CN213593323U

CN213593323U - Water degumming device after silicon rod cutting

Info

Publication number: CN213593323U
Application number: CN202021841349.5U
Authority: CN
Inventors: 张桂荣
Original assignee: Individual
Current assignee: Individual
Priority date: 2020-08-28
Filing date: 2020-08-28
Publication date: 2021-07-02
Anticipated expiration: 2030-08-28

Abstract

The utility model provides a water washing glue-eluting device after silicon rod cutting, which belongs to the technical field of novel water washing glue-eluting devices, and comprises a bottom plate, wherein a support is fixed at the upper end of the bottom plate through a bolt, a vertical frame is welded at the top end of the support, a slide rail is fixed on one side of the vertical frame through a bolt, a slide block is matched and used with the slide rail, the end surface of the slide block is connected with a feeding frame through a bolt, the upper end of the feeding frame is connected with a second speed reducer through a bolt, the input shaft of the second speed reducer is connected with the output shaft of the second motor, and the second motor is fixed at the top end of the second speed reducer through; the output shaft of the second speed reducer is fixedly connected with a flexible joint, the lower end of the flexible joint is connected with a fixed plate through a bolt, and the lower end of the fixed plate is connected with a silicon rod chuck through a bolt. The second motor drives the flexible joint, so that the silicon rod is stirred in the degumming liquid, the degumming agent fully reacts with the single crystal silicon rod, and the degumming efficiency and the degumming quality are improved.

Description

Water degumming device after silicon rod cutting

Technical Field

The utility model relates to a washing mucilage binding that elutes technical field, concretely relates to washing mucilage binding after silicon rod cutting is put.

Background

In the prior art, in the production process of electronic components, monocrystalline silicon wafers are used which are cut from a monocrystalline silicon rod after tumbling and chamfering, and the monocrystalline silicon rod is shaped or pulled up in a furnace by a zone-melting or czochralski process. Meanwhile, after the silicon single crystal rod is cut, degumming treatment is required.

Through the retrieval discovery, disclose a water washing mucilage binding after silicon rod cutting in the chinese patent that the publication number is CN209034995U, including the main part case, main part bottom of the case portion four corners outer wall all has the backup pad through the bolt fastening, and four backup pad bottom outer walls all have the base through threaded connection, main part bottom of the case portion outer wall has the air-blower through the bolt fastening, and the air-blower air outlet has the pipe through threaded connection, main part bottom of the case portion outer wall is opened there is the jack, and the jack inner wall pegs graft and has the pipe, main part bottom of the case portion inner wall has the shunt tubes through the bolt fastening, and shunt tubes bottom of the case portion outer wall is connected with the one end of pipe through the screw thread, shunt tubes top outer wall.

However, the technical scheme adopts a mode of stirring the degumming liquid by blowing, so that the problems of poor stirring effect of the degumming liquid and low degumming efficiency exist.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a water degumming device after silicon rod cutting, it is not good to aim at solving the degumming liquid stirring effect among the prior art, the problem of the inefficiency that comes unstuck.

In order to achieve the above object, the utility model provides a following technical scheme: a water-based degumming device after silicon rod cutting comprises a bottom plate, wherein a support is fixed at the upper end of the bottom plate through a bolt, a vertical frame is welded at the top end of the support, a sliding rail is fixed on one side of the vertical frame through a bolt, a sliding block is matched with the sliding rail for use, the end face of the sliding block is connected with a feeding frame through a bolt, the upper end of the feeding frame is connected with a second speed reducer through a bolt, the input shaft of the second speed reducer is connected with the output shaft of the second motor, and the second motor is fixed at the top end of the; the output shaft of the second speed reducer is fixedly connected with a flexible joint, the lower end of the flexible joint is connected with a fixing plate through a bolt, the lower end of the fixing plate is connected with silicon rod chucks through bolts, the number of the silicon rod chucks is not limited, and in the embodiment, the number of the silicon rod chucks is preferably six.

In order to ensure that effective ingredients in degumming liquid are fully contacted between the single crystal silicon rods and strengthen the degumming effect, as a preferred mode of the utility model, the upper end of the bottom plate is fixedly provided with a degumming cylinder through bolts, the bottom end of the degumming cylinder is rotationally connected with a turbofan connecting rod, and the upper end of the turbofan connecting rod is connected with a turbofan through threads; the lower end of the turbofan connecting rod is connected with an output shaft of a first speed reducer through a key, the first speed reducer is connected with an output shaft of a first motor through a key, and the first motor is fixed to the top end of the first speed reducer through a bolt.

