CN114070414A - Multichannel radio frequency light receiving arrangement - Google Patents
Multichannel radio frequency light receiving arrangement Download PDFInfo
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- CN114070414A CN114070414A CN202111320716.6A CN202111320716A CN114070414A CN 114070414 A CN114070414 A CN 114070414A CN 202111320716 A CN202111320716 A CN 202111320716A CN 114070414 A CN114070414 A CN 114070414A
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04B—TRANSMISSION
- H04B10/00—Transmission systems employing electromagnetic waves other than radio-waves, e.g. infrared, visible or ultraviolet light, or employing corpuscular radiation, e.g. quantum communication
- H04B10/60—Receivers
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
- G02B6/293—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
- G02B6/293—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
- G02B6/29379—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means characterised by the function or use of the complete device
- G02B6/2938—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means characterised by the function or use of the complete device for multiplexing or demultiplexing, i.e. combining or separating wavelengths, e.g. 1xN, NxM
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4204—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
- G02B6/4215—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms the intermediate optical elements being wavelength selective optical elements, e.g. variable wavelength optical modules or wavelength lockers
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4251—Sealed packages
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Computer Networks & Wireless Communication (AREA)
- Signal Processing (AREA)
- Optical Communication System (AREA)
Abstract
The invention discloses a multichannel radio frequency light receiving device which comprises a packaging shell, wherein a space light path unit, a photoelectric conversion unit, a radio frequency expansion unit and a radio frequency processing unit are arranged in the packaging shell. The invention realizes the conversion of single-path optical carrier radio frequency signal input into multi-path optical carrier radio frequency signal output by integrating the wavelength division multiplexer, the plurality of photoelectric detector chips and the plurality of radio frequency processing units, has a simple optical link structure, and simultaneously realizes optical transmission with high coupling efficiency and radio frequency transmission with low loss and high isolation. The invention hermetically packages the components and parts such as the wavelength division multiplexer, the photoelectric detector chip, the microwave circuit, the chip and the like in the same shell, and has the characteristics of small size, high integration level and high reliability.
Description
Technical Field
The invention belongs to the technical field of microwave photons, and particularly relates to a multichannel radio frequency light receiving device.
Background
At present, a conventional radio frequency light receiving module is composed of a wavelength division multiplexer and a high-speed photoelectric detector module, and signal light is demodulated by the wavelength division multiplexer and then input to the photoelectric detection module for photoelectric conversion.
The split radio frequency light receiving module has large size and complex link and is difficult to finish dense assembly. In addition, in the separated receiving module, the modules are butted through the optical fiber connector. The more the number of channels, the more connection points, and these discontinuities will become risk points in a harsh use environment.
The physical distance between transmission channels of the traditional radio frequency light receiving module is only 0.5nm, the radio frequency isolation between the channels is only 20dBc, and radio frequency crosstalk easily exists.
Therefore, in order to improve the utilization rate of the assembly space and improve the reliability of the rf optical receiving module, a multi-path parallel rf optical receiving module with high integration level needs to be developed.
Disclosure of Invention
The invention aims to overcome the defects of the prior art and provide a multichannel radio frequency light receiving device, which realizes the conversion from single-path optical carrier radio frequency signal input to multi-path optical carrier radio frequency signal output by integrating a wavelength division multiplexer and a plurality of photoelectric detector chips, has a simple optical link structure and simultaneously realizes optical transmission with high coupling efficiency and radio frequency transmission with low loss and high isolation.
The purpose of the invention is realized by the following technical scheme:
a multi-channel radio frequency light receiving device comprises a packaging shell, wherein a space light path unit, a photoelectric conversion unit, a radio frequency unfolding unit and a radio frequency processing unit are arranged in the packaging shell, and the packaging shell is provided with an opening for assembling an electronic device and an optical window;
the space light path unit comprises a collimator assembly arranged on the light window, a light splitting prism for dividing a light path into two paths is arranged at the position of an emergent light of the collimator assembly, one path of the light path is input into the monitoring detector assembly through the light splitting prism, the other path of the light path is input into the wavelength division multiplexer, and a coupling lens is further arranged at the output end of the wavelength division multiplexer;
the photoelectric conversion unit comprises a photoelectric detector assembly arranged at a position capable of receiving an optical signal converged by the coupling lens, the photoelectric detector assembly comprises a detector carrier and photoelectric detector chips arranged on one surface of the detector carrier facing the coupling lens, the number of the photoelectric detector chips is not less than that of optical paths output by the wavelength division demultiplexer, and the photoelectric detector chips are connected with a microwave printed circuit board of the radio frequency expansion unit through a radio frequency signal transmission waveguide;
the microwave printed circuit board comprises a radio frequency transmission circuit, and the distance between each channel of the radio frequency transmission circuit is larger than the distance between the output ends of the adjacent photoelectric detectors;
the radio frequency processing unit comprises a radio frequency chip and a passive circuit which are connected with the radio frequency transmission circuit, the radio frequency processing unit comprises a plurality of channels, the number of the channels is not less than the number of the photoelectric detector chips, and adjacent channels are isolated by metal separation cavities.
