CN114102439B - Intelligent chip chemical grinding fluid supply method - Google Patents
Intelligent chip chemical grinding fluid supply method Download PDFInfo
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- CN114102439B CN114102439B CN202111395263.3A CN202111395263A CN114102439B CN 114102439 B CN114102439 B CN 114102439B CN 202111395263 A CN202111395263 A CN 202111395263A CN 114102439 B CN114102439 B CN 114102439B
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- 238000000034 method Methods 0.000 title claims abstract description 36
- 238000000227 grinding Methods 0.000 title claims abstract description 18
- 239000000126 substance Substances 0.000 title claims abstract description 14
- 239000012530 fluid Substances 0.000 title claims abstract description 12
- 239000007788 liquid Substances 0.000 claims abstract description 48
- 238000002156 mixing Methods 0.000 claims abstract description 34
- 239000002994 raw material Substances 0.000 claims abstract description 31
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 16
- 238000003825 pressing Methods 0.000 claims abstract description 7
- 238000013135 deep learning Methods 0.000 claims abstract description 4
- 230000005611 electricity Effects 0.000 claims abstract description 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 36
- 229910052757 nitrogen Inorganic materials 0.000 claims description 18
- 239000000243 solution Substances 0.000 claims description 15
- 238000005498 polishing Methods 0.000 claims description 13
- 239000000463 material Substances 0.000 claims description 6
- 239000011259 mixed solution Substances 0.000 claims description 6
- 239000000203 mixture Substances 0.000 claims description 5
- 230000001276 controlling effect Effects 0.000 claims description 4
- 238000001514 detection method Methods 0.000 claims description 4
- 238000003756 stirring Methods 0.000 claims description 4
- 238000013473 artificial intelligence Methods 0.000 claims description 3
- 238000007664 blowing Methods 0.000 claims description 3
- 238000004140 cleaning Methods 0.000 claims description 3
- 238000012790 confirmation Methods 0.000 claims description 3
- 239000007789 gas Substances 0.000 claims description 3
- 230000001105 regulatory effect Effects 0.000 claims description 3
- 238000007711 solidification Methods 0.000 claims description 3
- 230000008023 solidification Effects 0.000 claims description 3
- 241000098700 Sarcocheilichthys parvus Species 0.000 claims 1
- 238000012544 monitoring process Methods 0.000 abstract description 2
- 238000004364 calculation method Methods 0.000 abstract 1
- 230000007547 defect Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000002002 slurry Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B57/00—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents
- B24B57/02—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents for feeding of fluid, sprayed, pulverised, or liquefied grinding, polishing or lapping agents
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Grinding-Machine Dressing And Accessory Apparatuses (AREA)
Abstract
The invention discloses a method for supplying chemical grinding fluid to an intelligent chip, which comprises the following steps: 1. the plant water, electricity and gas are connected with the equipment, and a valve at the plant end is opened; 2. the equipment is powered on, and the rotary switch powers on the equipment; 3. waiting for the initialization completion of the equipment; 4. inputting the formula into a database; 5. pressing an operation power supply start button; 6. the equipment automatically starts and executes a cleaning program; 7. the mixing tank and the feeding tank are respectively cleaned for 3 times and then are automatically closed; 8. the equipment is ready, and tasks can be executed; 9. selecting a formula; 10. carrying a raw material barrel to an equipment raw material scale; 11. scanning a raw material barrel code by a code scanning gun; 12. the system compares and judges whether the codes are consistent with the formulas recorded in the database and whether the weights are consistent. The invention uses intelligent calculation deep learning method to quantitatively detect while monitoring the conductivity liquid, and can supply the grinding liquid by using a chemical grinding liquid supply system with higher efficiency and high precision.
Description
Technical Field
The invention relates to the technical field of grinding fluid supply, in particular to a method for supplying intelligent chip chemical grinding fluid.
Background
The conventional chip chemical polishing liquid supply system has been applied for decades, and the conventional technology is used for supplying chemical liquid, but with rapid development of technologies around the world, especially the rising of semiconductor and chip industries, the conventional chip chemical polishing liquid supply system cannot meet the development of the current market environment, and the defects of the conventional chip chemical polishing liquid supply system are mainly characterized by long liquid stirring time, low precision, few available liquid routes and the like.
Disclosure of Invention
Aiming at the technical defects, the invention aims to provide an intelligent chip chemical grinding liquid supply method, which solves the problems of long supply time, low precision and few available liquid routes of the existing grinding liquid.
