CN115549640B - Impedance matching system for radio frequency power supply and impedance matching adjusting method - Google Patents
Impedance matching system for radio frequency power supply and impedance matching adjusting method Download PDFInfo
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H11/00—Networks using active elements
- H03H11/02—Multiple-port networks
- H03H11/28—Impedance matching networks
- H03H11/30—Automatic matching of source impedance to load impedance
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- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
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- H01J37/32082—Radio frequency generated discharge
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- H01J37/32183—Matching circuits
Abstract
The invention relates to an impedance matching system and an impedance matching adjusting method for a radio frequency power supply, in particular to an impedance matching system for a radio frequency power supply, which comprises a plurality of LC units and an output module; n-1 LC units I are arranged in the LC units, and n is an integer greater than 1; the LC unit I comprises a first matching inductor, a first matching capacitor and a matching switch, and the matching switch is a single-pole double-throw switch; the first end of the first matching inductor is connected with the fixed end of the matching switch, and the second end of the first matching inductor is connected with the first end of the first matching capacitor; the second end of the first matching capacitor is connected with the second end of the radio frequency power supply, and the first contact of the matching switch is connected with the first end of the radio frequency power supply; a second contact of a matching switch of the ith LC unit I is connected with a first end of a first matching capacitor of the (i + 1) th LC unit I, and i belongs to {1,2, … …, n-2}; the 1 st LC unit I is connected with the output module. The degree of freedom in designing the impedance matching system is large.
Description
Technical Field
The invention relates to the technical field of radio frequency application, in particular to an impedance matching system and an impedance matching adjusting method for a radio frequency power supply.
Background
In a plasma apparatus, an rf power supply supplies rf signal energy to a reaction chamber to generate plasma. In order to match the output impedance of the rf power source with the impedance of the reaction chamber, an impedance matching system is required between the rf power source and the reaction chamber, and the rf power source provides rf signal energy to the reaction chamber through the impedance matching system. However, the degree of freedom in adjusting the impedance is low in the conventional impedance matching system.
Disclosure of Invention
The invention provides an impedance matching system for a radio frequency power supply and a control method thereof, aiming at the problem that the degree of freedom adjustment of impedance is lower in the existing impedance matching system.
In a first aspect, an impedance matching system for a radio frequency power supply is provided, which includes a matching module and an output module;
the matching module comprises a plurality of LC units, wherein n-1 LC units I exist in the LC units, n is an integer larger than 1, and the structures of the LC units I are the same;
the LC unit I comprises a first matching inductor, a first matching capacitor and a matching switch, and the matching switch is a single-pole double-throw switch; the first end of the first matching inductor is connected with the fixed end of the matching switch, and the second end of the first matching inductor is connected with the first end of the first matching capacitor; the second end of the first matching capacitor is connected with the second end of the radio frequency power supply, and the first contact of the matching switch is connected with the first end of the radio frequency power supply;
a second contact of a matching switch of the ith LC unit I is connected with a first end of a first matching capacitor of the (i + 1) th LC unit I, and i belongs to {1,2, … …, n-2};
the 1 st LC unit I is connected with the output module.
Optionally, the output module includes a first output inductor, a first output capacitor, and a first switch, where the first switch is a single-pole double-throw switch;
the first end of the first output inductor is connected with the fixed end of the first switch, the first contact of the first switch is connected with the first end of the radio frequency power supply, and the second contact of the first switch is connected with the first end of the first matching capacitor of the 1 st LC unit I.
Optionally, the output module includes a second output inductor and a second output capacitor;
the first end of the second output inductor is connected with the second end of the first output inductor, and the second end of the second output inductor is connected with the first end of the second output capacitor; the second end of the second output capacitor and the second end of the first output capacitor are output ends of the impedance matching system.
