CN114574951A - Single crystal furnace seed crystal lifting dynamic gravity center monitoring self-balancing system - Google Patents
Single crystal furnace seed crystal lifting dynamic gravity center monitoring self-balancing system Download PDFInfo
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- CN114574951A CN114574951A CN202210194834.5A CN202210194834A CN114574951A CN 114574951 A CN114574951 A CN 114574951A CN 202210194834 A CN202210194834 A CN 202210194834A CN 114574951 A CN114574951 A CN 114574951A
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/20—Controlling or regulating
- C30B15/22—Stabilisation or shape controlling of the molten zone near the pulled crystal; Controlling the section of the crystal
- C30B15/28—Stabilisation or shape controlling of the molten zone near the pulled crystal; Controlling the section of the crystal using weight changes of the crystal or the melt, e.g. flotation methods
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/06—Silicon
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Abstract
The invention belongs to the technical field of single crystal furnaces, and particularly relates to a seed crystal lifting dynamic gravity monitoring self-balancing system of a single crystal furnace, which comprises a lifting cavity, a driven belt wheel, a mounting plate, an upper horizontal adjusting seat and a lower horizontal adjusting seat; the lower end of the lifting cavity is fixedly connected with a driven belt wheel, the driven belt wheel is rotatably installed on the upper surface of the installation plate, the lower surface of the installation plate is connected with an upper horizontal adjustment seat through a plurality of weighing sensors, and the lower part of the upper horizontal adjustment seat is connected with a lower horizontal adjustment seat through a plurality of support columns; through the cooperation between cross balance adjusting unit and the weighing sensor, the gravity center offset position is judged to the difference of weighing sensor feedback signal, and the weighing sensor can adopt spoke formula weighing sensor to from this real-time supervision wholly promote the chamber below and carry the lifting head and be in balanced state.
Description
Technical Field
The invention belongs to the technical field of single crystal furnaces, and particularly relates to a seed crystal lifting dynamic gravity center monitoring self-balancing system of a single crystal furnace.
Background
The seed crystal lifting device of the single crystal furnace is an actuating mechanism for realizing the upward rotation and lifting of seed crystals at extremely slow speed, plays a key role in the growth process of monocrystalline silicon, and is core equipment of the monocrystalline silicon growth furnace; putting the polycrystalline silicon into a quartz crucible, and melting silicon raw materials in a single crystal furnace by using a heater; then lifting the lifting cavity, winding the tungsten wire rope in the lifting cavity and lifting the lifting head, slowly lifting the seed crystal with the fixed crystal orientation inserted into the surface of the melt by the lifting head, and growing the crystal at the lower end of the seed crystal to finally produce the crystal column.
When a single crystal furnace in the prior art lifts seed crystals, a worm gear and a worm of a turbine speed reducer are required to drive a wire winding shaft to rotate. Generally, an aluminum speed reducer arranged on the side surface of the lifting cavity is adopted, the lifting force is only 700 plus 800Nm, the load is small, the use requirement cannot be effectively met, and the occupied transverse space is large. The design of a cast iron speed reducer is adopted, although the use requirement can be met, the weight is increased by 40-50kg, and the defects of difficult control of stability, overlarge stress of a supporting plate and the like exist.
When the lifting device is assembled, an S-shaped weighing sensor is generally arranged at the top of an integral structure in the prior art, so that the upper structure of a lifting cavity is complex, the balance of the center of gravity of the lifting cavity is measured in an experiment on an equipment debugging and installation site, the monitoring cannot be carried out in use, and the problems in production cannot be found in time; the annular weighing sensor is assembled, then the lifting device is subjected to balance adjustment in advance, if the balance cannot be adjusted in place in advance, the lifting device is directly put into production, the lifting quality of the crystal column is influenced, in the operation process of the lifting device, a balance bar cannot be carried out, the problem in production cannot be found in time, the crystal column for follow-up lifting is always in an unbalanced state, the crystal quality is seriously influenced, how to monitor the dynamic gravity center of seed crystal lifting during equipment use is convenient to check the unbalanced reason, even the gravity center self-balancing is realized, and the lifting device is an important link for designing the lifting cavity overhead aluminum speed reducer structure.
If the design sets up the aluminium speed reducer at the promotion chamber top, drives the book silk axle through the gear box, can improve the load under the prerequisite that does not increase weight. When the seed crystal lifting device is designed, the lifting rope body needs to be located at the gravity center of the lifting cavity, and because the gravity center changes when the lifting mechanism rotates horizontally, how to monitor the dynamic gravity center when the seed crystal is lifted is an important link for ensuring the normal work of the seed crystal lifting device.
Therefore, the invention provides a dynamic gravity center monitoring self-balancing system for seed crystal lifting of a single crystal furnace.
Disclosure of Invention
To remedy the deficiencies of the prior art, at least one of the technical problems set forth in the background is addressed.
