CN114232106A - Conveying system for silicon carbide crystal growth - Google Patents
Conveying system for silicon carbide crystal growth Download PDFInfo
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- CN114232106A CN114232106A CN202210184904.9A CN202210184904A CN114232106A CN 114232106 A CN114232106 A CN 114232106A CN 202210184904 A CN202210184904 A CN 202210184904A CN 114232106 A CN114232106 A CN 114232106A
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B35/00—Apparatus not otherwise provided for, specially adapted for the growth, production or after-treatment of single crystals or of a homogeneous polycrystalline material with defined structure
- C30B35/005—Transport systems
Abstract
The invention belongs to the technical field of conveying systems, and particularly relates to a conveying system for growing silicon carbide crystals, which comprises: the device comprises a first reaction kettle, a screw rod mechanism, a movable disc, a mounting disc, a crushing mechanism, a stirring mechanism and a conveying mechanism; the movable disc rotates on the screw rod mechanism in the longitudinal moving process, namely the mounting disc drives the crushing mechanism to crush blocky materials in the storage cavity; the mounting disc drives the stirring mechanism to stir the materials in the storage cavity, and the materials are folded towards the crushing mechanism; the mounting disc can rotate and can also move longitudinally, so that the stirring mechanism can uniformly stir materials, the crushing mechanism can play a role in grinding the materials, the effective dissolution and transportation of carbon dissolution are realized by reducing the viscosity of a cosolvent or increasing the rotating speed of a seed crystal rod in the second reaction kettle, and the problem of bubble inclusion is solved by performing infiltration treatment on a seed crystal growth surface or reducing growth air pressure.
Description
Technical Field
The invention belongs to the technical field of conveying systems, and particularly relates to a conveying system for growing silicon carbide crystals.
Background
Various reaction materials are needed for the growth of the silicon carbide crystals, and the traditional stirring method is adopted, and the stirring is directly carried out through blades.
The stirring of traditional paddle for a long time can block, has cubic material in the reaction material simultaneously, can not pulverize cubic material and be powdery material.
Therefore, there is a need to develop a new conveying system for silicon carbide crystal growth to solve the above problems.
Disclosure of Invention
The invention aims to provide a conveying system for growing silicon carbide crystals.
In order to solve the above technical problem, the present invention provides a conveying system for silicon carbide crystal growth, comprising: the device comprises a first reaction kettle, a screw rod mechanism, a movable disc, a mounting disc, a crushing mechanism, a stirring mechanism and a conveying mechanism; wherein a storage cavity is arranged in the first reaction kettle and is used for storing materials; the screw rod mechanism is longitudinally arranged in the first reaction kettle, the movable disc is movably connected to the screw rod mechanism, the mounting disc is fixed to the bottom of the movable disc, the crushing mechanism is fixed to the bottom of the mounting disc, and the stirring mechanism is movably arranged in the circumferential direction of the mounting disc; the lead screw mechanism drives the movable disc to move longitudinally, and the movable disc rotates on the lead screw mechanism in the longitudinal movement process, namely the mounting disc drives the crushing mechanism to crush the blocky materials in the storage cavity so as to crush and grind the blocky materials into powdery materials; the mounting disc drives the stirring mechanism to stir the materials in the storage cavity, and the materials are folded towards the crushing mechanism; the stirring mechanism swings on the mounting disc, and when the stirring mechanism props against the movable disc or the bottom of the storage cavity, polishing and scraping are carried out; and the conveying mechanism conveys the crushed and stirred materials to the second reaction kettle.
Further, the screw mechanism includes: the screw rod, the screw rod nut, the moving rod and the screw rod motor; the screw rod is longitudinally arranged in the first reaction kettle, the screw rod nut is movably arranged on the screw rod, one end of the moving rod is movably connected with the inner wall of the first reaction kettle, and the other end of the moving rod is fixed with the screw rod nut; the movable disc is movably connected with the bottom of the screw nut and is also movably connected with the screw rod; the screw rod motor drives the screw rod to rotate so that the screw rod nut longitudinally moves along the length direction of the screw rod, namely, the screw rod drives the movable disc to rotate, and the screw rod nut drives the movable disc to longitudinally move.