Optionally, there are 1 LC unit ii in the plurality of LC units, where the LC unit ii includes a second matching inductor and a second matching capacitor;
the first end of the second matching inductor is connected with the first end of the radio frequency power supply, the second end of the second matching inductor is connected with the first end of the second matching capacitor, and the second end of the second matching capacitor is connected with the second end of the radio frequency power supply;
and a second contact of the matching switch of the (n-1) th LC unit I is connected with a first end of a second matching capacitor.
Optionally, the radio frequency power supply is a low frequency power supply.
In a second aspect, there is provided an impedance matching adjusting method for the impedance matching system of the radio frequency power supply of the first aspect, including the steps of:
s1, detecting the output power of an impedance matching system;
and S2, selecting a contact connected with the movable end of the first switch and a contact connected with the movable end of the matching switch in the LC units I according to the detected output power of the impedance matching system.
Optionally, before step S1, the method further includes:
and S0, connecting the movable end of the first switch with the first contact of the first switch, and respectively connecting the matching switches of the LC units I with the respective first contacts.
Optionally, step S2 includes:
if the output power of the impedance matching system reaches the preset power, finishing the impedance matching adjustment; if the output power of the impedance matching system does not reach the preset power, sequentially switching a connecting contact of a movable end of the first switch and connecting contacts of movable ends of matching switches of the LC units I, and connecting the movable ends of the matching switches of the first switch and the LC units I with respective second contacts; and executing the step S1 after the connecting contact of the movable end of one matching switch is switched until the output power of the impedance matching system reaches the preset power.
Has the advantages that:
according to the impedance matching system for the radio frequency power supply, the number of the LC units I can be set according to actual conditions, the LC units I and/or the LC units II are sequentially added into the matching network by the single-pole double-throw switches to adjust the impedance of the matching network according to the actual conditions, the impedance matching system is large in design freedom, the adjustment range of the system efficiency is far larger than that of the traditional topology, the control method is simple and easy to adjust, all the switches are the single-pole double-throw switches, all the single-pole double-throw switches are respectively connected with the respective first contacts or second contacts and cannot be in a middle state, and the utilization rate of devices is improved. Meanwhile, the impedance matching system also has the advantages of low cost and strong anti-offset capability.
It is to be understood that both the foregoing general description and the following detailed description are exemplary and explanatory only and are not restrictive of the invention, as claimed.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and other drawings can be obtained by those skilled in the art without creative efforts.
Fig. 1 shows a schematic structural diagram of an impedance matching system for a radio frequency power supply according to this embodiment.
Fig. 2 shows a schematic structural diagram of a matching network of an impedance matching system for a radio frequency power supply provided by the present embodiment without accessing an LC cell.
Fig. 3 shows an equivalent circuit diagram of a matching network of an impedance matching system for a radio frequency power supply provided by the embodiment without accessing an LC cell.
Fig. 4 shows a schematic structural diagram of 1 LC cell connected to a matching network of the impedance matching system for a radio frequency power supply according to this embodiment.
Fig. 5 shows an equivalent circuit diagram of 1 LC cell connected to a matching network of the impedance matching system for a radio frequency power supply provided by the present embodiment.
Fig. 6 shows a schematic structural diagram of the matching network of the impedance matching system for a radio frequency power supply provided by this embodiment accessing n LC cells.
Fig. 7 shows an equivalent circuit diagram of the matching network of the impedance matching system for the radio frequency power supply provided by the embodiment accessing n LC cells.
Fig. 8 shows a schematic diagram of an impedance matching system for a radio frequency power supply according to the present embodiment.
Reference numerals:
LP, a first output inductor; LR, second output inductance; l1, a first matching inductor; l2, a second matching inductor;
CP, first output capacitance; CR and a second output capacitor; c1, a first matching capacitor; c2, a second matching capacitor;
s1, a first switch; s2, matching a switch;
uin, a radio frequency power supply; r, load.
