CN114076647A - Flexible linear pressure sensor - Google Patents
Flexible linear pressure sensor Download PDFInfo
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- CN114076647A CN114076647A CN202010823916.2A CN202010823916A CN114076647A CN 114076647 A CN114076647 A CN 114076647A CN 202010823916 A CN202010823916 A CN 202010823916A CN 114076647 A CN114076647 A CN 114076647A
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- pressure sensor
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- linear pressure
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/005—Measuring force or stress, in general by electrical means and not provided for in G01L1/06 - G01L1/22
Abstract
The invention provides a flexible linear pressure sensor which comprises a pressure sensitive layer, wherein a plurality of convex structures are arranged on the surface of the pressure sensitive layer, the plurality of convex structures comprise one or more of hemispheres, pyramids and arches, or the convex structures are in Gaussian distribution. The flexible pressure sensor provided by the embodiment of the invention has the characteristics of simple process, high linear sensitivity, simple data processing and the like.
Description
Technical Field
The invention relates to a pressure sensor, in particular to a flexible and linear pressure sensor.
Background
Flexible pressure sensors are receiving more and more attention due to their applications in the fields of health monitoring and human-computer interaction. Linear sensitivity over the entire pressure range is an important measure of the performance of a flexible pressure sensor. For most flexible pressure sensors, the sensing signal saturates rapidly at lower pressures, and as the pressure increases further, the signal increases slowly and the sensitivity decreases, deviating from the original linearity. If the detection of the pressure is realized, nonlinear compensation or complex analysis and calculation are required, which brings great inconvenience to the design, calibration and data processing of the pressure sensor. On the other hand, most of the flexible pressure sensors in the market print electronic coatings such as pressure sensitive nano materials and conductive silver paste on film substrates (such as polyester film PET, polyimide film PI) and the like, and the prepared flexible sensors have the defects of low sensitivity, easy deformation at 150 ℃, serious performance drift caused by temperature influence and the like, so that the application scenes of the flexible sensors are severely limited.
Therefore, it is very important to develop a flexible pressure sensor with ultra-wide sensing range and high linear sensitivity, which can withstand a high temperature of 150 ℃.
Disclosure of Invention
The invention mainly aims to provide a flexible linear pressure sensor which comprises a pressure sensitive layer, wherein a plurality of convex structures are arranged on the surface of the pressure sensitive layer, the plurality of convex structures comprise one or more of hemispheres, pyramids and arches, or the convex structures are distributed in a Gaussian manner.
The flexible pressure sensor provided by the embodiment of the invention has the characteristics of simple process, high linear sensitivity, simple data processing and the like.
Drawings
Various objects, features and advantages of the present invention will become more apparent from the following detailed description of preferred embodiments of the invention, when considered in conjunction with the accompanying drawings. The drawings are merely exemplary of the invention and are not necessarily drawn to scale. In the drawings, like reference characters designate the same or similar parts throughout the different views. Wherein:
FIG. 1 is a schematic structural diagram of a flexible linear pressure sensor in accordance with an embodiment of the present invention;
FIG. 2a is a schematic structural diagram of a conductive elastomer film according to an embodiment of the present invention;
FIG. 2b is a schematic structural diagram of a conductive elastomer film according to another embodiment of the present invention;
FIG. 2c is a schematic structural diagram of a conductive elastomer film according to another embodiment of the present invention;
FIG. 3 is a schematic structural diagram of a conductive elastomer film according to another embodiment of the present invention;
FIG. 4 is a flow chart illustrating the preparation of a patterned conductive elastomer film according to one embodiment of the present invention;
FIG. 5a is a graph showing the pressure test curves of different array heights of the flexible linear pressure sensor manufactured in example 1 of the present invention;
FIG. 5b is a graph showing pressure test curves at different temperatures when the height of the flexible linear pressure sensor manufactured in example 1 is 40 μm;
FIG. 6 is a pressure test graph of a flexible linear pressure sensor made in example 2 of the present invention with a height of 80 μm.
FIG. 7 is a graph of a pressure test curve of a flexible linear pressure sensor made in example 3 of the present invention with a height of 120 μm.
