CN114054419A - Silicon electrode cleaning device and cleaning method - Google Patents
Silicon electrode cleaning device and cleaning method Download PDFInfo
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- CN114054419A CN114054419A CN202111359629.1A CN202111359629A CN114054419A CN 114054419 A CN114054419 A CN 114054419A CN 202111359629 A CN202111359629 A CN 202111359629A CN 114054419 A CN114054419 A CN 114054419A
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- silicon electrode
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- basket frame
- bearing
- cleaning
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B13/00—Accessories or details of general applicability for machines or apparatus for cleaning
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Abstract
The application provides a cleaning device and a cleaning method for a silicon electrode, and relates to the technical field of silicon electrode cleaning. The cleaning device comprises a flower basket frame and a bearing mechanism, wherein the flower basket frame is provided with an installation channel, and the installation channel penetrates through the flower basket frame in the thickness direction; the bearing mechanism is detachably connected with the flower basket frame and is provided with a bearing hole, the bearing hole penetrates through the bearing mechanism in the thickness direction, and the hole wall of the bearing hole is configured to bear a silicon electrode and enable the micropores to be exposed; when the bearing mechanism is connected with the flower basket frame, the projection of the bearing hole in the thickness direction of the flower basket frame is completely arranged in the mounting channel. The cleaning device can only replace the bearing mechanism to be suitable for cleaning silicon electrodes with different sizes and specifications under the condition of keeping the basket frame unchanged, and can better clean micropores of the silicon electrodes.
Description
Technical Field
The application relates to the technical field of silicon electrode cleaning, in particular to a cleaning device and a cleaning method for a silicon electrode.
Background
The silicon electrode (also called as the upper electrode) is a core part and a key consumable material in a cavity of the plasma etching equipment, and often has thousands of micropores which penetrate through the silicon electrode in the thickness direction. When the plasma etching device works, etching gas enters the cavity of the plasma etching device through each micropore to carry out plasma etching on the wafer. Therefore, the silicon electrode surface and its micropores are required to have extremely high processing accuracy and uniformity, and the number of particles on the surface thereof needs to be strictly controlled. It is common in the industry to clean silicon electrodes with chemicals to control their particle size.
In the prior art, a basket is generally adopted as a clamping and supporting tool for chemically cleaning a sheet material, however, the inventor of the application finds that the existing basket design is generally suitable for simultaneously cleaning a plurality of wafers, and does not consider silicon electrodes, and the conventional baskets are difficult to clean the micropores of the silicon electrodes due to the large number of micropores on the surfaces of the silicon electrodes. In addition, there are some existing basket structures suitable for cleaning single wafers, however, in order to facilitate cleaning of such baskets, a column is provided on the base of the basket for supporting the wafer, which is not considered for silicon electrodes, and if the silicon electrode is cleaned in such baskets, the portion of the micropores in contact with the column cannot be cleaned well.
When cleaning the silicon electrode by selecting a basket for cleaning a single piece, if it is necessary to clean silicon electrodes of various sizes, it is necessary to replace the silicon electrode with a basket of various sizes. As the flower basket belongs to a customized product, the cost is high, and a large amount of capital cost is occupied.
Disclosure of Invention
The application provides a silicon electrode cleaning device and a silicon electrode cleaning method, which can be suitable for cleaning silicon electrodes with different sizes and specifications only by replacing a bearing mechanism under the condition of keeping a basket frame unchanged, and can better clean micropores of the silicon electrode.
The embodiment of the application is realized as follows:
in a first aspect, embodiments of the present application provide an apparatus for cleaning a silicon electrode, the silicon electrode having a micropore, the micropore penetrating the silicon electrode in a thickness direction;
the cleaning device comprises a flower basket frame and a bearing mechanism, wherein the flower basket frame is provided with an installation channel, and the installation channel penetrates through the flower basket frame in the thickness direction; the bearing mechanism is detachably connected with the flower basket frame and is provided with a bearing hole, the bearing hole penetrates through the bearing mechanism in the thickness direction, and the hole wall of the bearing hole is configured to bear a silicon electrode and enable the micropores to be exposed; when the bearing mechanism is connected with the flower basket frame, the projection of the bearing hole in the thickness direction of the flower basket frame is completely arranged in the mounting channel.
