CN114102439A - Intelligent chip chemical grinding fluid supply method - Google Patents
Intelligent chip chemical grinding fluid supply method Download PDFInfo
- Publication number
- CN114102439A CN114102439A CN202111395263.3A CN202111395263A CN114102439A CN 114102439 A CN114102439 A CN 114102439A CN 202111395263 A CN202111395263 A CN 202111395263A CN 114102439 A CN114102439 A CN 114102439A
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- tank
- mixing
- supply
- equipment
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- 238000000034 method Methods 0.000 title claims abstract description 50
- 238000000227 grinding Methods 0.000 title claims abstract description 22
- 239000012530 fluid Substances 0.000 title claims abstract description 21
- 239000000126 substance Substances 0.000 title claims abstract description 21
- 238000002156 mixing Methods 0.000 claims abstract description 37
- 239000007788 liquid Substances 0.000 claims abstract description 36
- 239000002994 raw material Substances 0.000 claims abstract description 18
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 13
- 238000003825 pressing Methods 0.000 claims abstract description 6
- 238000013135 deep learning Methods 0.000 claims abstract description 4
- 230000005611 electricity Effects 0.000 claims abstract description 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 38
- 239000000463 material Substances 0.000 claims description 32
- 229910052757 nitrogen Inorganic materials 0.000 claims description 19
- 239000000243 solution Substances 0.000 claims description 17
- 239000002002 slurry Substances 0.000 claims description 13
- 238000005498 polishing Methods 0.000 claims description 10
- 239000011259 mixed solution Substances 0.000 claims description 7
- 239000000203 mixture Substances 0.000 claims description 6
- 238000003756 stirring Methods 0.000 claims description 4
- 238000013473 artificial intelligence Methods 0.000 claims description 3
- 238000000861 blow drying Methods 0.000 claims description 3
- 238000004140 cleaning Methods 0.000 claims description 3
- 238000011049 filling Methods 0.000 claims description 3
- 238000009472 formulation Methods 0.000 claims description 3
- 239000007789 gas Substances 0.000 claims description 3
- 238000007711 solidification Methods 0.000 claims description 3
- 230000008023 solidification Effects 0.000 claims description 3
- 238000012790 confirmation Methods 0.000 claims 1
- 238000001514 detection method Methods 0.000 abstract description 2
- 238000012544 monitoring process Methods 0.000 abstract description 2
- 238000004364 calculation method Methods 0.000 abstract 1
- 238000013329 compounding Methods 0.000 description 10
- 238000003860 storage Methods 0.000 description 8
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B57/00—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents
- B24B57/02—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents for feeding of fluid, sprayed, pulverised, or liquefied grinding, polishing or lapping agents
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Grinding-Machine Dressing And Accessory Apparatuses (AREA)
Abstract
The invention discloses an intelligent chip chemical grinding fluid supply method, which comprises the following steps: 1. connecting the plant water, electricity and gas with equipment, and opening a plant end valve; 2. the equipment is powered on, and the switch is rotated to electrify the equipment; 3. waiting for the initialization of the equipment to be completed; 4. inputting a formula into a database; 5. pressing an operation power supply starting button; 6. the equipment automatically starts and executes a cleaning program; 7. the mixing tank and the feeding tank are respectively cleaned for 3 times and then automatically closed; 8. after the equipment is prepared, the task can be executed; 9. selecting a formula; 10. conveying the raw material barrel to an equipment raw material scale; 11. scanning the code of the raw material barrel by a code scanning gun; 12. the system compares and judges whether the code is consistent with the formula recorded in the database and whether the weight is consistent. The invention can supply the grinding liquid by a chemical grinding liquid supply system with higher efficiency and higher precision by monitoring the conductivity liquid and simultaneously applying an intelligent calculation deep learning method to carry out quantitative detection.
Description
Technical Field
The invention relates to the technical field of grinding fluid supply, in particular to a method for supplying intelligent chip chemical grinding fluid.
