CN114211405A - Cleaning method for removing fluoride on surface of aluminum substrate - Google Patents
Cleaning method for removing fluoride on surface of aluminum substrate Download PDFInfo
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- CN114211405A CN114211405A CN202111549879.1A CN202111549879A CN114211405A CN 114211405 A CN114211405 A CN 114211405A CN 202111549879 A CN202111549879 A CN 202111549879A CN 114211405 A CN114211405 A CN 114211405A
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- Prior art keywords
- heater
- component
- sand blasting
- water
- cleaning
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- 238000004140 cleaning Methods 0.000 title claims abstract description 36
- KRHYYFGTRYWZRS-UHFFFAOYSA-M Fluoride anion Chemical compound [F-] KRHYYFGTRYWZRS-UHFFFAOYSA-M 0.000 title claims abstract description 26
- 238000000034 method Methods 0.000 title claims abstract description 25
- 229910052782 aluminium Inorganic materials 0.000 title claims abstract description 17
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 title claims abstract description 17
- 239000000758 substrate Substances 0.000 title claims abstract description 16
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 100
- 238000005488 sandblasting Methods 0.000 claims abstract description 55
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 claims abstract description 54
- 238000005406 washing Methods 0.000 claims abstract description 37
- 238000002791 soaking Methods 0.000 claims abstract description 34
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 claims abstract description 32
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims abstract description 28
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 claims abstract description 27
- 229910017604 nitric acid Inorganic materials 0.000 claims abstract description 27
- 238000004506 ultrasonic cleaning Methods 0.000 claims abstract description 22
- 238000007689 inspection Methods 0.000 claims abstract description 19
- 229910052757 nitrogen Inorganic materials 0.000 claims abstract description 14
- 239000002245 particle Substances 0.000 claims abstract description 14
- 238000001035 drying Methods 0.000 claims description 36
- 238000005422 blasting Methods 0.000 claims description 20
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 12
- 239000004744 fabric Substances 0.000 claims description 12
- 238000010926 purge Methods 0.000 claims description 12
- 230000007547 defect Effects 0.000 claims description 7
- 239000000463 material Substances 0.000 claims description 7
- 239000011259 mixed solution Substances 0.000 claims description 6
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims description 6
- 230000003746 surface roughness Effects 0.000 claims description 6
- FGUUSXIOTUKUDN-IBGZPJMESA-N C1(=CC=CC=C1)N1C2=C(NC([C@H](C1)NC=1OC(=NN=1)C1=CC=CC=C1)=O)C=CC=C2 Chemical compound C1(=CC=CC=C1)N1C2=C(NC([C@H](C1)NC=1OC(=NN=1)C1=CC=CC=C1)=O)C=CC=C2 FGUUSXIOTUKUDN-IBGZPJMESA-N 0.000 claims description 2
- 239000003344 environmental pollutant Substances 0.000 abstract description 2
- 229910052751 metal Inorganic materials 0.000 abstract description 2
- 239000002184 metal Substances 0.000 abstract description 2
- 150000002739 metals Chemical class 0.000 abstract description 2
- 231100000719 pollutant Toxicity 0.000 abstract description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 150000004767 nitrides Chemical class 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
- B24C1/00—Methods for use of abrasive blasting for producing particular effects; Use of auxiliary equipment in connection with such methods
- B24C1/08—Methods for use of abrasive blasting for producing particular effects; Use of auxiliary equipment in connection with such methods for polishing surfaces, e.g. smoothing a surface by making use of liquid-borne abrasives
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/02—Cleaning by the force of jets or sprays
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
- B08B3/12—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration by sonic or ultrasonic vibrations
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
- B24C7/00—Equipment for feeding abrasive material; Controlling the flowability, constitution, or other physical characteristics of abrasive blasts
- B24C7/0046—Equipment for feeding abrasive material; Controlling the flowability, constitution, or other physical characteristics of abrasive blasts the abrasive material being fed in a gaseous carrier
- B24C7/0053—Equipment for feeding abrasive material; Controlling the flowability, constitution, or other physical characteristics of abrasive blasts the abrasive material being fed in a gaseous carrier with control of feed parameters, e.g. feed rate of abrasive material or carrier
- B24C7/0061—Equipment for feeding abrasive material; Controlling the flowability, constitution, or other physical characteristics of abrasive blasts the abrasive material being fed in a gaseous carrier with control of feed parameters, e.g. feed rate of abrasive material or carrier of feed pressure
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23G—CLEANING OR DE-GREASING OF METALLIC MATERIAL BY CHEMICAL METHODS OTHER THAN ELECTROLYSIS
