CN114018301A - Micro-nano optical fiber multifunctional sensor and preparation method and application thereof - Google Patents
Micro-nano optical fiber multifunctional sensor and preparation method and application thereof Download PDFInfo
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- CN114018301A CN114018301A CN202111301319.4A CN202111301319A CN114018301A CN 114018301 A CN114018301 A CN 114018301A CN 202111301319 A CN202111301319 A CN 202111301319A CN 114018301 A CN114018301 A CN 114018301A
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- 239000013307 optical fiber Substances 0.000 title claims abstract description 77
- 238000002360 preparation method Methods 0.000 title claims abstract description 24
- 239000004205 dimethyl polysiloxane Substances 0.000 claims abstract description 41
- 229920000435 poly(dimethylsiloxane) Polymers 0.000 claims abstract description 41
- -1 polydimethylsiloxane Polymers 0.000 claims abstract description 19
- 239000011248 coating agent Substances 0.000 claims abstract description 8
- 238000000576 coating method Methods 0.000 claims abstract description 8
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 claims description 14
- 238000000034 method Methods 0.000 claims description 12
- 239000003795 chemical substances by application Substances 0.000 claims description 11
- 239000000853 adhesive Substances 0.000 claims description 8
- 230000001070 adhesive effect Effects 0.000 claims description 8
- 239000003822 epoxy resin Substances 0.000 claims description 8
- 238000010438 heat treatment Methods 0.000 claims description 8
- 229920000647 polyepoxide Polymers 0.000 claims description 8
- 238000001514 detection method Methods 0.000 claims description 6
- 238000012681 fiber drawing Methods 0.000 claims description 4
- 238000002156 mixing Methods 0.000 claims description 4
- CERQOIWHTDAKMF-UHFFFAOYSA-M Methacrylate Chemical compound CC(=C)C([O-])=O CERQOIWHTDAKMF-UHFFFAOYSA-M 0.000 claims description 3
- 229920001651 Cyanoacrylate Polymers 0.000 claims 1
- 238000012360 testing method Methods 0.000 abstract description 14
- 238000004806 packaging method and process Methods 0.000 abstract description 2
- 230000002035 prolonged effect Effects 0.000 abstract description 2
- 239000000758 substrate Substances 0.000 description 11
- 238000009459 flexible packaging Methods 0.000 description 10
- 229920000620 organic polymer Polymers 0.000 description 7
- 230000004044 response Effects 0.000 description 7
- 229920000139 polyethylene terephthalate Polymers 0.000 description 6
- 229920005989 resin Polymers 0.000 description 6
- 239000011347 resin Substances 0.000 description 6
- 238000005516 engineering process Methods 0.000 description 4
- 238000000605 extraction Methods 0.000 description 3
- 239000000835 fiber Substances 0.000 description 3
- 239000002121 nanofiber Substances 0.000 description 3
- 230000035945 sensitivity Effects 0.000 description 3
- IJVRPNIWWODHHA-UHFFFAOYSA-N 2-cyanoprop-2-enoic acid Chemical compound OC(=O)C(=C)C#N IJVRPNIWWODHHA-UHFFFAOYSA-N 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 238000005452 bending Methods 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 2
- 239000004926 polymethyl methacrylate Substances 0.000 description 2
- 238000011084 recovery Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 229920002799 BoPET Polymers 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
- 238000005538 encapsulation Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000003252 repetitive effect Effects 0.000 description 1
- 230000003938 response to stress Effects 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/268—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light using optical fibres
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Temperature Or Quantity Of Heat (AREA)
Abstract
The invention provides a micro-nano optical fiber multifunctional sensor and a preparation method and application thereof, belonging to the technical field of multifunctional sensors. The invention provides a preparation method of a micro-nano optical fiber multifunctional sensor, which comprises the following steps: and coating polydimethylsiloxane on the surface of the micro-nano optical fiber and then curing to obtain the micro-nano optical fiber multifunctional sensor. The invention adopts a Polydimethylsiloxane (PDMS) packaging form, so that the reliability of the micro-nano optical fiber multifunctional sensor is enhanced, the service life of the micro-nano optical fiber multifunctional sensor is prolonged, the mechanical property is improved, and the requirements in practical application are met. The invention also provides the micro-nano optical fiber multifunctional sensor prepared by the preparation method in the technical scheme, and the micro-nano optical fiber multifunctional sensor provided by the invention is simple in structure, high in test precision and free of an additional sensitive film layer.
