CN114107724A - Silver alloy bonding wire and preparation method thereof - Google Patents
Silver alloy bonding wire and preparation method thereof Download PDFInfo
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- C22F1/00—Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working
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- C22F1/00—Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working
- C22F1/14—Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working of noble metals or alloys based thereon
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- G01N3/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N3/08—Investigating strength properties of solid materials by application of mechanical stress by applying steady tensile or compressive forces
- G01N3/10—Investigating strength properties of solid materials by application of mechanical stress by applying steady tensile or compressive forces generated by pneumatic or hydraulic pressure
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/42—Wire connectors; Manufacturing methods related thereto
- H01L24/43—Manufacturing methods
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2203/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N2203/0001—Type of application of the stress
- G01N2203/0003—Steady
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- G01N2203/00—Investigating strength properties of solid materials by application of mechanical stress
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- G—PHYSICS
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2203/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N2203/003—Generation of the force
- G01N2203/0042—Pneumatic or hydraulic means
- G01N2203/0048—Hydraulic means
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- G—PHYSICS
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- G01N2203/02—Details not specific for a particular testing method
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- G01N2203/02—Details not specific for a particular testing method
- G01N2203/04—Chucks, fixtures, jaws, holders or anvils
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/43—Manufacturing methods
- H01L2224/438—Post-treatment of the connector
- H01L2224/43848—Thermal treatments, e.g. annealing, controlled cooling
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Abstract
The invention discloses a silver alloy bonding wire and a preparation method thereof, wherein the silver alloy bonding wire is prepared from the following materials in percentage by weight, 1.4-2.9% of palladium, 800ppm of trace elements 300 and the balance of silver. The silver alloy bonding wire has good oxidation resistance and balling property, the preparation method is simple in process, and the tensile test is carried out by the tensile test device, so that the whole quality of the silver alloy bonding wire can be delivered from a factory.
Description
Technical Field
The invention relates to the technical field of bonding wires, in particular to a silver alloy bonding wire and a preparation method thereof.
Background
Bonding wires (also called bonding wires) are the main connection means for connecting the chip to an external package substrate (substrate) and/or a multilayer circuit board (PCB). The development trend of bonding wires is mainly the miniaturization of wire diameter, long workshop life (florlife) and high length of wire shaft from the product direction; from the chemical composition, copper wires (including bare copper wires, palladium-plated copper wires and gold-flash palladium-plated copper wires) are mainly used to replace gold wires in the semiconductor field, and silver wires and silver alloy wires are used to replace gold wires in LED and partial IC packaging applications. Due to the development requirements of miniaturization and thinning of electronic products, the semiconductor industry deals with the electronic products by methods such as chip thickness reduction (Wafer thinning), chip stacking (Die stacking), flip chip (flip chip), Wafer level packaging (Wafer level packaging), 2.5D and 3D packaging, however, the traditional bonding packaging (wire bonding) is still the mainstream packaging form.
The oxidation resistance and balling property of the existing alloy wire are poor.
Disclosure of Invention
The invention aims to solve the problems that: the silver alloy bonding wire has good oxidation resistance and balling property, the preparation method is simple in process, and the tensile test is carried out by the tensile test device, so that the whole quality of the silver alloy bonding wire can be delivered from a factory.
The technical scheme provided by the invention for solving the problems is as follows: a silver alloy bonding wire is prepared from (by weight) Pd 1.4-2.9%, trace elements 300-800ppm, and Ag in balance.
Preferably, the trace element is one or a combination of more of silicon, niobium, nickel, iridium, titanium and chromium.
The invention also discloses a preparation method of the silver alloy bonding wire, which comprises the following steps,
s1, putting the silver and the palladium into a preparation hopper according to the proportion;
s2, placing the silver and the palladium in the preparation hopper into a melting furnace, and melting the nickel and the chromium, wherein the temperature of the melting furnace is controlled to be 3000-6500 ℃ to generate an alloy melt, and the temperature of the alloy melt is controlled to be 2500-4500 ℃;
s3, melting the other trace elements to be added outside the melting furnace under the protection of inert gas, and adding the trace elements into the alloy melt;
s4, cooling the alloy melt and obtaining a wire rod with the diameter of 5-7 mm through a directional continuous drawing process;
s5, carrying out homogenizing annealing on the wire rod, and introducing protective gas all the time in the process of cooling to room temperature;
s6, drawing the wire obtained in the step S5 to obtain a silver alloy bonding wire with the diameter of 70-200 um;
s7, annealing the drawn silver alloy bonding wire again;
s8, cleaning the surface and drying;
s9, sampling the silver alloy bonding wire, and then putting the silver alloy bonding wire into a tension testing device for tension testing;
and S10, after the test is qualified, rewinding, coiling and packaging the finished product of the silver alloy bonding wire.
