CN207563318U - A kind of slicing single crystal silicon production cleaning device - Google Patents

A kind of slicing single crystal silicon production cleaning device Download PDF

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Publication number
CN207563318U
CN207563318U CN201721259864.0U CN201721259864U CN207563318U CN 207563318 U CN207563318 U CN 207563318U CN 201721259864 U CN201721259864 U CN 201721259864U CN 207563318 U CN207563318 U CN 207563318U
Authority
CN
China
Prior art keywords
babinet
welded
disk
single crystal
crystal silicon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201721259864.0U
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Chinese (zh)
Inventor
曹曙光
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Funing Xun Peng New Mstar Technology Ltd
Original Assignee
Funing Xun Peng New Mstar Technology Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Funing Xun Peng New Mstar Technology Ltd filed Critical Funing Xun Peng New Mstar Technology Ltd
Priority to CN201721259864.0U priority Critical patent/CN207563318U/en
Application granted granted Critical
Publication of CN207563318U publication Critical patent/CN207563318U/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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  • Processing Of Stones Or Stones Resemblance Materials (AREA)

Abstract

The utility model discloses a kind of slicing single crystal silicon production cleaning devices, including pedestal, the top outer wall quadrangle of the pedestal is welded with the supporting rack of L-shaped structure, the bottom end of support frame as described above is connected with sucker, the top outer wall of the pedestal has been screwed babinet, and the top of babinet is hatch frame, capping is socketed at the top of the babinet, the top exterior walls of the capping are welded with installs case, the bottom interior wall of the installs case is connected with accumulator, the bottom interior wall of the capping has been screwed the second hydraulic cylinder, the bottom end of second hydraulic cylinder is welded with connecting plate, and the bottom end of connecting plate has been screwed motor.The utility model is simple in structure, entirely designs some bonding agents, organic matter and the silica flour that the surface of monocrystalline silicon piece is adhered to and is quickly cleaned so that physics and chemical cleaning method are carried out at the same time, and accelerate the speed of cleaning, improve working efficiency.