Further, the screw rod penetrates through the screw rod nut, the movable disc and the mounting disc; a rotating T-shaped groove is formed in the inner side wall of the screw nut, the top of the movable disc extends upwards to form a connecting plate, and a first T-shaped block is arranged on the connecting plate at a position corresponding to the rotating T-shaped groove so that the movable disc is movably connected with the screw nut in a limiting manner; the movable plate is characterized in that a movable T-shaped groove is formed in the screw rod, the inner wall of the movable plate extends towards the movable T-shaped groove to form a second T-shaped block, so that the movable plate is movably connected with the screw rod in a limiting mode, namely the movable plate longitudinally moves under the driving of a screw rod nut and rotates along with the screw rod.
Further, the crushing mechanism includes: a plurality of crushing teeth; the crushing teeth are uniformly arranged and radially arranged at the bottom of the mounting disc; the mounting disc drives the crushing teeth to abut against the material to be crushed in the longitudinal moving and rotating process.
Furthermore, a plurality of mounting grooves are formed in the circumferential direction of the mounting disc, and a sliding rod is arranged in each mounting groove; the stirring mechanism includes: a plurality of stirring assemblies; each stirring assembly is hinged on the sliding rod in the corresponding mounting groove; each stirring assembly slides on the sliding rod and rotates around the sliding rod, namely the mounting disc drives each stirring assembly to rotate, so that each stirring assembly rotates on the corresponding sliding rod to stir materials in the storage cavity, and the materials are gathered towards the crushing mechanism; when each stirring assembly moves downwards or moves downwards to abut against the materials, each stirring assembly swings on the corresponding sliding rod and abuts against the bottom of the movable disc to polish and scrape the materials, or each stirring assembly moves downwards to abut against the bottom of the storage cavity until each stirring assembly swings on the corresponding sliding rod to abut against the bottom of the movable disc, so that each stirring assembly polishes and scrapes the bottom of the movable disc and the bottom of the storage cavity.
Further, the stirring assembly includes: the hinge sleeve, the hinge rod and the stirring plate; one end of the hinge rod is connected with a hinge sleeve, the other end of the hinge rod is connected with the stirring plate, and the hinge sleeve is movably sleeved on the sliding rod; the stirring plate is obliquely arranged, and two sides of the stirring plate are arranged in a cutting edge manner; the hinged sleeve slides on the sliding rod and rotates around the sliding rod, namely the stirring plate is used for stirring materials and folding towards the crushing mechanism when the mounting disc rotates; the mounting disc drives one side of stirring board to support and stores the chamber bottom, until the opposite side of stirring board supports the bottom of movable disk, makes stirring board both sides are polished, are scraped the material to movable disk, storage chamber bottom respectively.
Furthermore, air bags are arranged above and below the sliding rod, oil spray holes are formed in the air bags towards the sliding rod, and lubricating oil is stored in the air bags; the articulated cover is provided with the dirt proof boot with the hinge bar junction, just the dirt proof boot is sealed the mounting groove, promptly when the stirring board swings on the slide bar, articulated cover, hinge bar support corresponding gasbag and pass through the oil spout hole to the slide bar blowout lubricating oil, just articulated cover slides on the slide bar and lubricates.
Furthermore, each mounting groove is arranged at intervals, and when the hinged sleeve slides on the sliding rod, the hinged sleeve collides with the wall of the mounting groove, namely, the stirring plate is shaken to shake the material.
Further, the conveying mechanism includes: the conveying valve and the conveying pipeline are arranged at the bottom of the first reaction kettle; the conveying valve is communicated with the storage cavity, namely, materials in the storage cavity are conveyed into the second reaction kettle through the conveying valve and the conveying pipeline.
