CN113985699B - Double-sided nano imprinting equipment - Google Patents
Double-sided nano imprinting equipment Download PDFInfo
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- CN113985699B CN113985699B CN202111316493.6A CN202111316493A CN113985699B CN 113985699 B CN113985699 B CN 113985699B CN 202111316493 A CN202111316493 A CN 202111316493A CN 113985699 B CN113985699 B CN 113985699B
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- template
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- workbench
- vertical moving
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- 238000001514 detection method Methods 0.000 claims abstract description 18
- 239000000758 substrate Substances 0.000 claims description 63
- 239000003292 glue Substances 0.000 claims description 21
- 239000002086 nanomaterial Substances 0.000 claims description 8
- 239000000084 colloidal system Substances 0.000 claims description 4
- 238000000034 method Methods 0.000 claims description 4
- 239000000853 adhesive Substances 0.000 claims description 3
- 230000001070 adhesive effect Effects 0.000 claims description 3
- 239000000463 material Substances 0.000 claims description 3
- 238000004049 embossing Methods 0.000 claims description 2
- 238000000926 separation method Methods 0.000 claims description 2
- 238000004519 manufacturing process Methods 0.000 abstract description 4
- 238000005516 engineering process Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000000018 DNA microarray Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 230000008092 positive effect Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
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- General Physics & Mathematics (AREA)
- Shaping Of Tube Ends By Bending Or Straightening (AREA)
Abstract
The invention proposes a double-sided nanoimprint apparatus characterized by comprising: the first alignment platform is arranged at the bottom; a workbench connected with the first vertical moving part a; the second alignment platform is arranged above the workbench; the sucker is connected with the second vertical moving part a and is opposite to the workbench; the two supporting devices are arranged between the workbench and the sucker and are oppositely arranged, and the two supporting devices can stretch in opposite directions or back to back in the horizontal direction; the alignment detection device is arranged above the sucker and connected with the first vertical moving part b; a controller is also included. The invention can realize double-sided imprinting, improve the imprinting precision and the yield and the imprinting efficiency, and realize large-scale mass production.
Description
Technical Field
The invention belongs to the technical field of nano imprinting equipment, and particularly relates to double-sided nano imprinting equipment.
Background
The nanoimprint technology is a novel micro-nano processing technology. The technology achieves ultra-high resolution through a mechanical transfer means, is hopeful to replace the traditional photoetching technology in the future, and becomes an important processing means in the fields of microelectronics and materials. At present, the application range of double-sided nanoimprint is wider and wider, and the double-sided nanoimprint has application in the fields of solar energy, biochips, display screens and the like. The existing nano imprinting equipment mostly adopts single-sided imprinting, double-sided imprinting cannot be effectively carried out, the precision of double-sided imprinting is insufficient, the alignment is poor, the yield of products is low, and high-efficiency and accurate mass imprinting cannot be realized.
Disclosure of Invention
Aiming at the technical problems, the invention provides double-sided nano imprinting equipment which can realize double-sided imprinting, improve the imprinting precision and the yield and the imprinting efficiency and realize large-scale mass production.
In order to achieve the above purpose, the invention adopts the following technical scheme: a double-sided nanoimprint apparatus comprising:
The first alignment platform is arranged at the bottom and comprises a first transverse moving part, a first vertical moving part a connected with the first transverse moving part and a first vertical moving part b;
A work table connected to the first vertical moving part a, on which a first transparent plate is provided, and a first vacuum tank connected to a vacuum pump to fix the first mold plate to the upper surface of the work table by generating negative pressure in the first vacuum tank;
The second alignment platform is arranged above the workbench and comprises a second transverse moving part, a second vertical moving part a connected with the second transverse moving part and a second vertical moving part b;
A suction cup connected with the second vertical moving part a and opposite to the workbench, a second transparent plate and a second vacuum groove connected with the vacuum pump are arranged on the suction cup, so that the second template is fixed on the lower surface of the suction cup by generating negative pressure in the second vacuum groove;
The two supporting devices are arranged between the workbench and the sucker in opposite arrangement, can stretch in opposite directions or back to back in the horizontal direction, and are respectively provided with rotatable clamping parts for clamping the substrate with the alignment mark;
The alignment detection device is arranged above the sucker, connected with the first vertical moving part b and used for detecting the alignment of the first template, the substrate and the second template;
A controller is also included.
In some embodiments of the present invention, the apparatus further comprises an ultraviolet lamp, which is located below the workbench and connected to the second vertical moving part b, and can emit ultraviolet light to irradiate the substrate and the imprint adhesive on the second template through the first transparent plate and the second transparent plate.
In some embodiments of the invention, the first vacuum groove is located outside the first transparent plate.
In some embodiments of the present invention, the first vacuum groove is rectangular, and first positioning grooves are respectively arranged at four right-angle outer sides of the first vacuum groove to position the first template. In some embodiments of the invention, the second vacuum groove is located outside the second transparent plate.
In some embodiments of the present invention, the second vacuum grooves are rectangular, and second positioning grooves are respectively arranged at four right-angle outer sides of the second vacuum grooves to position the second templates.
In some embodiments of the present invention, the supporting device includes a supporting block, and a telescopic rod connected to the supporting block, and the clamping portion is disposed on the telescopic rod.
In some embodiments of the invention, the clamping portion comprises a connection block connected with the telescopic rod, an arc-shaped guide rail connected with the connection block, and a clamping hand connected with the arc-shaped guide rail and provided with an arc-shaped clamping end.
In some embodiments of the present invention, the alignment detecting device includes a support arm connected to the second vertically moving part b, and a detecting unit connected to the support arm.
