CN114112964B - Fourier infrared spectrometer multi-view field automatic measurement system and method - Google Patents
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Abstract
The invention discloses a Fourier infrared spectrometer multi-view field automatic measurement system and a method, wherein the system comprises the following steps: blackbody radiation source: generating incident radiation; an optical chopper: realizing frequency modulation of incident radiation; slit and electric three-dimensional platform: slit scanning traverses the field of view region; a collimator: converting the light passing through the slit into parallel light, and entering an instrument to be tested; the normal temperature detector: for photoelectric conversion at normal temperature; multichannel weak signal processing system: the phase-locked amplification and collection of weak signals of the detector are realized; collaborative processing software: the method is used for automatic control of the slit, drawing of a field response curve and calculation of field parameters. According to the invention, the slit scanning is used for replacing the traditional rotation of the detected instrument to generate the displacement of the field of view, and the response curve of the signal intensity along with the field of view is obtained through the cooperative control and data acquisition of software in a high-precision phase-locked amplification manner, so that the field of view parameter is calculated, and the calibration efficiency and precision of the cold optical system of the Fourier spectrometer at normal temperature are effectively improved.
Description
Technical field:
the invention relates to the field of optical detection, in particular to a Fourier infrared spectrometer multi-view field automatic measurement system and method.
The background technology is as follows:
the Fourier infrared spectrometer detects infrared spectrum radiation by adopting an interference light splitting mode, so that the contradiction between high sensitivity and high spectrum resolution of the instrument is well solved, and the Fourier infrared spectrometer has a series of remarkable advantages of high luminous flux, high spectrum resolution, wide spectrum coverage and the like, and is a main development direction of a space remote sensing instrument. The united states began to develop spatial interferometric spectral detection devices since the 60 s of the 20 th century. Atmospheric detectors using interference spectroscopy were installed on "rain cloud" test satellites around the 70 s of the 20 th century. For decades, various spatial high spectral resolution atmosphere detecting instruments have been developed in europe and america, and research on polar orbit satellite platforms includes interference thermal detectors (ITS), infrared atmospheric interference detectors (IASI), cross-orbit infrared atmospheric detectors (CrIS), and the like, and research on geosynchronous satellite platforms includes high resolution infrared detectors (GHIS), imaging spectrometers (GIFTS), hyperspectral environment detection assemblies (HES), and the like. The infrared hyperspectral atmosphere detector (HIRAS) is firstly carried by the third D star of the polar orbit meteorological satellite, and the atmosphere vertical detector (GIIRS) is also carried by the fourth A star of the new generation of static orbit meteorological satellite, so that the vertical structure observation of the atmosphere temperature and humidity parameters is realized, the detection precision is improved, the vertical resolution of the meteorological observation is improved, the input data is provided for the numerical weather forecast, and the disaster weather monitoring and the atmospheric chemical composition detection service are provided.
The field angle measurement is to obtain the actual optical field of each channel pixel of the instrument, provide basis for optical calibration and registration of the instrument in a normal temperature laboratory state, and is also an important parameter required by instrument linear function calculation and spectrum calibration. For Fourier infrared spectrometer, the optical path and the detector are usually required to be cooled, so that the background interference is reduced and the detection performance is improved. Because the optical field of view under radiation refrigeration and low temperature state can only be obtained in vacuum test, and the installation and calibration of the optical component is carried out at the normal temperature of the laboratory, the field of view is required to be obtained at the normal temperature of the laboratory, and references are provided for field of view measurement and performance verification at low temperature.
The traditional laboratory visual field measuring method realizes scanning of different areas in a visual field by adjusting the movement of an optical turntable, and the current lock-in amplifier is mostly single-channel, and only a single pixel can be measured when scanning in one direction is completed. Both the sampling of the detection signal and the movement of the field of view are manually operated, and lack of coordination and automation results in lower measurement efficiency. Meanwhile, as the test time is longer, the background of the signal is gradually increased due to the heat radiation accumulated by the detector, and the test precision and the calculation of the field of view are affected. At present, aiming at the field angle measurement of a Fourier infrared spectrometer in a laboratory normal temperature state, high collaborative automation cannot be achieved, and simultaneous measurement of multiple pixels is not met.
