CN114199029A - Feeding device for clean vacuum environment - Google Patents
Feeding device for clean vacuum environment Download PDFInfo
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- CN114199029A CN114199029A CN202111616084.8A CN202111616084A CN114199029A CN 114199029 A CN114199029 A CN 114199029A CN 202111616084 A CN202111616084 A CN 202111616084A CN 114199029 A CN114199029 A CN 114199029A
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- feeding
- charging
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- 238000002955 isolation Methods 0.000 claims abstract description 41
- 238000000746 purification Methods 0.000 claims abstract description 28
- 210000001503 joint Anatomy 0.000 claims description 31
- 238000005303 weighing Methods 0.000 claims description 8
- 239000000463 material Substances 0.000 description 25
- 238000000034 method Methods 0.000 description 17
- 239000007789 gas Substances 0.000 description 16
- 230000008569 process Effects 0.000 description 16
- 238000004891 communication Methods 0.000 description 6
- 230000003749 cleanliness Effects 0.000 description 5
- 208000002925 dental caries Diseases 0.000 description 4
- 239000002994 raw material Substances 0.000 description 4
- 238000000605 extraction Methods 0.000 description 3
- 230000005484 gravity Effects 0.000 description 3
- 239000011261 inert gas Substances 0.000 description 3
- 230000009471 action Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000010926 purge Methods 0.000 description 2
- 230000008859 change Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 210000003141 lower extremity Anatomy 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000011017 operating method Methods 0.000 description 1
- 230000000750 progressive effect Effects 0.000 description 1
- 239000011435 rock Substances 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D3/00—Charging; Discharging; Manipulation of charge
- F27D3/0084—Charging; Manipulation of SC or SC wafers
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D7/00—Forming, maintaining, or circulating atmospheres in heating chambers
- F27D7/06—Forming or maintaining special atmospheres or vacuum within heating chambers
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D7/00—Forming, maintaining, or circulating atmospheres in heating chambers
- F27D7/06—Forming or maintaining special atmospheres or vacuum within heating chambers
- F27D2007/066—Vacuum
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Furnace Charging Or Discharging (AREA)
Abstract
The invention discloses a feeding device in a clean vacuum environment, which comprises a feeding tank (3), wherein the feeding volume of the feeding tank (3) is more than or equal to that of a furnace body (1) to be fed, the feeding tank (3) is provided with a feeding port which is butted with a feeding hole of the furnace body (1) to be fed, the feeding tank (3) is detachably connected with the furnace body (1) to be fed, a feeding isolation valve (31) is arranged at the feeding port, a feeding isolation valve (11) is arranged at the feeding port of the furnace body (1) to be fed, a vacuum interface and a gas replacement interface are respectively arranged on the feeding tank (3) and the furnace body (1) to be fed, and a purification isolation valve is respectively arranged at the vacuum interface and the gas replacement interface. This feeding device of clean vacuum environment can unify reinforced, once can accomplish required reinforced volume, and unified purification purifies the space less, practices thrift the purifying time, realizes automaticly.
Description
Technical Field
The invention relates to the technical field of feeding equipment, in particular to a feeding device in a clean vacuum environment.
Background
The existing feeding device comprises the following steps of adding a charging barrel material for a furnace body to be fed: charging, purifying, charging and extracting. Purging refers to the need for many materials to exist in an environment that is isolated from certain gases, such as an oxygen-free environment, or a vacuum environment. The purge process often requires a vacuum and inert gas changeover. An isolating valve is arranged at a feed inlet at the upper end of the feeding furnace body, the isolating valve can isolate the two cavities in a closed state, and the two cavities can be communicated in an open state. Before different cavities, because the processes are different, the pressure and the atmosphere are also different, even communication is carried out when needed, and even communication is not carried out, so that the isolation valve can play a role in isolating the two cavities and communicating the two cavities.