The technical scheme adopted by the invention for solving the technical problems is as follows: the invention relates to a dynamic gravity center monitoring self-balancing system for seed crystal lifting of a single crystal furnace, which comprises a lifting cavity, a driven belt wheel, a mounting plate, an upper horizontal adjusting seat and a lower horizontal adjusting seat; the lower end of the lifting cavity is fixedly connected with a driven belt wheel, the driven belt wheel is rotatably installed on the upper surface of the installation plate, the lower surface of the installation plate is connected with an upper horizontal adjusting seat through a plurality of weighing sensors, the lower part of the upper horizontal adjusting seat is connected with a lower horizontal adjusting seat through a plurality of support columns, and the upper end of the lifting cavity is provided with a cross-shaped balancing unit; the cross balancing unit comprises a bottom plate, a first motor, a second motor, a first guide plate, a second guide plate, a first screw rod, a second screw rod and a balancing weight;
the bottom plate is installed on the upper end face of the lifting cavity, the upper surface of the bottom plate is fixedly connected with a first guide plate, one end of the first guide plate is fixedly connected with a first motor, the output end of the first motor is fixedly connected with a first lead screw, the first lead screw penetrates into a first sliding groove formed in the first guide plate, the upper end of the first guide plate is slidably connected with a second guide plate, a connecting block is fixedly connected to the middle position of the lower end face of the second guide plate and is slidably connected into the first sliding groove, the first lead screw penetrates and is connected with the connecting block, and the first guide plate is perpendicular to the second guide plate;
one end of the second guide plate is fixedly connected with a second motor, the output end of the second motor is fixedly connected with a second lead screw, the second lead screw rotatably penetrates into a second sliding groove formed in the second guide plate, the second lead screw penetrates and is connected with a balancing weight, and the balancing weight is slidably connected into the second sliding groove;
the driven belt wheel is driven by a motor on one side of the mounting plate through a belt, so that the lifting cavity rotates, a control box is arranged on one side of the lifting cavity, a controller is arranged in the control box, the first motor, the second motor and the weighing sensor are electrically connected with the controller, the weighing sensor can adopt a spoke type weighing sensor, when a tungsten wire rope in the lifting cavity is wound on a lifting single crystal, the weighing sensor detects that the gravity of the spoke type weighing sensor pressed downwards is reduced, and at the moment, the gravity center deviation of the lifting cavity is explained, so that the linearity of the lifting crystal column is influenced; the controller controls the first motor and the second motor to rotate, the first lead screw drives the second guide plate to move along the first sliding groove, the second lead screw drives the balancing weight to move along the second sliding groove, the gravity center of the lifting cavity is changed, meanwhile, data measured by the weighing sensors are generated in the controller in real time, and when the data measured by all the weighing sensors are consistent or within a specified error range, the first motor and the second motor stop working and are in a constantly standby state; through the matching between the cross balance adjusting unit and the weighing sensor, the difference of feedback signals of the weighing sensor judges the gravity center offset position, and whether the lifting head below the integral lifting cavity is in a balanced state is monitored in real time; according to the collected gravity center offset signal, the crystal bar is leveled in real time by the cross-shaped balance adjusting unit above the lifting cavity, so that the lifting mechanism can lift the crystal bar and the crystal bar is always in a balanced state, the quality of the crystal bar can be further improved, the crystal pulling process is further perfected, and the productivity and the benefit of the crystal bar are maximized.
Preferably, the end part of the first guide plate is symmetrically provided with a first extension groove, a first extension plate is arranged in the first extension groove, and the first extension groove penetrates through two sides of the first guide plate; the lower plate surface of the second guide plate is symmetrically provided with L-shaped rods, one ends of the L-shaped rods are fixedly connected to the second guide plate, and the other ends of the L-shaped rods penetrate into the first extension groove and are fixedly connected with the first extension plate;
a second extending groove is symmetrically formed in the end part of the second guide plate, a second extending plate is arranged in the second extending groove, and the second extending groove penetrates into the second sliding groove; two sides of the lower end of the balancing weight penetrate into the second extending groove and are fixedly connected to the second extending plate; when the balancing weight moves along the second sliding groove, the balancing weight drives the second extending plate to extend into or out of the second extending groove, and the second guide plate drives the first extension plate to extend into or out of the first extension groove through the L-shaped rod, the gravity of the balancing weight is distributed on the second extension plate, and the gravity of the second guide plate, the second screw rod, the balancing weight and the second motor is distributed on the first extension plate, so that the gravity center adjustment is more uniform and mild, rather than the gravity adjustment is concentrated on one point, the point is a gravity center point of the balancing weight and a gravity concentration point of the second guide plate, the second screw rod, the balancing weight and the second motor, the gravity adjustment is concentrated on one point, the gravity center changes rapidly, the swing amplitude of the lifting cavity is large, the center of gravity balance adjustment efficiency is influenced, the crystal bar is long in unbalanced time period, the defective part on the crystal bar is large, and the productivity and the benefit are influenced.
Preferably, an oil groove is formed in the upper end of the balancing weight, lubricating oil is contained in the oil groove, an oil outlet is formed in the bottom of the oil groove, and the oil outlet is communicated with the connecting position of the second screw rod and the balancing weight and penetrates to the bottom of the connecting block; the ambient temperature all around of single crystal growing furnace operational environment is higher, a lead screw and connecting block junction, and the lubricating oil evaporation of No. two lead screws and balancing weight junctions is very fast, and when the evaporation lacks the lubrication, influence between connecting block and a lead screw, and the smooth and easy nature of transmission between No. two lead screws and the balancing weight, this efficiency that will influence the focus and adjust the balance, for this, set up the oil groove, pour into lubricating oil into the oil groove, lubricating oil along No. two lead screws of oil outlet flow and balancing weight hookup location, and a lead screw and connecting block hookup location, for hookup location point supplementary lubricating oil, guarantee transmission smooth and easy nature, thereby guarantee to promote chamber focus regulation efficiency.
Preferably, an oil limiting mechanism is arranged at the oil inlet position of the oil outlet; the oil limiting mechanism comprises a rotating shaft and a roller; the middle of the roller is rotatably connected with a rotating shaft, two ends of the rotating shaft are fixedly connected in the oil inlet position of the oil outlet, the outer ring of the roller is tightly attached to the inner surface of the oil inlet position of the oil outlet, and a plurality of pre-assembled grooves are uniformly formed in the outer ring of the roller; the second lead screw drives the balancing weight to move, simultaneously the roller moves along the last face of second deflector, after pre-installation groove rotates to the oil groove on the roller, lubricating oil in the oil groove pours into the pre-installation inslot, when the pre-installation groove that holds lubricating oil rotates to the last face in-process of second deflector, the lubricating oil in the pre-installation inslot flows out, and flow to in No. two spouts, make the lubricating oil in the oil groove intermittent outflow, but not disposable whole outflow, if disposable outflow, the lubricating oil self in the oil groove has gravity, disposable outflow, influence the whole gravity of balancing weight, namely lubricating oil disposable outflow, it is great to adjust the balanced influence that causes of promotion chamber focus, and the intermittent outflow of lubricating oil in the oil groove, it causes the balanced influence less to promote the balanced influence of chamber focus, cross balance adjustment unit can realize promoting chamber focus leveling fast.
