CN114141568A

CN114141568A - Electric switch device of film growth equipment cavity

Info

Publication number: CN114141568A
Application number: CN202111427198.8A
Authority: CN
Inventors: 蔡宇航; 金補哲; 叶新浩; 厉冰峰
Original assignee: SGS Ningbo Semiconductor Technology Co Ltd
Current assignee: SGS Ningbo Semiconductor Technology Co Ltd
Priority date: 2021-11-28
Filing date: 2021-11-28
Publication date: 2022-03-04
Anticipated expiration: 2041-11-28
Also published as: CN114141568B

Abstract

The invention discloses an electric switch device of a film growth equipment cavity, comprising: the device comprises a device body, wherein a base is installed at the bottom of the device body, an inner cavity is formed in the middle of the top surface of the device body, an upper cover is arranged above the device body, and an electric rocker assembly is fixedly connected to the side wall of the device body; the electric rocker assembly comprises a fixed box, a motor, a supporting block and an electric motor, the electric motor and the fixed box are fixedly connected with the side wall of the device body, the fixed box is arranged on the outer side of the electric motor, the motor is arranged at the bottom of the fixed box, and the power output end of the motor and the power input end of the electric motor are respectively provided with a gear and are connected with the two gears in a meshed mode. The electric rocker is simple to operate, the switch of the cavity can be controlled only by clicking the switch on the remote sensor, the remote sensor is provided with the power supply extension line, the cavity switch can be controlled without contacting the cavity, and some sudden situations are avoided.

Description

Electric switch device of film growth equipment cavity

Technical Field

The invention relates to the technical field of film growth equipment, in particular to an electric switch device of a film growth equipment cavity.

Background

A metal organic compound chemical vapor deposition device is a key device for preparing a light emitting diode semiconductor laser and a high-power electronic device, and particularly has wide application prospect and market demand In the aspect of preparing a GaN-based LED, In the prior art, most of film growth of the GaN-based LED utilizes MOCVD equipment to grow a layer of gallium nitride or aluminum nitride buffer layer on a sapphire substrate, then InGaN/AIGaN heterojunction doped with elements such as MgA1, In and the like is grown on the buffer layer to form a P-N junction light emitting layer, when the film is grown by adopting the MOCVD equipment, carrying gas and various source materials are required to be introduced into a reaction chamber, wherein the source materials comprise metal organic compounds (MO) and a gas source, the metal organic compounds and the gas source are materials which participate In chemical reaction and contain the components of the source materials In a resultant, the carrying gas comprises nitrogen, hydrogen, inert gases and the like, and the carrying gas only carries the source materials into the reaction chamber, do not participate in chemical reactions per se

At present, the existing growth equipment has the following problems: most adopt hand formula hydraulic stem, rely on the manual work to open the cavity completely, labour cost is high, and is efficient, takes place proruption situation easily. For this reason, a new scheme needs to be designed to give improvements.

Disclosure of Invention

The invention aims to provide an electric switch device for a cavity of film growing equipment, which solves the problems that the existing growing equipment adopts a hand-operated hydraulic rod, the cavity is opened completely by manpower, the labor cost is high, the efficiency is low, and sudden situations are easy to occur, and meets the actual use requirements.

In order to achieve the purpose, the invention provides the following technical scheme: an electrical switching apparatus for a thin film growth apparatus chamber, comprising: the device comprises a device body, wherein a base is installed at the bottom of the device body, an inner cavity is formed in the middle of the top surface of the device body, an upper cover is arranged above the device body, and an electric rocker assembly is fixedly connected to the side wall of the device body;

the electric rocker assembly comprises a fixed box, a motor, a supporting block and an electric motor, wherein the electric motor and the fixed box are fixedly connected with the side wall of the device body, the fixed box is arranged on the outer side of the electric motor, the motor is arranged at the bottom of the fixed box, a power output end of the motor and a power input end of the electric motor are respectively provided with a gear, and the two gears are meshed and connected;

the air guide device is characterized in that air guide covers are respectively formed on the bottom surface of the upper cover and the top surface of the device body, air openings are respectively formed in opposite surfaces of the two air guide covers, the edges of the opposite surfaces of the two air guide covers are close to the edges, an air box is installed at the top of the upper cover, air guide pipes are fixed on the side walls of the air box, the air guide pipes are of inverted L-shaped structures, the end portions of the air guide pipes extend to the outer side of the upper cover, air return pipes are installed on the bottom surfaces of the air guide pipes, and the tail ends of the air return pipes are connected with the base and communicated with the inside of the base.

