CN114153023A - Optical waveguide filter - Google Patents
Optical waveguide filter Download PDFInfo
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- CN114153023A CN114153023A CN202210120118.2A CN202210120118A CN114153023A CN 114153023 A CN114153023 A CN 114153023A CN 202210120118 A CN202210120118 A CN 202210120118A CN 114153023 A CN114153023 A CN 114153023A
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- 230000003287 optical effect Effects 0.000 title claims abstract description 235
- 239000000758 substrate Substances 0.000 claims abstract description 22
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 18
- CJNBYAVZURUTKZ-UHFFFAOYSA-N hafnium(iv) oxide Chemical compound O=[Hf]=O CJNBYAVZURUTKZ-UHFFFAOYSA-N 0.000 claims description 10
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 9
- 229920000642 polymer Polymers 0.000 claims description 9
- 239000000377 silicon dioxide Substances 0.000 claims description 9
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 9
- 238000005253 cladding Methods 0.000 claims description 8
- 235000012239 silicon dioxide Nutrition 0.000 claims description 6
- 230000005540 biological transmission Effects 0.000 claims description 5
- 229910052710 silicon Inorganic materials 0.000 claims description 5
- 239000010703 silicon Substances 0.000 claims description 5
- 229920003229 poly(methyl methacrylate) Polymers 0.000 claims description 4
- 229920001343 polytetrafluoroethylene Polymers 0.000 claims description 4
- 239000004810 polytetrafluoroethylene Substances 0.000 claims description 4
- GPXJNWSHGFTCBW-UHFFFAOYSA-N Indium phosphide Chemical compound [In]#P GPXJNWSHGFTCBW-UHFFFAOYSA-N 0.000 claims description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 3
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 claims description 3
- 239000004926 polymethyl methacrylate Substances 0.000 claims description 3
- 241000588731 Hafnia Species 0.000 claims description 2
- 238000004519 manufacturing process Methods 0.000 abstract description 12
- 230000002349 favourable effect Effects 0.000 abstract description 3
- 230000010354 integration Effects 0.000 abstract description 2
- 238000001914 filtration Methods 0.000 description 9
- 230000008878 coupling Effects 0.000 description 6
- 238000010168 coupling process Methods 0.000 description 6
- 238000005859 coupling reaction Methods 0.000 description 6
- 238000004891 communication Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 5
- 238000004364 calculation method Methods 0.000 description 3
- 230000001808 coupling effect Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 230000005684 electric field Effects 0.000 description 2
- 239000011810 insulating material Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 239000013307 optical fiber Substances 0.000 description 2
- 238000009826 distribution Methods 0.000 description 1
- 230000003631 expected effect Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 230000005693 optoelectronics Effects 0.000 description 1
- -1 polytetrafluoroethylene Polymers 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000004088 simulation Methods 0.000 description 1
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/12007—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12083—Constructional arrangements
- G02B2006/12109—Filter
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Optical Integrated Circuits (AREA)
Abstract
The application belongs to the technical field of optical integration, and discloses an optical waveguide filter which comprises a substrate and two strip-shaped optical waveguides, wherein the two strip-shaped optical waveguides are the same in shape and size, and are parallel to each other and symmetrically arranged on the upper surface of the substrate; the rectangular flat optical waveguide is arranged on the upper surface of the substrate; the panel optical waveguide is arranged between the two strip optical waveguides, two first edges of the panel optical waveguide are parallel to the strip optical waveguides, and the two first edges are two parallel edges of the panel optical waveguide; the strip optical waveguides and the panel optical waveguides have the same thickness, each first edge and the adjacent strip optical waveguides have the same gap, and light waves transmitted in the strip optical waveguides can be coupled into the panel optical waveguides; the optical waveguide filter has the advantages of simple structure and low manufacturing difficulty, and is favorable for reducing the manufacturing cost.
Description
Technical Field
The application relates to the technical field of optical integration, in particular to an optical waveguide filter.
