CN114161592A - Crystal bar degumming device - Google Patents
Crystal bar degumming device Download PDFInfo
- Publication number
- CN114161592A CN114161592A CN202111549984.5A CN202111549984A CN114161592A CN 114161592 A CN114161592 A CN 114161592A CN 202111549984 A CN202111549984 A CN 202111549984A CN 114161592 A CN114161592 A CN 114161592A
- Authority
- CN
- China
- Prior art keywords
- crystal bar
- box body
- box
- crystal
- degumming
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000013078 crystal Substances 0.000 title claims abstract description 58
- 239000003795 chemical substances by application Substances 0.000 claims abstract description 20
- 238000010438 heat treatment Methods 0.000 claims abstract description 19
- 239000007787 solid Substances 0.000 claims abstract description 18
- 239000003292 glue Substances 0.000 claims abstract description 16
- 238000000926 separation method Methods 0.000 claims abstract description 7
- 210000000078 claw Anatomy 0.000 claims description 11
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 claims description 10
- 238000004090 dissolution Methods 0.000 claims description 5
- 229910021642 ultra pure water Inorganic materials 0.000 claims description 5
- 239000012498 ultrapure water Substances 0.000 claims description 5
- 230000002093 peripheral effect Effects 0.000 claims description 3
- 239000007788 liquid Substances 0.000 description 8
- 238000000034 method Methods 0.000 description 5
- 238000004026 adhesive bonding Methods 0.000 description 3
- 235000012431 wafers Nutrition 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
Abstract
The invention relates to a crystal bar degumming device, which comprises a box body capable of accommodating a crystal bar assembly to be degummed; a dissolving agent is contained in the box body, and when a crystal bar assembly to be degummed is contained in the box body, solid glue connected to the crystal bar is immersed in the dissolving agent; and the heating structure is arranged in the box body and is used for accelerating the separation of the solid glue and the crystal bar. By matching the dissolving mode and the heating mode of the dissolving agent, the degumming of the crystal bar is accelerated, and the degumming efficiency is improved.
Description
Technical Field
The invention relates to the technical field of semiconductors, in particular to a crystal bar degumming device.
Background
Silicon wafers (Wafer) are important raw materials in the semiconductor industry and are resources which are in short supply in the domestic market at present. Generally, a silicon wafer is cut from a crystal bar (Block), and the crystal bar, a support material, and a workpiece plate need to be bonded together with glue before cutting. However, the adhesive bonding operation is not proper or the adhesive bonding crystal orientation is wrong in the adhesive bonding process, and the adhesive removing operation is required.
The method used in the existing degumming process is heating degumming, the bonded crystal bar is placed on a heating table, and the degumming is realized by heating and softening glue. The method needs simple equipment, is easy to operate, but has extremely low efficiency, and the degumming operation for one time usually needs 2 to 4 days or even longer time.
Disclosure of Invention
In order to solve the technical problem, the invention provides a crystal bar degumming device which solves the problem of low crystal bar degumming efficiency.
In order to achieve the purpose, the embodiment of the invention adopts the technical scheme that: a crystal bar degumming device comprises
A box body capable of accommodating the crystal bar assembly to be degummed;
a dissolving agent is contained in the box body, and when a crystal bar assembly to be degummed is contained in the box body, solid glue connected to the crystal bar is immersed in the dissolving agent;
and the heating structure is arranged in the box body and is used for accelerating the separation of the solid glue and the crystal bar.
Optionally, the apparatus further comprises an ultrasonic structure, which is arranged in the box body and used for generating ultrasonic waves to accelerate the separation of the solid glue and the crystal bar.
Optionally, the dissolution agent comprises ultrapure water and acetone.
Optionally, an exhaust port is arranged at the top of the box body and used for exhausting gas generated in the solid gum dissolving process.
Optionally, a clamping structure for clamping and fixing the crystal bar is arranged in the box body.
Optionally, the clamping structure clamps and fixes the crystal bar at the first position, so that in an initial state, a gap is formed between the crystal bar assembly and the bottom of the box body.
Optionally, the clamping structure includes two arc-shaped holding claws which are arranged oppositely, concave surfaces of the two arc-shaped holding claws are arranged oppositely, and the shape of the concave surface of the arc-shaped holding claw is in accordance with the shape of the outer peripheral surface of the crystal bar.
Optionally, a moving structure for controlling the movement of the clamping structure is further arranged in the box body.
Optionally, the moving structure includes a horizontal moving unit, the horizontal moving unit includes a guide rail disposed at the top of the box body, and the clamping structure is movably disposed on the guide rail.
