CN210497428U - Degumming device for quartz wafer production - Google Patents
Degumming device for quartz wafer production Download PDFInfo
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- CN210497428U CN210497428U CN201921471728.7U CN201921471728U CN210497428U CN 210497428 U CN210497428 U CN 210497428U CN 201921471728 U CN201921471728 U CN 201921471728U CN 210497428 U CN210497428 U CN 210497428U
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Abstract
The utility model provides a quartz wafer production is with device that comes unstuck, concretely relates to washing technical field that comes unstuck. The utility model comprises a shell, wherein the shell forms a cavity, the inner top surface of the shell is provided with a slide rail, and the base of the slide rail is connected with the shell; a sliding block is arranged on the sliding rail; the end face of the sliding block is provided with a first hydraulic rod, and the end part of the cylinder body of the first hydraulic rod is connected with the sliding block; the end head of the ejector rod of the first hydraulic rod is provided with a flat plate, and the upper end surface of the flat plate is connected with the first hydraulic rod; a fixed rod is arranged on the lower end face of the flat plate, and one end of the fixed rod is connected with the flat plate; the other end of the fixing rod is provided with a clamping plate, and one end of the clamping plate is connected with the fixing rod; a sieve cup is arranged on the bottom surface in the shell, the bottom surface of the sieve cup is connected with the shell, and a quartz wafer is arranged in the sieve cup; the inner bottom surface of the shell is provided with surrounding plates which form a concave cavity, and the concave cavity is internally provided with a quartz crystal degumming agent. The utility model provides a pair of quartz wafer production is with device that comes unstuck can make quartz wafer come unstuck more abundant, improves the efficiency of coming unstuck.
Description
Technical Field
The utility model belongs to the technical field of the washing comes unstuck, concretely relates to quartz wafer production is with device that comes unstuck.
Background
At present, quartz crystal is an important electronic material, degumming is one of indispensable steps in the production process of quartz wafers, and the existing quartz wafer degumming device has the defects of insufficient degumming, low degumming efficiency and the like, so that the produced quartz wafers have low quality and cannot meet the production requirements of high-quality quartz wafers.
A glass wafer degumming device and a degumming method (with the authorization number of CN201811548120.X) are disclosed, and the device comprises a degumming tank, a dehydration component, a concentrated sulfuric acid tank, an oxygen dioxide water tank and a microprocessor. The device can make the process of removing the gum go on continuously, need not often change and removes the glue solution, has improved work efficiency. However, when a large number of glass wafers are subjected to photoresist stripping, a part of the wafers are not in sufficient contact with the photoresist stripping solution, so that the photoresist stripping effect is poor, and the production quality of the glass wafers is affected.
In view of the above circumstances, there is a need for a degumming device for quartz wafer production, which can ensure that the degumming of the quartz wafer is more sufficient and the degumming efficiency is improved.
SUMMERY OF THE UTILITY MODEL
The utility model aims at providing a quartz wafer production is with device that comes unstuck can make quartz wafer come unstuck more fully, improves the efficiency of coming unstuck.
The utility model provides a following technical scheme:
a degumming device for quartz wafer production comprises a shell, wherein the shell forms a cavity, the inner top surface of the shell is provided with a slide rail, and the base of the slide rail is connected with the shell; a sliding block is arranged on the sliding rail; a first hydraulic rod is arranged on the end face of the sliding block, and the end part of a cylinder body of the first hydraulic rod is connected with the sliding block; the end of the ejector rod of the first hydraulic rod is provided with a flat plate, and the upper end surface of the flat plate is connected with the first hydraulic rod; a fixing rod is arranged on the lower end face of the flat plate, and one end of the fixing rod is connected with the flat plate; the other end of the fixing rod is provided with a clamping plate, and the end part of the clamping plate is connected with the fixing rod; a sieve cup is arranged on the inner bottom surface of the shell, the bottom surface of the sieve cup is connected with the shell, and a quartz wafer is arranged in the sieve cup; the inner bottom surface of the shell is provided with surrounding plates, the surrounding plates form a cavity, and a quartz crystal degumming agent is arranged in the cavity.