Preferably, in the step S5, the annealing temperature is controlled to be 650-850 ℃, the annealing time is 3-6 hours, and the protective atmosphere is nitrogen.
Preferably, the annealing temperature in the step S7 is 450-650 ℃, the annealing time is 2-6 seconds, and the protective atmosphere is 98% of nitrogen and 2% of hydrogen.
Preferably, the tensile testing device in the step S9 includes a base, a fixing and clamping assembly, and a pulling assembly; the fixing device comprises a base, a fixing device assembly and a fixing clamping assembly, wherein the fixing device assembly is arranged on the base, and is used for fixing one end of a silver alloy bonding wire to be tested; the drawing assembly comprises a clamping head, a first connecting rod, a second connecting rod, a connector and a hydraulic cylinder; one end of the first connecting rod is connected with the clamping head, and the other end of the first connecting rod is rotatably connected with the second connecting rod; a movable cavity is arranged in the connector, the connecting rod II is movably matched with the movable cavity, one end, positioned in the movable cavity, of the connecting rod II is provided with a first electromagnet, the cavity bottom of the movable cavity is provided with a second electromagnet, a buffer device is arranged in the movable cavity and comprises an annular plate and a plurality of buffer springs, one end of each buffer spring is connected with the cavity top of the movable cavity, the other end of each buffer spring is connected with the annular plate, and the connecting rod I penetrates through the annular plate; one end of the hydraulic cylinder is connected with the connector, and the other end of the hydraulic cylinder is connected with the mounting seat.
Preferably, the fixing and clamping assembly comprises a third connecting rod and the clamping head, one end of the third connecting rod is connected with the side end face of the mounting plate, and the other end of the third connecting rod is connected with the clamping head.
Preferably, the tensile testing device further comprises a guiding head, the guiding head is arranged on the upper end face of the base, and a guiding hole for the silver alloy bonding wire to be tested to pass through is formed in the guiding head.
Preferably, the outer circumferential surface of the electromagnet I is provided with a plurality of guide blocks, and the inner wall of the movable cavity is provided with a plurality of arc-shaped grooves matched with the guide blocks.
Preferably, the tensile test device further comprises a limiting rod, and the limiting rod is used for preventing the first connecting rod from rotating.
Compared with the prior art, the invention has the advantages that: the silver alloy bonding wire has good oxidation resistance and balling property, the preparation method is simple in process, and the tensile test is carried out by the tensile test device, so that the whole quality of the silver alloy bonding wire can be delivered from a factory.
Drawings
The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the invention and not to limit the invention.
FIG. 1 is a schematic structural diagram of a tensile testing apparatus according to the present invention;
FIG. 2 is an enlarged schematic view at A in FIG. 1;
fig. 3 is a schematic diagram of the cooperation of the electromagnet I and the movable cavity.
The attached drawings are marked as follows: 1. the device comprises a base, 2, a mounting plate, 3, a third connecting rod, 4, a clamping head, 5, a guide head, 6, a guide hole, 7, a silver alloy bonding wire, 8, a hydraulic cylinder, 9, a mounting seat, 10, a limiting rod, 11, a guide block, 12, a T-shaped block, 13, a buffer spring, 14, a movable cavity, 15, a second electromagnet, 16, a connecting head, 17, a first electromagnet, 18, an arc-shaped groove, 19, an annular plate, 20, a first connecting rod, 21, a limiting cavity, 22 and a second connecting rod.
Detailed Description
The embodiments of the present invention will be described in detail with reference to the accompanying drawings and examples, so that how to implement the technical means for solving the technical problems and achieving the technical effects of the present invention can be fully understood and implemented.
In the description of the present invention, it should be noted that, for the terms of orientation, such as "central", "lateral", "longitudinal", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", etc., it indicates that the orientation and positional relationship shown in the drawings are based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present invention and simplifying the description, but does not indicate or imply that the device or element referred to must have a specific orientation, be constructed in a specific orientation, and be operated without limiting the specific scope of protection of the present invention.
Furthermore, if the terms "first" and "second" are used for descriptive purposes only, they are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features. Thus, a definition of "a first" or "a second" feature may explicitly or implicitly include one or more of the features, and in the description of the invention, "a number" means two or more unless explicitly defined otherwise.
