CN114310427B - Axial feeding and rotating device for ultra-precision machining - Google Patents
Axial feeding and rotating device for ultra-precision machining Download PDFInfo
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- CN114310427B CN114310427B CN202210090365.2A CN202210090365A CN114310427B CN 114310427 B CN114310427 B CN 114310427B CN 202210090365 A CN202210090365 A CN 202210090365A CN 114310427 B CN114310427 B CN 114310427B
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Abstract
The invention discloses an axial feeding and rotating device for ultra-precision machining, belonging to the technical field of ultra-precision machining; the high-speed spindle shaft comprises a shell and a throttle sleeve which are arranged outside the shaft, an inner rotor, an upper thrust throttle and a lower thrust throttle which are arranged between the outside and the inside; the linear driving mechanism adopts a piezoelectric scanning table and is fixedly connected to the upper end surface of the sleeve of the restrictor; a plurality of pressure holes which are communicated with each other and provide axial suspension support for the rotor are axially arranged on the upper thrust restrictor and the lower thrust restrictor, and a radial vent hole communicated with the pressure holes is arranged on the upper end throttling section of the upper thrust restrictor. According to the invention, the supporting force of axial and radial suspension is provided for the rotor through the small hole throttling principle of the upper and lower thrust throttlers, the rotation of the rotor is controlled by combining the magnetic steel, so that the rotation and linear motion of the spindle are simultaneously completed in one device, the rigidity of the processing spindle is increased, and the system control is facilitated.
Description
Technical Field
The invention relates to a spindle device for ultra-precision machining, in particular to an axial feeding and rotating device for ultra-precision machining, and belongs to the technical field of ultra-precision machining.
Background
The ultra-precision machining technology is an important machining method for obtaining complex microstructures on the surfaces of optical components and chips, plays an important supporting role in the manufacture of advanced weaponry and high-tech civil products, and has important strategic significance in guaranteeing national safety and enhancing comprehensive national strength.
At present, multi-axis machining and fast-slow tool servo machining technologies are often used for ultra-precision machining, but in the multi-axis machining technologies, along with the increase of the number of axes, the control capability of a system is weakened, the rigidity is reduced, the difficulty of operation is increased, and the multi-axis machining technologies are not favorable for accurate machining.
Disclosure of Invention
The purpose of the invention is: the axial feeding and rotating device for ultraprecision machining is characterized in that an upper thrust restrictor and a lower thrust restrictor are adopted, small hole throttling principles are adopted to provide axial and radial suspension supporting force for a rotor, the rotor is controlled to rotate by combining magnetic steel, so that the rotation and linear motion of a spindle are simultaneously completed in one device, the rigidity of the machined spindle is increased, and the system control is facilitated.
In order to achieve the purpose, the invention adopts the following technical scheme: an axial feeding and rotating device for ultraprecision machining comprises a high-speed spindle shaft body and a linear driving mechanism, wherein the high-speed spindle shaft body comprises a shell, a restrictor sleeve, a rotor, an upper thrust restrictor and a lower thrust restrictor, the restrictor sleeve comprises a large-diameter cylinder at the upper end and a small-diameter cylinder at the lower end, a first step groove is axially arranged in the middle-upper section of the large-diameter cylinder, and a sleeve shaft hole is communicated with the center of the lower end face of the first step groove; the linear driving mechanism adopts a piezoelectric scanning table which is fixedly connected to the upper end face of the large-diameter cylinder; the upper thrust restrictor comprises a bottom connecting seat and an upper end throttling section, the upper end throttling section is arranged in the sleeve shaft hole, a backing ring is arranged between the lower end face of the bottom connecting seat and an outer ring of an upper end face of the lower thrust restrictor, the backing ring and the upper thrust restrictor are fixedly connected to the lower end face of the small-diameter cylinder through fastening screws, and the shell is connected to the outer portions of the lower thrust restrictor, the backing ring, the upper thrust restrictor and the small-diameter cylinder in a matched mode; the rotor is arranged in rotor holes arranged in the upper thrust restrictor and the lower thrust restrictor, magnetic steel is sleeved on the outer edge of the rotor positioned at the upper end of the rotor hole, and annular coils connected in the first step grooves are correspondingly arranged outside the magnetic steel; the lower part of the rotor is provided with a flange disc structure which is correspondingly arranged in a cavity formed between the lower end surface of the bottom connecting seat and an inner ring of the upper end surface of the lower thrust restrictor; a plurality of pressure holes which are mutually communicated and provide axial suspension support for the rotor are axially arranged on the upper thrust restrictor and the lower thrust restrictor, and a radial vent hole communicated with the pressure holes is formed in the upper end throttling section of the upper thrust restrictor.
