficulty like this, and support the production influence to the technology easily when two liquid medicine differences are great. In addition, in the prior art, a large amount of bubbles are mixed when new liquid medicine is added into the buffer barrel, and the use of the crystal face protection liquid is influenced by the mixing of the bubbles.
In view of the above, a new chemical liquid supply device for chip packaging process is needed.
Disclosure of Invention
The invention aims to provide a liquid medicine supply device for a chip packaging process, which solves the defects in the prior art, reduces bubbles contained in liquid medicine entering a cache box after the liquid medicine is transferred, and can reduce the residue of the liquid medicine in the cache box because a liquid outlet of the cache box is arranged at the bottom of the cache box.
The invention provides a liquid medicine supply device for a chip packaging process, which comprises:
the frame body is provided with an upper supporting piece and a lower supporting piece which are arranged up and down;
the buffer box is arranged on the lower supporting piece and is provided with a buffer liquid outlet with a downward opening;
the supply tank is arranged on the upper supporting piece and is provided with a liquid outlet with a downward opening;
the infusion pipe fitting is communicated with the cache tank and the supply tank and comprises a sealing cover which is detachably mounted and fixed on the liquid outlet, a liquid outlet pipe which is arranged on the sealing cover and communicated with the supply tank, a connecting pipe which is communicated with the cache tank and a valve body which is arranged between the connecting pipe and the liquid outlet pipe, wherein the valve body is detachably connected and fixed with the connecting pipe;
the exhaust pipe fitting is arranged on the sealing cover and provided with an air inlet end extending into the supply tank and an exhaust end extending out of the supply tank, the exhaust end is positioned on the frame body, and the position of the air inlet end is higher than the maximum liquid level height in the supply tank.
Furthermore, a conical leakage hole protruding downwards is formed at the bottom end of the buffer box, and the buffer liquid outlet is formed at the bottom end of the conical leakage hole.
Furthermore, a side wall inlet communicated with the connecting pipe is arranged on the side wall of the buffer box and close to the bottom, and the height of the side wall inlet is not lower than that of the top of the conical leakage hole.
Further, the liquid medicine supply device for the chip packaging process is further provided with a liquid level monitoring pipe arranged on the cache box, the liquid level monitoring pipe extends along the vertical direction, two ends of the liquid level monitoring pipe are fixed on the cache box and communicated with the cache box, the height of the position of the bottom end of the liquid level monitoring pipe is not lower than that of the top of the conical leakage hole, and the liquid level monitoring pipe is a transparent pipe.
Furthermore, the infusion pipe fitting is also provided with an insertion pipe arranged on the connecting pipe, the connecting pipe is inserted into the outlet of the valve body through the insertion pipe, and the insertion pipe is provided with a conical structure.
Furthermore, the liquid medicine supply device for the chip packaging process is further provided with a cache box exhaust pipe, the starting end of the cache box exhaust pipe is fixed at the top of the cache box and communicated with the cache box, and the tail end of the cache box exhaust pipe is arranged on the frame body.
Further, the support body still has the frame and sets up the frame top and follow the vertical direction and extend the vertical support pole that sets up, upper strut spare and lower support piece are all fixed on the frame, just upper strut spare sets up the top of frame, the cache case blast pipe is located vertical support pole is last.
Furthermore, a positioning clamping piece is arranged on the vertical supporting rod and comprises a first clamping groove and a second clamping groove which are arranged in parallel, and the exhaust pipe of the cache box and the exhaust pipe fitting are respectively positioned in the first clamping groove and the second clamping groove.
The invention also discloses a use method of the liquid medicine supply device for the chip packaging process, which comprises the following steps:
s100: placing the supply box on the ground to enable the opening of the liquid outlet to be upward, fixing a sealing cover on the supply box and enabling the sealing cover to form a seal for the liquid outlet, wherein a valve body fixed on a liquid outlet pipe on the sealing cover is in a closed state;
s200, inverting the supply tank with the sealed cover on the upper support piece; the outlet of the valve body faces downwards, and the connecting pipe is inserted into the outlet of the valve body;
and S300, opening a valve body to enable the liquid medicine in the replenishing tank to flow into the cache tank to replenish the liquid medicine for the cache tank.