As a preferred embodiment of the present invention, a plurality of air guide columns are equidistantly arranged on an outer wall of the device body, a cross section of each air guide column is in a semicircular structure, and a plurality of partition plates are vertically arranged inside each air guide column.

In a preferred embodiment of the present invention, one end of each of the partition plates is connected to an inner wall of the air guide column, and the other end is connected to an outer wall of the apparatus body in a perpendicular manner, and a vent hole is formed between adjacent partition plates.

In a preferred embodiment of the present invention, an air guide passage is formed between the air box and the device body, the air guide passage is communicated with an air opening of the upper cover, and a fan and a filter plate are mounted at a lower end of the air box.

In a preferred embodiment of the present invention, the inner top surface of the air box is provided with an air guide projection, and the air guide projection has a downwardly convex conical structure.

In a preferred embodiment of the present invention, the support block is mounted on a side wall of the apparatus body and located below the electric motor, the electric motor is mounted with a hydraulic rod, and the side wall of the apparatus body and located on a movement track of the hydraulic rod is mounted with a limit switch.

As a preferred embodiment of the present invention, two side walls of the upper cover are respectively formed with a top block, and the middle of the bottom surface of the top block is connected to the upper end of the hydraulic rod.

As a preferred embodiment of the present invention, the top surface of the device body near the corners is respectively provided with positioning holes, and the bottom of the upper cover is provided with four positioning posts corresponding to the positioning holes.

As a preferred embodiment of the present invention, the fixing box is provided with a placing box at both sides thereof, and the placing box and the fixing box are both made of acrylic material.

Compared with the prior art, the invention has the following beneficial effects:

according to the invention, manual operation in the prior art is replaced by an electric mode, the electric rocker is simple to operate, convenient and quick, the switch of the cavity can be controlled by only clicking the switch on the remote sensor, the remote sensor is provided with the power supply extension line, the cavity switch can be controlled without contacting with the cavity, the occurrence of some sudden conditions (such as scald caused by contact between the outer wall of the cavity and the skin, and suction of the reaction gas in the cavity without evacuation) is avoided, the working safety coefficient of personnel is greatly enhanced, and meanwhile, the equipment is simple in structure, is arranged outside the cavity and is easy to maintain. The labor cost is reduced, the working progress is accelerated, and the safety factor is higher.

Drawings

FIG. 1 is a structural diagram of an electric switch device of a cavity of a film growing apparatus according to the present invention;

FIG. 2 is a block diagram of the electric rocker assembly of the present invention;

FIG. 3 is an internal structural view of the upper cover according to the present invention;

fig. 4 is a structural view of the wind guide post according to the present invention.

In the figure, 1, a base; 2. a device body; 3. an electric rocker assembly; 4. an upper cover; 5. positioning holes; 6. a top block; 7. an air guide pipe; 8. an air box; 9. a wind scooper; 10. a tuyere; 11. a wind guide post; 12. a return air duct; 13. an air guide flow channel; 14. an air guide lug; 15. a fan; 16. a hydraulic lever; 17. a limit switch; 18. an electric motor; 19. placing the box; 20. a support block; 21. a fixing box; 22. a motor; 23. a vent hole; 24. a separator.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