Further, the monitoring detector assembly comprises a monitoring detector and a carrier plate, wherein the carrier plate enables the monitoring detector and an input optical path to be kept horizontal.
Furthermore, a boss array is arranged at the position where a wavelength division multiplexer is installed in the packaging shell, a groove matched with the boss array is formed in the bottom of the wavelength division multiplexer, and the wavelength division multiplexer is embedded and bonded with the boss array.
Furthermore, a boss and a cavity groove which are used for enabling the radio frequency devices in the photoelectric conversion unit, the radio frequency unfolding unit and the radio frequency processing unit to be located on the same plane are arranged in the packaging shell.
Furthermore, circuit patterns are arranged on three adjacent surfaces of the detector carrier, and each circuit pattern comprises a metal bonding pad for mounting a photoelectric detector chip, a bonding pad for wire bonding, a radio frequency signal transmission waveguide for transmitting a radio frequency signal and a radio frequency output port for matching the radio frequency expansion unit in impedance.
Further, a radio frequency shielding hole is formed between the radio frequency signal transmission waveguides.
Furthermore, radio frequency shielding holes are formed among all transmission lines of the microwave printed circuit board.
Furthermore, a passive device is embedded in or attached to the surface of the microwave printed circuit board.
Furthermore, the electronic device comprises a feed insulator arranged on the same plane with the optical window and a radio frequency insulator arranged on the nearest surface to the radio frequency chip.
Further, the packaging shell is made of Kovar, No. 10 steel or silicon-aluminum alloy.
The invention has the beneficial effects that:
(1) the invention realizes the conversion of single-path optical carrier radio-frequency signal input into multi-path optical carrier radio-frequency signal output by integrating the wavelength division multiplexer, the plurality of photoelectric detector chips and the plurality of radio-frequency processing units, and the optical link structure is simplified.
(2) The invention realizes the optical transmission with high coupling efficiency and the radio frequency transmission with low loss and high isolation.
(3) The invention hermetically packages the components and parts such as the wavelength division multiplexer, the photoelectric detector chip, the microwave circuit, the chip and the like in the same shell, and has the advantages of small size, high integration level and high reliability.
Drawings
Fig. 1 is a schematic structural diagram of a multi-channel rf optical receiving device according to an embodiment of the present invention;
fig. 2 is a schematic diagram of a land array of the multichannel rf optical receiving device of the present invention.
Description of the drawings: the method comprises the following steps of 1-packaging a shell, 2-feeding an insulator, 3-radio frequency insulator, 4-optical window, 5-collimator assembly, 6-beam splitting prism, 7-monitoring detector assembly, 8-wavelength division demultiplexer, 9-coupling lens, 10-photoelectric detector chip, 11-detector carrier, 12-microwave printed circuit board, 13-radio frequency chip and 14-radio frequency signal transmission waveguide.
Detailed Description
The embodiments of the present invention are described below with reference to specific embodiments, and other advantages and effects of the present invention will be easily understood by those skilled in the art from the disclosure of the present specification. The invention is capable of other and different embodiments and of being practiced or of being carried out in various ways, and its several details are capable of modification in various respects, all without departing from the spirit and scope of the present invention. It is to be noted that the features in the following embodiments and examples may be combined with each other without conflict.
All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
The split radio frequency light receiving module has large size and complex link, and is difficult to finish dense assembly. In addition, in the separated receiving module, the modules are butted through the optical fiber connector. The more the number of channels, the more connection points, and these discontinuities will become risk points in a harsh use environment. Therefore, in order to improve the utilization rate of the assembly space and improve the reliability of the module, a multi-path parallel radio frequency light receiving module with high integration level needs to be developed.
In order to solve the above technical problem, the following embodiments of a multi-channel rf optical receiving device of the present invention are proposed.
Referring to fig. 1, fig. 1 is a schematic structural diagram of a multi-channel rf optical receiving device according to this embodiment. The device specifically comprises a packaging shell 1, wherein a space light path unit, a photoelectric conversion unit, a radio frequency expansion unit and a radio frequency processing unit are arranged in the packaging shell 1.