Background
The conventional chip chemical grinding fluid supply system is applied for decades, the conventional process is used for supplying chemical fluid, and the conventional process is a relatively mature technology, but with the rapid development of science and technology all over the world, particularly the rise of the semiconductor and chip industries, the conventional chip chemical grinding fluid supply system cannot meet the development of the current market environment, and the defects of the conventional chip chemical grinding fluid supply system are mainly reflected in the problems of long liquid stirring time, low precision, few available liquid routes and the like.
Disclosure of Invention
In view of the technical shortcomings, the invention aims to provide an intelligent chip chemical polishing solution supply method, which solves the problems of long supply time, low precision and few available liquid routes of the existing polishing solution.
In order to solve the technical problems, the invention adopts the following technical scheme:
the invention provides a method for supplying intelligent chip chemical grinding fluid, which comprises the following steps:
1. connecting the plant water, electricity and gas with equipment, and opening a plant end valve;
2. the equipment is powered on, and the switch is rotated to electrify the equipment;
3. waiting for the initialization of the equipment to be completed;
4. inputting a formula into a database;
5. pressing an operation power supply starting button;
6. the equipment automatically starts and executes a cleaning program;
7. the mixing tank and the feeding tank are respectively cleaned for 3 times and then automatically closed;
8. after the equipment is prepared, the task can be executed;
9. selecting a formula;
10. conveying the raw material barrel to an equipment raw material scale;
11. scanning the code of the raw material barrel by a code scanning gun;
12. the system compares the codes with the formula recorded in the database and judges whether the codes are consistent with the formula and the weight is consistent with the formula;
when the system interface is in OK, the outer frame of the system interface is in green color, when the system interface is in NO, the outer frame of the system interface is in red color and twinkles for prompting, and the buzzer sends out acousto-optic prompt;
14. clicking material mixing and feeding in an automatic picture;
15. the system starts clicking according to a selected formula, the raw material diaphragm pump is started, the valves of all paths are automatically controlled to be opened and closed according to a formula mixed solution through proportion, integral and differential of deviation, and a primary mixed solution is fed back according to weight;
16. starting a material mixing circulating diaphragm pump to uniformly stir the mixed liquid in the material mixing tank, and accurately filling trace raw materials through artificial intelligence and deep learning according to the feedback of the conductivity, so that the solution in the material mixing tank reaches various indexes in the formula;
17. the feeding tank conveys the mixed liquid to the liquid feeding tank;
18. after the conveying is finished, the magnetic pump of the liquid supply tank is started to continue circulation;
preferably, in the step 4, the formula comprises material codes and material proportions.
Preferably, in step 4, if there is a formula to be skipped from the database.
Preferably, in the step 18, the process of supplying the grinding fluid to the outside is a process of controlling and adjusting a deviation ratio, an integral and a differential, the external supply fluid is divided into four paths, the four paths are not necessarily opened simultaneously, a sensor is added to an outlet pipeline of each path, that is, the sensor detects the deviation, when one path is opened, or two paths are opened, or three paths are opened, then the opening degrees of the grinding fluid supply pumps of the magnetic pump are different, that is, the supplied flow rates are different; when the output is only opened, the rotation number of the magnetic pump is minimum, and when the output is opened for four paths, the magnetic pump is operated by full force.
Preferably, a flowmeter is arranged on the grinding fluid supply loop, when an open loop is detected to be output outwards, namely one output, two outputs, three outputs and four outputs are different, the flow rate of the grinding fluid supply loop should be correspondingly different, a strict proportional relation exists, and if the numerical value displayed on the flowmeter is much different from the numerical value calculated in a normal theory, the PID control is required to adjust the opening degree of the feed back three-way valve.
Preferably, the magnetic pump runs all the time, a feed back is provided, the three-way valve is also opened all the time, when liquid supply is not needed outside, the solution in the feeding barrel is ensured to circulate continuously to avoid solidification, and if no liquid supply requirement outside is detected, the opening degree of the feed back three-way valve is small; when one path of output is available, the difference between the numerical value displayed by the flowmeter and the theoretical numerical value is large, and the opening degree of the feed back three-way valve is adjusted to compensate the flow.