- C23G1/00—Cleaning or pickling metallic material with solutions or molten salts
- C23G1/02—Cleaning or pickling metallic material with solutions or molten salts with acid solutions
- C23G1/12—Light metals
- C23G1/125—Light metals aluminium
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Cleaning By Liquid Or Steam (AREA)
Abstract
The invention relates to a cleaning method for removing fluoride on the surface of an aluminum substrate, which comprises the following steps: a, checking incoming goods; b, soaking with pure water; c, wiping with isopropanol; d, primary surface sand blasting; e, washing with high pressure water for the first time; f, cleaning by nitric acid and hydrofluoric acid; g, soaking in pure water; h, grinding the surface; i, secondary surface sand blasting; j, surface inspection; k second high pressure water wash. The invention can remove the fluoride deposited on the surface by using physical sand blasting and reduce the loss of parts; the nitric acid and the hydrofluoric acid are used for soaking the part, so that trace metals stained on the surface of the part can be removed; the flatness and the uniformity of roughness of the surface of the part can be better by using a surface grinding and surface sand blasting mode; the surface of the component is cleaned by ultrasonic cleaning and ultra-pure nitrogen, so that particle pollutants on the surface can be effectively reduced.
Description
Technical Field
The invention relates to the field of cleaning of precision spare parts of semiconductor equipment, in particular to a cleaning method for removing fluoride on the surface of an aluminum substrate.
Background
At present, the cleaning process for oxide and nitride is mature when the cleaning solvent for cleaning oxide and nitride is used in chemical vapor deposition process chamber of semiconductor processing equipment, the cleaning effect for cleaning fluoride is poor, and the component base material for depositing fluoride is aluminum, which has poor corrosion resistance, thus bringing great difficulty to cleaning of component.
Disclosure of Invention
The invention aims to solve the defects of the prior art and provides a cleaning method for removing fluoride on the surface of an aluminum substrate.
In order to achieve the purpose, the invention adopts the following technical scheme: a cleaning method for removing fluoride on the surface of an aluminum substrate comprises the following steps:
a inspection of incoming goods
Carrying out surface inspection on the part to be cleaned, and confirming whether the surface has defects;
b soaking in pure water
Soaking the part to be cleaned in pure water for more than 30 minutes;
c isopropyl alcohol wiping
The method comprises the following steps of (1) using a piece of dust-free cloth to dip isopropanol to wholly wipe the surface of a part until no black mark exists on the surface of the dust-free cloth, using a water gun to comprehensively flush the part after wiping, and then using an air gun to completely sweep the moisture on the surface of the part;
d first surface blasting
Performing sand blasting treatment on the heater part to remove fluoride on the surface of the heater;
e first high pressure water wash
Putting the heater part subjected to sand blasting into a high-pressure washing tank, integrally washing the part by using a high-pressure water gun, and drying water stains on the surface of the part by using an air gun after washing;
f nitric acid and hydrofluoric acid cleaning
Soaking the high-pressure washed part in a mixed solution of nitric acid and hydrofluoric acid for 1-2 minutes, then immediately taking out the part, and washing the part by using pure water;
g soaking in pure water
Soaking the part in pure water for more than 30 minutes, and then drying the surface moisture by using compressed air;
h surface grinding
Grinding the surface of the heater by using a grinding sheet of No. 360 and No. 800 aluminum oxide grinding materials to ensure that the surface of the heater has no bulge until the roughness Ra is less than or equal to 2 um;
i second surface blasting
Performing sand blasting treatment on the heater part to increase the surface roughness of the heater;
j surface inspection
Sequentially using a roughness measuring instrument, a film thickness measuring instrument and a flatness measuring instrument to test the roughness, the film thickness and the flatness of the surface of the heater;
k second high pressure water wash
Transferring the qualified parts to a high-pressure washing section, washing the heater parts with high pressure water by using a high-pressure water gun, and drying the surface moisture by using compressed air;
l ultrasonic cleaning
Carrying out ultrasonic cleaning on the component;
m nitrogen purge
Performing surface purging on the flushed component by using nitrogen with the purity of 99.999 percent to remove water stains on the surface of the component;
n drying
And transferring the purged component into a clean drying oven, drying the component for 2 hours at the temperature of 150 ℃, and taking out the component after the component is naturally cooled.