Detailed Description
Reference will now be made in detail to the exemplary embodiments, examples of which are illustrated in the accompanying drawings. When the following description refers to the accompanying drawings, like numbers in different drawings represent the same or similar elements unless otherwise indicated. The embodiments described in the following exemplary embodiments do not represent all embodiments consistent with the present invention. Rather, they are merely examples of apparatus and methods consistent with certain aspects of the invention, as detailed in the appended claims.
Example 1
As shown in fig. 1, an impedance matching system for a radio frequency power source Uin according to an embodiment of the present disclosure includes a matching module and an output module;
the matching module comprises a plurality of LC units, wherein n-1 LC units I exist in the LC units, n is an integer larger than 1, and the structures of the LC units I are the same;
the LC unit I comprises a first matching inductor L1, a first matching capacitor C1 and a matching switch S2, and the matching switch S2 is a single-pole double-throw switch; a first end of the first matching inductor L1 is connected with a fixed end of the matching switch S2, and a second end of the first matching inductor L1 is connected with a first end of the first matching capacitor C1; the second end of the first matching capacitor C1 is connected with the second end of the radio frequency power supply Uin, and the first contact of the matching switch S2 is connected with the first end of the radio frequency power supply Uin;
a second contact of a matching switch S2 of the ith LC unit I is connected with a first end of a first matching capacitor C1 of the (i + 1) th LC unit I, and i belongs to {1,2, … …, n-2};
the 1 st LC unit I is connected with the output module.
The output module comprises a first output inductor LP, a first output capacitor CP and a first switch S1, and the first switch S1 is a single-pole double-throw switch;
the first end of the first output inductor LP is connected with the fixed end of the first switch S1, the first contact of the first switch S1 is connected with the first end of the radio frequency power supply Uin, and the second contact of the first switch S1 is connected with the first end of the first matching capacitor C1 of the 1 st LC unit I.
The output module comprises a second output inductor LR and a second output capacitor CR;
a first end of the second output inductor LR is connected to a second end of the first output inductor LP, and a second end of the second output inductor LR is connected to a first end of the second output capacitor CR; the second end of the second output capacitor CR and the second end of the first output capacitor CP are output terminals of the impedance matching system.
The circuit comprises a plurality of LC units, wherein 1 LC unit II in the LC units comprises a second matching inductor L2 and a second matching capacitor C2;
a first end of a second matching inductor L2 is connected with a first end of the radio frequency power supply Uin, a second end of the second matching inductor L2 is connected with a first end of a second matching capacitor C2, and a second end of the second matching capacitor C2 is connected with a second end of the radio frequency power supply Uin;
the second contact of the matching switch S2 of the (n-1) th LC cell i is connected to the first terminal of the second matching capacitor C2.
The radio frequency power supply Uin is a low-frequency power supply.
The output module comprises a first output inductor LP, a first output capacitor CP and a first switch S1, wherein the first switch S1 is a single-pole double-throw switch; the first end of the first output inductor LP is connected with the fixed end of the first switch S1, the first contact of the first switch S1 is connected with the first end of the radio frequency power supply Uin, and the second contact of the first switch S1 is connected with the first end of the first matching capacitor C1 of the 1 st LC unit I.
The output module comprises a second output inductor LR and a second output capacitor CR;
a first end of the second output inductor LR is connected to a second end of the first output inductor LP, and a second end of the second output inductor LR is connected to a first end of the second output capacitor CR; the second end of the second output capacitor CR and the second end of the first output capacitor CP are output terminals of the impedance matching system.
The matching module further comprises an LC unit II, and the LC unit II comprises a second matching inductor L2 and a second matching capacitor C2;
a first end of a second matching inductor L2 is connected with a first end of a radio frequency power supply Uin, a second end of the second matching inductor L2 is connected with a first end of a second matching capacitor C2, and a second end of the second matching capacitor C2 is connected with a second end of the radio frequency power supply Uin;
the second contact of the matching switch S2 of the nth LC cell i is connected to the first end of the second matching capacitor C2.
