CN114000782A - Locking device and vacuum coating equipment - Google Patents
Locking device and vacuum coating equipment Download PDFInfo
- Publication number
- CN114000782A CN114000782A CN202111222779.8A CN202111222779A CN114000782A CN 114000782 A CN114000782 A CN 114000782A CN 202111222779 A CN202111222779 A CN 202111222779A CN 114000782 A CN114000782 A CN 114000782A
- Authority
- CN
- China
- Prior art keywords
- locking
- connecting rod
- driving
- bottom plate
- locking device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001771 vacuum deposition Methods 0.000 title claims abstract description 33
- 238000000576 coating method Methods 0.000 description 10
- 239000011248 coating agent Substances 0.000 description 9
- 230000006378 damage Effects 0.000 description 8
- 238000004519 manufacturing process Methods 0.000 description 8
- 208000027418 Wounds and injury Diseases 0.000 description 4
- 208000014674 injury Diseases 0.000 description 4
- 238000000034 method Methods 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 230000001154 acute effect Effects 0.000 description 1
- 230000009194 climbing Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 230000007306 turnover Effects 0.000 description 1
Images
Classifications
-
- E—FIXED CONSTRUCTIONS
- E05—LOCKS; KEYS; WINDOW OR DOOR FITTINGS; SAFES
- E05B—LOCKS; ACCESSORIES THEREFOR; HANDCUFFS
- E05B51/00—Operating or controlling locks or other fastening devices by other non-mechanical means
- E05B51/02—Operating or controlling locks or other fastening devices by other non-mechanical means by pneumatic or hydraulic means
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
Abstract
The locking device comprises a bottom plate support, a driving mechanism arranged on the bottom plate support and a locking buckle arranged on the driving mechanism and matched with a locking block, wherein the driving mechanism drives the locking buckle to move to a locking position locked with the locking block or drives the locking buckle to move to an unlocking position for releasing locking of the locking block. The invention also provides vacuum coating equipment. According to the locking device, the driving mechanism is used for transferring the locking buckle to lock or unlock the locking block, manual operation is replaced, locking or opening and closing of the locking device can be controlled remotely, and working efficiency and operation safety are greatly improved.
Description
[ technical field ] A method for producing a semiconductor device
The invention relates to the technical field of vacuum coating equipment, in particular to a locking device and vacuum coating equipment.
[ background of the invention ]
Along with the growing coating demand, in order to adapt to the coating of large-area substrates, the productivity of a coating production line is improved, the box structure of the production line is correspondingly enlarged, the equipment height of the corresponding coating production line is increased along with the increase of products, the traditional coating production lines are mostly vertical, but due to the special coating process requirements or the product quality requirements, the products cannot be vertically clamped, the coating line needs to be inclined by a certain angle to complete clamping, the inclination of a substrate clamping device enables the coating line to be inclined correspondingly, the target door mechanism of a process chamber is inclined, and compared with the vertical production line, the target door locking mechanism after the target door is overturned is particularly important on the inclined production line, particularly on the forward inclined production line. When the convertible target door of coating film room in earlier stage was opened or was closed, adopt artifical climbing double ladder to carry out the bolt lock to pay the operation to high-rise space, long work efficiency is low when the bolt lock is paid the operation, and the manual work has the safety risk of carelessly falling when the operation of high-rise space in addition, causes the injury of personnel or the damage of equipment.
[ summary of the invention ]
The invention solves the technical problem that manual operation is needed when the turnover target door of the existing coating chamber is opened or closed, and provides a locking device and vacuum coating equipment.
The invention is realized by the following technical scheme:
the locking device comprises a bottom plate support, a driving mechanism arranged on the bottom plate support, and a locking buckle arranged on the driving mechanism and matched with a locking block, wherein the driving mechanism drives the locking buckle to move to a locking position locked with the locking block, or drives the locking buckle to move to an unlocking position for releasing the locking block.
The locking device comprises a driving mechanism and a locking block, wherein the driving mechanism comprises a first driving component and a second driving component, the first driving component is used for driving the locking buckle to move to a half locking position buckled with the locking block, and after the locking buckle moves to the half locking position with the locking block, the second driving component drives the locking buckle to move to a locking position so as to lock the locking block.
According to the locking device, the connecting rod hinged with the bottom plate support is arranged on the bottom plate support, the first driving component is arranged on the connecting rod, the second driving component is used for driving the connecting rod to rotate, the first driving component and the locking buckle are driven to move together, and the locking buckle moves to a locking position.
