CN114002914A - Multifunctional nano-imprinting equipment - Google Patents
Multifunctional nano-imprinting equipment Download PDFInfo
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- CN114002914A CN114002914A CN202111315559.XA CN202111315559A CN114002914A CN 114002914 A CN114002914 A CN 114002914A CN 202111315559 A CN202111315559 A CN 202111315559A CN 114002914 A CN114002914 A CN 114002914A
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
Abstract
The invention discloses a multifunctional nanoimprint system, which comprises a substrate, a working mold bearing table unit, an alignment unit and an ultraviolet curing unit, wherein the substrate bearing plate unit is arranged on one side of the working mold bearing table unit, the working mold bearing plate unit is arranged on the other side of the working mold bearing table unit, the alignment unit is positioned right above the working mold bearing table unit, and the ultraviolet curing unit is positioned right above the substrate bearing plate unit. The invention has the beneficial effects that: the substrate bearing plate unit and the working die bearing plate unit realize bearing and rotary exchange of the substrate and complete single-sided imprinting and double-sided imprinting of the substrate; the alignment unit can observe the relative positions of the alignment marks and displays a real-time image on a screen; the ultraviolet curing unit emits ultraviolet rays to cure the nanoimprint lithography glue.
Description
Technical Field
The invention relates to the field of nano-imprinting, in particular to multifunctional nano-imprinting equipment. Background
The nano-imprinting technology is a novel micro-nano processing technology, a micro-nano structure on a template is transferred to a processing substrate through nano-imprinting glue, single-side imprinting and double-side imprinting are required to be carried out on a substrate in order to guarantee imprinting precision and alignment precision, and further improvement is required to be carried out on imprinting equipment.
Disclosure of Invention
The invention aims to overcome the technical defects and provides multifunctional nano-imprinting equipment which can be used for single-sided imprinting and double-sided imprinting on a substrate, realizes the controllability of the thickness of a glue layer and can ensure the imprinting precision and the alignment precision.
The technical scheme adopted by the invention for realizing the technical purpose is as follows: a multifunctional nano-imprinting system comprises a substrate, a working mold bearing table unit, an alignment unit and an ultraviolet curing unit, wherein the substrate bearing plate unit is arranged on one side of the working mold bearing table unit, the working mold bearing plate unit is arranged on the other side of the working mold bearing table unit, the alignment unit is positioned right above the working mold bearing table unit, and the ultraviolet curing unit is positioned right above the substrate bearing plate unit;
the substrate bearing plate is used for bearing a substrate, a circular vacuum groove is formed in the upper surface of the substrate bearing plate unit, and a vacuum hole is formed in the circular vacuum groove;
a rotating shaft is arranged on one side, close to the working die bearing table unit, of the substrate bearing plate unit and is clamped with a supporting column, a supporting stop block is arranged at the upper end of the supporting column and on one side, close to the working die bearing table unit, of the supporting column, the lower end of the supporting column is connected with a motor, and the motor can drive the substrate bearing plate unit to move up and down;
and a substrate bearing plate base is arranged on the left side of the working die bearing table unit and used for supporting the substrate bearing plate unit.
Preferably, the working die bearing plate unit is positioned on the right side of the working die bearing table unit, and the working die bearing table unit is used for adsorbing and fixing a second working die; the working die bearing plate
The unit comprises a transparent area arranged in the central area of the bearing plate, the upper surface of the bearing plate is also provided with a square vacuum groove, and a vacuum hole is arranged in the square vacuum groove; a working mold positioning groove is arranged outside the square vacuum groove;
a rotating shaft is arranged on one side, close to the working mold bearing plate unit, of the working mold bearing plate unit and can rotate around the supporting column; the supporting stop block is arranged on one side, close to the working die supporting table, of the upper end of the supporting column, the motor is connected to the lower end of the supporting column, the motor drives the working die bearing plate unit to move up and down, and a working die bearing plate base is further arranged on the right side of the working die bearing table unit.
