CN114293245B - Automatic lifting mechanism of single crystal furnace heater - Google Patents
Automatic lifting mechanism of single crystal furnace heater Download PDFInfo
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- CN114293245B CN114293245B CN202111647896.9A CN202111647896A CN114293245B CN 114293245 B CN114293245 B CN 114293245B CN 202111647896 A CN202111647896 A CN 202111647896A CN 114293245 B CN114293245 B CN 114293245B
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Abstract
The invention belongs to the technical field of single crystal equipment, and particularly relates to an automatic lifting mechanism of a single crystal furnace heater, which comprises a furnace chassis, wherein a crucible unit is arranged on the upper plate surface of the furnace chassis; the lifting unit comprises a motor, a screw rod, a guide post, a support plate, an electrode and a heating coil; the crucible unit comprises an outer furnace body and a crucible body; the lower plate surface of the support plate is fixedly connected with a fixing block through a bolt, one end of a screw rod penetrates through the support plate and is in transmission connection with the fixing block, the other end of the screw rod is fixedly connected with the output end of a motor, and the motor is fixedly connected with the lower plate surface of the furnace chassis; one side of the screw rod is provided with a guide post, one end of the guide post is fixedly connected with the furnace chassis, and the other end of the guide post penetrates through the support plate in a sliding manner; an electrode is arranged between the support plate and the furnace chassis, the lower end of the electrode is fixedly connected with the support plate, and the upper end of the electrode penetrates through the furnace chassis in a sliding manner and is connected with a heating coil.
Description
Technical Field
The invention belongs to the technical field of single crystal equipment, and particularly relates to an automatic lifting mechanism of a single crystal furnace heater.
Background
The monocrystalline silicon growing furnace is a manufacturing device for producing monocrystalline silicon by a czochralski method, and the monocrystalline silicon growing method mainly comprises the steps of putting a polycrystalline silicon raw material into a high-purity quartz crucible for melting, slightly cooling molten silicon to generate a certain supercooling degree, then using a silicon monocrystal fixed on a seed crystal shaft, slowly pulling the seed crystal upwards after the seed crystal is melted with a melt, and growing the crystal at the lower end of the seed crystal.
When the existing monocrystalline silicon growth furnace is used for producing a monocrystalline silicon product, high temperature is generated by the monocrystalline silicon heater to melt silicon raw materials in the quartz crucible, the monocrystalline silicon heater can only heat the bottom of the crucible, the whole crucible cannot be heated, the heating effect of the crucible is poor, and the production quality and the production efficiency of the monocrystalline silicon product are influenced.
Therefore, the invention provides an automatic lifting mechanism of a single crystal furnace heater.
Disclosure of Invention
To remedy the deficiencies of the prior art, at least one of the technical problems set forth in the background is addressed.
The technical scheme adopted by the invention for solving the technical problems is as follows: the invention relates to an automatic lifting mechanism of a single crystal furnace heater, which comprises a furnace chassis, wherein a crucible unit is arranged on the upper plate surface of the furnace chassis, and a lifting unit is arranged on the lower plate surface of the furnace chassis; the lifting unit comprises a motor, a screw rod, a guide post, a support plate, an electrode and a heating coil; the crucible unit comprises an outer furnace body and a crucible body;
a lower plate surface of the support plate is fixedly connected with a fixed block through a bolt, one end of a screw rod penetrates through the support plate and is in transmission connection with the fixed block, the other end of the screw rod is fixedly connected with an output end of a motor, and the motor is fixedly connected with a lower plate surface of the furnace chassis; one side of the screw rod is provided with a guide post, one end of the guide post is fixedly connected with the furnace chassis, and the other end of the guide post penetrates through the support plate in a sliding manner; an electrode is arranged between the support plate and the furnace chassis, the lower end of the electrode is fixedly connected with the support plate, and the upper end of the electrode penetrates through the furnace chassis in a sliding manner and is connected with a heating coil;
the crucible body is located in the outer furnace body, a heating coil is arranged in a gap between the crucible body and the outer furnace body, and the lower end of the heating coil is fixedly connected with the upper end of the electrode; the heating coil is arranged at the bottom of the crucible body, and the heating coil is arranged outside the crucible body, so that the monocrystalline silicon in the crucible body is heated, and the melting quality and efficiency of the monocrystalline silicon are improved; the driving motor rotates, the motor drives the screw rod to rotate, the screw rod pushes up or pulls down the support plate through the fixing block, and meanwhile, the support plate drives the electrode and the heating coil to move up or down, so that the heating coil heats different positions of the crucible body, silicon liquid in a required height interval of the crucible body keeps a specific temperature, and the situation that the crystallized part is continuously heated again in the crystal bar generation process, crystal growth is not facilitated, and the quality of the crystal bar is influenced is avoided; and surround the position of the crucible body through control heating coil for heating coil accuracy is to the heating of the silicon liquid heating of required height interval, makes the crystal bar grow at the specified temperature interval, and this is of value to crystal growth, improves the crystal bar quality.