Referring to fig. 1-4, the present invention provides a technical solution: an electrical switching apparatus for a thin film growth apparatus chamber, comprising: the device comprises a device body 2, wherein a base 1 is installed at the bottom of the device body 2, an inner cavity is formed in the middle of the top surface of the device body 2, an upper cover 4 is arranged above the device body 2, an electric rocker component 3 is fixedly connected to the side wall of the device body 2, the upper cover 4 is positioned above the device body 2, and the upper cover 4 is driven to move in height through the electric rocker component 3, so that a cavity is opened, and personnel are far away from equipment when the cavity is opened, and the personnel are prevented from being injured;

the electric rocker component 3 comprises a fixed box 21, a motor 22, a supporting block 20 and an electric motor 18, the electric motor 18 and the fixed box 21 are fixedly connected with the side wall of the device body 2, the fixed box 21 is arranged on the outer side of the electric motor 18, the motor 22 is arranged at the bottom of the fixed box 21, a power output end of the motor 22 and a power input end of the electric motor 18 are respectively provided with a gear, the two gears are meshed and connected, the motor 22 drives the input end of the electric motor 18 to rotate, the electric motor 18 drives the hydraulic rod 16 to ascend and jack the upper cover 4, the electric rocker component 3 further comprises a controller and a remote controller for driving the motor 22, and the remote controller can be placed in the placement box 19 for storage;

the bottom surface of upper cover 4 and the top surface of device body 2 are formed with wind scooper 9 respectively, wind scooper 9 has played the effect of air guide, the opposite face of two wind scoopers 9 is close to the edge and is provided with wind gap 10 respectively, wind gap 10 is used for business turn over wind, bellows 8 is installed at the top of upper cover 4, bellows 8 provides power and water conservancy diversion, the lateral wall of bellows 8 is fixed with guide duct 7, guide duct 7 is the L shape structure of invering and the tip extends to the outside of upper cover 4, return air pipe 12 is installed to the bottom surface of guide duct 7, the end and the base 1 of return air pipe 12 are connected and inside intercommunication, carry the wind to base 1 inside through return air pipe 12, base 1 is inside for hollow structure and with the inside intercommunication of wind-guiding post 11.

Further improved, as shown in fig. 2: the support block 20 is installed on the side wall of the device body 2 and located below the electric motor 18, the hydraulic rod 16 is installed on the electric motor 18, and the limit switch 17 is installed on the side wall of the device body 2 and located on the movement track of the hydraulic rod 16. The two side walls of the upper cover 4 are respectively provided with the ejector blocks 6, the middle of the bottom surface of each ejector block 6 is connected with the upper end of the hydraulic rod 16, and the hydraulic rod 16 jacks up the ejector blocks 6 after rising, so that the upper cover 4 is lifted.

Further improved, as shown in fig. 1: locating holes 5 are respectively formed in the top surface of the device body 2 close to the corners, four locating columns corresponding to the locating holes 5 are installed at the bottom of the upper cover 4, and the locating columns have a locating function.

Further improved, as shown in fig. 2: the two sides of the fixed box 21 are provided with the placing box 19, the placing box 19 and the fixed box 21 are both made of acrylic materials, transparent acrylic materials can be adopted, and checking is convenient.

Example two

In a further improvement, as shown in fig. 1 and 4: the outer wall of the device body 2 is provided with a plurality of air guide columns 11 distributed at equal intervals, the cross sections of the air guide columns 11 are of semicircular structures, and a plurality of partition plates 24 are vertically arranged inside the air guide columns 11. One end and the 11 inner wall connections of wind-guiding post of baffle 24, the other end is connected with the outer wall of device body 2 is perpendicular, be formed with ventilation hole 23 between the adjacent baffle 24, the upper end and the wind scooper 9 intercommunication of wind-guiding post 11, wind-guiding post 11 plays the guide effect to wind, the inside baffle 24 of wind-guiding post 11 still has certain heat conduction function simultaneously, wind takes away baffle 24 surface heat when flowing in ventilation hole 23, play certain thermal-insulated radiating effect, because the 11 internal partitioning of wind-guiding post is a plurality of wind-guiding holes, it still has certain syllable-dividing effect.

EXAMPLE III

In a further improvement, as shown in fig. 3: an air guide flow channel 13 is formed between the air box 8 and the device body 2, the air guide flow channel 13 is communicated with an air port 10 of the upper cover 4, a fan 15 and a filter plate are installed at the lower end of the air box 8, the fan 15 provides power, and the filter plate can filter air inflow. The inner top surface of the air box 8 is provided with an air guide lug 14, the air guide lug 14 is of a downward convex conical structure, and the conical structure plays a role in guiding and buffering.