Further, a reaction cavity is arranged in the second reaction kettle, and a corresponding cosolvent is injected into the reaction cavity; the seed crystal rod is longitudinally inserted into the cosolvent and axially rotates; soaking a seed crystal growth surface on the seed crystal rod, and adding a corresponding amount of Ni into a cosolvent; and controlling the rotating speed of the seed rod and controlling the growth pressure in the reaction cavity.
The silicon carbide crystal storage device has the beneficial effects that the movable disc and the mounting disc are movably arranged on the screw rod mechanism, so that the mounting disc can not only rotate but also move up and down along the screw rod mechanism, the stirring mechanism can fully stir materials in the storage cavity, the crushing mechanism arranged on the mounting disc can play a role in grinding the materials, and meanwhile, the stirring mechanism can fold the materials towards the crushing mechanism, so that the stirring and grinding effects on the materials are improved, and the continuous growth of a subsequent silicon carbide crystal is facilitated; effective dissolution and transportation of carbon dissolution are realized by reducing the viscosity of the cosolvent (reducing components such as high-viscosity Cr and the like or increasing the temperature) or increasing the rotating speed of the seed crystal rod in the second reaction kettle, so that the problem of inclusion of the cosolvent is solved; soaking the growth surface of the seed crystal (removing an oxide layer on the surface of the seed crystal; adding certain Ni in a cosolvent to facilitate seed crystal soaking); or reducing the growth gas pressure to solve the bubble inclusion problem.
Additional features and advantages of the invention will be set forth in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention.
In order to make the aforementioned and other objects, features and advantages of the present invention comprehensible, preferred embodiments accompanied with figures are described in detail below.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and other drawings can be obtained by those skilled in the art without creative efforts.
FIG. 1 is a self-contained view of the silicon carbide crystal growth conveyor system of the present invention;
FIG. 2 is a view showing the internal structure of a first reaction vessel according to the present invention;
FIG. 3 is a partial block diagram of FIG. 2 of the present invention;
FIG. 4 is an assembly view of the movable plate and feed screw nut of the present invention;
fig. 5 is an assembly view of the movable plate and lead screw of the present invention.
In the figure:
1. a first reaction kettle;
2. a screw mechanism; 21. a screw rod; 211. moving the T-shaped groove; 22. a feed screw nut; 221. rotating the T-shaped groove; 23. a travel bar; 24. a screw motor;
3. a movable tray; 31. a first T-shaped block; 32. a second T-shaped block;
4. mounting a disc; 41. mounting grooves; 42. a slide bar;
5. a crushing mechanism; 51. crushing teeth;
6. a stirring mechanism; 61. a hinge sleeve; 62. a hinged lever; 63. a stirring plate;
7. a conveying mechanism; 71. a delivery valve; 72. a delivery conduit;
8. and a second reaction kettle.
Detailed Description
To make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings, and it is apparent that the described embodiments are some, but not all embodiments of the present invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Example 1
In the present embodiment, as shown in fig. 1 to 5, the present embodiment provides a conveying system for growing silicon carbide crystals, comprising: the device comprises a first reaction kettle 1, a screw rod mechanism 2, a movable disc 3, a mounting disc 4, a crushing mechanism 5, a stirring mechanism 6 and a conveying mechanism 7; wherein a storage cavity is arranged in the first reaction kettle 1 and is used for storing materials; the screw rod mechanism 2 is longitudinally arranged in the first reaction kettle 1, the movable disc 3 is movably connected to the screw rod mechanism 2, the mounting disc 4 is fixed at the bottom of the movable disc 3, the crushing mechanism 5 is fixed at the bottom of the mounting disc 4, and the stirring mechanism 6 is movably arranged on the periphery of the mounting disc 4; the lead screw mechanism 2 drives the movable disc 3 to move longitudinally, and the movable disc 3 rotates on the lead screw mechanism 2 in the longitudinal movement process, namely the mounting disc 4 drives the crushing mechanism 5 to crush the blocky materials in the storage cavity so as to crush and grind the blocky materials into powdery materials; the mounting disc 4 drives the stirring mechanism 6 to stir the materials in the storage cavity, and the materials are gathered towards the crushing mechanism 5; the stirring mechanism 6 swings on the mounting disc 4, and when the stirring mechanism 6 props against the movable disc 3 or the bottom of the storage cavity, polishing and scraping are carried out; and the conveying mechanism 7 conveys the crushed and stirred materials to a second reaction kettle 8.