Referring to fig. 1, fig. 1 is a flow chart illustrating a charging process of a furnace body to be charged by a typical charging device in the prior art. The external diameter of the charging barrel is smaller than the upper end feed inlet of the charging furnace body to be charged, and the charging barrel can enter the feed inlet of the charging furnace body to be charged 1. The charging process comprises the following steps: when the feeding isolation valve 11 of the furnace body to be fed is in a closed state, the upper cavity 2 needs to be filled with atmospheric pressure, and then the feeding cylinder is hung. And (3) a purification process: when the feeding isolation valve 11 is in a closed state, the upper cavity is vacuumized and gas is replaced for a plurality of times, and the cleanliness and the vacuum degree close to the furnace body 1 to be fed are achieved. The charging process comprises the following steps: when the feeding isolation valve 11 is in an open state, the feeding cylinder descends, and after feeding is completed, the feeding cylinder rises back to the upper cavity. The extraction process comprises the following steps: the feed isolation valve 11 is in a closed state, and after the upper chamber 2 is filled with air, the feed cylinder is taken out by opening.
Because production needs, the upper chamber can not be made very big, and the charging barrel can not be made very big in the upper chamber yet, and the material loading volume can not be very much at every turn, and total material loading volume needs very big, therefore above-mentioned material loading process need repeat many times, and the operating procedure is many, and is consuming time.
In summary, how to effectively solve the problems of repeated feeding, multiple operation steps, time consumption and the like is a problem which needs to be solved urgently by a person skilled in the art at present.
Disclosure of Invention
The invention aims to provide a feeding device in a clean vacuum environment, which can uniformly feed materials, can finish the required feeding amount at one time, uniformly purify, has smaller purification space, saves purification time and realizes automation.
In order to solve the technical problems, the invention provides the following technical scheme:
the utility model provides a feeding device of clean vacuum environment, is including adding the feed tank, add the reinforced volume that the reinforced volume more than or equal to of feed tank waited the reinforced furnace body, add the feed tank be furnished with the charge door that the feed inlet of waiting the reinforced furnace body docks mutually, add the feed tank with it is connected for dismantling to wait the reinforced furnace body, feed door department is provided with reinforced isolation valve, the feed door department of waiting the reinforced furnace body is provided with the feeding isolation valve, add the feed tank with it all is furnished with vacuum interface and gas replacement interface on the reinforced furnace body to wait, vacuum interface with gas replacement interface all is equipped with the purification isolation valve.
Optionally, treat that the feed inlet department of reinforced furnace body is equipped with the protruding edge of feeding, the feeding isolation valve set up in the lower limb department on the protruding edge of feeding, the reinforced isolation valve set up in the bottom surface department of reinforced jar, feeding device with when treating reinforced furnace body butt joint, the bottom surface butt of reinforced jar in on the up end on the protruding edge of feeding, the bottom surface of reinforced jar the protruding edge of feeding reinforced isolation valve with the feeding isolation valve constitutes the butt joint cavity, the butt joint cavity is furnished with butt joint vacuum interface and butt joint gas replacement interface, butt joint vacuum interface with the butt joint gas replacement interface all is furnished with the butt joint isolation valve.
Optionally, a charging port of the charging device is provided with a charging convex edge, and the charging isolation valve is arranged on the upper edge of the charging convex edge.
Optionally, the outer diameter of the feeding flange is equal to the inner diameter of the feeding flange, and the feeding flange can be inserted into the feeding flange.
Optionally, the height of the feeding ledge is equal to the depth of the feeding ledge.
Optionally, the cross section of the feed inlet and the cross section of the feed inlet are equal in size.
Optionally, the cross section of the feeding port is equal to the cross section of the feeding convex edge in size.
Optionally, be provided with weighing sensor in the reinforced jar, the outer wall of reinforced jar has the display instrument, weighing sensor with the display instrument electricity is connected.
The feeding device for the clean vacuum environment comprises a feeding tank, wherein a feeding port is formed in the feeding tank, the feeding tank is fed through the feeding port, and materials flow out through the feeding port. The furnace body to be fed has a feed inlet through which the furnace body to be fed is fed.