Preferably, the motor and the screw rod are symmetrically arranged between the furnace chassis and the support plate, and the guide rod and the electrode are symmetrically arranged between the furnace chassis and the support plate in a central shaft manner; the electrode outer ring is sleeved with a corrugated pipe, and two ends of the corrugated pipe are fixedly connected with the lower plate surface of the support plate and the upper plate surface of the furnace chassis respectively; the bi-motor drive drives the support plate and reciprocates for the support plate removes more smoothly, and connects the fixed block through the lead screw, improves the synchronism that the fixed block pushed down and lift the support plate, prevents that the problem of difference in height from appearing in the transmission desynchrony, leads to automatic lifting mechanism to have the problem of holding back strength.
Preferably, the inner side wall of the outer furnace body is symmetrically provided with sliding chutes; the outer surface of the heating coil is provided with a guide unit; the guide unit comprises a fixed plate and a guide rod; the fixed plate is symmetrically and fixedly connected to the heating coil, the upper end face of the fixed plate is provided with a telescopic groove, one end of the guide rod is connected in the telescopic groove in a sliding mode, and the other end of the guide rod is bent by 90 degrees and connected in the sliding groove in a sliding mode; when heating coil reciprocated along the crucible body, the guide bar reciprocated along the spout, perhaps the guide bar stretches out or the retraction along flexible groove, make the relative movement between heating coil and the crucible body more nimble, and the setting of guide bar, the distance between heating coil inner circle and the outer circle of crucible body is restrained, promptly, same horizontal position is the same to the crucible body distance on the heating coil, thereby make the crucible body can thermally equivalent, improve the heating of the internal monocrystalline silicon of crucible and melt the quality then, and the crystallization quality.
Preferably, the furnace chassis is provided with an oil supplementing mechanism, the lower end of the electrode is connected with the furnace chassis through the oil supplementing mechanism, and the oil supplementing mechanism comprises an upper shell, a lower shell, a rotating rod, a piston cylinder, a piston rod and a pressure spring; the lower shell is fixedly connected with a furnace chassis, the electrode penetrates through a center hole of the lower shell, hinge blocks are fixedly connected with an outer circumference array of the center hole, a rotating rod is rotatably connected between every two adjacent hinge blocks and attached to the surface of the electrode, a plurality of push rods are uniformly and fixedly connected to the end part of the rotating rod, the end part of each push rod is extruded at one end of a piston rod, the other end of the piston rod is slidably connected into a piston cylinder through a pressure spring, the piston cylinder is fixedly connected with the furnace chassis, and an oil outlet pipe of the piston cylinder penetrates through the upper shell and extends to the joint of the fixed block and the lead screw; when the heating coil heats the multi-crucible body, the heat of the heating coil is radiated to the joint of the screw rod and the fixed block, lubricating oil is evaporated, and if the joint is lack of lubricating oil, the transmission smoothness between the fixed block and the screw rod is influenced, and then the up-and-down moving stability of the carrier plate is influenced; the lower extreme of electrode runs through the stove chassis and reciprocates, and at the removal in-process, the outer lane of electrode is rubbed with the hands and is rotated the rod and rotate, and the rod that changes drives the push rod simultaneously and rotates, and the push rod extrudees the piston rod, and the piston rod retracts in the piston cylinder to the lubricating oil in the piston cylinder is impressed the oil pipe, and lubricating oil is discharged to the fixed block and lead screw junction along the oil pipe, mends oil lubrication to the junction, guarantees the junction transmission smoothness nature.
Preferably, the outer ring of the electrode is circumferentially arrayed with mounting grooves, and racks are arranged in the mounting grooves; teeth are fixedly connected to the outer ring circumference array of the rotary rod and meshed with the rack; set up the rack, prevent to change the rod direct and electrode contact, change the rod with electrode wear, influence the life of electrode, and through rack and tooth meshing, when guaranteeing that the electrode reciprocates, the rack is effectively rubbed with the hands and is changeed the rod rotation, when preventing the electrode and changeing rod direct contact, the electrode with change and take place the phenomenon of skidding between the rod.