Background
Optical integrated circuits and optoelectronic integrated circuits, in which high bit rate information is transmitted between active devices through low loss optical waveguides, are one of the solutions for the new generation of optical communication systems. In order to meet the basic requirements of optical communication, an optical waveguide filter is generally disposed in an optical integrated circuit to implement an optical wave filtering function, and a structure of the general optical waveguide filter is shown in fig. 5 and includes a substrate 90, two strip optical waveguides 91 and an optical waveguide micro-ring 92, where, to ensure a filtering effect of the optical waveguide filter, the requirement on the dimensional accuracy of the optical waveguide micro-ring 92 is high, which results in a high manufacturing difficulty of the optical waveguide filter, a low manufacturing fault-tolerant rate, and a high manufacturing cost.
Disclosure of Invention
An object of the application is to provide an optical waveguide filter, its manufacturing difficulty is less, is favorable to reducing manufacturing cost.
The application provides an optical waveguide filter, which comprises a substrate and two strip-shaped optical waveguides, wherein the two strip-shaped optical waveguides are the same in shape and size, and are arranged on the upper surface of the substrate in parallel and symmetrically; the rectangular flat optical waveguide is arranged on the upper surface of the substrate; the panel optical waveguide is arranged between the two strip optical waveguides, two first edges of the panel optical waveguide are parallel to the strip optical waveguides, and the two first edges are two parallel edges of the panel optical waveguide;
the strip optical waveguides and the plate optical waveguides are the same in thickness, the same gap is reserved between each first edge and the adjacent strip optical waveguides, and light waves transmitted in the strip optical waveguides can be coupled into the plate optical waveguides.
When the optical waveguide filter is used, light waves are input from one end of one strip-shaped optical waveguide, the light waves with specific wavelengths are coupled between the strip-shaped optical waveguide and the flat plate optical waveguide of the input light waves and form a multi-mode field in the flat plate optical waveguide, and finally the light waves are output from one end of the other strip-shaped optical waveguide to complete the function of optical wave filtering.
Preferably, the gap is greater than 0 and no greater than 240 nm. Therefore, effective coupling between the strip-shaped optical waveguide and the flat optical waveguide can be realized.
Preferably, the gap is 20 nm.
Preferably, the length of the strip-shaped optical waveguide is greater than that of the first edge, and the central points of the two strip-shaped optical waveguides and the central point of the flat optical waveguide are on the same straight line.
Preferably, the dimensions of the strip-shaped optical waveguide satisfy the following single-mode optical wave transmission conditions:
max（w，2h）<λ/n<2w；
wherein w is the width of the strip-shaped optical waveguide, h is the thickness of the strip-shaped optical waveguide, λ is the wavelength of the working light wave in vacuum, and n is the refractive index of the strip-shaped optical waveguide.
Preferably, the strip-shaped optical waveguide has a width of not more than 300 nm. So as to further ensure the effective coupling between the strip optical waveguide and the flat optical waveguide.
Preferably, the strip-shaped optical waveguide has a width of 240nm and a thickness of 220 nm.
Preferably, the upper surfaces of the strip optical waveguide and the slab optical waveguide are provided with a cladding layer.
Preferably, the substrate is made of silicon dioxide, hafnium dioxide or silicon nitride, and the strip optical waveguide and the plate optical waveguide are made of silicon, silicon nitride, indium phosphide or lithium niobate.
Preferably, the cladding is made of silica, hafnia, silicon nitride, SU8 polymer, PMMA polymer or PTFE polymer.
Has the advantages that:
the application provides an optical waveguide filter, during the use from one end input light wave of one of them strip optical waveguide, the light wave of specific wavelength that contains can couple between the strip optical waveguide of input light wave and slab optical waveguide and form the multimode field in slab optical waveguide, can export from the one end of another strip optical waveguide finally, accomplishes the function of light wave filtering, compares with prior art, and the structure is simpler, and the manufacturing difficulty is littleer, is favorable to reducing manufacturing cost.
Additional features and advantages of the application will be set forth in the description which follows, and in part will be obvious from the description, or may be learned by the practice of the application.