Optionally, the moving structure includes a lifting motion unit, the lifting motion unit includes a telescopic rod disposed between the guide rail and the clamping structure, and one end of the telescopic rod is provided with two connecting rods correspondingly connected with the two clasps.
The invention has the beneficial effects that: by matching the dissolving mode and the heating mode of the dissolving agent, the degumming of the crystal bar is accelerated, and the degumming efficiency is improved.
Drawings
FIG. 1 is a schematic view of a related art ingot assembly;
FIG. 2 is a schematic view showing a related art release structure;
fig. 3 is a schematic structural diagram of an ingot degumming apparatus according to an embodiment of the present invention.
01 crystal bar; 02 a support plate; 03, a workpiece plate; 04 heating plates; 05, a base; 11 a box body; 1 exhaust port; 2, a guide rail; 3 connecting the rods; 4, crystal bar; 5, a dissolving agent; 6 heating the structure; 7, an ultrasonic structure; 8 a first liquid inlet; 9 a second liquid inlet; 10, telescoping a rod; 12 embracing claws.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the drawings of the embodiments of the present invention. It is to be understood that the embodiments described are only a few embodiments of the present invention, and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the described embodiments of the invention, are within the scope of the invention.
In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplicity of description, but do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
Referring to fig. 1 and 2, the boule assembly includes a boule 01, a support plate 02 and a workpiece plate 03, the boule 01, the support plate 02 and the workpiece plate 03 are connected by glue, and when degumming is performed on the boule 01, the degumming is performed by a degumming device shown in fig. 2, the degumming device shown in fig. 2 includes a base 05 and a heating plate 04 arranged on the base 05, and the degumming efficiency is low. And no auxiliary fixing structure is arranged, so that the crystal bar is easy to drop and damage after degumming.
Referring to FIG. 3, the present embodiment provides a device for degumming a crystal rod 4, comprising
A box body 11 capable of accommodating a crystal bar assembly to be degummed;
a dissolving agent 5 is contained in the box body 11, and when a crystal bar assembly to be degummed is contained in the box body 11, the solid glue connected to the crystal bar 4 is immersed in the dissolving agent 5;
and the heating structure 6 is arranged in the box body 11 and is used for accelerating the separation of the solid glue and the crystal bar 4.
In the embodiment, the mode of heating the molten gel and the mode of chemical dissolution are combined, so that the degumming of the crystal bar 4 is accelerated, and the efficiency is improved. The solid glue is easy to recover after being separated, the crystal bar 4 is a cylinder, the crystal bar 4 is not provided with a fixed structure after being degummed, the crystal bar 4 is easy to drop and damage, the degummed crystal bar 4 is carried out in the box body 11 in the embodiment, and the containing space in the box body 11 is reasonably arranged to prevent the damage of the crystal bar 4.
The specific components of the dissolving agent 5 may be set according to actual needs as long as the degumming of the crystal rod 4 can be accelerated, and in this embodiment, the dissolving agent 5 includes ultrapure water and acetone, but is not limited thereto, and other organic dissolving agents 5 may also be used.
In this embodiment, a liquid inlet is disposed on a side wall or a top of the box 11 to add the dissolving agent 5, the dissolving agent 5 may be added into the box 11 after being prepared in advance, or may be added separately, at this time, the box 11 may be disposed with a plurality of liquid inlets (refer to the first liquid inlet 8 for adding ultrapure water and the second liquid inlet 9 for adding acetone in fig. 3), so as to be connected to corresponding liquid storage devices through pipes, respectively, and a valve is disposed on the corresponding pipe to control a flow rate of the corresponding liquid, so as to adjust a ratio of the ultrapure water and the acetone entering the box 11.
It should be noted that the heating structure 6 may be a heating structure 6 in the prior art, such as a heating tube, and will not be described in detail herein.
The arrangement position of the heating structure 6 can be set according to actual needs, in the embodiment, the heating structure 6 is arranged at the bottom of the box body 11, the temperature of the dissolving agent 5 can be heated, the heating area of solid glue connected with the crystal bar 4 is increased, and the degumming efficiency of the crystal bar 4 is improved.
In some embodiments of this embodiment, the apparatus for degumming the crystal rod 4 further includes an ultrasonic structure 7 disposed in the box 11 for generating ultrasonic waves to accelerate the separation of the solid gum from the crystal rod 4.
The ultrasonic structure 7 may be disposed on a side wall of the box 11, or may be disposed at the bottom of the box 11, and accelerates the vibration of the dissolving agent 5 by using ultrasonic waves, thereby accelerating the dissolution of the solid glue.