The inner parts of the upper thrust restrictor and the lower thrust restrictor are axially and respectively provided with an upper thrust rotor hole and a lower thrust rotor hole which have the same aperture, and a plurality of upper thrust pressure holes and lower thrust pressure holes which have the same aperture and are radially communicated are uniformly distributed on the outer parts of the upper thrust rotor hole and the lower thrust rotor hole along the circumferential direction; a lower thrust side air vent is communicated between the lower thrust first air inlet hole and the upper end face of the lower thrust restrictor, and the lower thrust second air inlet hole and the upper end face of the lower thrust restrictor; an upper thrust air inlet communicated with the upper thrust pressure hole and an upper thrust air hole communicated with the upper thrust rotor hole are respectively arranged on the side face of the bottom connecting seat of the upper thrust restrictor, upper thrust side air vents are communicated between the upper thrust air inlet and the upper thrust air hole and between the upper thrust air hole and the lower end face of the bottom connecting seat, and axial communication holes are communicated between the upper thrust air hole and the upper end face of the upper end throttling section; the side surface of the outer end of the middle part of the upper end throttling section is provided with a middle air outlet hole communicated with the axial communicating hole, the side surfaces of the outer ends of the upper part and the lower part of the upper end throttling section are provided with a plurality of rows of radial vent holes uniformly distributed along the circumferential direction, wherein the upper end of the upper stop pushing pressure hole is communicated with a row of radial vent holes close to the bottom connecting seat, and the lower end of the upper stop pushing pressure hole is communicated with the lower bottom surface of the bottom connecting seat; and the positions of all the apertures of the upper thrust pressure hole and the upper thrust side vent hole in the upper thrust restrictor correspond to the positions of all the apertures of the lower thrust pressure hole and the thrust side vent hole in the lower thrust restrictor one by one.
A protruding ring groove is formed in the outer edge of the top of the upper end throttling section, rotating gaps are formed between the outer edge of the upper end throttling section at the lower end of the protruding ring groove and the sleeve shaft hole, and between the upper thrust rotor hole and the rotor and between the lower thrust rotor hole and the rotor; a sleeve air inlet hole communicated with the sleeve shaft hole is radially arranged on the outer side surface of the lower section of the large-diameter cylinder; an upper thrust pressure hole and an upper thrust side vent hole in the upper thrust restrictor and a lower thrust pressure hole and a thrust side vent hole in the lower thrust restrictor form a supporting force for providing axial suspension for the rotor; and a middle air outlet hole and a radial vent hole in the upper thrust restrictor and a sleeve air inlet hole in a sleeve of the restrictor form a supporting force for providing radial suspension for the rotor.
The bottom outer edge of the upper end throttling section is provided with a groove corresponding to the depth of the middle part of the convex annular groove, and the convex annular groove and the groove are connected with the sleeve shaft hole in a sealing mode through sealing rings.
A plurality of sleeve counter bores are uniformly distributed on the lower end face of the small-diameter cylinder at the lower end of the sleeve of the throttle along the circumferential direction, and an upper thrust bolt hole, a lower thrust bolt hole and a backing ring bolt hole are respectively arranged on the bottom connecting seat, the lower thrust throttle and the backing ring of the upper thrust throttle corresponding to the sleeve counter bores; bolt holes on the lower thrust restrictor, the backing ring and the upper thrust restrictor are fixedly connected in a plurality of sleeve counterbores on a restrictor sleeve in sequence through fastening screws.
A plurality of sleeve through holes are uniformly distributed on the upper end ring surface of the large-diameter cylinder at the upper end of the throttler sleeve along the circumferential direction, and the piezoelectric scanning table is fixedly connected with the sleeve through holes in the throttler sleeve through bolts; and a second step groove communicated with the first step groove is formed in the inner ring surface at the upper end of the large-diameter cylinder, and a rotating speed sensor electrically connected with the piezoelectric scanning table is connected to the second step groove through a bolt.
A plurality of lower thrust threaded through holes are uniformly distributed on the end face of the lower thrust restrictor in the circumferential direction, the lower thrust threaded through holes and the lower thrust threaded through holes are distributed at intervals, a front cover plate is arranged on the lower end face of the lower thrust restrictor, and the front cover plate is fixedly connected in the lower thrust threaded through holes through bolts; the lower end face of the lower thrust restrictor is also provided with a double-ring groove, the middle part of the double-ring groove is communicated with the lower thrust pressure hole, and the double-ring groove is hermetically connected with the front cover plate through a sealing ring.
The upper portion of rotor still is provided with the mounting disc of restriction magnet steel axial displacement, and the mounting disc passes through screw fixed connection on the up end of rotor.