The radio frequency power supply Uin is a low-frequency power supply.
Example 2
As shown in fig. 1, an impedance matching system for a radio frequency power supply Uin according to an embodiment of the present disclosure includes a matching module and an output module.
The output module includes a first output inductor LP, a second output inductor LR, a first output capacitor CP, a second output capacitor CR, and a first switch S1. The first end of the first output inductor LP is connected with the fixed end of the first switch S1, the first contact of the first switch S1 is connected with the first end of the radio frequency power supply Uin, and the second contact of the first switch S1 is connected with the LC unit I. A first end of the second output inductor LR is connected to a second end of the first output inductor LP, and a second end of the second output inductor LR is connected to a first end of the second output capacitor CR; the second end of the second output capacitor CR and the second end of the first output capacitor CP are output ends of an impedance matching system, and the output ends of the impedance matching system are connected to the load R.
The radio frequency power supply Uin is a low-frequency power supply.
The matching module comprises n LC units, wherein n is an integer larger than 1, and n-1 LC units I and 1 LC unit II are arranged in the n LC units; the LC units I are identical in structure and are sequentially arranged; and the LC unit II is connected with a radio frequency power supply Uin.
Specifically, the LC unit I comprises a first matching inductor L1, a first matching capacitor C1 and a matching switch S2, wherein the first end of the first matching inductor L1 is connected with the fixed end of the matching switch S2, and the second end of the first matching inductor L1 is connected with the first end of the first matching capacitor C1; the second end of the first matching capacitor C1 is connected with the second end of the radio frequency power supply Uin, and the first contact of the matching switch S2 is connected with the first end of the radio frequency power supply Uin;
specifically, the LC unit II comprises a second matching inductor L2 and a second matching capacitor C2; the first end of the second matching inductor L2 is connected with the first end of the radio frequency power supply Uin, the second end of the second matching inductor L2 is connected with the first end of the second matching capacitor C2, and the second end of the second matching capacitor C2 is connected with the second end of the radio frequency power supply Uin.
A second contact of a matching switch S2 of the ith LC unit I is connected with a first end of a first matching capacitor C1 of the (i + 1) th LC unit I, and i belongs to {1,2, … …, n-2}; the second contact of the matching switch S2 of the (n-1) th LC cell i is connected to the first terminal of the second matching capacitor C2. The second terminal of the first matching capacitor C1 of the 1 st LC cell i is connected to the second contact of the first switch S1.
A schematic diagram of an impedance matching system for a radio frequency power supply Uin according to the present embodiment is shown in fig. 8, in which,Z gen in order to match the input resistance of the system,Z match to match the total impedance of the output module and the LC cell affecting the output current in the system,Z ch for loading the chamber with the impedance of R, byZ gen 、Z match AndZ ch and adjusting the impedance of the impedance network to enable the radio frequency power supply Uin to achieve the best performance.
When the impedance matching system is used, the output power of the impedance matching system is detected, and the number of LC units connected into an impedance network is determined, wherein the impedance network comprises a radio frequency power supply Uin, a load R, an output module and LC units influencing output current;
when the number of the LC units in the access impedance network is 0, connecting the movable end of a first switch S1 with a first contact of the first switch S1, and respectively connecting the movable ends of matching switches S2 in a plurality of LC units I with respective first contacts;
when the number of the LC units I in the accessed impedance network is 1, connecting the movable end of a first switch S1 with a second contact of the first switch S1, and respectively connecting the movable ends of matching switches S2 of a plurality of LC units I with respective first contacts;
when the number of the LC units I in the access impedance network is m, if m is more than 1 and less than or equal to n, connecting the movable end of the first switch S1 with the second contact of the first switch S1, respectively connecting the movable end of the matching switch S2 of the ith LC unit I with the respective second contact, and setting i to be {1,2, … …, m }; and the movable ends of the matching switches S2 of the other LC units I are respectively connected with respective first contacts.