Preferably, the working mold bearing table unit comprises a square vacuum groove arranged on the upper surface of the working mold bearing table unit, the square vacuum groove is used for fixing the edge of the working mold, a vacuum hole is arranged in the square vacuum groove, and a working mold positioning groove is arranged outside the square vacuum groove;
the working mould bearing table unit also comprises at least three top columns arranged outside the square vacuum groove, and the top columns penetrate through the working mould bearing table unit and are connected to a top column motor through fixing blocks; a lifting column is connected below the working mould bearing table unit, and the lifting motor enables the lifting column to extend or contract to drive the working mould bearing table unit to move upwards or downwards;
a first displacement platform, a second displacement platform and a rotating platform are sequentially arranged below the lifting motor, the lifting motor is fixed on the first displacement platform, and the first displacement platform and the second displacement platform can drive the working die bearing table unit to move back and forth and move left and right; the rotating platform is arranged below the second displacement platform and can drive the working die bearing platform unit to rotate;
the working die bearing table unit can adsorb and fix a first working die and is matched with the alignment device to complete alignment action.
Preferably, the aligning unit includes aligning means, and the aligning means includes at least two; the alignment device is fixed on the fixed plate, the fixed plate is connected to the telescopic column through the connecting block, and the motor drives the telescopic column to extend or contract so as to drive the alignment device to move downwards or upwards; the alignment unit is positioned right above the working mould bearing table unit, and can observe the relative positions of the alignment marks and display real-time images on a screen.
Preferably, the ultraviolet curing unit comprises a support column fixed on the equipment shell, an upper limit block and a lower limit block are arranged on the support column, and a lifting block is also arranged on the support column and drives the ultraviolet lamp to move up and down; a motor is arranged on the lifting block and drives the telescopic rod to extend or contract so as to drive the ultraviolet lamp to move left and right;
the ultraviolet curing unit is positioned on the left side of the substrate bearing plate unit and can emit ultraviolet rays to cure the nanoimprint glue after double-sided imprinting is finished.
Preferably, the substrate is fixed on the substrate bearing plate unit, and a substrate alignment mark is provided on the substrate.
Preferably, the working mold comprises a first working mold and a second working mold, the first working mold is fixed on the upper surface of the working mold bearing plate unit, the second working mold is fixed on the upper surface of the working mold bearing plate unit, and a working mold alignment mark corresponding to the substrate alignment mark is further arranged on the working mold.
The invention has the beneficial effects that: the substrate bearing plate unit and the working die bearing plate unit realize bearing and rotary exchange of the substrate and complete single-sided imprinting and double-sided imprinting of the substrate; the alignment unit can observe the relative positions of the alignment marks and displays a real-time image on a screen; the ultraviolet curing unit emits ultraviolet rays to cure the nanoimprint lithography glue.
Drawings
FIG. 1 is a schematic diagram of the apparatus of the present invention;
FIG. 2 is a schematic view showing the structure of the upper surface of the substrate carrier plate unit 1 of the device of the present invention;
FIG. 3 is a front view of the substrate carrier plate unit 1 of the apparatus of the present invention;
FIG. 4 is a schematic view of the upper surface of the working mold carrier plate unit 2 of the apparatus of the present invention;
FIG. 5 is a front view of the working mold carrier plate unit 2 of the apparatus of the present invention;
FIG. 6 is a schematic structural view of the upper surface of the work die carrier table unit 3 of the apparatus of the present invention;
FIG. 7 is a front view of the inventive apparatus work mold carrier table unit 3;
FIG. 8 is a schematic structural view of a part of the structure of the work die carrier table unit 3 of the apparatus of the present invention;
FIG. 9 is a schematic structural diagram of an imprinting process of the apparatus of the present invention;
fig. 10-19 are schematic views of a double-sided embossing process of the apparatus of the present invention.