Preferably, besides an automatic liquid supply flow, the automatic liquid supply device is further provided with cleaning, nitrogen blow-drying and humidifying nitrogen, in the whole automatic liquid supply process, the nitrogen humidifying is opened all the time, pure water is added into the nitrogen tank in the nitrogen humidifying process, the nitrogen tank is provided with an upper limiting sensor and a lower limiting sensor, and when the liquid level of the pure water is lower, the pure water is injected inwards and cannot exceed the upper limiting sensor.
Preferably, in the middle of the compounding process, whole flow is first complete one jar of mixing, mix after one jar, wait that the feed tank is empty, just shift the solution in the compounding jar to the feed tank, just empty in the compounding jar this time, empty in the compounding jar mixes after, second jar solution so repeats, as long as empty in the compounding jar, just mixing according to this present formulation is being carried out and is mixing, when former storage bucket A and former storage bucket B, when one or two weight all is less than the lower limit value, just report to the police and indicate to change former storage bucket, need sweep the sign indicating number when changing former storage bucket and confirm.
Preferably, the mixing can be continued only if the material barrel to be replaced is identified as material a or material B, or in any case, matches the material that is missing.
Preferably, an emergency stop button is provided, whether it is a mixing process or a feeding process, and the automatic operation process stops when the emergency stop button is pressed.
The invention has the beneficial effects that: the invention can supply the grinding liquid by a chemical grinding liquid supply system with higher efficiency and higher precision through the detection during the monitoring of the conductivity liquid.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Embodiment 1, a method for supplying a chemical polishing slurry for a smart chip, the method comprising the steps of: 1. connecting the plant water, electricity and gas with equipment, and opening a plant end valve;
2. the equipment is powered on, and the switch is rotated to electrify the equipment;
3. waiting for the initialization of the equipment to be completed;
4. inputting a formula into a database;
5. pressing an operation power supply starting button;
6. the equipment automatically starts and executes a cleaning program;
7. the mixing tank and the feeding tank are respectively cleaned for 3 times and then automatically closed;
8. after the equipment is prepared, the task can be executed;
9. selecting a formula;
10. conveying the raw material barrel to an equipment raw material scale;
11. scanning the code of the raw material barrel by a code scanning gun;
12. the system compares the codes with the formula recorded in the database and judges whether the codes are consistent with the formula and the weight is consistent with the formula;
when the system interface is in OK, the outer frame of the system interface is in green color, when the system interface is in NO, the outer frame of the system interface is in red color and twinkles for prompting, and the buzzer sends out acousto-optic prompt;
14. clicking material mixing and feeding in an automatic picture;
15. the system starts clicking according to a selected formula, the raw material diaphragm pump is started, the valves of all paths are automatically controlled to be opened and closed according to a formula mixed solution through proportion, integral and differential of deviation, and a primary mixed solution is fed back according to weight;
16. starting a material mixing circulating diaphragm pump to uniformly stir the mixed liquid in the material mixing tank, and accurately filling trace raw materials through artificial intelligence and deep learning according to the feedback of the conductivity, so that the solution in the material mixing tank reaches various indexes in the formula;
17. the feeding tank conveys the mixed liquid to the liquid feeding tank;
18. after the conveying is finished, the magnetic pump of the liquid supply tank is started to continue circulation;
preferably, in the step 4, the formula comprises material codes and material proportions.
Preferably, in step 4, if there is a formula to be skipped from the database.
Preferably, in the step 18, the process of supplying the grinding fluid to the outside is a process of controlling and adjusting a deviation ratio, an integral and a differential, the external supply fluid is divided into four paths, the four paths are not necessarily opened simultaneously, a sensor is added to an outlet pipeline of each path, that is, the sensor detects the deviation, when one path is opened, or two paths are opened, or three paths are opened, then the opening degrees of the grinding fluid supply pumps of the magnetic pump are different, that is, the supplied flow rates are different; when the output is only opened, the rotation number of the magnetic pump is minimum, and when the output is opened for four paths, the magnetic pump is operated by full force.