It should be noted that the ultrasonic structure 7 may be an ultrasonic structure 7 in the prior art, and will not be described in detail herein.
In some embodiments of the present embodiment, the top of the box 11 is provided with an exhaust port 1 for exhausting gas generated during the dissolution of the solid gum.
In some embodiments of the present embodiment, a clamping structure for clamping and fixing the crystal bar 4 is disposed in the box 11.
The clamping structure can clamp and fix the crystal bar 4, and the crystal bar 4 can be effectively prevented from falling and being damaged after degumming.
In some embodiments of this embodiment, the clamping structure clamps the ingot 4 in the first position such that in the initial state, there is a gap between the ingot assembly and the bottom of the box 11.
Referring to fig. 1, the clamping structure may provide an upward force to the ingot 4, i.e., a force in a direction opposite to the self-weight of the ingot 4, thereby avoiding the problem of difficulty in debonding due to the self-weight of the ingot 4.
The size of the gap may be set according to actual needs, for example, the gap may be zero as long as the pressure applied to the solid glue attached to the ingot 4 from the ingot 4 is zero.
The specific structural form of the clamping structure may be various, and in this embodiment, for example, the clamping structure includes two arc-shaped holding claws 12 which are arranged oppositely, concave surfaces of the two arc-shaped holding claws 12 are arranged oppositely, and the shape of the concave surface of the arc-shaped holding claw 12 matches with the shape of the outer peripheral surface of the ingot 4.
In some embodiments of this embodiment, a moving structure for controlling the movement of the clamping structure is further disposed in the box body 11. The arrangement of the moving structure is convenient for the clamping structure to clamp the crystal bar 4. And the arrangement of the moving structure can be matched with the clamping structure to carry out the operations of feeding and discharging.
In some embodiments of the present embodiment, the moving structure includes a horizontal moving unit, the horizontal moving unit includes a guide rail 2 disposed on the top of the box 11, and the clamping structure is movably disposed on the guide rail 2.
In some embodiments of this embodiment, the moving structure includes a lifting unit, the lifting unit includes a telescopic rod 10 disposed between the guide rail 2 and the clamping structure, and one end of the telescopic rod 10 is provided with two connecting rods 3 correspondingly connected to the two clasps 12.
The specific structural forms of the horizontal moving unit and the lifting moving unit can be various, and the movement of the clamping structure in the horizontal direction and the lifting in the vertical direction can be realized, for example, the guide rail 2 can be in a cross shape or a net shape to increase the moving range of the clamping structure, and the lifting moving unit can also be a telescopic cylinder and the like.
The following points need to be explained:
(1) the drawings of the embodiments of the disclosure only relate to the structures related to the embodiments of the disclosure, and other structures can refer to the common design.
(2) For purposes of clarity, the thickness of layers or regions in the figures used to describe embodiments of the present disclosure are exaggerated or reduced, i.e., the figures are not drawn on a true scale. It will be understood that when an element such as a layer, film, region, or substrate is referred to as being "on" or "under" another element, it can be "directly on" or "under" the other element or intervening elements may be present.
(3) Without conflict, embodiments of the present disclosure and features of the embodiments may be combined with each other to arrive at new embodiments.
It will be understood that the above embodiments are merely exemplary embodiments taken to illustrate the principles of the present invention, which is not limited thereto. It will be apparent to those skilled in the art that various modifications and improvements can be made without departing from the spirit and substance of the invention, and these modifications and improvements are also considered to be within the scope of the invention.
Claims (10)
1. A crystal bar degumming device is characterized by comprising
A box body capable of accommodating the crystal bar assembly to be degummed;
a dissolving agent is contained in the box body, and when a crystal bar assembly to be degummed is contained in the box body, solid glue connected to the crystal bar is immersed in the dissolving agent;
and the heating structure is arranged in the box body and is used for accelerating the separation of the solid glue and the crystal bar.
2. The apparatus according to claim 1, further comprising an ultrasonic structure disposed in the box for generating ultrasonic waves to accelerate the separation of the solid gum from the ingot.
3. The apparatus according to claim 1, wherein the dissolving agent comprises ultrapure water and acetone.
4. The apparatus according to claim 1, wherein the top of the box is provided with an exhaust port for exhausting gas generated during the dissolution of the solid gum.
5. The crystal rod degumming device according to claim 1, wherein a clamping structure for clamping and fixing the crystal rod is arranged in the box body.
6. The apparatus according to claim 5, wherein the clamping structure clamps the ingot in the first position such that in the initial state, a gap is provided between the ingot assembly and the bottom of the box.