The charge door of the charge tank matches with the shape and size of the feed inlet of the furnace body to be charged, and the charge door of the charge tank can be in sealed butt joint with the feed inlet of the furnace body to be charged, so that the material of the charge tank is added into the furnace body to be charged. The charge door of the charging tank is matched with the feed inlet of the charging furnace body to be charged, and the charging tank can be adapted to different furnace types and interfaces and has universality.
The feeding tank is detachably connected with the furnace body to be fed, and the furnace body to be fed can be selectively connected with the feeding tank and the upper cavity, namely, the feeding tank is connected with the furnace body to be fed when feeding is needed; when the furnace body works normally, the upper cavity is connected with the furnace body to be charged.
The charging tank and the charging furnace body to be charged are respectively provided with a vacuum interface and a gas replacement interface, the charging tank and the charging furnace body to be charged can be respectively vacuumized and converted by inert gas through the vacuum interface and the gas replacement interface, the charging tank and the charging furnace body to be charged have close cleanliness and vacuum degree, and the charging tank and the charging furnace body to be charged can be kept in a purification state.
The feed inlet department is provided with reinforced isolating valve, treats that the feed inlet department of reinforced furnace body is provided with the feeding isolating valve, and vacuum interface and gas replacement kneck all are equipped with the purification isolating valve, and the isolating valve can completely cut off two cavitys closing the state, can communicate two cavitys opening the state. Before different cavities, because the processes are different, the pressure and the atmosphere are also different, even communication is carried out when needed, and even communication is not carried out, so that the isolation valve can play a role in isolating the two cavities and communicating the two cavities.
The charging volume of the charging tank is more than or equal to that of the furnace body to be charged, the charging volume of the charging tank is large, the charging requirement of the furnace body to be charged can be met by one-time loading, and the furnace body to be charged does not need to be charged for many times; even can go on a plurality ofly treating the reinforced furnace body in succession, need not add the jar and repeatedly feed in raw material, once can load a plurality ofly treat the required feeding volume of reinforced furnace body, the feeding process is more simple and convenient, labour saving and time saving.
The charging process comprises the following steps: the feeding device can uniformly feed in a feeding workshop, and after the feeding workshop is filled with materials, the feeding device closes the feeding isolation valve, so that the feeding workshop is directly purified, and automatic purification is realized. After the isolation valves are completely closed and other interfaces or pipelines such as the vacuum pipe, the air pipe, the charging pipe and the like are disconnected, the charging device can be carried by an AGV or other tools to be transported to the side of the furnace.
And (3) a purification process: treat that the isolating valve of feeding furnace body and feeding device is all at closed state, feeding device's charge door and the feed inlet butt joint of treating the feeding furnace body have narrow and small space between feeding device's reinforced isolating valve and the feed isolating valve of treating the feeding furnace body, and the inside of charging tank and treating the feeding furnace body is in the purification state, only needs to purify narrow and small space between two isolating valves, and purification space is less, reduces work load, saves time.
The charging process comprises the following steps: treat that the isolating valve of feeding furnace body and feeding device all is opening state, treat that feeding furnace body and feeding device have close cleanliness factor and vacuum, under the action of gravity, the material in the charging tank falls and gets into and treats feeding furnace body, treats feeding furnace body and feeds in raw material.
The extraction process comprises the following steps: treat that the isolating valve of reinforced furnace body and feeding device is all in the closed condition, take off feeding device and accomplish reinforced promptly.
The feeding device for the clean vacuum environment can uniformly feed materials, can finish the required feeding amount at one time, uniformly purify the materials, has smaller purification space, saves the purification time and realizes automation.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the drawings without creative efforts.
FIG. 1 is a flow chart of a charging process of a furnace body to be charged by a typical charging device in the prior art;
fig. 2 is a charging flow chart of a furnace body to be charged by the charging device in a clean vacuum environment according to an embodiment of the present invention.