The piezoelectric scanning platform comprises an upper connecting plate, a lower connecting plate and a plurality of piezoelectric actuators, the piezoelectric actuators are fixedly connected between the upper connecting plate and the lower connecting plate in an adhesion mode, and the lower connecting plate and the sleeve of the restrictor are fixedly connected through bolts; the piezoelectric scanning platform is connected with an upper computer through a data line and a voltage controller, and the lower connecting plate is driven to linearly move by controlling the longitudinal displacement of the piezoelectric actuator.
The invention has the beneficial effects that:
1) The device provides axial and radial suspension supporting force for the rotor through the small hole throttling principle of the upper and lower thrust throttlers, and controls the rotation of the rotor and the movement of the main shaft by combining the magnetic steel and the linear driving mechanism, so that the rotation and the linear motion of the main shaft are simultaneously completed in one device, the linear and rotary compound motion of the high-speed main shaft is achieved, the rigidity of the processing main shaft is increased, and the system control is convenient; meanwhile, the rotating speed of the rotor is controlled by using a rotating speed sensor, so that micron-level high-precision machining is realized; compared with the traditional processing main shaft, the processing precision is high, the processing process is noiseless, the risk of oil pollution is avoided, the abrasion is reduced, and the service life of the rotor is prolonged.
2) The invention conveys high-pressure gas between the rotor and the restrictor through the upper thrust restrictor and the lower thrust restrictor, so that the space between the rotor and the restrictor is filled with the high-pressure gas, the internal circulation of the gas is realized by the pressure gas outlet hole and the radial vent hole, and the rotor is suspended and supported by the high-pressure gas in combination with the use of the sealing ring.
3) The invention provides theoretical and technical support for the ultra-precision machining of the complex microstructure on the surfaces of the optical components and chips, and has positive significance for improving the precision machining equipment technology, developing advanced optical components and enhancing the chip manufacturing level in China.
Drawings
FIG. 1 is a schematic view of an assembly structure of the present invention;
FIG. 2 is an exploded view of the structure of the assembly of the present invention;
FIG. 3 is a top view of the restrictor sleeve of FIG. 1;
FIG. 4 isbase:Sub>A cross-sectional view taken along line A-A of FIG. 3;
FIG. 5 is a perspective view of the upper thrust restrictor of FIG. 1;
FIG. 6 is a top view of FIG. 5;
FIG. 7 isbase:Sub>A cross-sectional view taken along line A-A of FIG. 6;
FIG. 8 is a top view of the lower thrust restrictor of FIG. 1;
FIG. 9 is a cross-sectional view taken along line B-B of FIG. 8;
FIG. 10 is a schematic view of a structural connection of the piezoelectric scanning stage of FIG. 1;
fig. 11 is a schematic view of the air flow of the suspension rotor supported by the restrictor of fig. 1.
In the figure, 1-shell, 2-restrictor sleeve, 201-first step groove, 202-sleeve shaft hole, 203-sleeve air inlet hole, 204-sleeve counter bore, 205-sleeve through hole, 206-second step groove, 3-rotor, 301-flange disc structure, 4-upper thrust restrictor, 401-upper thrust rotor hole, 402-upper thrust pressure hole, 403-upper thrust air inlet hole, 404-upper thrust air outlet hole, 405-upper thrust side vent hole, 406-axial communication hole, 407-middle air outlet hole, 408-radial vent hole, 409-protruding ring groove, 410-groove, 411-upper thrust bolt hole, 5-lower thrust restrictor, 501-lower thrust rotor hole, 502-lower thrust pressure hole, 503-lower thrust first air inlet hole, 504-lower thrust second air inlet hole, 505-lower thrust side vent hole, 506-lower thrust bolt hole, 507-lower thrust threaded through hole, 508-double ring groove, 6-piezoelectric scanning stage, 601-moving cover body, 602-fixed shell, 603-ceramic, 7-backing ring, 8-fastening ring, 8-ring, 9-lower thrust bolt hole, 507-screw bolt hole, 507-lower screw bolt hole, 508-annular magnetic coil, 13-upper position sensor, 17-voltage control line, 13-voltage sensor, 13-voltage line, 13-voltage control line, 13-upper position sensor, and 3-upper position-lower thrust rotor hole.
Detailed Description
The invention is further explained below with reference to the figures and the embodiments.
Example (b): as shown in fig. 1 to 11, the axial feeding and rotating device for ultra-precision machining according to the present invention includes a high-speed spindle shaft body including a housing 1 and a throttle sleeve 2 disposed outside the shaft body, a rotor 3 inside the shaft body, and an upper thrust throttle 4 and a lower thrust throttle 5 between the outside and the inside of the shaft body, and a linear driving mechanism.
