CN114199891A - Detection method and detection equipment - Google Patents

Detection method and detection equipment Download PDF

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Publication number
CN114199891A
CN114199891A CN202010981796.9A CN202010981796A CN114199891A CN 114199891 A CN114199891 A CN 114199891A CN 202010981796 A CN202010981796 A CN 202010981796A CN 114199891 A CN114199891 A CN 114199891A
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detection
size
light
area
adjusting
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陈鲁
方一
黄有为
魏林鹏
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Shenzhen Zhongke Feice Technology Co Ltd
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Shenzhen Zhongke Feice Technology Co Ltd
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/9501—Semiconductor wafers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67288—Monitoring of warpage, curvature, damage, defects or the like
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/10—Measuring as part of the manufacturing process
    • H01L22/12—Measuring as part of the manufacturing process for structural parameters, e.g. thickness, line width, refractive index, temperature, warp, bond strength, defects, optical inspection, electrical measurement of structural dimensions, metallurgic measurement of diffusions
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G01N2021/8809—Adjustment for highlighting flaws

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  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
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  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
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  • Condensed Matter Physics & Semiconductors (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

The invention provides a detection method and detection equipment, comprising the following steps: providing detection light, wherein the detection light forms a detection light spot on the surface of an object to be detected, and the detection light forms signal light through the object to be detected; detecting the first signal light in the detection area on the surface of the object to be detected, wherein the detection area is at least partially overlapped with the detection light spot, and adjusting the size of the detection area of the first signal light, wherein the adjusting the size of the detection area of the first signal light comprises: it is right when the determinand keeps away from its central region and detects, will detect the detection area adjustment of first signal light and be first size, it is right when the determinand is close to its central region and detects, will detect the detection area adjustment of first signal light and be the second size, in the direction of perpendicular to scanning direction, first size is greater than the second size to reduce the scanning speed difference of the inside and outside both sides of facula, improve the sensitivity that detects.

Description

Detection method and detection equipment
Technical Field
The present invention relates to the field of optical detection technology, and more particularly, to a detection method and a detection apparatus.
Background
Before or during the chip manufacturing process, the defects on the structures such as the wafer need to be detected to improve the yield of the chips. In the prior art, an optical detection method is generally adopted to detect defects on the surface of a wafer, that is, detection light is irradiated onto the surface of the wafer and reflected or scattered by the surface of the wafer to form signal light, and the signal light is collected by a detection device to obtain defect information and the like on the surface of the wafer.
In order to collect the defect information of each area of the wafer, the inspection light is moved to scan the wafer point by point. In order to increase the detection speed, linear scanning may be used instead of point scanning, such as linear scanning on the surface of the wafer along a spiral line, or linear scanning on the surface of the wafer along concentric circles. However, when the scanning method is used for scanning detection, the detection sensitivity is low.
Disclosure of Invention
In view of the above, the present invention provides a detection method and a detection apparatus to improve the sensitivity of detection.
In order to achieve the purpose, the invention provides the following technical scheme:
a method of detection, comprising:
providing detection light, wherein the detection light forms a detection light spot on the surface of an object to be detected, and the detection light forms signal light through the object to be detected;
detecting first signal light in a detection area on the surface of the object to be detected, wherein the detection area is at least partially overlapped with the detection light spot;
adjusting a size of a detection area of the first signal light;
wherein adjusting the size of the detection area of the first signal light includes:
when the area that the determinand kept away from its center detects, will the detection area adjustment of first signal light is first size, and is right when the determinand is close to its central area and detects, will the detection area adjustment of first signal light is the second size, in the direction of perpendicular to scanning direction, first size is greater than the second size.
Optionally, adjusting the size of the detection area of the first signal light includes:
adjusting the size of the detection light spot and/or adjusting the size of the detection region.
Optionally, the method further comprises:
the center of the detection area is overlapped with the center of the detection light spot.
Optionally, when detecting the region of the object to be detected far away from the center thereof, adjusting the detection region of the first signal light to a first size, and when detecting the region of the object to be detected near the center thereof, adjusting the detection region of the first signal light to a second size includes:
when the area of the object to be detected far away from the center of the object to be detected is detected, the size of the detection light spot is adjusted to be a first size, when the area of the object to be detected near the center of the object to be detected is detected, the size of the detection light spot is adjusted to be a second size, and in any direction, the size of the detection light spot is smaller than or equal to that of the detection area;
and/or, it is right when the determinand keeps away from its central region and detects, will the size adjustment of detecting the district is first size, it is right when the determinand is close to its central region and detects, will the size adjustment of detecting the district is the second size, and in any direction, the size less than or equal to of detecting the district the size of detection light spot.
Optionally, the adjusting the size of the detection spot to the first size comprises: controlling a first beam expanding assembly to enter the light path of the detection light and/or controlling a first diaphragm assembly to leave the light path of the detection light so as to adjust the size of the detection light spot to be a first size;
adjusting the size of the detection spot to a second size comprises: and controlling the first beam expanding assembly to leave the light path of the detection light and/or controlling the first diaphragm assembly to enter the light path of the detection light so as to adjust the size of the detection light spot to a second size.
Optionally, resizing the detection region to a first size, resizing the detection region to a second size comprises:
controlling a size of a detection region of interest of a detection module to adjust a size of the detection region to a first size and to adjust a size of the detection region to a second size;
the detection module is used for detecting the signal light in the detection area on the surface of the object to be detected.
Optionally, resizing the detection region to a first size comprises: controlling a second diaphragm assembly to leave the optical path of the signal light to adjust the size of the detection area to a first size;
resizing the detection region to a second size comprises:
and controlling the second diaphragm assembly to enter the optical path of the signal light so as to adjust the size of the detection area to a second size.
