CN114245560A - Matcher testing system and radio frequency impedance conversion device thereof - Google Patents
Matcher testing system and radio frequency impedance conversion device thereof Download PDFInfo
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- CN114245560A CN114245560A CN202111535794.8A CN202111535794A CN114245560A CN 114245560 A CN114245560 A CN 114245560A CN 202111535794 A CN202111535794 A CN 202111535794A CN 114245560 A CN114245560 A CN 114245560A
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Abstract
The embodiment of the application provides a matcher testing system and a radio frequency impedance conversion device thereof. The radio frequency impedance conversion device comprises: the circuit comprises an input end, an output end, a main circuit capacitor component, a branch circuit capacitor component, a branch inductor and a controller; the main circuit is connected with the input end and the output end, and the main circuit capacitor assembly is arranged on the main circuit; one end of the branch line is connected with the main line, and the other end of the branch line is grounded; the branch capacitor component and the branch inductor are arranged on the branch circuit; at least one of the main circuit capacitor component and the branch circuit capacitor component comprises a plurality of fixed branch circuits and a plurality of adjustable branch circuits which are arranged in parallel; the controller is connected with the adjustable branches and used for selectively controlling the opening or the closing of each adjustable branch so as to switch different impedance values provided by the radio frequency impedance conversion device. The embodiment of the application realizes the test of the variable impedance response speed of the matchers, and further realizes the test of the consistency of the matchers.
Description
Technical Field
The application relates to the technical field of semiconductor processing, in particular to a matcher testing system and a radio frequency impedance conversion device thereof.
Background
At present, semiconductor etching equipment is equipment widely applied to the field of semiconductor manufacturing. The RF system is an important component of semiconductor etching equipment, and mainly includes an RF power source (RF Generator), a matcher (Match), and an RF Electrode (RF Electrode, such as a coil or an electrostatic chuck). In the process, a radio-frequency electrode in a process chamber generates a high-frequency electromagnetic field to react with various gases to generate plasma, and because the conditions of gas composition, temperature, air pressure and the like in the process chamber change rapidly along with time, the impedance presented by the radio-frequency electrode also changes rapidly along with time, so that the impedance required to be rapidly transformed by the radio-frequency electrode needs to be matched with the impedance of the output end of a radio-frequency power supply by a matcher, and the radio-frequency power can be transmitted to the radio-frequency electrode without reflection.
In recent years, with rapid progress in semiconductor manufacturing processes, demands for processing accuracy and process uniformity in the manufacturing process have been increasing. The radio frequency system is one of the main component systems of semiconductor etching equipment, and the consistency of the radio frequency power transmission performance directly influences the consistency of the etching process. The matcher is an indispensable component of a radio frequency system, and a simple, easy-to-use and repeatable means is needed to verify the consistency of matching performance. In the prior art, the performance of the matching device is generally tested by using a radio frequency impedance conversion device and an analog load, wherein the radio frequency impedance conversion device is used for simulating a radio frequency electrode in a process chamber, and the analog load is used for converting radio frequency power into thermal power to be consumed. However, the impedance change speed of the existing radio frequency impedance conversion device is slow, and the fastest speed of the radio frequency electrode impedance change caused by the condition change in the process chamber can reach dozens of milliseconds, so that the existing radio frequency impedance conversion device cannot simulate the real impedance change of the radio frequency electrode in real time due to too slow reaction speed, and therefore the consistency of different tested matchers cannot be tested when the impedance is subjected to fast conversion.
Disclosure of Invention
The application aims at the defects of the existing mode and provides a matcher testing system and a radio frequency impedance conversion device thereof, which are used for solving the technical problem that the impedance of a radio frequency electrode cannot be simulated in the prior art, so that different matchers cannot be tested.
In a first aspect, an embodiment of the present application provides an rf impedance transforming apparatus, which is used in a matcher testing system of semiconductor processing equipment, and provides impedance required by testing, and includes: the circuit comprises an input end, an output end, a main circuit capacitor component, a branch circuit capacitor component, a branch inductor and a controller; the input end is used for being connected with a matcher to be tested, and the output end is used for being connected with a virtual load device in the test system; the main circuit is connected with the input end and the output end, and the main circuit capacitor component is arranged on the main circuit; one end of the branch line is connected with the main line, and the other end of the branch line is grounded; the branch capacitor assembly and the branch inductor are arranged on the branch circuit; at least one of the main circuit capacitor component and the branch circuit capacitor component comprises a plurality of fixed branch circuits and a plurality of adjustable branch circuits which are arranged in parallel; the controller is connected with the adjustable branches and used for selectively controlling the opening or closing of each adjustable branch so as to switch different impedance values provided by the radio frequency impedance conversion device.