Drawings
Fig. 1 is a schematic structural diagram of an optical waveguide filter according to an embodiment of the present application.
Fig. 2 is a top view of an optical waveguide filter according to an embodiment of the present application.
Fig. 3 is a graph of the results of a calculation of the wavelength selective effect of an exemplary optical waveguide filter.
Fig. 4 is an optical field profile of an exemplary optical waveguide filter.
Fig. 5 is a schematic structural diagram of a conventional optical waveguide filter.
Description of reference numerals: 1. a substrate; 2. a strip-shaped optical waveguide; 3. a flat optical waveguide; 301. a first edge; 4. a gap.
Detailed Description
The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application, and it is obvious that the described embodiments are only a part of the embodiments of the present application, and not all of the embodiments. The components of the embodiments of the present application, generally described and illustrated in the figures herein, can be arranged and designed in a wide variety of different configurations. Thus, the following detailed description of the embodiments of the present application, presented in the accompanying drawings, is not intended to limit the scope of the claimed application, but is merely representative of selected embodiments of the application. All other embodiments, which can be derived by a person skilled in the art from the embodiments of the present application without making any creative effort, shall fall within the protection scope of the present application.
It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, it need not be further defined and explained in subsequent figures. Meanwhile, in the description of the present application, the terms "first", "second", and the like are used only for distinguishing the description, and are not to be construed as indicating or implying relative importance.
Referring to fig. 1-2, an optical waveguide filter in some embodiments of the present application includes a substrate 1 and two strip optical waveguides 2, the two strip optical waveguides 2 have the same shape and size, and the two strip optical waveguides 2 are parallel to each other and symmetrically disposed on an upper surface of the substrate 1; the optical waveguide further comprises a rectangular flat optical waveguide 3 arranged on the upper surface of the substrate 1; the flat optical waveguide 3 is disposed between the two strip optical waveguides 2, two first edges 301 of the flat optical waveguide 3 are parallel to the strip optical waveguides 2 (specifically, parallel to the central axis of the strip optical waveguides 2), and the two first edges 301 are two of the parallel edges of the flat optical waveguide 3 (for convenience of description, the other two edges of the flat optical waveguide 3 are hereinafter referred to as second edges);
the strip-shaped optical waveguides 2 and the plate optical waveguides 3 have the same thickness, and each first edge 301 has the same gap 4 (see fig. 2) with the adjacent strip-shaped optical waveguide 2, so that light waves transmitted in the strip-shaped optical waveguides 2 can be coupled into the plate optical waveguides 3.
When the optical waveguide filter is used, light waves (generally including light with multiple wavelengths in a certain wavelength range) are input from one end of one strip-shaped optical waveguide 2, the light waves with specific wavelengths included in the light waves are coupled between the strip-shaped optical waveguide 2 and the plate optical waveguide 3 of the input light waves and form a multi-mode field in the plate optical waveguide 3, and finally the light waves are output from one end of the other strip-shaped optical waveguide 2 (the light waves in the plate optical waveguide 3 are coupled into the other strip-shaped optical waveguide again), so that the function of optical wave filtering is completed.
In fact, the light waves are in the same direction at the input end of the strip optical waveguide 2 and at the output end of the other strip optical waveguide 2, for example, in the optical waveguide filter shown in fig. 2, if a light wave is input from the lower end of the left strip optical waveguide 2 (i.e., the input end is the lower end), a light wave is finally output from the lower end of the right strip optical waveguide 2 (i.e., the output end is also the lower end).
Preferably, the gap 4 nm is larger than 0 and not larger than 240nm (meaning that the width of the gap 4 is larger than 0 and not larger than 240nm, i.e., the distance between the first edge 301 and the adjacent strip-shaped optical waveguide 2 is larger than 0 and not larger than 240 nm). The gap 4 is within this range, which ensures effective coupling between the strip optical waveguide 2 and the slab optical waveguide 3. Preferably, the gap 4 is 20nm, which has a good coupling effect for a wavelength band commonly used in optical communication.
