CN114250547A - Flexible airflow sensing material, sensor and preparation method thereof - Google Patents

Flexible airflow sensing material, sensor and preparation method thereof Download PDF

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CN114250547A
CN114250547A CN202111595089.7A CN202111595089A CN114250547A CN 114250547 A CN114250547 A CN 114250547A CN 202111595089 A CN202111595089 A CN 202111595089A CN 114250547 A CN114250547 A CN 114250547A
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flexible
flexible polymer
polymer film
film
conductive
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CN114250547B (en
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李阳
李�浩
牛闳森
朱健
于金明
岳文静
高嵩
张春伟
阚皞
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University of Jinan
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    • DTEXTILES; PAPER
    • D04BRAIDING; LACE-MAKING; KNITTING; TRIMMINGS; NON-WOVEN FABRICS
    • D04HMAKING TEXTILE FABRICS, e.g. FROM FIBRES OR FILAMENTARY MATERIAL; FABRICS MADE BY SUCH PROCESSES OR APPARATUS, e.g. FELTS, NON-WOVEN FABRICS; COTTON-WOOL; WADDING ; NON-WOVEN FABRICS FROM STAPLE FIBRES, FILAMENTS OR YARNS, BONDED WITH AT LEAST ONE WEB-LIKE MATERIAL DURING THEIR CONSOLIDATION
    • D04H1/00Non-woven fabrics formed wholly or mainly of staple fibres or like relatively short fibres
    • D04H1/70Non-woven fabrics formed wholly or mainly of staple fibres or like relatively short fibres characterised by the method of forming fleeces or layers, e.g. reorientation of fibres
    • D04H1/72Non-woven fabrics formed wholly or mainly of staple fibres or like relatively short fibres characterised by the method of forming fleeces or layers, e.g. reorientation of fibres the fibres being randomly arranged
    • D04H1/728Non-woven fabrics formed wholly or mainly of staple fibres or like relatively short fibres characterised by the method of forming fleeces or layers, e.g. reorientation of fibres the fibres being randomly arranged by electro-spinning
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01FMEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/56Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using electric or magnetic effects

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  • Textile Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Indicating Or Recording The Presence, Absence, Or Direction Of Movement (AREA)

Abstract

The invention discloses a flexible airflow sensing material, a sensor and a preparation method thereof. The flexible airflow sensor includes: the electrode structure comprises a flexible polymer fiber film, a flexible polymer film and conductive nanowires, wherein the flexible polymer fiber film and the flexible polymer film are stacked together, and the conductive nanowires are attached to the end face of the flexible polymer film; the end face of the flexible polymer film is the face of the flexible polymer film, which faces away from the flexible polymer fiber film; the electrode structure comprises a positive electrode conductive piece and a negative electrode conductive piece, wherein the positive electrode conductive piece and the negative electrode conductive piece are connected with the conductive nanowires on the surface of the polymer film. The flexible airflow sensing material comprises the flexible polymer film and conductive nanowires attached to the end face of the flexible polymer film. The flexible airflow sensor provided by the invention has both flexibility and air permeability, and can be worn on a human body.

Description

Flexible airflow sensing material, sensor and preparation method thereof
Technical Field
The invention relates to a flexible airflow sensing material, a sensor and a preparation method thereof.
Background
The airflow sensor is capable of sensing the flow of ambient air and converting this information into an electrical signal. Conventional airflow sensors of the prior art operate by heat exchange, involving a heating component and a heat sensitive component. Thus, conventional airflow sensors are rigid and bulky. In the field of real-time monitoring of medical health and the like, there is a demand for gas flow measurement, and it is expected to be realized by wearable electronic devices. Conventional airflow sensors are not suitable for use in wearable electronics due to their rigidity and bulkiness.
Disclosure of Invention
The invention aims to provide a flexible airflow sensor, a flexible airflow sensing material and a preparation method thereof.
In order to achieve the purpose, the invention provides the following scheme:
a flexible airflow sensor comprising: the electrode structure comprises a flexible polymer fiber film, a flexible polymer film and conductive nanowires, wherein the flexible polymer fiber film and the flexible polymer film are stacked together, and the conductive nanowires are attached to the end face of the flexible polymer film; the end face of the flexible polymer film is the face of the flexible polymer film, which faces away from the flexible polymer fiber film; the electrode structure comprises a positive electrode conductive piece and a negative electrode conductive piece, wherein the positive electrode conductive piece and the negative electrode conductive piece are connected with the conductive nanowires on the surface of the polymer film.