The package case 1 of the present embodiment has outer dimensions of 40mm × 40mm × 7 mm.
Specifically, in the present embodiment, kovar is used for the package housing 1, and the surface of the package housing 1 is partially plated with gold. The packaging shell 1 is provided with an opening for assembling the feed insulator 2, the radio frequency insulator 3 and the optical window 4.
In one embodiment, the package case 1 has positioning lines as a reference for mounting components and parts in the package.
As an implementation manner, a boss and a cavity groove for enabling the radio frequency devices in the photoelectric conversion unit, the radio frequency expansion unit and the radio frequency processing unit to be located on the same plane are arranged in the package housing 1, so that the assembly convenience is improved, and the radio frequency transmission loss is reduced.
As an implementation manner, the package housing 1 further includes a corresponding cover plate, and the cover plate is welded to the package housing 1 after the whole device is assembled and tested, so as to achieve the air tightness of the whole multichannel rf optical receiving device.
Specifically, the spatial light path unit includes a collimator assembly 5 disposed at the optical window 4, and a collimator sleeve of the collimator assembly 5 and the collimator are assembled using a laser spot welding method and are assembled to the optical opening of the metal case where the assembly of the optical window 4 is completed. The light-emitting port of the collimator assembly 5 is provided with a light-splitting prism 6 which divides the light path into two paths, one path of light-emitting port of the light-splitting prism 6 is in active coupling with a monitoring detector assembly 7, so that one path of light path is input into the monitoring detector assembly 7, the other path of light-emitting port of the light-splitting prism 6 is in active coupling with a light-in port of a wavelength division multiplexer 8, so that the other path of light path is input into the wavelength division multiplexer 8, and the output end of the wavelength division multiplexer 8 is further provided with a coupling lens 9.
As an embodiment, the monitoring probe assembly 7 includes a monitoring probe and a carrier plate that keeps the monitoring probe and the incoming optical path horizontal.
As an embodiment, a boss array is disposed at a position where the wavelength division multiplexer 8 is installed in the package housing 1, referring to fig. 2, which is a schematic view of the boss array provided in this embodiment, as shown in fig. 2, a groove matched with the boss array is disposed at the bottom of the wavelength division multiplexer 8, and the wavelength division multiplexer 8 is embedded and bonded with the boss array. Generally, because wavelength division multiplexer 8 weight is lighter, when adopting modes such as screw to fix, displacement just takes place when receiving very little power easily, make the emergent light can't aim at coupling lens 9, consequently this embodiment adopts the bonding mode, and on conventional bonding mode basis, this embodiment has a plurality of recesses with wavelength division multiplexer 8 bottom design, and install the boss array that wavelength division multiplexer 8's position design corresponds in encapsulation casing 1, scribble the viscose on a plurality of bosses, align wavelength division multiplexer 8 boss and install, both can make wavelength division multiplexer 8's mounted position more accurate, can increase wavelength division multiplexer 8's viscose area of contact again, with the volume of glue filling between wavelength division multiplexer 8 and the encapsulation casing 1 of increase, further promote wavelength division multiplexer 8's dress intensity of pasting.
As an embodiment, the demultiplexer 8 includes six light-emitting ports, and six coupling lenses 9 are mounted at the light-emitting ports to realize light path convergence.
The photoelectric conversion unit comprises a photoelectric detector assembly arranged at the position capable of receiving the optical signal converged by the coupling lens 9, the photoelectric detector assembly comprises a detector carrier 11 and photoelectric detector chips 10 arranged on one surface of the detector carrier 11 facing the coupling lens 9, the number of the photoelectric detector chips 10 is not less than that of the optical paths output by the wavelength division multiplexer 8, and the photoelectric detector chips 10 are connected with a microwave printed circuit board 12 of the radio frequency expansion unit through a radio frequency signal transmission waveguide 14. The output end of the photoelectric detector chip 10 is connected with a radio frequency signal transmission waveguide 14, the radio frequency signal transmission waveguide 14 is tightly attached to the detector carrier 11 from one surface facing the coupling lens 9, extends to the top of the detector carrier 11 and is connected with the microwave printed circuit board 12, the photoelectric conversion part receives the optical signal converged by the coupling lens 9 at the spatial light path part and then completes photoelectric conversion through the high-speed detector component, so that the radio frequency signal transmission direction is changed from vertical to horizontal through the radio frequency signal transmission waveguides 14 tightly attached to the two surfaces of the detector carrier 11.