Labeled as: 1. a substrate carrying plate unit; 11. a transparent region; 12. a circular vacuum tank; 13.
a vacuum hole; 14.
a rotating shaft; 15. a support pillar; 151. a support block; 16. a motor; 17. a substrate carrier plate base; 2.
a working mold carrier plate unit; 21. a transparent region; 22. a square vacuum tank; 23. a vacuum hole;
24. a rotating shaft; 25. a working mold locating slot; 26. a support pillar; 261. a support block; 27. a motor;
28. a working mold carrier plate base;
3. a working mold plummer unit; 31. a square vacuum tank; 32. a vacuum hole; 33. a working mold locating slot; 34. a top pillar; 35. a jack post motor; 351. a fixed block; 36. a lifting column; 37. a lifting motor; 381. A first displacement stage; 382. a second displacement stage; 383. rotating the platform; 39. a motor;
4. an alignment unit; 41. a fixing plate; 42. an alignment device; 43. connecting blocks; 44. a telescopic column; 45. A motor;
5. an ultraviolet curing unit; 51. a support pillar; 511. an upper limit block; 512. a lower limiting block; 52. a lifting block; 53. a motor; 54. a telescopic rod; 55. an ultraviolet lamp;
6. a substrate; 61. substrate alignment marks;
7. working a mold; 71. a first working mold; 72. a second working mold; 73. and (6) aligning and marking the working mould.
Detailed Description
The invention is further explained below with reference to the embodiments of the drawings. Examples
A
As shown in fig. 1-19:
a multifunctional nano-imprinting device comprises a substrate 6, a working mold 7, a working mold bearing table unit 3, an alignment unit 4 and an ultraviolet curing unit 5, wherein the substrate bearing table unit 1 is arranged on one side of the working mold bearing table unit 3, the working mold bearing table unit 2 is arranged on the other side of the working mold bearing table unit 3, the alignment unit is located right above the working mold bearing table unit 3, and the ultraviolet curing unit is located right above the substrate bearing table unit 1;
the substrate bearing plate 1 is used for bearing a substrate 6, a circular vacuum groove 12 is arranged on the upper surface of the substrate bearing plate unit 1, and a vacuum hole 13 is arranged in the circular vacuum groove 12;
a rotating shaft 14 is arranged on one side, close to the working die bearing table unit 3, of the substrate bearing plate unit 1, the rotating shaft 14 is clamped with a supporting column 15, a supporting stop block 151 is arranged at the upper end of the supporting column 15 and on one side, close to the working die bearing table unit 3, of the supporting column 15, the lower end of the supporting column 15 is connected with a motor 16, and the motor 16 can drive the substrate bearing plate unit 1 to move up and down;
a substrate bearing plate base 17 is arranged on the left side of the working die bearing table unit 3 and used for supporting the substrate bearing plate unit 1.
The working die bearing plate unit 2 is positioned at the right side of the working die bearing table unit 3, and the working die bearing table unit 3 is used for adsorbing and fixing a second working die 72;
the working die bearing plate unit 2 comprises a transparent area 21 arranged in the central area of the bearing plate, a square vacuum groove 22 is further arranged on the upper surface of the bearing plate, and a vacuum hole 23 is arranged in the square vacuum groove 22; a working mold positioning groove 25 is arranged outside the square vacuum groove 22;
a rotating shaft 24 is arranged on one side of the working mold bearing plate unit 2 close to the working mold bearing table unit 3 and can rotate around a supporting column 26; the supporting block 261 is arranged on one side, close to the working mould supporting table 3, of the upper end of the supporting column 26, the motor 27 is connected to the lower end of the supporting column 26, the motor 27 drives the working mould bearing plate unit 2 to move up and down, and the working mould bearing plate base 28 is further arranged on the right side of the working mould bearing table unit 3.