FIG. 8 is a graph of a pressure test curve of a flexible linear pressure sensor manufactured in example 4 according to the present invention, which has a height average of 60 μm.
Detailed Description
Exemplary embodiments that embody features and advantages of the invention are described in detail below in the specification. It is to be understood that the invention is capable of other embodiments and that various changes in form and details may be made therein without departing from the scope of the invention and the description and drawings are to be regarded as illustrative in nature and not as restrictive.
The invention provides a flexible pressure sensor which comprises a conductive circuit layer 21 and a pressure sensitive layer, wherein a plurality of convex structures are arranged on the surface of the pressure sensitive layer, wherein the convex structures can be hemispheres, pyramids and arches, and the convex structures can also be in Gaussian distribution.
In one embodiment, the protruding structure may be a hollow structure or a solid structure.
In one embodiment, the hemisphere may be 3/20-1/2 spheres, such as 1/2 sphere, 2/5 sphere, 1/5 sphere, etc.; the hemispheroid is a structure cut from a round ball (matrix), the bottom surface of the hemispheroid is round, and the hemispheroid is provided with an arc top surface connected with the bottom surface; 1/2 the sphere is half of the parent sphere, and its height (the size from the top to the bottom center) is 1/2 of the parent sphere diameter; 1/3 the height of the sphere is 1/3 of the diameter of the sphere of its parent body; and so on for others.
In one embodiment, the pyramid may be a triangular pyramid, a rectangular pyramid, a pentagonal pyramid, a hexagonal pyramid, an octagonal pyramid, etc., and the pyramid is connected to the surface of the pressure-sensitive layer through its bottom surface.
In one embodiment, the pyramid may be a regular pyramid, such as a regular triangular pyramid, a regular rectangular pyramid, a regular pentagonal pyramid, a regular hexagonal pyramid, a regular octagonal pyramid, and the like.
In one embodiment, the arch may be a portion of a cylinder, such as a structure obtained by cutting the cylinder along a plane parallel to the axis of the cylinder, such as an 1/2 cylinder, or a structure smaller than 1/2 cylinder, such as a 1/3 cylinder, a 1/4 cylinder, and the like.
In one embodiment, the arch is connected to the surface of the pressure sensitive layer by the cutting plane, which is rectangular, and further may be square, and the side length of the square may be the same as the height of the arch.
In one embodiment, the protruding structures are in gaussian distribution, and a plurality of protruding structures in gaussian distribution are connected to each other, so that the plurality of protruding structures are integrally distributed in an undulating manner.
In one embodiment, the pressure sensitive layer is a patterned conductive elastomer film 31 made of a conductive composition including an elastomer material, a carbon-based powder, and a conductive ink. Wherein the conductive elastomer film prepared from the conductive composition can bear the high temperature of 150 ℃.
In one embodiment, the plurality of raised structures are arranged in an array (e.g., a rectangular array) to pattern the pressure sensitive layer.
In one embodiment, the plurality of protruding structures are in a square array, and the plurality of protruding structures in the array are arranged at equal intervals; the convex structures are regular triangular pyramids or regular rectangular pyramids, the ratio of the side length of the bottoms of the convex structures to the distance between two adjacent convex structures in the array is (0.9-1.1): 1, and preferably, the ratio of the side length of the bottoms of the convex structures to the distance between two adjacent convex structures in the array is 1: 1; for example, the side length of the convex structure is 200 μm, and the distance between two adjacent convex structures is 200 μm; the side length of the convex structure is 300 mu m, and the distance between two adjacent convex structures is 300 mu m; the side length of the protruding structures is 400 μm, and the distance between two adjacent protruding structures is 400 μm.
In one embodiment, the plurality of convex structures in the array are arranged in the same direction, for example, the convex structures are regular triangular pyramids, and the side length of the triangle at the base side of each convex structure is parallel to the corresponding side length of the triangle at the base side of the adjacent regular triangular pyramid.
In one embodiment, the protruding structures are regular pyramids, the number of sides n of a polygon at the bottom of the protruding structures is greater than or equal to 5, such as a regular pentagonal pyramid, a regular hexagonal pyramid or a regular octagonal pyramid, and the ratio of the maximum dimension of the bottom of the protruding structure to the distance between two adjacent protruding structures in the array is (0.9-1.1): 1. Preferably, the ratio of the maximum dimension of the bottom of a raised structure to the pitch of two adjacent raised structures in the array is 1: 1. For example, the base of a regular hexagonal pyramid is a regular hexagon, the largest dimension of which is from one diagonal of the interior.