In particular, in step d, the parameters of the blasting machine for blasting the heater member are: pressure: 3-4kg/cm2The distance between the sand blasting gun head and the component is 15-20 cm, and the angle is 60-90 degrees; time: 5-10 minutes; sand blasting medium: alumina; particle size: 0.06-0.08 mm;
in particular, in step i, the parameters of the blasting machine for blasting the heater member are: pressure: 3-4kg/cm2The distance between the sand blasting gun head and the component is 15-20 cm, and the angle is 60-90 degrees; time: 3-5 minutes; sand blasting medium: alumina; particle size: 0.06-0.08 mm.
In particular, in step f, the volume ratio of nitric acid, hydrofluoric acid and water is nitric acid: hydrofluoric acid: water 1: 1: 2.
specifically, in step i, the parts are transferred to a class 100 clean room, and then the parts are placed in an ultrasonic cleaning tank for cleaning for 30 minutes, wherein the parameters of ultrasonic cleaning are as follows: ultrasonic frequency: 40 KHz; power density of ultrasonic wave: 6-10 watts per square inch, and pure water in the tank keeps overflowing; overflow flow rate: 20 l/min.
The invention has the beneficial effects that: the invention can remove the fluoride deposited on the surface by using physical sand blasting and reduce the loss of parts; the nitric acid and the hydrofluoric acid are used for soaking the part, so that trace metals stained on the surface of the part can be removed; the flatness and the uniformity of roughness of the surface of the part can be better by using a surface grinding and surface sand blasting mode; the surface of the component is cleaned by ultrasonic cleaning and ultra-pure nitrogen, so that particle pollutants on the surface can be effectively reduced.
Detailed Description
The invention will be further illustrated with reference to specific examples:
a cleaning method for removing fluoride on the surface of an aluminum substrate comprises the following steps:
a inspection of incoming goods
Carrying out surface inspection on the part to be cleaned, and confirming whether the surface has defects;
b soaking in pure water
Soaking the part to be cleaned in pure water for more than 30 minutes;
c isopropyl alcohol wiping
The method comprises the following steps of (1) using a piece of dust-free cloth to dip isopropanol to wholly wipe the surface of a part until no black mark exists on the surface of the dust-free cloth, using a water gun to comprehensively flush the part after wiping, and then using an air gun to completely sweep the moisture on the surface of the part;
d first surface blasting
Performing sand blasting treatment on the heater part to remove fluoride on the surface of the heater; the parameters of the sand blasting machine are as follows: pressure: 3-4kg/cm2The distance between the sand blasting gun head and the component is 15-20 cm, and the angle is 60-90 degrees; time: 5-10 minutes; spraying nozzleSand medium: alumina; particle size: 0.06-0.08 mm;
e first high pressure water wash
Putting the heater part subjected to sand blasting into a high-pressure washing tank, integrally washing the part by using a high-pressure water gun, and drying water stains on the surface of the part by using an air gun after washing;
f nitric acid and hydrofluoric acid cleaning
Soaking the high-pressure washed part in a mixed solution of nitric acid and hydrofluoric acid for 1-2 minutes, then immediately taking out the part, and washing the part by using pure water; the volume ratio of the nitric acid to the hydrofluoric acid to the water is nitric acid: hydrofluoric acid: water 1: 1: 2;
g soaking in pure water
Soaking the part in pure water for more than 30 minutes, and then drying the surface moisture by using compressed air;
h surface grinding
Grinding the surface of the heater by using a grinding sheet of No. 360 and No. 800 aluminum oxide grinding materials to ensure that the surface of the heater has no bulge until the roughness Ra is less than or equal to 2 um;
i second surface blasting
Performing sand blasting treatment on the heater part to increase the surface roughness of the heater; the parameters of the sand blasting machine are as follows: pressure: 3-4kg/cm2The distance between the sand blasting gun head and the component is 15-20 cm, and the angle is 60-90 degrees; time: 3-5 minutes; sand blasting medium: alumina; particle size: 0.06-0.08 mm;
j surface inspection
Sequentially using a roughness measuring instrument, a film thickness measuring instrument and a flatness measuring instrument to test the roughness, the film thickness and the flatness of the surface of the heater;
k second high pressure water wash