In one embodiment, the detector carrier 11 is an aluminum nitride ceramic block, and a circuit pattern is formed on three adjacent surfaces, i.e., a surface facing the coupling lens 8, an opposite surface facing the coupling lens 8, and a top portion, using a thin film process. The included angle of any two adjacent surfaces is slightly larger than 90 degrees, and the circuit pattern material is gold. The circuit pattern comprises a photoelectric detector chip 10, a mounting bonding pad for lead bonding, a radio frequency signal transmission waveguide for radio frequency signal transmission, a radio frequency output port for impedance matching with the radio frequency expansion unit, and a radio frequency transmission line connected with the mounting bonding pad. Metallized holes are provided between the rf transmission lines on the detector carrier 11 to improve isolation between the six channels. The photoelectric detector chip 10 is flatly attached to the mounting pad of the detector carrier 11, after the lead bonding is completed, the detector carrier 11 is assembled to the surface of the inner cavity of the packaging shell 1 by rotating 90 degrees, so that the light-sensitive surface of the photoelectric detector chip 10 faces the coupling lens 9, and the active coupling of six light paths of the six photoelectric detector chips 10 and the wavelength division multiplexer 8 is completed. The mounting method of the photo-detector chip 10 provided by the present embodiment is easier to assemble the coupling lens 8 in front of the photo-detector chip 10.
The microwave printed circuit board 12 of the radio frequency expansion unit can use a single-layer or multi-layer microwave printed circuit board 12, a low temperature co-fired ceramic (LTCC) circuit board. The radio frequency unfolding circuit can realize the unfolding of radio frequency signals on a space interval according to the requirements of a radio frequency interface, and the high isolation of the signals is guaranteed; through the design of a multilayer circuit, the radio frequency unfolding circuit can realize the functions of radio frequency transmission, power supply and the like through internal and external wiring; through radio frequency simulation, the radio frequency unfolding circuit can realize low-loss transmission of radio frequency signals; through the design of the radio frequency shielding hole, the radio frequency unfolding circuit can realize better isolation between channels; the radio frequency unfolding circuit can realize the power distribution of radio frequency signals by embedding or surface-mounting the passive devices. The purpose of the radio frequency expansion circuit is to match the channel interval requirement of a rear-end microwave processing channel, so that an isolation cavity is added between channel intervals to ensure the isolation.
The radio frequency processing unit comprises a radio frequency chip 13 and a passive circuit which are connected with the radio frequency transmission circuit of the microwave printed circuit board 12, and the radio frequency processing unit realizes the function of processing the radio frequency signal output by the photoelectric conversion unit. The radio frequency processing unit comprises a plurality of channels, the number of the channels is not less than the number of the photoelectric detector chips 10, and adjacent channels are isolated by adopting metal separation cavities.
Specifically, the surface and the inner layer of the microwave printed circuit board 12 are provided with metal wiring for a radio frequency transmission circuit, which is used for realizing radio frequency transmission and expanding the physical distance between radio frequency channels output by the detector carrier 11 from 2mm to 5.2 mm. Metallized through holes are arranged among the radio frequency channels of the radio frequency unfolding circuit piece, so that the isolation degree among the six channels is improved. The six groups of radio frequency processing parts are composed of radio frequency transmission lines and radio frequency chips 13 and are assembled in six metal channels of the packaging shell 1. The power control micro module (not shown in the figure) is manufactured by using a miniaturized hybrid integration process and is assembled in the inner cavity of the packaging shell 1 to realize power supply of the radio frequency link and the photoelectric detector chip 10.
As an implementation manner, the probe carrier 11, the rf expansion circuit chip, the rf processing portion, and the power control micro module of the present embodiment are interconnected by using a wire bonding process.
As an implementation manner, in the six-channel radio frequency optical receiving device provided in this embodiment, an input single channel of optical carrier radio frequency signals including 6 channels of combined waves is subjected to wavelength division demultiplexing to be divided into 6 channels of optical carrier radio frequency signals (with wavelengths of 1271, 1291, 1311, 1331, 1351 and 1371nm respectively), and photoelectric conversion, radio frequency physical space expansion and radio frequency processing are performed by a detector chip, so that six-channel radio frequency signal output with a transmission channel physical distance of 5.2mm, a frequency of 2 to 18GHz, a photoelectric conversion efficiency of greater than 0.8A/W and an isolation of greater than 50dBc is achieved. In the traditional radio frequency light receiving technical scheme, the physical distance of transmission channels is only 0.5nm, and the isolation is only 20 dBc.