The working mold bearing table unit 3 comprises a square vacuum groove 31 arranged on the upper surface of the working mold bearing table unit, the square vacuum groove 31 is used for fixing the edge of the working mold 7, a vacuum hole 32 is arranged in the square vacuum groove 31, and a working mold positioning groove 33 is arranged outside the square vacuum groove 31;
the working mold bearing table unit 3 further comprises 3 or more than 3 top pillars 34 arranged outside the square vacuum groove 31, and the top pillars 34 penetrate through the working mold bearing table unit 3 and are connected to a top pillar motor 35 through fixing blocks 351; a lifting column 36 is connected below the working mold bearing table unit 3, and the lifting motor 37 enables the lifting column 36 to extend or contract to drive the working mold bearing table unit 3 to move upwards or downwards;
a first displacement platform 381, a second displacement platform 382 and a rotating platform 383 are sequentially arranged below the lifting motor 37, the lifting motor 37 is fixed on the first displacement platform 381, and the first displacement platform 381 and the second displacement platform 382 can drive the working die bearing table unit 3 to move front and back and left and right; the rotating platform 383 is arranged below the second displacement platform 382 and can drive the working die bearing platform unit 3 to rotate;
the working mold plummer unit 3 can adsorb and fix the first working mold 71 and complete the alignment action by matching with the alignment device 4.
The aligning unit 4 comprises aligning devices 42, and the number of the aligning devices 42 is 2 or more; the alignment device 42 is fixed on the fixed plate 41, the fixed plate 41 is connected to the telescopic column 44 through the connecting block 43, and the motor 45 drives the telescopic column 44 to extend or contract, so as to drive the alignment device 42 to move downwards or upwards; the alignment unit 4 is located directly above the work die stage unit 3, and the alignment unit 4 is capable of observing the relative positions of the alignment marks 61 and 73 and displaying a real-time image on a screen. 5. The multifunctional nanoimprinting apparatus of claim 1, characterized in that: the ultraviolet curing unit 5 comprises a support column 51 fixed on the equipment shell, an upper limit block 511 and a lower limit block 512 are arranged on the support column 51, a lifting block 52 is also arranged on the support column 51, and the lifting block drives the ultraviolet lamp 55 to move up and down; a motor 53 is arranged on the lifting block 52, and the motor 53 drives the telescopic rod 54 to extend or contract, so as to drive the ultraviolet lamp 55 to move left and right;
the ultraviolet curing unit 5 is located on the left side of the substrate bearing plate unit 1, and the ultraviolet curing unit 5 can emit ultraviolet rays to cure the nanoimprint glue after double-sided imprinting is completed.
The substrate 6 is fixed on the substrate loading plate unit 1, and the substrate 6 is provided with a substrate alignment mark 61.
The multifunctional nanoimprinting apparatus of claim 1, characterized in that: the working mold 7 comprises a first working mold 71 and a second working mold 72, the first working mold 71 is fixed on the upper surface of the working mold bearing plate unit 3, the second working mold 72 is fixed on the upper surface of the working mold bearing plate unit 2, and a working mold alignment mark 73 corresponding to the substrate alignment mark 61 is further arranged on the working mold 7.
The working principle and the working process of the double-sided stamping of the invention are as follows:
as shown in fig. 10-19:
s1 reset: the units of the equipment return to the original positions and record the original positions
The point location. S2 feeding:
fixing the substrate 6:
a substrate is placed on the upper surface of substrate carrying plate unit 1 over transparent region 11. The vacuum in the circular vacuum chamber 12 is turned on, and a negative pressure is formed in the circular vacuum chamber 12 to fix the substrate 6.
Fixing of the first working die 71:
the first working mold 71 with the nanostructure surface facing upward is placed on the upper surface of the working mold bearing table unit 3, and the four corners of the working mold are flush with the working mold positioning grooves 33. And opening the vacuum in the square vacuum groove 31 to fix the four sides of the working mold.
Fixing of the second working die 72:
and placing the second working die 72 with the nano-structure surface facing upwards on the upper surface of the working die adsorption plate 2, and flushing four corners of the working die with the working die positioning grooves 25. And opening the vacuum in the square vacuum groove 25, and fixing the four sides of the working die.
S3 dispensing:
after the substrate 6 and the working mold 7 are fixed, nano-imprint glue is dripped at the center of the nano structure of the first working mold 71 fixed on the working mold bearing table unit 3.
S4: rotating:
the substrate carrying plate 2 is rotated clockwise by 180 degrees about the rotation shaft 14, the substrate 6 is rotated to above the first working mold 71, and the support stopper 151 keeps the substrate carrying plate unit 1 horizontal. The substrate 6 does not contact the nanoimprint paste at the center of the first working mold 71 at this time.