Optionally, in a direction away from the center of the object to be measured, the object to be measured includes first to nth regions arranged in sequence, N is a natural number greater than or equal to 2, and adjusting the size of the region for detecting the first signal light on the surface of the object to be measured includes:
sequentially increasing the sizes of the detection light spots when the first area to the Nth area are sequentially detected;
and/or sequentially increasing the size of the detection area when the first area to the Nth area are sequentially detected.
A detection apparatus, comprising:
the device comprises a light source module, a light source module and a light source module, wherein the light source module is used for providing detection light, the detection light forms a detection light spot on the surface of an object to be detected, and the detection light forms signal light through the object to be detected;
the detection module is used for detecting first signal light in a detection area on the surface of the object to be detected, and the detection light spot is at least partially overlapped with the detection area;
an adjusting module for adjusting the size of the detection area of the first signal light; the adjusting module is used for adjusting the detection area of the first signal light into a first size when the object to be detected is far away from the area of the center of the object to be detected, and adjusting the detection area of the first signal light into a second size when the object to be detected is close to the area of the center of the object to be detected, wherein the first size is larger than the second size in the direction perpendicular to the scanning direction of the detecting module.
Optionally, the adjusting module is configured to adjust a size of the detection light spot and/or adjust a size of the detection area;
the adjusting module is used for adjusting the size of the detection light spot to a first size when detecting the area of the object to be detected far away from the center of the object to be detected, adjusting the size of the detection light spot to a second size when detecting the area of the object to be detected near the center of the object to be detected, wherein the first size is larger than the second size in the direction perpendicular to the scanning direction of the detecting module, and the size of the detection light spot is larger than or smaller than the size of the detection area in any direction;
and/or, the adjusting module is used for right when the determinand keeps away from its central region and detects, will the size adjustment of detecting the district is first size, it is right when the determinand is close to its central region and detects, will the size adjustment of detecting the district is the second size, at the perpendicular to in the direction of the scanning direction of detecting the module, first size is greater than the second size, in any direction, the size of detecting the district is greater than and is less than the size of detection light spot.
Optionally, the scanning modes of the detection module include a concentric circle scanning mode and a spiral scanning mode.
Optionally, the adjusting module includes a light spot adjusting unit, an area adjusting unit, and a control unit;
the light spot adjusting unit is positioned on the light path of the detection light and is used for adjusting the size of a detection light spot formed on the surface of the object to be detected;
the area adjusting unit is positioned on the optical path of the signal light and used for adjusting the size of the detection area;
the control unit adjusts the size of the detection light spot by controlling the light spot adjusting unit, and adjusts the size of the detection area by controlling the area adjusting unit.
Optionally, the adjusting module includes a light spot adjusting unit and a control unit;
the light spot adjusting unit is positioned on the light path of the detection light and is used for adjusting the size of a detection light spot formed on the surface of the object to be detected;
the control unit adjusts the size of the detection light spot by controlling the light spot adjusting unit, and adjusts the size of the detection area by controlling the size of the detection area interested by the detection module.
Optionally, the light spot adjusting unit includes at least one first beam expanding assembly and/or at least one first diaphragm assembly;
the control unit is used for controlling the first beam expanding assembly to enter the light path of the detection light, and/or controlling the first diaphragm assembly to leave the light path of the detection light, so that the size of the detection light spot is adjusted to be a first size, the first beam expanding assembly is used for controlling the first diaphragm assembly to leave the light path of the detection light, and/or the first diaphragm assembly is controlled to enter the light path of the detection light, so that the size of the detection light spot is adjusted to be a second size.
Optionally, the first beam expanding assembly comprises a plurality of first beam expanding regions, and/or the first diaphragm assembly comprises a plurality of first light transmitting regions;
the sizes of light spots of the detection light after passing through different first beam expanding areas are different, and the sizes of the light spots of the detection light after passing through different first light transmission areas are different;
the control unit is further configured to control a different first beam expanding region to be located on the light path of the detection light after controlling the first beam expanding assembly to enter the light path of the detection light, and/or control a different first light-transmitting region to be located on the light path of the detection light after controlling the first diaphragm assembly to enter the light path of the detection light, so as to obtain a different detection light spot size.
Optionally, the area adjustment unit comprises at least one second diaphragm assembly;
the control unit is used for controlling the second diaphragm assembly to leave the optical path of the signal light so as to adjust the size of the detection area to a first size, and controlling the second diaphragm assembly to enter the optical path of the signal light so as to adjust the size of the detection area to a second size.
Optionally, the detection module includes a lens assembly and a detector, the lens assembly is used for collecting the signal light, the detector is used for detecting the signal light collected by the lens assembly, and the second diaphragm assembly is disposed on a photosensitive surface of the detector.
Optionally, the second diaphragm assembly comprises a plurality of second light-transmitting regions;
the sizes of light spots of the signal light passing through different second light-transmitting areas are different;
the control unit is further configured to control different second light-transmitting areas to be located on the optical path of the signal light after controlling the second diaphragm assembly to enter the optical path of the signal light, so as to obtain different detection area sizes.