First reaction kettle 1
First reation kettle 1 mainly plays the effect of storing the material, through at 1 internally mounted screw rod mechanism 2 of first reation kettle, activity dish 3, mounting disc 4, broken mechanism 5, rabbling mechanism 6 and conveying mechanism 7, realizes stirring, grinding and carrying to the material.
The screw rod mechanism 2 mainly plays a driving role, can drive the movable disc 3, the mounting disc 4 to move longitudinally and rotate, further drive the stirring mechanism 6 to stir the materials evenly, draw the materials close to the crushing mechanism 5, further realize that the crushing mechanism 5 rotates under the drive of the mounting disc 4, grind the materials, crush the blocky materials into powdery materials, and further enable the mixed materials to be more even.
The movable disc 3 mainly plays a role in installation and limiting, the movable disc 3 and the screw rod mechanism 2 are movably and limitedly installed, and therefore the movable disc 3 can move and rotate on the screw rod mechanism 2 to drive the installation disc 4 to longitudinally move and rotate.
Mounting plate 4
The mounting disc 4 mainly plays the effect of installation, and broken mechanism 5 of installation, rabbling mechanism 6 on the mounting disc 4, simultaneously mounting disc 4 can drive rabbling mechanism 6 and constantly stir the material at longitudinal movement and pivoted in-process, and broken mechanism 5 grinds the material.
Conveying mechanism 7
Conveying mechanism 7 mainly plays the effect of transported substance material, can carry the material after breakage, stirring to second reation kettle 8.
In this embodiment, this embodiment sets up the activity dish 3 through the activity on screw rod mechanism 2, the mounting disc 4, can make mounting disc 4 not only can rotate and can also reciprocate along screw rod mechanism 2, thereby realize that rabbling mechanism 6 fully stirred the material in the storage chamber, the broken mechanism 5 that sets up on the mounting disc 4 can play the effect of grinding the material, simultaneously rabbling mechanism 6 can draw in the material towards broken mechanism 5 in, and then improve the material stirring, the grinding effect, help follow-up silicon carbide crystal to continue to grow.
In the present embodiment, the screw mechanism 2 includes: a screw 21, a screw nut 22, a moving rod 23 and a screw motor 24; the screw 21 is longitudinally arranged in the first reaction kettle 1, the screw nut 22 is movably arranged on the screw, one end of the moving rod 23 is movably connected with the inner wall of the first reaction kettle 1, and the other end of the moving rod 23 is fixed with the screw nut 22; the movable disc 3 is movably connected with the bottom of the screw nut, and the movable disc 3 is also movably connected with the screw rod 21; the lead screw motor 24 drives the lead screw 21 to rotate, so that the lead screw nut 22 longitudinally moves along the length direction of the lead screw 21, that is, the lead screw 21 drives the movable disc 3 to rotate, and the lead screw nut 22 drives the movable disc 3 to longitudinally move.
In this embodiment, the moving rod 23 is matched with the inner wall of the first reaction vessel 1 through a groove block, so that the moving rod 23 moves on the inner wall of the first reaction vessel 1, and meanwhile, the moving rod 23 guides the screw nut 22, so that the screw nut 22 longitudinally moves on the screw 21 when the screw motor 24 drives the screw 21 to rotate.