Transferring the qualified parts to a high-pressure washing section, washing the heater parts with high pressure water by using a high-pressure water gun, and drying the surface moisture by using compressed air;
l ultrasonic cleaning
The parts are transferred to a 100-grade clean room, and then the parts are put into an ultrasonic cleaning tank for cleaning for 30 minutes, wherein the parameters of ultrasonic cleaning are as follows: ultrasonic frequency: 40 KHz; power density of ultrasonic wave: 6-10 watts per square inch, and pure water in the tank keeps overflowing; overflow flow rate: 20 liters/minute;
m nitrogen purge
Performing surface purging on the flushed component by using nitrogen with the purity of 99.999 percent to remove water stains on the surface of the component;
n drying
And transferring the purged component into a clean drying oven, drying the component for 2 hours at the temperature of 150 ℃, and taking out the component after the component is naturally cooled.
Example 1
A cleaning method for removing fluoride on the surface of an aluminum substrate comprises the following steps:
a inspection of incoming goods
Carrying out surface inspection on the part to be cleaned, and confirming whether the surface has defects;
b soaking in pure water
Soaking the part to be cleaned in pure water for 30 minutes;
c isopropyl alcohol wiping
The method comprises the following steps of (1) using a piece of dust-free cloth to dip isopropanol to wholly wipe the surface of a part until no black mark exists on the surface of the dust-free cloth, using a water gun to comprehensively flush the part after wiping, and then using an air gun to completely sweep the moisture on the surface of the part;
d first surface blasting
Performing sand blasting treatment on the heater part to remove fluoride on the surface of the heater; the parameters of the sand blasting machine are as follows: pressure: 3kg/cm2The distance between the sand blasting gun head and the component is 15 cm, and the angle is 60 degrees; time: 5 minutes; sand blasting medium: alumina; particle size: 0.06 mm;
e first high pressure water wash
Putting the heater part subjected to sand blasting into a high-pressure washing tank, integrally washing the part by using a high-pressure water gun, and drying water stains on the surface of the part by using an air gun after washing;
f nitric acid and hydrofluoric acid cleaning
Soaking the high-pressure washed part in a mixed solution of nitric acid and hydrofluoric acid for 1 minute, then immediately taking out the part, and washing the part by using pure water; the volume ratio of the nitric acid to the hydrofluoric acid to the water is nitric acid: hydrofluoric acid: water 1: 1: 2;
g soaking in pure water
Soaking the part in pure water for 30 minutes, and then drying the surface moisture by using compressed air;
h surface grinding
Grinding the surface of the heater by using a grinding sheet of No. 360 and No. 800 aluminum oxide grinding materials to ensure that the surface of the heater has no bulge until the roughness Ra is less than or equal to 2 um;
i second surface blasting
Performing sand blasting treatment on the heater part to increase the surface roughness of the heater; the parameters of the sand blasting machine are as follows: pressure: 3kg/cm2The distance between the sand blasting gun head and the component is 15 cm, and the angle is 60 degrees; time: 3 minutes; sand blasting medium: alumina; particle size: 0.06 mm;
j surface inspection
Sequentially using a roughness measuring instrument, a film thickness measuring instrument and a flatness measuring instrument to test the roughness, the film thickness and the flatness of the surface of the heater;
k second high pressure water wash
Transferring the qualified parts to a high-pressure washing section, washing the heater parts with high pressure water by using a high-pressure water gun, and drying the surface moisture by using compressed air;
l ultrasonic cleaning
The parts are transferred to a 100-grade clean room, and then the parts are put into an ultrasonic cleaning tank for cleaning for 30 minutes, wherein the parameters of ultrasonic cleaning are as follows: ultrasonic frequency: 40 KHz; power density of ultrasonic wave: 6 watts per square inch, and pure water in the tank keeps overflowing; overflow flow rate: 20 liters/minute;
m nitrogen purge
Performing surface purging on the flushed component by using nitrogen with the purity of 99.999 percent to remove water stains on the surface of the component;
n drying
And transferring the purged component into a clean drying oven, drying the component for 2 hours at the temperature of 150 ℃, and taking out the component after the component is naturally cooled.