In the technical scheme, when the silicon electrode needs to be cleaned, the silicon electrode is placed in the bearing hole, then the bearing mechanism is connected with the flower basket frame, and the silicon electrode is placed in the cleaning liquid for cleaning. When the bearing mechanism is connected with the basket frame, the projection of the bearing holes in the thickness direction of the basket frame is completely in the mounting channel, so that the basket frame cannot shield the surface of the silicon electrode to influence the cleaning of the silicon electrode. In addition, because the flower basket frame is detachably connected with the bearing mechanism, when silicon electrodes with different sizes need to be cleaned, the bearing mechanism with bearing holes with different sizes is replaced to clean the silicon electrodes with different sizes under the condition that the flower basket frame is not replaced, and therefore cost can be saved.
In a possible embodiment, the flower basket frame is provided with at least one set of mounting hole groups, the bearing mechanism is connected with at least one first fixing column, each set of mounting hole groups comprises at least one first mounting hole, and the first fixing columns of the bearing mechanisms with the bearing holes of different sizes can be matched and connected with the first mounting holes of the set of mounting hole groups.
In the above technical scheme, when adopting different bearing mechanisms and being connected with the flower basket frame, the bearing mechanism with the bearing holes of different sizes has the first fixing column which can be matched and connected with the first mounting hole, so that the bearing mechanism is fixed with the flower basket frame.
In one possible embodiment, the mounting hole groups are provided in at least two groups, each of the two groups being symmetrically provided along a diagonal line of the basket frame.
In above-mentioned technical scheme, every two sets of installation punch combination sets up along the diagonal symmetry of basket of flowers frame, and then when every first fixed column was connected with the first mounting hole cooperation of one of them group of installation punch combination, stability was better.
In a possible embodiment, the bearing mechanism is connected with a connecting piece, the connecting piece is provided with a first strip-shaped hole, the first strip-shaped hole extends along the radial direction of the bearing mechanism, and the first fixing column is installed in the first strip-shaped hole and can move along the extending direction of the first strip-shaped hole.
In above-mentioned technical scheme, because first fixed column installs in first rectangular hole and can follow the extending direction removal in first rectangular hole, then can adjust first fixed column in the position in first rectangular hole to adapt to the position of first mounting hole, avoid the inconvenient problem of connecting of position dislocation of first fixed column and first mounting hole.
In one possible embodiment, the hole wall of the carrier hole has a first inclined surface for supporting a bottom edge of the silicon electrode in a circumferential direction thereof.
In the above technical scheme, since the first inclined surface on the hole wall of the bearing hole can support the bottom edge of the silicon electrode, the lower surface of the silicon electrode does not contact with the hole wall of the bearing hole, and the lower surface of the silicon electrode can be prevented from contacting with the hole wall of the bearing hole to generate an imprint.
In a possible embodiment, the included angle between the first inclined surface and the axis of the bearing hole is 15-75 degrees.
In one possible embodiment, the surface of the first inclined face is a flexible polymer layer.
In the above technical solution, when the first inclined surface supports the bottom edge of the silicon electrode, the silicon electrode is less likely to be damaged due to the presence of the flexible polymer layer.
In a possible embodiment, the bearing mechanism is provided with a limiting member for limiting the silicon electrode in the bearing hole, the limiting member is movably arranged on the bearing mechanism so that the limiting member can move back and forth between a first position and a second position, and when the limiting member is located at the first position, the limiting member is used for abutting against the silicon electrode in the bearing hole; when the limiting part is located at the second position, the limiting part is far away from the bearing hole.