Description
Technical Field
The invention relates to the technical field of multifunctional sensors, in particular to a micro-nano optical fiber multifunctional sensor and a preparation method and application thereof.
Background
Since the seventies of the last century, the optical fiber sensing technology has been developed for over forty years, and has attracted extensive attention of experts in all fields due to the characteristics of strong anti-electromagnetic interference capability, corrosion resistance, high temperature resistance and the like. The optical fiber sensing technology depends on the special physical characteristics of the optical fiber sensing technology, can solve the problem that the conventional detection technology is difficult to completely competent for measurement, and is rapidly developed in the fields of medicine, biology, power industry, chemistry, environment, military, intelligent structure and the like.
In recent years, with the increasing demand for miniaturized and integrated sensor devices, optical fiber sensors based on micro-nano optical fibers have attracted attention. The micro-nano optical fiber sensor has the outstanding advantages of high sensitivity, quick response, small volume, large evanescent field and the like, and has wide application prospect in the field of optical fiber sensing. However, the micro-nano optical fiber sensor in the prior art has the problem of poor reliability.
Disclosure of Invention
In view of the above, the present invention provides a micro-nano fiber multifunctional sensor, and a preparation method and an application thereof. The micro-nano optical fiber multifunctional sensor prepared by the invention has good reliability.
In order to achieve the above object, the present invention provides the following technical solutions:
the invention provides a preparation method of a micro-nano optical fiber multifunctional sensor, which comprises the following steps:
and coating polydimethylsiloxane on the surface of the micro-nano optical fiber and then curing to obtain the micro-nano optical fiber multifunctional sensor.
Preferably, the diameter of the micro-nano optical fiber is 0.5-7 μm, and when the length of the micro-nano optical fiber is 3cm, the dosage of the polydimethylsiloxane is 0.5-3 mL.
Preferably, the curing temperature is 50-100 ℃ and the curing time is 10-60 minutes.
Preferably, the micro-nano optical fiber is prepared by adopting an improved flame scanning method.
Preferably, the parameters of the modified flame scanning method include: the heating temperature is 1200-1400 ℃, the flame scanning speed is 1-4 mm/s, and the optical fiber drawing speed is 0.1-0.4 mm/s.
Preferably, the polydimethylsiloxane is prepared by mixing an epoxy resin structural adhesive and an acrylate curing agent, and the volume ratio of the epoxy resin structural adhesive to the acrylate curing agent is 8-10: 1.
Preferably, the acrylate curing agent comprises one or more of a methacrylate, an acrylate, and an alpha-cyanoacrylate.
Preferably, the polydimethylsiloxane further comprises a step of exhausting air before use, wherein the pressure of the exhausted air is 0.1-100 Pa, and the time is 5-15 minutes.
The invention also provides a micro-nano optical fiber multifunctional sensor prepared by the preparation method of the technical scheme.
The invention also provides application of the micro-nano optical fiber multifunctional sensor in the technical scheme in the field of temperature and stress detection.
The invention provides a preparation method of a micro-nano optical fiber multifunctional sensor, which comprises the following steps: and coating polydimethylsiloxane on the surface of the micro-nano optical fiber and then curing to obtain the micro-nano optical fiber multifunctional sensor. The invention adopts a Polydimethylsiloxane (PDMS) packaging form, so that the reliability of the micro-nano optical fiber multifunctional sensor is enhanced, the service life of the micro-nano optical fiber multifunctional sensor is prolonged, the mechanical property is improved, and the requirements in practical application are met.
The preparation method is simple in preparation process, low in cost and environment-friendly in experimental process.
The invention also provides the micro-nano optical fiber multifunctional sensor prepared by the preparation method in the technical scheme, and the micro-nano optical fiber multifunctional sensor provided by the invention is simple in structure, high in test precision and free of an additional sensitive film layer. According to the invention, the organic polymer PDMS is used as flexible packaging, and the prepared micro-nano optical fiber sensor has good physical and mechanical properties; the micro-nano optical fiber multifunctional sensor prepared based on PDMS flexible packaging has good response performance and repeated reliability to micro stress and temperature change, and can realize measurement of various environmental parameters only through the same sensor structure.