The radio frequency expansion part and the radio frequency processing part receive the multi-channel radio frequency signals transmitted by the photoelectric conversion part, output the multi-channel radio frequency signals with a certain distance in space through the radio frequency expansion circuit, realize radio frequency processing and gain control through the transmission line and the radio frequency chip 13, and finally output the multi-channel radio frequency signals.
The present embodiment is a six-channel rf optical receiving module, and the number of specific channels can be increased or decreased according to the design requirement.
The multichannel radio frequency light receiving device provided by this embodiment realizes conversion from single-path optical carrier radio frequency signal input to multi-path optical carrier radio frequency signal output by integrating the wavelength division multiplexer and the plurality of photoelectric detector chips, and the optical link structure is simplified.
The multi-channel radio frequency light receiving device provided by the embodiment realizes light transmission with high coupling efficiency and radio frequency transmission with low loss and high isolation.
The multichannel radio frequency light receiving device provided by the embodiment hermetically packages components and parts such as the wavelength division multiplexer, the photoelectric detector chip, the microwave circuit and the chip in the same shell, and has the advantages of small size, high integration level and high reliability.
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the invention, and any modifications, equivalents and improvements made within the spirit and principle of the present invention are intended to be included within the scope of the present invention.
Claims (10)
1. A multi-channel radio frequency light receiving device comprises a packaging shell, wherein a space light path unit, a photoelectric conversion unit, a radio frequency unfolding unit and a radio frequency processing unit are arranged in the packaging shell;
the space light path unit comprises a collimator assembly arranged on the light window, a light splitting prism for dividing a light path into two paths is arranged at the position of an emergent light of the collimator assembly, one path of the light path is input into the monitoring detector assembly through the light splitting prism, the other path of the light path is input into the wavelength division multiplexer, and a coupling lens is further arranged at the output end of the wavelength division multiplexer;
the photoelectric conversion unit comprises a photoelectric detector assembly arranged at a position capable of receiving an optical signal converged by the coupling lens, the photoelectric detector assembly comprises a detector carrier and photoelectric detector chips arranged on one surface of the detector carrier facing the coupling lens, the number of the photoelectric detector chips is not less than that of optical paths output by the wavelength division demultiplexer, and the photoelectric detector chips are connected with a microwave printed circuit board of the radio frequency expansion unit through a radio frequency signal transmission waveguide;
the microwave printed circuit board comprises a radio frequency transmission circuit, and the distance between each channel of the radio frequency transmission circuit is larger than the distance between the output ends of the adjacent photoelectric detectors;
the radio frequency processing unit comprises a radio frequency chip and a passive circuit which are connected with the radio frequency transmission circuit, the radio frequency processing unit comprises a plurality of channels, the number of the channels is not less than the number of the photoelectric detector chips, and adjacent channels are isolated by metal separation cavities.
2. The multi-channel radio frequency optical receiver according to claim 1, wherein the monitor probe assembly comprises a monitor probe and a carrier plate, the carrier plate keeping the monitor probe and the input optical path horizontal.
3. The multichannel radio frequency optical receiver according to claim 1, wherein a position in the package housing where the demultiplexer is installed is provided with a land array, a bottom of the demultiplexer is provided with a groove matched with the land array, and the demultiplexer is embedded and bonded with the land array.
4. The multi-channel RF light receiver of claim 1, wherein the package housing has a boss and a cavity for disposing RF devices in the photoelectric conversion unit, the RF expansion unit and the RF processing unit in a same plane.
5. The multi-channel radio frequency light receiving device as claimed in claim 1, wherein three adjacent sides of the probe carrier are provided with circuit patterns, the circuit patterns including metal pads for mounting the photodetector chips, pads for wire bonding, a radio frequency signal transmission waveguide for radio frequency signal transmission, and a radio frequency output port for impedance matching with the radio frequency spreading unit.
6. The multi-channel RF optical receiver of claim 5, wherein RF shielding holes are disposed between the RF signal transmitting waveguides.
7. The multi-channel rf optical receiver of claim 1, wherein rf shielding holes are disposed between the transmission paths of the microwave printed circuit board.
8. The multi-channel rf optical receiving device of claim 1, wherein the microwave printed circuit board has passive devices embedded therein or attached thereto.
9. The multi-channel RF optical receiver of claim 1, wherein the electronic device includes a feed insulator disposed on a same plane as the optical window and an RF insulator disposed on a nearest side of the RF chip.
10. The multi-channel rf optical receiver of claim 1, wherein the material of the package body comprises kovar, steel No. 10, or silicon-aluminum alloy.
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