Preferably, the wall of cup of sieve cup is network structure, be equipped with the baffle in the sieve cup, the lateral part of baffle with the inside wall of sieve cup meets, sieve cup top is equipped with the bowl cover, the lower bottom surface of bowl cover with sieve cup meets, be equipped with first hole and second hole on the bowl cover respectively, be equipped with the third hole on the baffle, be equipped with the pipeline between second hole and the third hole, the both ends of pipeline respectively with the second hole with the third hole meets, first hole with be equipped with the detachable handhole door on the second hole respectively.
Preferably, a boss is arranged at the edge of the cup cover.
Preferably, splint comprise first splint and second splint, the bottom of first splint with the bottom of second splint is articulated, splint can center on the other end of dead lever is rotatory closed, the cross section of splint personally submits circular-arcly, the other end of splint be equipped with sieve cup assorted slot, the lateral wall of sieve cup with the slot bottom of slot meets.
Preferably, a second hydraulic rod is arranged on the side of the sliding block, the end head of a mandril of the second hydraulic rod is connected with the sliding block, and the end part of a cylinder body of the second hydraulic rod is connected with the inner side wall of the shell; and a third hydraulic rod is arranged on the lower end face of the flat plate, the end part of a cylinder body of the third hydraulic rod is hinged with the flat plate, and the end head of a mandril of the third hydraulic rod is hinged with the outer side wall of the clamping plate.
Preferably, the inner side wall of the enclosing plate is provided with a heating pipe, and the end part of the heating pipe is connected with the enclosing plate.
Preferably, the inner side wall of the shell is provided with a carrying plate, the carrying plate is arranged on the side portion of the end opening of the enclosing plate, the side portion of the carrying plate is connected with the shell, the upper end face of the carrying plate is provided with the sieve cup, and the bottom face of the sieve cup is connected with the carrying plate.
The utility model discloses a profitable effect:
the cup wall of the sieve cup of the utility model is of a net structure, which is convenient for the silica crystal degumming agent to flow into the sieve cup; the sieve cup is internally provided with a clapboard which divides the sieve cup into layers, and the clapboard avoids the accumulation of quartz wafers and causes poor degumming effect; the cup cover is provided with a first hole and a second hole, the partition plate is provided with a third hole, and a pipeline is arranged between the second hole and the third hole and is convenient for conveying the quartz wafers; the edge of cup lid is equipped with the boss, and the boss prevents that splint from taking place to drop at the in-process that adds the sieve cup, and the other end of splint is equipped with the ditch for more firm when the centre gripping sieve cup.
Drawings
The accompanying drawings are included to provide a further understanding of the invention, and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention, and together with the description serve to explain the invention and not to limit the invention.
In the drawings:
fig. 1 is a front view of the present invention;
FIG. 2 is a front view of the sieve cup of the present invention;
fig. 3 is a bottom view of the first splint of the present invention.
Description of reference numerals:
1. a housing; 2. a slide rail; 3. a slider; 4. a first hydraulic lever; 5. a flat plate; 6. fixing the rod; 7. a splint; 71. a first splint; 72. a second splint; 73. a groove; 8. a sieve cup; 81. a partition plate; 82. a cup cover; 821. an orifice cover; 822. a boss; 83. a first hole; 84. a second hole; 85. a third hole; 86. A pipeline; 9. enclosing plates; 10. removing the colloid from the quartz crystal; 11. a second hydraulic rod; 12. a loading plate; 13. heating a tube; 14. a third hydraulic ram.