The throttleer sleeve 2 comprises a large-diameter cylinder at the upper end and a small-diameter cylinder at the lower end, a first step groove 201 is axially arranged in the middle-upper section of the large-diameter cylinder, and the center of the lower end face of the first step groove 201 is communicated with a sleeve shaft hole 202; 6 sleeve counter bores 204 are uniformly distributed on the lower end face of a small-diameter cylinder at the lower end of the restrictor sleeve 2 along the circumferential direction, and 6 upper thrust bolt holes 411, 6 lower thrust bolt holes 506 and 6 backing ring bolt holes are respectively arranged on a bottom connecting seat of the upper thrust restrictor 4, the lower thrust restrictor 5 and the backing ring 7 corresponding to the sleeve counter bores 204; bolt holes on the lower thrust restrictor 5, the backing ring 7 and the upper thrust restrictor 4 are sequentially and fixedly connected into 6 sleeve counter bores 204 on the restrictor sleeve 2 through fastening screws 8.
3 sleeve through holes 205 are uniformly distributed on the upper end ring surface of the large-diameter cylinder at the upper end of the restrictor sleeve 2 along the circumferential direction, and the piezoelectric scanning table 6 is fixedly connected with the sleeve through holes 205 in the restrictor sleeve 2 through bolts; a second step groove 206 communicated with the first step groove 201 is formed in the inner ring surface of the upper end of the large-diameter cylinder, and the second step groove 206 is connected with a rotating speed sensor 12 electrically connected with the piezoelectric scanning table 6 through two bolts.
Go up thrust restrictor 4 and include bottom connecting seat and upper end throttle section, the upper end throttle section sets up in sleeve shaft hole 202, install backing ring 7 between the lower terminal surface of bottom connecting seat and the up end outer ring of thrust restrictor 5 down, backing ring 7 and go up thrust restrictor 4 pass through fastening screw 8 fixed connection together on the lower terminal surface of path section of thick bamboo, casing 1 cooperation is connected in thrust restrictor 5 down, backing ring 7, go up the outside of thrust restrictor 4 and path section of thick bamboo.
The inner parts of the upper thrust restrictor 4 and the lower thrust restrictor 5 are axially and respectively provided with an upper thrust rotor hole 401 and a lower thrust rotor hole 501 with the same aperture, and the outer parts of the upper thrust rotor hole 401 and the lower thrust rotor hole 501 are respectively and uniformly distributed with 8 upper thrust pressure holes 402 and lower thrust pressure holes 502 which have the same aperture and are radially communicated along the circumferential direction; a lower thrust first air inlet hole 503 communicated with the lower thrust pressure hole 502 and a lower thrust second air inlet hole 504 communicated with the lower thrust rotor hole 501 are respectively arranged on the outer side surface of the lower thrust restrictor 5, lower thrust side vent holes 505 are respectively communicated between the lower thrust first air inlet hole 503 and the upper thrust second air inlet hole 504 and the upper end surface of the lower thrust restrictor 5, wherein the lower thrust pressure hole 502 is communicated with the upper end surface of the lower thrust restrictor 5; an upper thrust air inlet hole 403 communicated with the upper thrust pressure hole 402 and an upper thrust air hole 404 communicated with the upper thrust rotor hole 401 are respectively formed in the side face of the bottom connecting seat of the upper thrust restrictor 4, upper thrust side vent holes 405 are respectively communicated between the upper thrust air inlet hole 403 and the upper thrust air hole 404 and the lower end face of the bottom connecting seat, and an axial communication hole 406 is communicated between the upper thrust air hole 404 and the upper end face of the upper end throttling section; a middle air outlet hole 407 communicated with the axial communication hole 406 is formed in the side face of the outer end of the middle of the upper end throttling section, 4 rows of 8 radial vent holes 408 uniformly distributed along the circumferential direction are formed in the side faces of the outer ends of the upper portion and the lower portion of the upper end throttling section, wherein the upper end of the upper stop pushing pressure hole 402 is communicated with one row of radial vent holes 408 close to the bottom connecting seat, and the lower end of the upper stop pushing pressure hole is communicated with the lower bottom face of the bottom connecting seat; the upper thrust pressure hole 402 and the upper thrust side vent hole 405 in the upper thrust restrictor 4 correspond to the lower thrust pressure hole 502 and the thrust side vent hole 505 in the lower thrust restrictor 5 in one-to-one correspondence. The casing 1 is provided with pipeline holes corresponding to the upper thrust air inlet 403, the upper thrust air outlet 404, the lower thrust first air inlet 503 and the lower thrust second air inlet 504.
The rotor 3 is arranged in rotor holes arranged in the upper thrust restrictor 4 and the lower thrust restrictor 5, the outer edge of the rotor 3 positioned at the upper end of the rotor hole is sleeved with a magnetic steel 9, and the outer part of the magnetic steel 9 is correspondingly provided with an annular coil 10 connected in the first step groove 201; the lower part of the rotor 3 is provided with a flange disc structure 301, and the flange disc structure 301 is correspondingly arranged in a cavity formed by the lower end face of the bottom connecting seat and an inner ring of the upper end face of the lower thrust restrictor 5.