Wherein, the length of the strip-shaped optical waveguide 2 can be set according to actual needs. Preferably, the length of the strip-shaped optical waveguides 2 is greater than that of the first edge 301, and the central points of the two strip-shaped optical waveguides 2 and the central point of the flat optical waveguide 3 are on the same straight line; the coupling effect is better, and the energy loss caused by coupling is favorably reduced. But the relative positional relationship between the strip optical waveguide 2 and the flat optical waveguide 3 is not limited thereto.
In some preferred embodiments, the dimensions of the strip-shaped optical waveguide 2 satisfy the following single-mode lightwave transmission conditions:
max（w，2h）<λ/n<2w；
wherein w is the width of the strip-shaped optical waveguide 2, h is the thickness of the strip-shaped optical waveguide 2, λ is the wavelength of the working light wave in vacuum, and n is the refractive index of the strip-shaped optical waveguide 2. The cross section of the strip-shaped optical waveguide 2 is rectangular, the length of an edge parallel to the upper surface of the substrate 1 in the cross section is the width w, the length of an edge perpendicular to the upper surface of the substrate 1 in the cross section is the thickness h, the refractive index n depends on the material of the strip-shaped optical waveguide 2, the working optical wave is the optical wave which needs to be reserved after filtering, and the width and the thickness of the working optical wave can be set according to the wavelength of the working optical wave and the type of the material of the strip-shaped optical waveguide 2. In practical applications, the input light wave and the output light wave are generally transmitted through a single-mode optical fiber, and therefore, if the optical waveguide filter is to be used with a single-mode optical fiber, the size of the strip-shaped optical waveguide 2 is required to satisfy the above-mentioned single-mode light wave transmission condition.
In the case where this single-mode optical wave transmission condition is satisfied, it is preferable that the width of the strip-shaped optical waveguide 2 is not more than 300 nm. In fact, when the width of the strip optical waveguide 2 is greater than 300nm, the coupling effect between the strip optical waveguide 2 and the slab optical waveguide 3 is poor, and the energy loss caused by the coupling is large, and here, setting the width of the strip optical waveguide 2 within 300nm can further ensure the effective coupling between the strip optical waveguide 2 and the slab optical waveguide 3.
Wherein, the thickness of the strip-shaped optical waveguide 2 and the plate optical waveguide 3 can be set according to actual needs. For example, in some embodiments, the strip-shaped optical waveguides 2 have a width of 240nm and a thickness of 220 nm.
The lengths of the first edge 301 and the second edge may be set according to implementation requirements, and the lengths of the first edge 301 and the second edge may be equal or unequal; for example, in some embodiments, the first edge 301 and the second edge are both 2000nm in length.
In practical applications, since the refractive indexes of the strip optical waveguide 2 and the slab optical waveguide 3 are generally larger than the refractive index of air, even if no cladding is provided on the upper surfaces of the strip optical waveguide 2 and the slab optical waveguide 3, the total reflection of the light waves at the upper surfaces of the strip optical waveguide 2 and the slab optical waveguide 3 can be ensured, thereby preventing the light waves from being transmitted out from the upper surfaces. More preferably, however, the upper surfaces of the strip optical waveguides 2 and the slab optical waveguides 3 are provided with cladding layers, so that energy loss due to the light waves coming out of the upper surfaces can be more reliably avoided.
In general, the substrate 1 may be made of an oxide insulating material (e.g., silicon dioxide, hafnium dioxide, or silicon nitride), and the strip optical waveguide 2 and the plate optical waveguide 3 are each made of silicon, silicon nitride, indium phosphide, lithium niobate, or other semiconductor materials. For example, in the present embodiment, the substrate 1 is made of silicon dioxide, and the strip optical waveguides 2 and the slab optical waveguides 3 are made of silicon.
Typically, the cladding is made of an oxide insulating material (e.g., silicon dioxide, hafnium dioxide, or silicon nitride) or a polymer, such as SU8 polymer, PMMA (polymethyl methacrylate) polymer, or PTFE (polytetrafluoroethylene) polymer.