In order to facilitate the replacement of the silicon rod by field workers, as a preferred feature of the present invention, the inner side of the vertical frame is connected with a lead screw fixing side through a bolt, the lead screw fixing side is matched with a lead screw, the tail end of the lead screw is matched with a lead screw supporting side, the top end of the lead screw is connected with a coupling through a key, the coupling is connected with an output shaft of a speed reducer III through a key, the speed reducer tee is connected with an output shaft of a motor III through a key, and the motor tee is fixed at the top end of the; the middle of the screw rod is connected with a screw rod and nut support through a bolt, the screw rod and nut support is connected with a nut connecting block through a bolt, and the nut connecting block is welded on one side of the feeding frame.

In order to facilitate the cleaning of the degumming tank by field workers and prepare for the early-stage degumming conditions, as a preferred mode of the utility model, a liquid inlet pipe is welded on one side of the upper end of the degumming tank, and a liquid inlet funnel is welded at the tail end of the liquid inlet pipe; and a liquid discharge pipe is welded at one side of the lower end of the degumming cylinder, and the tail end of the liquid discharge pipe is connected with a liquid discharge valve through threads.

In order to improve the stability and the security of whole device, conduct the utility model relates to an it is preferred, bottom plate welded fastening is in the top of frame, and there is the lower margin bottom of frame through bolted connection, does not add the injecing to the kind of lower margin, in this embodiment, and is preferred, and the kind of lower margin is heavy load type.

Compared with the prior art, the beneficial effects of the utility model are that:

1. through setting up motor two, drive flexible joint for fixing the cutting silicon rod on the silicon rod chuck and can rotating, make the silicon rod stir in the degumming liquid, the degumming agent fully reacts with single crystal silicon rod, has improved the efficiency and the quality of coming unstuck.

2. Through setting up motor one, the motor rotates and drives the turbofan connecting rod and connect the turbofan, stirs the degumming liquid in the degumming jar, and the direction of rotation is opposite with single crystal silicon rod for active ingredient fully contacts between single crystal silicon rod in the degumming liquid, strengthens the effect of coming unstuck.

3. The whole feeding frame can move in the vertical direction of the vertical frame by arranging the screw rod, when the device is used, the silicon rod is firstly arranged in place, and the motor III works to enable the silicon rod to enter the degumming liquid; after the degumming work of a group of single crystal silicon rods is finished, the motor is reversely rotated, the feeding frame is lifted to separate the silicon rods from the degumming liquid, and the silicon rods are convenient to replace by field workers.

4. By arranging the liquid inlet funnel and the liquid discharge valve, when the degumming liquid needs to be filled in the degumming cylinder, the liquid discharge valve is closed, and the degumming liquid is filled in the liquid inlet funnel, so that the working early-stage conditions of the device are perfected; when the device is in pause, the drain valve is opened to discharge waste liquid in the cylinder, so that field workers can clean the degumming cylinder conveniently.

5. After the degumming liquid is filled in the device, the whole weight is increased, and the stability and the safety of the whole device are improved by arranging the ground feet and the welding frame.

Drawings

The accompanying drawings are included to provide a further understanding of the invention, and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention, and together with the description serve to explain the invention and not to limit the invention. In the drawings:

FIG. 1 is a schematic sectional view of the main structure of the present invention;

fig. 2 is an axial schematic view of the main structure of the present invention;

FIG. 3 is a schematic structural view of a part of a stand according to the present invention;

FIG. 4 is a schematic view of a silicon rod chuck according to the present invention;

fig. 5 is a schematic structural view of a part of the degumming tank of the present invention;

in the figure: 1-a bottom plate; 2-a frame; 3-ground feet; 4, a first motor; 5, a first speed reducer; 6-turbofan connecting rod; 7-a turbofan; 8-a liquid discharge pipe; 9-a drain valve; 10-a liquid inlet pipe; 11-a liquid inlet funnel; 12-a degumming cylinder; 13-silicon rod chuck; 14-a fixed plate; 15-a flexible joint; 16-a feeding frame; 17-a second speed reducer; 18-motor two; 19-nut connecting block; 20-a slide rail; 21-a slide block; 22-motor three; 23-speed reducer III; 24-a coupling; 25-screw fixation side; 26-a screw rod; 27-lead screw nut bracket; 28-lead screw support side; 29-a vertical frame; 30-support.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

Referring to fig. 1-5, the present invention provides the following technical solutions: the automatic feeding device comprises a bottom plate 1, wherein a support 30 is fixed at the upper end of the bottom plate 1 through a bolt, a vertical frame 29 is welded at the top end of the support 30, a slide rail 20 is fixed at one side of the vertical frame 29 through a bolt, a slide block 21 is used in cooperation with the slide rail 20, the end face of the slide block 21 is connected with a feeding frame 16 through a bolt, the upper end of the feeding frame 16 is connected with a second speed reducer 17 through a bolt, the input shaft of the second speed reducer 17 is connected with the output shaft of a second motor 18, and the second motor 18 is fixed; the output shaft of the second speed reducer 17 is fixedly connected with a flexible joint 15, the lower end of the flexible joint 15 is connected with a fixing plate 14 through a bolt, the lower end of the fixing plate 14 is connected with silicon rod chucks 13 through bolts, the number of the silicon rod chucks 13 is not limited, and in the embodiment, the number of the silicon rod chucks 13 is preferably six.