Furthermore, a conical leak hole protruding downwards is formed at the bottom end of the cache box, and the liquid medicine supply device for the chip packaging process is also provided with a liquid level monitoring pipe arranged on the cache box;
the method further comprises the following steps before the step S300:
judging whether the bottom end of the liquid level monitoring pipe has liquid medicine or not; and when no liquid medicine is at the bottom end of the liquid level monitoring pipe and the liquid medicine remains in the conical leakage hole, the valve body is opened.
Compared with the prior art, the liquid medicine buffer tank has the advantages that the liquid medicine supply tank on the liquid medicine supply is directly transferred into the buffer tank through the arrangement of the liquid conveying pipe fitting, the liquid medicine buffer tank can avoid contact with air as much as possible in the transferring process, so that more bubbles in the liquid medicine entering the buffer tank after the liquid medicine is transferred are reduced, and meanwhile, the liquid outlet of the buffer tank is arranged at the bottom of the buffer tank, so that the residue of the liquid medicine in the buffer tank can be reduced.
Drawings
FIG. 1 is a schematic diagram of an overall structure of a chemical liquid supply apparatus for a chip packaging process according to an embodiment of the present invention;
FIG. 2 is a front view of a chemical liquid supply device for a chip packaging process according to an embodiment of the present invention;
FIG. 3 is a right side view of FIG. 2;
FIG. 4 is a schematic diagram of a connection structure between a supply box and a buffer box in the chemical liquid supply apparatus for a chip packaging process according to an embodiment of the present invention;
FIG. 5 is a schematic view of a connection structure between a supply tank and a fluid-delivery tube of the chemical liquid supply apparatus for a chip packaging process according to an embodiment of the present invention;
FIG. 6 is a schematic structural diagram of an infusion tube of the liquid medicine supply device for a chip packaging process according to an embodiment of the present invention;
description of reference numerals: 1-frame body, 11-upper supporting piece, 12-lower supporting piece, 13-frame, 14-vertical supporting rod, 15-perforation, 2-cache box, 21-cache liquid outlet, 22-conical leak hole, 31-liquid outlet, 3-supply box, 4-infusion pipe fitting, 41-sealing cover, 42-liquid outlet pipe, 43-connecting pipe, 44-valve body, 45-plug pipe, 5-exhaust pipe fitting, 6-liquid level detecting pipe and 7-cache box exhaust pipe.
Detailed Description
The embodiments described below with reference to the drawings are illustrative only and should not be construed as limiting the invention.
The embodiment of the invention comprises the following steps: as shown in fig. 1 to 6, a chemical liquid supply device for a chip packaging process is disclosed, which comprises: the device comprises a frame body 1, a buffer tank 2, a supply tank 3, an infusion pipe 4 and an exhaust pipe 5; support body 1 is used for fixed stay buffer tank 2 and supply tank 3, and the buffer tank is 2 to be stored with the liquid medicine, and the liquid medicine in the buffer tank 2 directly supplies with the board, is used for saving new liquid medicine in the supply tank 3, and the liquid medicine in the supply tank 3 can be timely supply with in the buffer tank 2 after the liquid medicine in the buffer tank 2 finishes using to the interrupt of liquid medicine supply has been avoided. The infusion pipe fitting 4 is used for conveying new liquid medicine in the supply tank 3 into the cache tank 2, and the exhaust pipe fitting 5 is used for balancing air pressure in the supply tank 3 so as to facilitate the liquid medicine in the supply tank 3 to flow into the cache tank 2.
Specifically, in the present embodiment, the frame body 1 has an upper support 11 and a lower support 12 which are arranged up and down; the upper support 11 is oppositely arranged on the upper side of the lower support 12, the upper support 11 is used for fixedly supporting the supply tank 3, the lower support 12 is used for fixedly supporting the buffer tank 2, and thus the supply tank 3 is arranged on the upper side of the buffer tank 2, so that the liquid medicine flowing out of the buffer tank 2 can flow to the lower support 12 under the action of self gravity. The buffer box 2 is provided with a buffer liquid outlet 21 with a downward opening; the supply tank 3 is provided with a liquid outlet 31 having a downward opening.