Description

A kind of slicing single crystal silicon production cleaning device
Technical field
The utility model is related to cleaning technique field more particularly to a kind of slicing single crystal silicon production cleaning devices.
Background technology
Monocrystalline silicon piece is a kind of crystal with basic complete lattice structure, and different directions has different property, It is a kind of good semiconducting material, is widely used in manufacture semiconductor devices, solar cell etc., monocrystalline silicon is that a kind of comparison is active Nonmetalloid, be crystalline material important component, the forward position in new material development.Its main application is used as half Conductor material and utilization solar energy power generating, heat supply etc..Since solar energy has cleaning, environmental protection, many advantages such as facilitates, closely Over 30 years, solar utilization technique researching and developing, commercially produce, tremendous development is all obtained in terms of market development, into For the world is quick, one of new industry of stable development.And monocrystalline silicon piece is then by being processed on the orderly slave silicon rod of slicer Out, the surface of monocrystalline silicon piece can be attached with bonding agent, organic matter and silica flour after cutting, if such substance not removed, shadow The performance of monocrystalline silicon piece is rung, existing cleaning device is complicated, and physics and chemistry side are taken for different substances The mode of method substep cleaning, the speed for leading to cleaning is slow, influences working efficiency.
Utility model content
The purpose of this utility model is and a kind of slicing single crystal silicon proposed in order to solve shortcoming in the prior art Production cleaning device.
To achieve these goals, the utility model employs following technical solution:
A kind of slicing single crystal silicon production cleaning device, including pedestal, the top outer wall quadrangle of the pedestal is welded with L The supporting rack of shape structure, the bottom end of support frame as described above are connected with sucker, and the top outer wall of the pedestal has been screwed case Body, and the top of babinet is hatch frame, is socketed with capping at the top of the babinet, the top exterior walls of the capping are welded with peace Vanning, the bottom interior wall of the installs case are connected with accumulator, and the bottom interior wall of the capping has been screwed the second liquid Compressing cylinder, the bottom end of second hydraulic cylinder are welded with connecting plate, and the bottom end of connecting plate has been screwed motor, institute The output shaft for stating motor is welded with horizontally disposed disk, and the bottom outer wall of the disk is welded with equally distributed banister brush, The side inner wall of the babinet is welded with baffle, and the opposite side inner wall of the babinet has been screwed the first hydraulic cylinder, First hydraulic cylinder is welded with the stripper plate being vertically arranged close to one end of baffle, and the bottom interior wall of the babinet passes through spiral shell Silk is fixed with auxiliary-motor, and the output shaft of auxiliary-motor is connected with secondary disk by connecting plate, and the top exterior walls of the pair disk are glued It is connected to the banister brush equidistantly distributed.
Preferably, the motor is connected with switch by conducting wire, and switch is connected by conducting wire with accumulator.
Preferably, the disk is identical with the diameter of secondary disk, and disk and secondary disk are located at same vertical plane, disk with Secondary disk is respectively positioned between baffle and stripper plate.
Preferably, first hydraulic cylinder and the second hydraulic cylinder are connected with first switch, and by conducting wire respectively One switch is connected with controller, the model DATA-7311 of controller by conducting wire.
Preferably, the inside of the babinet is filled with chemical cleaning medicament, and the liquid level of chemical cleaning medicament is located at baffle The lower section on top.
Preferably, the junction of the capping and babinet is equipped with sealing ring.
The beneficial effects of the utility model are:The utility model is simple in structure, is fixed on the ground pedestal by sucker, Slicing single crystal silicon to be cleaned is placed horizontally in the top of secondary disk, passes through the effect of the first hydraulic cylinder so that stripper plate to It is close baffle, is slightly fixed slicing single crystal silicon with this, then capping is sleeved on babinet so that slicing single crystal silicon is located at disk Between secondary disk, start motor and auxiliary-motor so that two banister brush are rotatably assorted chemical cleaning medicament to monocrystalline simultaneously Silicon slice carries out Rapid Cleaning, and entire design is so that some bonding agents, organic matter and the silica flour of the surface attachment of monocrystalline silicon piece can To be quickly cleaned so that physics and chemical cleaning method are carried out at the same time, and accelerate the speed of cleaning, improve working efficiency.
Description of the drawings
Fig. 1 be the utility model proposes a kind of slicing single crystal silicon production cleaning device structure diagram;
Fig. 2 be the utility model proposes a kind of slicing single crystal silicon production cleaning device partial structural diagram.
In figure:1 sucker, 2 supporting racks, 3 pedestals, 4 babinets, 5 first hydraulic cylinders, 6 stripper plates, 7 cappings, 8 motors, 9 Two hydraulic cylinders, 10 accumulators, 11 installs cases, 12 disks, 13 fur items, 14 baffles.
Specific embodiment
The following is a combination of the drawings in the embodiments of the present utility model, and the technical scheme in the embodiment of the utility model is carried out It clearly and completely describes, it is clear that the described embodiments are only a part of the embodiments of the utility model rather than whole Embodiment.
With reference to Fig. 1-2, a kind of slicing single crystal silicon production cleaning device, including pedestal 3, the top outer wall quadrangle of pedestal 3 The supporting rack 2 of L-shaped structure is welded with, the bottom end of supporting rack 2 is connected with sucker 1, and the top outer wall of pedestal 3 is screwed There is a babinet 4, and the top of babinet 4 is hatch frame, the top of babinet 4 is socketed with capping 7, covers 7 top exterior walls and is welded with Installs case 11, the bottom interior wall of installs case 11 are connected with accumulator 10, and the bottom interior wall for covering 7 has been screwed the second liquid Compressing cylinder 9, the bottom end of the second hydraulic cylinder 9 are welded with connecting plate, and the bottom end of connecting plate has been screwed motor 8, electricity The output shaft of machine 8 is welded with horizontally disposed disk 12, and the bottom outer wall of disk 12 is welded with equally distributed banister brush 13, case The side inner wall of body 4 is welded with baffle 14, and the opposite side inner wall of babinet 4 has been screwed the first hydraulic cylinder 5, the first liquid Compressing cylinder 5 is welded with the stripper plate 6 being vertically arranged close to one end of baffle 14, and the bottom interior wall of babinet 4 has been screwed Auxiliary-motor, and the output shaft of auxiliary-motor is connected with secondary disk by connecting plate, the top exterior walls of secondary disk are bonded with equidistant point The banister brush 13 of cloth.
In the utility model, motor 8 is connected with switch by conducting wire, and switchs and connected by conducting wire and accumulator 10, circle Disk 12 is identical with the diameter of secondary disk, and disk 12 and secondary disk are located at same vertical plane, and disk 12 and secondary disk are respectively positioned on gear Between plate 14 and stripper plate 6, the first hydraulic cylinder 5 and the second hydraulic cylinder 9 are connected with first switch, and by conducting wire respectively One switch is connected with controller, the model DATA-7311 of controller by conducting wire, and the inside of babinet 4 is filled with chemical cleaning Medicament, and the liquid level of chemical cleaning medicament is located at the lower section on 14 top of baffle, the junction of capping 7 and babinet 4 is equipped with sealing ring.
Operation principle:Pedestal 3 is fixed on the ground by sucker 1, slicing single crystal silicon to be cleaned is placed horizontally in pair The top of disk passes through the effect of the first hydraulic cylinder 5 so that stripper plate 6 is close towards baffle 14, with this by slicing single crystal silicon It is slight fixed, then capping 7 is sleeved on babinet 4 so that slicing single crystal silicon is located between disk 12 and secondary disk, starts motor 8 And auxiliary-motor so that two banister brush 13 are rotatably assorted chemical cleaning medicament to slicing single crystal silicon progress Rapid Cleaning simultaneously.
The preferable specific embodiment of the above, only the utility model, but the scope of protection of the utility model is not This is confined to, in the technical scope that any one skilled in the art discloses in the utility model, according to this practicality Novel technical solution and its utility model design are subject to equivalent substitution or change, should all cover the protection model in the utility model Within enclosing.