In the present invention, unless otherwise expressly specified or limited, the terms "assembled", "connected", and "connected" are to be construed broadly, e.g., as meaning fixedly connected, detachably connected, or integrally connected; or may be a mechanical connection; the two elements can be directly connected or connected through an intermediate medium, and the two elements can be communicated with each other. The specific meanings of the above terms in the present invention can be understood by those of ordinary skill in the art according to specific situations.
It will be understood that the terms "comprises" and/or "comprising," when used in this specification and the appended claims, specify the presence of stated features, integers, steps, operations, elements, and/or components, but do not preclude the presence or addition of one or more other features, integers, steps, operations, elements, components, and/or groups thereof.
It is also to be understood that the terminology used in the description of the embodiments of the invention herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the embodiments of the invention. As used in the description of embodiments of the present invention and the appended claims, the singular forms "a," "an," and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise.
A silver alloy bonding wire is prepared from (by weight) Pd 1.4-2.9%, trace elements 300-800ppm, and Ag in balance.
In this embodiment, the trace element is one or a combination of silicon, niobium, nickel, iridium, titanium, and chromium.
The invention also discloses a preparation method of the silver alloy bonding wire, which comprises the following steps,
s1, putting the silver and the palladium into a preparation hopper according to the proportion;
s2, placing the silver and the palladium in the preparation hopper into a melting furnace, and melting the nickel and the chromium, wherein the temperature of the melting furnace is controlled to be 3000-6500 ℃ to generate an alloy melt, and the temperature of the alloy melt is controlled to be 2500-4500 ℃;
s3, melting the other trace elements to be added outside the melting furnace under the protection of inert gas, and adding the trace elements into the alloy melt;
s4, cooling the alloy melt and obtaining a wire rod with the diameter of 5-7 mm through a directional continuous drawing process;
s5, carrying out homogenizing annealing on the wire rod, and introducing protective gas all the time in the process of cooling to room temperature;
s6, drawing the wire obtained in the step S5 to obtain a silver alloy bonding wire with the diameter of 70-200 um;
s7, annealing the drawn silver alloy bonding wire again;
s8, cleaning the surface and drying;
s9, sampling the silver alloy bonding wire, and then putting the silver alloy bonding wire into a tension testing device for tension testing;
and S10, after the test is qualified, rewinding, coiling and packaging the finished product of the silver alloy bonding wire.
In this embodiment, in the step S5, the annealing temperature is controlled to 650-.
In this embodiment, the annealing temperature in step S7 is 450-.
In this embodiment, the tensile testing apparatus in step S9 includes a base 1, a fixing and clamping assembly, and a pulling assembly; the fixing device comprises a base 1, a fixing device assembly and a fixing clamping assembly, wherein the fixing device assembly is arranged on the mounting plate 2, and the fixing clamping assembly is used for fixing one end of a silver alloy bonding wire 7 to be tested; the drawing assembly comprises a clamping head 4, a first connecting rod 20, a second connecting rod 22, a connecting head 16 and a hydraulic cylinder 8; one end of the first connecting rod 20 is connected with the clamping head 4, and the other end of the first connecting rod is rotatably connected with the second connecting rod 22; a movable cavity 14 is arranged in the connecting head 16, the connecting rod II 22 is movably matched with the movable cavity 14, one end, located in the movable cavity 14, of the connecting rod II 22 is provided with an electromagnet I17, the cavity bottom of the movable cavity 14 is provided with an electromagnet II 15, a buffer device is arranged in the movable cavity 14 and comprises an annular plate 19 and a plurality of buffer springs 13, one end of each buffer spring 13 is connected with the cavity top of the movable cavity 14, the other end of each buffer spring is connected with the annular plate 19, and the connecting rod I20 penetrates through the annular plate 19; one end of the hydraulic cylinder 8 is connected with the connecting head 16, and the other end of the hydraulic cylinder is connected with the mounting seat 9.
Wherein, one end of the first connecting rod is provided with a limit cavity 21, and one end of the first connecting rod is provided with a T-shaped block 12 matched with the limit cavity
In this embodiment, the fixing and clamping assembly comprises a third connecting rod 3 and the clamping head 4, one end of the third connecting rod 3 is connected with the side end face of the mounting plate 2, and the other end of the third connecting rod is connected with the clamping head 4.
