CN114308961A - Rotating mechanism in cleaning tank - Google Patents
Rotating mechanism in cleaning tank Download PDFInfo
- Publication number
- CN114308961A CN114308961A CN202111517014.7A CN202111517014A CN114308961A CN 114308961 A CN114308961 A CN 114308961A CN 202111517014 A CN202111517014 A CN 202111517014A CN 114308961 A CN114308961 A CN 114308961A
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- Prior art keywords
- rotating shafts
- shaft
- groove
- elliptical
- flower
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- 238000004140 cleaning Methods 0.000 title claims abstract description 25
- 230000007246 mechanism Effects 0.000 title claims abstract description 9
- 238000005406 washing Methods 0.000 claims description 19
- 239000007788 liquid Substances 0.000 claims description 17
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract description 36
- 229910052710 silicon Inorganic materials 0.000 abstract description 36
- 239000010703 silicon Substances 0.000 abstract description 36
- 235000012431 wafers Nutrition 0.000 description 14
- 238000004519 manufacturing process Methods 0.000 description 3
- 244000309464 bull Species 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 125000004122 cyclic group Chemical group 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 239000000725 suspension Substances 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
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- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The invention discloses a rotating mechanism in a cleaning tank, which structurally comprises the cleaning tank, the interior of the cleaning tank is divided into a fixed groove and a cleaning solution groove from left to right, a fixed frame is arranged in the cleaning solution groove, a plurality of flower baskets are arranged in the fixed frame in a suspended manner at the top, two rotatable rotating shafts are arranged at the bottom of the fixed frame, the flower baskets are positioned right above the rotating shafts, the arrangement direction of the flower baskets is consistent with the extension of the rotating shafts, the two rotating shafts are parallel to each other, a placing groove is formed between the two rotating shafts, the placing groove is communicated with the interior of the flower baskets, a driving piece for synchronously driving the two rotating shafts to rotate is arranged in the fixed groove, an elliptical shaft is sleeved on the rotating shafts, the center of the elliptical shaft is superposed with the center of the rotating shafts, when the rotating shafts drive the elliptical shaft to rotate, the long shaft of the elliptical shaft circularly extends into the interior of the flower baskets, and the short shaft of the elliptical shaft is always positioned below the flower baskets, the invention improves the cleaning effect of the silicon wafer.
Description
The technical field is as follows:
the invention relates to the technical field of production of silicon wafer cleaning equipment, in particular to a rotating mechanism in a cleaning tank.
Background art:
the silicon element with the content of 25.8 percent in the crust provides an inexhaustible source for the production of monocrystalline silicon. Since silicon is one of the most abundant elements in the earth crust, for a product such as a solar cell which is destined to enter a large-scale market, the advantage of the reserve is also one of the reasons that silicon becomes a main material of photovoltaic, and a chip made of silicon wafers is a famous "Shen calculator" and has remarkable computing power.
In the manufacturing process of the silicon wafer, elemental silicon is firstly refined, the refined elemental silicon is manufactured into the silicon wafer, the silicon wafer needs to be cleaned after the silicon wafer is produced, and subsequent application is facilitated.
The invention content is as follows:
it is an object of the present invention to provide a rotary mechanism within a sink that addresses one or more of the above-mentioned problems of the prior art.
In order to solve the above technical problems, the present invention provides a rotating mechanism in a cleaning tank, which comprises a cleaning tank, and has the following innovation points: the inside of the washing tank is divided into a fixed groove and a washing liquid groove from left to right, a fixed frame is arranged inside the washing liquid groove, a plurality of flower baskets are arranged in the top of the fixed frame in a hanging mode, two rotatable rotating shafts are arranged at the bottom of the fixed frame, the flower baskets are located right above the rotating shafts, the arrangement direction of the flower baskets is consistent with the extension of the rotating shafts, the two rotating shafts are parallel to each other, a placing groove is formed between the two rotating shafts, the placing groove is communicated with the inside of the flower baskets, and a driving piece for synchronously driving the two rotating shafts to rotate is arranged inside the fixed groove;
the cover is equipped with the elliptical axis on the rotation axis, and the center of elliptical axis and the center coincidence of rotation axis, rotation axis drive elliptical axis when rotating, the major axis circulation of elliptical axis stretches into the inside of basket of flowers and the minor axis of elliptical axis is located the below of basket of flowers all the time.
Furthermore, a closed conical groove is formed in the bottom of the washing liquid tank, four supporting legs are arranged on four inner walls of the washing liquid tank respectively and are located at the joint of the conical groove and the washing liquid tank, the fixing frame is fixedly suspended on the supporting legs, and the inside of the conical groove is communicated with the inside of the flower basket.