S5 alignment:
after the preparation operation is completed, the first alignment operation is started. The motor 45 extends the telescopic column and causes the alignment device 42 to move down to just above the transparent region 11 of the substrate carrier plate unit 1. Alignment device 42 can view substrate alignment marks 61 of substrate 6 and working mold alignment marks 73 of the working mold through transparent region 11.
The alignment unit 4 feeds back the relative positions of the two alignment marks to the display screen in real time, the substrate 6 remains stationary according to the positions of the two alignment marks, and the working mold plummer unit 3 drives the first working mold 71 to move so that the substrate alignment mark 61 of the substrate 6 is aligned with the working mold alignment mark 73 of the first working mold 71 in the vertical direction.
The work die platform includes two displacement platforms responsible for left and right and front and back movement, and a rotation platform 383 responsible for rotating the entire platform 3.
S6 impression:
after the alignment is completed, the position of the working mold bearing table unit 3 is fixed, the motor 16 drives the supporting column 15 to move downwards, the substrate bearing plate unit 1 moves downwards until one surface of the substrate bearing plate unit 1, which adsorbs the substrate, contacts with the top column 34, at this time, the top column 34 supports the substrate bearing plate, and the supporting column 15 does not work on the substrate bearing plate unit 1. The top post motor 35 adjusts the length of the top post 34 to keep the substrate carrier plate unit 1 and the work die carrier table unit 3 horizontal. The top pillar 34 is lowered at the same time, and the substrate 6 comes into contact with the colloid on the surface of the first working mold 71, and the colloid spreads from the center to the outside, filling the nanostructure. The top pillar 34 stops the imprinting after reaching the designated position.
S7: releasing:
after the first imprinting is completed, the vacuum of the circular vacuum groove 12 is turned off, the substrate 6 is released, and the substrate 6 remains above the first working mold 71.
S8 reset:
the motor 45 shortens the telescopic column and the aligning device 42 returns to the original position. By rotating the substrate carrying plate 2 counterclockwise by 180 degrees about the rotation shaft 14, the substrate carrying plate unit 1 is rotated to the upper side of the substrate carrying plate base 17.
S9 dispensing:
the nano-imprinting glue is dripped at the center of the substrate 6 by the second dispensing, and the nano-imprinting glue dispensed twice can be the same or different.
S10 rotation:
the working mold carrier plate unit 2 is rotated counterclockwise by 180 degrees about the rotary shaft 24, the second working mold 72 is rotated to above the substrate 6, and the support stopper 261 keeps the working mold carrier plate unit 2 horizontal. The second working mold 72 does not contact the nanoimprint paste in the center of the substrate 6 at this time.
S11 alignment:
and after the preparation work is finished, starting the second alignment action. The motor 45 extends the telescopic column and brings the alignment device 42 down to just above the transparent area 21 of the working mould carrier plate unit 2. Alignment device 42 can view substrate alignment marks 61 of substrate 6 and working mold alignment marks 73 of both working molds through transparent region 211.
The aligning unit 4 feeds back the relative positions of the two alignment marks to the display screen in real time, the second working mold 72 is kept still according to the positions of the three alignment marks, and the working mold plummer unit 3 drives the aligned first working mold 71 and the aligned substrate 6 to move, so that the substrate alignment mark 61 of the substrate 6 is aligned with the working mold alignment marks 73 of the two working molds in the vertical direction.
S12 impression:
after the alignment is completed, the position of the working mold bearing table unit 3 is fixed, the motor 27 drives the supporting column 26 to move downwards, the working mold bearing plate unit 2 moves downwards until one surface of the working mold bearing plate unit 2 adsorbing the working mold contacts with the top column 34, the top column 34 supports the working mold bearing plate unit 2, and the supporting column 26 does not work on the working mold bearing plate unit 2. The support pillar motor 35 adjusts the length of the support pillar 34 to keep the work die carrier plate unit 2 and the work die carrier table unit 3 horizontal. The top pillar 34 is lowered at the same time and the first working mold 71, the substrate 6, is in contact with the surface colloid, which expands from the center outwards, filling the nanostructures. The top pillar 34 stops the imprinting after reaching the designated position.