Optionally, the surface of the flexible polymer film to which the conductive nanowires are attached has an array of raised structures.
Optionally, the conductive nanowire is a gold nanowire.
Optionally, the flexible polymer film is made of polyvinylidene fluoride-hexafluoropropylene.
Optionally, the positive conductive member includes a positive electrode lead-out wire, and the negative conductive member includes a negative electrode lead-out wire; the positive electrode lead-out wire and the negative electrode lead-out wire are connected with the conductive nanowire on the surface of the polymer film.
The invention also provides a flexible airflow sensing material, comprising: the flexible polymer fiber membrane comprises the flexible polymer membrane and the conductive nanowires attached to the end face of the flexible polymer membrane, wherein the end face of the flexible polymer membrane is the side, opposite to the flexible polymer fiber membrane, of the flexible polymer membrane.
The invention also provides a preparation method of the flexible airflow sensor, which comprises the following steps:
preparing a flexible polymer film by using a polymer solution;
growing conductive nanowires on one surface of the flexible polymer film;
carrying out electrostatic spinning by adopting a polymer fiber solution to obtain a flexible polymer fiber membrane;
and attaching the flexible polymer fiber membrane and the other surface of the flexible polymer membrane together to obtain the flexible airflow sensor.
Optionally, the preparing of the flexible polymer film by using the polymer solution specifically includes:
and coating the polymer solution on a template, drying and peeling to obtain the flexible polymer film.
Alternatively to this, the first and second parts may,
the flexible polymer film has an array of raised structures, and the template surface has an array of inverted raised structures corresponding to the array of raised structures.
The invention also provides a preparation method of the flexible airflow sensing material, which comprises the following steps:
preparing a flexible polymer film by using a polymer solution;
and growing a conductive nanowire on one surface of the flexible polymer film to obtain the flexible airflow sensing material.
According to the specific embodiment provided by the invention, the following technical effects are disclosed: the flexible airflow sensor provided by the embodiment of the invention comprises an electrode structure, a flexible polymer fiber film, a flexible polymer film and a conductive nanowire, wherein the flexible polymer fiber film and the flexible polymer film are stacked together; the end face of the flexible polymer film is the face of the flexible polymer film, which faces away from the flexible polymer fiber film; the electrode structure comprises a positive electrode conductive piece and a negative electrode conductive piece, wherein the positive electrode conductive piece and the negative electrode conductive piece are connected with the conductive nanowires on the surface of the polymer film. When the airflow stimulation is applied, the conductive nanowires on the surface of the flexible polymer film are contacted with each other, and compared with the state when the airflow stimulation is not applied, the number of conductive paths formed by the conductive nanowires is increased, and the resistance is reduced. Moreover, the larger the airflow, the greater the number of conductive nanowires in contact with each other, the more conductive paths, and the lower the resistance. Namely, the conductive nano-wire on the surface of the flexible polymer film has sensitivity to the air flow and can be used for measuring the air flow.
The flexible airflow sensor formed by the flexible polymer film, the flexible polymer fiber film and the conductive nanowires has the characteristic of flexibility, and meanwhile, the polymer fiber film has air permeability due to the air permeability of the fiber structure, so that the flexible airflow sensor using the flexible polymer film as the substrate also has air permeability. The flexibility and the air permeability are simultaneously combined, so that the flexible airflow sensor can be worn on a human body.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings needed to be used in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings without inventive exercise.
FIG. 1 is a schematic diagram of a flexible airflow sensor according to an embodiment of the present invention;
FIG. 2 is a schematic structural diagram of a monitoring system comprising a flexible airflow sensor according to an embodiment of the present invention;
FIG. 3 is a flow chart of a method of making a flexible airflow sensor in an embodiment of the invention;
FIG. 4 is a scanning electron microscope image of a laser marked Cu template in an embodiment of the invention;
FIG. 5 is a field scanning electron microscope image of a flexible polymer film having an array of microcone structures in an embodiment of the present invention;
FIG. 6 is a graph illustrating response of a flexible airflow sensor at various angles in an embodiment of the present invention;
FIG. 7 is a graph of response/recovery time for a flexible airflow sensor in an embodiment of the present invention;
fig. 8 is a graph of a minimum airflow detection limit of a flexible airflow sensor in an embodiment of the invention.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
The invention aims to provide a flexible airflow sensor, a flexible airflow sensing material and a preparation method thereof.