In order to solve the technical problems, the invention adopts the following technical scheme:
the invention provides a method for supplying intelligent chip chemical grinding fluid, which comprises the following steps:
1. the plant water, electricity and gas are connected with the equipment, and a valve at the plant end is opened;
2. the equipment is powered on, and the rotary switch powers on the equipment;
3. waiting for the initialization completion of the equipment;
4. inputting the formula into a database;
5. pressing an operation power supply start button;
6. the equipment automatically starts and executes a cleaning program;
7. the mixing tank and the feeding tank are respectively cleaned for 3 times and then are automatically closed;
8. the equipment is ready, and tasks can be executed;
9. selecting a formula;
10. carrying a raw material barrel to an equipment raw material scale;
11. scanning a raw material barrel code by a code scanning gun;
12. comparing the system, judging whether the codes are consistent with the formulas recorded in the database, and judging whether the weights are consistent;
green prompt of the system interface outer frame in OK, red flashing prompt of the system interface outer frame in NO, and sound and light prompt of the buzzer;
14. clicking the mixture and the feed in an automatic picture;
15. the system starts according to clicking of a selected formula, a raw material diaphragm pump is started, the opening and closing of each valve body are automatically controlled according to the formula mixed solution through proportion, integral and differential of deviation, and the primary mixed solution is fed back according to weight;
16. starting a mixing circulation diaphragm pump to uniformly stir the mixed liquid in the mixing tank, and accurately filling trace raw materials through artificial intelligence and deep learning according to the feedback of conductivity to ensure that the solution in the mixing tank reaches various indexes in the formula;
17. the feed tank conveys the mixed liquid to the feed tank;
18. starting a liquid supply tank magnetic pump after conveying is finished, and continuing circulation;
preferably, in the step 4, the formula includes a material code and a material ratio.
Preferably, in the step 4, if there is a recipe skip in the database.
Preferably, in the step 18, the process of supplying the polishing liquid to the outside is a process of controlling and adjusting the proportion, the integral and the derivative of the deviation, the process of supplying the polishing liquid to the outside is divided into four paths, the four paths are not necessarily opened at the same time, a sensor is added on an outlet pipeline of each path, namely detection is performed, when one path is opened, or two paths are opened, or three paths are opened, and then the opening degrees of the polishing liquid supply pump of the magnetic pump are different, namely the provided flow rates are different; under the condition of only one output, the revolution of the magnetic pump is minimum, and the magnetic pump is operated in full power when the magnetic pump is opened in four paths.
Preferably, the grinding fluid supply loop is provided with a flowmeter, when different paths of external output, namely one path of output, two paths of output, three paths of output and four paths of output are detected, the flow rate of the grinding fluid supply loop is correspondingly different, a strict proportional relation exists, and if the numerical value displayed on the flowmeter is far different from the numerical value calculated in normal theory, the opening of the return three-way valve is required to be regulated by PID control.
Preferably, the magnetic pump always runs and is provided with a feed back, the three-way valve is always opened, when the liquid is not needed to be supplied from the outside, the solution in the feed barrel is ensured to be continuously circulated, the solidification is avoided, and if the situation that the liquid is not needed from the outside is detected, the opening of the three-way valve for the feed back is small; when one path of output exists, the difference between the numerical value displayed by the flowmeter and the theoretical numerical value is more, the opening of the return three-way valve is adjusted to compensate the flow.
Preferably, besides the automatic liquid supply flow, cleaning, nitrogen blowing and nitrogen humidification are further arranged, in the whole automatic liquid supply process, nitrogen humidification is always opened, pure water is added into the nitrogen tank when the nitrogen is humidified, the nitrogen tank is provided with an upper limit sensor and a lower limit sensor, and when the liquid level of the pure water is relatively low, water is injected inwards and cannot exceed the upper limit of the pure water.
Preferably, in the process of mixing, the whole process is to completely mix a tank first, after mixing a tank, waiting for the empty feed tank, transferring the solution in the mixing tank to the feed tank, at the moment, the empty feed tank is empty, then mixing, and the solution in the second tank is repeated, so long as the empty feed tank is empty, mixing the solution according to the current formula, and when one or both of the weight of the raw material tank A and the weight of the raw material tank B are lower than the lower limit value, alarming to prompt that the raw material tank needs to be replaced, and code scanning confirmation is needed when the raw material tank needs to be replaced.
Preferably, the mixing is continued only if the replacement barrel is identified as either stock a or stock B, and in any case matches the missing stock.
Preferably, an emergency stop button is provided, and this automatic operation is stopped when the emergency stop button is pressed, regardless of whether the mixing process or the feeding process is performed.
The invention has the beneficial effects that: the invention can supply the polishing liquid by a chemical polishing liquid supply system with higher efficiency and high precision through detection during the monitoring of the conductivity liquid.