Compared with the prior art, the technical scheme provided by the invention has the following advantages:
the detection method and the detection equipment provided by the invention can adjust the size of the detection area of the first signal light in the surface detection area of the object to be detected, and can adjust the detection area of the first signal light to be a larger first size when detecting the area of the object to be detected far away from the center of the object to be detected, namely when detecting the area with smaller radius difference between the inner side and the outer side of the light spot, even if a larger-size light spot is adopted, the scanning speed difference between the inner side and the outer side of the light spot can be smaller, the detection sensitivity can be ensured, and in addition, the scanning speed and the detection speed can be improved by adopting large-size light spot scanning; in addition, when the area of the object to be detected, which is close to the center of the object to be detected, namely when the area with the large radius difference between the inner side and the outer side of the light spot is detected, the detection area of the first signal light can be adjusted to be a second small size, so that the scanning speed difference between the inner side and the outer side of the light spot is reduced, and the detection sensitivity is improved.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the provided drawings without creative efforts.
FIG. 1 is a schematic view of a scanning mode of a conventional detecting apparatus;
fig. 2 is a schematic flow chart of a detection method according to an embodiment of the present invention;
fig. 3 is a schematic structural diagram of a detection apparatus according to an embodiment of the present invention;
fig. 4 is a schematic diagram of an area of signal light of a first size and an area of signal light of a second size according to an embodiment of the present invention;
FIG. 5 is a schematic view of a first beam expanding assembly entering the optical path and a first diaphragm assembly exiting the optical path, according to one embodiment of the present invention;
FIG. 6 is a schematic view of a first beam expanding assembly exiting the optical path and a first diaphragm assembly entering the optical path, according to another embodiment of the present invention;
FIG. 7 is a schematic view of a second stop assembly shown removed from the optical path, in accordance with one embodiment of the present invention;
FIG. 8 is a schematic view of a second diaphragm assembly in the optical path provided by another embodiment of the present invention;
fig. 9 is a schematic structural diagram of a first region to an nth region of an object to be measured according to an embodiment of the present invention;
fig. 10 is a schematic structural diagram of a first beam expanding assembly, a first diaphragm assembly, or a second diaphragm assembly according to an embodiment of the present invention.
Detailed Description
As background art, when the existing scanning method is adopted for scanning detection, the detection sensitivity is low. The inventor researches and discovers that the reason causing the problem is mainly that, as shown in fig. 1, when the detection spots with the same size are adopted to scan and detect the outer ring S1 and the inner ring S2 of the wafer 10, the difference between the radius R1 and the radius R2 of the inner side and the outer side of the detection spot at the outer ring S1 is small, and the difference between the radius R3 and the radius R4 of the inner side and the outer side of the detection spot at the inner ring S2 is large, so that the scanning speed difference between the inner side and the outer side of the detection spot at the inner ring S2 is large, and the detection sensitivity is low.
Based on this, the present invention provides a detection method and a detection device to overcome the above problems in the prior art, wherein the detection method comprises:
providing detection light, wherein the detection light forms a detection light spot on the surface of an object to be detected, and the detection light forms signal light through the object to be detected;
detecting first signal light in a detection area on the surface of the object to be detected, wherein the detection area is at least partially overlapped with a detection light spot;
adjusting a size of a detection area of the first signal light;
wherein adjusting the size of the detection area of the first signal light includes:
when detecting the region of the object to be detected far away from the center of the object to be detected, the detection region of the first signal light is adjusted to be a first size, when detecting the region of the object to be detected near the center of the object to be detected, the detection region of the first signal light is adjusted to be a second size, and in the direction perpendicular to the scanning direction, the first size is larger than the second size.
The detection method and the detection equipment provided by the invention can adjust the size of the area of the first signal light in the surface detection area of the object to be detected, and can adjust the detection area of the first signal light to be a larger first size when detecting the area of the object to be detected far away from the center of the object to be detected, namely when detecting the area with smaller radius difference between the inner side and the outer side of the light spot, even if a larger-size light spot is adopted, the scanning speed difference between the inner side and the outer side of the light spot can be smaller, the detection sensitivity is ensured, and in addition, the scanning speed and the detection speed can be improved by adopting large-size light spot scanning; in addition, when the area of the object to be detected, which is close to the center of the object to be detected, namely when the area with the large radius difference between the inner side and the outer side of the light spot is detected, the detection area of the first signal light can be adjusted to be a second small size, so that the scanning speed difference between the inner side and the outer side of the light spot is reduced, and the detection sensitivity is improved. The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, so that the above is the core idea of the present invention, and the above objects, features and advantages of the present invention can be more clearly understood. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
An embodiment of the present invention provides a detection method, which is applied to a detection device, and is used for detecting surface defects of a wafer and the like, as shown in fig. 2, the detection method includes:
s101: providing detection light, wherein the detection light forms a detection light spot on the surface of an object to be detected, and the detection light forms signal light through the object to be detected;
as shown in fig. 3, after the light source module 20 in the detection apparatus emits the detection light, the detection light C1 forms a detection light spot Z on the surface of the object 21, and the detection light is reflected or scattered by the surface of the object 21 to form a signal light C2. The object to be measured 21 includes a wafer, etc., and the embodiment of the invention is only illustrated by taking the wafer as an example and is not limited thereto. The signal light C2 includes information of the surface characteristics of the object 21 to be measured, and the detection module 23 collects and detects the signal light C2 to obtain information of the film thickness, defects, and the like of the surface characteristics of the object 21 to be measured.
S102: and detecting the first signal light in a detection area on the surface of the object to be detected, wherein the detection area is at least partially overlapped with the detection light spot.
As shown in fig. 3, the detection module 22 has a detection region J on the surface of the object to be measured, after the detection light is reflected or scattered by the surface of the object to be measured 21 to form a signal light C2, the detection module 22 detects the first signal light in the detection region J on the surface of the object to be measured 21, and obtains the characteristic information of the surface of the object to be measured 21 according to the collected first signal light.