Preferably, the end part of each push rod is rotatably connected with a roller; one end of each piston rod is fixedly connected with an arc-shaped plate, a convex surface of each arc-shaped plate extrudes the roller, and an inner concave surface of each arc-shaped plate is fixedly connected with the piston rod; through the arc, guarantee the effective extrusion of push rod ejector pin pole to and the tip of push rod sets up the gyro wheel, make the rotation of push rod more smooth and easy, thereby improve the smooth and easy nature that the electrode reciprocated, improve the support plate then and reciprocate stability.
Preferably, the branch pipe of the oil outlet pipe extends into the chute, and the oil outlet of the branch pipe is arranged right above the other end of the guide rod; lubricating oil flows to the other end of guide bar along the bleeder, then in lubricating oil stretches the spout, lubricates between spout and the guide bar, improves the smooth and easy nature that the guide bar removed in the spout to guarantee the stability that heating coil reciprocated.
Preferably, the guide rod is hollow, the outer ring of the guide rod is provided with a plurality of oil outlets, the oil outlets are communicated with the hollow part, the horizontal part at the other end of the guide rod is provided with a concave part, and the concave part is communicated with the hollow part; lubricating oil flows into the concave part from the branch pipe, then flows into the telescopic groove from the oil outlet hole along the hollow part, improves the relative movement smoothness between the oil outlet hole and the telescopic groove, and further ensures the stability of the heating coil moving up and down.
Preferably, a clamping groove is formed in the inner side of the mounting groove, convex parts are arranged on two sides of the rack and embedded into the clamping groove, a connecting disc is arranged at the lower end of the electrode, and the connecting disc is connected with the lower end of the rack and the lower end of the electrode through bolts; the rack passes through the convex part joint in the draw-in groove, conveniently inserts and the position restriction to the rack to and through connecting the disc, guarantee the stability between rack and the electrode.
Preferably, the branch pipe of the oil outlet pipe extends to the position above the mutual extrusion position point of the roller and the arc-shaped plate; lubricating oil drops between the arc-shaped plate and the roller, and lubricating oil is supplemented to lubricate the roller, so that smoothness is further improved.
The invention has the following beneficial effects:
1. the heating coil is arranged at the bottom of the crucible body, and the heating coil is arranged outside the crucible body, so that the monocrystalline silicon in the crucible body is heated, and the melting quality and efficiency of the monocrystalline silicon are improved;
2. the support plate drives the electrode and the heating coil to move up or down, so that the heating coil heats different positions of the crucible body, the silicon liquid in the interval with the required height of the crucible body keeps a specific temperature, and the crystallized part is continuously heated in the crystal bar generation process, which is not beneficial to crystal growth and influences the quality of the crystal bar; the heating coil is controlled to surround the crucible body, so that the heating coil accurately heats the silicon liquid in a required height interval, the crystal bar grows in a specified temperature interval, the crystal growth is facilitated, and the quality of the crystal bar is improved;
3. the bi-motor drive drives the support plate and reciprocates for the support plate removes more smoothly, and connects the fixed block through the lead screw, improves the synchronism that the fixed block pushed down and lift the support plate, prevents that the problem of difference in height from appearing in the transmission desynchrony, leads to automatic lifting mechanism to have the problem of holding back strength.
Drawings
The invention will be further explained with reference to the drawings.
FIG. 1 is a perspective view of an automatic lifting mechanism of a heater of a single crystal furnace according to the present invention;
FIG. 2 is a view showing the cooperation between the elevating unit and the crucible unit in the present invention;
FIG. 3 is an enlarged view of a portion of FIG. 2 at A;
FIG. 4 is a perspective view of an electrode according to the present invention;
FIG. 5 is a partial enlarged view of FIG. 4 at B;
FIG. 6 is a view of the coupling of the disk to the electrode of the present invention;
in the figure: the furnace comprises a furnace chassis 1, a motor 2, a screw rod 3, a guide post 4, a support plate 5, an electrode 6, a heating coil 7, an outer furnace body 8, a crucible body 9, a fixing block 10, a sliding chute 11, a fixing plate 12, a guide rod 13, a telescopic groove 14, an upper shell 15, a lower shell 16, a rotary rod 17, a piston cylinder 18, a piston rod 19, a pressure spring, a push rod 21, a mounting groove 22, a rack 23, a tooth 24, a roller 25, an arc-shaped plate 26, an oil outlet pipe 27, a branch pipe 28, an oil outlet 29, a concave portion 30, a clamping groove 31, a convex portion 32 and a connecting disc 33.
Detailed Description
The present invention will be further described with reference to the following detailed description so that the technical means, the creation features, the achievement purposes and the effects of the present invention can be easily understood.