The utility model discloses an in the embodiment, through setting up two 18 of motors, drive flexible joint 15 for fix the cutting silicon rod on silicon rod chuck 13 and can rotate, make the silicon rod mix in the degumming liquid, the degumming liquid fully reacts with single crystal silicon rod, has improved the efficiency and the quality of coming unstuck.

Specifically, a degumming cylinder 12 is fixed at the upper end of the bottom plate 1 through a bolt, a turbofan connecting rod 6 is rotatably connected at the bottom end of the degumming cylinder 12, and a turbofan 7 is connected at the upper end of the turbofan connecting rod 6 through threads; the lower end of the turbofan connecting rod 6 is connected with an output shaft of a first speed reducer 5 through a key, the first speed reducer 5 is connected with an output shaft of a first motor 4 through a key, and the first motor 4 is fixed at the top end of the first speed reducer 5 through a bolt.

In this embodiment: through setting up motor 4, motor 4 rotates and drives turbofan connecting rod 6 and connect turbofan 7, stirs the degumming liquid in the degumming jar 12, and the rotation direction is opposite with the motion direction of single crystal silicon rod for active ingredient fully contacts between single crystal silicon rod in the degumming liquid, strengthens the effect of coming unstuck.

Specifically, the inner side of the vertical frame 29 is connected with a screw rod fixing side 25 through a bolt, a screw rod 26 is used on the screw rod fixing side in a matched mode, a screw rod supporting side 28 is used at the tail end of the screw rod 26 in a matched mode, the top end of the screw rod 26 is connected with a coupler 24 through a key, the coupler 24 is connected with an output shaft of a speed reducer III 23 through a key, the speed reducer III 23 is connected with an output shaft of a motor III 22 through a key, and the motor III 22 is fixed at the top end of the speed reducer; the middle of the screw rod 26 is connected with a screw rod and nut support 27 through a bolt, the screw rod and nut support 27 is connected with a nut connecting block 19 through a bolt, and the nut connecting block 19 is welded on one side of the feeding frame 16.

In this embodiment: by arranging the screw rod 26, the whole feeding frame 16 can move in the vertical direction of the vertical frame 29, when the device is used, the silicon rod is firstly arranged in place, the motor III 22 works, and the feeding frame 16 is lowered to enable the silicon rod to enter degumming liquid; after the degumming work of a group of single crystal silicon rods is finished, the third motor 22 is rotated reversely, and the feeding frame 16 is lifted to separate the silicon rods from the degumming liquid, so that field workers can conveniently replace the silicon rods.

Specifically, a liquid inlet pipe 10 is welded on one side of the upper end of the degumming cylinder 12, and a liquid inlet funnel 11 is welded at the tail end of the liquid inlet pipe 10; a liquid discharge pipe 8 is welded at one side of the lower end of the degumming cylinder 12, and the tail end of the liquid discharge pipe 8 is connected with a liquid discharge valve 9 through threads.

In this embodiment: by arranging the liquid inlet funnel 11 and the liquid discharge valve 9, when the degumming liquid is required to be filled in the degumming tank 12, the liquid discharge valve 9 is closed, and the degumming liquid is filled from the liquid inlet funnel 11, so that the earlier stage condition of the device is perfected; when the device stops working, the liquid discharge valve 9 is opened to discharge waste liquid in the cylinder, so that field workers can clean the degumming cylinder 12 conveniently.

Specifically, 1 welded fastening of bottom plate is on the top of frame 2, and there is lower margin 3 bottom of frame 2 through bolted connection, does not add the restriction to the kind of lower margin 3, and in this embodiment, preferred, the kind of lower margin 3 is heavily loaded type.

In this embodiment: after the degumming liquid is filled in the device, the whole weight is increased, and the stability and the safety of the whole device are improved by arranging the ground feet 3 and the welding frame 2.