Drawings
FIG. 1 is a graph of 10 consecutive bends and recovery tests in example 1;
FIG. 2 is a repeated multifunctional test of example 1;
FIG. 3 is a continuous temperature test curve of example 1.
Detailed Description
The invention provides a preparation method of a micro-nano optical fiber multifunctional sensor, which comprises the following steps:
and coating polydimethylsiloxane on the surface of the micro-nano optical fiber and then curing to obtain the micro-nano optical fiber multifunctional sensor.
In the invention, when the diameter of the micro-nano optical fiber is preferably 0.5-7 μm and the length is preferably 3cm, the dosage of the polydimethylsiloxane is preferably 0.5-3 mL, and more preferably 2 mL.
In the invention, the curing temperature is preferably 50-100 ℃, and the curing time is preferably 10-60 minutes.
In the invention, the micro-nano optical fiber is preferably prepared by adopting an improved flame scanning method.
In the present invention, the parameters of the modified flame scanning method preferably include: the heating temperature is 1200-1400 ℃, the flame scanning speed is 1-4 mm/s, and the optical fiber drawing speed is 0.1-0.4 mm/s.
In the invention, the polydimethylsiloxane is preferably prepared by mixing an epoxy resin structural adhesive and an acrylate curing agent, and the volume ratio of the epoxy resin structural adhesive to the acrylate curing agent is preferably 8-10: 1, and more preferably 9: 1.
In the present invention, the acrylate curing agent preferably includes one or more of methacrylate, acrylate and α -cyanoacrylate. The epoxy resin structural adhesive and the acrylate curing agent are preferably mixed in a beaker and then stirred for 5-15 minutes.
In the invention, the polydimethylsiloxane also comprises a step of exhausting air before use, the pressure of the exhausted air is preferably 0.1-100 Pa, and the time is preferably 5-15 minutes. In the present invention, the evacuation of air is preferably performed in a vacuum chamber.
In the invention, the micro-nano optical fiber is preferably arranged on a first substrate, and then the polydimethylsiloxane is coated.
In the invention, the material of the first substrate is preferably PET, PET/PDMS, PMMA, silicon chip or quartz glass.
The present invention is not particularly limited to the specific manner of coating, and may be applied in a manner known to those skilled in the art.
After the coating is finished, the second substrate is preferably covered on the obtained sample, then the sample is heated and cured, and finally the first substrate and the second substrate are respectively stripped off to obtain the micro-nano optical fiber multifunctional sensor.
In the invention, the material of the second substrate is preferably PET, PET/PDMS, PMMA, silicon chip or quartz glass.
The present invention is not particularly limited to the specific way of peeling off the first substrate and the second substrate, and the way known to those skilled in the art can be adopted.
The invention also provides a micro-nano optical fiber multifunctional sensor prepared by the preparation method of the technical scheme. In the invention, the micro-nano optical fiber multifunctional sensor comprises polydimethylsiloxane and a micro-nano optical fiber, wherein the polydimethylsiloxane wraps the micro-nano optical fiber.
The invention also provides application of the micro-nano optical fiber multifunctional sensor in the technical scheme in the field of temperature and stress detection. The present invention is not particularly limited in terms of the specific mode of application, and may be applied in any mode known to those skilled in the art.
In order to further illustrate the present invention, the micro-nano fiber multifunctional sensor provided by the present invention, the preparation method and the application thereof are described in detail below with reference to examples, but they should not be construed as limiting the scope of the present invention.
Example 1
(1) Preparation of micro-nano optical fiber
In the embodiment, the micro-nano optical fiber is prepared by adopting an improved flame scanning method, and the electric micro heating head is used for generating high-temperature melting optical fiber. The adopted single mode fiber of conventional 9/125um in this embodiment, the fiber is clamped on a high-precision fiber tapering platform, the heating temperature is controlled at 1300 ℃, the flame scanning speed is 2mm/s, the fiber drawing speed is 0.1mm/s, and the diameter of the micro-nano fiber obtained by tapering is 1 μm.