In an embodiment of the present application, the rf impedance transforming device includes one branch line, and the branch line is located between the input terminal and the main circuit capacitor device, or the branch line is located between the main circuit capacitor device and the output terminal.
In an embodiment of the present application, the rf impedance transforming apparatus includes two branch lines, wherein the branch capacitor assembly on one of the branch lines includes a plurality of fixed branches and a plurality of adjustable branches connected in parallel; and the branch capacitor assembly on the other branch circuit comprises a plurality of fixed branches arranged in parallel and used for allowing radio frequency current to pass through so as to reduce the radio frequency current of the adjustable branch circuit.
In an embodiment of the application, two main circuit capacitor elements are serially connected to the main circuit, and each of the two main circuit capacitor elements includes a plurality of the fixed branches and a plurality of the tunable branches, which are arranged in parallel.
In an embodiment of the present application, the rf impedance transforming device further includes at least one main circuit inductor, and the main circuit inductor is disposed on the main circuit and configured to stabilize and reduce current of the main circuit capacitor assembly.
In an embodiment of the present application, the fixed impedance value of the fixed branch is greater than the maximum adjustable impedance value of the adjustable branch.
In an embodiment of the application, the controller is configured to control the main circuit capacitor element and the adjustable branch of the branch circuit capacitor element according to a preset sequence.
In an embodiment of the present application, the fixed branch includes a plurality of capacitors connected in series, and the adjustable branch includes a relay and a capacitor, where the relay is connected in series with the plurality of capacitors; the controller is connected with the relay and used for controlling the adjustable branch circuit to be closed or opened through the relay.
In an embodiment of the present application, the capacitor is a radio frequency ceramic dielectric capacitor, and/or the relay is a vacuum relay.
In a second aspect, an embodiment of the present application provides a matcher testing system, including: the impedance matching device comprises a radio frequency power supply, a virtual load device and the radio frequency impedance conversion device provided by the first aspect, wherein an output end of the radio frequency power supply and an input end of the radio frequency impedance conversion device are respectively connected with an input end and an output end of a matcher to be tested, and an output end of the virtual load device is connected with an input end of the virtual load device.
The technical scheme provided by the embodiment of the application has the following beneficial technical effects:
according to the embodiment of the application, the main circuit capacitor assembly is arranged on the main circuit, the branch circuit capacitor assembly is arranged on the branch circuit, at least one of the main circuit capacitor assembly and the branch circuit capacitor assembly comprises the plurality of fixed branch circuits and the plurality of adjustable branch circuits, the controller is used for controlling the opening or closing of the plurality of adjustable branch circuits, so that the plurality of adjustable branch circuits which are arranged in parallel realize rapid impedance transformation, the impedance transformation speed can reach dozens of milliseconds at the fastest speed, even dozens of milliseconds, the impedance transformation speed can be more truly simulated for the impedance change of the radio-frequency electrode in the process, the variable impedance response speed of the matcher is tested, and the consistency of the plurality of matchers can be tested. Furthermore, through setting up a plurality of fixed branches, not only can reduce the biggest radio frequency current that adjustable branch bore, the electric current sudden change that produces when can also reducing the switching state of each adjustable branch to improve this application embodiment security and stability.
Additional aspects and advantages of the present application will be set forth in part in the description which follows and, in part, will be obvious from the description, or may be learned by practice of the present application.
Drawings
The foregoing and/or additional aspects and advantages of the present application will become apparent and readily appreciated from the following description of the embodiments, taken in conjunction with the accompanying drawings of which:
fig. 1A is a schematic structural diagram of a first rf impedance transforming device according to an embodiment of the present application;
fig. 1B is a schematic structural diagram of a second rf impedance transforming device according to an embodiment of the present application;
fig. 2 is a schematic structural diagram of a third rf impedance transforming device according to an embodiment of the present application;
fig. 3 is a schematic structural diagram of a fourth rf impedance transforming device according to an embodiment of the present application;
fig. 4 is a schematic diagram of a plurality of impedance points of an rf electrode according to an embodiment of the present disclosure.