In one embodiment, the protruding structures are hemispheroids, and the ratio of the diameter of the bottom surface of each hemispheroid to the distance between two adjacent protruding structures in the array is (0.9-1.1): 1; preferably, the ratio of the diameter of the bottom of a raised structure to the pitch of two adjacent raised structures in the array is 1: 1.
In one embodiment, the protruding structures are arches obtained by cutting a cylinder along a plane parallel to the axis of the cylinder, the bottom of the arch is square, and the ratio of the side length of the square to the distance between two adjacent protruding structures in the array is (0.9-1.1): 1, for example 1: 1.
The bottom or bottom surface of the convex structure refers to the part of the convex structure connected with the surface of the pressure sensitive layer, and if the convex structure is a hemisphere, the hemisphere is connected with the pressure sensitive layer through the round bottom surface; if the convex structure is a regular triangular pyramid, the regular triangular pyramid is connected with the pressure sensitive layer through the bottom surface of the regular triangle. The pitch of two raised structures refers to the shortest distance between two raised structures in the array of the pressure sensitive layer.
In one embodiment, the convex structure may be an arch as shown in fig. 2a, a rectangular pyramid as shown in fig. 2b, or a hemisphere as shown in fig. 2 c.
In one embodiment, the raised structures of the pressure sensitive layer may have a gaussian distribution, and the structure thereof may be as shown in fig. 3.
In one embodiment, the height of the protruding structure may be 30-150 μm, such as 40 μm, 80 μm, 120 μm, etc., preferably, the height of the protruding structure is 40-60 μm; wherein the height of the raised structures refers to the largest dimension in a direction perpendicular to the pressure sensitive layer.
In one embodiment, the protrusion structures may have a Gaussian distribution with a surface protrusion height average of 30-150 μm, such as height average of 60 μm, 80 μm, 100 μm, etc.
In one embodiment, the patterned conductive elastomer film 31 is prepared by coating a conductive composition slurry on a patterned substrate and curing the conductive composition slurry.
In one embodiment, the pattern on the substrate matches the structure of the conductive elastomer film, such as an array of a plurality of raised structures on the substrate.
In one embodiment, the elastomeric material may be rubber.
In one embodiment, the rubber may be silicone rubber, which may be ecoflex, Polydimethylsiloxane (PDMS).
In one embodiment, the carbon-based powder may be a powder based on carbon element, particularly a powder of a carbon simple substance, such as one or more of carbon fiber powder, biomass carbon, conductive carbon black, and graphite powder, and since the carbon-based powder is relatively low in price, the cost of the conductive elastomer film produced by using the carbon-based powder is reduced.
In one embodiment, the diameter of the carbon fiber powder may be 5 to 10 μm, such as 5 μm, 8 μm, 10 μm; the length may be 10 to 100 μm, for example, 20 μm, 30 μm, 50 μm, 80 μm, etc.
In one embodiment, the conductive ink may be a conductive carbon ink.
In one embodiment, the carbon particles in the conductive carbon ink may have a particle size of 40 nm.
In one embodiment, the conductive composition includes 13 parts by mass of a carbon-based powder, 52 parts by mass of an elastomer material, and 35 parts by mass of a conductive ink.
As shown in fig. 4, a method for preparing a patterned conductive elastomer film according to an embodiment of the present invention includes: coating the conductive composition paste 30 on the patterned substrate 10, and vacuumizing to discharge bubbles; coating a slurry film with a preset thickness by using a scraper 20; then, the substrate 10 after the blade coating was put into a 100 ℃ forced air drying oven to be cured, and after being held for 2 hours, it was taken out, cooled at room temperature, and peeled off to obtain the patterned conductive elastomer film 31.
In one embodiment, the patterned substrate may be a glass plate, a quartz plate, a silicon wafer, or sandpaper.
In one embodiment, the patterned substrate may be formed by engraving a predetermined pattern on the substrate with a laser.