Example 2
A cleaning method for removing fluoride on the surface of an aluminum substrate comprises the following steps:
a inspection of incoming goods
Carrying out surface inspection on the part to be cleaned, and confirming whether the surface has defects;
b soaking in pure water
Soaking the part to be cleaned in pure water for 60 minutes;
c isopropyl alcohol wiping
The method comprises the following steps of (1) using a piece of dust-free cloth to dip isopropanol to wholly wipe the surface of a part until no black mark exists on the surface of the dust-free cloth, using a water gun to comprehensively flush the part after wiping, and then using an air gun to completely sweep the moisture on the surface of the part;
d first surface blasting
Performing sand blasting treatment on the heater part to remove fluoride on the surface of the heater; the parameters of the sand blasting machine are as follows: pressure: 4kg/cm2The distance between the sand blasting gun head and the component is 20 cm, and the angle is 90 degrees; time: 10 minutes; sand blasting medium: alumina; particle size: 0.08 mm;
e first high pressure water wash
Putting the heater part subjected to sand blasting into a high-pressure washing tank, integrally washing the part by using a high-pressure water gun, and drying water stains on the surface of the part by using an air gun after washing;
f nitric acid and hydrofluoric acid cleaning
Soaking the high-pressure washed part in a mixed solution of nitric acid and hydrofluoric acid for 2 minutes, then immediately taking out the part, and washing the part by using pure water; the volume ratio of the nitric acid to the hydrofluoric acid to the water is nitric acid: hydrofluoric acid: water 1: 1: 2;
g soaking in pure water
Soaking the part in pure water for 60 minutes, and then drying the surface moisture by using compressed air;
h surface grinding
Grinding the surface of the heater by using a grinding sheet of No. 360 and No. 800 aluminum oxide grinding materials to ensure that the surface of the heater has no bulge until the roughness Ra is less than or equal to 2 um;
i second surface blasting
Performing sand blasting treatment on the heater part to increase the surface roughness of the heater; the parameters of the sand blasting machine are as follows: pressure: 4kg/cm2The distance between the sand blasting gun head and the component is 20 cm, and the angle is 90 degrees; time: 5 minutes; sand blasting medium: alumina; particle size: 0.08 mm;
j surface inspection
Sequentially using a roughness measuring instrument, a film thickness measuring instrument and a flatness measuring instrument to test the roughness, the film thickness and the flatness of the surface of the heater;
k second high pressure water wash
Transferring the qualified parts to a high-pressure washing section, washing the heater parts with high pressure water by using a high-pressure water gun, and drying the surface moisture by using compressed air;
l ultrasonic cleaning
The parts are transferred to a 100-grade clean room, and then the parts are put into an ultrasonic cleaning tank for cleaning for 30 minutes, wherein the parameters of ultrasonic cleaning are as follows: ultrasonic frequency: 40 KHz; power density of ultrasonic wave: 10 watts per square inch, and pure water in the tank keeps overflowing; overflow flow rate: 20 liters/minute;
m nitrogen purge
Performing surface purging on the flushed component by using nitrogen with the purity of 99.999 percent to remove water stains on the surface of the component;
n drying
And transferring the purged component into a clean drying oven, drying the component for 2 hours at the temperature of 150 ℃, and taking out the component after the component is naturally cooled.