As shown in fig. 2, when there are 0 LC cells connected to the impedance network, all the single-pole double-throw switches are connected to the respective first contacts, and the equivalent circuit of the impedance network is as shown in fig. 3, there are two current loops in the impedance network, and the KVL equation of the impedance network is listed here:
in the formula (I), the compound is shown in the specification,U in is the voltage across the radio frequency power supply Uin,Z LP is the impedance of the first output inductor LP,Z CP is the impedance of the first output capacitance CP,Z LR is the resistance of the second output inductor LR,Z CR is the impedance of the second output capacitor CR,Iinin order to input a current, the current is,Ioin order to output the current, the current is,R L is the resistance of the load R.
As shown in fig. 4, when there are 1 LC cells connected to the impedance network, the first switch S1 is connected to the second contact thereof, and all the matching switches S2 are connected to the respective first contacts; the equivalent circuit of the impedance network at this time is shown in fig. 5, three current loops exist in the impedance network, and the KVL equation of the impedance network at this time is listed:
in the formula (I), the compound is shown in the specification,U in is the voltage across the radio frequency power supply Uin,Z L1-1 is the impedance of the first matching inductance L1 of the 1 st LC cell i,Z C1-1 is the impedance of the first matching capacitor C1 of the 1 st LC cell i,Z LP is the impedance of the first output inductor LP,Z CP is the impedance of the first output capacitance CP,Z LR as is the resistance of the second output inductor LR,Z CR is the impedance of the second output capacitor CR,Iinin order to input a current, the current is,Ipis the current of the first output inductor LP,Ioin order to output the current, the current is,R L is the resistance of the load R.
As shown in fig. 6, when there are n LC cells connected to the impedance network, the first switch S1 is connected to the second contact thereof, and all the matching switches S2 are connected to the respective second contacts; the equivalent circuit of the impedance network at this time is shown in fig. 7, n +2 current loops exist in the impedance network, and the KVL equation of the impedance network at this time is listed:
in the formula (I), the compound is shown in the specification,U in is the voltage across the radio frequency power supply Uin,Z L2 for the impedance of the second matching inductance L2,Z C2 is the impedance of the second matching capacitor C2,Z L1-(n-1) is the impedance of the first matching inductance L1 of the (n-1) th LC cell i,Z C1-(n-1) is the impedance of the first matching capacitor C1 of the (n-1) th LC cell i,Z C1-1 is the impedance of the first matching capacitor C1 of the 1 st LC cell i,Z LP is the impedance of the first output inductor LP,Z CP is the impedance of the first output capacitance CP,Z LR is the resistance of the second output inductor LR,Z CR is the impedance of the second output capacitor CR,Iinin order to input a current, the current is,
is the current of the first matching inductance L1 of the (n-1) th LC cell i,
is the current of the first matching inductance L1 of the (n-2) th LC cell i,Ipis the current of the first output inductor LP,Ioin order to output the current, the current is,R L is the resistance of the load R.
Z L1-k AndZ C1-k the expression of (a) is:
in the formula (I), the compound is shown in the specification,Z L1-k the impedance of the first matching inductance L1 of the kth LC cell i,Z C1-k is the impedance of the first matching capacitor C1 of the kth LC cell i,jis an imaginary unit, 1/, (ωC 1-k ) Is the capacitive reactance of the first matching capacitor C1 of the kth LC cell i,ω L 1-k is the inductance of the first matching inductance L1 of the kth LC cell i.
Z L2 
Z C2 The expression of (a) is:
Z L2 for the impedance of the second matching inductance L2,Z C2 is the impedance of the second matching capacitor C2,jis an imaginary unit, 1/, (ω C2) Is the capacitive reactance of the second matching capacitor C2,ωL2is the inductive reactance of the second matching inductance L2.
As can be known from the formulas (1), (2) and (3), the number of LC cells connected to the matching network can be controlled by each single-pole double-throw switch, and the number of LC cells connected to the impedance network affects the magnitude of the output current, thereby affecting the output load R of the impedance matching system.