Detailed Description
Reference will now be made in detail to the present application, examples of which are illustrated in the accompanying drawings, wherein like reference numerals refer to the same or similar parts or parts having the same or similar functions throughout. In addition, if a detailed description of the known art is not necessary for illustrating the features of the present application, it is omitted. The embodiments described below with reference to the drawings are exemplary only for the purpose of explaining the present application and are not to be construed as limiting the present application.
It will be understood by those within the art that, unless otherwise defined, all terms (including technical and scientific terms) used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. It will be further understood that terms, such as those defined in commonly used dictionaries, should be interpreted as having a meaning that is consistent with their meaning in the context of the prior art and will not be interpreted in an idealized or overly formal sense unless expressly so defined herein.
The following describes the technical solutions of the present application and how to solve the above technical problems with specific embodiments.
As shown in fig. 1 to 3, an embodiment of the present application provides an rf impedance transforming apparatus for a matcher testing system of semiconductor processing equipment, providing impedance required for testing, including: the circuit comprises an input end 11, an output end 12, a main circuit 13, a main circuit capacitor component 14, a branch circuit 21, a branch circuit capacitor component 22, a branch inductor 23 and a controller 3; the input end 11 is used for being connected with a matcher to be tested, and the output end 12 is used for being connected with a virtual load device in a test system; the main circuit 13 is connected with the input end 11 and the output end 12, and the main circuit capacitor component 14 is arranged on the main circuit 13; one end of the branch line 21 is connected with the main line 13, and the other end is grounded; the branch capacitor assembly 22 and the branch inductor 23 are arranged on the branch line 21; at least one of the main circuit capacitance component 14 and the branch circuit capacitance component 22 comprises a plurality of fixed branch circuits 41 and a plurality of adjustable branch circuits 42 which are arranged in parallel; the controller 3 is connected to the adjustable branches 42 for selectively controlling the opening and closing of each adjustable branch 42 to switch different impedance values provided by the rf impedance transforming device.
As shown in fig. 1A, the semiconductor processing equipment is specifically an etching equipment, and can specifically operate under a working condition that the frequency of the input radio frequency is 13.56MHz and the maximum input power is 400W, and the radio frequency impedance device can be used for simulating the operating state of the radio frequency electrode of the semiconductor processing equipment, so as to test the matcher of the semiconductor processing equipment. The input end 11 and the output end 12 of the radio frequency impedance conversion device both adopt radio frequency connectors, wherein the input end 11 is connected with a matcher, and the matcher is connected with a radio frequency power supply; the output 12 may be connected to a dummy load device in the test system, which may absorb all the power emitted by the rf power source. The input end 11 and the output end 12 are respectively connected to two ends of the main circuit 13, the main circuit capacitor 14 is disposed on the main circuit 13, and the main circuit capacitor 14 may be disposed in series between the input end 11 and the output end 12. One end of the branch line 21 is connected to the main line 13, the other end is grounded, the branch capacitor assembly 22 and the branch inductor 23 are disposed in series on the branch line 21, and the branch inductor 23 is located between the main line 13 and the branch capacitor assembly 22, but the embodiment of the present application is not limited thereto. At least one of main circuit capacitive assembly 14 and branch circuit capacitive assembly 22 includes a plurality of fixed branch circuits 41 and a plurality of adjustable branch circuits 42 arranged in parallel. For example, the main circuit capacitor assembly 14 and the branch circuit capacitor assembly 22 each include two fixed branches 41 and five adjustable branches 42 arranged in parallel, and the plurality of branches may be arranged in parallel in sequence. However, the specific number of the fixed branches 41 and the adjustable branches 42 is not limited in the embodiments of the present application, and those skilled in the art can adjust the setting according to the actual situation. The fixed branch 41 is configured to reduce a maximum radio frequency current carried by the adjustable branch 42, and reduce a current jump caused by opening or closing of the plurality of adjustable branches 42, thereby improving stability of the embodiment of the present application. The controller 3 is connected to the main circuit capacitor assembly 14, for example, connected to the plurality of adjustable branches 42, and controls the plurality of adjustable branches 42 to be opened or closed, so as to simulate rapid impedance change of the radio frequency electrode, for example, the plurality of adjustable branches 42 may be closed in sequence, or different impedance values provided by the radio frequency impedance conversion device may be switched according to the opening of the plurality of adjustable branches 42, so as to test the variable impedance response speed in the matcher, and test the consistency of the plurality of matchers through the replaced matcher.