Further, above-mentioned driving piece is including setting up the pinion at two swivel axes tip respectively, the horizontal pole, and rotate the montant that sets up in the fixed slot inside, fixed frame's lateral wall is equipped with the fixed plate, the tip of rotation axis is rotated and is set up on the fixed plate and pinion rotation sets up on the fixed plate, the one end of horizontal pole is rotated and is set up on the fixed plate and be equipped with the gear wheel, gear wheel and two pinion synchromesh, the other end of horizontal pole extends in the inside of fixed slot and is equipped with conical gear a, the bottom of montant is equipped with conical gear b, conical gear a and conical gear b mesh are connected, the top of montant is equipped with conical gear c, the outer wall of fixed slot is equipped with rotatable conical gear d, conical gear d and conical gear c mesh are connected.
The invention has the beneficial effects that: in the rotation process of elliptical shaft, the major axis of elliptical shaft can circulate the inside of stretching into the basket of flowers, this kind of setting can make oval-shaped major axis can circulate and promote the silicon chip, when the major axis of elliptical shaft stretches into the inside of basket of flowers, the silicon chip is withstood by the major axis of elliptical shaft, thereby make the silicon chip be in the highest position in the inside of basket of flowers, the inside of basket of flowers is kept away from to the major axis of elliptical shaft, the silicon chip is withstood by the minor axis of elliptical shaft, oval-shaped minor axis is located the below of basket of flowers all the time, thereby make the silicon chip be in the lowest position in the inside of basket of flowers, and the cyclic variation of this kind of high low position of silicon chip, the dynamic change can appear in the contact point between silicon chip and the basket of flowers, and make certain gradient appear in the inside of basket of silicon chip, thereby the washing blind area of silicon chip and basket contact point has been avoided, the cleaning performance at the silicon chip is improved.
Description of the drawings:
fig. 1 is an isometric view of the present invention.
Fig. 2 is a top cross-sectional view of the present invention.
Fig. 3 is a perspective view of the driving member of the present invention.
Figure 4 is a side cross-sectional view of an elliptical shaft of the present invention at the axis of rotation.
The specific implementation mode is as follows:
for the purpose of enhancing the understanding of the present invention, the present invention will be further described in detail with reference to the following examples and the accompanying drawings, which are only used for explaining the present invention and are not to be construed as limiting the scope of the present invention.
Fig. 1 to 4 show a specific embodiment of the present invention, which structurally includes a cleaning tank 1, the interior of the cleaning tank 1 is divided into a fixed groove 2 and a cleaning solution groove 3 from left to right, a fixed frame 4 is disposed inside the cleaning solution groove 3, a plurality of flower baskets 100 are suspended and arranged on the top of the fixed frame 4, two rotatable rotating shafts 5 are disposed at the bottom of the fixed frame 4, the flower baskets 100 are located right above the rotating shafts 5, the arrangement direction of the plurality of flower baskets 100 is consistent with the extension of the rotating shafts 5, two rotating shafts 5 are parallel to each other and form a placing groove 101 therebetween, the placing groove 101 is communicated with the interior of the flower baskets 100, and a driving member 6 for synchronously driving the two rotating shafts 5 to rotate is disposed inside the fixed groove 2;
the rotating shaft 5 is sleeved with an elliptical shaft 102, the center of the elliptical shaft 102 coincides with the center of the rotating shaft 5, and when the rotating shaft 5 drives the elliptical shaft 102 to rotate, the long shaft of the elliptical shaft 102 circularly extends into the inside of the flower basket 100 and the short shaft of the elliptical shaft 102 is always located below the flower basket 100.
In the invention, the working principle of silicon wafer cleaning is as follows: putting silicon wafers to be cleaned into a flower basket 100, placing positions at the bottoms of the silicon wafers are arranged on a placing groove 101 side by side one by side, feeding cleaning liquid into a cleaning liquid groove 3 until the cleaning liquid is immersed into the flower basket 100, fully immersing the silicon wafers in the cleaning liquid, opening a driving part 6, simultaneously driving two rotating shafts 5 to rotate by the driving part 6, simultaneously driving an elliptical shaft 102 to rotate by the rotation of the rotating shafts 5, in the rotating process of the elliptical shaft 102, a long shaft of the elliptical shaft 102 circularly extends into the flower basket 100, so that the elliptical long shaft circularly pushes the silicon wafers, when the long shaft of the elliptical shaft 102 extends into the flower basket 100, the silicon wafers are propped by the long shaft of the elliptical shaft 102, so that the silicon wafers are positioned at the highest position in the flower basket 100, when the long shaft of the elliptical shaft 102 is far away from the flower basket 100, the silicon wafers are propped by the short shaft of the elliptical shaft 102, and the elliptical short shaft is always positioned below the flower basket 100, thereby make the silicon chip be in the extreme low position in basket for flowers 100's inside, and the cyclic variation of this kind of height position of silicon chip can make the contact point between silicon chip and the basket for flowers 100 appear dynamic change to make the silicon chip certain gradient appear in the inside of basket for flowers 100, thereby avoided the washing blind area of silicon chip and basket for flowers 100 contact point, improved the cleaning performance that the silicon chip is at.