Set liquid outlet 31 to the opening can make things convenient for the liquid medicine in the supply tank 3 automatic flow to the buffer tank 2 that is located the downside under the effect of self gravity downwards, simultaneously, set up the buffer liquid outlet of buffer tank 2 and be the opening and also make things convenient for the liquid medicine in the buffer tank 2 to flow downwards, avoided the liquid medicine to store up in buffer tank 2, reduced different batch liquid medicines because the influence to follow-up technology processing procedure after mixing.
In this embodiment, the infusion tube 4 connects the buffer tank 2 and the supply tank 3, the infusion tube 4 includes a cover 41 detachably fixed on the liquid outlet 31, a liquid outlet tube 42 disposed on the cover 41 and connected to the supply tank 3, a connecting tube 43 connected to the buffer tank 2, and a valve body 44 disposed between the connecting tube 43 and the liquid outlet tube 42, and the valve body 44 is detachably connected to the connecting tube 43;
the liquid outlet 3 can be inverted after being covered and sealed by the sealing cover 41, and the liquid medicine can be effectively prevented from being accumulated in the supply tank 3 after the supply tank 3 is inverted, so that the waste of the liquid medicine is avoided. Supply tank 3 is the direct finished product of selling of liquid medicine supplier in fact, generally empty the liquid medicine in supply tank 3 to buffer memory case 2 through artifical transfer among the prior art, cause the production of bubble easily like this, in order to avoid the appearance of above-mentioned problem, this embodiment has realized the direct transfer to buffer memory case 2 of supply tank 3 in the liquid medicine supply through setting up of infusion pipe fitting 4, and the contact with the air of avoiding that can be as far as possible in the transfer process, thereby also reduced the liquid medicine that enters into buffer memory case 2 after the transfer and contained more bubble.
The valve body 44 is detachably connected and fixed with the connecting pipe 43, the supply tank 3 can be placed upside down conveniently, after the supply tank 3 is purchased, the most original cover body on the supply tank 3 is opened, the most original cover body is used for sealing the supply tank 3 in the transferring process of the supply tank 3 to avoid leakage of the supply tank 3, and the original cover body is configured by a liquid medicine manufacturer. The liquid outlet 31 is sealed after the original cap is opened and then the liquid outlet 31 is resealed and covered by the cap 41 to open the liquid outlet 31 upside down in the supply tank 3.
The valve body 44 is in a closed state before the supply tank 3 is inverted, and the valve body 44 and the connection pipe 43 are detached before the supply tank 3 is inverted, so that the entire drain pipe member 4 actually forms a new cover closing the liquid outlet 31. The supply tank 3 is placed on the upper support part 11 in an inverted mode, then the connecting pipe 43 is inserted into the outlet of the valve body 44, the valve body 44 is opened when the supply tank 3 needs to supply liquid medicine into the buffer tank 2, and the liquid medicine in the supply tank 3 enters the valve body 44 through the liquid outlet pipe 42 and then enters the buffer tank through the connecting pipe 43.
The exhaust pipe member 5 is arranged on the cover 41 and has an air inlet end extending in the supply tank 3 and an exhaust end 51 extending outside the supply tank, the exhaust end 51 is positioned on the frame body 1, and the air inlet end is higher than the maximum liquid level in the supply tank 3.
The liquid medicine has been placed to the inside of the replenishing tank 3, the liquid medicine in the replenishing tank 3 need the hydraulic pressure in the balanced buffer tank 2 when flowing in buffer tank 2, consequently, exhaust pipe spare 5 has been set up, exhaust pipe spare 5's inlet end extends in the replenishing tank 3 and extends the upper portion at the maximum liquid level height of the liquid medicine in the replenishing tank, thereby avoided the liquid medicine to discharge from exhaust pipe spare 5, make the air in the replenishing tank 3 can communicate with the external world through exhaust pipe spare 5, thereby make the inside and outside atmospheric pressure difference of replenishing tank 3 unanimous, guaranteed that the liquid medicine can smooth outflow in the replenishing tank 3.
Further, a conical leak hole 22 protruding downwards is formed at the bottom end of the buffer tank 2, and the buffer liquid outlet 21 is arranged at the bottom end of the conical leak hole 22. The setting of toper small opening 22 has set up a recess that makes things convenient for the liquid medicine to assemble in the bottom of buffer memory case 2 in fact, and the realization that can be better is the assembling of the interior liquid medicine of buffer memory case 2, avoids keeping of liquid medicine in buffer memory case 2, has also avoided remaining the mixture between the liquid medicine of liquid medicine and new supply simultaneously, conveniently realizes the problem of traceing back of different batches of liquid medicines.