Claims (6)

1. a kind of slicing single crystal silicon production cleaning device, including pedestal(3), which is characterized in that the pedestal(3)Top outside Wall quadrangle is welded with the supporting rack of L-shaped structure(2), support frame as described above(2)Bottom end be connected with sucker(1), the pedestal(3) Top outer wall be screwed babinet(4), and babinet(4)Top for hatch frame, the babinet(4)Top set It is connected to capping(7), the capping(7)Top exterior walls be welded with installs case(11), the installs case(11)Bottom interior wall card It is connected to accumulator(10), the capping(7)Bottom interior wall be screwed the second hydraulic cylinder(9), second liquid Compressing cylinder(9)Bottom end be welded with connecting plate, and the bottom end of connecting plate has been screwed motor(8), the motor(8)'s Output shaft is welded with horizontally disposed disk(12), the disk(12)Bottom outer wall be welded with equally distributed banister brush (13), the babinet(4)Side inner wall be welded with baffle(14), the babinet(4)Opposite side inner wall be screwed There is the first hydraulic cylinder(5), first hydraulic cylinder(5)Close to baffle(14)One end be welded with the stripper plate being vertically arranged (6), the babinet(4)Bottom interior wall be screwed auxiliary-motor, and the output shaft of auxiliary-motor is connected by connecting plate There is secondary disk, the top exterior walls of the pair disk are bonded with the banister brush equidistantly distributed(13).
A kind of 2. slicing single crystal silicon production cleaning device according to claim 1, which is characterized in that the motor(8) Switch is connected with, and switch through conducting wire and accumulator by conducting wire(10)Connection.
A kind of 3. slicing single crystal silicon production cleaning device according to claim 1, which is characterized in that the disk(12) It is identical with the diameter of secondary disk, and disk(12)It is located at same vertical plane, disk with secondary disk(12)Gear is respectively positioned on secondary disk Plate(14)And stripper plate(6)Between.
A kind of 4. slicing single crystal silicon production cleaning device according to claim 1, which is characterized in that first hydraulic pressure Oil cylinder(5)With the second hydraulic cylinder(9)First switch is connected with by conducting wire respectively, and first switch is connected with control by conducting wire Device processed, the model DATA-7311 of controller.
A kind of 5. slicing single crystal silicon production cleaning device according to claim 1, which is characterized in that the babinet(4) Inside filled with chemical cleaning medicament, and the liquid level of chemical cleaning medicament is located at baffle(14)The lower section on top.
A kind of 6. slicing single crystal silicon production cleaning device according to claim 1, which is characterized in that the capping(7) And babinet(4)Junction be equipped with sealing ring.
CN201721259864.0U 2017-09-28 2017-09-28 A kind of slicing single crystal silicon production cleaning device Expired - Fee Related CN207563318U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201721259864.0U CN207563318U (en) 2017-09-28 2017-09-28 A kind of slicing single crystal silicon production cleaning device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201721259864.0U CN207563318U (en) 2017-09-28 2017-09-28 A kind of slicing single crystal silicon production cleaning device

Publications (1)

Publication Number Publication Date
CN207563318U true CN207563318U (en) 2018-07-03

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Family Applications (1)

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CN201721259864.0U Expired - Fee Related CN207563318U (en) 2017-09-28 2017-09-28 A kind of slicing single crystal silicon production cleaning device

Country Status (1)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107737744A (en) * 2017-09-28 2018-02-27 阜宁浔朋新材料科技有限公司 A kind of slicing single crystal silicon production cleaning device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107737744A (en) * 2017-09-28 2018-02-27 阜宁浔朋新材料科技有限公司 A kind of slicing single crystal silicon production cleaning device

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GR01 Patent grant
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20180703

Termination date: 20180928