The drawings are numbered as follows:
the device comprises a furnace body 1 to be charged, an upper cavity 2, a charging tank 3, a butt joint chamber 4, a charging isolation valve 11 and a charging isolation valve 31.
Detailed Description
The core of the invention is to provide the feeding device in the clean vacuum environment, the feeding device in the clean vacuum environment can carry out uniform feeding, can finish the required feeding amount at one time, and has the advantages of uniform purification, smaller purification space, purification time saving and automation realization.
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
In a specific embodiment, the feeding device for a clean vacuum environment provided by the invention comprises a feeding tank 3, the feeding volume of the feeding tank 3 is more than or equal to the feeding volume of a furnace body 1 to be fed, the feeding tank 3 is provided with a feeding port butted with the feeding port of the furnace body 1 to be fed, the feeding tank 3 is detachably connected with the furnace body 1 to be fed, the feeding port is provided with a feeding isolation valve 31, the feeding port of the furnace body 1 to be fed is provided with a feeding isolation valve 11, the feeding tank 3 and the furnace body 1 to be fed are both provided with a vacuum interface and a gas replacement interface, and the vacuum interface and the gas replacement interface are both provided with purification isolation valves.
In the structure, the feeding device in the clean vacuum environment comprises a feeding tank 3, wherein a feeding port is arranged on the feeding tank 3, the feeding tank 3 is fed by the feeding port, and the material flows out through the feeding port. The furnace body 1 to be fed has a feed inlet through which the furnace body 1 to be fed is fed.
The charge door of the charge tank 3 matches with the shape and size of the feed inlet of the furnace body 1 to be charged, and the charge door of the charge tank 3 can be in sealed butt joint with the feed inlet of the furnace body 1 to be charged, so that the material of the charge tank 3 is added to the furnace body 1 to be charged. The feed inlet of the feed tank 3 is matched with the feed inlet of the furnace body 1 to be fed, and the feed tank 3 can be adapted to different furnace types and interfaces and has universality.
The feeding tank 3 is detachably connected with the furnace body 1 to be fed, and the furnace body 1 to be fed can be selectively connected with the feeding tank 3 and the upper cavity 2, namely, the feeding tank 3 is connected with the furnace body 1 to be fed when feeding is needed; when the furnace body works normally, the upper cavity 2 is connected with the furnace body 1 to be charged.
Add the feed tank 3 and treat all to be furnished with vacuum interface and gas replacement interface on the reinforced furnace body 1, can carry out the evacuation respectively and change the work with inert gas to the feed tank 3 and treat reinforced furnace body 1 through vacuum interface and gas replacement interface, reach and add feed tank 3 and treat that reinforced furnace body 1 has the cleanliness factor and the vacuum that are close to keep feed tank 3 and the material of treating reinforced furnace body 1 to be in the clean state.
Feed inlet department is provided with reinforced isolating valve 31, treats that the feed inlet department of feeding furnace body 1 is provided with feeding isolating valve 11, and vacuum interface and gas replacement kneck all are equipped with the purification isolating valve, and the isolating valve can completely cut off two cavitys closing the state, can communicate two cavitys opening the state. Before different cavities, because the processes are different, the pressure and the atmosphere are also different, even communication is carried out when needed, and even communication is not carried out, so that the isolation valve can play a role in isolating the two cavities and communicating the two cavities.
The charging volume of the charging tank 3 is more than or equal to the charging volume of the furnace body 1 to be charged, the charging volume of the charging tank 3 is large, the charging requirement of the furnace body 1 to be charged can be met by loading once, and the furnace body 1 to be charged does not need to be charged for many times; even can go on a plurality ofly treating reinforced furnace body 1 in succession, need not add that jar 3 is repeated reinforced, once can load a plurality ofly treat the required feeding volume of reinforced furnace body 1, the feeding process is more simple and convenient, labour saving and time saving.
Fig. 2 is a flowchart illustrating a charging process of a furnace body 1 to be charged by a charging device in a clean vacuum environment according to an embodiment of the present invention.