The invention comprises the following steps:
aiming at the limitations of the existing means, the invention aims to provide a Fourier infrared spectrometer multi-view field automatic measurement system and method.
Fourier infrared spectrometer multivariate field of view automatic measurement system, comprising: the device comprises a blackbody radiation source 1, an optical chopper 2, a slit, an electric three-dimensional platform 3, a collimator 4, a Fourier spectrometer optical system to be tested 5, a normal temperature detector 6, a preamplifier 7, a multichannel weak signal processing system 8 and cooperative processing software 9.
The blackbody radiation source 1 generates blackbody infrared radiation, the blackbody infrared radiation is incident to the optical chopper 2, is modulated in frequency and then is incident to the slit and the electric three-dimensional platform 3, the radiation energy passing through the slit enters the collimator 4 to be converted into parallel light, then enters the optical system 5 of the Fourier spectrometer to be detected, and finally is focused on the normal temperature detector 6 after the light splitting and collimation of the system. The weak electric signal after photoelectric conversion is amplified in low noise through a preamplifier 7, then phase-locked amplification and acquisition are carried out by a multichannel weak signal processing system 8, finally cooperative processing software 9 communicates with the multichannel weak signal processing system 8 through a serial port, the cooperative work of slit movement and data acquisition is controlled, the acquisition of infrared detection signals is started every time the slit movement is moved to a view field position, the change curve of the signal intensity along with the displacement distance is drawn, and the size and the center position of the view field are calculated.
The temperature range of the blackbody radiation source 1 is 0-500 ℃, and the temperature stability is 0.1K.
The modulation frequency of the optical chopper 2 is 17.46Hz.
The slit width of the slit and the slit width of the electric three-dimensional platform 3 are 0.5mm, and the resolution of the corresponding view field is 2%. The width of the slit may be adjusted according to the focal length of the system under test and the desired field of view resolution. The slit can be scanned horizontally and vertically along with the motor, the slit is vertically arranged when moving in the horizontal direction, and the slit is horizontally arranged when moving in the vertical direction. The step size, start point, end point, dwell time of the slit scan can be set by software.
The multichannel weak signal processing system 8 comprises a 9-channel phase-locked amplifying circuit, a phase-locked reference signal generator, an AD sampling circuit and an FPGA data processing and transmitting circuit.
The invention also provides an automatic measuring method of the Fourier infrared spectrometer multi-element view field, which comprises the following steps:
step 1: adjusting the proper temperature state of the black body and stabilizing;
step 2: the horizontal slit moves outside the field of view, and begins to sample and record data;
step 3: according to the step distance of the slit corresponding to the field of view 2', moving in the vertical direction, and acquiring detection signals when moving to one position until all pixel field of view scanning in the vertical direction is finished;
step 4: changing the horizontal slit into a vertical slit, moving out of the view field, and starting sampling and recording data;
step 5: according to the step distance of the slit corresponding to the field of view 2', moving in the horizontal direction, and collecting and recording detection signals when moving to one position until all pixel field of view scanning in the horizontal direction is finished;
step 6: converting slit movement distances in the horizontal direction and the vertical direction into angles according to recorded data and focal lengths of instruments, and drawing a change curve of detection signal intensity in the vertical direction and the horizontal direction along with a scanning angle;
step 7: and calculating the size and the center position of the field of view of each pixel according to the field of view response curve of each pixel.
Aiming at the characteristics of an optical system and a detector of a Fourier infrared spectrometer, the invention converts the movement of the field of view of the instrument into the movement of a target source slit to realize the scanning of the field of view, and realizes the synchronous test of a plurality of pixels by developing a multi-path lock-in amplifier with the highest path of 10. The light source modulation, the field scanning and the acquisition of detection signals are coordinated and controlled by software, so that automatic measurement, display and calculation are realized. The efficiency and the precision of the optical system assembly, registration and test can be greatly improved.