In the embodiment, the screw 21 passes through the screw nut 22, the movable disc 3 and the mounting disc 4; a rotating T-shaped groove 221 is formed in the inner side wall of the feed screw nut 22, the top of the movable disc 3 extends upwards to form a connecting plate, and a first T-shaped block 31 is arranged on the connecting plate at a position corresponding to the rotating T-shaped groove 221 so that the movable disc 3 is movably connected with the feed screw nut 22 in a limiting manner; the screw 21 is provided with a movable T-shaped groove 211, and the inner wall of the movable disc 3 extends towards the movable T-shaped groove 211 to form a second T-shaped block 32, so that the movable disc 3 is movably connected with the screw 21 in a limiting manner, that is, the movable disc 3 is driven by the screw nut 22 to longitudinally move and rotate along with the screw 21.
In this embodiment, when the movable disc 3 is engaged with the screw nut 22, the movable disc 3 and the screw nut 22 can rotate relatively by the engagement of the first T-shaped block 31 and the rotating T-shaped groove 221, and simultaneously, the movable disc 3 and the screw 21 are engaged with the moving T-shaped groove 211 by the engagement of the second T-shaped block 32, so that the movable disc 3 can move longitudinally on the screw 21, thereby achieving the purpose that the screw 21 rotates to drive the screw nut 22 to move longitudinally on the screw 21, and simultaneously, the movable disc 3 is driven to move and rotate under the driving of the screw nut 22, and further, the mounting disc 4 is driven to move and rotate on the screw 21.
In the present embodiment, the crushing mechanism 5 includes: a plurality of crushing teeth 51; the crushing teeth 51 are uniformly arranged and radially arranged at the bottom of the mounting disc 4; the mounting plate 4 drives the crushing teeth 51 to resist the material for crushing in the process of longitudinal movement and rotation.
In this embodiment, each crushing tooth 51 is arranged uniformly and radially at the bottom of the mounting disc 4, and can perform the function of crushing the material when the mounting disc 4 presses the material.
In this embodiment, a plurality of mounting grooves 41 are formed in the circumferential direction of the mounting plate 4, and a sliding rod 42 is disposed in each mounting groove 41; the stirring mechanism 6 includes: a plurality of stirring assemblies; each stirring assembly is hinged on a sliding rod 42 in the corresponding mounting groove 41; each stirring assembly slides on the sliding rod 42 and rotates around the sliding rod 42, that is, the mounting disc 4 drives each stirring assembly to rotate, so that each stirring assembly rotates on the corresponding sliding rod 42 to stir the material in the storage cavity, and the material is gathered towards the crushing mechanism 5; when each stirring component moves downwards or moves downwards to abut against the materials, each stirring component swings on the corresponding sliding rod 42 and abuts against the bottom of the movable disc 3 to polish and scrape the materials, or each stirring component moves downwards to abut against the bottom of the storage cavity until each stirring component swings on the corresponding sliding rod 42 to abut against the bottom of the movable disc 3, so that each stirring component polishes and scrapes the bottom of the movable disc 3 and the storage cavity.
In this embodiment, the stirring assembly includes: a hinge sleeve 61, a hinge rod 62 and a stirring plate 63; one end of the hinge rod 62 is connected with a hinge sleeve 61, the other end of the hinge rod 62 is connected with a stirring plate 63, and the hinge sleeve 61 is movably sleeved on the sliding rod 42; the stirring plate 63 is obliquely arranged, and two sides of the stirring plate 63 are arranged in a cutting edge manner; the hinge sleeve 61 slides on the sliding rod 42 and rotates around the sliding rod 42, namely, the stirring plate 63 stirs the materials and gathers the materials towards the crushing mechanism 5 when the mounting disc 4 rotates; the mounting disc 4 drives one side of the stirring plate 63 to abut against the bottom of the storage cavity until the other side of the stirring plate 63 abuts against the bottom of the movable disc 3, so that the two sides of the stirring plate 63 polish and scrape the bottom of the movable disc 3 and the bottom of the storage cavity respectively.