The charging process comprises the following steps: the feeding device can uniformly feed in a feeding workshop, and after the feeding workshop is filled with materials, the feeding device closes the feeding isolation valve 31, so that the feeding workshop is directly purified, and automatic purification is realized. After the isolation valves are completely closed and other interfaces or pipelines such as the vacuum pipe, the air pipe, the charging pipe and the like are disconnected, the charging device can be carried by an AGV or other tools to be transported to the side of the furnace.
And (3) a purification process: treat that the isolating valve of feeding furnace body 1 and feeding device is all at closed state, feeding device's charge door and the feed inlet butt joint of treating feeding furnace body 1 have narrow and small space between feeding isolating valve 31 of feeding device and the feeding isolating valve 11 of treating feeding furnace body 1, add the feed tank 3 and treat that the inside of feeding furnace body 1 is in the purification attitude, only need purify narrow and small space between two isolating valves, it is less to purify the space, reduces work load, saves time.
The charging process comprises the following steps: treat that the isolating valve of feeding furnace body 1 and feeding device is all at open mode, treat that feeding furnace body 1 and feeding device have close cleanliness factor and vacuum, under the action of gravity, the material in the charging tank 3 falls and gets into and treats feeding furnace body 1, treats feeding furnace body 1 and feeds in raw material.
The extraction process comprises the following steps: treat that the isolating valve of reinforced furnace body 1 and feeding device is all in the closed condition, take off feeding device and accomplish reinforced promptly.
The feeding device for the clean vacuum environment can uniformly feed materials, can finish the required feeding amount at one time, uniformly purify the materials, has smaller purification space, saves the purification time and realizes automation.
The feeding device for the clean vacuum environment is only a preferred scheme, and is not particularly limited to the preferred scheme, and on the basis, targeted adjustment can be performed according to actual needs, so that different implementation modes are obtained, a feeding convex edge is arranged at a feeding port of the furnace body 1 to be fed, the feeding isolation valve 11 is arranged at the lower edge of the feeding convex edge, namely the upper surface of the feeding convex edge is open, the lower surface of the feeding convex edge is isolated by the feeding isolation valve 11, and the cavity of the furnace body 1 to be fed can be isolated by the feeding isolation valve 11 so as to be purified.
The feeding isolation valve 31 is disposed at the bottom of the feeding tank 3, and the feeding isolation valve 31 can isolate the cavity of the feeding tank 3 for purification treatment.
When feeding device with treat reinforced furnace body 1 butt joint, the bottom surface butt of feeding tank 3 is on the up end on the protruding edge of feeding, and feeding tank 3's bottom surface, the protruding edge of feeding, reinforced isolating valve 31 and feeding isolating valve 11 constitute butt joint cavity 4, and butt joint cavity 4 is furnished with butt joint vacuum interface and butt joint gas replacement interface, and butt joint vacuum interface and butt joint gas replacement interface all are equipped with the butt joint isolating valve. The butt joint chamber 4 space is narrow and small, and the cavity of adding feed tank 3 and treating reinforced furnace body 1 is in the purification attitude, only needs to purify butt joint chamber 4, and it is less to purify the space, reduces work load, saves the purifying time.
On the basis of the above-mentioned various embodiments, the feeding port of the feeding device has a feeding convex edge, the feeding isolation valve 31 is arranged at the upper edge of the feeding convex edge, the lower surface of the feeding convex edge is open, and the upper surface is isolated by the feeding isolation valve 31, that is, the cavity of the feeding tank 3 is isolated so as to perform the purification treatment.
Optionally, when the feeding device is butted with the furnace body to be fed, the feeding convex edge is connected with the feeding convex edge, the connection position is small, the connection is convenient, and the sealing performance is good.
On the basis of each above-mentioned specific embodiment, the external diameter on reinforced protruding edge equals with the internal diameter on the protruding edge of feeding, reinforced protruding edge can insert the protruding edge of feeding in, and reinforced protruding edge suit is in the protruding edge of feeding promptly, and the outer wall on reinforced protruding edge closely laminates with the inner wall on the protruding edge of feeding, and connection stability is better, and the leakproofness is better.