In the present invention, preferably, a closed conical groove 7 is provided at the bottom of the washing liquid tank 3, four supporting legs 31 are provided on four inner walls of the washing liquid tank 3, the supporting legs 31 are located at the connection position of the conical groove 7 and the washing liquid tank 3, the fixing frame 4 is suspended and fixed on the supporting legs 31, and the inside of the conical groove 7 is communicated with the inside of the flower basket 100.
In the invention, the setting of the tapered groove 7 can play a role of avoiding the rotation of the elliptical shaft 102, so that the rotation shaft 5 can freely drive the elliptical shaft 102 to rotate, and the setting of the four supporting legs 31 respectively fixes the four corners of the fixed frame 4, thereby ensuring the suspension stability of the fixed frame 4.
In the present invention, as a preferable scheme, the driving member 6 includes pinions 61, a cross bar 62 and a vertical bar 63 rotatably disposed inside the fixing groove 2, the fixing plate 41 is disposed on a side wall of the fixing frame 4, an end of the rotating shaft 5 is rotatably disposed on the fixing plate 41, the pinions 61 are rotatably disposed on the fixing plate 41, one end of the cross bar 62 is rotatably disposed on the fixing plate 41 and is provided with a bull gear 621, the bull gear 621 and the two pinions 61 are synchronously engaged, the other end of the cross bar 62 extends inside the fixing groove 2 and is provided with a bevel gear a622, the bottom of the vertical bar 63 is provided with a bevel gear b631, the bevel gear a622 and the bevel gear b631 are engaged, the top of the vertical bar 63 is provided with a bevel gear c632, the outer wall of the fixing groove 2 is provided with a rotatable bevel gear d21, and the bevel gear d21 and the bevel gear c632 are engaged.
In the present invention, the operating principle of the driving member 6 is as follows: under external rotating electrical machines's drive, drive conical gear d21 and rotate, conical gear d21 drives conical gear c632 and rotates to drive montant 63 and rotate, conical gear b631 drives conical gear a622 and rotates afterwards, thereby drives horizontal pole 62 and rotates, and horizontal pole 62 drives gear wheel 621 and rotates, thereby realizes driving two pinions 61 and rotates, and then realizes driving two rotation axes 5 and carry out synchronous rotation.
It will be understood by those skilled in the art that the present invention is not limited to the embodiments described above, which are described in the specification and illustrated only to illustrate the principle of the present invention, but that various changes and modifications may be made therein without departing from the spirit and scope of the present invention, which fall within the scope of the invention as claimed. The scope of the invention is defined by the appended claims and equivalents thereof.
Claims (3)
1. The utility model provides a rotary mechanism in washing tank, its structure includes washing tank (1), its characterized in that: the inside of the washing tank (1) is divided into a fixing groove (2) and a washing liquid groove (3) from left to right, a fixing frame (4) is arranged inside the washing liquid groove (3), a plurality of flower baskets (100) are arranged at the top of the fixing frame (4) in a suspended mode, two rotatable rotating shafts (5) are arranged at the bottom of the fixing frame (4), the flower baskets (100) are located right above the rotating shafts (5), the arrangement direction of the flower baskets (100) is consistent with the extension of the rotating shafts (5), the two rotating shafts (5) are parallel to each other, a placing groove (101) is formed between the two rotating shafts (5), the placing groove (101) is communicated with the inside of the flower baskets (100), and a driving piece (6) for synchronously driving the two rotating shafts (5) to rotate is arranged inside the fixing groove (2);
the flower basket is characterized in that an elliptical shaft (102) is sleeved on the rotating shaft (5), the center of the elliptical shaft (102) is overlapped with the center of the rotating shaft (5), the rotating shaft (5) drives the elliptical shaft (102) to rotate, the long shaft of the elliptical shaft (102) circularly extends into the inside of the flower basket (100), and the short shaft of the elliptical shaft (102) is always located below the flower basket (100).
2. The rotary mechanism in a cleaning tank of claim 1, wherein: the bottom of washing liquid groove (3) is equipped with confined bell jar (7), four inner walls of washing liquid groove (3) are equipped with four supporting legs (31) respectively, supporting legs (31) are located bell jar (7) with the junction of washing liquid groove (3), fixed frame (4) hang and fix on supporting legs (31), the inside of bell jar (7) with the inside of basket of flowers (100) is linked together.