Preferably, a driven gear is arranged between the bottom plate and the first guide plate, the driven gear is rotationally connected to the bottom plate, the first guide plate is fixedly connected to the upper end face of the driven gear, driving gears are uniformly arranged on the outer side of the driven gear, and the driving gears are meshed with the driven gear; every driving gear is driven by servo motor, servo motor installs inside the bottom plate, servo motor electric connection controller, when certain weighing sensor of mounting panel below records that it changes to bear the weight of the body, servo motor passes through driving gear drive driven gear and rotates, driven gear drives the rotation of cross balancing unit, make under the tip of deflector or No. two deflectors correspond to this certain weighing sensor, realize centrobaric accurate regulation, improve promotion chamber focus leveling accuracy.
Preferably, a through hole is formed in the lower plate surface of the first guide plate and is communicated with the inside of the first sliding groove; a plurality of oil ducts are uniformly formed in the driven gear, one end of each oil duct is communicated with the through hole, and the other end of each oil duct is communicated to the root position of the driven gear; lubricating oil in the first sliding groove flows into the oil duct along the through hole, then flows to the meshing part of the driven gear and the driving gear along the oil duct, and oil is supplemented to the meshing part, so that abrasion is reduced, the accuracy of the rotating angle when the driven gear is meshed with the driving gear is improved, and the accuracy of the gravity center leveling of the lifting cavity is improved.
Preferably, the upper plate surface of the bottom plate is provided with an oil collecting groove, the oil collecting groove is annular and is positioned on the lower end surface of the driven gear, the lower end surface of the driven gear is provided with an annular groove, the diameter of the annular groove is the same as that of the oil collecting groove, balls are arranged in the annular groove, and the driven gear and the bottom plate are connected together in a rolling manner through the balls; lubricating oil on the driven gear flows into to the oil trap along the bottom plate in, lubricates the ball between oil trap and the ring channel, lubricates the rotation between driven gear and the bottom plate, guarantees the smooth and easy nature of rotation between driven gear and the bottom plate to accurate realization driven gear's rotation is of value to promoting the chamber focus then and adjusts the accuracy, improves crystal pillar promotion formation quality.
Preferably, the bottom plate is hollow, the inner ring of the oil collecting tank is provided with a guide groove, one notch of the guide groove is communicated with the oil collecting tank, and the other notch of the guide groove is communicated with the hollow part in the bottom plate; redundant lubricating oil in the oil collecting groove flows into the hollow part of the bottom plate along the guide groove, so that the redundant lubricating oil is prevented from spreading to the lifting cavity along the bottom plate to pollute the normal operation of parts in the lifter and influence the lifting quality of crystal columns.
Preferably, a pressure head at the upper end of the weighing sensor is embedded in a groove formed in the lower end of the mounting plate, a plurality of notches are uniformly formed in the outer ring of the mounting plate, the notches correspond to the grooves, a screw rod is connected with the notches in an internal thread manner, the screw rod penetrates into the groove, an inclined ejecting block is arranged in the groove, the end part of the screw rod is rotatably connected with the vertical end face of the inclined ejecting block, and the inclined face of the inclined ejecting block is attached to and extruded on an inclined face formed in the upper end of the pressure head; the lifting cavity is initially leveled before being used, namely, the screw rod is rotated, the inclined ejector block is pushed and extrudes the pressure head, the levelness of the mounting plate is adjusted, the lifting cavity is pre-adjusted, the lifting cavity is guaranteed to be in a balanced rotating state to lift the crystal column when the operation starts, and the quality of the crystal column is improved.
Preferably, a rolling groove is formed in the inclined surface of the inclined ejecting block, a roller rod is arranged in the rolling groove, and the roller rod is rotatably connected in the rolling groove; the inclined plane of pressure head is connected through the roller rod between the inclined plane of oblique kicking block for relative movement between two inclined planes is more smooth and easy, reduces the dead phenomenon of card between the inclined plane, and the mistake is in order to adjust balance for promoting the chamber, and when later stage promoted chamber work operation, produces relative movement between the inclined plane, adjusts balance for promoting the chamber and causes pressure.
The invention has the following beneficial effects:
1. the S-shaped weighing sensor is replaced by a ring-shaped weighing sensor, the mounting position of the S-shaped weighing sensor is moved downwards, the upper structure of the lifting cavity is simplified, the lifting structure is further compacted, the ring-shaped weighing sensor can adopt a spoke-type weighing sensor, a plurality of ring-shaped weighing sensors are distributed, the mass of a crystal bar is monitored in real time, the gravity center offset position is judged through the difference of sensor feedback signals, and whether the lifting head structure is in a balanced state or not is monitored in real time from the gravity center offset position
2. Through the matching between the cross balance adjusting unit and the weighing sensor, the difference of feedback signals of the weighing sensor judges the gravity center offset position, and whether the lifting head below the integral lifting cavity is in a balanced state is monitored in real time; according to the collected gravity center offset signal, the crystal bar is leveled in real time by the cross-shaped balance adjusting unit above the lifting cavity, so that the lifting mechanism can lift the crystal bar and the crystal bar is always in a balanced state, the quality of the crystal bar can be further improved, the crystal pulling process is further perfected, and the productivity and the benefit of the crystal bar are maximized.
3. Through the matching between the cross balance adjusting unit and the weighing sensor, the gravity center position of the crystal bar in different process periods such as seeding, shouldering, equal diameter and the like can be monitored in real time along with the increase of crystal pulling times, the gravity center position of the crystal bar in each process period can be basically fixed through mass gravity center monitoring data, and the gravity center position is not only favorable for perfecting a crystal pulling process, but also can maximize the productivity benefit of the crystal bar; and with the fixation of the gravity center position of each process stage, whether a self-balancing adjusting structure can be cancelled or not can be considered in the future, and the lifting structure is further simplified.
4. When the balancing weight removed along No. two spouts, the balancing weight drives No. two extension boards and stretches into or stretch out No. two extension grooves, and No. two deflectors drive an extension board through L shape pole and stretch into or stretch out an extension groove, share the gravity of balancing weight on No. two extension boards, and No. two deflectors, No. two lead screws, the gravity of balancing weight and No. two motors shares on an extension board, make the focus adjust more evenly and relax, improve the focus and adjust the accuracy.
Drawings
The invention will be further described with reference to the accompanying drawings.