On the basis of each above-mentioned specific embodiment, reinforced protruding edge is connected through gravity with the protruding edge of feeding, can dismantle the connection, and it is convenient to connect, can couple together feeding device and the furnace body 1 that waits to feed in raw material fast.
On the basis of each specific embodiment, the height of the feeding convex edge is equal to the depth of the feeding convex edge, and during butt joint, the mutual sleeving depth of the feeding convex edge and the feeding convex edge is deeper, so that the connection strength is higher. The tip on reinforced protruding edge and the protruding edge of feeding and ground butt each other, stability is better, reduces and rocks.
On the basis of each above-mentioned specific embodiment, the cross-section of charge door and the cross-section size of feed inlet equal, and the ejection of compact of charge door can be accepted completely to the feed inlet, and the material can fall into fast and treat reinforced furnace body 1, and the blanking is comparatively smooth and easy, prevents that the material from locating to pile up at the feed inlet.
On the basis of each above-mentioned specific embodiment, the cross-section of charge door equals with the cross-section size on the protruding edge of feeding, and the bore of charge door is great, and the protruding edge of feeding is connected in the edge of charge door, and the junction does not have the step face or shelters from, and the smooth inflow feeding protruding edge along the edge of charge door of material guarantees smooth and easy ejection of compact.
In another more reliable embodiment, on the basis of any one of the above embodiments, a weighing sensor is arranged in the feeding tank 3, so that the material of the feeding device can be weighed in real time through the weighing sensor, and the weight of the material can be accurately obtained, so that the feeding device and the feeding amount of the furnace body 1 to be fed can be accurately controlled. The outer wall of the feeding tank 3 is provided with a display instrument, the weighing sensor is electrically connected with the display instrument, the display instrument displays the numerical value of the weighing sensor in real time, and an operator can clearly know the feeding device and the weight of the material to be fed into the furnace body 1 so as to accurately control the feeding amount.
The embodiments in the present description are described in a progressive manner, each embodiment focuses on differences from other embodiments, and the same and similar parts among the embodiments are referred to each other.
The feeding device for clean vacuum environment provided by the invention is described in detail above. The principles and embodiments of the present invention are explained herein using specific examples, which are presented only to assist in understanding the method and its core concepts. It should be noted that, for those skilled in the art, it is possible to make various improvements and modifications to the present invention without departing from the principle of the present invention, and those improvements and modifications also fall within the scope of the claims of the present invention. Thus, the present invention is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.
Claims (8)
1. The utility model provides a feeding device of clean vacuum environment, its characterized in that, is including adding feed tank (3), add feed tank (3) reinforced volume more than or equal to treat the reinforced volume of reinforced furnace body (1), add feed tank (3) be furnished with the charge door that the feed inlet of treating reinforced furnace body (1) docks mutually, add feed tank (3) with treat reinforced furnace body (1) and be connected for dismantling, feed door department is provided with reinforced isolating valve (31), the feed inlet department of treating reinforced furnace body (1) is provided with feed isolating valve (11), add feed tank (3) with treat all to be furnished with vacuum interface and gas replacement interface on reinforced furnace body (1), the vacuum interface with the gas replacement interface all is equipped with the purification isolating valve.
2. The charging device in clean vacuum environment as defined in claim 1, wherein a charging convex edge is arranged at the charging port of the furnace body (1) to be charged, the feeding isolation valve (11) is arranged at the lower edge of the feeding convex edge, the feeding isolation valve (31) is arranged at the bottom surface of the feeding tank (3), when the feeding device is butted with the furnace body (1) to be fed, the bottom surface of the feeding tank (3) is butted against the upper end surface of the feeding convex edge, the bottom surface of the feeding tank (3), the feeding convex edge, the feeding isolation valve (31) and the feeding isolation valve (11) form a butt joint chamber (4), the butt joint chamber (4) is provided with a butt joint vacuum interface and a butt joint gas replacement interface, and the butt joint vacuum interface and the butt joint gas replacement interface are both provided with butt joint isolation valves.