In some embodiments of the present invention, it is preferable that the center of the detection region J and the center of the detection spot Z overlap, and at this time, the intensity of the signal light detected by the detection module 22 is the largest, and the accuracy of the obtained detection information is higher.
That is, when the center of the detection region J and the center of the detection spot Z overlap and the size of the detection region J is equal to the size of the detection spot Z, the signal light is all signal light formed on the surface of the object by the detection light, and besides, the first signal light is a part of all signal light formed on the surface of the object.
S103: adjusting a size of the first signal light detection region;
in the embodiment of the present invention, the size of the detection area X of the first signal light may be adjusted, where the detection area X of the first signal light refers to an area where the detection module 22 detects effective signal light, that is, the first signal light is used to obtain characteristic information of the surface of the object to be measured, and the size of the detection area X of the first signal light is determined by the detection spot Z and/or the detection area J.
In the prior art, the size of the detection spot Z and the size of the detection region J are substantially consistent and are fixed. However, in the embodiment of the present invention, not only the size of the detection spot Z but also the size of the detection region J may be adjusted. Also, as shown in fig. 3, the detection area J at least partially overlaps the detection spot Z, and the size of the area X of the first signal light is equal to the size of the overlapping area of the detection spot Z and the detection area J. That is, the detection module 22 can only collect the effective signal light in the detection area X of the first signal light.
Based on this, in the embodiment of the present invention, adjusting the size X of the detection area of the first signal light includes: the size of the detection spot Z is adjusted and/or the size of the detection zone J is adjusted.
In the embodiment of the present invention, as shown in fig. 4, adjusting the size X of the detection area of the first signal light includes:
when detecting the region B2 in which the object 21 is far from the center O, the detection region X of the first signal light is adjusted to the first size D1, and when detecting the region B1 in which the object 21 is near the center O, the detection region X of the first signal light is adjusted to the second size D2, and the first size D1 is larger than the second size D2 in the direction perpendicular to the scanning direction a.
It should be noted that, in the embodiment of the present invention, only the object 21 rotates along the center O, that is, along the ω direction, is taken as an example to describe, that is, in the embodiment of the present invention, only the scanning manner of the detection module 22 is taken as a concentric circle scanning manner, the present invention is not limited thereto, and in other embodiments, the scanning manner of the detection module 22 may also be a spiral scanning manner. Wherein the scanning direction A is the direction of any tangent on the circumference.
In the embodiment of the invention, when the region B2 of the object to be detected 21 far away from the center O is detected, namely when the region with small radius difference between the inner side and the outer side of the detection light spot is detected, the detection region X of the first signal light is adjusted to be the first size D1, so that the scanning speed difference between the inner side and the outer side of the detection light spot is small, the detection sensitivity is ensured, and the scanning speed and the detection speed can be improved; in addition, when detecting the region B1 of the object 21 near the center O, that is, when detecting the region with large radius difference between the inner and outer sides of the detection spot, the detection region X of the first signal light is adjusted to the second size D2, so as to reduce the scanning speed difference between the inner and outer sides of the detection spot and improve the detection sensitivity.
Since the size of the detection region X for detecting the first signal light on the surface of the object 21 can be adjusted by adjusting the size of the detection spot Z and/or adjusting the size of the detection region J in the embodiments of the present invention, in some embodiments of the present invention, adjusting the detection region X for the first signal light to the first size D1 when detecting the region B2 of the object 21 far from the center O thereof, and adjusting the detection region X for the first signal light to the second size D2 when detecting the region B1 of the object 21 near the center O thereof includes:
when detecting an area B2 of the object 21 far from the center O, the size of the detection light spot Z is adjusted to be a first size D1, when detecting an area B1 of the object 21 near the center O, the size of the detection light spot Z is adjusted to be a second size D2, and in any direction, the size of the detection light spot Z is smaller than or equal to that of the detection area J;
and/or, when detecting the area B2 of the object 21 far away from the center O, the size of the detection area J is adjusted to be the first size D1, when detecting the area B1 of the object 21 near the center O, the size of the detection area J is adjusted to be the second size D2, and in any direction, the size of the detection area J is smaller than or equal to the size of the detection light spot Z.
Of course, the present invention is not limited thereto, and in other embodiments, adjusting the detection area X for detecting the first signal light on the surface of the object 21 to the first size D1 includes: adjusting the size of detection spot Z to first size D1, and/or adjusting the size of detection zone J to first size D1;
adjusting the detection area X of the first signal light to the second size D2 includes: the size of detection spot Z is adjusted to second size D2 and/or the size of detection zone J is adjusted to second size D2.
In some embodiments of the present invention, the adjusting the size of the detection light spot Z to the first size D1 by the beam expanding assembly and the diaphragm assembly includes: controlling the first beam expanding assembly 23 to enter the optical path of the detection light and/or controlling the first diaphragm assembly 24 to leave the optical path of the detection light to adjust the size of the detection spot Z to the first size D1;
adjusting the size of the detection spot Z to the second size D2 includes: the first beam expanding assembly 23 is controlled to leave the optical path of the detection light and/or the first diaphragm assembly 24 is controlled to enter the optical path of the detection light to adjust the size of the detection spot Z to the second size D2.
As shown in fig. 5, when detecting the region B2 where the object 21 is far from the center O thereof, the first beam expanding assembly 23 is controlled to enter the optical path of the detection light, and/or the first diaphragm assembly 24 is controlled to leave the optical path of the detection light, so as to adjust the size of the detection spot Z to the first size D1. As shown in fig. 6, when detecting the region B1 where the object 21 is far from the center O thereof, the first beam expanding assembly 23 is controlled to leave the optical path of the detection light, and/or the first diaphragm assembly 24 is controlled to enter the optical path of the detection light, so as to adjust the size of the detection spot Z to the second size D2. Of course, the invention is not limited to this, and in other embodiments, the size of the detection spot Z may be adjusted by other optical components.