The locking device comprises a first connecting rod and a second connecting rod, wherein the first connecting rod and the second connecting rod respectively extend towards two directions from the hinged point of the connecting rod and the bottom plate bracket.
According to the locking device, the first driving assembly comprises a first driving cylinder arranged on the second connecting rod, the locking buckle comprises a hinge point hinged with the first connecting rod, a buckling end buckled with the locking block and a driving end hinged with the output end of the first driving cylinder;
when the output end of the first driving air cylinder retracts, the driving end is pulled, so that the buckling end rotates around the hinge point to be buckled on the locking block;
when the output end of the first driving air cylinder extends out, the driving end is pushed, so that the buckling end rotates around the hinge point to be separated from the locking block.
According to the locking device, the second driving assembly comprises a second driving cylinder, the body of the second driving cylinder is hinged with the bottom plate support, and the output end of the second driving cylinder is hinged with the second connecting rod;
when the output end of the second driving cylinder retracts, the second connecting rod is pulled, so that the first connecting rod rotates in the direction far away from the locking block;
when the output end of the second driving cylinder extends out, the second connecting rod is pushed, so that the first connecting rod rotates towards the direction far away from the locking block.
A locking device as in or above, wherein the locking piece acts on the locking buckle to form a self-locking when the locking buckle is in the locking position.
According to the locking device, the connecting rod hinged with the bottom plate support is arranged on the bottom plate support, the rotating range of the connecting rod is limited by the bottom plate support, the connecting rod is hinged with the locking buckle, and when the locking buckle is located at the locking position, the locking block acts on the locking buckle to enable the connecting rod to be pressed on the bottom plate support in a propping mode.
According to the locking device, the output end of the second driving cylinder is provided with the fisheye joint which is hinged with the second connecting rod.
The invention also provides vacuum coating equipment which comprises a vacuum coating chamber and a target door matched with the vacuum coating chamber, wherein the locking device which enables the vacuum coating chamber and the target door to keep a mutually locked state or a locking released state is arranged between the vacuum coating chamber and the target door.
Compared with the prior art, the invention has the following advantages:
according to the locking device, the driving mechanism is used for transferring the locking buckle to lock or unlock the locking block, manual operation is replaced, locking or opening and closing of the locking device can be controlled remotely, and working efficiency and operation safety are greatly improved.
According to the vacuum coating equipment, the locking device and the locking block are respectively arranged on the vacuum coating chamber and the target door, when the locking device and the locking block are locked, the target door is covered on the vacuum coating chamber and locked, and when the locking device and the locking block are unlocked, the target door can be opened and turned relative to the vacuum coating chamber. Therefore, manual operation is not needed, the injury of personnel or the damage of equipment can be avoided, and the working efficiency can be improved.
[ description of the drawings ]
In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings needed to be used in the description of the embodiments will be briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without creative efforts.
FIG. 1 is a first schematic view of the locking buckle in an unlocked position;
FIG. 2 is a second schematic structural view of the locking buckle in the unlocked position;
FIG. 3 is a first schematic view of the locking buckle in a semi-locked position;
FIG. 4 is a second schematic structural view of the locking buckle in a semi-locked position;
FIG. 5 is a first schematic view of the locking buckle in the locking position;
FIG. 6 is a second schematic structural view of the locking buckle in the locked position;
FIG. 7 is a schematic view showing an opened state of a target door of the vacuum plating apparatus;
FIG. 8 is a schematic view showing a state where a target door of the vacuum plating apparatus is closed;
fig. 9 is a schematic structural view of the floor bracket.
[ detailed description ] embodiments
In order to make the technical solutions and the advantages of the technical problems solved by the present invention more clearly understood, the present invention is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
When embodiments of the present invention refer to the ordinal numbers "first", "second", etc., it should be understood that the terms are used for distinguishing only when they do express the ordinal order in context.
In the description of the present invention, it should be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
The first embodiment is as follows: the utility model provides a locking device, includes bottom plate support 1, locates actuating mechanism 2 on the bottom plate support 1, and locate actuating mechanism 2 go up and detain 3 with the locking of latch segment 7 complex locking, the drive of actuating mechanism 2 the locking is detained 3 and is removed to the closure position with the latch segment closure, or the drive the locking is detained 3 and is removed to the unblock position of removing the closure to the latch segment.
According to the locking device provided by the embodiment of the invention, the locking buckle is transferred by the driving mechanism to lock or unlock the locking block, manual operation is replaced, the locking or opening and closing of the locking device can be remotely controlled, and the working efficiency and the operation safety are greatly improved.