In the technical scheme, the silicon electrode can be limited in the bearing hole through the limiting part, and when the silicon electrode is cleaned, the silicon electrode is not easy to fall out of the bearing hole. In addition, since the limiting member is movably disposed on the carrying mechanism and can move back and forth between the first position and the second position, when the silicon electrode does not need to be limited in the carrying hole, the limiting member can be moved to the second position and away from the carrying hole.
In one possible embodiment, the stopper has a second inclined face for abutting against the top edge of the silicon electrode.
In the above technical scheme, since the limiting member has the second inclined surface for abutting against the top edge of the silicon electrode, when the limiting member limits the silicon electrode in the bearing hole, the second inclined surface abuts against the top edge of the silicon electrode to limit the silicon electrode, and at this time, the upper surface of the silicon electrode does not contact with the limiting member, and the upper surface of the silicon electrode can be prevented from contacting with the limiting member to generate marks.
Preferably, the surface of the second inclined face is a flexible polymer layer. When the second inclined surface supports the top edge of the silicon electrode, the silicon electrode is less likely to be damaged due to the presence of the flexible polymer layer.
In a second aspect, an embodiment of the present application provides a method for cleaning a silicon electrode, which is performed by using the apparatus for cleaning a silicon electrode of the first aspect, and includes the following steps:
s1, selecting the corresponding bearing mechanism according to the outer diameter of the silicon electrode;
s2, connecting and fixing the bearing mechanism and the flower basket frame, and then placing the silicon electrode in a bearing hole of the bearing mechanism; or the silicon electrode is arranged in the bearing hole of the bearing mechanism, and then the bearing mechanism is fixedly connected with the flower basket frame;
and S3, putting the assembly obtained in the step S2 into a cleaning solution for cleaning.
In the technical scheme, when silicon electrodes of different sizes need to be cleaned, under the condition that the flower basket frame is not replaced, the carrying mechanisms with the carrying holes of different sizes are selected to clean the silicon electrodes of different sizes, so that the cost can be saved.
In one possible embodiment, after step S3, the carrier is detached from the basket frame, and then the above steps S1-S3 are repeated to clean another silicon electrode.
In the technical scheme, one basket frame can be circularly used for cleaning a plurality of silicon electrodes, only the bearing mechanism needs to be replaced, and compared with the scheme that one basket is correspondingly needed for cleaning one silicon electrode, the number of baskets can be saved.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings that are required to be used in the embodiments will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present application and therefore should not be considered as limiting the scope, and for those skilled in the art, other related drawings can be obtained from the drawings without inventive effort.
Fig. 1 is a schematic structural diagram of a carrier mechanism of example 1 of the present application in a state of being engaged with a silicon electrode;
FIG. 2 is a schematic structural diagram of the carrier mechanism of FIG. 1 at another viewing angle with the silicon electrode engaged;
fig. 3 is a cross-sectional view of the carrier mechanism of example 1 of the present application in a state of being engaged with a silicon electrode;
FIG. 4 is a schematic structural view of a cleaning apparatus according to embodiment 1 of the present application;
fig. 5 is a schematic structural view of the cleaning device of fig. 4 from another view angle.
Icon: 10-a cleaning device; 11-a flower basket frame; 111-set of mounting holes; 112-a through hole; 12-a carrier mechanism; 121-a bearing hole; 1211-a first inclined surface; 122-first fixed column; 123-connecting piece; 1231-a first elongated aperture; 124-grooves; 14-a limit stop; 141-a second inclined surface; 142-a second elongated aperture; 15-a second fixed column; 20-silicon electrode.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present application clearer, the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application, and it is obvious that the described embodiments are some embodiments of the present application, but not all embodiments. The components of the embodiments of the present application, generally described and illustrated in the figures herein, can be arranged and designed in a wide variety of different configurations.