In this embodiment, the hinge sleeve 61 is hinged to the sliding rod 42, and in the rotation process of the mounting disc 4, the hinge sleeve 61 moves and rotates on the sliding rod 42, and meanwhile, the stirring plate 63 swings against the material to realize the stirring effect of the stirring plate 63 on the material, and meanwhile, the upper cutting edge of the stirring plate 63 is polished by the movable disc 3, and meanwhile, the stirring plate 63 scrapes and cleans the movable disc 3; the bottom of the storage cavity is polished by the contact of the upper cutting edge of the stirring plate 63, and the bottom of the storage cavity is polished and cleaned.
In the present embodiment, air bags are disposed above and below the sliding rod 42, each air bag is provided with an oil injection hole facing the sliding rod 42, and each air bag stores lubricating oil; hinge cover 61 and hinge rod 62 junction are provided with the dirt proof boot, just the dirt proof boot is sealed mounting groove 41, promptly when stirring board 63 swings on slide bar 42, hinge cover 61, hinge rod 62 support corresponding gasbag and pass through the oil spout hole to slide bar 42 blowout lubricating oil, just hinge cover 61 slides on slide bar 42 and lubricates.
In this embodiment, because the dirt proof boot seals mounting groove 41, avoid lubricating oil to spill on the one hand, prevent on the other hand that the material from getting into in mounting groove 41.
In this embodiment, the hinge sleeve 61 and the hinge rod 62 can push against the air bag to extrude lubricating oil in the swinging process, and the lubricating oil is smeared when the hinge sleeve 61 slides on the sliding rod 42, so that the stirring assembly can be prevented from being blocked and continuously operated.
In this embodiment, the mounting grooves 41 are arranged at intervals, and when the hinge sleeve 61 slides on the sliding rod 42, the hinge sleeve 61 collides with the wall of the mounting groove 41, that is, the stirring plate 63 is shaken to shake down the material, so as to clean and drop the stirring plate 63.
In the present embodiment, the conveying mechanism 7 includes: a delivery valve 71 and a delivery pipeline 72 which are arranged at the bottom of the first reaction kettle 1; the delivery valve 71 is communicated with the storage cavity, that is, the materials in the storage cavity are delivered into the second reaction kettle 8 through the delivery valve 71 and the delivery pipeline 72.
In this embodiment, a reaction cavity is provided in the second reaction kettle 8, and a corresponding cosolvent is injected into the reaction cavity; the seed crystal rod is longitudinally inserted into the cosolvent and axially rotates; soaking a seed crystal growth surface on the seed crystal rod, and adding a corresponding amount of Ni into a cosolvent; and controlling the rotating speed of the seed rod and controlling the growth pressure in the reaction cavity.
In this embodiment, the problem of co-solvent inclusion and the problem of bubble inclusion are easily generated in the process of crystal growth in the second reaction vessel 8, and effective dissolution and transportation of carbon dissolution are realized by reducing the viscosity of the co-solvent (reducing components such as high-viscosity Cr, or increasing the temperature) or increasing the rotation speed of the seed rod, so that the problem of co-solvent inclusion is solved; soaking the growth surface of the seed crystal (removing an oxide layer on the surface of the seed crystal; adding certain Ni in a cosolvent to facilitate seed crystal soaking); or reducing the growth gas pressure to solve the bubble inclusion problem.
In summary, the movable disc and the mounting disc are movably arranged on the screw rod mechanism, so that the mounting disc can rotate and can move up and down along the screw rod mechanism, the stirring mechanism can fully stir materials in the storage cavity, the crushing mechanism arranged on the mounting disc can play a role in grinding the materials, and meanwhile, the stirring mechanism can fold the materials towards the crushing mechanism, so that the stirring and grinding effects on the materials are improved, and the continuous growth of the subsequent silicon carbide crystals is facilitated.