In one embodiment, the patterned substrate may be sandpaper with a gaussian distribution of protrusion heights.
The preparation method of the patterned conductive elastomer film provided by the embodiment of the invention can effectively reduce the manufacturing cost, simplify the manufacturing steps and bear the high temperature of 150 ℃.
In one embodiment, the flexible linear pressure sensor includes two conductive circuit layers, and the pressure sensitive layer is sandwiched between the two conductive circuit layers.
In one embodiment, the conductive circuit layer includes a flexible substrate and a conductive circuit formed on the flexible substrate; the flexible substrate may be, for example, Polyimide (PI), Polydimethylsiloxane (PDMS), or woven cloth; the conductive lines may be gold, silver, or copper lines, for example.
According to the embodiment of the invention, the patterned conductive elastomer film can be prepared by utilizing the moldability of PDMS, and the response state of the material to force can be changed by virtue of surface patterning, so that the sensor has high linearity in a wide range of 0-600 kPa and has excellent sensing performance in practical potential application.
The flexible pressure sensor provided by the embodiment of the invention has a simple preparation process, can be used for preparing various patterns according to template design, and can also be used for preparing sensors with any shape and any size according to design, so that large-scale production is realized.
The flexible pressure sensor is suitable for miniaturized and integrated equipment, can test palm pressing pressure distribution, plantar pressure distribution, weight and the like, is used for manufacturing intelligent gloves, and has wide application prospects in the fields of man-machine interaction, rehabilitation training and the like.
The flexible pressure sensor provided by the embodiment of the invention is suitable for a scene in which pressure measurement needs to be carried out on a high-temperature medium in petroleum, automobiles and chemical engineering.
The flexible linear pressure sensor and the preparation thereof according to an embodiment of the present invention will be further described with reference to the accompanying drawings and specific examples. Wherein, the carbon fiber powder, the conductive carbon ink and the PDMS are all purchased from the market; the diameter range of the carbon fiber powder is 5-10 mu m, and the length range is 10-100 mu m; the particle size of the carbon particles in the conductive carbon ink is about 40 nm. The tests involved included a pressure performance test and a high temperature performance test of the sensor, where fig. 5b is a high temperature performance test of the sensor, and it can be seen from the figure that temperature changes have little effect on sensor performance in the range of 20 ℃ to 150 ℃. The performance of the sensor composed of different patterned conductive elastomer films is tested in fig. 5a, fig. 6, fig. 7 and fig. 8, the detection device is an MTS mechanical testing machine, and the test range and the sensitivity distribution of the sensor can be seen from the graph.
Example 1
Preparation of conductive elastomer film
Adding carbon fiber powder with the diameter of 5 micrometers and the length of 20 micrometers into a PDMS main agent, uniformly dispersing through planets, then adding a curing agent, and uniformly stirring to obtain carbon fiber powder-PDMS composite slurry;
adding conductive carbon printing ink into the carbon fiber powder-PDMS composite slurry, and mechanically stirring uniformly to obtain conductive elastomer slurry; the mass fraction of the carbon fiber powder in the conductive elastomer slurry is 13%, and the mass fraction of the conductive carbon ink is 35%;
coating the conductive elastomer slurry on a glass plate with an arched matrix with laser engraving bottom edges of 0.2mm and intervals of 0.2mm, removing bubbles in vacuum, carrying out blade coating on the glass plate with a preset thickness by using an adjustable scraper, then placing the glass plate in an air-blast drying oven for curing at 100 ℃ for 2h, and stripping to obtain the conductive elastomer film with the arched array on one side surface.
Conductive elastomer films with arch structure heights of 40 μm, 60 μm, 80 μm and 120 μm were prepared according to the above steps.
Preparation of pressure sensor
And respectively taking the PI conductive films with copper-coated surfaces as two conductive circuit layers, and superposing the PI conductive films and the patterned conductive elastomer films together to obtain the pressure sensor.