The first embodiment is as follows:
referring to fig. 1-6, an automatic lifting mechanism of a single crystal furnace heater comprises a furnace chassis 1, wherein a crucible unit is arranged on the upper plate surface of the furnace chassis 1, and a lifting unit is arranged on the lower plate surface of the furnace chassis 1; the lifting unit comprises a motor 2, a screw rod 3, a guide post 4, a carrier plate 5, an electrode 6 and a heating coil 7; the crucible unit comprises an outer furnace body 8 and a crucible body 9;
a fixing block 10 is fixedly connected to a lower plate surface of the support plate 5 through a bolt, one end of a screw rod 3 penetrates through the support plate 5 and is in transmission connection with the fixing block 10, the other end of the screw rod 3 is fixedly connected with an output end of a motor 2, and the motor 2 is fixedly connected with a lower plate surface of the furnace chassis 1; one side of the screw rod 3 is provided with a guide post 4, one end of the guide post 4 is fixedly connected with the furnace chassis 1, and the other end of the guide post 4 penetrates through the support plate 5 in a sliding manner; an electrode 6 is arranged between the support plate 5 and the furnace chassis, the lower end of the electrode 6 is fixedly connected with the support plate 5, and the upper end of the electrode 6 penetrates through the furnace chassis 1 in a sliding manner and is connected with a heating coil 7;
the crucible body 9 is located in the outer furnace body 8, a heating coil 7 is arranged in a gap between the crucible body 9 and the outer furnace body 8, and the lower end of the heating coil 7 is fixedly connected with the upper end of the electrode 6; the heating coil 7 is arranged at the bottom of the crucible body 9, the heating coil 7 is arranged outside the crucible body 9, and the crucible body 9 is heated at the same time, so that monocrystalline silicon in the crucible body 9 is heated, and the melting quality and efficiency of the monocrystalline silicon are improved; the motor 2 is driven to rotate, the motor 2 drives the screw rod 3 to rotate, the screw rod 3 pushes up or pulls down the support plate 5 through the fixing block 10, and meanwhile, the support plate 5 drives the electrode 6 and the heating coil 7 to move up or down, so that the heating coil 7 heats different positions of the crucible body 9, silicon liquid in a required height interval of the crucible body 9 is kept at a specific temperature, and the situation that the crystallized part is continuously reheated in the crystal bar generation process, crystal growth is not facilitated, and crystal bar quality is influenced is avoided; and through the position that control heating coil 7 surrounds crucible body 9 for heating coil 7 is accurate to the required interval silicon liquid heating of height, makes the crystal bar grow at the regulation temperature interval, and this is of value to crystal growth, improves the crystal bar quality.
The motor 2 and the screw rod 3 are symmetrically arranged between the furnace chassis 1 and the carrier plate 5, and the guide rod 13 and the electrode 6 are symmetrically arranged between the furnace chassis 1 and the carrier plate 5 in a central shaft manner; the outer ring of the electrode 6 is sleeved with a corrugated pipe, and two ends of the corrugated pipe are fixedly connected with the lower plate surface of the support plate 5 and the upper plate surface of the furnace chassis 1 respectively; the two motors 2 drive the support plate 5 to move up and down, so that the support plate 5 moves more smoothly, the fixed block 10 is connected through the screw rod 3, the synchronism of the support plate 5 pushed down and lifted up by the fixed block 10 is improved, the problem of unsynchronized height difference in transmission is prevented, and the problem of strength building up of the automatic lifting mechanism is caused.
The inner side wall of the outer furnace body 8 is symmetrically provided with sliding chutes 11; the outer surface of the heating coil 7 is provided with a guide unit; the guide unit comprises a fixed plate 12 and a guide rod 13; the fixed plate 12 is symmetrically and fixedly connected to the heating coil 7, the upper end face of the fixed plate 12 is provided with a telescopic groove 14, one end of the guide rod 13 is connected in the telescopic groove 14 in a sliding mode, and the other end of the guide rod 13 is bent by 90 degrees and connected in the sliding groove 11 in a sliding mode; when heating coil 7 reciprocated along the crucible body 9, guide bar 13 reciprocated along spout 11, perhaps guide bar 13 stretched out or the retraction along flexible groove 14, make the relative movement between heating coil 7 and the crucible body 9 more nimble, and the setting of guide bar 13, the distance between heating coil 7 inner circle and the crucible body 9 outer lane is restricted, promptly, same horizontal position is the same to crucible body 9 distance on the heating coil 7, thereby make crucible body 9 can the thermally equivalent, then improve the heating of the interior monocrystalline silicon of crucible body 9 and melt the quality, and the crystal quality.