FIG. 1 is a perspective view of a lift chamber of the present invention;
FIG. 2 is a drawing showing the combination of the lift chamber and the cross balancing unit of the present invention;
FIG. 3 is a perspective view of the cross balancing unit of the present invention;
FIG. 4 is a cross-sectional view of a cross balancing unit according to the present invention;
FIG. 5 is a view of the mounting plate and the upper leveling base of the present invention in combination;
FIG. 6 is a cross-sectional view of the mounting plate and upper leveling seat of the present invention;
FIG. 7 is a top view of the base plate of the present invention;
in the figure: the device comprises a lifting cavity 1, a driven belt wheel 2, a mounting plate 3, an upper horizontal adjusting seat 4, a lower horizontal adjusting seat 5, a weighing sensor 6, a supporting column 7, a bottom plate 8, a first motor 9, a second motor 10, a first guide plate 11, a second guide plate 12, a first screw rod 13, a second screw rod 14, a balancing weight 15, a first sliding groove 16, a connecting block 17, a second sliding groove 18, a first extending groove 19, a first extending plate 20, an L-shaped rod 21, a second extending groove 22, a second extending plate 23, an oil groove 24, an oil outlet 25, a rotating shaft 26, a roller 27, a pre-installing groove 28, a driven gear 29, a driving gear 30, an oil collecting groove 32, a ball 33, a guide groove 34, a groove 35, a notch 36, a screw rod 37, an inclined top block 38, a pressure head 39 and a roller rod 40.
Detailed Description
The present invention will be further described with reference to the following detailed description so that the technical means, the creation features, the achievement purposes and the effects of the present invention can be easily understood.
The first embodiment is as follows:
referring to fig. 1-7, a dynamic gravity center monitoring self-balancing system for seed crystal lifting of a single crystal furnace comprises a lifting cavity 1, a driven belt wheel 2, a mounting plate 3, an upper horizontal adjusting seat 4 and a lower horizontal adjusting seat 5; the lower end of the lifting cavity 1 is fixedly connected with a driven belt wheel 2, the driven belt wheel 2 is rotatably installed on the upper surface of an installation plate 3, the lower surface of the installation plate 3 is connected with an upper horizontal adjusting seat 4 through a plurality of weighing sensors 6, the lower part of the upper horizontal adjusting seat 4 is connected with a lower horizontal adjusting seat 5 through a plurality of support columns 7, and the upper end of the lifting cavity 1 is provided with a cross balance adjusting unit; the cross balancing unit comprises a bottom plate 8, a first motor 9, a second motor 10, a first guide plate 11, a second guide plate 12, a first screw rod 13, a second screw rod 14 and a balancing weight 15;
the bottom plate 8 is installed on the upper end face of the lifting cavity 1, the upper surface of the bottom plate 8 is fixedly connected with a first guide plate 11, one end of the first guide plate 11 is fixedly connected with a first motor 9, the output end of the first motor 9 is fixedly connected with a first lead screw 13, the first lead screw 13 penetrates into a first sliding groove 16 formed in the first guide plate 11, the upper end of the first guide plate 11 is slidably connected with a second guide plate 12, a connecting block 17 is fixedly connected to the middle position of the lower end face of the second guide plate 12, the connecting block 17 is slidably connected in the first sliding groove 16, the first lead screw 13 penetrates and is connected with the connecting block 17, and the first guide plate 11 is perpendicular to the second guide plate 12;
one end of the second guide plate 12 is fixedly connected with a second motor 10, the output end of the second motor 10 is fixedly connected with a second lead screw 14, the second lead screw 14 rotatably penetrates into a second sliding groove 18 formed in the second guide plate 12, the second lead screw 14 penetrates through a balancing weight 15, and the balancing weight 15 is slidably connected in the second sliding groove 18;
the driven belt wheel 2 is driven by a motor on one side of the mounting plate 3 through a belt, so that the lifting cavity 1 rotates, a control box is arranged on one side of the lifting cavity 1, a controller is arranged in the control box, the first motor 9, the second motor 10 and the weighing sensor 6 are electrically connected with the controller, the weighing sensor 6 can adopt a spoke type weighing sensor 6, when a tungsten wire rope in the lifting cavity 1 is wound on a lifting single crystal, the weighing sensor 6 measures that the gravity of the spoke type weighing sensor 6 pressed downwards is reduced, and at the moment, the gravity center deviation of the lifting cavity 1 is explained, and the linearity of a lifting crystal column can be influenced; the controller controls the first motor 9 and the second motor 10 to rotate, the first lead screw 13 drives the second guide plate 12 to move along the first sliding groove 16, the second lead screw 14 drives the balancing weight 15 to move along the second sliding groove 18, the gravity center of the lifting cavity 1 is changed, meanwhile, data measured by the weighing sensors 6 are generated into the controller in real time, and when the data measured by all the weighing sensors 6 are consistent, or within a specified error range, the first motor 9 and the second motor 10 stop working and are in a constantly standby state; through the matching between the cross balance adjusting unit and the weighing sensor 6, the difference of the feedback signals of the weighing sensor 6 judges the gravity center offset position, and therefore whether the lifting head below the integral lifting cavity 1 is in a balanced state or not is monitored in real time; according to the collected gravity center offset signal, the crystal bar is leveled in real time by a cross balance adjusting unit above the lifting cavity 1, so that the lifting mechanism can lift the crystal bar and the crystal bar is always in a balanced state, the quality of the crystal bar can be further improved, the crystal pulling process is further perfected, and the productivity benefit of the crystal bar is maximized;
As shown in fig. 3-4, a first extending groove 19 is symmetrically formed in an end portion of the first guide plate 11, a first extending plate 20 is disposed in the first extending groove 19, and the first extending groove 19 penetrates through two sides of the first guide plate 11; the lower plate surface of the second guide plate 12 is symmetrically provided with L-shaped rods 21, one ends of the L-shaped rods 21 are fixedly connected to the second guide plate 12, and the other ends of the L-shaped rods 21 penetrate into the first extension grooves 19 and are fixedly connected with the first extension plates 20;
a second extending groove 22 is symmetrically formed in the end portion of the second guide plate 12, a second extending plate 23 is arranged in the second extending groove 22, and the second extending groove 22 penetrates into the second sliding groove 18; two sides of the lower end of the balancing weight 15 penetrate into the second extending groove 22 and are fixedly connected to the second extending plate 23; when the balancing weight 15 moves along the second sliding groove 18, the balancing weight 15 drives the second extending plate 23 to extend into or out of the second extending groove 22, the second guide plate 12 drives the first extending plate 20 to extend into or out of the first extending groove 19 through the L-shaped rod 21, the gravity of the balancing weight 15 is distributed on the second extending plate 23, the gravity of the second guide plate 12, the second lead screw 14, the balancing weight 15 and the second motor 10 is distributed on the first extending plate 20, so that the gravity center adjustment is more uniform and mild, rather than the gravity adjustment is concentrated on one point, which is a gravity center point of the balancing weight 15 and a gravity concentration point of the second guide plate 12, the second lead screw 14, the balancing weight 15 and the second motor 10, the gravity adjustment is concentrated on one point, the gravity center change is more rapid, the swing amplitude of the lifting cavity 1 is larger, the gravity center balance adjustment efficiency is influenced, and the crystal bar is in an unbalanced time period is longer, the defective part on the crystal bar is large, and the productivity and the benefit are influenced.