The values of all inductors in the matching module can be the same or different; the values of all capacitors in the matching module can be the same or different; when the values of all inductors in the matching module are the same and the values of all capacitors are the same, the equal difference adjustment of the imaginary part of the impedance network can be realized, namely, the added values of the imaginary part of the impedance network are the same when each LC unit is added into the impedance network; the values of the capacitance and the inductance in the n LC units in the matching module may also be: the values of the capacitors from the 1 st LC unit to the nth LC unit are reduced step by step, and the values of the inductors from the 1 st LC unit to the nth LC unit are reduced step by step, so that the function of coarse tuning and then fine tuning of the impedance matching network is realized.
When the values of the load R, the capacitance, and the inductance in the impedance network are different, the impedance network may exhibit different RLC characteristics, i.e., the impedance matching network may be resistive, inductive, or capacitive.
If two LC units i are connected to the impedance network, the voltage of the radio frequency power supply Uin is 10V, the frequency of the radio frequency power supply Uin is 50Hz, the load R is 10 Ω, the impedance of the first output inductor LP is j8 Ω, the impedance of the second output inductor LR is j8 Ω, the impedance of the first matching inductor L1 of the 1 st LC unit i is j4 Ω, the impedance of the first matching inductor L1 of the 2 nd LC unit i is j2 Ω, the impedance of the first output capacitor CP is-j 4 Ω, the impedance of the second output capacitor CR is-j 4 Ω, the impedance of the first matching capacitor C1 of the 1 st LC unit i is-j 2 Ω, and the impedance of the first matching capacitor C1 of the 2 nd LC unit i is-j 1 Ω, the total impedance of the impedance network at this time can be obtained:
therefore, the impedance network is in an inductive state at this time.
The impedance matching system for the radio frequency power supply Uin, provided by the embodiment, the number of the LC units I can be set according to actual conditions, the LC units I and/or the LC units II are sequentially added into the matching network by the single-pole double-throw switch throwing according to the actual conditions, so that the impedance of the matching network is adjusted, the design freedom of the impedance matching system is large, the adjustment range of the system efficiency is far larger than that of the traditional topology, the impedance matching adjustment method is simple and easy to adjust, all the switches are the single-pole double-throw switches, all the single-pole double-throw switches are respectively connected with the respective first contacts or the respective second contacts, the single-pole double-throw switches cannot be in an intermediate state, and the utilization rate of devices is improved. Meanwhile, the impedance matching system also has the advantages of low cost and strong anti-offset capability.
Example 3
The embodiment provides an impedance matching adjusting method for an impedance matching system of a radio frequency power supply Uin, which comprises the following steps:
and S0, connecting the movable end of the first switch S1 with the first contact thereof, and respectively connecting the matching switches S2 of the LC units I with the respective first contacts.
S1, detecting the output power of an impedance matching system;
and S2, selecting a contact connected with the movable end of the first switch S1 and a contact connected with the movable end of the matching switch S2 in the LC units I according to the detected output power of the impedance matching system.
The step S2 comprises the following steps:
if the output power of the impedance matching system reaches the preset power, finishing the impedance matching adjustment; if the output power of the impedance matching system does not reach the preset power, the first switch S1 and the matching switches S2 of the LC units I are thrown in sequence, and the movable ends of the first switch S1 and the matching switches S2 of the LC units I are connected with respective second contacts; and (2) executing the step (S1) after throwing one matching switch (S2) until the output power of the impedance matching system reaches the preset power.
In this embodiment, the switches are sequentially switched according to the sequence of the first switch S1, the matching switch S2 of the 1 st LC cell i, the matching switches S2, … … of the 2 nd LC cell i, and the matching switch S2 of the n-1 st LC cell i until the output power of the impedance matching system reaches the preset power, and the switching speed of each switch can be changed from fast to slow.