The plurality of conical leakage holes 22 of the buffer tank 2 are arranged, the plurality of conical leakage holes 22 are arranged on two opposite sides of the bottom of the buffer tank 2 in parallel, and the liquid medicine flows out from the conical leakage holes 22 of the buffer tank 2 and then flows to the corresponding process workbench through the pump body.
The arrangement of the structure effectively relieves the problem of unclean extraction caused by the extraction mode in the prior art, and reduces the mixing proportion between the residual liquid medicine in the buffer tank 2 and the new replenishing liquid medicine in the replenishing tank 3. Meanwhile, as the conical leak hole 22 is arranged, residual liquid medicine can be gathered in the conical leak hole 22, the supply tank 3 can be opened to supply the liquid medicine into the cache tank 2 when the liquid medicine only remains in the conical leak hole 22, so that the liquid medicine in different batches can be mixed only in the conical leak hole 22 when the liquid medicine is supplied and leaked, and the advantage of only being mixed in the conical leak hole 22 is that the mixed liquid medicine can be effectively controlled within a certain range and can be discharged in time, thereby only possibly reducing the influence caused by the mixing of the liquid medicine.
In this embodiment, a sidewall inlet communicated with the connecting pipe 43 is disposed on a sidewall of the buffer tank 2 near the bottom, and the height of the sidewall inlet is not lower than the top of the conical weep hole 22.
The side wall inlet is arranged on the side wall of the cache box 2 and is close to the bottom, so that the flow of the liquid medicine in the cache box 2 is reduced as much as possible when the liquid medicine enters the cache box 2, and the gas mixing with the cache box 2 is reduced, thereby being beneficial to reducing the generation of bubbles. The height of the side wall inlet is set to be not lower than the top of the conical leakage hole 22, so that the liquid medicine can be prevented from directly flowing out of the conical leakage hole 22 after entering the cache tank 2.
Further, the liquid medicine supply device for the chip packaging process is further provided with a liquid level monitoring pipe 6 arranged on the cache box, the liquid level monitoring pipe 6 extends along the vertical direction, two ends of the liquid level monitoring pipe 6 are fixed on the cache box 2 and communicated with the cache box 2, the height of the position of the bottom end of the liquid level monitoring pipe 6 is not lower than that of the top of the conical leakage hole 22, and the liquid level monitoring pipe 6 is a transparent pipe.
The liquid level monitoring pipe 6 is arranged to be transparent and can observe the liquid level situation in the liquid level monitoring pipe 6 intuitively and timely, the liquid level situation in the liquid level monitoring pipe 6 is parallel to the cache box 2, and the liquid level situation in the liquid level monitoring pipe 6 actually reflects the liquid level situation in the cache box 2, so that the liquid level in the cache box 2 is conveniently monitored, and the liquid medicine in the cache box 2 is timely replenished.
And set up liquid level detection pipe 6 to be close to in the bottom of buffer memory case 2 but be higher than toper small opening 22, then can be timely when not having the liquid medicine in liquid level detection pipe 6 reflect that the bottom of buffer memory case 2 has not had the liquid medicine, and the liquid medicine only remains in toper small opening 22 to can more directly perceived effectual reflect the situation that the residual liquid medicine only gathers in toper small opening 22, thereby more directly perceived better realization is to liquid medicine feeding device's control.
In this embodiment, in order to conveniently realize the connection and fixation of the connection pipe 43 and the valve body 44, the infusion tube fitting 4 further has an insertion pipe 45 disposed on the connection pipe 43, the connection pipe 43 is inserted into the outlet of the valve body 44 through the insertion pipe 45, and the insertion pipe 45 has a tapered structure.
The hardness of the material of the insertion pipe 45 is greater than that of the connecting pipe 43, so that the insertion pipe 45 can be connected and fixed with the valve body 44 more conveniently, and operation is achieved conveniently.