3. The clean vacuum environment charging device as defined in claim 2, wherein the charging port of the charging device is provided with a charging convex edge, and the charging isolation valve (31) is arranged at the upper edge of the charging convex edge.
4. The clean vacuum environment charging device as defined in claim 3, wherein the outer diameter of said charging ledge is equal to the inner diameter of said charging ledge, and said charging ledge can be inserted into said charging ledge.
5. The clean vacuum environment charging device as defined in claim 4, wherein the charging ledge has a height equal to the depth of the charging ledge.
6. The clean vacuum environment charging device as defined in claim 2, wherein the cross section of the charging opening and the cross section of the charging opening are equal in size.
7. The clean vacuum environment charging device as defined in claim 6, wherein the cross section of said charging opening is equal to the cross section of said charging flange.
8. The clean vacuum environment feeding device of any claim 1 to 7, wherein a weighing sensor is arranged in the feeding tank (3), a display instrument is arranged on the outer wall of the feeding tank (3), and the weighing sensor is electrically connected with the display instrument.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111616084.8A CN114199029A (en) | 2021-12-27 | 2021-12-27 | Feeding device for clean vacuum environment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111616084.8A CN114199029A (en) | 2021-12-27 | 2021-12-27 | Feeding device for clean vacuum environment |
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| CN114199029A true CN114199029A (en) | 2022-03-18 |
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| CN202111616084.8A Pending CN114199029A (en) | 2021-12-27 | 2021-12-27 | Feeding device for clean vacuum environment |
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|---|---|---|---|---|
| GB910413A (en) * | 1958-05-03 | 1962-11-14 | Heraeus Gmbh W C | Improvements in or relating to material charging devices for vacuum furnaces |
| JP2010229505A (en) * | 2009-03-27 | 2010-10-14 | Nippon Steel Corp | Vacuum valve in vacuum degassing equipment and method for seating valve element for vacuum valve |
| CN109470059A (en) * | 2018-11-16 | 2019-03-15 | 成都斯力康科技股份有限公司 | A kind of vacuum melting charging process |
| CN109539788A (en) * | 2018-11-16 | 2019-03-29 | 江苏斯力康科技有限公司 | A kind of continuous feed structure for vacuum melting furnace |
| CN109579530A (en) * | 2019-01-07 | 2019-04-05 | 合智熔炼装备（上海）有限公司 | A kind of the material alloying mechanism and its charging process of vacuum induction furnace zone preservative pipe |
| CN110243179A (en) * | 2019-07-10 | 2019-09-17 | 无锡应达工业有限公司 | Charging system on a kind of vaccum sensitive stove |
-
2021
- 2021-12-27 CN CN202111616084.8A patent/CN114199029A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB910413A (en) * | 1958-05-03 | 1962-11-14 | Heraeus Gmbh W C | Improvements in or relating to material charging devices for vacuum furnaces |
| JP2010229505A (en) * | 2009-03-27 | 2010-10-14 | Nippon Steel Corp | Vacuum valve in vacuum degassing equipment and method for seating valve element for vacuum valve |
| CN109470059A (en) * | 2018-11-16 | 2019-03-15 | 成都斯力康科技股份有限公司 | A kind of vacuum melting charging process |
| CN109539788A (en) * | 2018-11-16 | 2019-03-29 | 江苏斯力康科技有限公司 | A kind of continuous feed structure for vacuum melting furnace |
| CN109579530A (en) * | 2019-01-07 | 2019-04-05 | 合智熔炼装备（上海）有限公司 | A kind of the material alloying mechanism and its charging process of vacuum induction furnace zone preservative pipe |
| CN110243179A (en) * | 2019-07-10 | 2019-09-17 | 无锡应达工业有限公司 | Charging system on a kind of vaccum sensitive stove |
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