(2) Preparation of organic Polymer PDMS resin
Mixing the epoxy resin structural adhesive and the acrylate curing agent in a beaker according to the volume ratio of 10:1, and then fully stirring the mixture by using a stirrer for 10 minutes to obtain the organic polymer PDMS resin. And then placing the beaker filled with the organic polymer PDMS resin into a vacuum chamber, then removing air in the organic polymer PDMS resin in vacuum, controlling the air extraction pressure at 1Pa and the air extraction time at 10 minutes, and finally taking out and standing for later use.
(3) Preparation of micro-nano optical fiber multifunctional sensor
Placing the prepared micro-nano optical fiber with the diameter of 1 micrometer and the length of 3cm on a substrate PET/PDMS, then coating 2mL of organic polymer PDMS resin subjected to air extraction treatment on the micro-nano optical fiber, and standing for 3 minutes to ensure that the micro-nano optical fiber is completely covered by the organic polymer PDMS resin, so as to obtain a sample 1; then another substrate PET/PDMS is covered on the sample 1, heated and solidified for half an hour at 80 ℃, and after the substrate is completely cooled, the PET films on the upper surface and the lower surface are respectively stripped.
(4) Stress test of micro-nano optical fiber multifunctional sensor based on PDMS flexible packaging
And clamping the prepared micro-nano optical fiber multifunctional sensor based on PDMS flexible packaging on a horizontally placed high-precision stepping motor optical platform, and setting the displacement distance of each time through a control program. Firstly, aiming at the continuous test of micro stress, the stress response of the flexible packaging micro-nano optical fiber stress sensor is tested by adopting a continuous bending and recovering mode in the embodiment; the test was carried out 10 times of 1 μm continuous bending and recovery, respectively, and the obtained response curve is shown in fig. 1. As can be seen from FIG. 1, the PDMS flexible packaging-based micro-nano optical fiber multifunctional sensor has good response linearity and sensitivity, the detection rate of the sensor can reach 0.088 dBm/mum, and the lowest sensing limit can reach 100 nm.
The micro-nano optical fiber multifunctional sensor with flexible encapsulation prepared by the embodiment is subjected to repeated multifunctional test, the single displacement is set to be 100 micrometers, the repetition frequency is 0.5Hz, the test time is 500s, and the obtained response curve is shown in figure 2. According to the repetitive multifunctional test chart 2, the micro-nano optical fiber multifunctional sensor based on PDMS flexible packaging has good repeatability, and can meet the requirement of reliability in actual sensing application to a certain extent.
(5) Temperature test of micro-nano optical fiber multifunctional sensor based on PDMS flexible packaging
The prepared micro-nano optical fiber multifunctional sensor based on PDMS flexible packaging is placed in a constant temperature heating device, and continuous temperature testing of the micro-nano optical fiber multifunctional sensor based on PDMS flexible packaging is realized by setting a temperature rise program. The temperature-raising program is as follows: step 1: heating for 90 seconds at the temperature of 30-35 ℃; step 2: holding at 35 deg.C for 90 seconds; and step 3: heating for 90 seconds at 35-40 ℃; and 4, step 4: the temperature is kept at 40 ℃ for 90 seconds, and so on, and finally the temperature is raised to 60 ℃ and stopped. The response of the continuous temperature test obtained in the embodiment is shown in fig. 3, and as can be seen from fig. 3, the micro-nano optical fiber multifunctional sensor based on the PDMS flexible package has good response linearity and sensitivity within a temperature range of 30-60 ℃, the detection rate of the sensor can reach 0.02 dBm/DEG C, and the requirement in practical sensing application can be met to a certain extent.
The foregoing is merely a preferred embodiment of the invention and is not intended to limit the invention in any manner. It should be noted that, for those skilled in the art, without departing from the principle of the present invention, several improvements and modifications can be made, and these improvements and modifications should also be construed as the protection scope of the present invention.
Claims (10)
1. A preparation method of a micro-nano optical fiber multifunctional sensor is characterized by comprising the following steps:
and coating polydimethylsiloxane on the surface of the micro-nano optical fiber and then curing to obtain the micro-nano optical fiber multifunctional sensor.
2. The preparation method according to claim 1, wherein the diameter of the micro-nano optical fiber is 0.5-7 μm, and when the length of the micro-nano optical fiber is 3cm, the dosage of the polydimethylsiloxane is 0.5-3 mL.