Preferably, a flowmeter is arranged on the grinding fluid supply loop, when an open loop is detected to be output outwards, namely one output, two outputs, three outputs and four outputs are different, the flow rate of the grinding fluid supply loop should be correspondingly different, a strict proportional relation exists, and if the numerical value displayed on the flowmeter is much different from the numerical value calculated in a normal theory, the PID control is required to adjust the opening degree of the feed back three-way valve.
Preferably, the magnetic pump runs all the time, a feed back is provided, the three-way valve is also opened all the time, when liquid supply is not needed outside, the solution in the feeding barrel is ensured to circulate continuously to avoid solidification, and if no liquid supply requirement outside is detected, the opening degree of the feed back three-way valve is small; when one path of output is available, the difference between the numerical value displayed by the flowmeter and the theoretical numerical value is large, and the opening degree of the feed back three-way valve is adjusted to compensate the flow.
Preferably, besides an automatic liquid supply flow, the automatic liquid supply device is further provided with cleaning, nitrogen blow-drying and humidifying nitrogen, in the whole automatic liquid supply process, the nitrogen humidifying is opened all the time, pure water is added into the nitrogen tank in the nitrogen humidifying process, the nitrogen tank is provided with an upper limiting sensor and a lower limiting sensor, and when the liquid level of the pure water is lower, the pure water is injected inwards and cannot exceed the upper limiting sensor.
Preferably, in the middle of the compounding process, whole flow is first complete one jar of mixing, mix after one jar, wait that the feed tank is empty, just shift the solution in the compounding jar to the feed tank, just empty in the compounding jar this time, empty in the compounding jar mixes after, second jar solution so repeats, as long as empty in the compounding jar, just mixing according to this present formulation is being carried out and is mixing, when former storage bucket A and former storage bucket B, when one or two weight all is less than the lower limit value, just report to the police and indicate to change former storage bucket, need sweep the sign indicating number when changing former storage bucket and confirm.
Preferably, the mixing can be continued only if the material barrel to be replaced is identified as material a or material B, or in any case, matches the material that is missing.
Preferably, an emergency stop button is provided, whether it is a mixing process or a feeding process, and the automatic operation process stops when the emergency stop button is pressed. Once the operation power stop button is pressed, the operation power is suspended, and if the continuous pressing time exceeds three seconds, the operation power is disconnected, and the whole process is stopped. In case of pause, the mixing and feeding can be continued by pressing the start button again, but once the operation power is cut off, the whole stopping process can not be resumed.
Claims (10)
1. The intelligent chip chemical grinding fluid supply method is characterized by comprising the following steps:
(1) connecting the plant water, electricity and gas with equipment, and opening a plant end valve;
(2) the device is powered on, and the switch is rotated to power on the device;
(3) waiting for the initialization of the device to be completed;
(4) inputting the recipe into a database;
(5) pressing an operating power supply start button;
(6) the device automatically starts and executes the cleaning program;
(7) the mixing tank and the feeding tank are respectively cleaned for 3 times and then automatically closed;
(8) the device is ready to perform the task;
(9) selecting a formula;
(10) transporting the raw material barrel to the equipment raw material scale;
(11) scanning the raw material barrel code by a code scanning gun;
(12) comparing by the system, and judging whether the code is consistent with the formula recorded in the database and whether the weight is consistent;
(13) a green prompt of the outer frame of the system interface is given when OK is carried out, a red flashing prompt of the outer frame of the system interface is given when NO is carried out, and a buzzer gives out an acousto-optic prompt;
(14) clicking material mixing and feeding in the automatic picture;
(15) the system starts clicking according to a selected formula, the raw material diaphragm pump is started, the valves of all paths are automatically controlled to be opened and closed according to a formula mixed solution through proportion, integral and differential of deviation, and a primary mixed solution is fed back according to weight;
(16) starting a mixing circulating diaphragm pump to uniformly stir the mixed solution in the mixing tank, and accurately filling trace raw materials through artificial intelligence and deep learning according to the feedback of the conductivity so that the solution in the mixing tank reaches various indexes in the formula;
(17) the feeding tank conveys the mixed liquid to the liquid feeding tank;
(18) after the conveying is finished, the magnetic pump of the liquid supply tank is started to continue circulation.