When the air-conditioner is used, the remote controller controls the motor 22 and the fan 15 to rotate, the motor 22 drives the electric motor 18 to jack the upper cover 4 after rotating, the fan 15 rotates to drive air to flow, gas flowing out of an inner cavity of the air-conditioner is absorbed and filtered, the lower air opening 10 blows upwards to form an air curtain, certain blocking and guiding effects are achieved on the gas flowing out of the inner cavity, and suction of workers is reduced.

Finally, it should be noted that: although the present invention has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that changes may be made in the embodiments and/or equivalents thereof without departing from the spirit and scope of the invention. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. An electrical switching apparatus for a thin film growth apparatus chamber, comprising: device body (2), its characterized in that: a base (1) is installed at the bottom of the device body (2), an inner cavity is formed in the middle of the top surface of the device body (2), an upper cover (4) is arranged above the device body (2), and an electric rocker assembly (3) is fixedly connected to the side wall of the device body (2);

the electric rocker assembly (3) comprises a fixed box (21), a motor (22), a support block (20) and an electric motor (18), wherein the electric motor (18) and the fixed box (21) are fixedly connected with the side wall of the device body (2), the fixed box (21) is arranged on the outer side of the electric motor (18), the motor (22) is arranged at the bottom of the fixed box (21), and gears are respectively arranged at the power output end of the motor (22) and the power input end of the electric motor (18) and are in meshed connection with each other;

the device is characterized in that wind scoopers (9) are formed on the bottom surface of the upper cover (4) and the top surface of the device body (2) respectively, wind ports (10) are arranged at the edges, close to the opposite surfaces of the two wind scoopers (9), respectively, a wind box (8) is installed at the top of the upper cover (4), a wind guide pipe (7) is fixed on the side wall of the wind box (8), the wind guide pipe (7) is of an inverted L-shaped structure, the end portion of the wind guide pipe extends to the outer side of the upper cover (4), a wind return pipe (12) is installed on the bottom surface of the wind guide pipe (7), and the tail end of the wind return pipe (12) is connected with the base (1) and is communicated with the inside of the wind return pipe.

2. The electrical switch device of the thin film growth apparatus cavity of claim 1, wherein: be provided with air guide column (11) that a plurality of equidistance distributes on the outer wall of device body (2), the cross-section semicircular structure of air guide column (11), the inside vertical a plurality of baffle (24) that is provided with of air guide column (11).

3. The electrical switch device of the thin film growth apparatus cavity of claim 2, wherein: one end of each partition plate (24) is connected with the inner wall of the air guide column (11), the other end of each partition plate is vertically connected with the outer wall of the device body (2), and a vent hole (23) is formed between every two adjacent partition plates (24).

4. The electrical switch device of the thin film growth apparatus cavity of claim 1, wherein: an air guide flow channel (13) is formed between the air box (8) and the device body (2), the air guide flow channel (13) is communicated with an air port (10) of the upper cover (4), and a fan (15) and a filter plate are installed at the lower end of the air box (8).

5. The electric switch device of the thin film growth equipment cavity of claim 4, wherein: and the inner top surface of the air box (8) is provided with an air guide convex block (14), and the air guide convex block (14) is of a downward convex conical structure.

6. The electrical switch device of the thin film growth apparatus cavity of claim 1, wherein: the support block (20) is installed on the side wall of the device body (2) and located below the electric motor (18), a hydraulic rod (16) is installed on the electric motor (18), and a limit switch (17) is installed on the side wall of the device body (2) and located on the motion track of the hydraulic rod (16).

7. The electrical switch device of the thin film growth apparatus cavity of claim 1, wherein: two side walls of the upper cover (4) are respectively provided with a top block (6), and the middle of the bottom surface of the top block (6) is connected with the upper end of a hydraulic rod (16).

8. The electrical switch device of the thin film growth apparatus cavity of claim 1, wherein: the device is characterized in that positioning holes (5) are respectively formed in the top surface of the device body (2) close to the corners, and four positioning columns corresponding to the positioning holes (5) are installed at the bottom of the upper cover (4).

9. The electrical switch device of the thin film growth apparatus cavity of claim 1, wherein: the both sides of fixed box (21) are installed and are placed box (19), it all adopts the ya keli material to make to place box (19) and fixed box (21).