7. The apparatus according to claim 5, wherein the clamping structure comprises two arc-shaped holding claws arranged oppositely, concave surfaces of the two arc-shaped holding claws are arranged oppositely, and the shape of the concave surface of the arc-shaped holding claw conforms to the shape of the outer peripheral surface of the crystal bar.
8. The apparatus according to claim 7, wherein a moving mechanism for controlling the movement of the clamping mechanism is further disposed in the box.
9. The apparatus according to claim 8, wherein the moving structure comprises a horizontal moving unit, the horizontal moving unit comprises a guide rail disposed at the top of the box, and the clamping structure is movably disposed on the guide rail.
10. The crystal rod degumming device according to claim 9, wherein the moving structure comprises a lifting movement unit, the lifting movement unit comprises a telescopic rod arranged between the guide rail and the clamping structure, and one end of the telescopic rod is provided with two connecting rods correspondingly connected with the two holding claws.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111549984.5A CN114161592A (en) | 2021-12-17 | 2021-12-17 | Crystal bar degumming device |
| TW111126433A TW202244338A (en) | 2021-12-17 | 2022-07-14 | Crystal bar degumming device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111549984.5A CN114161592A (en) | 2021-12-17 | 2021-12-17 | Crystal bar degumming device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN114161592A true CN114161592A (en) | 2022-03-11 |
Family
ID=80487132
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202111549984.5A Pending CN114161592A (en) | 2021-12-17 | 2021-12-17 | Crystal bar degumming device |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN114161592A (en) |
| TW (1) | TW202244338A (en) |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05293785A (en) * | 1992-04-17 | 1993-11-09 | Komatsu Denshi Kinzoku Kk | Semiconductor crystal rod grasping device and conveying device |
| CN206780703U (en) * | 2017-05-10 | 2017-12-22 | 江西豪安能源科技有限公司 | A kind of silicon single crystal rod degumming device |
| CN207465045U (en) * | 2017-09-29 | 2018-06-08 | 上海磐盟电子材料有限公司 | A kind of crystal bar glue sticking device |
| CN210497428U (en) * | 2019-09-05 | 2020-05-12 | 菲特晶(南京)电子有限公司 | Degumming device for quartz wafer production |
| CN213593323U (en) * | 2020-08-28 | 2021-07-02 | 张桂荣 | Water degumming device after silicon rod cutting |
| CN214562080U (en) * | 2020-12-31 | 2021-11-02 | 杭州中欣晶圆半导体股份有限公司 | Crystal bar heating platform that comes unstuck |
-
2021
- 2021-12-17 CN CN202111549984.5A patent/CN114161592A/en active Pending
-
2022
- 2022-07-14 TW TW111126433A patent/TW202244338A/en unknown
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05293785A (en) * | 1992-04-17 | 1993-11-09 | Komatsu Denshi Kinzoku Kk | Semiconductor crystal rod grasping device and conveying device |
| CN206780703U (en) * | 2017-05-10 | 2017-12-22 | 江西豪安能源科技有限公司 | A kind of silicon single crystal rod degumming device |
| CN207465045U (en) * | 2017-09-29 | 2018-06-08 | 上海磐盟电子材料有限公司 | A kind of crystal bar glue sticking device |
| CN210497428U (en) * | 2019-09-05 | 2020-05-12 | 菲特晶(南京)电子有限公司 | Degumming device for quartz wafer production |
| CN213593323U (en) * | 2020-08-28 | 2021-07-02 | 张桂荣 | Water degumming device after silicon rod cutting |
| CN214562080U (en) * | 2020-12-31 | 2021-11-02 | 杭州中欣晶圆半导体股份有限公司 | Crystal bar heating platform that comes unstuck |
Also Published As
| Publication number | Publication date |
|---|---|
| TW202244338A (en) | 2022-11-16 |
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| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| CB02 | Change of applicant information |
Address after: 710000 room 1-3-029, No. 1888, Xifeng South Road, high tech Zone, Xi'an, Shaanxi Province Applicant after: Xi'an Yisiwei Material Technology Co.,Ltd. Applicant after: XI'AN ESWIN SILICON WAFER TECHNOLOGY Co.,Ltd. Address before: 710000 room 1-3-029, No. 1888, Xifeng South Road, high tech Zone, Xi'an, Shaanxi Province Applicant before: Xi'an yisiwei Material Technology Co.,Ltd. Applicant before: XI'AN ESWIN SILICON WAFER TECHNOLOGY Co.,Ltd. |
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| CB02 | Change of applicant information |