In a specific embodiment, the strip optical waveguide 2 and the slab optical waveguide 3 of the optical waveguide filter are both made of silicon and have a thickness of 220nm, wherein the width of the strip optical waveguide 2 is 240nm, the lengths of the first edge 301 and the second edge of the slab optical waveguide 3 are both 2000nm, the gap 4 between the first edge 301 and the adjacent strip optical waveguide 2 is 20nm, and the central points of the two strip optical waveguides 2 and the central point of the slab optical waveguide 3 are on the same straight line; the substrate 1 is made of silicon dioxide, and two end faces in the length direction of the strip-shaped optical waveguide 2 are respectively aligned with two edges of the substrate 1; the cladding is made of silica. Calculating the wavelength selection performance of the optical waveguide filter by utilizing time domain finite difference method Rsoft simulation software (sequentially inputting light waves with different wavelengths into the optical waveguide filter and calculating the light wave energy of the output light wave), wherein the calculation result is shown in FIG. 3, the abscissa in the figure is the wavelength, the unit is micrometer, and the ordinate is normalized light wave energy at the output end (the value is equal to the energy of the output light wave divided by the energy of the input light wave); when the input light wave is transverse electric field gaussian light wave with the wavelength of 1627.47nm, the light field profile obtained by simulation calculation based on the finite difference time domain method Rsoft simulation software is shown in fig. 4 (X, Z in the figure are two coordinates of the plane coordinate system of the light field profile).
In practical applications, in order to meet the basic requirements of optical communication, the wavelength of light waves in an optical integrated circuit is usually in the O band (1260 nm-1360 nm), the E band (1360 nm-1460 nm), the S band (1460 nm-1530 nm), the C band (1530 nm-1565 nm), the L band (1565 nm-1625 nm), or the U band (1625 nm-1675 nm), and as can be seen from fig. 3, the optical waveguide filter has a good wavelength selection effect in the wavelength band of the E, S, C, L, U communication band and has a good filtering effect. As can be seen from fig. 4, when a transverse electric field gaussian optical wave with a wavelength of 1627.47nm is used as an input optical wave, from the perspective of an optical field distribution diagram, the optical wave is input from one strip-shaped optical waveguide 2, coupled through the flat optical waveguide 3, and finally output from the other strip-shaped optical waveguide 2, which meets the expected effect of design, and can realize a filtering function.
In summary, the optical waveguide filter enables the light wave with a specific wavelength to be coupled between the two waveguides and form a multi-mode field in the slab optical waveguide 3 through the reasonable design of the parameters of the strip optical waveguide 2 and the slab optical waveguide 3, and finally enables the light wave with the specific wavelength to be output from the output port, thereby realizing the function of optical wave filtering; the invention replaces the optical waveguide micro-ring structure in the traditional optical wave filter by introducing the flat optical waveguide 3, thereby greatly reducing the manufacturing difficulty of the optical filter while obtaining good wavelength selection effect; the optical waveguide filter is easy to manufacture, compact and novel in structure, realizes better functions of optical waveguide filter devices, is integrated and applied to an optical integrated chip, can improve the production efficiency of the chip, and has high practical application value.
The above description is only an example of the present application and is not intended to limit the scope of the present application, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, improvement and the like made within the spirit and principle of the present application shall be included in the protection scope of the present application.
Claims (10)
1. An optical waveguide filter comprises a substrate (1) and two strip-shaped optical waveguides (2), wherein the two strip-shaped optical waveguides (2) are the same in shape and size, and the two strip-shaped optical waveguides (2) are parallel to each other and symmetrically arranged on the upper surface of the substrate (1); the device is characterized by further comprising a rectangular flat optical waveguide (3) arranged on the upper surface of the substrate (1); the flat optical waveguide (3) is arranged between the two strip optical waveguides (2), two first edges (301) of the flat optical waveguide (3) are parallel to the strip optical waveguides (2), and the two first edges (301) are two parallel edges of the flat optical waveguide (3);
the strip-shaped optical waveguides (2) and the plate optical waveguides (3) have the same thickness, each first edge (301) and the adjacent strip-shaped optical waveguides (2) have the same gap (4), and light waves transmitted in the strip-shaped optical waveguides (2) can be coupled into the plate optical waveguides (3).