FIG. 5a shows the performance of the pressure sensor assembled by the arched conductive elastomer films with different heights prepared in example 1 as the pressure sensitive layer (four sensors with the heights of 40 μm, 60 μm, 80 μm and 120 μm are respectively named as P40、P60、P80、P120) The result shows that the sensitivity of different arch-shaped unit heights keeps uniform linearity in the full-range within the measurement range of 0-600 kPa, wherein P40The sensor was 25.40kPa-1Goodness of fit R2Is 0.997. FIG. 5b shows P prepared in example 140Performance plots of the sensor at different temperatures. The results show that in the range of 20 ℃ to 150 ℃, the temperature change has little effect on the sensor performance.
Example 2
Preparation of conductive elastomer film
Adding carbon fiber powder with the diameter of 8 mu m and the length of 30 mu m into a PDMS main agent, uniformly dispersing through planets, then adding a curing agent, and uniformly stirring to obtain carbon fiber powder-PDMS composite slurry;
adding conductive carbon printing ink into the carbon fiber powder-PDMS composite slurry, and mechanically stirring uniformly to obtain conductive elastomer slurry; the mass fraction of the carbon fiber powder in the conductive elastomer slurry is 13%, and the mass fraction of the conductive carbon ink is 35%;
coating the conductive elastomer slurry on a glass plate with a pyramid array (rectangular pyramid) with the laser engraved base edge of 0.3mm and the distance of 0.3mm, removing bubbles in vacuum, scraping and coating the glass plate with a preset thickness by using an adjustable scraper, then placing the glass plate in a forced air drying oven for curing at 100 ℃ for 2h, and stripping to obtain the conductive elastomer film with the pyramid array on one side surface.
Preparation of pressure sensor
And respectively taking the PDMS conductive films of the surface vapor-plated circuit as two conductive circuit layers, and superposing the conductive circuit layers and the patterned conductive elastomer film together to obtain the pressure sensor.
FIG. 6 shows performance display results of a pressure sensor assembled by the pyramid conductive elastomer film with the height of 80 μm prepared in example 2 as a pressure sensitive layer, wherein the sensitivity of the sensor is kept uniform and linear within a measurement range of 0-600 kPa, and the sensitivity of the sensor is 19.22kPa-1Goodness of fit R2Is 0.998.
Example 3
Preparation of conductive elastomer film
Adding carbon fiber powder with the diameter of 10 micrometers and the length of 50 micrometers into a PDMS main agent, uniformly dispersing through planets, then adding a curing agent, and uniformly stirring to obtain carbon fiber powder-PDMS composite slurry;
adding conductive carbon printing ink into the carbon fiber powder-PDMS composite slurry, and mechanically stirring uniformly to obtain conductive elastomer slurry; the mass fraction of the carbon fiber powder in the conductive elastomer slurry is 13%, and the mass fraction of the conductive carbon ink is 35%;
coating the conductive elastomer slurry on a glass plate with a hemispherical array, wherein the glass plate is laser-engraved with the diameter of 0.2mm and the distance of 0.2mm, removing bubbles in vacuum, carrying out blade coating on the glass plate with a preset thickness by using an adjustable scraper, then placing the glass plate in an air-blast drying oven for curing at 100 ℃ for 2h, and stripping to obtain the conductive elastomer film with the hemispherical array on one side surface.
Preparation of pressure sensor
And respectively taking the PI conductive films with the surfaces printed with silver paste by silk screen printing as two conductive circuit layers, and superposing the PI conductive films and the patterned conductive elastomer films together to obtain the pressure sensor.
FIG. 7 shows the performance of the pressure sensor assembled by the hemispherical conductive elastomer film with the height of 120 μm prepared in example 3 as the pressure sensitive layer, which shows that the sensor sensitivity can also maintain uniform linearity within the measurement range of 0-600 kPa, wherein the sensitivity is 13.71kPa-1Goodness of fit R2Is 0.996.
Example 4
Preparation of conductive elastomer film
Adding carbon fiber powder with the diameter of 10 mu m and the length of 80 mu m into a PDMS main agent, uniformly dispersing through planets, then adding a curing agent, and uniformly stirring to obtain carbon fiber powder-PDMS composite slurry;
adding conductive carbon printing ink into the carbon fiber powder-PDMS composite slurry, and mechanically stirring uniformly to obtain conductive elastomer slurry; the mass fraction of the carbon fiber powder in the conductive elastomer slurry is 13%, and the mass fraction of the conductive carbon ink is 35%;
coating the conductive elastomer slurry on Gaussian distribution quartz with the average value of pre-carving height of 60 mu m, removing bubbles in vacuum, carrying out blade coating on the quartz with preset thickness by using an adjustable scraper, then placing the quartz in an air-blast drying oven for curing at 100 ℃ for 2h, and stripping to obtain the conductive elastomer film with one side surface being with the Gaussian distribution protrusions.