In some embodiments of the present invention, resizing probe region J to first dimension D1 and resizing probe region J to second dimension D2 comprises:
controlling the size of the detection zone of interest of the detection module 22 to adjust the size of the detection zone J to a first size D1, and to adjust the size of the detection zone J to a second size D2;
the detection module 22 is configured to detect signal light in the detection area J on the surface of the object 21. The detection region of interest of the detection module 22 refers to an AOI (Automated Optical Inspection) region of the detection module 22, and when the detection module 22 is set to the AOI mode, the detection module 22 only stores the signal light in the AOI region, that is, the detection module 22 detects the characteristic information of the surface of the object to be measured in the AOI region.
That is, in some embodiments of the present invention, the size of the detection region J may be adjusted by adjusting the size of the AOI region of the detection module 22 itself, but the present invention is not limited thereto, and in other embodiments, the size of the detection region J may also be adjusted by the optical assembly.
That is, in other embodiments of the present invention, adjusting the size of the probe region J to the first size D1 includes: controlling the second diaphragm assembly to leave the optical path of the signal light to adjust the size of the detection area J to a first size D1;
resizing probe region J to second dimension D2 includes:
the second diaphragm assembly is controlled to enter the optical path of the signal light to adjust the size of the detection area J to the second size D2.
As shown in fig. 7, when detecting an area of the object 21 away from the center O thereof, the second diaphragm assembly is controlled to leave the optical path of the signal light to adjust the size of the detection area J to the first size D1. As shown in fig. 8, when detecting the region of the object 21 away from the center O thereof, the second diaphragm assembly is controlled to enter the optical path of the signal light to adjust the size of the detection region J to the second size D2. Of course, the invention is not limited to this, and in other embodiments, the size of the detection region J can be adjusted by other optical components.
In some embodiments of the invention, as shown in fig. 4, the object 21 may be divided into two regions B1 and B2, but the invention is not limited thereto, and in other embodiments, as shown in fig. 9, the object 21 includes a first region B1 to an nth region B1 arranged in sequence in a direction away from the center O of the object 21NN is a natural number greater than or equal to 3, and adjusting the size of the region X for detecting the signal light on the surface of the object 21 includes:
in the first region B1 to the Nth region BNWhen the detection is carried out in sequence, the sizes of the detection light spots Z are sequentially increased;
and/or in the first region B1 to the Nth region BNWhen the detection is performed in sequence, the size of the detection area J is adjusted to be larger in sequence.
That is, in some embodiments of the present invention, in a direction away from the center O of the object 21 to be measured, the scanning speed difference between the inner side and the outer side of the light spot can be sequentially reduced by sequentially increasing the size of the detection area X of the first signal light, so as to ensure the detection sensitivity.
An embodiment of the present invention further provides a detection apparatus, as shown in fig. 3, including:
the light source module 20 is configured to provide detection light, the detection light forms a detection light spot Z on the surface of the object to be detected 21, and the detection light forms signal light through the object to be detected 21;
the detection module 22 is configured to detect the first signal light in the detection area J on the surface of the object to be detected 21, where the detection light spot Z is at least partially overlapped with the detection area J;
the adjusting module is used for adjusting the size of the detection area X of the first signal light; the adjusting module is configured to adjust the detection area X of the first signal light to a first size D1 when detecting the area B2 where the object 21 is far from the center O thereof, adjust the detection area X of the first signal light to a second size D2 when detecting the area B1 where the object 21 is near to the center O thereof, and adjust the first size D1 to be larger than the second size D2 in a direction perpendicular to the scanning direction a of the detecting module 22.
In the embodiment of the invention, when the region B2 of the object to be detected 21 far away from the center O is detected, namely when the region with small radius difference between the inner side and the outer side of the detection light spot is detected, the detection region X of the first signal light is adjusted to be the first size D1, so that the scanning speed difference between the inner side and the outer side of the detection light spot is small, the detection sensitivity is ensured, and the scanning speed and the detection speed can be improved; in addition, when detecting the region B1 of the object 21 near the center O, that is, when detecting the region with large radius difference between the inner and outer sides of the detection spot, the detection region X of the first signal light is adjusted to the second size D2, so as to reduce the scanning speed difference between the inner and outer sides of the detection spot and improve the detection sensitivity.
In some embodiments of the present invention, the adjustment module is configured to adjust the size of the detection spot Z and/or adjust the size of the detection zone J. That is, in some embodiments of the present invention, the adjusting module adjusts the size X of the detection area for detecting the first signal light on the surface of the object 21 by adjusting the size of the detection spot Z and/or adjusting the size of the detection area J.
Based on this, in some embodiments of the present invention, the adjusting module is configured to adjust the size of the detection spot Z to be the first size D1 when detecting the area B2 where the object 21 is far from the center O thereof, adjust the size of the detection spot Z to be the second size D2 when detecting the area B1 where the object 21 is near to the center O thereof, and in a direction perpendicular to the scanning direction a of the detecting module 22, the first size D1 is greater than the second size D2, and in any direction, the size of the detection spot Z is smaller than or equal to the size of the detection area J;
and/or the adjusting module is configured to adjust the size of the detection region J to be the first size D1 when detecting the region B2 where the object 21 is far from the center O thereof, adjust the size of the detection region J to be the second size D2 when detecting the region B1 where the object 21 is near to the center O thereof, wherein the first size D1 is larger than the second size D2 in a direction perpendicular to the scanning direction a of the detecting module 22, and the size of the detection region J is smaller than or equal to the size of the detection spot Z in any direction.