Detailed Description
The following description of the technical solutions in the embodiments of the present invention will be clear and complete, and it is obvious that the described embodiments are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
Embodiment 1, a method for supplying a chemical polishing slurry to a smart chip, the method comprising the steps of: 1. the plant water, electricity and gas are connected with the equipment, and a valve at the plant end is opened;
2. the equipment is powered on, and the rotary switch powers on the equipment;
3. waiting for the initialization completion of the equipment;
4. inputting the formula into a database;
5. pressing an operation power supply start button;
6. the equipment automatically starts and executes a cleaning program;
7. the mixing tank and the feeding tank are respectively cleaned for 3 times and then are automatically closed;
8. the equipment is ready, and tasks can be executed;
9. selecting a formula;
10. carrying a raw material barrel to an equipment raw material scale;
11. scanning a raw material barrel code by a code scanning gun;
12. comparing the system, judging whether the codes are consistent with the formulas recorded in the database, and judging whether the weights are consistent;
green prompt of the system interface outer frame in OK, red flashing prompt of the system interface outer frame in NO, and sound and light prompt of the buzzer;
14. clicking the mixture and the feed in an automatic picture;
15. the system starts according to clicking of a selected formula, a raw material diaphragm pump is started, the opening and closing of each valve body are automatically controlled according to the formula mixed solution through proportion, integral and differential of deviation, and the primary mixed solution is fed back according to weight;
16. starting a mixing circulation diaphragm pump to uniformly stir the mixed liquid in the mixing tank, and accurately filling trace raw materials through artificial intelligence and deep learning according to the feedback of conductivity to ensure that the solution in the mixing tank reaches various indexes in the formula;
17. the feed tank conveys the mixed liquid to the feed tank;
18. starting a liquid supply tank magnetic pump after conveying is finished, and continuing circulation;
preferably, in the step 4, the formula includes a material code and a material ratio.
Preferably, in the step 4, if there is a recipe skip in the database.
Preferably, in the step 18, the process of supplying the polishing liquid to the outside is a process of controlling and adjusting the proportion, the integral and the derivative of the deviation, the process of supplying the polishing liquid to the outside is divided into four paths, the four paths are not necessarily opened at the same time, a sensor is added on an outlet pipeline of each path, namely detection is performed, when one path is opened, or two paths are opened, or three paths are opened, and then the opening degrees of the polishing liquid supply pump of the magnetic pump are different, namely the provided flow rates are different; under the condition of only one output, the revolution of the magnetic pump is minimum, and the magnetic pump is operated in full power when the magnetic pump is opened in four paths.
Preferably, the grinding fluid supply loop is provided with a flowmeter, when different paths of external output, namely one path of output, two paths of output, three paths of output and four paths of output are detected, the flow rate of the grinding fluid supply loop is correspondingly different, a strict proportional relation exists, and if the numerical value displayed on the flowmeter is far different from the numerical value calculated in normal theory, the opening of the return three-way valve is required to be regulated by PID control.
Preferably, the magnetic pump always runs and is provided with a feed back, the three-way valve is always opened, when the liquid is not needed to be supplied from the outside, the solution in the feed barrel is ensured to be continuously circulated, the solidification is avoided, and if the situation that the liquid is not needed from the outside is detected, the opening of the three-way valve for the feed back is small; when one path of output exists, the difference between the numerical value displayed by the flowmeter and the theoretical numerical value is more, the opening of the return three-way valve is adjusted to compensate the flow.
Preferably, besides the automatic liquid supply flow, cleaning, nitrogen blowing and nitrogen humidification are further arranged, in the whole automatic liquid supply process, nitrogen humidification is always opened, pure water is added into the nitrogen tank when the nitrogen is humidified, the nitrogen tank is provided with an upper limit sensor and a lower limit sensor, and when the liquid level of the pure water is relatively low, water is injected inwards and cannot exceed the upper limit of the pure water.
Preferably, in the process of mixing, the whole process is to completely mix a tank first, after mixing a tank, waiting for the empty feed tank, transferring the solution in the mixing tank to the feed tank, at the moment, the empty feed tank is empty, then mixing, and the solution in the second tank is repeated, so long as the empty feed tank is empty, mixing the solution according to the current formula, and when one or both of the weight of the raw material tank A and the weight of the raw material tank B are lower than the lower limit value, alarming to prompt that the raw material tank needs to be replaced, and code scanning confirmation is needed when the raw material tank needs to be replaced.
Preferably, the mixing is continued only if the replacement barrel is identified as either stock a or stock B, and in any case matches the missing stock.
Preferably, an emergency stop button is provided, and this automatic operation is stopped when the emergency stop button is pressed, regardless of whether the mixing process or the feeding process is performed. Pressing the operation power stop button once is pause, if the continuous pressing time exceeds three seconds, the operation power is disconnected, and the whole process is stopped. In the case of a pause, the mixing and feeding can be continued by pressing the start button again, but once the operating power is turned off, the whole stopping process cannot be resumed.