Preparation of pressure sensor
And respectively taking the woven cloth conductive films with copper-coated surfaces as two conductive circuit layers, and superposing the conductive circuit layers and the patterned conductive elastomer film together to obtain the pressure sensor.
FIG. 8 shows that the performance of the pressure sensor assembled by the Gaussian distribution conductive elastomer film with the height of 60 μm prepared in example 4 as the pressure sensitive layer shows that the sensitivity of the sensor can also keep uniform linearity within the measurement range of 0-600 kPa, wherein the sensitivity is 29.08kPa-1Goodness of fit R2Is 0.995.
Unless otherwise defined, all terms used herein have the meanings commonly understood by those skilled in the art.
The described embodiments of the present invention are for illustrative purposes only and are not intended to limit the scope of the present invention, and those skilled in the art may make various other substitutions, alterations, and modifications within the scope of the present invention, and thus, the present invention is not limited to the above-described embodiments but only by the claims.
Claims (10)
1. A flexible linear pressure sensor comprises a pressure sensitive layer, wherein a plurality of convex structures are arranged on the surface of the pressure sensitive layer, the plurality of convex structures comprise one or more of hemispheroids, pyramids and arches, or the convex structures are distributed in a Gaussian manner.
2. The flexible linear pressure sensor of claim 1, wherein the raised structure is connected to the surface of the pressure sensitive layer by a base; the hemispheroid is one or more of 3/20-1/2 spheres, and the bottom of the hemispheroid is circular;
and/or the pyramid is a regular pyramid, and the bottom of the regular pyramid is a regular polygon;
and/or the arch body is a structure obtained by cutting the cylinder along a plane parallel to the axis of the cylinder, and the bottom of the arch body is a cutting plane.
3. The flexible linear pressure sensor of claim 2, wherein the plurality of raised structures are arranged in an array.
4. The flexible linear pressure sensor of claim 3, wherein the plurality of raised structures form a square array, the plurality of raised structures comprising one or more of the hemispheres, regular triangular pyramids, regular rectangular pyramids, the arches having square cutting planes, the ratio of the side length or diameter of the base of a raised structure to the pitch of two adjacent raised structures being (0.9-1.1): 1; alternatively, the first and second electrodes may be,
the convex structures comprise regular pyramids, the number n of the sides of a polygon at the bottom of each regular pyramid is not less than 5, and the ratio of the maximum size of the bottom of each regular pyramid to the distance between two adjacent convex structures is (0.9-1.1): 1.
5. The flexible linear pressure sensor of claim 1, wherein the height of the raised structures is 30-150 μm.
6. The flexible linear pressure sensor of claim 1, wherein the pressure sensitive layer is made of a conductive composition comprising an elastomeric material, a carbon-based powder, and a conductive ink.
7. The flexible linear pressure sensor of claim 6, wherein the conductive composition comprises 13 parts by mass of the carbon-based powder, 52 parts by mass of the elastomeric material, and 35 parts by mass of the conductive ink.
8. The flexible linear pressure sensor of claim 6, wherein the elastomeric material comprises rubber, the carbon-based powder comprises one or more of carbon fiber powder, biomass charcoal, conductive carbon black, graphite powder, and the conductive ink comprises conductive carbon ink.
9. The flexible linear pressure sensor of claim 1, comprising two conductive trace layers, the pressure sensitive layer sandwiched between the two conductive trace layers.
10. The flexible linear pressure sensor of claim 9, wherein the conductive trace layer comprises a flexible substrate and a conductive trace disposed on the flexible substrate; the flexible substrate comprises one or more of polyethylene terephthalate, polyimide, polydimethylsiloxane and textile cloth; the conductive circuit comprises one or more of a gold circuit, a silver circuit, a copper circuit and a carbon circuit.
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