S13 exposure:
after the two imprints are finished, the ultraviolet curing colloid is started. The elevating block 52 drives the ultraviolet lamp 55 to move from the upper limit block 511 position to the lower limit block 512 position. The motor 53 extends the telescoping rod 54 and the ultraviolet lamp 55 moves to the right above the work mold carrier 2. The ultraviolet light of the ultraviolet lamp 55 is transmitted through the transparent area 21, the substrate 6 and the working mold 7 to solidify the nanoimprint lithography glue.
After curing is complete, the motor 53 shortens the telescoping rod 54 and the ultraviolet lamp moves to the left and back over the substrate carrier 1. The lifting mechanism 52 drives the ultraviolet lamp 55 to move upward, and then moves from the lower limit block 512 to the upper limit block 511 to return to the original position.
S14 separation:
the vacuum to square vacuum slot 22 is turned off and second working mold 72 is released. The work die carrier plate unit 2 is rotated clockwise 180 degrees about the axis of rotation 24 to above the work die carrier plate base 28.
The imprinted material was removed from the apparatus and separated manually. Single-side imprinting process:
repeating the steps S1-S6, S13 and S14.
Claims (7)
1. A multifunctional nano-imprinting equipment comprises a substrate and a working mold, and is characterized in that: the ultraviolet curing device comprises a working die bearing table unit, an alignment unit and an ultraviolet curing unit, wherein the substrate bearing plate unit is arranged on one side of the working die bearing table unit, the working die bearing plate unit is arranged on the other side of the working die bearing table unit, the alignment unit is positioned right above the working die bearing table unit, and the ultraviolet curing unit is positioned right above the substrate bearing plate unit;
the substrate bearing plate is used for bearing a substrate, a circular vacuum groove is formed in the upper surface of the substrate bearing plate unit, and a vacuum hole is formed in the circular vacuum groove;
a rotating shaft is arranged on one side, close to the working die bearing table unit, of the substrate bearing plate unit and is clamped with a supporting column, a supporting stop block is arranged at the upper end of the supporting column and on one side, close to the working die bearing table unit, of the supporting column, the lower end of the supporting column is connected with a motor, and the motor can drive the substrate bearing plate unit to move up and down;
and a substrate bearing plate base is arranged on the left side of the working die bearing table unit and used for supporting the substrate bearing plate unit.
2. The multifunctional nanoimprinting apparatus of claim 1, characterized in that: the working die bearing plate unit is positioned on the right side of the working die bearing table unit, and the working die bearing table unit is used for adsorbing and fixing a second working die;
the working die bearing plate unit comprises a transparent area arranged in the central area of the bearing plate, the upper surface of the bearing plate is also provided with a square vacuum groove, and a vacuum hole is arranged in the square vacuum groove; a working mold positioning groove is arranged outside the square vacuum groove;
a rotating shaft is arranged on one side, close to the working mold bearing plate unit, of the working mold bearing plate unit and can rotate around the supporting column; the supporting stop block is arranged on one side, close to the working die supporting table, of the upper end of the supporting column, the motor is connected to the lower end of the supporting column, the motor drives the working die bearing plate unit to move up and down, and a working die bearing plate base is further arranged on the right side of the working die bearing table unit.
3. The multifunctional nanoimprinting apparatus of claim 2, characterized in that: the working mold bearing table unit comprises a square vacuum groove arranged on the upper surface of the working mold bearing table unit, the square vacuum groove is used for fixing the edge of the working mold, a vacuum hole is arranged in the square vacuum groove, and a working mold positioning groove is arranged outside the square vacuum groove;
the working mould bearing table unit also comprises at least three top columns arranged outside the square vacuum groove, and the top columns penetrate through the working mould bearing table unit and are connected to a top column motor through fixing blocks; a lifting column is connected below the working mould bearing table unit, and the lifting motor enables the lifting column to extend or contract to drive the working mould bearing table unit to move upwards or downwards;
a first displacement platform, a second displacement platform and a rotating platform are sequentially arranged below the lifting motor, the lifting motor is fixed on the first displacement platform, and the first displacement platform and the second displacement platform can drive the working die bearing table unit to move back and forth and move left and right; the rotating platform is arranged below the second displacement platform and can drive the working die bearing platform unit to rotate;
the working die bearing table unit can adsorb and fix a first working die and is matched with the alignment device to complete alignment action.