In this embodiment, the tensile testing apparatus further includes a guiding head 5, the guiding head 5 is disposed on the upper end surface of the base 1, and a guiding hole 6 for a silver alloy bonding wire 7 to be tested to pass through is disposed on the guiding head 5.
In this embodiment, the outer circumferential surface of the electromagnet i 17 is provided with a plurality of guide blocks 11, and the inner wall of the movable cavity 14 is provided with a plurality of arc-shaped grooves 18 matched with the guide blocks 11.
In this embodiment, the tensile testing apparatus further includes a limiting rod 10, and the limiting rod 10 is used for preventing the first connecting rod 20 from rotating. It should be noted that, here, the gag lever post does not influence the connecting rod and moves left and right.
Specifically, as the specifications of the bonding wires are different, some bonding wires are thicker, the required tension is greater than the maximum bearing tension of a tension sensor (not shown in the figure), if no protective measures are taken, the test accuracy of the tension sensor can be influenced, and the tension sensor can be damaged seriously; the two buffers are arranged, and compared with the situation that the first electromagnet is directly buffered by adopting a spring, the first electromagnet and the second electromagnet can be prevented from being separated in time due to the fact that the spring is directly contacted with the annular plate.
The foregoing is merely illustrative of the preferred embodiments of the present invention and is not to be construed as limiting the claims. The present invention is not limited to the above embodiments, and the specific structure thereof is allowed to vary. All changes which come within the scope of the invention as defined by the independent claims are intended to be embraced therein.
Claims (10)
1. A silver alloy bonding wire is characterized in that: comprises 1.4-2.9% of palladium, 800ppm of trace elements and the balance of silver.
2. The silver alloy bonding wire according to claim 1, wherein: the trace elements are one or a combination of more of silicon, niobium, nickel, iridium, titanium and chromium.
3. A method of manufacturing a silver alloy bonding wire according to any one of claims 1 to 2, characterized by: the method comprises the following steps of,
s1, putting the silver and the palladium into a preparation hopper according to the proportion;
s2, placing the silver and the palladium in the preparation hopper into a melting furnace, and melting the nickel and the chromium, wherein the temperature of the melting furnace is controlled to be 3000-6500 ℃ to generate an alloy melt, and the temperature of the alloy melt is controlled to be 2500-4500 ℃;
s3, melting the other trace elements to be added outside the melting furnace under the protection of inert gas, and adding the trace elements into the alloy melt;
s4, cooling the alloy melt and obtaining a wire rod with the diameter of 5-7 mm through a directional continuous drawing process;
s5, carrying out homogenizing annealing on the wire rod, and introducing protective gas all the time in the process of cooling to room temperature;
s6, drawing the wire obtained in the step S5 to obtain a silver alloy bonding wire with the diameter of 70-200 um;
s7, annealing the drawn silver alloy bonding wire again;
s8, cleaning the surface and drying;
s9, sampling the silver alloy bonding wire, and then putting the silver alloy bonding wire into a tension testing device for tension testing;
and S10, after the test is qualified, rewinding, coiling and packaging the finished product of the silver alloy bonding wire.
4. The method for preparing a silver alloy bonding wire according to claim 3, wherein: in the step S5, the annealing temperature is controlled to be 650-850 ℃, the annealing time is 3-6 hours, and the protective atmosphere is nitrogen.
5. The method for preparing a silver alloy bonding wire according to claim 3, wherein: the annealing temperature in the step S7 is 450-650 ℃, the annealing time is 2-6 seconds, and the protective atmosphere is 98% of nitrogen and 2% of hydrogen.
6. A method for preparing a silver alloy bonding wire (7) according to claim 3, characterized in that: the tension testing device in the step S9 comprises a base (1), a fixing and clamping assembly and a drawing assembly; the two ends of the upper end face of the base (1) are respectively provided with an installation plate (2) and an installation seat (9), the fixing device assembly is arranged on the installation plate (2), and the fixing and clamping assembly is used for fixing one end of a silver alloy bonding wire (7) to be tested; the drawing assembly comprises a clamping head (4), a first connecting rod (20), a second connecting rod (22), a connecting head (16) and a hydraulic cylinder (8); one end of the first connecting rod (20) is connected with the clamping head (4), and the other end of the first connecting rod is rotatably connected with the second connecting rod (22); a movable cavity (14) is arranged in the connector (16), a second connecting rod (22) is movably matched with the movable cavity (14), a first electromagnet (17) is arranged at one end, located in the movable cavity (14), of the second connecting rod (22), a second electromagnet (15) is arranged at the bottom of the movable cavity (14), a buffer device is arranged in the movable cavity (14), the buffer device comprises an annular plate (19) and a plurality of buffer springs (13), one end of each buffer spring (13) is connected with the top of the movable cavity (14), the other end of each buffer spring is connected with the annular plate (19), and the first connecting rod (20) penetrates through the annular plate (19); one end of the hydraulic cylinder (8) is connected with the connecting head (16), and the other end of the hydraulic cylinder is connected with the mounting seat (9).