3. The rotary mechanism in a cleaning tank of claim 1, wherein: driving piece (6) is including setting up respectively two pinion (61), horizontal pole (62) and the rotation setting of rotation axis (5) tip are in the inside montant (63) of fixed slot (2), the lateral wall of fixed frame (4) is equipped with fixed plate (41), the tip of rotation axis (5) is rotated and is set up on fixed plate (41) and pinion (61) rotate and set up on fixed plate (41), the one end of horizontal pole (62) is rotated and is set up on fixed plate (41) and be equipped with gear wheel (621), gear wheel (621) and two pinion (61) synchromesh, the other end of horizontal pole (62) extends in the inside of fixed slot (2) and be equipped with conical gear a (622), the bottom of montant (63) is equipped with conical gear b (631), conical gear a (622) with conical gear b (631) meshing connection, the top of montant (63) is equipped with conical tooth wheel c (632), the outer wall in fixed slot (2) is equipped with rotatable conical tooth wheel d (21), conical tooth wheel d (21) with conical tooth wheel c (632) meshing connects.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111517014.7A CN114308961A (en) | 2021-12-13 | 2021-12-13 | Rotating mechanism in cleaning tank |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111517014.7A CN114308961A (en) | 2021-12-13 | 2021-12-13 | Rotating mechanism in cleaning tank |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN114308961A true CN114308961A (en) | 2022-04-12 |
Family
ID=81051218
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202111517014.7A Pending CN114308961A (en) | 2021-12-13 | 2021-12-13 | Rotating mechanism in cleaning tank |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN114308961A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114823433A (en) * | 2022-06-28 | 2022-07-29 | 江苏英思特半导体科技有限公司 | Rotary cleaning tank mechanism for cleaning silicon wafer and silicon wafer rotating method |
| CN117976583B (en) * | 2024-03-29 | 2024-05-28 | 江苏英思特半导体科技有限公司 | Automatic grabbing and cleaning equipment for silicon wafer flower basket |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08103740A (en) * | 1994-10-04 | 1996-04-23 | Akira Ito | Vibrating cleaning device |
| CN201470637U (en) * | 2009-05-12 | 2010-05-19 | 耿彪 | Rotating groove for cleaning silicon chips |
| US20170143180A1 (en) * | 2015-11-19 | 2017-05-25 | General Electric Company | Single Drive Axis Motor for a Dishwasher Spray System |
| CN208879223U (en) * | 2018-10-10 | 2019-05-21 | 宁夏银和半导体科技有限公司 | Monocrystalline detects print cleaning device |
| CN210586151U (en) * | 2019-08-08 | 2020-05-22 | 天津亿百利塑料制品有限公司 | Cleaning machine is moved in throwing of plastic injection molding |
| CN212664353U (en) * | 2020-07-20 | 2021-03-09 | 何林 | Gastroenterology scope belt cleaning device |
-
2021
- 2021-12-13 CN CN202111517014.7A patent/CN114308961A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08103740A (en) * | 1994-10-04 | 1996-04-23 | Akira Ito | Vibrating cleaning device |
| CN201470637U (en) * | 2009-05-12 | 2010-05-19 | 耿彪 | Rotating groove for cleaning silicon chips |
| US20170143180A1 (en) * | 2015-11-19 | 2017-05-25 | General Electric Company | Single Drive Axis Motor for a Dishwasher Spray System |
| CN208879223U (en) * | 2018-10-10 | 2019-05-21 | 宁夏银和半导体科技有限公司 | Monocrystalline detects print cleaning device |
| CN210586151U (en) * | 2019-08-08 | 2020-05-22 | 天津亿百利塑料制品有限公司 | Cleaning machine is moved in throwing of plastic injection molding |
| CN212664353U (en) * | 2020-07-20 | 2021-03-09 | 何林 | Gastroenterology scope belt cleaning device |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114823433A (en) * | 2022-06-28 | 2022-07-29 | 江苏英思特半导体科技有限公司 | Rotary cleaning tank mechanism for cleaning silicon wafer and silicon wafer rotating method |
| CN114823433B (en) * | 2022-06-28 | 2022-09-02 | 江苏英思特半导体科技有限公司 | Rotary cleaning tank mechanism for cleaning silicon wafer and silicon wafer rotating method |
| CN117976583B (en) * | 2024-03-29 | 2024-05-28 | 江苏英思特半导体科技有限公司 | Automatic grabbing and cleaning equipment for silicon wafer flower basket |
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| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20220412 |