As shown in fig. 4, an oil groove 24 is formed in the upper end of the counterweight block 15, lubricating oil is contained in the oil groove 24, an oil outlet 25 is formed in the bottom of the oil groove 24, and the oil outlet 25 communicates with the connecting position of the second lead screw 14 and the counterweight block 15 and penetrates to the bottom of the connecting block 17; the ambient temperature all around of single crystal growing furnace operational environment is higher, a lead screw 13 and connecting block 17 junction, and the lubricating oil evaporation of No. two lead screws 14 and 15 junctions of balancing weight is very fast, and when the evaporation lacks the lubrication, influence between connecting block 17 and a lead screw 13, and the smooth nature of transmission between No. two lead screws 14 and the balancing weight 15, this will influence the balanced efficiency of focus regulation, for this reason, set up oil groove 24, pour into oil groove 24 with lubricating oil into, lubricating oil along No. two lead screws 14 of oil outlet 25 flow and 15 hookup location of balancing weight, and a lead screw 13 and connecting block 17 hookup location, for hookup location point supplementary lubricating oil, guarantee transmission smooth and easy nature, thereby guarantee to promote 1 focus regulation efficiency in chamber.
As shown in fig. 4, an oil limiting mechanism is arranged at the oil inlet position of the oil outlet 25; the oil limiting mechanism comprises a rotating shaft 26 and a roller 27; the middle of the roller 27 is rotatably connected with a rotating shaft 26, two ends of the rotating shaft 26 are fixedly connected in the oil inlet position of the oil outlet 25, the outer ring of the roller 27 is tightly attached to the inner surface of the oil inlet position of the oil outlet 25, and a plurality of pre-assembly grooves 28 are uniformly formed in the outer ring of the roller 27; the second screw rod 14 drives the counterweight block 15 to move, and simultaneously the roller 27 moves along the upper plate surface of the second guide plate 12, when the pre-loading groove 28 on the roller 27 rotates into the oil groove 24, the lubricating oil in the oil groove 24 is filled into the pre-loading groove 28, when the pre-loading groove 28 loaded with the lubricating oil rotates to the upper plate surface of the second guide plate 12, the lubricating oil in the pre-loading groove 28 flows out, and flows into the second sliding groove 18, so that the lubricating oil in the oil groove 24 flows out intermittently, instead of flowing out all at once, if the lubricating oil flows out at once, the lubricating oil in the oil groove 24 has gravity and flows out at once, the whole gravity of the balancing weight 15 is influenced, namely, the lubricating oil flows out once, which has great influence on adjusting the gravity center balance of the lifting cavity 1, and the lubricating oil in the oil groove 24 flows out discontinuously, the influence on the gravity center balance of the lifting cavity 1 is small, and the gravity center leveling of the lifting cavity 1 can be quickly realized by the cross balance adjusting unit.
As shown in fig. 2, a driven gear 29 is arranged between the bottom plate 8 and the first guide plate 11, the driven gear 29 is rotatably connected to the bottom plate 8, the first guide plate 11 is fixedly connected to the upper end surface of the driven gear 29, driving gears 30 are uniformly arranged on the outer sides of the driven gear 29, and the driving gears 30 are meshed with the driven gear 29; every driving gear 30 is driven by servo motor, servo motor installs inside bottom plate 8, servo motor electric connection controller, when certain weighing sensor 6 of mounting panel 3 below records that it changes to bear the weight of the body, servo motor passes through driving gear 30 drive driven gear 29 and rotates, driven gear 29 drives the rotation of cross balance adjustment unit, make the tip of No. one deflector 11 or No. two deflectors 12 under correspond to this certain weighing sensor 6, realize centrobaric accurate regulation, improve promotion chamber 1 focus leveling accuracy.
As shown in fig. 2, a through hole is formed in the lower plate surface of the first guide plate 11, and the through hole is communicated with the inside of the first sliding groove 16; a plurality of oil passages are uniformly formed in the driven gear 29, one end of each oil passage is communicated with the through hole, and the other end of each oil passage is communicated with the tooth root part of the driven gear 29; lubricating oil in the first sliding groove 16 flows into the oil passage along the through hole, then flows to the meshing part of the driven gear 29 and the driving gear 30 along the oil passage, and oil is supplemented to the meshing part, so that abrasion is reduced, the accuracy of the rotating angle when the driven gear 29 is meshed with the driving gear 30 is improved, and the accuracy of the gravity center leveling of the lifting cavity 1 is improved.
As shown in fig. 7, an oil collecting groove 32 is formed in the upper surface of the bottom plate 8, the oil collecting groove 32 is in a ring shape, the oil collecting groove 32 is located on the lower end surface of the driven gear 29, an annular groove is formed in the lower end surface of the driven gear 29, the diameter of the annular groove is the same as that of the oil collecting groove 32, a ball 33 is arranged in the annular groove, and the driven gear 29 and the bottom plate 8 are connected together in a rolling manner through the ball 33; lubricating oil on the driven gear 29 flows into oil sump 32 along bottom plate 8 in, lubricates ball 33 between oil sump 32 and the ring channel, lubricates the rotation between driven gear 29 and the bottom plate 8, guarantees the smooth and easy nature of rotation between driven gear 29 and the bottom plate 8 to accurate rotation that realizes driven gear 29 is of value to promoting chamber 1 focus then and adjusts the accuracy, improves the crystal pillar and promotes the generation quality.