In the embodiment of the present invention, the scanning modes of the detection module 22 include a concentric circle scanning mode and a spiral scanning mode. In the embodiment of the present invention, the scanning manner of the detecting module 22 is only an example of a concentric scanning manner, and is not limited thereto, wherein the scanning direction a is a direction of any tangent on the circumference.
In some embodiments of the invention, as shown in fig. 4, the object 21 may be divided into two regions B1 and B2, but the invention is not limited thereto, and in other embodiments, as shown in fig. 9, the object 21 includes a first region B1 to an nth region B1 arranged in sequence in a direction away from the center O of the object 21NN is a natural number greater than or equal to 3;
the adjusting module is used for adjusting the first area B1 to the Nth area BNWhen the detection is carried out in sequence, the sizes of the detection light spots Z are sequentially increased;
and/or, the adjusting module is used for adjusting the first area B1 to the Nth area BNWhen the detection is performed in sequence, the size of the detection area J is adjusted to be larger in sequence.
That is, in some embodiments of the present invention, in a direction away from the center O of the object 21 to be measured, the size of the detection area X of the first signal light is sequentially increased to sequentially reduce the scanning speed difference between the inner side and the outer side of the light spot, so as to improve the detection sensitivity.
In some embodiments of the present invention, the adjusting module includes a light spot adjusting unit, an area adjusting unit, and a control unit.
The light spot adjusting unit is positioned on the light path of the detection light and used for adjusting the size of a detection light spot Z formed on the surface of the object to be detected 21;
the area adjusting unit is positioned on the light path of the signal light and used for adjusting the size of the detection area J;
the control unit adjusts the size of the detection light spot Z by controlling the light spot adjusting unit, and adjusts the size of the detection area J by controlling the area adjusting unit.
Of course, the present invention is not limited thereto, and in other embodiments of the present invention, the adjusting module includes a light spot adjusting unit and a control unit.
The light spot adjusting unit is positioned on the light path of the detection light and used for adjusting the size of a detection light spot Z formed on the surface of the object to be detected 21;
the control unit adjusts the size of the detection spot Z by controlling the spot adjustment unit, and adjusts the size of the detection zone J by controlling the size of the detection zone of interest of the detection module 22.
On the basis of any of the above embodiments, in some embodiments of the present invention, as shown in fig. 5 and fig. 6, the light spot adjusting unit includes at least one first beam expanding assembly 23 and/or at least one first diaphragm assembly 24;
the control unit is used for controlling the first beam expanding assembly 23 to enter the light path of the detection light, and/or controlling the first diaphragm assembly 24 to leave the light path of the detection light, so as to adjust the size of the detection light spot Z to be the first size D1, and used for controlling the first beam expanding assembly 23 to leave the light path of the detection light, and/or controlling the first diaphragm assembly 24 to enter the light path of the detection light, so as to adjust the size of the detection light spot Z to be the second size D2.
As shown in fig. 5, when detecting the region B2 where the object 21 is far from the center O thereof, the first beam expanding assembly 23 is controlled to enter the optical path of the detection light, and/or the first diaphragm assembly 24 is controlled to leave the optical path of the detection light, so as to adjust the size of the detection spot Z to the first size D1. As shown in fig. 6, when detecting the region B1 where the object 21 is far from the center O thereof, the first beam expanding assembly 23 is controlled to leave the optical path of the detection light, and/or the first diaphragm assembly 24 is controlled to enter the optical path of the detection light, so as to adjust the size of the detection spot Z to the second size D2. Of course, the invention is not limited to this, and in other embodiments, the size of the detection spot Z may be adjusted by other optical components.
In some embodiments of the invention, as shown in fig. 7 and 8, when the adjustment module comprises an area adjustment unit, the area adjustment unit comprises at least one second diaphragm assembly 25;
the control unit is adapted to control the second diaphragm assembly 25 to leave the optical path of the signal light to adjust the size of the detection area J to the first size D1, and to control the second diaphragm assembly 25 to enter the optical path of the signal light to adjust the size of the detection area J to the second size D2.
As shown in fig. 7, when detecting an area of the object 21 away from the center O thereof, the second diaphragm assembly is controlled to leave the optical path of the signal light to adjust the size of the detection area J to the first size D1. As shown in fig. 8, when detecting the region of the object 21 away from the center O thereof, the second diaphragm assembly is controlled to enter the optical path of the signal light to adjust the size of the detection region J to the second size D2. Of course, the invention is not limited to this, and in other embodiments, the size of the detection region J can be adjusted by other optical components.
In some embodiments of the present invention, the detection module 22 includes a lens assembly for collecting the signal light and a detector for detecting the signal light collected by the lens assembly, and the second diaphragm assembly 25 is disposed on a photosensitive surface of the detector.
It should be noted that, in the embodiment of the present invention, the first beam expanding assembly 23, the first diaphragm assembly 24, and the second diaphragm assembly 25 can be controlled to enter and exit the optical path through a motor, a supporting assembly, and the like, which is not described herein again.
Further, in some embodiments of the present invention, as shown in fig. 10, the first beam expanding assembly 23 includes a plurality of first beam expanding regions 230, and/or the first diaphragm assembly 24 includes a plurality of first light transmissive regions 240;
the detection light has different sizes after passing through the different first beam expanding regions 230, and the detection light has different sizes after passing through the different first light-transmitting regions 240;
the control unit is further configured to control the different first beam expanding areas 230 to be located on the optical path of the detection light after controlling the first beam expanding assembly 23 to enter the optical path of the detection light, and/or control the different first light-transmitting areas 240 to be located on the optical path of the detection light after controlling the first diaphragm assembly 24 to enter the optical path of the detection light, so as to obtain different detection spot Z sizes.