According to the embodiment of the application, the main circuit capacitor assembly is arranged on the main circuit, the branch circuit capacitor assembly is arranged on the branch circuit, at least one of the main circuit capacitor assembly and the branch circuit capacitor assembly comprises the plurality of fixed branch circuits and the plurality of adjustable branch circuits, the controller is used for controlling the opening or closing of the plurality of adjustable branch circuits, so that the plurality of adjustable branch circuits which are arranged in parallel realize rapid impedance transformation, the impedance transformation speed can reach dozens of milliseconds at the fastest speed, even dozens of milliseconds, the impedance transformation speed can be more truly simulated for the impedance change of the radio-frequency electrode in the process, the variable impedance response speed of the matcher is tested, and the consistency of the plurality of matchers can be tested. Furthermore, through setting up a plurality of fixed branches, not only can reduce the biggest radio frequency current that adjustable branch bore, the electric current sudden change that produces when can also reducing the switching state of each adjustable branch to improve this application embodiment security and stability.
It should be noted that the embodiments of the present application do not limit the specific implementation of the main circuit capacitance component 14 and the branch circuit capacitance component 22, for example, the main circuit capacitance component 14 only includes a plurality of fixed branch circuits 41, or the branch circuit capacitance component 22 only includes a plurality of fixed branch circuits 41. Therefore, the embodiments of the present application are not limited thereto, and those skilled in the art can adjust the settings according to actual situations.
In an embodiment of the present application, as shown in fig. 1A and 1B, the rf impedance transforming device includes a branch line 21, the branch line 21 is located between the input terminal 11 and the main circuit capacitor 14, or the branch line 21 is located between the main circuit capacitor 14 and the output terminal 12.
As shown in fig. 1A and 1B, one end of the branch line 21 is connected between the input end 11 and the main circuit capacitor 14, and the other end is grounded to form an L-shaped impedance transformation network, as shown in fig. 1A; alternatively, one end of the branch line 21 is connected between the main circuit capacitor assembly 14 and the output end 12, and the other end is grounded to form another L-type impedance transformation network, as shown in fig. 1B. Further, the branch capacitor assembly 22 on the branch line 21 includes a plurality of fixed branches 41 and adjustable branches 42, which are arranged in parallel, and the number of the fixed branches 41 is two, while the number of the adjustable branches 42 is five, and the plurality of branches may be sequentially arranged in parallel. However, the specific number of the fixed branches 41 and the adjustable branches 42 is not limited in the embodiments of the present application, and those skilled in the art can adjust the setting according to the actual situation. The fixed branch 41 is configured to reduce a maximum radio frequency current carried by the adjustable branch 42, and reduce a current jump caused by opening or closing of the plurality of adjustable branches 42, thereby improving stability of the embodiment of the present application. With the above design, the main circuit capacitor component 14 and the branch circuit capacitor component 22 both include a plurality of fixed branches 41 and a plurality of adjustable branches 42, so that the present embodiment can simulate more impedance points to be suitable for impedance change states of the radio frequency electrode under various conditions, thereby greatly improving the applicability and application range of the present embodiment.
In an embodiment of the present application, as shown in fig. 2, the rf impedance transforming apparatus includes two branch lines 21, wherein the branch capacitor 22 of one branch line 21 includes a plurality of fixed branches 41 and a plurality of adjustable branches 42 connected in parallel; the branch capacitance assembly 22 on the other branch line 21 comprises a plurality of fixed branches 41 arranged in parallel.
As shown in fig. 2, two branch lines 21 are both arranged in parallel with the main line 13, wherein one end of the left branch line 21 is connected between the input terminal 11 and the main circuit capacitor assembly 14, and one end of the right branch line 21 is connected between the main circuit capacitor assembly 14 and the output terminal 12, so as to form a pi-type impedance transformation network. Further, the branch capacitance assembly 22 on the left branch line 21 includes two fixed branches 41 arranged in parallel, and two capacitors 51 are connected in series on each fixed branch 41. However, the specific number of the fixed branches 41 and the capacitors 51 is not limited in the embodiments of the present application, and those skilled in the art can adjust the setting according to the actual situation. The branch capacitor assembly 22 on the right branch line 21 includes a plurality of fixed branches 41 and adjustable branches 42 connected in parallel, and the number of the fixed branches 41 is two, while the number of the adjustable branches 42 is five, and the plurality of branches may be sequentially arranged in parallel. However, the specific number of the fixed branches 41 and the adjustable branches 42 is not limited in the embodiments of the present application, and those skilled in the art can adjust the setting according to the actual situation. By adopting the design, the change degree of the capacitance is smaller by controlling the opening or closing of the plurality of adjustable branches 42, so that the change degree of the impedance and the radio frequency current is smaller, the sudden change of the radio frequency current in the pi-type impedance transformation network is reduced to a certain degree, the induction electromotive force generated by the inductance is prevented from being too large, the impedance change only needs tens of milliseconds or even faster, and the impedance change state of the radio frequency electrode under various process conditions can be simulated more truly.