The flexible airflow sensor can be used in health monitoring field, such as monitoring the airflow generated by the respiration of human body.
Particularly, in a radiation tumor treatment operation scene, a patient may have some uncomfortable manifestations, such as shortness of breath, due to the fact that the patient cannot bear the dose of radiation or other reasons, and at this time, the flexible airflow sensor provided by the present application is worn in a position in a human face so that real-time detection of the respiratory airflow of the patient can be achieved.
Referring to fig. 1, the flexible airflow sensor includes: the electrode structure comprises a flexible polymer fiber film 3 and a flexible polymer film 2 which are stacked together, and conductive nanowires 1 attached to the end face of the flexible polymer film 2. Wherein, the end face of the flexible polymer film is the face of the flexible polymer film 2 opposite to the flexible polymer fiber film 3.
The electrode structure comprises a positive conductive piece and a negative conductive piece, wherein the positive conductive piece and the negative conductive piece are respectively connected with the conductive nanowire 1 on the surface of the polymer film.
The flexible airflow sensing material at least comprises the flexible polymer film 2 and the conductive nanowires 1 attached to the end face of the flexible polymer film.
The flexible airflow sensor can be integrated with a power supply unit, a voltage dividing resistor, a micro control unit and a wireless communication module. See fig. 2 for a specific implementation scene, the perception layer includes flexible airflow sensor, a power supply unit, little the control unit, divider resistance and flexible airflow sensor establish ties, power supply unit supplies power to the return circuit that divider resistance and flexible airflow sensor constitute, little the control unit gathers the voltage at divider resistance both ends, simultaneously, little the control unit still gathers the anodal voltage of conductive piece of flexible airflow sensor and the voltage between the conductive piece of negative pole, and carry out analog-to-digital conversion to the voltage of above-mentioned gathering, later pass through the wireless communication module on transmission layer with voltage signal, like WiFi communication module, transmit the system cloud platform to the platform layer. The system cloud platform transmits the voltage digital signal to the terminal equipment of the application layer, the terminal equipment obtains an airflow value corresponding to the voltage digital signal through a table look-up method, and the airflow value is displayed through an app or UI interface of the terminal equipment, so that airflow monitoring and displaying are achieved.
It should be noted that the terminal devices herein include, but are not limited to: desktop, mobile terminal (e.g., smart watch, smart bracelet, smart phone), ipad, and the like.
As will be described in more detail below
Example 1
Referring to fig. 1, the present embodiment provides a flexible airflow sensor, as described above, including: the electrode structure comprises a flexible polymer fiber film 3 and a flexible polymer film 2 which are stacked together, and conductive nanowires 1 attached to the end face of the flexible polymer film. Wherein, the end face of the flexible polymer film is the face of the flexible polymer film 2 opposite to the flexible polymer fiber film 3.
The electrode structure comprises a positive conductive piece and a negative conductive piece, wherein the positive conductive piece and the negative conductive piece are respectively connected with the conductive nanowire 1 on the surface of the polymer film.
In this embodiment, the aforementioned power supply unit may specifically supply power to the flexible airflow sensor through the positive electrode conductive piece and the negative electrode conductive piece, and meanwhile, the micro control unit may also specifically collect the voltage of the flexible airflow sensor through the positive electrode conductive piece and the negative electrode conductive piece.
In one example, the positive conductor may include only the positive electrode lead out wire 4, and the negative conductor may include only the negative electrode lead out wire 5. And a positive electrode lead-out wire 4 and a negative electrode lead-out wire 5 are connected with the conductive nanowire 1 on the surface of the flexible polymer film. Specifically, the positive electrode lead-out wire 4 and the negative electrode lead-out wire 5 may be directly connected to the conductive nanowires 1 on the left and right sides of fig. 1. Or, the electrode lead-out wire 4 and the negative electrode lead-out wire 5 can be respectively arranged at the edge of the flexible polymer film 2 and connected with or contacted with the conductive nanowire 1 at the edge.
In another example, the positive conductive member may include a positive electrode sheet and a positive electrode lead-out wire connected to the positive electrode sheet, and the negative conductive member may include a negative electrode sheet and a negative electrode lead-out wire connected to the negative electrode sheet. The positive electrode plate and the negative electrode plate are respectively attached to the conductive nanowires 1 on the left side and the right side of the figure 1. Alternatively, the positive electrode sheet and the negative electrode sheet may be disposed at the edges of the flexible polymer film 2, respectively, and connected or in contact with the conductive nanowires 1 at the edges.