It is understood that the same or similar parts in the above embodiments may be mutually referred to, and the same or similar parts in other embodiments may be referred to for the content which is not described in detail in some embodiments.
It should be noted that the terms "first," "second," and the like in the description of the present invention are used for descriptive purposes only and are not to be construed as indicating or implying relative importance. Further, in the description of the present invention, the meaning of "a plurality" means at least two unless otherwise specified.
It should be understood that portions of the present invention may be implemented in hardware, software, firmware, or a combination thereof. In the above embodiments, various steps or methods may be implemented in software or firmware stored in a memory and executed by a suitable instruction execution system. For example, if implemented in hardware, as in another embodiment, any one or combination of the following techniques, which are known in the art, may be used: a discrete logic circuit having a logic gate circuit for implementing a logic function on a data signal, an application specific integrated circuit having an appropriate combinational logic gate circuit, a Programmable Gate Array (PGA), a Field Programmable Gate Array (FPGA), or the like.
It will be understood by those skilled in the art that all or part of the steps carried by the method for implementing the above embodiments may be implemented by hardware related to instructions of a program, which may be stored in a computer readable storage medium, and when the program is executed, the program includes one or a combination of the steps of the method embodiments.
In addition, functional units in the embodiments of the present invention may be integrated into one processing module, or each unit may exist alone physically, or two or more units are integrated into one module. The integrated module can be realized in a hardware mode, and can also be realized in a software functional module mode. The integrated module, if implemented in the form of a software functional module and sold or used as a separate product, may also be stored in a computer-readable storage medium.
The storage medium mentioned above may be a read-only memory, a magnetic or optical disk, etc.
In the description herein, references to the description of the term "one embodiment," "some embodiments," "an example," "a specific example," or "some examples," etc., mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
Although embodiments of the present invention have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting the present invention, and that variations, modifications, substitutions and alterations can be made to the above embodiments by those of ordinary skill in the art within the scope of the present invention.
Claims (8)
1. An impedance matching system for a radio frequency power supply is characterized by comprising a matching module and an output module;
the matching module comprises a plurality of LC units, wherein n-1 LC units I exist in the LC units, n is an integer larger than 1, and the structures of the LC units I are the same;
the LC unit I comprises a first matching inductor (L1), a first matching capacitor (C1) and a matching switch (S2), and the matching switch (S2) is a single-pole double-throw switch; the first end of the first matching inductor (L1) is connected with the fixed end of the matching switch (S2), and the second end of the first matching inductor (L1) is connected with the first end of the first matching capacitor (C1); the second end of the first matching capacitor (C1) is connected with the second end of the radio frequency power supply (Uin), and the first contact of the matching switch (S2) is connected with the first end of the radio frequency power supply (Uin);
a second contact of a matching switch (S2) of the ith LC unit I is connected with a first end of a first matching capacitor (C1) of the (i + 1) th LC unit I, and i belongs to {1,2, … …, n-2}; the 1 st LC unit I is connected with an output module.
2. An impedance matching system for a radio frequency power supply according to claim 1, wherein said output module comprises a first output inductor (LP), a first output Capacitor (CP) and a first switch (S1), the first switch (S1) being a single pole double throw switch;
the first end of the first output inductor (LP) is connected with the fixed end of the first switch (S1), the first contact of the first switch (S1) is connected with the first end of the radio frequency power supply (Uin), and the second contact of the first switch (S1) is connected with the first end of the first matching capacitor (C1) of the 1 st LC unit I.
3. An impedance matching system for a radio frequency power supply according to claim 2, wherein said output module comprises a second output inductor (LR) and a second output Capacitor (CR);
a first end of the second output inductor (LR) is connected to a second end of the first output inductor (LP), and a second end of the second output inductor (LR) is connected to a first end of the second output Capacitor (CR); the second end of the second output Capacitor (CR) and the second end of the first output Capacitor (CP) are output terminals of the impedance matching system.