Further, as a preferred embodiment of the present scheme but not limited thereto, a space of stepping down 11 is provided on the bottom plate bracket 1, when the locking block 7 and the locking buckle 3 are locked, the space of stepping down 11 is provided for the locking block 7 to enter, and the locking block is located in the space of stepping down.
Further, as a preferred embodiment of the present invention but not limited thereto, the driving mechanism 2 includes a first driving component 21 and a second driving component 22, the first driving component 21 is configured to drive the locking buckle 3 to move to a half-locking position where the locking buckle is buckled with the locking block, and after the locking buckle 3 moves to the half-locking position where the locking block is buckled, the second driving component 22 drives the locking buckle 3 to move to the locking position to lock the locking block. The position of the locking buckle is adjusted through the first driving assembly and the second driving assembly, and the locking buckle comprises a moving position and a rotating position, so that the locking buckle can move between a locking position, a half-locking position and an unlocking position.
Further, as a preferred embodiment of the present invention, but not limited to, a connecting rod 4 hinged to the bottom plate bracket 1 is provided on the bottom plate bracket 1, the first driving assembly 21 is provided on the connecting rod 4, the second driving assembly 22 is configured to drive the connecting rod 4 to rotate, so as to drive the first driving assembly 21 and the locking buckle 3 to move together, and the locking buckle 3 moves to a locking position. The first driving component drives the connecting rod to rotate, and the connecting rod rotates to drive the first driving component and the locking buckle to move. The linear driving of the second driving component is changed into the circular motion of the first driving component and the locking buckle around the intersection point of the connecting rod and the bottom plate bracket through the connecting rod.
Further, as a preferred embodiment of the present invention, but not limited thereto, the link 4 includes a first link 41 and a second link 42 extending in two directions from the hinge point of the link and the floor bracket 1, respectively. In this embodiment, an included angle between the first link and the second link is an acute angle.
Further, as a preferred embodiment of the present disclosure, but not limited thereto, the first driving assembly 21 includes a first driving cylinder 211 disposed on the second link 42, and the locking buckle 3 includes a hinge point 31 hinged to the first link 41, a buckling end 32 buckled to the locking block, and a driving end 33 hinged to an output end of the first driving cylinder 211;
when the output end of the first driving cylinder 211 retracts, the driving end 33 is pulled, so that the fastening end 32 rotates around the hinge point 31 to be fastened on the locking block;
when the output end of the first driving cylinder 211 extends out, the driving end 33 is pushed, so that the fastening end 32 rotates around the hinge point 31 to be separated from the locking block.
Further, as a preferred embodiment of the present invention but not limited thereto, the second driving assembly 22 comprises a second driving cylinder 221, the body of the second driving cylinder 221 is hinged with the bottom plate bracket 1, and the output end is hinged with the second connecting rod 42;
when the output end of the second driving cylinder 221 retracts, the second connecting rod 42 is pulled, so that the first connecting rod 41 rotates in a direction away from the locking block;
when the output end of the second driving cylinder 221 extends out, the second connecting rod 42 is pushed, so that the first connecting rod 41 rotates in a direction away from the locking block.
Further, as a preferred embodiment of the present invention, but not limited thereto, when the locking buckle 3 is in the locking position, the locking block acts on the locking buckle 3 to form a self-locking.
Further, as a preferred embodiment of the present invention, but not limited thereto, a connecting rod 4 hinged to the bottom plate bracket 1 is provided on the bottom plate bracket 1, a rotation range of the connecting rod 4 is limited by the bottom plate bracket 1, the connecting rod 4 is hinged to the locking buckle 3, and when the locking buckle 3 is located at the locking position, the locking block acts on the locking buckle 3 to press the connecting rod 4 against the bottom plate bracket 1. At the moment, when the second driving mechanism and/or the first driving mechanism fail, the locking buckle is still kept at the locking position, the locking block acts on the locking buckle, the connecting rod is pressed on the bottom plate support in a propping mode, and the connecting rod keeps the current position and cannot move to the locking buckle.
Further, as a preferred embodiment of the present invention, but not limited thereto, a fisheye joint 23 for hinging with the second connecting rod 42 is provided on the output end of the second driving cylinder 221.