The furnace chassis 1 is provided with an oil supplementing mechanism, the lower end of the electrode 6 is connected with the furnace chassis 1 through the oil supplementing mechanism, and the oil supplementing mechanism comprises an upper shell 15, a lower shell 16, a rotary rod 17, a piston cylinder 18, a piston rod 19 and a pressure spring; the lower shell 16 is fixedly connected with the furnace chassis 1, the electrode 6 penetrates through a central hole of the lower shell 16, hinge blocks are fixedly connected with the outer circumference array of the central hole, a rotating rod 17 is rotatably connected between every two adjacent hinge blocks, the rotating rod 17 is attached to the surface of the electrode 6, a plurality of push rods 21 are uniformly and fixedly connected with the end part of the rotating rod 17, the end part of each push rod 21 is extruded at one end of a piston rod 19, the other end of the piston rod 19 is slidably connected into a piston cylinder 18 through a pressure spring, the piston cylinder 18 is fixedly connected with the furnace chassis 1, and an oil outlet pipe 27 of the piston cylinder 18 penetrates through the upper shell 15 and extends to the joint of the fixed block 10 and the screw rod 3; when the multi-crucible body 9 is heated, the heat of the heating coil 7 is radiated to the joint of the screw rod 3 and the fixed block 10, so that the lubricating oil is evaporated, and if the joint is lack of the lubricating oil, the transmission smoothness between the fixed block 10 and the screw rod 3 is influenced, and then the up-and-down movement stability of the carrier plate 5 is influenced; the lower end of the electrode 6 penetrates through the furnace chassis 1 to move up and down, in the moving process, the outer ring of the electrode 6 rubs the rotating rod 17 to rotate, meanwhile, the rotating rod 17 drives the push rod 21 to rotate, the push rod 21 extrudes the piston rod 19, the piston rod 19 retracts into the piston cylinder 18, lubricating oil in the piston cylinder 18 is pressed into the oil outlet pipe 27, the lubricating oil is discharged to the joint of the fixed block 10 and the screw rod 3 along the oil outlet pipe 27, oil supplementing lubrication is carried out on the joint, and the transmission smoothness of the joint is ensured; the oil outlet pipe and the oil inlet pipe are respectively provided with a check valve, the check valve on the oil outlet pipe limits the lubricating oil in the piston cylinder 18 to be discharged along the oil outlet pipe, and the check valve on the oil inlet pipe limits the lubricating oil to enter the piston cylinder 18 from the outside.
An installation groove 22 is formed in the circumference of the outer ring of the electrode 6 in an array mode, and a rack 23 is arranged in the installation groove 22; teeth 24 are fixedly connected to the circumferential array of the outer ring of the rotary rod 17, and the teeth 24 are meshed with the rack 23; set up rack 23, prevent to change rod 17 direct and electrode 6 contact, change rod 17 and wear and tear electrode 6, influence the life of electrode 6, and through rack 23 and tooth meshing, when guaranteeing that electrode 6 reciprocates, rack 23 effectively rubs with the hands and changes rod 17 and rotate, when preventing electrode 6 and changeing rod 17 direct contact, electrode 6 and the phenomenon of skidding takes place between the rod 17.
The end part of each push rod 21 is rotatably connected with a roller 25; one end of each piston rod 19 is fixedly connected with an arc-shaped plate 26, a convex surface of each arc-shaped plate 26 presses the roller 25, and a concave surface of each arc-shaped plate 26 is fixedly connected with the piston rod 19; through arc 26, guarantee the effective extrusion of push rod 21 ejector pin pole 19 to and the tip of push rod 21 sets up gyro wheel 25, makes the rotation of push rod 21 more smooth and easy, thereby improves the smoothness nature that electrode 6 reciprocated, improves support plate 5 then and reciprocates stability.
A branch pipe 28 of the oil outlet pipe 27 extends into the chute 11, and an oil outlet of the branch pipe 28 is arranged right above the other end of the guide rod 13; the lubricating oil flows to the other end of the guide rod 13 along the branch pipe 28, then spreads in the sliding groove 11, lubricates the space between the sliding groove 11 and the guide rod 13, improves the smoothness of movement of the guide rod 13 in the sliding groove 11, and ensures the stability of the up-and-down movement of the heating coil 7.
The interior of the guide rod 13 is hollow, a plurality of oil outlet holes 29 are formed in the outer ring of the guide rod 13, the oil outlet holes 29 are communicated with the hollow part, a concave part 30 is formed in the horizontal position of the other end of the guide rod 13, and the concave part 30 is communicated with the hollow part; the lubricating oil flows into the concave portion 30 from the branch pipe 28, then flows into the telescopic groove 14 from the inside of the oil outlet 29 along the hollow portion, improves the smoothness of the relative movement between the oil outlet 29 and the telescopic groove 14, and further ensures the stability of the vertical movement of the heating coil 7.