Thus, the following detailed description of the embodiments of the present application, presented in the accompanying drawings, is not intended to limit the scope of the claimed application, but is merely representative of selected embodiments of the application. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.
It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, it need not be further defined and explained in subsequent figures.
In the description of the present application, it is to be noted that the terms "upper", "lower", "horizontal", "inner", "outer", and the like refer to orientations or positional relationships based on orientations or positional relationships shown in the drawings or orientations or positional relationships conventionally found in use of products of the application, and are used for convenience of description and simplicity of description, but do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present application. Furthermore, the terms "first," "second," "third," and the like are used solely to distinguish one from another and are not to be construed as indicating or implying relative importance.
In the description of the present application, it is further noted that, unless expressly stated or limited otherwise, the terms "disposed," "mounted," and "connected" are to be construed broadly, e.g., as meaning fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present application can be understood in a specific case by those of ordinary skill in the art.
Example 1
The present embodiment provides a cleaning apparatus 10 (refer to fig. 4 and 5) for a silicon electrode 20, which includes a basket frame 11 and a carrying mechanism 12. The cleaning apparatus 10 mainly cleans a single silicon electrode 20, and the silicon electrode 20 has micropores penetrating the silicon electrode 20 in the thickness direction, that is, the micropores penetrate the upper and lower surfaces of the silicon electrode 20. Wherein, the aperture of micropore can be set according to actual demand, for example, the aperture of micropore is 0.5 ~ 1.5 mm.
Wherein, the flower basket frame 11 has a certain weight, which can ensure that it is not deformed. In addition, the outer wall of the basket frame 11 has support arms by which the basket can be fixed in a fixed position in the washing machine.
In addition, the basket frame 11 has a mounting passage that penetrates the basket frame 11 in the thickness direction, and the basket frame 11 is mainly used to support the bearing mechanism 12.
The bearing mechanism 12 is detachably connected with the basket frame 11, the bearing mechanism 12 is provided with a bearing hole 121, the bearing hole 121 penetrates through the bearing mechanism 12 in the thickness direction, and the hole wall of the bearing hole 121 is configured to be capable of bearing the silicon electrode 20 and enabling the micropore to be exposed; when the bearing mechanism 12 is connected with the flower basket frame 11, the projection of the bearing hole 121 in the thickness direction of the flower basket frame 11 is completely in the mounting channel.
The carrier holes 121 are circular holes, and it is understood that the carrier holes 121 may be square holes as long as they are suitable for the silicon electrodes 20 and can carry the silicon electrodes 20.
When the silicon electrode 20 needs to be cleaned, the silicon electrode 20 is placed in the bearing hole 121, then the bearing mechanism 12 is connected with the basket frame 11, and the silicon electrode is placed in a cleaning solution for cleaning, because the bearing mechanism 12 has the bearing hole 121, and the bearing hole 121 penetrates through the bearing mechanism 12 in the thickness direction, the hole wall of the bearing hole 121 is configured to be capable of bearing the silicon electrode 20 and exposing the micropores, when the silicon electrode 20 is cleaned in the bearing hole 121, both the upper surface and the lower surface of the silicon electrode 20 can be contacted with the cleaning solution, and the micropores can be cleaned well. When the bearing mechanism 12 is connected with the basket frame 11, the projection of the bearing holes 121 in the thickness direction of the basket frame 11 is completely in the installation channel, so that the basket frame 11 does not shield the surface of the silicon electrode 20 to influence the cleaning of the silicon electrode 20.
Alternatively, when the support mechanism 12 is connected to the flower basket frame 11, the support mechanism 12 is entirely located in the mounting channel of the flower basket frame 11. It should be understood that, when the carrying mechanism 12 is connected to the flower basket frame 11, a portion of the carrying mechanism 12 may overlap with the flower basket frame 11, as long as it is ensured that when the carrying mechanism 12 is connected to the flower basket frame 11, the projection of the carrying hole 121 in the thickness direction of the flower basket frame 11 is entirely within the mounting channel.