Description of the drawings:
fig. 1 is a schematic structural diagram of a fourier infrared spectrometer multivariate field of view automatic measurement system provided by an embodiment of the present invention.
Wherein:
1. a blackbody radiation source;
2. an optical modulator;
3. slit and electric three-dimensional platform;
4. a collimator;
5. an optical system of a Fourier spectrometer to be measured;
6. a normal temperature detector;
7. a pre-amplifier;
8. a multichannel weak signal processing system;
9. and coordinating processing software.
Fig. 2 is a schematic diagram of the theoretical field of view of a fourier infrared spectrometer and the principle of slit scanning. Wherein (1) is the theory of the field arrangement of the 9 pixels and the slit scanning principle; (2) Is the variation curve of the signal of 9 pixels along with the slit scan.
Fig. 3 is a flowchart of a method for automatically measuring a multi-element view field of a fourier infrared spectrometer according to an embodiment of the present invention.
FIG. 4 is a plot of the response of the field of view of a pixel obtained by the method of the present invention. Wherein (1) is a field response curve of 1, 2 and 3 pixels in the transverse slit vertical scanning; (2) is a field response curve of 4, 5, 6 pels; (3) is a field response curve of 7, 8, 9 pels.
Fig. 5 is an optical field of view obtained by the method of the present invention.
The specific embodiment is as follows:
the present invention will be described in detail with reference to specific examples. The following examples will assist those skilled in the art in further understanding the present invention, but are not intended to limit the invention in any way. It should be noted that variations and modifications could be made by those skilled in the art without departing from the inventive concept. These are all within the scope of the present invention.
As shown in fig. 1, a schematic structural diagram of a fourier infrared spectrometer multivariate field of view automatic measurement system according to an embodiment of the present invention includes: the device comprises a blackbody radiation source 1, an optical chopper 2, a slit, an electric three-dimensional platform 3, a collimator 4, a Fourier spectrometer optical system to be tested 5, a normal temperature detector 6, a preamplifier 7, a multichannel weak signal processing system 8 and cooperative processing software 9.
The radiation emitted by the blackbody radiation source 1 is focused on the incident focal plane of the optical system, an adjustable slit is arranged on the focal plane, and a set of optical chopper 2 is arranged at the slit and the light source to realize the modulation of the light source. The length of the slit ensures that the total field of view of 3 x 3 can be covered, and the slit width is set to 1mm. To traverse the 9 instantaneous fields of view of the 3 x 3 distribution, the chopper and slit are placed on an motorized three-dimensional platform, the starting point and step distance are set by software, and the movement of the slit is controlled. Here the step size is set to 0.5mm and the system focal length is 850mm, so the angular resolution of the test is 2".
Because the normal temperature detector 6 is adopted to replace a refrigeration type detector in a Fourier infrared spectrometer, the performance of the detector is different by several orders of magnitude, and normal temperature optics has larger background noise compared with cold light optics. In order to ensure the output signal to noise ratio, the core is to develop 9 paths of lock-in amplifiers to realize the measurement of weak signals of an infrared detector. The integrated 9-channel high-performance lock-in amplifier realizes synchronous observation of all pixels.
The field of view of the Fourier infrared spectrometer is shown in FIG. 2, each working wave band has 3×3 9 pixel field of view distribution, and each working wave band corresponds to a 3×3 area array infrared detector, and the single pixel instantaneous field of view design value is 1 degree. In fig. 2, the view field angle is measured by adopting a slit scanning mode, and the change relation of the received signal intensity in the view field along with the scanning angle is obtained through the movement of the transverse slit and the vertical slit in the horizontal and vertical two-dimensional directions.