7. A method for preparing a silver alloy bonding wire (7) according to claim 6, characterized in that: the fixing and clamping assembly comprises a third connecting rod (3) and a clamping head (4), one end of the third connecting rod (3) is connected with the side end face of the mounting plate (2), and the other end of the third connecting rod is connected with the clamping head (4).
8. A method for preparing a silver alloy bonding wire (7) according to claim 6, characterized in that: the tensile force testing device further comprises a guide head (5), the guide head (5) is arranged on the upper end face of the base (1), and a guide hole (6) for a silver alloy bonding wire (7) to be tested to penetrate through is formed in the guide head (5).
9. A method for preparing a silver alloy bonding wire (7) according to claim 6, characterized in that: the outer circumferential surface of the electromagnet I (17) is provided with a plurality of guide blocks (11), and the inner wall of the movable cavity (14) is provided with a plurality of arc-shaped grooves (18) matched with the guide blocks (11).
10. A method for preparing a silver alloy bonding wire (7) according to claim 6, characterized in that: the tensile force testing device further comprises a limiting rod (10), and the limiting rod (10) is used for preventing the first connecting rod (20) from rotating.
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| CN202111392108.6A CN114107724A (en) | 2021-11-19 | 2021-11-19 | Silver alloy bonding wire and preparation method thereof |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114883286A (en) * | 2022-06-08 | 2022-08-09 | 江西蓝微电子科技有限公司 | Gold-silver alloy composite bonding wire and manufacturing method thereof |
| CN115058620A (en) * | 2021-11-19 | 2022-09-16 | 江西蓝微电子科技有限公司 | Silver alloy bonding wire and preparation method thereof |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116660020B (en) * | 2023-07-31 | 2023-10-13 | 烟台一诺电子材料有限公司 | Bonding wire quality detection device |
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| JPS5721830A (en) * | 1980-07-14 | 1982-02-04 | Tanaka Kikinzoku Kogyo Kk | Bonding wire for semiconductor element |
| CN108183075A (en) * | 2017-12-27 | 2018-06-19 | 汕头市骏码凯撒有限公司 | A kind of silver alloy bonding wire and its manufacturing method |
| CN108796285A (en) * | 2018-06-30 | 2018-11-13 | 汕头市骏码凯撒有限公司 | A kind of silver alloy bonding wire and its manufacturing method |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW201028240A (en) * | 2009-01-23 | 2010-08-01 | jun-de Li | Composite bonding wire manufacturing method and product thereof |
| CN105296788B (en) * | 2015-11-13 | 2018-01-02 | 汕头市骏码凯撒有限公司 | A kind of silver alloy bonding wire and its manufacture method |
| CN108598006B (en) * | 2017-12-27 | 2020-05-19 | 汕头市骏码凯撒有限公司 | Silver alloy bonding wire and manufacturing method thereof |
| CN114107724A (en) * | 2021-11-19 | 2022-03-01 | 江西蓝微电子科技有限公司 | Silver alloy bonding wire and preparation method thereof |
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Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5721830A (en) * | 1980-07-14 | 1982-02-04 | Tanaka Kikinzoku Kogyo Kk | Bonding wire for semiconductor element |
| CN108183075A (en) * | 2017-12-27 | 2018-06-19 | 汕头市骏码凯撒有限公司 | A kind of silver alloy bonding wire and its manufacturing method |
| CN108796285A (en) * | 2018-06-30 | 2018-11-13 | 汕头市骏码凯撒有限公司 | A kind of silver alloy bonding wire and its manufacturing method |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115058620A (en) * | 2021-11-19 | 2022-09-16 | 江西蓝微电子科技有限公司 | Silver alloy bonding wire and preparation method thereof |
| CN114883286A (en) * | 2022-06-08 | 2022-08-09 | 江西蓝微电子科技有限公司 | Gold-silver alloy composite bonding wire and manufacturing method thereof |
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| CN115058620A (en) | 2022-09-16 |
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