A clamping groove 31 is formed in the inner side of the mounting groove 22, convex parts 32 are arranged on two sides of the rack 23, the convex parts 32 are embedded in the clamping groove 31, a connecting disc 33 is arranged at the lower end of the electrode 6, and the connecting disc 33 is connected with the lower end of the rack 23 and the lower end of the electrode 6 through bolts; the rack 23 is clamped in the clamping groove 31 through the convex part 32, so that the rack 23 is conveniently inserted and limited in position, and the stability between the rack 23 and the electrode 6 is ensured through the connecting disc 33.
Example two:
comparative example one, as another embodiment of the present invention, wherein the branch pipe 28 of the outlet pipe 27 is extended to a point above the point where the roller 25 and the arc plate 26 are pressed against each other; lubricating oil drops between the arc-shaped plate 26 and the roller 25, and the lubricating oil is supplemented and lubricated, so that the smoothness is further improved.
The working principle is as follows: the heating coil 7 at the bottom of the crucible body 9 and the heating coil 7 arranged outside the crucible body 9 heat the crucible body 9 at the same time, so that monocrystalline silicon in the crucible body 9 is heated, and the melting quality and efficiency of the monocrystalline silicon are improved; the motor 2 is driven to rotate, the motor 2 drives the screw rod 3 to rotate, the screw rod 3 pushes up or pulls down the support plate 5 through the fixing block 10, and meanwhile, the support plate 5 drives the electrode 6 and the heating coil 7 to move up or down, so that the heating coil 7 heats different positions of the crucible body 9, silicon liquid in a required height interval of the crucible body 9 keeps a specific temperature, and the situation that the crystallized part is continuously heated again in the crystal bar generation process, crystal growth is not facilitated, and crystal bar quality is influenced is avoided; the heating coil 7 is controlled to surround the crucible body 9, so that the heating coil 7 accurately heats the silicon liquid in a required height interval, the crystal bar grows in a specified temperature interval, the crystal growth is facilitated, and the quality of the crystal bar is improved;
the support plate 5 is driven by the double motors 2 to move up and down, so that the support plate 5 moves more smoothly, the lead screw 3 is connected with the fixing block 10, the synchronism of pushing down and lifting up the support plate 5 by the fixing block 10 is improved, and the problem of holding strength of the automatic lifting mechanism due to the fact that the transmission is asynchronous and the height difference is caused is solved;
when the heating coil 7 moves up and down along the crucible body 9, the guide rod 13 moves up and down along the sliding groove 11, or the guide rod 13 extends out or retracts along the telescopic groove 14, so that the relative movement between the heating coil 7 and the crucible body 9 is more flexible, and the guide rod 13 is arranged, the distance between the inner ring of the heating coil 7 and the outer ring of the crucible body 9 is limited, namely, the distance from the same horizontal position on the heating coil 7 to the crucible body 9 is the same, so that the crucible body 9 can be uniformly heated, and the heating melting quality and the crystallization quality of the monocrystalline silicon in the crucible body 9 are improved;
when the multi-crucible body 9 is heated, the heat of the heating coil 7 is radiated to the joint of the screw rod 3 and the fixed block 10, so that the lubricating oil is evaporated, and if the joint is lack of the lubricating oil, the transmission smoothness between the fixed block 10 and the screw rod 3 is influenced, and then the up-and-down movement stability of the carrier plate 5 is influenced; the lower end of the electrode 6 penetrates through the furnace chassis 1 to move up and down, in the moving process, the outer ring of the electrode 6 rubs the rotating rod 17 to rotate, meanwhile, the rotating rod 17 drives the push rod 21 to rotate, the push rod 21 extrudes the piston rod 19, the piston rod 19 retracts into the piston cylinder 18, lubricating oil in the piston cylinder 18 is pressed into the oil outlet pipe 27, the lubricating oil is discharged to the joint of the fixed block 10 and the screw rod 3 along the oil outlet pipe 27, oil supplementing lubrication is carried out on the joint, and the transmission smoothness of the joint is ensured;
the rack 23 is arranged to prevent the rotary rod 17 from directly contacting with the electrode 6, the rotary rod 17 abrades the electrode 6 to influence the service life of the electrode 6, and the rack 23 is meshed with teeth to ensure that the rack 23 effectively rubs the rotary rod 17 to rotate when the electrode 6 moves up and down, so as to prevent the electrode 6 from slipping with the rotary rod 17 when the electrode 6 directly contacts with the rotary rod 17;
the arc-shaped plate 26 ensures effective extrusion of the push rod 21 and the push rod 19, and the roller 25 is arranged at the end part of the push rod 21, so that the push rod 21 can rotate more smoothly, the smoothness of up-and-down movement of the electrode 6 is improved, and the up-and-down movement stability of the support plate 5 is improved;
lubricating oil flows to the other end of the guide rod 13 along the branch pipe 28, then the lubricating oil spreads in the sliding groove 11 to lubricate the space between the sliding groove 11 and the guide rod 13, so that the smoothness of the movement of the guide rod 13 in the sliding groove 11 is improved, and the stability of the up-and-down movement of the heating coil 7 is ensured; lubricating oil flows into the concave portion 30 from the branch pipe 28, then flows into the telescopic groove 14 from the inside of the oil outlet hole 29 along the hollow portion, so that the smoothness of the relative movement between the oil outlet hole 29 and the telescopic groove 14 is improved, and the stability of the up-and-down movement of the heating coil 7 is further ensured;
the rack 23 is clamped in the clamping groove 31 through the convex part 32, so that the rack 23 is conveniently inserted and limited in position, and the stability between the rack 23 and the electrode 6 is ensured through the connecting disc 33.