In addition, since the basket frame 11 is detachably connected to the carrying mechanism 12, when silicon electrodes 20 of different sizes need to be cleaned, the carrying mechanism 12 with carrying holes 121 of different sizes is replaced to clean the silicon electrodes 20 of different sizes while the basket frame 11 is not replaced, so that the cost can be saved. In addition, the carrying mechanism 12 occupies a smaller space and is lighter in weight than the flower basket frame 11.
When replacing the bearing mechanism 12 having the bearing holes 121 with different sizes, the inner diameters of the bearing holes 121 may be different, the outer diameters of the bearing mechanisms 12 may be the same, or the inner diameters of the bearing holes 121 may be different, and the outer diameters of the bearing mechanisms 12 may also be different.
Wherein, it is various to realize that the mode that load-bearing mechanism 12 can dismantle with basket of flowers frame 11 and be connected, and this application embodiment does not limit it, and when the internal diameter of bearing hole 121 is different, and the external diameter of load-bearing mechanism 12 is the same, can adopt following connected mode: for example, a retaining ring may be provided on the carrying mechanism 12, a connecting ring may be provided on the flower basket frame 11, and the detachable connection of the carrying mechanism 12 and the flower basket frame 11 may be realized through the connection of the retaining ring and the connecting ring. An internal thread can be arranged on the wall of the mounting channel of the flower basket frame 11, an external thread is arranged on the outer wall of the bearing mechanism 12, and the bearing mechanism 12 and the flower basket frame 11 can be detachably connected through the matching of the internal thread and the external thread.
In a possible embodiment, the flower basket frame 11 is provided with at least one set of mounting holes 111, at least one first fixing post 122 is connected to the bearing mechanism 12, each set of mounting holes 111 includes at least one first mounting hole, and the bearing mechanisms 12 with the different-sized bearing holes 121 have their first fixing posts 122 capable of being cooperatively connected with the first mounting holes of the set of mounting holes 111.
For example, two sets of the mounting hole sets 111 are provided, two first fixing posts 122 are provided, the two first fixing posts 122 can be respectively matched and connected with the first mounting holes of the two sets of the mounting hole sets 111, and the first fixing posts 122 can be inserted into the first mounting holes so that the flower basket frame 11 and the bearing mechanism 12 are kept relatively fixed. It is understood that three, four or more sets of the mounting control sets may be provided, and the first fixing posts 122 are also provided correspondingly.
In some specific embodiments, at least two sets of the mounting hole sets 111 are provided, and each two sets of the mounting hole sets 111 are symmetrically provided along a diagonal line of the flower basket frame 11. Each first fixing post 122 is more stable when it is coupled with the first mounting hole of one of the mounting hole sets 111.
When the carrying mechanism 12 with the carrying holes 121 of different sizes is connected with the flower basket frame 11, the first fixing posts 122 of different carrying mechanisms 12 can be connected with the first mounting holes in a matching manner, so that the carrying mechanism 12 is fixed with the flower basket frame 11.
For example, when different inner diameters and the same outer diameters of the adopted carrying mechanisms 12 are used, the first fixing posts 122 of different carrying mechanisms 12 can be matched and connected with the same batch of mounting holes. That is, the mounting hole for the second time of engaging and connecting the carrier 12 is also the mounting hole for the first time of engaging and connecting the carrier 12.
Alternatively, when the mounting hole group 111 includes a plurality of first mounting holes, the plurality of first mounting holes are arranged along the radial direction of the flower basket frame 11, and when the inner diameters of the adopted carrying mechanisms 12 are different and the outer diameters are different, the first fixing columns 122 of different carrying mechanisms 12 can be connected with different mounting holes arranged in the radial direction in a matching manner.