In one example, in order to increase the specific surface area of the conductive nanowires 1 and grow more conductive nanowires 1, so that the flexible airflow sensor has better sensing capability, the flexible polymer film 2 has an array of raised structures on the side to which the conductive nanowires 1 are attached. The convex structure array can be exemplified by a micro-cone structure array, and can also be cylindrical, square and the like.
The surface area of the flexible polymer film 2 can be increased by the convex structure array, the conductive nanowires 1 are attached to the flexible polymer film 2, and the specific surface area of the conductive nanowires 1 can be correspondingly increased by increasing the surface area of the flexible polymer film 2.
When the conductive nanowires 1 are stimulated by airflow, the conductive nanowires 1 are in contact with each other, and compared with the state when the conductive nanowires 1 are not stimulated by the airflow, the number of conductive paths of the conductive nanowires 1 on the surface of the flexible polymer film 2 is increased, and the resistance is reduced. Moreover, the larger the airflow, the larger the number of conductive nanowires 1 in contact with each other, the more conductive paths in the conductive nanowires 1 on the surface of the flexible polymer film 2, and the lower the resistance. Based on this, when the airflow is different in size, the resistance of the conductive nanowire 1 on the surface of the flexible polymer film 2 is different in size, and further the partial pressure of the flexible airflow sensor is different, so that the size of the airflow can be reversely pushed by specifically measuring the voltage of the flexible airflow sensor.
In addition, when being stimulated by small airflow, the conductive nanowires 1 are mutually contacted, so that a large number of conductive paths are formed, and the resistance of the conductive paths is rapidly reduced; at larger airflow stimuli, the raised structures on the flexible polymer membrane 2 will also deform, e.g. bend, wrinkle and change shape. This further increases the contact area and the number of contacts between the conductive nanowires 1, thereby enabling detection of air flow over a wide range of air flow intensities.
The conductive nanowire 1 may be exemplified by a gold nanowire. In addition, the conductive nanowire 1 may also be made of platinum nanowires (Pt NWs), silver nanowires (Ag NWs), copper nanowires (Cu NWs), nickel nanowires (Ni NWs), iron nanowires (Fe NWs), polyaniline nanowires (PANI NWs), metal organic framework nanowires (MOF NWs), or Carbon Nanotubes (CNTs).
The material of the flexible polymer film 2 may be exemplified by polyvinylidene fluoride-hexafluoropropylene. In addition, the flexible polymer film 2 may be made of Polydimethylsiloxane (PDMS), polyvinylidene fluoride (PVDF), poly (vinylidene fluoride-trifluoroethylene) (P (VDF-TrFE)), poly (vinylidene fluoride-trifluoroethylene-chlorotrifluoroethylene) (P (VDF-TrFE-CTFE)), polyvinyl alcohol (PVA), Polyurethane (PU), thermoplastic polyurethane elastomer rubber (TPU), acrylonitrile-butadiene-styrene copolymer (ABS), polyethylene terephthalate (PET), Polyimide (PI), Polytetrafluoroethylene (PTFE), polyvinyl chloride (PVC), polyvinylpyrrolidone (PVP), polymethyl methacrylate (PMMA), and polyethylene naphthalate (PEN).
The material of the flexible polymer fiber membrane may be polyvinylidene fluoride-co-hexafluoropropylene P (VDF-HFP), and besides, the material of the flexible polymer fiber may also be acrylonitrile-butadiene-styrene copolymer (ABS), Polyurethane (PU), polyvinyl alcohol (PVA), poly (vinylidene fluoride-trifluoroethylene) (P (VDF-TrFE)), Polydimethylsiloxane (PDMS), Polytetrafluoroethylene (PTFE), poly (vinylidene fluoride-hexafluoropropylene) (P (VDF-HFP)), Polyacrylonitrile (PAN), Polyketone (PK), polylactic acid (PLA), silk fibroin (silk fibroin), levorotatory polylactic acid (PLLA), polyvinyl butyral (PVB), Polycaprolactone (PCL).