The front, the back, the left, the right, the upper and the lower are all based on figure 1 in the attached drawings of the specification, according to the standard of the observation angle of a person, the side of the device facing an observer is defined as the front, the left side of the observer is defined as the left, and so on.
In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate orientations or positional relationships based on those shown in the drawings, and are used merely for convenience in describing the present invention and for simplifying the description, but do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the scope of the present invention.
The foregoing illustrates and describes the principles, general features, and advantages of the present invention. It will be understood by those skilled in the art that the present invention is not limited to the embodiments described above, which are described in the specification and illustrated only to illustrate the principle of the present invention, but that various changes and modifications may be made therein without departing from the spirit and scope of the present invention, which fall within the scope of the invention as claimed. The scope of the invention is defined by the appended claims and equivalents thereof.
Claims (6)
1. The utility model provides a single crystal growing furnace heater automatic lifting mechanism which characterized in that: the crucible furnace comprises a furnace chassis (1), wherein a crucible unit is arranged on the upper plate surface of the furnace chassis (1), and a lifting unit is arranged on the lower plate surface of the furnace chassis (1); the lifting unit comprises a motor (2), a screw rod (3), a guide post (4), a carrier plate (5), an electrode (6) and a heating coil (7); the crucible unit comprises an outer furnace body (8) and a crucible body (9); a fixing block (10) is fixedly connected to a lower plate surface of the support plate (5) through bolts, one end of a screw rod (3) penetrates through the support plate (5) and is in transmission connection with the fixing block (10), the other end of the screw rod (3) is fixedly connected with an output end of a motor (2), and the motor (2) is fixedly connected with a lower plate surface of the furnace chassis (1); a guide post (4) is arranged on one side of the screw rod (3), one end of the guide post (4) is fixedly connected with the furnace chassis (1), and the other end of the guide post (4) penetrates through the support plate (5) in a sliding manner; an electrode (6) is arranged between the support plate (5) and the furnace chassis, the lower end of the electrode (6) is fixedly connected with the support plate (5), and the upper end of the electrode (6) penetrates through the furnace chassis (1) in a sliding manner and is connected with a heating coil (7); the crucible body (9) is located in the outer furnace body (8), a heating coil (7) is arranged in a gap between the crucible body (9) and the outer furnace body (8), and the lower end of the heating coil (7) is fixedly connected with the upper end of the electrode (6);
the motor (2) and the screw rod (3) are symmetrically arranged between the furnace chassis (1) and the carrier plate (5), and the guide rod (13) and the electrode (6) are symmetrically arranged between the furnace chassis (1) and the carrier plate (5) in a central shaft manner; the outer ring of the electrode (6) is sleeved with a corrugated pipe, and two ends of the corrugated pipe are fixedly connected with the lower plate surface of the support plate (5) and the upper plate surface of the furnace chassis (1) respectively;
the furnace chassis (1) is provided with an oil supplementing mechanism, the upper end of the electrode (6) is connected with the furnace chassis (1) through the oil supplementing mechanism, and the oil supplementing mechanism comprises an upper shell (15), a lower shell (16), a rotating rod (17), a piston cylinder (18), a piston rod (19) and a pressure spring; the furnace is characterized in that the lower shell (16) is fixedly connected with the furnace chassis (1), the electrode (6) penetrates through a central hole of the lower shell (16), hinged blocks are fixedly connected to the outer circumference of the central hole in an array manner, a rotating rod (17) is rotatably connected between every two adjacent hinged blocks, the rotating rod (17) is attached to the surface of the electrode (6), a plurality of push rods (21) are uniformly and fixedly connected to the end of the rotating rod (17), the end of each push rod (21) is extruded at one end of a piston rod (19), the other end of each piston rod (19) is connected into a piston cylinder (18) in a sliding manner through a pressure spring, the piston cylinder (18) is fixedly connected with the furnace chassis (1), and an oil outlet pipe (27) of the piston cylinder (18) penetrates through the upper shell (15) and extends to the joint of the fixed block (10) and the screw rod (3);
mounting grooves (22) are formed in the circumferential array of the outer ring of the electrode (6), and racks (23) are arranged in the mounting grooves (22); teeth (24) are fixedly connected to the circumferential array of the outer ring of the rotary rod (17), and the teeth (24) are meshed with the rack (23);
the end part of each push rod (21) is rotatably connected with a roller (25); one end of each piston rod (19) is fixedly connected with an arc-shaped plate (26), a convex surface of each arc-shaped plate (26) extrudes the roller (25), and an inner concave surface of each arc-shaped plate (26) is fixedly connected with the piston rod (19).