In addition, a plurality of mounting holes of the mounting hole group 111 can be further arranged along the circumferential direction, and when the bearing mechanisms 12 with different outer diameters are selected to be connected with the flower basket frame 11, the plurality of mounting holes are not only distributed along the circumferential direction, but also distributed along the circumferential direction, so that the connection is more convenient.
Referring to fig. 1 to fig. 3, optionally, the supporting mechanism 12 is connected to a connecting member 123, the connecting member 123 has a first elongated hole 1231, the first elongated hole extends along a radial direction of the supporting mechanism 12, and the first fixing column 122 is installed in the first elongated hole 1231 and can move along the extending direction of the first elongated hole 1231. Illustratively, the first fixing column 122 includes a first section and a second section, the outer diameter of the first section is greater than that of the second section, the second section penetrates through the first elongated hole 1231, and the first section abuts against the upper surface of the connecting member 123.
The inventor of the present application found in research that if the position of the first fixing post 122 on the carrying mechanism 12 is fixed, the first fixing post 122 cannot be inserted into the first mounting hole when the position of the first fixing post 122 is slightly misaligned with the first mounting hole. And install first fixed column 122 in first rectangular shape hole 1231 and can follow the extending direction removal in first rectangular shape hole 1231, then can adjust first fixed column 122 in the position of first rectangular shape hole 1231 to adapt to the position of first mounting hole, avoid the inconvenient problem of connecting of position dislocation of first fixed column 122 and first mounting hole.
In addition, it should be noted that the size of the connecting member 123 and the length of the first elongated hole 1231 can be adjusted according to the situation, so as to adapt to different installation requirements.
Illustratively, the flower basket frame 11 is further provided with a through hole 112, and the through hole 112 penetrates through the flower basket frame 11 along the thickness direction, so that the buoyancy of the cleaning device 10 in the cleaning liquid can be reduced, and the cleaning is facilitated.
Further, the hole wall of the carrier hole 121 has a first inclined surface 1211 for supporting a bottom edge of the silicon electrode 20 in a circumferential direction thereof. The bottom edge of the silicon electrode 20 refers to an edge connecting the side surface and the bottom surface of the silicon electrode 20.
Since the first inclined surface 1211 on the hole wall of the carrying hole 121 can support the bottom edge of the silicon electrode 20, the lower surface of the silicon electrode 20 does not contact with the hole wall of the carrying hole 121, and the lower surface of the silicon electrode 20 can be prevented from contacting with the hole wall of the carrying hole 121 to generate an imprint. But also better shielding of the micropores of the silicon electrode 20, thereby enabling better cleaning of the micropores of the silicon electrode 20.
Optionally, the included angle between the first inclined surface 1211 and the axis of the bearing hole 121 is 15 to 75 °, for example, 15 °, 20 °, 30 °, 40 °, 45 °, 50 °, 60 °, 70 °, or 75 °.
Illustratively, the surface of the first inclined surface 1211 is a flexible polymer layer, such as a polytetrafluoroethylene layer. The material of the flexible polymer layer is not particularly limited in this application, as long as it can play a certain cushioning role.
When the first inclined surface 1211 supports the bottom edge of the silicon electrode 20, the silicon electrode 20 is less likely to be damaged due to the presence of the flexible polymer layer.
Further, when the silicon electrode 20 is placed in the carrying hole 121, in order to avoid the silicon electrode 20 from falling off, exemplarily, the carrying mechanism 12 is mounted with a limiting member 14 for limiting the silicon electrode 20 in the carrying hole 121, and the limiting member 14 is movably disposed on the carrying mechanism 12 so that the limiting member 14 can move back and forth between a first position and a second position, and when the limiting member 14 is located at the first position, the limiting member 14 is used for abutting against the silicon electrode 20 in the carrying hole 121; when the limiting member 14 is located at the second position, the limiting member 14 is away from the bearing hole 121.