The flexible polymer film 2, the flexible polymer fiber film 3 and the conductive nanowires 1 are flexible, so that the flexible airflow sensor formed by the flexible polymer film, the flexible polymer fiber film and the conductive nanowires has the characteristic of flexibility, and meanwhile, the polymer fiber film has air permeability due to the air permeability of the fiber structure, so that the flexible airflow sensor using the flexible polymer fiber film as the substrate also has air permeability. The flexibility and the air permeability are simultaneously combined, so that the flexible airflow sensor can be worn on a human body.
Example 2
The embodiment provides a method for manufacturing a flexible airflow sensor (referred to as a manufacturing method for short), and referring to fig. 3, the method includes the following steps:
step 11: preparing a flexible polymer film by using a polymer solution; specifically, the polymer solution may be coated on a template, and peeled off after drying to obtain the flexible polymer film.
One skilled in the art can prepare flexible polymer films using different preparation techniques as desired. For example, the flexible polymer film is prepared by electrostatic spinning technology, or directly prepared by various spinning technologies, which is not described herein.
Step 12: growing conductive nanowires on one surface of the flexible polymer film;
step 13: carrying out electrostatic spinning by adopting a polymer fiber solution to obtain a flexible polymer fiber membrane;
in addition to the electrospinning process, one skilled in the art can use other preparation processes to prepare the flexible polymer fiber membrane as desired. For example, flexible polymeric fiber membranes are produced using a variety of textile techniques, so long as a flexible membrane or a membrane that is both flexible and breathable can be produced.
Step 14: and attaching the flexible polymer fiber membrane and the other surface of the flexible polymer membrane together to obtain the flexible airflow sensor.
In one example, the flexible polymer film has an array of raised structures, and the template surface has an array of inverted raised structures corresponding to the array of raised structures. The array of raised structures may illustratively be an array of micro-tapered structures, and the array of inverted raised structures may illustratively be an array of inverted micro-tapered structures.
Taking the preparation of a flexible polymer film using a P (VDF-HFP) solution as an example, the preparation method may specifically include the following steps:
firstly, cleaning a copper sheet, and preparing a Cu template with a reverse micro-cone structure array by using a laser marking machine.
Thereafter, a P (VDF-HFP) solution was spin-coated on a Cu template having an array of reverse micro-cone structures, and peeled off after drying, to obtain a flexible polymer film having an array of micro-cone structures.
And then, growing the vertical gold nanowires on the surface of the flexible polymer film with the micro-cone structure array by using a solution method.
A breathable film (i.e., a flexible polymer fiber film) is prepared by electrospinning a polymer solution and the flexible polymer fiber film is used as the base substrate after plasma treatment.
And finally, combining the flexible polymer fiber film with the flexible polymer film on which the gold nanowires grow, and respectively leading out positive and negative electrode conductive pieces from the gold nanowires on two sides of the flexible polymer film to form the airflow sensor.
The material of the template can be other materials besides Cu, such as Al, Fe, Ni, Ti and the like.
The method of making the flexible airflow sensor is described in more detail below:
1) the copper foil substrate is firstly placed in acetone, ethanol and deionized water for ultrasonic cleaning for 2min respectively, and is dried by nitrogen to obtain a clean substrate.
2) Preparing the Cu template with the reverse micro-cone structure array by using a cold light laser marking machine at the laser power of 5-10W and the laser scanning speed of 20-50 cm/s. Referring to fig. 4, the diameter of the bottom of the micro-cone structure is 40-80um, and the height is 80-120 um.
3) P (VDF-HFP) powder is mixed with acetone and stirred for 20-60min, so as to obtain 5-15 wt% of P (VDF-HFP)/acetone solution.
4) The above-mentioned P (VDF-HFP)/acetone solution is dripped on the inverse micro-cone structure array Cu template by a dropper, and spin-coated for 400-800s at the rotation speed of 500-1500rpm to obtain a uniformly distributed film with the thickness of about 500-700 μm.
5) The P (VDF-HFP)/Cu template was placed in a vacuum oven at-90 kPa, 20-40 ℃ for 2-5h to remove the acetone solution, resulting in a dry film. Then H is introduced2O2And mixing concentrated hydrochloric acid and water in a certain ratio (volume ratio is 1:1:1 or 2:2:1) to prepare the Cu template etching solution. And (3) putting the P (VDF-HFP)/Cu template into the etching solution, fully reacting for 6-18h to remove the Cu template, and repeatedly washing with deionized water to obtain a complete non-adhesive P (VDF-HFP) micro-cone structure array film (also called a flexible polymer film with a micro-cone structure array), which is shown in FIG. 5.