2. The method of claim 1, wherein in step 4, the recipe comprises a material code and a material ratio.
3. A method for supplying intelligent chip chemical polishing slurry as recited in claim 1, wherein in step 4, if there is a recipe in the database to skip.
4. A method as claimed in claim 1, wherein the step 18 of supplying the slurry to the outside is a process of controlling and adjusting a deviation ratio, an integral and a differential, the process includes dividing the slurry to the outside into four paths, the four paths are not necessarily opened simultaneously, a sensor is added to an outlet of each path for detecting, when one path is opened, or two paths are opened, or three paths are opened, the opening degree of the slurry supply pump of the magnetic pump is different, that is, the flow rate is different; when the output is only opened, the rotation number of the magnetic pump is minimum, and when the output is opened for four paths, the magnetic pump is operated by full force.
5. An intelligent chip chemical polishing slurry supply method as claimed in claim 4, wherein a flowmeter is provided on the slurry supply loop, and when it is detected that the open loop is open to the outside, i.e. one output, two outputs, three outputs, four outputs are open to different paths, the flow rate of the slurry supply loop should be correspondingly different, and there is a strict proportional relationship, and if the value displayed on the flowmeter is much different from the value calculated in normal theory, the PID control is required to adjust the opening of the feed back three-way valve.
6. An intelligent chip chemical polishing slurry supply method as claimed in claim 1, wherein the magnetic pump is operated all the time, and there is a feed back, the three-way valve is also opened all the time, when no liquid supply is required from outside, the solution in the supply tank is ensured to circulate continuously to avoid solidification, and if no liquid supply is required from outside, the opening degree of the feed back three-way valve is small; when one path of output is available, the difference between the numerical value displayed by the flowmeter and the theoretical numerical value is large, and the opening degree of the feed back three-way valve is adjusted to compensate the flow.
7. An intelligent method for supplying chemical polishing slurry to chip as claimed in claim 1, wherein in addition to the automatic liquid supply process, there are provided a cleaning process, a nitrogen blow-drying process, and a nitrogen humidifying process, wherein the nitrogen humidifying process is always on, and when the nitrogen is humidified, pure water is added into the nitrogen tank, and the nitrogen tank is provided with an upper and lower limit sensor, and when the liquid level of the pure water is relatively low, water is injected into the nitrogen tank and cannot exceed the upper limit thereof.
8. A method for supplying intelligent chip chemical polishing slurry according to claim 1, wherein during the mixing process, the whole process is to completely mix a tank, after the mixing of the tank, the solution in the mixing tank is transferred to the supply tank when the supply tank is empty, the mixing of the solution in the mixing tank is performed after the mixing tank is empty, the solution in the second tank is repeated, the mixing of the solution is performed according to the current formulation as long as the mixing tank is empty, when one or both of the material bucket a and the material bucket B have a weight lower than the lower limit value, an alarm is issued to indicate that the material bucket needs to be replaced, and code scanning confirmation needs to be performed when the material bucket is replaced.
9. The method for supplying intelligent chemical polishing slurry for chip according to claim 8, wherein the mixing is continued only when it is confirmed that the material barrel to be replaced is the material A or the material B, or the material barrel is matched with the material lacking.
10. A method for supplying intelligent chip chemical polishing slurry according to claim 8, wherein an emergency stop button is provided, and the automatic operation is stopped when the emergency stop button is pressed regardless of the mixing process or the feeding process.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202111395263.3A CN114102439B (en) | 2021-11-23 | 2021-11-23 | Intelligent chip chemical grinding fluid supply method |
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|---|---|---|---|
| CN202111395263.3A CN114102439B (en) | 2021-11-23 | 2021-11-23 | Intelligent chip chemical grinding fluid supply method |
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| CN114102439A true CN114102439A (en) | 2022-03-01 |
| CN114102439B CN114102439B (en) | 2024-01-09 |
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