4. The multifunctional nanoimprinting apparatus of claim 3, characterized in that: the alignment unit comprises at least two alignment devices; the alignment device is fixed on the fixed plate, the fixed plate is connected to the telescopic column through the connecting block, and the motor drives the telescopic column to extend or contract so as to drive the alignment device to move downwards or upwards; the alignment unit is positioned right above the working mould bearing table unit, and can observe the relative positions of the alignment marks and display real-time images on a screen.
5. The multifunctional nanoimprinting apparatus of claim 1, characterized in that: the ultraviolet curing unit comprises a support column fixed on the equipment shell, an upper limit block and a lower limit block are arranged on the support column, and a lifting block is also arranged on the support column and drives the ultraviolet lamp to move up and down; a motor is arranged on the lifting block and drives the telescopic rod to extend or contract so as to drive the ultraviolet lamp to move left and right;
the ultraviolet curing unit is positioned on the left side of the substrate bearing plate unit and can emit ultraviolet rays to cure the nanoimprint glue after double-sided imprinting is finished.
6. The multifunctional nanoimprinting apparatus of claim 1, characterized in that: the substrate is fixed on the substrate bearing plate unit, and a substrate alignment mark is arranged on the substrate.
7. The multifunctional nanoimprinting apparatus of claim 1, characterized in that: the working mould comprises a first working mould and a second working mould, the first working mould is fixed on the upper surface of the working mould bearing plate unit, the second working mould is fixed on the upper surface of the working mould bearing plate unit, and a working mould alignment mark corresponding to the substrate alignment mark is further arranged on the working mould.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111315559.XA CN114002914B (en) | 2021-11-09 | 2021-11-09 | Multifunctional nano imprinting system |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111315559.XA CN114002914B (en) | 2021-11-09 | 2021-11-09 | Multifunctional nano imprinting system |
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| CN114002914A true CN114002914A (en) | 2022-02-01 |
| CN114002914B CN114002914B (en) | 2023-08-18 |
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Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101377618A (en) * | 2007-08-29 | 2009-03-04 | 三星电子株式会社 | Dual-side imprinting lithography system |
| US20100112116A1 (en) * | 2005-12-08 | 2010-05-06 | Molecular Imprints, Inc. | Double-Sided Nano-Imprint Lithography System |
| WO2011155582A1 (en) * | 2010-06-11 | 2011-12-15 | 株式会社日立ハイテクノロジーズ | Stamper for microstructure transfer and microstructure transfer device |
| CN214311286U (en) * | 2021-04-01 | 2021-09-28 | 青岛天仁微纳科技有限责任公司 | Negative pressure formula nanometer impression equipment |
-
2021
- 2021-11-09 CN CN202111315559.XA patent/CN114002914B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20100112116A1 (en) * | 2005-12-08 | 2010-05-06 | Molecular Imprints, Inc. | Double-Sided Nano-Imprint Lithography System |
| CN101377618A (en) * | 2007-08-29 | 2009-03-04 | 三星电子株式会社 | Dual-side imprinting lithography system |
| WO2011155582A1 (en) * | 2010-06-11 | 2011-12-15 | 株式会社日立ハイテクノロジーズ | Stamper for microstructure transfer and microstructure transfer device |
| CN214311286U (en) * | 2021-04-01 | 2021-09-28 | 青岛天仁微纳科技有限责任公司 | Negative pressure formula nanometer impression equipment |
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| Publication number | Publication date |
|---|---|
| CN114002914B (en) | 2023-08-18 |
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