Further, in some embodiments of the present invention, as shown in FIG. 10, the second diaphragm assembly 25 includes a plurality of second light-transmitting regions 250;
the sizes of light spots of the signal light passing through the different second light-transmitting areas 250 are different;
the control unit is further adapted to control the different second light transmitting areas 250 to be located on the optical path of the signal light after controlling the second diaphragm assembly 25 to enter the optical path of the signal light, to obtain different sizes of the detection areas J.
In some embodiments of the present invention, the size of the detection region J can be adjusted by the second diaphragm assembly 25, and when the image field of the detection apparatus is smaller than the target surface of the detector, the second diaphragm assembly 25 can effectively reduce the out-of-focus background light collected by the detector, thereby improving the image contrast.
It should be noted that, in the embodiment of the present invention, the first beam expanding region 230, the first light-transmitting region 240, or the second light-transmitting region 250 can be brought into the optical path by controlling the first beam expanding assembly 23, the first diaphragm assembly 24, or the second diaphragm assembly 25 to rotate around the center. Of course, the present invention is not limited to this, and in other embodiments, the size of the detection spot Z or the detection area J may be adjusted in other manners, which is not described in detail herein.
The embodiments in the present description are described in a progressive manner, each embodiment focuses on differences from other embodiments, and the same and similar parts among the embodiments are referred to each other. The device disclosed by the embodiment corresponds to the method disclosed by the embodiment, so that the description is simple, and the relevant points can be referred to the method part for description.
The previous description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the invention. Thus, the present invention is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims (18)

1. A method of detection, comprising:
providing detection light, wherein the detection light forms a detection light spot on the surface of an object to be detected, and the detection light forms signal light through the object to be detected;
detecting first signal light in a detection area on the surface of the object to be detected, wherein the detection area is at least partially overlapped with the detection light spot;
adjusting a size of a detection area of the first signal light;
wherein adjusting the size of the detection area of the first signal light includes:
when the area that the determinand kept away from its center detects, will the detection area adjustment of first signal light is first size, and is right when the determinand is close to its central area and detects, will the detection area adjustment of first signal light is the second size, in the direction of perpendicular to scanning direction, first size is greater than the second size.
2. The method according to claim 1, wherein adjusting the size of the detection area of the first signal light includes:
adjusting the size of the detection light spot and/or adjusting the size of the detection region.
3. The method of claim 1, further comprising, prior to said providing detection light:
the center of the detection area is overlapped with the center of the detection light spot.
4. The method according to claim 3, wherein adjusting the detection area of the first signal light to a first size when detecting the area of the object to be measured away from the center thereof, and adjusting the detection area of the signal light to a second size when detecting the area of the object to be measured near the center thereof comprises:
when the area of the object to be detected far away from the center of the object to be detected is detected, the size of the detection light spot is adjusted to be a first size, when the area of the object to be detected near the center of the object to be detected is detected, the size of the detection light spot is adjusted to be a second size, and in any direction, the size of the detection light spot is smaller than or equal to that of the detection area;
and/or, it is right when the determinand keeps away from its central region and detects, will the size adjustment of detecting the district is first size, it is right when the determinand is close to its central region and detects, will the size adjustment of detecting the district is the second size, and in any direction, the size less than or equal to of detecting the district the size of detection light spot.
5. The method of claim 4, wherein resizing the detection spot to a first size comprises: controlling a first beam expanding assembly to enter the light path of the detection light and/or controlling a first diaphragm assembly to leave the light path of the detection light so as to adjust the size of the detection light spot to be a first size;
adjusting the size of the detection spot to a second size comprises: and controlling the first beam expanding assembly to leave the light path of the detection light and/or controlling the first diaphragm assembly to enter the light path of the detection light so as to adjust the size of the detection light spot to a second size.
6. The method of claim 4, wherein resizing the detection region to a first size and resizing the detection region to a second size comprises:
controlling a size of a detection region of interest of a detection module to adjust a size of the detection region to a first size and to adjust a size of the detection region to a second size;
the detection module is used for detecting the signal light in the detection area on the surface of the object to be detected.
7. The method of claim 4, wherein resizing the detection region to a first size comprises: controlling a second diaphragm assembly to leave the optical path of the signal light to adjust the size of the detection area to a first size;
resizing the detection region to a second size comprises:
and controlling the second diaphragm assembly to enter the optical path of the signal light so as to adjust the size of the detection area to a second size.
8. The method according to claim 1, wherein the object includes first to nth regions arranged in this order in a direction away from the center of the object, N being a natural number greater than or equal to 2, and adjusting the size of the region where the signal light on the surface of the object is detected includes:
sequentially increasing the sizes of the detection light spots when the first area to the Nth area are sequentially detected;
and/or sequentially increasing the size of the detection area when the first area to the Nth area are sequentially detected.
9. A detection apparatus, comprising:
the device comprises a light source module, a light source module and a light source module, wherein the light source module is used for providing detection light, the detection light forms a detection light spot on the surface of an object to be detected, and the detection light forms signal light through the object to be detected;
the detection module is used for detecting first signal light in a detection area on the surface of the object to be detected, and the detection light spot is at least partially overlapped with the detection area;
an adjusting module for adjusting the size of the detection area of the first signal light; the adjusting module is used for adjusting the detection area of the first signal light into a first size when the object to be detected is far away from the area of the center of the object to be detected, and adjusting the detection area of the first signal light into a second size when the object to be detected is close to the area of the center of the object to be detected, wherein the first size is larger than the second size in the direction perpendicular to the scanning direction of the detecting module.