2. The automatic lifting mechanism of the single crystal furnace heater according to claim 1, characterized in that: the inner side wall of the outer furnace body (8) is symmetrically provided with sliding chutes (11); the outer surface of the heating coil (7) is provided with a guide unit; the guide unit comprises a fixing plate (12) and a guide rod (13); the heating coil is characterized in that the fixing plate (12) is symmetrically and fixedly connected to the heating coil (7), the upper end face of the fixing plate (12) is provided with a telescopic groove (14), one end of the guide rod (13) is connected into the telescopic groove (14) in a sliding mode, and the other end of the guide rod (13) is bent by 90 degrees and is connected into the sliding groove (11) in a sliding mode.
3. The automatic lifting mechanism of the single crystal furnace heater according to claim 1, characterized in that: a branch pipe (28) of the oil outlet pipe (27) extends into the chute (11), and an oil outlet of the branch pipe (28) is arranged right above the other end of the guide rod (13).
4. The automatic lifting mechanism of the single crystal furnace heater according to claim 3, characterized in that: the guide rod (13) is hollow, a plurality of oil outlet holes (29) are formed in the outer ring of the guide rod (13), the oil outlet holes (29) are communicated with the hollow portion, a concave portion (30) is formed in the horizontal portion of the other end of the guide rod (13), and the concave portion (30) is communicated with the hollow portion.
5. The automatic lifting mechanism of the single crystal furnace heater according to claim 1, characterized in that: a clamping groove (31) is formed in the inner side of the mounting groove (22), convex portions (32) are arranged on two sides of the rack (23), the convex portions (32) are embedded into the clamping groove (31), a connecting disc (33) is arranged at the lower end of the electrode (6), and the connecting disc (33) is connected with the lower end of the rack (23) and the lower end of the electrode (6) through bolts.
6. The automatic lifting mechanism of the single crystal furnace heater according to claim 3, characterized in that: the branch pipe (28) of the oil outlet pipe (27) extends to the position above the mutual extrusion position of the roller (25) and the arc-shaped plate (26).
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| Application Number | Priority Date | Filing Date | Title |
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| CN202111647896.9A CN114293245B (en) | 2021-12-30 | 2021-12-30 | Automatic lifting mechanism of single crystal furnace heater |
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| CN114293245B true CN114293245B (en) | 2023-02-14 |
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| CN114921847B (en) * | 2022-04-28 | 2024-01-26 | 连城凯克斯科技有限公司 | Automatic crucible lifting device for silicon carbide vertical induction synthesis furnace |
| CN115369479B (en) * | 2022-07-19 | 2023-10-31 | 连城凯克斯科技有限公司 | Automatic temperature detection and regulation equipment during silicon carbide production |
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| US6562132B2 (en) * | 2001-04-04 | 2003-05-13 | Ase Americas, Inc. | EFG crystal growth apparatus and method |
| CN207512312U (en) * | 2018-02-08 | 2018-06-19 | 杞县东磁新能源有限公司 | A kind of monocrystalline silicon growing furnace electrode lifting mechanism |
| CN208250454U (en) * | 2018-04-24 | 2018-12-18 | 湖南金石新材料有限公司 | A kind of thermal field of single crystal furnace |
| CN109881245A (en) * | 2019-03-20 | 2019-06-14 | 浙江晶盛机电股份有限公司 | A kind of single crystal furnace heater lifting device |
| CN215328452U (en) * | 2021-06-05 | 2021-12-28 | 北京北方华创真空技术有限公司 | Heater electrode and single crystal furnace heater lifting structure |
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