A protruding ring groove 409 is arranged on the outer edge of the top of the upper throttling section, and rotating gaps are arranged between the outer edge of the upper throttling section at the lower end of the protruding ring groove 409 and the sleeve shaft hole 202, and between the upper thrust rotor hole 401 and the lower thrust rotor hole 501 and the rotor 3; a sleeve air inlet 203 communicated with the sleeve shaft hole 202 is radially arranged on the outer side surface of the lower section of the large-diameter cylinder; the upper thrust pressure hole 402 and the upper thrust side vent hole 405 in the upper thrust restrictor 4, and the lower thrust pressure hole 502 and the thrust side vent hole 505 in the lower thrust restrictor 5 form a supporting force for providing axial suspension for the rotor 3; the middle air outlet hole 407 and the radial vent hole 408 in the upper thrust restrictor 4 and the sleeve air inlet hole 203 in the restrictor sleeve 2 form a supporting force for providing radial suspension for the rotor 3.
The bottom outer edge of the upper end throttling section is also provided with a groove 410 corresponding to the groove depth of the middle part of the protruding ring groove 409, and the protruding ring groove 409, the groove 410 and the sleeve shaft hole 202 are in sealing connection through a sealing ring 11.
3 lower thrust threaded through holes 507 are uniformly distributed on the end face of the lower thrust restrictor 5 along the circumferential direction, the lower thrust threaded through holes 507 and 6 lower thrust bolt holes 506 are distributed at intervals, a front cover plate 13 is connected on the lower end face of the lower thrust restrictor 5, and the front cover plate 13 is fixedly connected in the lower thrust threaded through holes 507 through bolts; the lower end face of the lower thrust restrictor 5 is further provided with a double-ring groove 508, the middle of the double-ring groove 508 is communicated with the lower thrust pressure hole 502, and the double-ring groove 508 is connected with the front cover plate 13 in a sealing mode through a sealing ring 11.
And the upper part of the rotor 3 is also provided with a mounting disc 14 for limiting the axial displacement of the magnetic steel 6, and the mounting disc 14 is fixedly connected to the upper end surface of the rotor 3 through screws.
The linear driving mechanism adopts a piezoelectric scanning platform 6, and the piezoelectric scanning platform 6 is fixedly connected to the upper end face of the large-diameter cylinder; the piezoelectric scanning table 6 comprises an upper connecting plate 601, a lower connecting plate 602 and a plurality of piezoelectric actuators 603, wherein the piezoelectric actuators 603 are fixedly connected between the upper connecting plate 601 and the lower connecting plate 602 in an adhesion manner, and the lower connecting plate 602 is fixedly connected with the throttle sleeve 2 through bolts. The piezoelectric scanning table 6 is connected with an upper computer 17 through a data line 15 and a voltage controller 16, and the lower connecting plate 602 is driven to perform linear movement by controlling the longitudinal displacement of the piezoelectric actuator 603.
The piezoelectric driving device, namely the piezoelectric actuators, are used for linear driving in the piezoelectric scanning table, after the piezoelectric driving device is electrified, the plurality of piezoelectric actuators in the piezoelectric scanning table synchronously perform longitudinal displacement extension at the same time, and the extension length magnitude can reach the micron level, so that the lower connecting plate is driven to perform linear movement. The piezoelectric actuator can be used for monitoring linear displacement through an upper computer through a voltage controller and a data line, and the linear driving of the whole high-speed spindle device is realized.
The working principle is as follows:
when the air compressor works, high-pressure air is introduced into the lower thrust restrictor 5 through lower thrust first air inlet holes 503 and lower thrust second air inlet holes 504 on the side edges, so that 8 lower thrust pressure holes 502 communicated with the lower thrust first air inlet holes 503 are communicated with the high-pressure air and blow and float the flange disc structure 301 on the rotor 3 upwards; and a lower thrust side vent hole 505 communicated with the lower thrust first air inlet hole 503 and the lower thrust second air inlet hole 504 leads high-pressure gas into a cavity formed between the lower end surface of the bottom connecting seat and an upper end surface inner ring of the lower thrust restrictor 5, the gas entering the lower thrust second air inlet hole 504 leads into a rotating gap between the lower thrust rotor hole 501 and the rotor 3, and the high-pressure gas flows out from the side surface of the rotor 3, so that internal circulation of the gas is realized.
The upper thrust restrictor 4 is filled with high-pressure gas through an upper thrust air inlet 403, the gas downwards blows the flange disc structure 301 on the floating rotor 3 through 8 upper thrust pressure holes 402 which are communicated with each other and enters 4 rows of radial vent holes 408 for mutual circulation, and then enters a rotating gap between the upper thrust rotor hole 401 and the rotor 3 and the restrictor sleeve 2; an axial communication hole 406 communicated with the upper stop push-out gas hole 404 leads high-pressure gas into the upper end of the rotor to maintain balance, and a middle gas outlet hole 407 on the axial communication hole 406 realizes internal circulation of the gas.