Example 3
A cleaning method for removing fluoride on the surface of an aluminum substrate comprises the following steps:
a inspection of incoming goods
Carrying out surface inspection on the part to be cleaned, and confirming whether the surface has defects;
b soaking in pure water
Soaking the part to be cleaned in pure water for 150 minutes;
c isopropyl alcohol wiping
The method comprises the following steps of (1) using a piece of dust-free cloth to dip isopropanol to wholly wipe the surface of a part until no black mark exists on the surface of the dust-free cloth, using a water gun to comprehensively flush the part after wiping, and then using an air gun to completely sweep the moisture on the surface of the part;
d first surface blasting
Performing sand blasting treatment on the heater part to remove fluoride on the surface of the heater; the parameters of the sand blasting machine are as follows: pressure: 3.5kg/cm2The distance between the sand blasting gun head and the component is 18 cm, and the angle is 80 degrees; time: 9 minutes; sand blasting medium: alumina; particle size: 0.07 mm;
e first high pressure water wash
Putting the heater part subjected to sand blasting into a high-pressure washing tank, integrally washing the part by using a high-pressure water gun, and drying water stains on the surface of the part by using an air gun after washing;
f nitric acid and hydrofluoric acid cleaning
Soaking the high-pressure washed part in a mixed solution of nitric acid and hydrofluoric acid for 1.5 minutes, then immediately taking out the part, and washing the part by using pure water; the volume ratio of the nitric acid to the hydrofluoric acid to the water is nitric acid: hydrofluoric acid: water 1: 1: 2;
g soaking in pure water
Soaking the part in pure water for 30 minutes, and then drying the surface moisture by using compressed air;
h surface grinding
Grinding the surface of the heater by using a grinding sheet of No. 360 and No. 800 aluminum oxide grinding materials to ensure that the surface of the heater has no bulge until the roughness Ra is less than or equal to 2 um;
i second surface blasting
Performing sand blasting treatment on the heater part to increase the surface roughness of the heater; the parameters of the sand blasting machine are as follows: pressure: 3.5kg/cm2The distance between the sand blasting gun head and the component is 18 cm, and the angle is 85 degrees; time: 4 minutes; sand blasting medium: alumina; particle size: 0.07 mm;
j surface inspection
Sequentially using a roughness measuring instrument, a film thickness measuring instrument and a flatness measuring instrument to test the roughness, the film thickness and the flatness of the surface of the heater;
k second high pressure water wash
Transferring the qualified parts to a high-pressure washing section, washing the heater parts with high pressure water by using a high-pressure water gun, and drying the surface moisture by using compressed air;
l ultrasonic cleaning
The parts are transferred to a 100-grade clean room, and then the parts are put into an ultrasonic cleaning tank for cleaning for 30 minutes, wherein the parameters of ultrasonic cleaning are as follows: ultrasonic frequency: 40 KHz; power density of ultrasonic wave: 8 watts per square inch, and pure water in the tank keeps overflowing; overflow flow rate: 20 liters/minute;
m nitrogen purge
Performing surface purging on the flushed component by using nitrogen with the purity of 99.999 percent to remove water stains on the surface of the component;
n drying
And transferring the purged component into a clean drying oven, drying the component for 2 hours at the temperature of 150 ℃, and taking out the component after the component is naturally cooled.
The present invention has been described in connection with the specific embodiments, and it is obvious that the specific implementation of the present invention is not limited by the above-mentioned manner, and it is within the protection scope of the present invention as long as various modifications are made by using the method concept and technical solution of the present invention, or the present invention is directly applied to other occasions without modification.