The components selected for use in the present application (components not illustrated for specific structures) are all common standard components or components known to those skilled in the art, and the structure and principle thereof can be known to those skilled in the art through technical manuals or through routine experimentation.
In the description of the embodiments of the present invention, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplicity of description, but do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In light of the foregoing description of the preferred embodiment of the present invention, many modifications and variations will be apparent to those skilled in the art without departing from the spirit and scope of the invention. The technical scope of the present invention is not limited to the content of the specification, and must be determined according to the scope of the claims.
Claims (10)
1. A conveying system for growing silicon carbide crystals, comprising:
the device comprises a first reaction kettle, a screw rod mechanism, a movable disc, a mounting disc, a crushing mechanism, a stirring mechanism and a conveying mechanism; wherein
A storage cavity is arranged in the first reaction kettle and used for storing materials;
the screw rod mechanism is longitudinally arranged in the first reaction kettle, the movable disc is movably connected to the screw rod mechanism, the mounting disc is fixed to the bottom of the movable disc, the crushing mechanism is fixed to the bottom of the mounting disc, and the stirring mechanism is movably arranged in the circumferential direction of the mounting disc;
the screw mechanism drives the movable disc to move longitudinally, and the movable disc rotates on the screw mechanism in the longitudinal movement process, namely
The mounting disc drives the crushing mechanism to crush the blocky materials in the storage cavity so as to crush and grind the blocky materials into powdery materials;
the mounting disc drives the stirring mechanism to stir the materials in the storage cavity, and the materials are folded towards the crushing mechanism;
the stirring mechanism swings on the mounting disc, and when the stirring mechanism props against the movable disc or the bottom of the storage cavity, polishing and scraping are carried out; and
and the conveying mechanism conveys the crushed and stirred materials to the second reaction kettle.
2. The silicon carbide crystal growth conveying system of claim 1, wherein the silicon carbide crystal growth chamber is a single-stage chamber,
the screw mechanism includes: the screw rod, the screw rod nut, the moving rod and the screw rod motor;
the screw rod is longitudinally arranged in the first reaction kettle, the screw rod nut is movably arranged on the screw rod, one end of the moving rod is movably connected with the inner wall of the first reaction kettle, and the other end of the moving rod is fixed with the screw rod nut;
the movable disc is movably connected with the bottom of the screw nut and is also movably connected with the screw rod;
the screw motor drives the screw to rotate so that the screw nut moves longitudinally along the length direction of the screw, i.e. the screw nut moves longitudinally
The lead screw drives the movable disc to rotate, and the lead screw nut drives the movable disc to move longitudinally.
3. The silicon carbide crystal growth conveying system of claim 2, wherein the silicon carbide crystal growth chamber is configured to receive the silicon carbide crystal,
the screw rod penetrates through the screw rod nut, the movable disc and the mounting disc;
a rotating T-shaped groove is formed in the inner side wall of the screw nut, the top of the movable disc extends upwards to form a connecting plate, and a first T-shaped block is arranged on the connecting plate at a position corresponding to the rotating T-shaped groove so that the movable disc is movably connected with the screw nut in a limiting manner;
a movable T-shaped groove is formed in the screw rod, and the inner wall of the movable disc extends towards the movable T-shaped groove to form a second T-shaped block so that the movable disc is movably connected with the screw rod in a limiting manner, namely
The movable disc is driven by the screw rod nut to move longitudinally and rotates along with the screw rod.
4. The silicon carbide crystal growth conveying system of claim 1, wherein the silicon carbide crystal growth chamber is a single-stage chamber,
the crushing mechanism includes: a plurality of crushing teeth;
the crushing teeth are uniformly arranged and radially arranged at the bottom of the mounting disc;
the mounting disc drives the crushing teeth to abut against the material to be crushed in the longitudinal moving and rotating process.