6) Treating the P (VDF-HFP) micro-cone structure array film with air plasma for 2-10min, repeatedly washing in ethanol and using N2Drying, and then putting the film into a suspension of Au NPs for 1-5h, so that an Au seed layer is deposited on the surface of the P (VDF-HFP) film. Immediately thereafter, rinsing with deionized water, N2After drying, the films were immersed in a growth solution of water/ethanol (volume ratio 1.2:1) containing 4-mercaptobenzoic acid (1.1-2.8mM), HAuCl4(8-16mM) and L-ascorbic acid (15-35 mM). Taking out the P (VDF-HFP) film from the growth liquid after 3-6minAnd washing with ethanol, N2And drying to obtain the Au NWs/P (VDF-HFP) micro-cone structure array film (also called a flexible polymer film attached with gold nano-wires).
7) Dissolving PCL in acetone solution to prepare 6-12 wt% PCL precursor solution, injecting the prepared spinning solution into an injector, connecting the anode of a high-voltage power supply with a spinning nozzle, and connecting the cathode with a receiving plate (aluminum foil). The spinning voltage is 12-24kV, the receiving distance is 10-16cm, the electrospinning is carried out at room temperature to obtain the electrostatic spinning film, the electrostatic spinning film is dried at the temperature of 30-40 ℃ for 12-24h for standby application, and the thickness of the electrostatic spinning film is about 600-800 mu m. Because the PCL fiber has stronger hydrophobicity, in order to improve the hydrophilicity of the PCL electrospun fiber, a plasma processor is adopted to carry out oxygen plasma treatment on the obtained PCL electrospun fiber for 1-2min at the power of 25-40W and 0.2-0.3 mbar.
8) Laminating the PCL electrostatic spinning film and the AuNWs/P (VDF-HFP) micro-cone structure array film, and connecting Cu conducting wires on the gold nanowires on two sides of the surface of the flexible polymer film, thereby obtaining the flexible airflow sensor with the Au NWs/P (VDF-HFP)/PDL structure.
The embodiment also provides a preparation method of the flexible airflow sensing material, which comprises the steps 11 and 12.
FIG. 6 is a graph of the response of the flexible airflow sensor at different angles, which refer to the angle between the airflow direction and the plane of the sensing layer. As shown in fig. 6, the current of the flexible airflow sensor becomes larger as the airflow pressure increases, and the ratio of the changed current to the initial current becomes larger as the airflow pressure increases. In FIG. 6, I0When the airflow sensor is not stimulated by airflow, the current of the flexible airflow sensor is measured and is called as initial current. And the delta I is the difference between the measured current of the flexible airflow sensor and the initial current under the stimulation of a certain airflow pressure.
Fig. 7 is a graph of response/recovery time for the flexible airflow sensor described above. The flexible airflow sensor is stimulated by airflow at 9s, and as shown in fig. 7, the flexible airflow sensor responds to the airflow stimulation for about 0.5s, and the flexible airflow sensor recovers for about 0.8s after the airflow is removed. It can be seen that the flexible airflow sensor responds to airflow and returns to its initial state relatively quickly.
Fig. 8 is a graph of the minimum airflow detection limit of the flexible airflow sensor. When the flexible airflow sensor is stimulated by airflow smaller than 6kPa, the current of the flexible airflow sensor has no obvious change, and when the airflow pressure is increased to 6kPa, the current of the flexible airflow sensor has obvious change, and as shown in fig. 8 in particular, the minimum detection airflow of the flexible airflow sensor is 6 kPa. Intermittently blowing 6kPa air flow towards the flexible air flow sensor in a direction forming an angle of 90 degrees with the plane of the sensing layer of the flexible air flow sensor, delta I/I0As shown in fig. 8, it can be seen from fig. 8 that the flexible airflow sensor is very stable in response to the pressure of the airflow with the same intensity.
Fig. 6, 7, and 8 are measurement data obtained under a room temperature environment and under a condition where a voltage of 1V is applied to the flexible airflow sensor.
The application has the following advantages:
1) the flexible polymer film with the protruding structure array is prepared by adopting a laser marking Cu template solution infiltration method which is low in cost, simple in preparation process and capable of being prepared in a large area, and the problems of long consumed time, complex process, high cost and adhesion between polymer films in the existing micro-nano processing technology are effectively solved.
2) The conductive nanowires are grown on the flexible polymer film with the protruding structure array in a solution method to serve as the sensing layer of the airflow sensing, and the method is simple and easy to operate and low in cost.