Claims (6)
1. A cleaning method for removing fluoride on the surface of an aluminum substrate is characterized by comprising the following steps:
a inspection of incoming goods
Carrying out surface inspection on the part to be cleaned, and confirming whether the surface has defects;
b soaking in pure water
Soaking the part to be cleaned in pure water for more than 30 minutes;
c isopropyl alcohol wiping
The method comprises the following steps of (1) using a piece of dust-free cloth to dip isopropanol to wholly wipe the surface of a part until no black mark exists on the surface of the dust-free cloth, using a water gun to comprehensively flush the part after wiping, and then using an air gun to completely sweep the moisture on the surface of the part;
d first surface blasting
Performing sand blasting treatment on the heater part to remove fluoride on the surface of the heater;
e first high pressure water wash
Putting the heater part subjected to sand blasting into a high-pressure washing tank, integrally washing the part by using a high-pressure water gun, and drying water stains on the surface of the part by using an air gun after washing;
f nitric acid and hydrofluoric acid cleaning
Soaking the high-pressure washed part in a mixed solution of nitric acid and hydrofluoric acid for 1-2 minutes, then immediately taking out the part, and washing the part by using pure water;
g soaking in pure water
Soaking the part in pure water for more than 30 minutes, and then drying the surface moisture by using compressed air;
h surface grinding
Grinding the surface of the heater by using a grinding sheet of No. 360 and No. 800 aluminum oxide grinding materials to ensure that the surface of the heater has no bulge until the roughness Ra is less than or equal to 2 um;
i second surface blasting
Performing sand blasting treatment on the heater part to increase the surface roughness of the heater;
j surface inspection
Sequentially using a roughness measuring instrument, a film thickness measuring instrument and a flatness measuring instrument to test the roughness, the film thickness and the flatness of the surface of the heater;
k second high pressure water wash
Transferring the qualified parts to a high-pressure washing section, washing the heater parts with high pressure water by using a high-pressure water gun, and drying the surface moisture by using compressed air;
l ultrasonic cleaning
Carrying out ultrasonic cleaning on the component;
m nitrogen purge
Performing surface purging on the flushed component by using nitrogen with the purity of 99.999 percent to remove water stains on the surface of the component;
n drying
And transferring the purged component into a clean drying oven, drying the component for 2 hours at the temperature of 150 ℃, and taking out the component after the component is naturally cooled.
2. The cleaning method for removing fluoride from the surface of an aluminum substrate according to claim 1, wherein in the step d, parameters of a blasting machine for blasting the heater member are as follows: pressure: 3-4kg/cm2The distance between the sand blasting gun head and the component is 15-20 cm, and the angle is 60-90 degrees; time: 5-10 minutes; sand blasting medium: alumina; particle size: 0.06-0.08 mm.
3. The cleaning method for removing fluoride from the surface of an aluminum substrate according to claim 1, wherein parameters of a blasting machine for blasting the heater member in the step i are as follows: pressure: 3-4kg/cm2The distance between the sand blasting gun head and the component is 15-20 cm, and the angle is 60-90 degrees; time: 3-5 minutes; sand blasting medium: alumina; particle size: 0.06-0.08 mm.
4. The cleaning method for removing fluoride from the surface of an aluminum substrate according to claim 1, wherein the volume ratio of nitric acid, hydrofluoric acid and water in step f is nitric acid: hydrofluoric acid: water 1: 1: 2.
5. the cleaning method for removing fluoride from the surface of an aluminum substrate as claimed in claim 1, wherein the step i comprises circulating the part to a class 100 clean room, and then cleaning the part in an ultrasonic cleaning bath for 30 minutes.
6. The cleaning method for removing fluoride from the surface of an aluminum substrate according to claim 5, wherein the parameters of the ultrasonic cleaning are as follows: ultrasonic frequency: 40 KHz; power density of ultrasonic wave: 6-10 watts per square inch, and pure water in the tank keeps overflowing; overflow flow rate: 20 l/min.
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| CN115846289A (en) * | 2022-11-22 | 2023-03-28 | 富乐德科技发展（天津）有限公司 | Cleaning method for removing deposited pollutants on surface of ceramic layer |
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