FIG. 3 is a flow chart of a method for automatically measuring the field angle of view of a satellite-borne Fourier infrared spectrometer in multiple channels. After system construction and test preparation are completed, firstly, setting the temperature of a black body to a proper temperature according to the working wave band and the dynamic range of a Fourier spectrometer, vertically moving the horizontal slit out of a view field, setting a motion starting point, a motion finishing point and a motion step of the horizontal slit through software, then controlling a three-dimensional moving platform to drive the horizontal slit to vertically move, taking an average sampling phase-locked signal at each position as a detection signal value of the position, and recording, storing and drawing a change curve of signal intensity along with the motion distance until the vertical scanning of the whole 9-element view field is finished. And then replaced with a vertical slit, and horizontal scanning is performed in the same manner.
FIG. 4 is an acquired pel field of view response curve, looking for signal peaks for each pel response curve:
DNMax=Max(DN i ,i=1,2...M) (1)
in the formula (1), DN is the signal digital quantity of each sampling point, M is the sampling point number, and DNMax is the signal peak value. And then normalizing the infrared detection signal intensity received by the detector and subjected to phase-locked amplification. And determining the center and the size of the field of view according to the ratio of the area of the field of view, which is cut off by the center of the slit at the edge of the circular field of view and the center of the field of view, of 0.241 x DNMax, and then obtaining the intersection point position of the response curve of the field of view and 0.241 x DNMax:
Z0=k,DN k =DNMax (2)
Z1=i,DN i =0.241×DNMax,i<k (3)
Z2=j,DN j =0.241×DNMax,j>k (4)
IFOV center =(Z1+Z2)/2 (5)
IFOV size =Z2-Z1 (6)
wherein Z0 is the signal peak position, Z1 and Z2 are the intersection point positions of the field response curve and 0.241 XDNMax, IFOV, respectively center Then the center of the field of view, IFOV size The field of view size. According to the above formula, the center and the dimension can be obtained in both the horizontal and vertical directions, respectively. As shown in fig. 5, the optical field of view of one band 9 picture element is finally obtained by this method.
Claims (6)
1. A fourier infrared spectrometer multivariate field of view automatic measurement system comprising: blackbody radiation source (1), optical chopper (2), slit and electronic three-dimensional platform (3), collimator (4), fourier spectrometer optical system (5) that awaits measuring, normal atmospheric temperature detector (6), preamplifier (7), weak signal processing system of multichannel (8) and collaborative processing software (9), its characterized in that:
the blackbody radiation source (1) generates blackbody infrared radiation, the blackbody infrared radiation is incident to the optical chopper (2), is modulated in frequency and then is incident to the slit and the electric three-dimensional platform (3), the radiation energy passing through the slit enters the collimator (4) to be converted into parallel light, then enters the optical system (5) of the Fourier spectrometer to be detected, and finally is focused on the normal temperature detector (6) after the light splitting and collimation of the system; the weak electric signal after photoelectric conversion is amplified in low noise through a preamplifier (7), then phase-locked amplification and acquisition are carried out by a multichannel weak signal processing system (8), finally cooperative processing software (9) communicates with the multichannel weak signal processing system (8) through a serial port, the cooperative work of slit movement and data acquisition is controlled, the acquisition of infrared detection signals is started every time the slit movement is moved to a view field position, and a change curve of signal intensity along with displacement distance is drawn; searching a signal intensity peak value through acquired detection signals and slit displacement distance data, and calculating the light passing area ratio of a slit at the edge of a pixel view field and the center of the pixel view field, wherein the light passing area ratio is multiplied by the signal intensity peak value to be used as pixel edge signal intensity; and calculating an intersection point of a change curve of the signal intensity along with the displacement distance and the edge signal intensity, wherein the center of the two intersection points is the center of the field of view of the pixel, the width between the two intersection points is the size of the field of view, and the slit movement distance is converted into an angle value through a measuring system.
2. The fourier infrared spectrometer multivariate viewing field automatic measurement system of claim 1, wherein the blackbody radiation source (1) has a temperature in the range of 0-500 ℃ and a temperature stability of 0.1K.