10. The detection apparatus according to claim 9,
the adjusting module is used for adjusting the size of the detection light spot and/or adjusting the size of the detection area;
the adjusting module is used for adjusting the size of the detection light spot to a first size when detecting the area of the object to be detected far away from the center of the object to be detected, adjusting the size of the detection light spot to a second size when detecting the area of the object to be detected near the center of the object to be detected, wherein the first size is larger than the second size in the direction perpendicular to the scanning direction of the detecting module, and the size of the detection light spot is larger than or smaller than the size of the detection area in any direction;
and/or, the adjusting module is used for right when the determinand keeps away from its central region and detects, will the size adjustment of detecting the district is first size, it is right when the determinand is close to its central region and detects, will the size adjustment of detecting the district is the second size, at the perpendicular to in the direction of the scanning direction of detecting the module, first size is greater than the second size, in any direction, the size of detecting the district is greater than and is less than the size of detection light spot.
11. The detection apparatus according to claim 9, wherein the scanning modes of the detection module include a concentric circle scanning mode and a spiral scanning mode.
12. The detection apparatus according to claim 9, wherein the adjustment module includes a light spot adjustment unit, an area adjustment unit, and a control unit;
the light spot adjusting unit is positioned on the light path of the detection light and is used for adjusting the size of a detection light spot formed on the surface of the object to be detected;
the area adjusting unit is positioned on the optical path of the signal light and used for adjusting the size of the detection area;
the control unit adjusts the size of the detection light spot by controlling the light spot adjusting unit, and adjusts the size of the detection area by controlling the area adjusting unit.
13. The detection apparatus according to claim 9, wherein the adjustment module comprises a light spot adjustment unit and a control unit;
the light spot adjusting unit is positioned on the light path of the detection light and is used for adjusting the size of a detection light spot formed on the surface of the object to be detected;
the control unit adjusts the size of the detection light spot by controlling the light spot adjusting unit, and adjusts the size of the detection area by controlling the size of the detection area interested by the detection module.
14. The detection apparatus according to claim 12 or 13, wherein the spot adjusting unit comprises at least one first beam expanding assembly and/or at least one first diaphragm assembly;
the control unit is used for controlling the first beam expanding assembly to enter the light path of the detection light, and/or controlling the first diaphragm assembly to leave the light path of the detection light, so that the size of the detection light spot is adjusted to be a first size, the first beam expanding assembly is used for controlling the first diaphragm assembly to leave the light path of the detection light, and/or the first diaphragm assembly is controlled to enter the light path of the detection light, so that the size of the detection light spot is adjusted to be a second size.
15. The inspection apparatus of claim 14, wherein the first beam expanding assembly comprises a plurality of first beam expanding regions, and/or wherein the first diaphragm assembly comprises a plurality of first light transmissive regions;
the sizes of light spots of the detection light after passing through different first beam expanding areas are different, and the sizes of the light spots of the detection light after passing through different first light transmission areas are different;
the control unit is further configured to control a different first beam expanding region to be located on the light path of the detection light after controlling the first beam expanding assembly to enter the light path of the detection light, and/or control a different first light-transmitting region to be located on the light path of the detection light after controlling the first diaphragm assembly to enter the light path of the detection light, so as to obtain a different detection light spot size.
16. The inspection apparatus of claim 12, wherein the area adjustment unit includes at least one second diaphragm assembly;
the control unit is used for controlling the second diaphragm assembly to leave the optical path of the signal light so as to adjust the size of the detection area to a first size, and controlling the second diaphragm assembly to enter the optical path of the signal light so as to adjust the size of the detection area to a second size.
17. The detection device according to claim 16, wherein the detection module includes a lens assembly and a detector, the lens assembly is configured to collect the signal light, the detector is configured to detect the signal light collected by the lens assembly, and the second diaphragm assembly is disposed on a photosensitive surface of the detector.
18. The inspection apparatus of claim 16, wherein the second diaphragm assembly includes a plurality of second light-transmissive regions;
the sizes of light spots of the signal light passing through different second light-transmitting areas are different;
the control unit is further configured to control different second light-transmitting areas to be located on the optical path of the signal light after controlling the second diaphragm assembly to enter the optical path of the signal light, so as to obtain different detection area sizes.
CN202010981796.9A 2020-09-17 2020-09-17 Detection method and detection equipment Pending CN114199891A (en)

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JP2007010139A (en) * 2005-06-02 2007-01-18 Kureha Corp Rotary selector valve, selector valve device, filled package body manufacturing device and filled package body manufacturing method
CN102809881A (en) * 2011-09-22 2012-12-05 深圳市绎立锐光科技开发有限公司 Light source system and applied projection system thereof
US20140268118A1 (en) * 2013-03-15 2014-09-18 Kla-Tencor Corporation Multi-Spot Defect Inspection System
CN110849899A (en) * 2018-08-21 2020-02-28 深圳中科飞测科技有限公司 Wafer defect detection system and method

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007010139A (en) * 2005-06-02 2007-01-18 Kureha Corp Rotary selector valve, selector valve device, filled package body manufacturing device and filled package body manufacturing method
CN102809881A (en) * 2011-09-22 2012-12-05 深圳市绎立锐光科技开发有限公司 Light source system and applied projection system thereof
US20140268118A1 (en) * 2013-03-15 2014-09-18 Kla-Tencor Corporation Multi-Spot Defect Inspection System
CN110849899A (en) * 2018-08-21 2020-02-28 深圳中科飞测科技有限公司 Wafer defect detection system and method

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