Claims (1)
1. The intelligent chip chemical polishing liquid supply method is characterized by comprising the following steps: (1) The plant water, electricity and gas are connected with the equipment, and a valve at the plant end is opened;
(2) The equipment is powered on, and the rotary switch is used for powering on the equipment;
(3) waiting for the initialization of the equipment to be completed;
(4) Inputting a formula to a database, wherein the formula comprises a material code and a material ratio, and if the formula is skipped in the database;
(5) Pressing an operation power supply start button;
(6) Automatically starting and executing a cleaning program by the equipment;
(7) The mixing tank and the feeding tank are respectively cleaned for 3 times and then are automatically closed;
(8) The equipment is ready and can execute tasks;
(9) Selecting a formula;
(10) Transporting the raw material barrel to an equipment raw material scale;
(11) Scanning the raw material barrel code by a code scanning gun;
(12) Comparing the system, judging whether the codes are consistent with the formulas recorded in the database, and judging whether the weights are consistent;
(13) The system interface outer frame green prompt when OK, the system interface outer frame red flash prompt when NO, the buzzer sends out the sound and light prompt;
(14) Clicking the mixture and the feed in an automatic picture;
(15) Starting the system according to clicking of the selected formula, starting a raw material diaphragm pump, automatically mixing the solution according to the formula, controlling the opening and closing of each valve body through the proportion, integral and differential of deviation, and feeding back the primary mixed solution according to the weight;
(16) Starting a mixing circulation diaphragm pump to uniformly stir the mixed solution in the mixing tank, and filling accurate trace raw materials through artificial intelligence and deep learning according to the feedback of conductivity to ensure that the solution in the mixing tank reaches various indexes in the formula;
(17) The feed tank conveys the mixed liquid to the feed tank;
(18) Starting a magnetic pump of the liquid supply tank after the transportation is finished, continuing to circulate, wherein the process of supplying the grinding liquid to the outside is a process of controlling and adjusting the proportion, the integral and the differential of the deviation, firstly dividing the external liquid supply into four paths, opening the four paths simultaneously or respectively, and arranging a sensor for detection on an outlet pipeline of each path, wherein when one path or a plurality of paths are opened, the opening degrees of the grinding liquid supply pumps of the magnetic pump are different;
a flowmeter is arranged on the grinding fluid supply loop, and when detecting that the flow of the grinding fluid supply loop is different, the numerical value displayed on the flowmeter is different from the numerical value calculated in normal theory, the opening of the return three-way valve is regulated by PID control;
the magnetic pump is always operated, and a return three-way valve is always opened, so that the solution in the feed barrel is ensured to be continuously circulated when the liquid is not required to be fed from the outside, solidification is avoided, and if the fact that the liquid is not required from the outside is detected, the opening of the return three-way valve is reduced; when one path of output exists, the numerical value displayed by the flowmeter is different from the theoretical numerical value, and the opening degree of the return three-way valve is adjusted to compensate the flow;
besides an automatic liquid supply process, cleaning, nitrogen blowing and nitrogen humidification are also arranged, during the whole automatic liquid supply process, nitrogen humidification is always opened, pure water is added into a nitrogen tank when the nitrogen is humidified, an upper limit sensor and a lower limit sensor are arranged in the nitrogen tank, and when the liquid level of the pure water is low, water is injected inwards and cannot exceed the upper limit of the pure water;
in the mixing process, firstly mixing a tank, waiting for the empty feed tank, transferring the solution in the mixing tank into the feed tank, at the moment, the empty feed tank is used for mixing again, and repeating the process, wherein when one or two of the raw material tanks are lower than the lower limit value, an alarm prompts that the raw material tanks need to be replaced, the raw material tanks need to be replaced for code scanning confirmation, and the replaced raw material tanks are matched with the missing raw materials;
an emergency stop button is arranged, and the mixing process or the feeding process is forced to stop when the button is pressed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111395263.3A CN114102439B (en) | 2021-11-23 | 2021-11-23 | Intelligent chip chemical grinding fluid supply method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111395263.3A CN114102439B (en) | 2021-11-23 | 2021-11-23 | Intelligent chip chemical grinding fluid supply method |
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| Publication Number | Publication Date |
|---|---|
| CN114102439A CN114102439A (en) | 2022-03-01 |
| CN114102439B true CN114102439B (en) | 2024-01-09 |
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| CN202111395263.3A Active CN114102439B (en) | 2021-11-23 | 2021-11-23 | Intelligent chip chemical grinding fluid supply method |
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