3. The fourier infrared spectrometer multivariate viewing field automatic measurement system of claim 1, wherein the modulation frequency of the optical chopper (2) is 17.46Hz.
4. The automatic measuring system for the multi-view field of the Fourier infrared spectrometer according to claim 1, wherein the width of the slit and the width of the slit in the electric three-dimensional platform (3) are 0.5mm, the corresponding view field resolution is 2', and the width of the slit can be adjusted according to the focal length of the measured system and the required view field resolution; the slit is scanned horizontally and vertically along with the motor, the slit is installed vertically when moving in the horizontal direction, the slit is installed horizontally when moving in the vertical direction, and the step distance, the starting point, the end point and the residence time of the slit scanning are set through software.
5. The system for automatically measuring the multiple fields of view of the Fourier infrared spectrometer according to claim 1, wherein the multi-channel weak signal processing system (8) comprises a 9-channel phase-locked amplifying circuit, a phase-locked reference signal generator, an AD sampling circuit and an FPGA data processing and transmitting circuit.
6. The method for automatically measuring the multi-element view field of the Fourier infrared spectrometer is characterized by comprising the following steps of:
step 1: adjusting the proper temperature state of the blackbody radiation source (1) and stabilizing the blackbody radiation source;
step 2: the cooperative processing software (9) controls the slit and the electric three-dimensional platform (3) to enable the horizontal slit to move outside the field of view, and the multichannel weak signal processing system (8) starts to sample and record data;
step 3: according to the step distance of the slit corresponding to the field of view 2', moving in the vertical direction, after entering the field of view, moving to one position, enabling radiation emitted by the blackbody radiation source (1) to enter the collimator (4) through the slit after being modulated by the frequency of the optical chopper (2) to be converted into parallel light, entering the optical system (5) of the Fourier spectrometer to be detected, and focusing on the normal-temperature detector (6) to perform photoelectric conversion; the weak electric signal is amplified with low noise through a preamplifier (7), and then the multichannel weak signal processing system (8) collects detection signals until all pixel visual fields in the vertical direction are scanned;
step 4: changing the horizontal slit into a vertical slit, moving out of the view field, and starting sampling and recording data;
step 5: according to the step distance of the slit corresponding to the field of view 2', moving in the horizontal direction, and collecting and recording detection signals when moving to one position until all pixel field of view scanning in the horizontal direction is finished;
step 6: converting slit movement distances in the horizontal direction and the vertical direction into angles according to recorded data and focal lengths of instruments, and drawing a change curve of detection signal intensity in the vertical direction and the horizontal direction along with a scanning angle;
step 7: calculating the size and the center position of the field of view of each pixel according to the field of view response curve of the pixel;
searching a signal intensity peak value through acquired detection signals and slit displacement distance data, and calculating the light passing area ratio of a slit at the edge of a pixel view field and the center of the pixel view field, wherein the light passing area ratio is multiplied by the signal intensity peak value to be used as pixel edge signal intensity; and calculating an intersection point of a change curve of the signal intensity along with the displacement distance and the edge signal intensity, wherein the center of the two intersection points is the center of the visual field of the pixel, and the width between the two intersection points is the size of the visual field.