3. The method according to claim 1, wherein the curing temperature is 50 to 100 ℃ and the curing time is 10 to 60 minutes.
4. The preparation method according to claim 1, wherein the micro-nano optical fiber is prepared by a modified flame scanning method.
5. The method of claim 4, wherein the parameters of the modified flame scanning method include: the heating temperature is 1200-1400 ℃, the flame scanning speed is 1-4 mm/s, and the optical fiber drawing speed is 0.1-0.4 mm/s.
6. The preparation method of claim 1, wherein the polydimethylsiloxane is prepared by mixing an epoxy resin structural adhesive and an acrylate curing agent, and the volume ratio of the epoxy resin structural adhesive to the acrylate curing agent is 8-10: 1.
7. The method of claim 6, wherein the acrylate curing agent comprises one or more of methacrylate, acrylate, and a-cyanoacrylate.
8. The method according to claim 1, wherein the polydimethylsiloxane further comprises a step of evacuating air before use, and the pressure of the evacuated air is 0.1 to 100Pa, and the time is 5 to 15 minutes.
9. The micro-nano optical fiber multifunctional sensor prepared by the preparation method of any one of claims 1 to 8.
10. The micro-nano optical fiber multifunctional sensor of claim 9 is applied to the field of temperature and stress detection.
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| CN202111301319.4A CN114018301A (en) | 2021-11-04 | 2021-11-04 | Micro-nano optical fiber multifunctional sensor and preparation method and application thereof |
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| CN202111301319.4A CN114018301A (en) | 2021-11-04 | 2021-11-04 | Micro-nano optical fiber multifunctional sensor and preparation method and application thereof |
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Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102502478A (en) * | 2011-11-08 | 2012-06-20 | 太原理工大学 | Manufacturing method for polydimethylsiloxane microfilm biosensor based on surface stress |
| CN103913486A (en) * | 2014-04-12 | 2014-07-09 | 太原理工大学 | Method for preparing AuNPs-PDMS composite micro film biosensor |
| CN108318161A (en) * | 2018-02-06 | 2018-07-24 | 华东理工大学 | Wearable pressure sensor and its manufacturing method |
| CN109100075A (en) * | 2018-07-28 | 2018-12-28 | 张玉英 | A kind of pliable pressure sensor and preparation method for electronic skin |
| CN110448268A (en) * | 2018-05-08 | 2019-11-15 | 南京大学 | Health monitoring sensor and preparation method and measuring system based on optics micro optical fiber |
| CN111679370A (en) * | 2020-05-30 | 2020-09-18 | 华南理工大学 | PDMS flexible optical fiber micro-lens and preparation method thereof |
| CN113503917A (en) * | 2021-07-05 | 2021-10-15 | 之江实验室 | Flexible temperature and pressure sensor based on micro-nano optical fiber |
-
2021
- 2021-11-04 CN CN202111301319.4A patent/CN114018301A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102502478A (en) * | 2011-11-08 | 2012-06-20 | 太原理工大学 | Manufacturing method for polydimethylsiloxane microfilm biosensor based on surface stress |
| CN103913486A (en) * | 2014-04-12 | 2014-07-09 | 太原理工大学 | Method for preparing AuNPs-PDMS composite micro film biosensor |
| CN108318161A (en) * | 2018-02-06 | 2018-07-24 | 华东理工大学 | Wearable pressure sensor and its manufacturing method |
| CN110448268A (en) * | 2018-05-08 | 2019-11-15 | 南京大学 | Health monitoring sensor and preparation method and measuring system based on optics micro optical fiber |
| CN109100075A (en) * | 2018-07-28 | 2018-12-28 | 张玉英 | A kind of pliable pressure sensor and preparation method for electronic skin |
| CN111679370A (en) * | 2020-05-30 | 2020-09-18 | 华南理工大学 | PDMS flexible optical fiber micro-lens and preparation method thereof |
| CN113503917A (en) * | 2021-07-05 | 2021-10-15 | 之江实验室 | Flexible temperature and pressure sensor based on micro-nano optical fiber |
Non-Patent Citations (1)
| Title |
|---|
| 卫正统: "微纳光纤倏逝场特性及微污染传感技术研究", CNKI博士学位论文全文库信息科技辑, vol. 2016, no. 1, 15 January 2016 (2016-01-15), pages 3 * |
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