Go up thrust flow controller, thrust flow controller down both from the side lead to there being gas, go up the downward pressure of gas to the rotor in the thrust, down thrust gas is to the ascending pressure of rotor, and both reach equilibrium, and the inside gas of thrust ware can realize the circulation to suspend the rotor, the clearance between rotor and flow controller reaches micron order thickness.
During the use, carry high-pressure gas to between rotor and the throttle through going up thrust throttle and thrust throttle down, make to be full of gas between rotor and the throttle, rely on high-pressure gas to make the rotor float and support, the throttle can be according to the change of whole external load, and automatically regulated pressure goes up the thrust throttle and has a plurality of sealing washers from top to bottom, guarantees whole device leakproofness. As shown in fig. 11, the air flow diagram for the choke supporting the suspension rotor.
And then the magnetic steel control coil is electrified, the magnetic steel rotates at a high speed due to the electromagnetic interaction, so that the rotor is driven to rotate, the upper surface of the rotor is connected with the mounting disc through a screw, and the mounting disc is used for limiting the axial displacement of the magnetic steel and preventing the magnetic steel from flying out due to axial force. The rotating speed sensor can monitor the rotating speed of the rotor in real time, and the current of the coil is adjusted by monitoring the rotating speed, so that the rotating speed of the rotor is adjusted.
After the piezoelectric scanning platform is stably rotated, the piezoelectric scanning platform can be electrified, the piezoelectric scanning platform is rigidly connected with the throttle sleeve through the bolt, and after the piezoelectric scanning platform is electrified, the whole piezoelectric scanning platform can be longitudinally extended, so that the whole device in the throttle sleeve is pushed to linearly move, and micro-nano level linear motion is realized.
Therefore, the compound motion of the straight line and the rotation of the high-speed spindle is achieved, and the ultra-precision machining of a complex microstructure can be realized.
The throttle sleeve plays a role in sealing protection, and the front cover plate and the shell have a function of protecting and preventing dust for the whole device.
The magnetic steel is fixed with the rotor (air bearing) into a whole by utilizing magnetic force, a plurality of turns of coils are wound around the magnetic steel, and after the coils are electrified, the magnetic steel can rotate at high speed due to electromagnetic interaction, so that the rotor is driven to rotate. Different from the prior motor drive, the rotor is supported by air pressure and electromagnetic pressure together without direct contact, and has the advantages of high rotation precision, low operation noise and no oil pollution.
The high-speed main shaft integrates rotary motion and linear motion, so that the rigidity of the processing shaft is increased; the upper end piezoelectric scanning table is driven to control the precision machining at will, and meanwhile, the rotating speed of the rotor is controlled by using the rotating speed sensor, so that the micron-level high-precision machining is realized; compared with the traditional processing main shaft, the processing precision is high, the processing process is noiseless, the risk of oil pollution is avoided, the abrasion is reduced, and the service life of the rotor is prolonged.
The above description is only for the purpose of illustrating the technical solutions of the present invention and not for the purpose of limiting the same, and other modifications or equivalent substitutions made by those skilled in the art to the technical solutions of the present invention should be covered within the scope of the claims of the present invention without departing from the spirit and scope of the technical solutions of the present invention.
Claims (9)
1. An axial feeding and rotating apparatus for ultra-precision machining, characterized in that: the high-speed spindle comprises a high-speed spindle body and a linear driving mechanism, wherein the high-speed spindle body comprises a shell (1), a restrictor sleeve (2), a rotor (3), an upper thrust restrictor (4) and a lower thrust restrictor (5), the restrictor sleeve (2) comprises a large-diameter cylinder at the upper end and a small-diameter cylinder at the lower end, a first step groove (201) is axially arranged in the middle-upper section of the large-diameter cylinder, and the center of the lower end face of the first step groove (201) is communicated with a sleeve shaft hole (202); the linear driving mechanism adopts a piezoelectric scanning table (6), and the piezoelectric scanning table (6) is fixedly connected to the upper end face of the large-diameter cylinder;
the upper thrust restrictor (4) comprises a bottom connecting seat and an upper end throttling section, the upper end throttling section is arranged in the sleeve shaft hole (202), a backing ring (7) is arranged between the lower end face of the bottom connecting seat and an outer ring of the upper end face of the lower thrust restrictor (5), the backing ring (7) and the upper thrust restrictor (4) are fixedly connected to the lower end face of the small-diameter cylinder through fastening screws (8), and the shell (1) is connected to the outer portions of the lower thrust restrictor (5), the backing ring (7), the upper thrust restrictor (4) and the small-diameter cylinder in a matched mode;
the rotor (3) is arranged in rotor holes arranged in the upper thrust restrictor (4) and the lower thrust restrictor (5), magnetic steel (9) is sleeved on the outer edge of the rotor (3) positioned at the upper end of the rotor hole, and an annular coil (10) connected in the first step groove (201) is correspondingly arranged outside the magnetic steel (9); the lower part of the rotor (3) is provided with a flange disc structure (301), and the flange disc structure (301) is correspondingly arranged in a cavity formed by the lower end face of the bottom connecting seat and an inner ring of the upper end face of the lower thrust restrictor (5);
a plurality of pressure holes which are communicated with each other and provide axial suspension support for the rotor (3) are axially arranged on the upper thrust restrictor (4) and the lower thrust restrictor (5), and a radial vent hole communicated with the pressure holes is arranged on the upper end throttling section of the upper thrust restrictor (4).