Detailed Description
As shown in fig. 1 and 2, the degumming device for quartz wafer production comprises a shell 1, wherein the shell 1 forms a cavity, a slide rail 2 is arranged on the inner top surface of the shell 1 along the horizontal direction, and the base of the slide rail 2 is connected with the shell 1 through a bolt; a sliding block 3 is arranged on the sliding rail 2, a second hydraulic rod 11 is arranged on the side portion of the sliding block 3 along the horizontal direction, the top end of the second hydraulic rod 11 is connected with the sliding block 3 through a bolt, the end portion of a cylinder body of the second hydraulic rod 11 is connected with the inner side wall of the shell 1 through a bolt, and the second hydraulic rod 11 can push the sliding block 3 to slide; a first hydraulic rod 4 is arranged on the end face of the sliding block 3 along the vertical direction, the end part of a cylinder body of the first hydraulic rod 4 is connected with the sliding block 3 through a bolt, a flat plate 5 is arranged at the end head of an ejector rod of the first hydraulic rod 4 along the horizontal direction, the upper end face of the flat plate 5 is connected with the first hydraulic rod 4 through a bolt, and the first hydraulic rod 4 can push the flat plate 5 to reciprocate up and down; the lower end face of the flat plate 5 is provided with a fixing rod 6 in the vertical direction, one end of the fixing rod 6 is welded with the flat plate 5, the other end of the fixing rod 6 is provided with a clamping plate 7, one end of the clamping plate 7 is hinged with the fixing rod 6, the clamping plate 7 consists of a first clamping plate 71 and a second clamping plate 72, the bottom end of the first clamping plate 71 is hinged with the bottom end of the second clamping plate 72, two sides of the lower end face of the flat plate 5 are respectively provided with a third hydraulic rod 14 in the vertical direction, the end part of a cylinder body of the third hydraulic rod 14 is hinged with the flat plate 5, the end part of a mandril of the third hydraulic rod 14 is hinged with the outer side wall of the clamping plate 7, the clamping plate 7 can rotate around the other end of the fixing rod 6 through the third hydraulic rod 14 to be closed, the cross section of the clamping plate 7 is arc-shaped, the other end of the clamping plate 7 is provided with; the wall of the sieve cup 8 is of a net structure, the sieve cup 8 of the net structure is convenient for quartz crystal degumming agent 10 to flow into the sieve cup, a partition plate 81 is arranged in the sieve cup 8, the side part of the partition plate 81 is connected with the inner side wall of the sieve cup 8, the partition plate 81 enables the sieve cup 8 to be internally layered, large-area accumulation of quartz crystal wafers is avoided, insufficient degumming is caused, a cup cover 82 is arranged at the top end of the sieve cup 8, the lower bottom surface of the cup cover 82 is connected with the sieve cup 8, a first hole 83 and a second hole 84 are respectively arranged on the cup cover 82, a third hole 85 is arranged on the partition plate 81, a pipeline 86 is arranged between the second hole 84 and the third hole 85, two ends of the pipeline 86 are respectively connected with the second hole 84 and the third hole 85, and detachable hole covers 821 are respectively arranged, a quartz wafer is put into the sieve cup through the first hole 83 and the second hole 84, a boss 822 is arranged at the edge of the cup cover 82, and the boss 822 prevents the clamping plate 7 from falling off in the clamping process; the inner bottom surface of the shell 1 is provided with surrounding plates 9, a concave cavity is formed between the surrounding plates 9, and a quartz crystal degumming agent 10 is arranged in the concave cavity; a heating pipe 13 is arranged on the inner side wall of the coaming 9, the end part of the heating pipe 13 is connected with the coaming 9, and the heating pipe 13 can heat the quartz crystal degumming agent 10 to ensure that the degumming process is carried out at the optimum temperature; the inside wall of casing 1 is equipped with carries thing board 12, carries thing board 12 and locates the port lateral part of bounding wall 9, carries the lateral part and the casing 1 welding of thing board 12, carries the up end of thing board 12 and is equipped with sieve cup 8, and the bottom of sieve cup 8 meets with carrying thing board 12, carries thing board 12 and has improved the height of sieve cup 8, and the clamping process that makes splint 7 is more convenient.
The utility model discloses a working method: the cover 821 is opened, quartz crystal wafers are placed into the sieve cup 8, the cover 821 is closed, the sliding block 3 is pushed to slide right above the sieve cup 8 through the second hydraulic rod 11, the clamping plate 7 is moved downwards through the first hydraulic rod 4, the sieve cup 8 is clamped through the third hydraulic rod 14, the clamping plate 7 is lifted, the sliding block 3 is pushed right above the sliding rail enclosing plate 9 through the second hydraulic rod 14, the clamping plate 7 is moved downwards until the sieve cup 8 is completely immersed into the heated quartz crystal degumming agent 10, after the degumming agent is finished, the clamping plate 7 is moved upwards, the sliding block 3 is moved right above the carrying plate 12, and the sieve cup 8 is placed on the carrying plate 12 through the clamping plate 7.