Example two: the difference from the first embodiment is that: when the locking buckle 3 is in the locking position, the locking block acts on the locking buckle 3 to form self-locking. The self-locking of the first embodiment is realized on the basis of the first driving component and the second driving component together with the connecting rod. The self-locking of the second embodiment can be realized by various ways, such as:
further, as a preferred embodiment of the present invention, but not limited thereto, a connecting rod 4 hinged to the bottom plate bracket 1 is provided on the bottom plate bracket 1, a rotation range of the connecting rod 4 is limited by the bottom plate bracket 1, the connecting rod 4 is hinged to the locking buckle 3, and when the locking buckle 3 is located at the locking position, the locking block acts on the locking buckle 3 to press the connecting rod 4 against the bottom plate bracket 1.
The embodiment of the invention also provides vacuum coating equipment which comprises a vacuum coating chamber 5 and a target door 6 matched with the vacuum coating chamber 5, wherein the locking device which enables the vacuum coating chamber 5 and the target door 6 to keep a mutually locked state or a locking released state is arranged between the vacuum coating chamber 5 and the target door 6.
According to the vacuum coating equipment provided by the embodiment of the invention, the locking device and the locking block are respectively arranged on the vacuum coating chamber and the target door, when the locking device and the locking block are locked, the target door is covered on the vacuum coating chamber and locked, and when the locking device and the locking block are unlocked, the target door can be opened and turned relative to the vacuum coating chamber. Therefore, manual operation is not needed, the injury of personnel or the damage of equipment can be avoided, and the working efficiency can be improved. The locking device and the locking block can be interchanged in position, and the same effect is achieved.
The working principle of the embodiment is as follows:
according to the locking device, the driving mechanism is used for transferring the locking buckle to lock or unlock the locking block, manual operation is replaced, locking or opening and closing of the locking device can be controlled remotely, and working efficiency and operation safety are greatly improved.
According to the vacuum coating equipment, the locking device and the locking block are respectively arranged on the vacuum coating chamber and the target door, when the locking device and the locking block are locked, the target door is covered on the vacuum coating chamber and locked, and when the locking device and the locking block are unlocked, the target door can be opened and turned relative to the vacuum coating chamber. Therefore, manual operation is not needed, the injury of personnel or the damage of equipment can be avoided, and the working efficiency can be improved.
The foregoing is illustrative of embodiments provided in connection with the detailed description and is not intended to limit the disclosure to the particular forms set forth herein. Similar to the structure of the method, or several technical deductions or substitutions made on the premise of the conception of the present application, should be regarded as the protection scope of the present application.
Claims (10)
1. A locking device, characterized by: including bottom plate support (1), locate actuating mechanism (2) on bottom plate support (1), and locate actuating mechanism (2) go up and detain (3) with latch segment complex locking, actuating mechanism (2) drive locking is detained (3) and is removed to the closure position with the latch segment closure, or the drive locking is detained (3) and is removed to the unblock position of relieving the latch segment closure.
2. A locking device according to claim 1, characterized in that: actuating mechanism (2) include first drive assembly (21) to and second drive assembly (22), first drive assembly (21) are used for the drive locking is detained (3) and is removed to the half locking position with the latch segment lock, behind locking detain (3) remove to the half locking position with the latch segment, second drive assembly (22) drive locking detains (3) and removes to the locking position to lock the latch segment.
3. A locking device according to claim 2, characterized in that: be equipped with rather than articulated connecting rod (4) on bottom plate support (1), first drive assembly (21) are located on connecting rod (4), second drive assembly (22) are used for the drive connecting rod (4) are rotatory, drive first drive assembly (21) with locking is detained (3) and is removed jointly, locking is detained (3) and is removed to the closure position.
4. A locking device according to claim 3, characterized in that: the connecting rod (4) comprises a first connecting rod (41) and a second connecting rod (42) which respectively extend towards two directions from the hinged point of the connecting rod and the bottom plate bracket (1).
5. A locking device according to claim 4, characterized in that: the first driving assembly (21) comprises a first driving cylinder (211) arranged on the second connecting rod (42), the locking buckle (3) comprises a hinge point (31) hinged with the first connecting rod (41), a buckling end (32) buckled with the locking block, and a driving end (33) hinged with the output end of the first driving cylinder (211);
when the output end of the first driving air cylinder (211) retracts, the driving end (33) is pulled, so that the buckling end (32) rotates around the hinge point (31) to be buckled on the locking block;
when the output end of the first driving air cylinder (211) extends out, the driving end (33) is pushed, so that the buckling end (32) rotates around the hinge point (31) to be separated from the locking block.