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Citations (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0767359A1 (en) * | 1995-10-07 | 1997-04-09 | Dr. Johannes Heidenhain GmbH | Photo-electrical length or angle measuring device |
US6100974A (en) * | 1998-09-15 | 2000-08-08 | California Institute Of Technology | Imaging spectrometer/camera having convex grating |
CN1419992A (en) * | 2001-11-19 | 2003-05-28 | 三菱重工业株式会社 | Method for automatically repairing crack, and apparatus therefor |
US7190444B1 (en) * | 2004-06-07 | 2007-03-13 | Itt Manufacturing Enterprises, Inc. | System and method of measuring field-of-view of an optical sensor |
CN101251477A (en) * | 2008-03-28 | 2008-08-27 | 中国科学院上海技术物理研究所 | Complete visual field spectrum scaling device for gazing type imaging spectrometer |
CN105588826A (en) * | 2016-02-24 | 2016-05-18 | 中国科学院物理研究所 | Femtosecond time resolution multi-channel lock-phase fluorescence spectrophotometer based on optical parametric amplification |
US9746316B1 (en) * | 2015-02-23 | 2017-08-29 | 4D Technology Corporation | High-resolution in-line metrology for roll-to-roll processing operations |
CN110196100A (en) * | 2019-05-21 | 2019-09-03 | 中国科学院上海技术物理研究所 | A kind of quick Method of Adjustment of imaging spectrometer |
CN112082649A (en) * | 2020-02-28 | 2020-12-15 | 中国科学院上海技术物理研究所 | Video hyperspectral imager based on array slit scanning |
CN112903104A (en) * | 2020-07-01 | 2021-06-04 | 中国科学院上海技术物理研究所 | Short wave infrared hyperspectral video imaging system based on S matrix slit array |
CN113447241A (en) * | 2021-06-29 | 2021-09-28 | 北京航空航天大学 | Rapid calibration method and device for segmentation projection imaging system |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6909509B2 (en) * | 2001-02-20 | 2005-06-21 | Zygo Corporation | Optical surface profiling systems |
US9347893B2 (en) * | 2011-07-26 | 2016-05-24 | Robert Sigurd Nelson | Enhanced resolution imaging systems for digital radiography |
US9720089B2 (en) * | 2012-01-23 | 2017-08-01 | Microsoft Technology Licensing, Llc | 3D zoom imager |
US11513228B2 (en) * | 2020-03-05 | 2022-11-29 | Santec Corporation | Lidar sensing arrangements |
-
2021
- 2021-11-10 CN CN202111324613.7A patent/CN114112964B/en active Active
Patent Citations (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0767359A1 (en) * | 1995-10-07 | 1997-04-09 | Dr. Johannes Heidenhain GmbH | Photo-electrical length or angle measuring device |
US6100974A (en) * | 1998-09-15 | 2000-08-08 | California Institute Of Technology | Imaging spectrometer/camera having convex grating |
CN1419992A (en) * | 2001-11-19 | 2003-05-28 | 三菱重工业株式会社 | Method for automatically repairing crack, and apparatus therefor |
US7190444B1 (en) * | 2004-06-07 | 2007-03-13 | Itt Manufacturing Enterprises, Inc. | System and method of measuring field-of-view of an optical sensor |
CN101251477A (en) * | 2008-03-28 | 2008-08-27 | 中国科学院上海技术物理研究所 | Complete visual field spectrum scaling device for gazing type imaging spectrometer |
US9746316B1 (en) * | 2015-02-23 | 2017-08-29 | 4D Technology Corporation | High-resolution in-line metrology for roll-to-roll processing operations |
CN105588826A (en) * | 2016-02-24 | 2016-05-18 | 中国科学院物理研究所 | Femtosecond time resolution multi-channel lock-phase fluorescence spectrophotometer based on optical parametric amplification |
CN110196100A (en) * | 2019-05-21 | 2019-09-03 | 中国科学院上海技术物理研究所 | A kind of quick Method of Adjustment of imaging spectrometer |
CN112082649A (en) * | 2020-02-28 | 2020-12-15 | 中国科学院上海技术物理研究所 | Video hyperspectral imager based on array slit scanning |
CN112903104A (en) * | 2020-07-01 | 2021-06-04 | 中国科学院上海技术物理研究所 | Short wave infrared hyperspectral video imaging system based on S matrix slit array |
CN113447241A (en) * | 2021-06-29 | 2021-09-28 | 北京航空航天大学 | Rapid calibration method and device for segmentation projection imaging system |
Non-Patent Citations (1)
Title |
---|
基于压缩感知的高光谱成像技术研究;刘世界;中国博士学位论文全文数据库 信息科技辑(第3期);1-121 * |
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