2. Optical waveguide filter according to claim 1, characterized in that the gap (4) is larger than 0nm and not larger than 240 nm.
3. Optical waveguide filter according to claim 2, characterized in that the gap (4) is 20 nm.
4. Optical waveguide filter according to claim 1, characterized in that the strip optical waveguides (2) have a length greater than the length of the first edge (301), and that the centre points of the two strip optical waveguides (2) and the centre points of the plate optical waveguides (3) are collinear.
5. The optical waveguide filter according to claim 1, characterized in that the dimensions of the strip optical waveguide (2) satisfy the following single-mode lightwave transmission conditions:
max（w，2h）<λ/n<2w；
wherein w is the width of the strip-shaped optical waveguide (2), h is the thickness of the strip-shaped optical waveguide (2), λ is the wavelength of the working light wave in vacuum, and n is the refractive index of the strip-shaped optical waveguide (2).
6. Optical waveguide filter according to claim 5, characterized in that the width of the strip-shaped optical waveguide (2) is not more than 300 nm.
7. The optical waveguide filter according to claim 6, characterized in that the strip-shaped optical waveguides (2) have a width of 240nm and a thickness of 220 nm.
8. Optical waveguide filter according to claim 1, characterized in that the upper surfaces of the strip optical waveguides (2) and the slab optical waveguides (3) are provided with cladding layers.
9. Optical waveguide filter according to claim 1, characterized in that the substrate (1) is made of silicon dioxide, hafnium dioxide or silicon nitride, and the strip optical waveguides (2) and the plate optical waveguides (3) are made of silicon, silicon nitride, indium phosphide or lithium niobate.
10. The optical waveguide filter of claim 8 wherein the cladding is made of silica, hafnia, silicon nitride, SU8 polymer, PMMA polymer, or PTFE polymer.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202210120118.2A CN114153023B (en) | 2022-02-09 | 2022-02-09 | Optical waveguide filter |
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| CN202210120118.2A CN114153023B (en) | 2022-02-09 | 2022-02-09 | Optical waveguide filter |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114755756A (en) * | 2022-04-25 | 2022-07-15 | 季华实验室 | Microcavity optical filter based on planar optical waveguide |
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| JPH1172633A (en) * | 1997-08-29 | 1999-03-16 | Nippon Telegr & Teleph Corp <Ntt> | Optical waveguide type filter |
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| CN112649918A (en) * | 2021-01-22 | 2021-04-13 | 杭州芯耘光电科技有限公司 | Edge coupler |
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2022
- 2022-02-09 CN CN202210120118.2A patent/CN114153023B/en active Active
Patent Citations (5)
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|---|---|---|---|---|
| JPH1172633A (en) * | 1997-08-29 | 1999-03-16 | Nippon Telegr & Teleph Corp <Ntt> | Optical waveguide type filter |
| US6097865A (en) * | 1998-07-21 | 2000-08-01 | Lucent Technologies Inc. | Design and method for planar coupled waveguide filter |
| CN106950646A (en) * | 2017-03-02 | 2017-07-14 | 西安工程大学 | A kind of inside and outside double micro-ring resonator structures |
| CN107942442A (en) * | 2017-12-05 | 2018-04-20 | 青岛海信宽带多媒体技术有限公司 | A kind of coupler and optical module |
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| Title |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114755756A (en) * | 2022-04-25 | 2022-07-15 | 季华实验室 | Microcavity optical filter based on planar optical waveguide |
| CN114755756B (en) * | 2022-04-25 | 2023-06-02 | 季华实验室 | Micro-cavity optical filter based on planar optical waveguide |
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| CN114153023B (en) | 2022-05-03 |
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