6. A locking device according to claim 4, characterized in that: the second driving assembly (22) comprises a second driving cylinder (221), the body of the second driving cylinder (221) is hinged with the bottom plate support (1), and the output end of the second driving cylinder is hinged with the second connecting rod (42);
when the output end of the second driving cylinder (221) retracts, the second connecting rod (42) is pulled, so that the first connecting rod (41) rotates in the direction away from the locking block;
when the output end of the second driving cylinder (221) extends out, the second connecting rod (42) is pushed, so that the first connecting rod (41) rotates towards the direction far away from the locking block.
7. A locking device according to claim 1 or 3, wherein: when the locking buckle (3) is in a locking position, the locking block acts on the locking buckle (3) to form self-locking.
8. A locking device according to claim 7, characterized in that: the locking device is characterized in that a connecting rod (4) hinged with the connecting rod is arranged on the bottom plate support (1), the rotating range of the connecting rod (4) is limited by the bottom plate support (1), the connecting rod (4) is hinged with the locking buckle (3), and when the locking buckle (3) is located at a locking position, a locking block acts on the locking buckle (3) to enable the connecting rod (4) to be pressed on the bottom plate support (1).
9. A locking device according to claim 6, characterized in that: and a fisheye joint (23) hinged with the second connecting rod (42) is arranged at the output end of the second driving cylinder (221).
10. Vacuum coating equipment, its characterized in that: comprising a vacuum coating chamber (5) and a target door (6) matched with the vacuum coating chamber (5), wherein a locking device which can keep the vacuum coating chamber (5) and the target door (6) in a mutually locked state or an unlocked state is arranged between the vacuum coating chamber (5) and the target door (6).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111222779.8A CN114000782A (en) | 2021-10-20 | 2021-10-20 | Locking device and vacuum coating equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111222779.8A CN114000782A (en) | 2021-10-20 | 2021-10-20 | Locking device and vacuum coating equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN114000782A true CN114000782A (en) | 2022-02-01 |
Family
ID=79923344
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202111222779.8A Pending CN114000782A (en) | 2021-10-20 | 2021-10-20 | Locking device and vacuum coating equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN114000782A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114807889A (en) * | 2022-05-18 | 2022-07-29 | 东莞市华升真空镀膜科技有限公司 | Cavity door locking mechanism, vacuum coating cavity and vacuum coating device |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE4111646A1 (en) * | 1991-04-10 | 1992-10-15 | Bayerische Motoren Werke Ag | Catch arrangement for vehicle folding roof - includes reliable secondary operating system used if main operating drive fails |
| EP1460218A2 (en) * | 2003-03-21 | 2004-09-22 | Firma Wagner Umwelttechnik GmbH | Closing device |
| CN202596329U (en) * | 2012-03-31 | 2012-12-12 | 广东友通工业有限公司 | Automatic door lock |
| CN207406151U (en) * | 2017-10-20 | 2018-05-25 | 深圳市新星轻合金材料股份有限公司 | A kind of closed lid arrangement of self-locking |
| CN208220418U (en) * | 2018-03-30 | 2018-12-11 | 阿兰斯洗涤设备（广州）有限公司 | A kind of Semi-automatic door locking device of washing and dehydrating integrated machine |
| CN214035571U (en) * | 2020-12-01 | 2021-08-24 | 山东海洋工程装备有限公司 | Novel hydraulic elevator for lifting pipe column |
-
2021
- 2021-10-20 CN CN202111222779.8A patent/CN114000782A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE4111646A1 (en) * | 1991-04-10 | 1992-10-15 | Bayerische Motoren Werke Ag | Catch arrangement for vehicle folding roof - includes reliable secondary operating system used if main operating drive fails |
| EP1460218A2 (en) * | 2003-03-21 | 2004-09-22 | Firma Wagner Umwelttechnik GmbH | Closing device |
| CN202596329U (en) * | 2012-03-31 | 2012-12-12 | 广东友通工业有限公司 | Automatic door lock |
| CN207406151U (en) * | 2017-10-20 | 2018-05-25 | 深圳市新星轻合金材料股份有限公司 | A kind of closed lid arrangement of self-locking |
| CN208220418U (en) * | 2018-03-30 | 2018-12-11 | 阿兰斯洗涤设备（广州）有限公司 | A kind of Semi-automatic door locking device of washing and dehydrating integrated machine |
| CN214035571U (en) * | 2020-12-01 | 2021-08-24 | 山东海洋工程装备有限公司 | Novel hydraulic elevator for lifting pipe column |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114807889A (en) * | 2022-05-18 | 2022-07-29 | 东莞市华升真空镀膜科技有限公司 | Cavity door locking mechanism, vacuum coating cavity and vacuum coating device |
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Application publication date: 20220201 |