In an embodiment of the present application, as shown in fig. 3, two main circuit capacitance elements 14 are serially connected to the main circuit 13, and each of the two main circuit capacitance elements 14 includes a plurality of fixed branches 41 and a plurality of adjustable branches 42 connected in parallel.
As shown in fig. 3, two main circuit capacitance elements 14 are arranged in series on the main circuit 13, and one end of the branch circuit 21 is connected between the two main circuit capacitance elements 14 to form a T-type impedance transformation network. Each of the two main circuit capacitor assemblies 14 and the branch circuit capacitor assembly 22 includes a plurality of fixed branches 41 and adjustable branches 42, which are arranged in parallel, and the number of the used fixed branches 41 is two, while the number of the adjustable branches 42 is five, and a plurality of branches may be sequentially arranged in parallel. However, the specific number of the fixed branches 41 and the adjustable branches 42 is not limited in the embodiments of the present application, and those skilled in the art can adjust the setting according to the actual situation. The fixed branch 41 is configured to reduce a maximum radio frequency current carried by the adjustable branch 42, and reduce a current jump caused by opening or closing of the plurality of adjustable branches 42, thereby improving stability of the embodiment of the present application. By adopting the above design, because two main circuit capacitance components 14 and one branch circuit capacitance component 22 are provided, the embodiment of the present application can provide more impedance points to simulate the impedance change state of the radio frequency electrode under various process conditions, thereby greatly improving the applicability and the application range.
In an embodiment of the present application, as shown in fig. 1A to fig. 3, the rf impedance transforming device further includes at least one main circuit inductor 15, and the main circuit inductor 15 is disposed on the main circuit 13.
As shown in fig. 1A to fig. 2, the main circuit inductor 15 and the branch circuit inductor 23 both adopt winding inductors, wherein the main circuit inductor 15 is disposed between the main circuit capacitor assembly 14 and the output end 12, and the maximum rf voltage carried by the branch circuit capacitor assembly 22 can be reduced by reasonably setting the inductance value, so as to prevent the branch circuit capacitor assembly 22 from being damaged due to the excessively high rf voltage. The branch inductor 23 may be disposed between the branch capacitor module 22 and the main circuit capacitor module 14, and the inductance value may be reasonably set to reduce the maximum rf voltage carried by the main circuit capacitor module 14, so as to prevent the main circuit capacitor module 14 from being damaged due to too high rf voltage, and further greatly improve the stability and the service life of the embodiment of the present application. By adopting the design, the application and manufacturing cost can be greatly reduced, and the inductance value can be conveniently adjusted by adopting the winding inductor, so that the applicability and the application range are improved. However, the embodiment of the present application does not limit the specific positions of the main circuit inductor 15 and the branch circuit inductor 23, and those skilled in the art can adjust the setting according to the actual situation. As shown in fig. 3, the number of the main circuit inductors 15 is specifically two, one main circuit inductor 15 is disposed between the input end 11 and the main circuit capacitor assembly 14, and the other main circuit inductor 15 is disposed between the two main circuit capacitor assemblies 14, and the maximum rf voltage carried by the relay 52 of the adjustable branch circuit 42 can be further reduced by reasonably setting the inductance value, so that the adjustable branch circuit 42 is prevented from malfunctioning due to sudden change of the rf current, and the stability and the service life of the embodiment of the present application are greatly improved.
In an embodiment of the present application, as shown in fig. 1A to fig. 3, the fixed impedance value of the fixed branch 41 is greater than the maximum adjustable impedance value of the adjustable branch 42. Specifically, the capacity of the fixed branch 41 is large, for example, the value range of each fixed branch 41 is 50-70 pF. The term "large volume" means that the value range of each fixed branch 41 is larger than the value range of the corresponding adjustable branch 42, relative to each adjustable branch 42. By adopting the design, the radio frequency current can pass through the fixed branch 41 as much as possible, and the radio frequency current carried by the adjustable branch 42 comprising the relay 52 is greatly reduced, so that the radio frequency current impact at the moment that each adjustable branch 42 is opened or closed is avoided to be larger, and the radio frequency current is ensured not to generate great mutation. However, the embodiment of the present application does not limit the value range of each fixed branch 41, and those skilled in the art can adjust the setting according to the actual situation.