As shown in fig. 7, the bottom plate 8 is hollow, the inner ring of the oil collecting groove 32 is provided with a guide groove 34, one notch of the guide groove 34 is communicated with the oil collecting groove 32, and the other notch of the guide groove 34 is communicated with the hollow part in the bottom plate 8; the redundant lubricating oil in the oil collecting groove 32 flows into the hollow part of the bottom plate 8 along the guide groove 34, so that the redundant lubricating oil is prevented from spreading to the lifting cavity 1 along the bottom plate 8 to pollute the normal operation of parts in the lifter and influence the lifting quality of the crystal column.
Example two:
referring to fig. 5 to 6, as another embodiment of the present invention, in a first comparative example, a pressure head 39 at the upper end of a weighing sensor 6 is embedded in a groove 35 formed in the lower end of a mounting plate 3, a plurality of notches 36 are uniformly formed in the outer ring of the mounting plate 3, the notches 36 correspond to the groove 35, a screw 37 is connected in the notches 36 through threads, the screw 37 penetrates into the groove 35, an inclined top block 38 is arranged in the groove 35, the end of the screw 37 is rotatably connected to a vertical end face of the inclined top block 38, and an inclined face of the inclined top block 38 is attached to and extruded on an inclined face formed at the upper end of the pressure head 39; before the lifting cavity 1 is not used, the lifting cavity is firstly subjected to primary leveling, namely, the screw rod 37 is rotated, the inclined ejector block 38 is pushed and extrudes the pressure head 39, the levelness of the mounting plate 3 is adjusted, the lifting cavity 1 is pre-adjusted, the lifting cavity 1 is ensured to be in a balanced state when running, a crystal column is lifted, and the quality of the crystal column is improved.
A rolling groove is formed in the inclined surface of the inclined ejecting block 38, a roller rod 40 is arranged in the rolling groove, and the roller rod 40 is rotatably connected in the rolling groove; the inclined plane of pressure head 39 is connected through roller rod 40 with the inclined plane of oblique kicking block 38 for relative movement between two inclined planes is more smooth and easy, reduces the dead phenomenon of card between the inclined plane, and the mistake is for promoting chamber 1 in order to adjust balance, and later stage promotes during operation of chamber 1, produces relative movement between the inclined plane, causes pressure for promoting chamber 1 balance.
The working principle is as follows: the driven belt wheel 2 is driven by a motor on one side of the mounting plate 3 through a belt, so that the lifting cavity 1 rotates, a control box is arranged on one side of the lifting cavity 1, a controller is arranged in the control box, the first motor 9, the second motor 10 and the weighing sensor 6 are electrically connected with the controller, the weighing sensor 6 can adopt a spoke type weighing sensor 6, when a tungsten wire rope in the lifting cavity 1 winds an upper lifting single crystal, the weighing sensor 6 measures that the gravity of the spoke type weighing sensor 6 pressed down is reduced, at the moment, the gravity center deviation of the lifting cavity 1 is explained, and the linearity of a lifting crystal column can be influenced; the controller controls the first motor 9 and the second motor 10 to rotate, the first lead screw 13 drives the second guide plate 12 to move along the first sliding groove 16, the second lead screw 14 drives the balancing weight 15 to move along the second sliding groove 18, the gravity center of the lifting cavity 1 is changed, meanwhile, data measured by the weighing sensors 6 are generated into the controller in real time, and when the data measured by all the weighing sensors 6 are consistent, or within a specified error range, the first motor 9 and the second motor 10 stop working and are in a constantly standby state; through the matching between the cross balance adjusting unit and the weighing sensor 6, the difference of the feedback signals of the weighing sensor 6 judges the gravity center offset position, and therefore whether the lifting head below the integral lifting cavity 1 is in a balanced state or not is monitored in real time; according to the collected gravity center offset signal, the crystal bar is leveled in real time by a cross balance adjusting unit above the lifting cavity 1, so that the lifting mechanism can lift the crystal bar and the crystal bar is always in a balanced state, the quality of the crystal bar can be further improved, the crystal pulling process is further perfected, and the productivity benefit of the crystal bar is maximized;
when the balancing weight 15 moves along the second sliding groove 18, the balancing weight 15 drives the second extending plate 23 to extend into or out of the second extending groove 22, the second guide plate 12 drives the first extending plate 20 to extend into or out of the first extending groove 19 through the L-shaped rod 21, the gravity of the balancing weight 15 is distributed on the second extending plate 23, the gravity of the second guide plate 12, the second lead screw 14, the balancing weight 15 and the second motor 10 is distributed on the first extending plate 20, so that the gravity center adjustment is more uniform and mild, rather than the gravity adjustment is concentrated on one point, which is a gravity center point of the balancing weight 15 and a gravity concentration point of the second guide plate 12, the second lead screw 14, the balancing weight 15 and the second motor 10, the gravity adjustment is concentrated on one point, the gravity center change is more rapid, the swing amplitude of the lifting cavity 1 is larger, the gravity center balance adjustment efficiency is influenced, and the crystal bar is in an unbalanced time period is longer, the defective part on the crystal bar is large, so that the productivity and the benefit are influenced;
the temperature of the surrounding environment of the operation environment of the single crystal furnace is high, the connection position of the first screw rod 13 and the connecting block 17 and the connection position of the second screw rod 14 and the balancing weight 15 are quickly evaporated, and when the evaporation lacks lubrication, the transmission smoothness between the connecting block 17 and the first screw rod 13 and between the second screw rod 14 and the balancing weight 15 are influenced, so that the efficiency of gravity center adjustment balance is influenced, therefore, an oil groove 24 is arranged, lubricating oil is injected into the oil groove 24, the lubricating oil flows along the oil outlet 25 to the connection position of the second screw rod 14 and the balancing weight 15 and the connection position of the first screw rod 13 and the connecting block 17, the lubricating oil is supplemented to the connection position point, the transmission smoothness is ensured, and the efficiency of gravity center adjustment of the lifting cavity 1 is ensured;