4. An impedance matching system for a radio frequency power supply according to claim 2, wherein there is 1 LC cell ii in the plurality of LC cells, said LC cell ii comprising a second matching inductance (L2) and a second matching capacitance (C2);
the first end of the second matching inductor (L2) is connected with the first end of the radio frequency power supply (Uin), the second end of the second matching inductor (L2) is connected with the first end of the second matching capacitor (C2), and the second end of the second matching capacitor (C2) is connected with the second end of the radio frequency power supply (Uin);
the second contact of the matching switch (S2) of the (n-1) th LC cell I is connected to the first end of the second matching capacitor (C2).
5. An impedance matching system for a radio frequency power supply according to any of claims 1-4, characterized in that said radio frequency power supply (Uin) is a low frequency power supply.
6. An impedance matching adjusting method of an impedance matching system for a radio frequency power supply according to claim 4, comprising the steps of:
s1, detecting the output power of an impedance matching system;
and S2, selecting a contact connected with the movable end of the first switch (S1) and a contact connected with the movable end of the matching switch (S2) in the LC units I according to the detected output power of the impedance matching system.
7. The impedance matching adjusting method for the impedance matching system of the radio frequency power supply according to claim 6, further comprising, before step S1:
and S0, connecting the movable end of the first switch (S1) with the first contact thereof, and respectively connecting the matching switches (S2) of the LC units I with the respective first contacts.
8. The impedance matching adjusting method of the impedance matching system for the radio frequency power supply according to claim 7, wherein the step S2 comprises:
if the output power of the impedance matching system reaches the preset power, finishing the impedance matching adjustment;
if the output power of the impedance matching system does not reach the preset power, sequentially switching a connecting contact of a movable end of a first switch (S1) and connecting contacts of movable ends of matching switches (S2) of a plurality of LC units I, and connecting the movable ends of the first switch (S1) and the matching switches (S2) of the LC units I with respective second contacts; and (2) executing the step (S1) after the connecting contact of the moving end of one matching switch (S2) is switched until the output power of the impedance matching system reaches the preset power.
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| US8416008B2 (en) * | 2011-01-20 | 2013-04-09 | Advanced Energy Industries, Inc. | Impedance-matching network using BJT switches in variable-reactance circuits |
| CN202978850U (en) * | 2012-12-19 | 2013-06-05 | 中微半导体设备(上海)有限公司 | Plasma treatment chamber and radiofrequency matching circuit thereof |
| CN107959120B (en) * | 2016-10-17 | 2020-07-10 | 比亚迪股份有限公司 | Reconfigurable antenna and mobile terminal |
| CN108878240B (en) * | 2017-05-10 | 2020-08-21 | 北京北方华创微电子装备有限公司 | Impedance matching device and semiconductor processing equipment |
| US11476091B2 (en) * | 2017-07-10 | 2022-10-18 | Reno Technologies, Inc. | Impedance matching network for diagnosing plasma chamber |
| CN108233886A (en) * | 2018-03-12 | 2018-06-29 | 锐石创芯（深圳）科技有限公司 | Wideband impedance matching module and the device for including it |
| US10680574B1 (en) * | 2019-04-26 | 2020-06-09 | Palstar, Inc. | Automatic impedance matching system, method and apparatus |
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Address after: 518102 Room 101, 201, 301, Building B, Functional Support Area, Taohuayuan Zhichuang Town, Tiegang Community, Xixiang Street, Baoan District, Shenzhen, Guangdong Province Patentee after: Shenzhen Hengyunchang Vacuum Technology Co.,Ltd. Address before: Room 101, 201, 301, Building B, Functional Supporting Area, Taohuayuan Zhichuang Town, Tiegang Community, Xixiang Street, Baoan District, Shenzhen, Guangdong 518100 Patentee before: SHENZHEN HENGYUNCHANG VACUUM TECHNOLOGY CO.,LTD. |