In an embodiment of the present application, as shown in fig. 1A to fig. 3, the controller 3 is configured to control the main circuit capacitive element 14 and the adjustable branch circuit 42 of the branch circuit capacitive element 22 according to a predetermined sequence. Specifically, the controller 3 may sequentially control the main circuit capacitance component 14 and the branch circuit capacitance component 22, for example, the controller 3 first controls the plurality of adjustable branches 42 of the main circuit capacitance component 14, and sequentially opens or closes the plurality of adjustable branches 42, so as to simulate the rapid impedance change state of the rf electrode. After the control of the main circuit capacitor assembly 14 is completed, the plurality of adjustable branches 42 of the branch circuit capacitor assembly 22 are controlled and opened or closed in sequence. By adopting the design, the embodiment of the application can simulate more impedance points so as to be suitable for impedance change states of the radio-frequency electrode under various process conditions; but also avoids sudden changes in current caused by the opening or closing of the adjustable branch 42, thereby improving the stability of the embodiment of the present application.
In an embodiment of the present application, as shown in fig. 1A to fig. 3, the fixed branch 41 includes a plurality of capacitors 51 arranged in series, the adjustable branch 42 includes a relay 52 and the capacitors 51, and the relay 52 is arranged in series with the plurality of capacitors 51; the controller 3 is connected to a relay 52 for controlling the closing or opening of the adjustable branch 42 via the relay 52.
As shown in fig. 1A to fig. 3, the fixed branch 41 includes two capacitors 51 arranged in series, but the embodiment of the present application does not limit the number of capacitors 51 included in each fixed branch 41, and the arrangement may be adjusted by a person skilled in the art according to actual situations. The adjustable branch 42 close to the fixed branch 41 may include two capacitors 51, and the plurality of adjustable branches 42 face a direction away from the fixed branch 41, and the number of capacitors 51 included in the plurality of adjustable branches 42 increases sequentially, but the application is not limited to a specific arrangement manner thereof, and a person skilled in the art may adjust the arrangement according to actual situations. Each adjustable branch 42 may further be provided with a relay 52, and the controller 3 may be connected to a plurality of relays 52, and is configured to control opening and closing of each adjustable branch 42 by controlling opening and closing of the relays 52, so as to implement rapid impedance change. By adopting the design, the impedance matching device is simple in structure, and rapid change of impedance can be realized, so that the accuracy of testing the matching device is further improved.
In one embodiment of the present application, as shown in fig. 1A to 3, the capacitor 51 is a radio frequency ceramic dielectric capacitor, and/or the relay 52 is a vacuum relay. Specifically, the capacitors 51 are all radio frequency ceramic dielectric capacitors, and since the radio frequency ceramic dielectric capacitors are cubic structures with a shape of about 1 cm square and ceramic as a medium, not only can the space occupation be reduced, but also the application and maintenance costs can be reduced. The relay 52 adopts the vacuum relay 52, and the impedance change speed is high due to the high opening and closing speed of the vacuum relay, so that the impedance change condition of the radio-frequency electrode in the process can be simulated more truly; and the application and maintenance cost can be greatly reduced by adopting the vacuum relay. However, the embodiment of the present application is not limited to the specific types of the capacitor 51 and the relay 52, for example, the capacitor 51 may be a vacuum capacitor, and the relay may be another type. Therefore, the embodiments of the present application are not limited thereto, and those skilled in the art can adjust the settings according to actual situations.