3) Under weak airflow, the conductive nanowires can also deform, such as bend (the conductive path formed by the conductive nanowires is enlarged, and the conductivity is enhanced). That is, the flexible airflow sensor has a low detection limit.
4) When being stimulated by small airflow, the conductive nanowires are mutually contacted, so that a large number of conductive paths are formed, and the resistance of the conductive paths is rapidly reduced; when larger airflow is stimulated, the raised structure array on the flexible polymer film is also deformed, so that the contact area and the contact quantity between the conductive nanowires are further increased, and larger sensitivity in a larger airflow detection range is realized. Meanwhile, the air flow can be immediately recovered after being removed, and the performance is still stable after the air flow is used for many times.
5) The electrostatic spinning is used for preparing a film which has flexibility, air permeability and integration, and can be attached to the surface of a human body more comfortably.
6) Compared with the traditional sensor, the flexible airflow sensor provided by the embodiment of the invention has the advantages of simpler structure and preparation process, lower cost, higher sensitivity to airflow under external stimulation, quicker response and better repeatability.
7) The flexible airflow sensor is integrated with an external circuit, wireless transmission and real-time display of signals are achieved, and the wearable health care system development is promoted.
The embodiments in the present description are described in a progressive manner, each embodiment focuses on differences from other embodiments, and the same and similar parts among the embodiments are referred to each other.
The principles and embodiments of the present invention have been described herein using specific examples, which are provided only to help understand the method and the core concept of the present invention; meanwhile, for a person skilled in the art, according to the idea of the present invention, the specific embodiments and the application range may be changed. In view of the above, the present disclosure should not be construed as limiting the invention.

Claims (10)

1. A flexible airflow sensor, comprising: the electrode structure comprises a flexible polymer fiber film, a flexible polymer film and conductive nanowires, wherein the flexible polymer fiber film and the flexible polymer film are stacked together, and the conductive nanowires are attached to the end face of the flexible polymer film; the end face of the flexible polymer film is the face of the flexible polymer film, which faces away from the flexible polymer fiber film; the electrode structure comprises a positive electrode conductive piece and a negative electrode conductive piece, wherein the positive electrode conductive piece and the negative electrode conductive piece are connected with the conductive nanowires on the surface of the flexible polymer film.
2. The flexible airflow sensor of claim 1 wherein the surface of the flexible polymer film to which the conductive nanowires are attached has an array of raised structures thereon.
3. The flexible gas flow sensor of claim 1, wherein the conductive nanowires are gold nanowires.
4. The flexible airflow sensor of claim 2 wherein the material of the flexible polymeric membrane is polyvinylidene fluoride-hexafluoropropylene.
5. The flexible airflow sensor of claim 1 wherein the positive electrical conductor includes a positive electrode lead out wire and the negative electrical conductor includes a negative electrode lead out wire; the positive electrode lead-out wire and the negative electrode lead-out wire are connected with the conductive nanowires on the surface of the flexible polymer film.
6. A flexible airflow sensing material, comprising: the flexible polymeric film of any one of claims 1-4 and electrically conductive nanowires attached to an end face of the flexible polymeric film, the end face of the flexible polymeric film being the side of the flexible polymeric film opposite the flexible polymeric fiber film.
7. A method for preparing a flexible airflow sensor is characterized by comprising the following steps:
preparing a flexible polymer film by using a polymer solution;
growing conductive nanowires on one surface of the flexible polymer film;
carrying out electrostatic spinning by adopting a polymer fiber solution to obtain a flexible polymer fiber membrane;
and attaching the flexible polymer fiber membrane and the other surface of the flexible polymer membrane together to obtain the flexible airflow sensor.
8. The method for preparing the flexible airflow sensing material according to claim 7, wherein the preparing the flexible polymer film from the polymer solution specifically comprises:
and coating the polymer solution on a template, drying and peeling to obtain the flexible polymer film.
9. The method of claim 8, wherein the flexible airflow sensing material is prepared by a method comprising the steps of,
the flexible polymer film has an array of raised structures, and the template surface has an array of inverted raised structures corresponding to the array of raised structures.
10. A method for preparing a flexible airflow sensing material is characterized by comprising the following steps:
preparing a flexible polymer film by using a polymer solution;
and growing a conductive nanowire on one surface of the flexible polymer film to obtain the flexible airflow sensing material.
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