5. The silicon carbide crystal growth conveying system of claim 1, wherein the silicon carbide crystal growth chamber is a single-stage chamber,
a plurality of mounting grooves are formed in the circumferential direction of the mounting disc, and a sliding rod is arranged in each mounting groove;
the stirring mechanism includes: a plurality of stirring assemblies;
each stirring assembly is hinged on the sliding rod in the corresponding mounting groove;
each of said stirring assemblies sliding on and rotating about a sliding rod, i.e.
The mounting disc drives each stirring assembly to rotate so that each stirring assembly rotates on the corresponding sliding rod to stir the materials in the storage cavity and gather the materials towards the crushing mechanism;
when each stirring component moves downwards or moves downwards to abut against the materials, each stirring component swings on the corresponding sliding rod and abuts against the bottom of the movable disc to polish and scrape the materials, or
And each stirring assembly moves downwards to abut against the bottom of the storage cavity until each stirring assembly swings on the corresponding sliding rod to abut against the bottom of the movable disc, so that each stirring assembly polishes and scrapes the bottom of the movable disc and the storage cavity.
6. The silicon carbide crystal growth conveying system of claim 5,
the stirring subassembly includes: the hinge sleeve, the hinge rod and the stirring plate;
one end of the hinge rod is connected with a hinge sleeve, the other end of the hinge rod is connected with the stirring plate, and the hinge sleeve is movably sleeved on the sliding rod;
the stirring plate is obliquely arranged, and two sides of the stirring plate are arranged in a cutting edge manner;
the hinged sleeve slides on and rotates about a sliding rod, i.e.
When the mounting disc rotates, the stirring plate is used for stirring materials and folding the materials towards the crushing mechanism;
the mounting disc drives one side of stirring board to support and stores the chamber bottom, until the opposite side of stirring board supports the bottom of movable disk, makes stirring board both sides are polished, are scraped the material to movable disk, storage chamber bottom respectively.
7. The silicon carbide crystal growth conveying system of claim 6, wherein the silicon carbide crystal growth chamber is a single-stage chamber,
air bags are arranged above and below the sliding rod, oil spray holes are formed in the air bags towards the sliding rod, and lubricating oil is stored in the air bags;
the hinge joint cover is provided with the dirt proof boot with hinge rod junction, just the dirt proof boot seals the mounting groove, promptly
When the stirring plate swings on the sliding rod, the hinge sleeve and the hinge rod abut against the corresponding air bag to spray lubricating oil to the sliding rod through the oil spraying hole, and the hinge sleeve slides on the sliding rod to lubricate.
8. The silicon carbide crystal growth conveying system of claim 7,
the installation grooves are arranged at intervals, and when the hinged sleeve slides on the sliding rod, the hinged sleeve collides with the groove wall of the installation groove, namely
Shaking the stirring plate to shake the material down.
9. The silicon carbide crystal growth conveying system of claim 1, wherein the silicon carbide crystal growth chamber is a single-stage chamber,
the conveying mechanism includes: the conveying valve and the conveying pipeline are arranged at the bottom of the first reaction kettle;
the delivery valve being in communication with the reservoir, i.e.
And the materials in the storage cavity are conveyed into the second reaction kettle through the conveying valve and the conveying pipeline.
10. The silicon carbide crystal growth conveying system of claim 1, wherein the silicon carbide crystal growth chamber is a single-stage chamber,
a reaction cavity is arranged in the second reaction kettle, and a corresponding cosolvent is injected into the reaction cavity;
the seed crystal rod is longitudinally inserted into the cosolvent and axially rotates;
soaking a seed crystal growth surface on the seed crystal rod, and adding a corresponding amount of Ni into a cosolvent;
and controlling the rotating speed of the seed rod and controlling the growth pressure in the reaction cavity.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210184904.9A CN114232106B (en) | 2022-02-28 | 2022-02-28 | Conveying system for silicon carbide crystal growth |
Applications Claiming Priority (1)
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