the second screw rod 14 drives the counterweight block 15 to move, and simultaneously the roller 27 moves along the upper plate surface of the second guide plate 12, when the pre-loading groove 28 on the roller 27 rotates into the oil groove 24, the lubricating oil in the oil groove 24 is filled into the pre-loading groove 28, when the pre-loading groove 28 loaded with the lubricating oil rotates to the upper plate surface of the second guide plate 12, the lubricating oil in the pre-loading groove 28 flows out, and flows into the second sliding groove 18, so that the lubricating oil in the oil groove 24 flows out intermittently, instead of flowing out all at once, if the lubricating oil flows out at once, the lubricating oil in the oil groove 24 has gravity and flows out at once, the whole gravity of the balancing weight 15 is influenced, namely, the lubricating oil flows out once, which has great influence on adjusting the gravity center balance of the lifting cavity 1, and the lubricating oil in the oil groove 24 flows out discontinuously, the influence on the gravity center balance of the lifting cavity 1 is small, and the cross balance adjusting unit can quickly realize the gravity center leveling of the lifting cavity 1;
each driving gear 30 is driven by a servo motor, the servo motor is installed inside the bottom plate 8, the servo motor is electrically connected with a controller, when a certain weighing sensor 6 below the mounting plate 3 detects that the bearing gravity changes, the servo motor drives the driven gear 29 to rotate through the driving gear 30, the driven gear 29 drives the cross balancing unit to rotate, so that the part right below the end part of the first guide plate 11 or the second guide plate 12 corresponds to the certain weighing sensor 6, the accurate adjustment of the gravity center is realized, and the gravity center leveling accuracy of the lifting cavity 1 is improved;
lubricating oil in the first sliding groove 16 flows into the oil duct along the through hole, then flows to the meshing part of the driven gear 29 and the driving gear 30 along the oil duct, and is supplemented to the meshing part, so that abrasion is reduced, the rotating angle accuracy when the driven gear 29 is meshed with the driving gear 30 is improved, and the gravity center leveling accuracy of the lifting cavity 1 is improved;
lubricating oil on the driven gear 29 flows into the oil collecting groove 32 along the bottom plate 8, lubricates balls 33 between the oil collecting groove 32 and the annular groove, lubricates rotation between the driven gear 29 and the bottom plate 8, and ensures the smoothness of rotation between the driven gear 29 and the bottom plate 8, so that the rotation of the driven gear 29 is accurately realized, the accuracy of adjusting the center of gravity of the cavity 1 is improved, and the quality of lifting and generating a crystal column is improved;
the redundant lubricating oil in the oil collecting groove 32 flows into the hollow part of the bottom plate 8 along the guide groove 34, so that the redundant lubricating oil is prevented from spreading to the lifting cavity 1 along the bottom plate 8 to pollute the normal operation of parts in the lifter and influence the lifting quality of the crystal column.
The front, the back, the left, the right, the upper and the lower are all based on figure 1 in the attached drawings of the specification, according to the standard of the observation angle of a person, the side of the device facing an observer is defined as the front, the left side of the observer is defined as the left, and the like.
In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate orientations or positional relationships based on those shown in the drawings, and are used merely for convenience in describing the present invention and for simplifying the description, but do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the scope of the present invention.
The foregoing shows and describes the general principles, principal features and advantages of the invention. It will be understood by those skilled in the art that the present invention is not limited to the embodiments described above, which are described in the specification and illustrated only to illustrate the principle of the present invention, but that various changes and modifications may be made therein without departing from the spirit and scope of the present invention, which fall within the scope of the invention as claimed. The scope of the invention is defined by the appended claims and equivalents thereof.
Claims (10)
1. The dynamic gravity center monitoring self-balancing system for seed crystal lifting of the single crystal furnace comprises a lifting cavity (1), a driven belt wheel (2), a mounting plate (3), an upper horizontal adjusting seat (4) and a lower horizontal adjusting seat (5); promote chamber (1) lower extreme rigid coupling driven pulley (2), driven pulley (2) rotate and install the upper surface in mounting panel (3), and horizontal adjustment seat (4) are connected through a plurality of weighing sensor (6) to the lower surface of mounting panel (3), go up horizontal adjustment seat (4) below and connect horizontal adjustment seat (5) down through a plurality of support columns (7), its characterized in that: the upper end of the lifting cavity (1) is provided with a cross balance adjusting unit; the cross balancing unit comprises a bottom plate (8), a first motor (9), a second motor (10), a first guide plate (11), a second guide plate (12), a first screw rod (13), a second screw rod (14) and a balancing weight (15);
the bottom plate (8) is installed on the upper end face of the lifting cavity (1), the upper surface of the bottom plate (8) is fixedly connected with a first guide plate (11), one end of the first guide plate (11) is fixedly connected with a first motor (9), the output end of the first motor (9) is fixedly connected with a first lead screw (13), the first lead screw (13) penetrates into a first sliding groove (16) formed in the first guide plate (11), the upper end of the first guide plate (11) is slidably connected with a second guide plate (12), a connecting block (17) is fixedly connected to the middle position of the lower end face of the second guide plate (12), the connecting block (17) is slidably connected into the first sliding groove (16), the first lead screw (13) penetrates through the connecting block (17), and the first guide plate (11) is perpendicular to the second guide plate (12);
one end of the second guide plate (12) is fixedly connected with a second motor (10), the output end of the second motor (10) is fixedly connected with a second screw rod (14), the second screw rod (14) rotates to penetrate into a second sliding groove (18) formed in the second guide plate (12), the second screw rod (14) penetrates through a balancing weight (15), and the balancing weight (15) is slidably connected into the second sliding groove (18).