The stopper 14 can restrict the silicon electrode 20 in the carrier hole 121, and when the silicon electrode 20 is cleaned, the silicon electrode 20 is not easily removed from the carrier hole 121. In addition, since the limiting member 14 is movably disposed on the carrying mechanism 12 and can move back and forth between the first position and the second position, when the silicon electrode 20 does not need to be limited in the carrying hole 121, the limiting member 14 can be moved to the second position and away from the carrying hole 121.
Exemplarily, the surface of the bearing mechanism 12 is connected with a second fixing column 15, the limiting member 14 is provided with a second elongated hole 142 extending along the radial direction of the bearing mechanism 12, the second fixing column 15 is disposed in the second elongated hole 142, the limiting member 14 can slide relative to the bearing mechanism 12, and the second fixing column 15 is matched with the second elongated hole 142, so that the movement track of the limiting member 14 is limited, and the limiting member 14 can move above the bearing hole 121 and move above the bearing mechanism 12 back and forth.
In other embodiments, the limiting member 14 may be configured to be rotatably connected to the supporting mechanism 12, one end of the limiting member 14 is connected to a rotating shaft, the rotating shaft is fixed to the supporting mechanism 12, and the limiting member 14 can move above the supporting hole 121 and above the supporting mechanism 12 back and forth by rotating the limiting member 14, so that the silicon electrode 20 can be limited in the supporting hole 121.
Further, the stopper 14 has a second inclined surface 141 for abutting against the top edge of the silicon electrode 20. The top rib refers to a rib connecting the side surface and the upper surface of the silicon electrode 20.
Since the limiting member 14 has the second inclined surface 141 for abutting against the top edge of the silicon electrode 20, when the limiting member 14 limits the silicon electrode 20 in the bearing hole 121, the second inclined surface 141 abuts against the top edge of the silicon electrode 20 to limit the silicon electrode 20, and at this time, the upper surface of the silicon electrode 20 does not contact with the limiting member 14, so that the upper surface of the silicon electrode 20 can be prevented from contacting with the limiting member 14 to generate marks. But also better shielding of the micropores of the silicon electrode 20, thereby enabling better cleaning of the micropores of the silicon electrode 20.
Illustratively, the surface of the second inclined surface 141 is a flexible polymer layer. When the second inclined face 141 supports the top edge of the silicon electrode 20, the silicon electrode 20 is less likely to be damaged due to the presence of the flexible polymer layer. The material of the flexible polymer layer is not particularly limited in this application, as long as it can play a certain cushioning role.
Further, in order to conveniently place the silicon electrode 20 in the bearing hole 121 or take the silicon electrode 20 out of the bearing hole 121, the upper surface of the bearing mechanism 12 is exemplarily provided with a groove 124, and the groove 124 is communicated with the bearing hole 121, so that the silicon electrode 20 is more conveniently handled due to the existence of the groove 124.
Example 2
The present embodiment provides a method for cleaning a silicon electrode 20, which is performed using the cleaning apparatus 10 for a silicon electrode 20 of embodiment 1, and which includes the steps of:
s1, selecting the corresponding bearing mechanism 12 according to the outer diameter of the silicon electrode 20;
s2, connecting and fixing the bearing mechanism 12 and the flower basket frame 11, and then placing the silicon electrode 20 in the bearing hole 121 of the bearing mechanism 12; or the silicon electrode 20 is placed in the bearing hole 121 of the bearing mechanism 12, and then the bearing mechanism 12 is fixedly connected with the flower basket frame 11;
and S3, putting the assembly obtained in the step S2 into a cleaning solution for cleaning.
When silicon electrodes 20 of different sizes need to be cleaned, the carrying mechanisms 12 with the carrying holes 121 of different sizes are selected to clean the silicon electrodes 20 of different sizes under the condition that the flower basket frame 11 is not replaced, so that the cost can be saved.