Although the present invention has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that modifications may be made to the embodiments described in the foregoing embodiments, or equivalents may be substituted for elements thereof. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (7)
1. A degumming device for quartz wafer production is characterized in that: the sliding rail type air conditioner comprises a shell, wherein the shell forms a cavity, the inner top surface of the shell is provided with a sliding rail, and a base of the sliding rail is connected with the shell; a sliding block is arranged on the sliding rail; a first hydraulic rod is arranged on the end face of the sliding block, and the end part of a cylinder body of the first hydraulic rod is connected with the sliding block; the end of the ejector rod of the first hydraulic rod is provided with a flat plate, and the upper end surface of the flat plate is connected with the first hydraulic rod; a fixing rod is arranged on the lower end face of the flat plate, and one end of the fixing rod is connected with the flat plate; the other end of the fixing rod is provided with a clamping plate, and one end of the clamping plate is connected with the fixing rod; a sieve cup is arranged on the inner bottom surface of the shell, the bottom surface of the sieve cup is connected with the shell, and a quartz wafer is arranged in the sieve cup; the inner bottom surface of the shell is provided with surrounding plates, the surrounding plates form a cavity, and a quartz crystal degumming agent is arranged in the cavity.
2. The degumming apparatus for quartz wafer production according to claim 1, characterized in that: the cup wall of sieve cup is network structure, be equipped with the baffle in the sieve cup, the lateral part of baffle with the inside wall of sieve cup meets, sieve cup top is equipped with the bowl cover, the lower bottom surface of bowl cover with sieve cup meets, be equipped with first hole and second hole on the bowl cover respectively, be equipped with the third hole on the baffle, be equipped with the pipeline between second hole and the third hole, the both ends of pipeline respectively with the second hole with the third hole meets, first hole with be equipped with the detachable handhole door on the second hole respectively.
3. The degumming apparatus for quartz wafer production according to claim 2, characterized in that: and a boss is arranged at the edge of the cup cover.
4. The degumming apparatus for quartz wafer production according to claim 1, characterized in that: the splint comprise first splint and second splint, the bottom of first splint with the bottom of second splint is articulated, splint can center on the other end of dead lever is rotatory closed, the transversal circular-arc of personally submitting of splint, the other end of splint be equipped with sieve cup assorted slot, the lateral wall of sieve cup with the slot bottom of slot meets.
5. The degumming apparatus for quartz wafer production according to claim 1, characterized in that: a second hydraulic rod is arranged on the side part of the sliding block, the end head of a mandril of the second hydraulic rod is connected with the sliding block, and the end part of a cylinder body of the second hydraulic rod is connected with the inner side wall of the shell; and a third hydraulic rod is arranged on the lower end face of the flat plate, the end part of a cylinder body of the third hydraulic rod is hinged with the flat plate, and the end head of a mandril of the third hydraulic rod is hinged with the outer side wall of the clamping plate.
6. The degumming apparatus for quartz wafer production according to claim 1, characterized in that: the inside wall of bounding wall is equipped with the heating pipe, the tip of heating pipe with the bounding wall is connected.
7. The degumming apparatus for quartz wafer production according to claim 1, characterized in that: the inside wall of the shell is provided with a carrying plate, the carrying plate is arranged on the side portion of the end opening of the enclosing plate, the side portion of the carrying plate is connected with the shell, the upper end face of the carrying plate is provided with the sieve cup, and the bottom face of the sieve cup is connected with the carrying plate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921471728.7U CN210497428U (en) | 2019-09-05 | 2019-09-05 | Degumming device for quartz wafer production |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921471728.7U CN210497428U (en) | 2019-09-05 | 2019-09-05 | Degumming device for quartz wafer production |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN210497428U true CN210497428U (en) | 2020-05-12 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201921471728.7U Active CN210497428U (en) | 2019-09-05 | 2019-09-05 | Degumming device for quartz wafer production |
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| Country | Link |
|---|---|
| CN (1) | CN210497428U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114161592A (en) * | 2021-12-17 | 2022-03-11 | 西安奕斯伟材料科技有限公司 | Crystal bar degumming device |
-
2019
- 2019-09-05 CN CN201921471728.7U patent/CN210497428U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114161592A (en) * | 2021-12-17 | 2022-03-11 | 西安奕斯伟材料科技有限公司 | Crystal bar degumming device |
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