2. The single crystal furnace seed crystal lifting dynamic gravity center monitoring self-balancing system according to claim 1, characterized in that: a first extending groove (19) is symmetrically formed in the end portion of the first guide plate (11), a first extending plate (20) is arranged in the first extending groove (19), and the first extending groove (19) penetrates through two sides of the first guide plate (11); the lower plate surface of the second guide plate (12) is symmetrically provided with L-shaped rods (21), one end of each L-shaped rod (21) is fixedly connected to the second guide plate (12), and the other end of each L-shaped rod (21) penetrates into the first extension groove (19) and is fixedly connected with the first extension plate (20);
a second extending groove (22) is symmetrically formed in the end portion of the second guide plate (12), a second extending plate (23) is arranged in the second extending groove (22), and the second extending groove (22) penetrates into the second sliding groove (18); two sides of the lower end of the balancing weight (15) penetrate into the second extending groove (22) and are fixedly connected to the second extending plate (23).
3. The single crystal furnace seed crystal lifting dynamic gravity center monitoring self-balancing system according to claim 1, characterized in that: oil groove (24) are seted up to the upper end of balancing weight (15), hold in oil groove (24) and be equipped with lubricating oil, and oil outlet (25) are opened to the bottom of oil groove (24), and oil outlet (25) communicate No. two lead screws (14) and balancing weight (15) hookup location to run through to the bottom of connecting block (17).
4. The single crystal furnace seed crystal lifting dynamic gravity center monitoring self-balancing system of claim 3, characterized in that: an oil limiting mechanism is arranged at the oil inlet position of the oil outlet hole (25); the oil limiting mechanism comprises a rotating shaft (26) and a roller (27); the middle of the roller (27) is rotatably connected with a rotating shaft (26), the two ends of the rotating shaft (26) are fixedly connected in the oil inlet position of the oil outlet hole (25), the outer ring of the roller (27) is tightly attached to the inner surface of the oil inlet position of the oil outlet hole (25), and a plurality of pre-assembled grooves (28) are uniformly formed in the outer ring of the roller (27).
5. The single crystal furnace seed crystal lifting dynamic gravity center monitoring self-balancing system according to claim 1, characterized in that: be equipped with driven gear (29) between bottom plate (8) and deflector (11), driven gear (29) rotate to be connected on bottom plate (8), deflector (11) rigid coupling is on driven gear's (29) up end, and driven gear (29) outside evenly is equipped with driving gear (30), and driving gear (30) and driven gear (29) meshing.
6. The single crystal furnace seed crystal lifting dynamic gravity center monitoring self-balancing system according to claim 5, characterized in that: a through hole is formed in the lower plate surface of the first guide plate (11), and the through hole is communicated with the interior of the first sliding groove (16); a plurality of oil channels are uniformly formed in the driven gear (29), one end of each oil channel is communicated with the through hole, and the other end of each oil channel is communicated to the tooth root of the driven gear (29).
7. The single crystal furnace seed crystal lifting dynamic gravity center monitoring self-balancing system according to claim 5, characterized in that: an oil collecting groove (32) is formed in the upper plate surface of the bottom plate (8), the oil collecting groove (32) is annular, the oil collecting groove (32) is located on the lower end surface of the driven gear (29), an annular groove is formed in the lower end surface of the driven gear (29), the diameter of the annular groove is the same as that of the oil collecting groove (32), balls (33) are arranged in the annular groove, and the driven gear (29) and the bottom plate (8) are connected together in a rolling mode through the balls (33).
8. The single crystal furnace seed crystal lifting dynamic gravity center monitoring self-balancing system according to claim 7, characterized in that: the bottom plate (8) is hollow, the inner ring of the oil collecting groove (32) is provided with a guide groove (34), one notch of the guide groove (34) is communicated with the oil collecting groove (32), and the other notch of the guide groove (34) is communicated with the hollow part in the bottom plate (8).
9. The single crystal furnace seed crystal lifting dynamic gravity center monitoring self-balancing system according to claim 1, characterized in that: pressure head (39) embedding of weighing sensor (6) upper end is seted up recess (35) at mounting panel (3) lower extreme in, a plurality of breach (36) are evenly seted up to mounting panel (3) outer lane, breach (36) are corresponding with recess (35), breach (36) female connection screw rod (37), screw rod (37) run through to in recess (35), be equipped with oblique kicking block (38) in recess (35), the tip of screw rod (37) rotates the vertical terminal surface of connecting oblique kicking block (38), the attached extrusion in the inclined plane of oblique kicking block (38) is on the inclined plane that pressure head (39) upper end was equipped with.
10. The single crystal furnace seed crystal lifting dynamic gravity center monitoring self-balancing system according to claim 9, characterized in that: the inclined plane of the inclined ejector block (38) is provided with a rolling groove, a roller rod (40) is arranged in the rolling groove, and the roller rod (40) is rotatably connected in the rolling groove.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210194834.5A CN114574951A (en) | 2022-03-01 | 2022-03-01 | Single crystal furnace seed crystal lifting dynamic gravity center monitoring self-balancing system |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202210194834.5A CN114574951A (en) | 2022-03-01 | 2022-03-01 | Single crystal furnace seed crystal lifting dynamic gravity center monitoring self-balancing system |
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| CN114574951A true CN114574951A (en) | 2022-06-03 |
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| CN202210194834.5A Withdrawn CN114574951A (en) | 2022-03-01 | 2022-03-01 | Single crystal furnace seed crystal lifting dynamic gravity center monitoring self-balancing system |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116553450A (en) * | 2023-07-11 | 2023-08-08 | 江苏亚雄减速机械有限公司 | Intelligent regulation formula tilting hydraulic elevator is with preventing unbalanced load device |
| CN117187944A (en) * | 2022-10-25 | 2023-12-08 | 浙江晶盛机电股份有限公司 | Adjusting mechanism and single crystal furnace |
-
2022
- 2022-03-01 CN CN202210194834.5A patent/CN114574951A/en not_active Withdrawn
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117187944A (en) * | 2022-10-25 | 2023-12-08 | 浙江晶盛机电股份有限公司 | Adjusting mechanism and single crystal furnace |
| CN117187944B (en) * | 2022-10-25 | 2024-04-19 | 浙江晶盛机电股份有限公司 | Adjusting mechanism and single crystal furnace |
| CN116553450A (en) * | 2023-07-11 | 2023-08-08 | 江苏亚雄减速机械有限公司 | Intelligent regulation formula tilting hydraulic elevator is with preventing unbalanced load device |
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