The utility model discloses a theory of operation and use flow: the height of the ground feet 3 is adjusted, the machine frame 2 is connected, the bottom plate 1 is ensured to be in a horizontal state, degumming liquid is filled from a liquid inlet funnel 11 and enters a degumming cylinder 12 through a liquid inlet pipe 8; a silicon rod to be degummed is mounted on the silicon rod chuck 13; the upper end of the bottom plate 1 is provided with a support 30, the support 30 is provided with a vertical frame 29, and the inner side of the vertical frame 29 is fixed with a screw rod fixing side 25 and a screw rod supporting side 28; when the device is started, the motor III 22 drives the speed reducer 23 to drive the coupler 24, so that the screw rod 26 rotates, and the feeding frame 16 is driven to move downwards through the combined mechanism of the screw rod and nut bracket 27 and the connecting block 19; after the silicon rod is wholly immersed in the degumming liquid, starting a motor I4 to drive a speed reducer I5, connecting a turbofan connecting rod 6 and a turbofan 7, and stirring the degumming liquid; meanwhile, the second motor 18 is started to drive the second speed reducer 17 to be connected with the fixing plate 14 through the flexible joint 15, so that the group of silicon rods rotates in the degumming solution; after the degumming work is finished, the second motor 18 and the first motor 4 stop working, the third motor 22 rotates reversely, the feeding frame 16 is lifted to the original position, the silicon rod is replaced by the worker, the liquid discharge valve 9 is opened, and waste liquid in the cylinder is discharged through the liquid discharge pipe 8.

Finally, it should be noted that: although the present invention has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that modifications may be made to the embodiments described in the foregoing embodiments, or equivalents may be substituted for elements thereof. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. The utility model provides a water degumming device after silicon rod cutting which characterized in that: the device comprises a bottom plate (1), a support (30) is fixed at the upper end of the bottom plate (1) through a bolt, a vertical frame (29) is welded at the top end of the support (30), a sliding rail (20) is fixed at one side of the vertical frame (29) through a bolt, a sliding block (21) is used in cooperation with the sliding rail (20), the end face of the sliding block (21) is connected with a feeding frame (16) through a bolt, a second speed reducer (17) is connected at the upper end of the feeding frame (16) through a bolt, an input shaft of the second speed reducer (17) is connected with an output shaft of a second motor (18), and the second motor (18) is fixed at the; an output shaft of the second speed reducer (17) is fixedly connected with a flexible joint (15), the lower end of the flexible joint (15) is connected with a fixing plate (14) through a bolt, and the lower end of the fixing plate (14) is connected with a silicon rod chuck (13) through a bolt.

2. The water-based degumming device for silicon rod cutting according to claim 1, characterized in that: the upper end of the bottom plate (1) is fixedly provided with a degumming cylinder (12) through bolts, the bottom end of the degumming cylinder (12) is rotatably connected with a turbofan connecting rod (6), and the upper end of the turbofan connecting rod (6) is connected with a turbofan (7) through threads; the lower end of the turbofan connecting rod (6) is connected with an output shaft of a first speed reducer (5) through a key, the first speed reducer (5) is connected with an output shaft of a first motor (4) through a key, and the first motor (4) is fixed to the top end of the first speed reducer (5) through a bolt.

3. The water-based degumming device for silicon rod cutting according to claim 1, characterized in that: the inboard of grudging post (29) has fixed side of lead screw (25) through bolted connection, the fixed side cooperation of lead screw is used and is had lead screw (26), the terminal cooperation of lead screw (26) is used and is had lead screw support side (28), the top of lead screw (26) is connected with shaft coupling (24) through the key-type, shaft coupling (24) are connected with the output shaft of three (23) of speed reducer through the key-type, three (23) of speed reducer are connected with the output shaft of three (22) of motor through the key-type, three (22) of motor are fixed in the top of three (23) of speed reducer.

4. The water-based degumming device for silicon rod cutting according to claim 3, characterized in that: the middle of the screw rod (26) is connected with a screw rod and nut support (27) through a bolt, the screw rod and nut support (27) is connected with a screw nut connecting block (19) through a bolt, and the screw nut connecting block (19) is welded on one side of the feeding frame (16).

5. The water-based degumming device for silicon rod cutting according to claim 2, characterized in that: a liquid inlet pipe (10) is welded on one side of the upper end of the degumming cylinder (12), and a liquid inlet funnel (11) is welded at the tail end of the liquid inlet pipe (10); a liquid discharge pipe (8) is welded at one side of the lower end of the degumming cylinder (12), and the tail end of the liquid discharge pipe (8) is connected with a liquid discharge valve (9) through threads.

6. The water-based degumming device for silicon rod cutting according to claim 1, characterized in that: the bottom plate (1) is welded and fixed on the top end of the rack (2), and the bottom end of the rack (2) is connected with ground feet (3) through bolts.