Further, the chemical liquid supply device for the chip packaging process further comprises a buffer tank exhaust pipe 7, wherein the beginning end of the buffer tank exhaust pipe 7 is fixed on the top of the buffer tank 2 and is communicated with the buffer tank 2, and the tail end of the buffer tank exhaust pipe 7 is arranged on the frame body 1. The buffer box exhaust pipe 7 is used for communicating the buffer box 2 with the outside, and ensures that the air pressure in the buffer box 2 is consistent with the outside, thereby ensuring that the liquid medicine in the buffer box 2 can flow out from the buffer box 2.
The support body 1 still has frame 13 and sets up frame 13 top and the vertical support pole 14 that extends the setting along vertical direction, upper support piece 11 and bottom suspension member 12 are all fixed on the frame 13, just upper support piece 11 sets up the top of frame 13, buffer tank blast pipe 7 is located on the vertical support pole 14.
The upper support piece 11 is a support plate for supporting the supply tank 3, the support plate is fixed on the frame 13, a positioning structure matched with the top of the supply tank 3 is arranged on the support plate, a through hole 15 matched with the sealing cover 41 is formed in the upper support piece 11, when the supply tank 3 is inverted on the upper support piece 11, the sealing cover 41 is exposed to the cache tank 2 on the lower side through the through hole 15, and the liquid outlet pipe 42 and the valve body 44 on the sealing cover 41 are exposed to the cache tank 2 through the through hole 15 so as to be connected with the cache tank 2 conveniently.
The vertical support rod 14 is provided with a positioning fastener 141, the positioning fastener 141 comprises a first clamping groove and a second clamping groove which are arranged in parallel, and the exhaust pipe of the cache box and the exhaust pipe fitting are respectively positioned in the first clamping groove and the second clamping groove.
The other embodiment of the invention also discloses a using method of the liquid medicine supply device for the chip packaging process, which comprises the following steps:
s100: placing the supply tank 3 on the ground so that the liquid outlet 31 is opened upwards, fixing a cover 41 on the supply tank 3 and making the cover 41 close the liquid outlet 31, wherein a valve body 44 fixed on a liquid outlet pipe 42 on the cover 41 is in a closed state; in order to facilitate the installation and fixation of the supply tank 3, the connection pipe 43 is separated from the valve body 44;
s200, inverting the replenishing tank 3 blocked by the sealing cover 41 on the upper support 11, wherein the valve body 44 is in a closed state, so that the liquid medicine is not discharged from the connecting pipe 43; and the outlet of the valve body 44 faces downwards at this time, and the connecting pipe 43 is inserted into the outlet of the valve body 44;
s300, opening the valve body 44 to enable the liquid medicine in the replenishing tank 3 to flow into the buffer tank 2 to replenish the buffer tank 2 with the liquid medicine.
A conical leak hole 22 protruding downwards is formed at the bottom end of the buffer tank 2, and the liquid level monitoring pipe 6 is arranged on the buffer tank 2 and is also arranged in the liquid medicine supply device for the chip packaging process;
the method further comprises the following steps before the step S300: judging whether the bottom end of the liquid level monitoring pipe 6 has liquid medicine; and the valve body 44 is opened when no liquid medicine is at the bottom end of the liquid level monitoring pipe 6 and when liquid medicine remains in the conical leak hole 22. The purpose of this step is to ensure that the valve body 44 is opened when the accumulated liquid medicine is gathered in the conical leak hole 22, so as to reduce the mixing ratio of liquid medicine in different batches as much as possible.
The construction, features and functions of the present invention are described in detail in the embodiments illustrated in the drawings, which are only preferred embodiments of the present invention, but the present invention is not limited by the drawings, and all equivalent embodiments modified or changed according to the idea of the present invention should fall within the protection scope of the present invention without departing from the spirit of the present invention covered by the description and the drawings.
Claims (10)
1. A chemical liquid supply device for chip packaging process, comprising:
the frame body is provided with an upper supporting piece and a lower supporting piece which are arranged up and down;
the buffer box is arranged on the lower supporting piece and is provided with a buffer liquid outlet with a downward opening;
the supply tank is arranged on the upper supporting piece and is provided with a liquid outlet with a downward opening;
the infusion pipe fitting is communicated with the cache tank and the supply tank and comprises a sealing cover which is detachably mounted and fixed on the liquid outlet, a liquid outlet pipe which is arranged on the sealing cover and communicated with the supply tank, a connecting pipe which is communicated with the cache tank and a valve body which is arranged between the connecting pipe and the liquid outlet pipe, wherein the valve body is detachably connected and fixed with the connecting pipe;
the exhaust pipe fitting is arranged on the sealing cover and provided with an air inlet end extending into the supply tank and an exhaust end extending out of the supply tank, the exhaust end is positioned on the frame body, and the position of the air inlet end is higher than the maximum liquid level height in the supply tank.