Further, after step S3, the carrier 12 is detached from the basket frame 11, and then the above steps S1 to S3 are repeated to clean another silicon electrode 20. Thus, one basket frame 11 can be recycled for cleaning a plurality of silicon electrodes 20, only the bearing mechanism 12 needs to be replaced, and compared with a scheme that one basket is needed for cleaning one silicon electrode 20, the number of baskets can be saved.
The above description is only a preferred embodiment of the present application and is not intended to limit the present application, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, improvement and the like made within the spirit and principle of the present application shall be included in the protection scope of the present application.
Claims (10)
1. A cleaning apparatus for a silicon electrode having a micropore penetrating therethrough in a thickness direction, the cleaning apparatus comprising:
a basket frame having a mounting channel that penetrates the basket frame in a thickness direction; and
the bearing mechanism is detachably connected with the flower basket frame and is provided with a bearing hole, the bearing hole penetrates through the bearing mechanism in the thickness direction, and the hole wall of the bearing hole is configured to bear the silicon electrode and enable the micropores to be exposed; when the bearing mechanism is connected with the flower basket frame, the projection of the bearing hole in the thickness direction of the flower basket frame is completely arranged in the mounting channel.
2. The silicon electrode cleaning apparatus of claim 1, wherein the basket frame is provided with at least one set of mounting holes, the carrier is connected with at least one first fixing post, each set of mounting holes comprises at least one first mounting hole, and the first fixing posts of the carrier with different sizes of the carrier holes can be connected with the first mounting holes in a matching manner.
3. The silicon electrode cleaning apparatus of claim 2, wherein the mounting hole groups are provided in at least two groups, each of the two groups being symmetrically arranged along a diagonal of the basket frame.
4. The silicon electrode cleaning device according to claim 2, wherein the carrier is connected to a connector, the connector has a first elongated hole extending in a radial direction of the carrier, and the first fixing column is mounted to the first elongated hole and is movable in an extending direction of the first elongated hole.
5. The silicon electrode cleaning apparatus according to any one of claims 1 to 4, wherein the hole wall of the carrier hole has a first inclined face for supporting a bottom edge of the silicon electrode in a circumferential direction thereof; preferably, the surface of the first inclined face is a flexible polymer layer.
6. The silicon electrode cleaning apparatus of claim 5, wherein the angle between the first inclined surface and the axis of the carrier hole is 15-75 °.
7. The silicon electrode cleaning device according to any one of claims 1 to 4, wherein the carrier mechanism is provided with a limiting member for limiting the silicon electrode in the carrier hole, and the limiting member is movably disposed in the carrier mechanism so that the limiting member can move back and forth between a first position and a second position, and when the limiting member is located at the first position, the limiting member is used for abutting against the silicon electrode in the carrier hole; when the limiting part is located at the second position, the limiting part is far away from the bearing hole.
8. The silicon electrode cleaning apparatus of claim 7, wherein the stopper has a second inclined face for abutting against a top edge of the silicon electrode; preferably, the surface of the second inclined face is a flexible polymer layer.
9. A method for cleaning a silicon electrode, which is carried out by using the apparatus for cleaning a silicon electrode according to any one of claims 1 to 8, comprising the steps of:
s1, selecting the corresponding bearing mechanism according to the outer diameter of the silicon electrode;
s2, connecting and fixing the bearing mechanism and the flower basket frame, and then placing the silicon electrode in the bearing hole of the bearing mechanism; or the silicon electrode is arranged in the bearing hole of the bearing mechanism, and then the bearing mechanism is fixedly connected with the flower basket frame;
and S3, putting the assembly obtained in the step S2 into a cleaning solution for cleaning.
10. The silicon electrode cleaning method of claim 9, further comprising:
after step S3, the carrier is detached from the basket frame, and then the above steps S1 to S3 are repeated to clean another silicon electrode.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111359629.1A CN114054419B (en) | 2021-11-17 | 2021-11-17 | Silicon electrode cleaning device and cleaning method |
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| CN114054419B (en) | 2023-04-11 |
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