2. An axial feed and rotation device for ultraprecision machining according to claim 1, characterized in that: the inner parts of the upper thrust restrictor (4) and the lower thrust restrictor (5) are axially and respectively provided with an upper thrust rotor hole (401) and a lower thrust rotor hole (501) which have the same aperture, and a plurality of upper thrust pressure holes (402) and lower thrust pressure holes (502) which have the same aperture and are radially communicated are uniformly distributed on the outer parts of the upper thrust rotor hole (401) and the lower thrust rotor hole (501) along the circumferential direction; a lower thrust first air inlet hole (503) communicated with the lower thrust pressure hole (502) and a lower thrust second air inlet hole (504) communicated with the lower thrust rotor hole (501) are respectively arranged on the outer side surface of the lower thrust restrictor (5), lower thrust side air vents (505) are respectively communicated between the lower thrust first air inlet hole (503) and the lower thrust second air inlet hole (504) and the upper end surface of the lower thrust restrictor (5), and the lower thrust pressure hole (502) is communicated with the upper end surface of the lower thrust restrictor (5);
an upper thrust air inlet hole (403) communicated with the upper thrust force hole (402) and an upper thrust air hole (404) communicated with the upper thrust rotor hole (401) are respectively formed in the side face of the bottom connecting seat of the upper thrust restrictor (4), upper thrust side air vents (405) are respectively communicated between the upper thrust air inlet hole (403), the upper thrust air hole (404) and the lower end face of the bottom connecting seat, and axial communication holes (406) are communicated between the upper thrust air hole (404) and the upper end face of the upper end throttling section; a middle air outlet hole (407) communicated with the axial communication hole (406) is formed in the side face of the outer end of the middle of the upper end throttling section, a plurality of rows of radial vent holes (408) uniformly distributed in the circumferential direction are formed in the side faces of the outer ends of the upper portion and the lower portion of the upper end throttling section, the upper end of the upper stop pushing pressure hole (402) is communicated with a row of radial vent holes (408) close to the bottom connecting seat, and the lower end of the upper stop pushing pressure hole is communicated with the lower bottom face of the bottom connecting seat; the upper thrust pressure hole (402) and the upper thrust side vent hole (405) in the upper thrust restrictor (4) correspond to the lower thrust pressure hole (502) and the thrust side vent hole (505) in the lower thrust restrictor (5) in one-to-one correspondence.
3. An axial feed and rotation device for ultraprecision machining according to claim 2, characterized in that: a protruding ring groove (409) is formed in the outer edge of the top of the upper end throttling section, a rotating gap is formed between the outer edge of the upper end throttling section at the lower end of the protruding ring groove (409) and the sleeve shaft hole (202), and rotating gaps are formed among the upper thrust rotor hole (401), the lower thrust rotor hole (501) and the rotor (3); a sleeve air inlet (203) communicated with a sleeve shaft hole (202) is radially arranged on the outer side surface of the lower section of the large-diameter cylinder; an upper thrust pressure hole (402) and an upper thrust side vent hole (405) in the upper thrust restrictor (4), a lower thrust pressure hole (502) and a thrust side vent hole (505) in the lower thrust restrictor (5) form a supporting force for providing axial suspension for the rotor (3); and a middle air outlet hole (407) and a radial vent hole (408) in the upper thrust restrictor (4) and a sleeve air inlet hole (203) in the restrictor sleeve (2) form a supporting force for providing radial suspension for the rotor (3).
4. An axial feed and rotation device for ultra-precision machining according to claim 3, characterized in that: the bottom outer edge of the upper end throttling section is provided with a groove (410) corresponding to the groove depth in the middle of the protruding ring groove (409), and the protruding ring groove (409) and the groove (410) are connected with the sleeve shaft hole (202) in a sealing mode through a sealing ring (11).