2. The chemical liquid supply device for chip packaging process as claimed in claim 1, wherein: the bottom of the buffer box is provided with a conical leakage hole which protrudes downwards, and the buffer liquid outlet is arranged at the bottom end of the conical leakage hole.
3. The chemical liquid supply device for chip packaging process as claimed in claim 2, wherein: and a side wall inlet communicated with the connecting pipe is arranged on the side wall of the buffer box and close to the bottom, and the height of the side wall inlet is not lower than that of the top of the conical leakage hole.
4. The chemical liquid supply device for chip packaging process as claimed in claim 2, wherein: the liquid medicine supply device for the chip packaging process is also provided with a liquid level monitoring pipe arranged on the cache box, the liquid level monitoring pipe extends along the vertical direction, the two ends of the liquid level monitoring pipe are fixed on the cache box and communicated with the cache box, the height of the bottom position of the liquid level monitoring pipe is not lower than that of the top of the conical leakage hole, and the liquid level monitoring pipe is a transparent pipe.
5. The chemical liquid supply device for chip packaging process as claimed in claim 1, wherein: the infusion pipe fitting is also provided with an insertion pipe arranged on the connecting pipe, the connecting pipe is inserted at the outlet of the valve body through the insertion pipe, and the insertion pipe is of a conical structure.
6. The chemical liquid supply device for chip packaging process as claimed in claim 1, wherein: the liquid medicine supply device for the chip packaging process is characterized by further comprising a cache box exhaust pipe, the starting end of the cache box exhaust pipe is fixed to the top of the cache box and communicated with the cache box, and the tail end of the cache box exhaust pipe is arranged on the frame body.
7. The chemical liquid supply device for chip packaging process as claimed in claim 6, wherein: the support body still has the frame and sets up the frame top extends the vertical support pole that sets up along vertical direction, upper strut spare and lower support piece are all fixed on the frame, just upper strut spare sets up the top of frame, the cache case blast pipe is located vertical support pole is last.
8. The chemical liquid supply device for chip packaging process as claimed in claim 7, wherein: the vertical support rod is provided with a positioning clamping piece, the positioning clamping piece comprises a first clamping groove and a second clamping groove which are arranged side by side, and the exhaust pipe of the cache box and the exhaust pipe fitting are respectively positioned in the first clamping groove and the second clamping groove.
9. A method for using the chemical liquid supply apparatus for chip packaging process according to any one of claims 1-8, comprising the steps of:
s100: placing the supply box on the ground to enable the opening of the liquid outlet to be upward, fixing a sealing cover on the supply box and enabling the sealing cover to form a seal for the liquid outlet, wherein a valve body fixed on a liquid outlet pipe on the sealing cover is in a closed state;
s200, inverting the supply tank with the sealed cover on the upper support piece; the outlet of the valve body faces downwards, and the connecting pipe is inserted into the outlet of the valve body;
and S300, opening a valve body to enable the liquid medicine in the replenishing tank to flow into the cache tank to replenish the liquid medicine for the cache tank.
10. The method of claim 9, further comprising the steps of: the bottom end of the buffer box is provided with a conical leak hole which protrudes downwards, and the liquid medicine supply device for the chip packaging process is also provided with a liquid level monitoring pipe arranged on the buffer box;
the method further comprises the following steps before the step S300:
judging whether the bottom end of the liquid level monitoring pipe has liquid medicine or not; and when no liquid medicine is at the bottom end of the liquid level monitoring pipe and the liquid medicine remains in the conical leakage hole, the valve body is opened.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202111681743.6A CN114313654A (en) | 2021-12-30 | 2021-12-30 | Liquid medicine supply device for chip packaging process and use method |
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|---|---|---|---|
| CN202111681743.6A CN114313654A (en) | 2021-12-30 | 2021-12-30 | Liquid medicine supply device for chip packaging process and use method |
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