To further illustrate the working principle and the beneficial effects of the embodiments of the present application, a specific embodiment of the present application is described below with reference to the accompanying drawings. Given that the process steps performed in the process chamber are numerous, it is necessary to select the common, basic and attention-intensive process steps, for example, to select the impedance points of 2 to 6 process steps, specifically, 5 impedance points pt _1 to pt _5 shown in fig. 4. However, the embodiment of the present application is not limited thereto, and for example, the impedance point may be selected according to actual needs. As shown in fig. 2, the number of branches included in the main Circuit capacitor component 14 and the branch Circuit capacitor component 22 and the capacitance value of each branch Circuit are solved by Circuit Synthesis (Circuit Synthesis) and using radio frequency Circuit simulation software (antenna Designer) or Advanced Design System (ADS). For example, the main circuit capacitor assembly 14 has a value range of 50pF to 140pF, the left branch circuit capacitor assembly 22 has a value range of 50pF to 140pF, the right branch circuit capacitor assembly 22 has a value range of 50pF to 100pF, and the maximum rf voltage borne by each capacitor 51 can be reduced in each branch circuit by serially connecting the capacitors 51 for voltage division. In the circuit synthesis process, a combination of inductance values of the main circuit inductor 15 and the branch circuit inductor 23 is obtained through a simulation experiment, for example, the value range of the main circuit inductor 15 is 1000nH to 1500nH, the value range of the branch circuit inductor 23 is 1500nH to 2300nH, and the main circuit inductor 15 and the branch circuit inductor 23 are combined by the inductance values, so that the radio frequency voltage and the radio frequency current borne by the capacitor 51 and the relay 52 are reduced, and the application cost and the implementation difficulty of the embodiment of the application are reduced. However, the embodiment of the present application does not limit the value range of each element, and those skilled in the art can adjust the setting according to the impedance point.
In practical application, the total capacitance incorporated in the pi-type impedance transformation network is changed by the open/close state of the plurality of relays 52 controlled by the controller 3, thereby changing the specific impedance value. As shown in fig. 2, the relays 52 of the main circuit capacitor module 14 are sequentially turned on from top to bottom at intervals of several milliseconds, and are turned off from bottom to top at intervals of several milliseconds. The sequence of the plurality of relays 52 of the branch capacitor assembly 22 being closed is sequentially closed from right to left with a few milliseconds interval, and the sequence of opening is reversed, with sequential opening from left to right with a few milliseconds interval. The relay 52 of the main circuit capacitor assembly 14 and the relay 52 of the branch circuit capacitor assembly 22 are prevented from acting simultaneously, so that the change of the whole circuit is reduced, the sudden change of the radio frequency current in the whole circuit is further reduced, and the generation of overlarge induced electromotive force is prevented.
Further, for the main circuit capacitor assembly 14, the upper 4 relays 52 are closed, and the lowermost 1 relay 52 is opened; and for the branch capacitance assembly 22, close the left 4 relays 52 and open the rightmost 1 relay 52, thereby achieving the impedance point pt _ 1. By closing the upper 3 relays 52 of main circuit capacitor assembly 14, the lowermost 2 relays 52 are opened; and closing the left 4 relays 52 of the branch capacitor assembly 22 and opening the rightmost 1 relay 52, the impedance point pt _2 can be achieved. Similarly, more impedance points can be realized by adopting different combinations, which are not listed here. By adopting the control mode, the change degree of capacitance, impedance and current in the whole circuit is small, the sudden change of the radio frequency current in the impedance transformation network can be reduced to a certain degree, and the opening and closing state of the relay 52 is controlled by the controller 3, so that the input impedance in the whole impedance transformation network is changed only by dozens of milliseconds or even faster, and the condition that the impedance of the radio frequency electrode is changed rapidly in the process of changing the process steps can be simulated more truly.
Based on the same inventive concept, the embodiment of the present application provides a matcher testing system, which includes: the output end of the radio frequency power supply and the input end of the radio frequency impedance conversion device are respectively connected with the input end and the output end of the matcher to be tested, and the output end of the virtual load device is connected with the input end of the virtual load device.
By applying the embodiment of the application, at least the following beneficial effects can be realized:
according to the embodiment of the application, the main circuit capacitor assembly is arranged on the main circuit, the branch circuit capacitor assembly is arranged on the branch circuit, at least one of the main circuit capacitor assembly and the branch circuit capacitor assembly comprises the plurality of fixed branch circuits and the plurality of adjustable branch circuits, the controller is used for controlling the opening or closing of the plurality of adjustable branch circuits, so that the plurality of adjustable branch circuits which are arranged in parallel realize rapid impedance transformation, the impedance transformation speed can reach dozens of milliseconds at the fastest speed, even dozens of milliseconds, the impedance transformation speed can be more truly simulated for the impedance change of the radio-frequency electrode in the process, the variable impedance response speed of the matcher is tested, and the consistency of the plurality of matchers can be tested. Furthermore, through setting up a plurality of fixed branches, not only can reduce the biggest radio frequency current that adjustable branch bore, the electric current sudden change that produces when can also reducing the switching state of each adjustable branch to improve this application embodiment security and stability.