5. An axial feed and rotation device for ultraprecision machining according to claim 1, characterized in that: a plurality of sleeve counter bores (204) are uniformly distributed on the lower end face of the small-diameter cylinder at the lower end of the restrictor sleeve (2) along the circumferential direction, and an upper thrust bolt hole (411), a lower thrust bolt hole (506) and a cushion ring bolt hole are respectively arranged on the bottom connecting seat of the upper thrust restrictor (4), the lower thrust restrictor (5) and the cushion ring (7) corresponding to the sleeve counter bores (204); bolt holes in the lower thrust restrictor (5), the backing ring (7) and the upper thrust restrictor (4) are sequentially and fixedly connected into a plurality of sleeve counter bores (204) in the restrictor sleeve (2) through fastening screws (8).
6. An axial feed and rotation device for ultra-precision machining according to claim 1 or 5, characterized in that: a plurality of sleeve through holes (205) are uniformly distributed on the upper end annular surface of the large-diameter barrel at the upper end of the throttle sleeve (2) along the circumferential direction, and the piezoelectric scanning table (6) is fixedly connected with the sleeve through holes (205) in the throttle sleeve (2) through bolts; and a second step groove (206) communicated with the first step groove (201) is formed in the inner ring surface of the upper end of the large-diameter cylinder, and a rotating speed sensor (12) electrically connected with the piezoelectric scanning table (6) is connected to the second step groove (206) through a bolt.
7. An axial feed and rotation device for ultraprecision machining according to claim 5, characterized in that: a plurality of lower thrust threaded through holes (507) are uniformly distributed on the end face of the lower thrust restrictor (5) along the circumferential direction, the lower thrust threaded through holes (507) and the lower thrust threaded through holes (506) are distributed at intervals, a front cover plate (13) is arranged on the lower end face of the lower thrust restrictor (5), and the front cover plate (13) is fixedly connected in the lower thrust threaded through holes (507) through bolts; the lower end face of the lower thrust restrictor (5) is also provided with a double-ring groove (508), the middle part of the double-ring groove (508) is communicated with the lower thrust pressure hole (502), and the double-ring groove (508) is in sealing connection with the front cover plate (13) through a sealing ring (11).
8. An axial feed and rotation device for ultra-precision machining according to claim 1, characterized in that: the upper portion of rotor (3) still is provided with restriction magnet steel (9) axial displacement's mounting disc (14), and mounting disc (14) pass through screw fixed connection on the up end of rotor (3).
9. An axial feed and rotation device for ultraprecision machining according to claim 1, characterized in that: the piezoelectric scanning platform (6) comprises an upper connecting plate (601), a lower connecting plate (602) and a plurality of piezoelectric actuators (603), the piezoelectric actuators (603) are fixedly connected between the upper connecting plate (601) and the lower connecting plate (602) in an adhesion mode, and the lower connecting plate (602) and the throttle sleeve (2) are fixedly connected through bolts.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202210090365.2A CN114310427B (en) | 2022-01-26 | 2022-01-26 | Axial feeding and rotating device for ultra-precision machining |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202210090365.2A CN114310427B (en) | 2022-01-26 | 2022-01-26 | Axial feeding and rotating device for ultra-precision machining |
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| CN114310427B true CN114310427B (en) | 2023-04-07 |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JPS59106722A (en) * | 1982-12-10 | 1984-06-20 | Matsushita Electric Ind Co Ltd | Static-pressure gas bearing apparatus |
| DE69423483D1 (en) * | 1994-06-29 | 2000-04-20 | Pe Mac S P A Fa | Chuck especially for working marble and the like |
| KR20140058271A (en) * | 2012-11-06 | 2014-05-14 | 현대위아 주식회사 | Head stock having function drawing off the workpiece |
| CN103286679B (en) * | 2013-06-17 | 2015-12-02 | 东南大学 | A kind of ultrahigh speed air bearing electric main-shaft |
| CN103991029B (en) * | 2014-05-30 | 2017-06-13 | 广州市昊志机电股份有限公司 | A kind of grinding electric main shaft |
| CN105458915B (en) * | 2015-11-12 | 2018-08-17 | 广州市昊志机电股份有限公司 | A kind of high-speed air floatation glass grinding electro spindle |
| CN108941623B (en) * | 2018-01-02 | 2024-04-16 | 中国计量大学 | Composite throttling type static pressure air floatation electric spindle |
| CN112059902A (en) * | 2020-08-18 | 2020-12-11 | 广州市昊志机电股份有限公司 | Air-floatation motorized spindle and grinding machine tool |
| CN113894300B (en) * | 2021-10-26 | 2022-08-05 | 中国工程物理研究院机械制造工艺研究所 | Porous and micropore combined throttling gas static pressure turning electric spindle |
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