It will be understood that the above embodiments are merely exemplary embodiments taken to illustrate the principles of the present invention, which is not limited thereto. It will be apparent to those skilled in the art that various modifications and improvements can be made without departing from the spirit and substance of the invention, and these modifications and improvements are also considered to be within the scope of the invention.
In the description of the present application, it is to be understood that the terms "center", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like indicate orientations or positional relationships based on those shown in the drawings, and are only for convenience in describing the present invention and simplifying the description, but do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed in a particular orientation, and be operated, and thus, should not be construed as limiting the present invention.
The terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless otherwise specified.
In the description of the present application, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
In the description herein, particular features, structures, materials, or characteristics may be combined in any suitable manner in any one or more embodiments or examples.
The foregoing is only a partial embodiment of the present application, and it should be noted that, for those skilled in the art, several modifications and decorations can be made without departing from the principle of the present application, and these modifications and decorations should also be regarded as the protection scope of the present application.
Claims (10)
1. A radio frequency impedance conversion device is used for a matcher test system of semiconductor process equipment and provides impedance required by test, and is characterized by comprising the following components: the circuit comprises an input end, an output end, a main circuit capacitor component, a branch circuit capacitor component, a branch inductor and a controller;
the input end is used for being connected with a matcher to be tested, and the output end is used for being connected with a virtual load device in the test system;
the main circuit is connected with the input end and the output end, and the main circuit capacitor component is arranged on the main circuit;
one end of the branch line is connected with the main line, and the other end of the branch line is grounded; the branch capacitor assembly and the branch inductor are arranged on the branch circuit;
at least one of the main circuit capacitor component and the branch circuit capacitor component comprises a plurality of fixed branch circuits and a plurality of adjustable branch circuits which are arranged in parallel;
the controller is connected with the adjustable branches and used for selectively controlling the opening or closing of each adjustable branch so as to switch different impedance values provided by the radio frequency impedance conversion device.
2. The apparatus for radio frequency impedance transforming according to claim 1, wherein said apparatus for radio frequency impedance transforming includes one of said branch lines, said branch line being located between said input terminal and said main circuit capacitive component, or said branch line being located between said main circuit capacitive component and said output terminal.
3. The apparatus according to claim 1, wherein the apparatus comprises two branch lines, wherein the branch capacitor assembly on one of the branch lines comprises a plurality of fixed branches and a plurality of adjustable branches arranged in parallel; and the branch capacitor assembly on the other branch circuit comprises a plurality of fixed branches arranged in parallel and used for allowing radio frequency current to pass through so as to reduce the radio frequency current of the adjustable branch circuit.
4. The apparatus according to claim 1, wherein two main circuit capacitor assemblies are connected in series to the main circuit, and each of the two main circuit capacitor assemblies includes a plurality of fixed branches and a plurality of adjustable branches connected in parallel.
5. The apparatus according to claim 1, wherein the apparatus further comprises at least one main circuit inductor disposed on the main circuit for stabilizing and blocking current to the main circuit capacitor component.
6. The apparatus for radio frequency impedance transforming of claim 1, wherein the fixed impedance value of the fixed branch is greater than the maximum adjustable impedance value of the adjustable branch.
7. The radio frequency impedance conversion device according to any one of claims 1 to 6, wherein the controller is configured to control the main circuit capacitive component and the adjustable branches of the branch circuit capacitive component according to a predetermined sequence.
8. The apparatus for radio frequency impedance transforming of claim 7, wherein said fixed branch comprises a plurality of capacitors arranged in series, and said adjustable branch comprises a relay and a capacitor, said relay being arranged in series with a plurality of said capacitors; the controller is connected with the relay and used for controlling the adjustable branch circuit to be closed or opened through the relay.
9. A radio frequency impedance transforming device according to claim 8, wherein said capacitor is a radio frequency porcelain dielectric capacitor and/or said relay is a vacuum relay.
10. A matcher testing system, comprising a radio frequency power supply, a virtual load device and the radio frequency impedance transforming device as claimed in any one of claims 1 to 9, wherein an output terminal of the radio frequency power supply and an input terminal of the radio frequency impedance transforming device are respectively connected to an input terminal and an output terminal of a matcher to be tested, and an output terminal of the virtual load device is connected to an input terminal of the virtual load device.
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