In some embodiments of the invention, the controller is a programmable controller.
Compared with the prior art, the invention has the advantages and positive effects that: the first template is fixed on the workbench, the second template is fixed on the sucker, the substrate with the alignment mark is fixed on the clamping part on the supporting device, the alignment mark relationship between the first template and the second template and the substrate is detected through the alignment detection device, the first transverse moving part and the second transverse moving part are controlled by the controller to be in transverse fine adjustment, the first template and the second template correspond to the alignment mark on the substrate, the imprinting precision and the yield are improved, the workbench and the sucker are correspondingly driven to be lifted through the first vertical moving part a and the second vertical moving part a, the imprinting glue on the first template contacts with the substrate for imprinting, the second template contacts with the imprinting glue on the substrate for imprinting, double-sided imprinting is completed, the imprinting efficiency is improved, and large-scale accurate mass production is realized.
Drawings
In order to more clearly illustrate the embodiments of the invention or the technical solutions in the prior art, the drawings that are required in the embodiments or the description of the prior art will be briefly described, it being obvious that the drawings in the following description are only some embodiments of the invention, and that other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic diagram of the structure of the present invention;
FIG. 2 is a schematic view of a connection structure between a supporting device and a substrate according to the present invention;
FIG. 3 is a schematic view of a structure of a supporting device for positioning a substrate in accordance with the present invention;
FIG. 4 is a top view of the table;
FIG. 5 is a bottom view of the suction cup;
FIG. 6 is a schematic diagram of the alignment structure of the second template and the substrate;
FIG. 7 is an enlarged view of a portion A of FIG. 1;
Fig. 8 is a process diagram of imprinting.
In the above figures: 1. a first alignment stage; 11. a first lateral movement portion; 12. a first vertically moving part a; 13. a first vertically moving part b; 2. a work table; 21. a first transparent plate; 22. a first vacuum tank; 23. a vacuum hole; 24. a first positioning groove; 3. a first template; 4. a second alignment stage; 41. a second lateral movement portion; 42. a second vertical moving part a; 43. a second vertically moving part b; 5. a suction cup; 51. a second transparent plate; 52. a second vacuum tank; 53. a vacuum hole; 54. a second positioning groove; 6. a second template; 7. a support device; 71. a support block; 72. a telescopic rod; 73. a clamping part; 731. a connecting block; 732. an arc-shaped guide rail; 733. clamping hands; 8. a substrate; 81. an alignment mark; 9. an alignment detection device; 91. a support arm; 92. a detection unit; 10. an ultraviolet lamp; 101. a housing.
Detailed Description
The present invention will be specifically described below by way of exemplary embodiments. It is to be understood that elements, structures, and features of one embodiment may be beneficially incorporated in other embodiments without further recitation. In the description of the present invention, it should be understood that the terms "center," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," and the like indicate orientations or positional relationships based on the orientation or positional relationships shown in the drawings, merely to facilitate describing the present invention and simplify the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present invention.
The terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include one or more such feature.
In the description of the present invention, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present invention will be understood in specific cases by those of ordinary skill in the art.
A double-sided nanoimprint apparatus, see fig. 1 to 7, comprising:
The first alignment platform 1 is arranged at the bottom in the shell 101 and comprises a first transverse moving part 11, a first vertical moving part a12 connected with the first transverse moving part 11 and a first vertical moving part b13, wherein the specific structural form of the first transverse moving part 11 can be a matching form of a guide rail and a sliding block, and can be seen as an electric cylinder, three sliding blocks are arranged in the embodiment, two first vertical moving parts a12 are arranged, one first vertical moving part b13 is arranged, each telescopic column is connected with the sliding block, and the telescopic column can be any structural form of an air cylinder, a hydraulic cylinder, an electric cylinder or a screw pair and the like;
A table 2 connected to the first vertical moving part a12, a first transparent plate 21 and a first vacuum groove 22 connected to a vacuum pump through an air pipe and a vacuum hole 23 are provided on the table 2, the vacuum hole 23 is provided in a groove of the first vacuum groove 22, the first vacuum groove 22 is located at an outer side of the first transparent plate 21 to fix the first mold plate 3 on an upper surface of the table 2 by generating negative pressure in the first vacuum groove 22, the first vacuum groove 22 is rectangular, and first positioning grooves 24 are provided at four right-angle outer sides of the first vacuum groove 22, respectively, to position the first mold plate 3;
The second alignment platform 4 is disposed on the top of the housing 101 above the workbench 2, and includes a second lateral moving part 41, a second vertical moving part a42 connected to the second lateral moving part 41, and a second vertical moving part b43, where the number and structure of the second lateral moving part 41, the second vertical moving part a42, and the second vertical moving part b43 are the same as those of the first lateral moving part 11, the first vertical moving part a12, and the first vertical moving part b 13;
a suction cup 5 connected to the second vertical moving part a42 and opposite to the table 2, a second transparent plate 51 provided on the suction cup 5, and a second vacuum groove 52 connected to a vacuum pump through an air pipe and a vacuum hole 53, the vacuum hole 53 being provided in a groove of the second vacuum groove 52, the second vacuum groove 52 being located outside the second transparent plate 51 to fix the second mold plate 6 to the lower surface of the suction cup 5 by generating negative pressure in the second vacuum groove 52, the second vacuum groove 52 being rectangular and a second positioning groove 54 being provided at four right-angle outsides of the second vacuum groove 52, respectively, to position the second mold plate 6;
The two supporting devices 7 are arranged between the workbench 2 and the sucker 5 in opposite mode, the supporting devices 7 comprise supporting blocks 71 connected with the inner side walls of the shell 101, and telescopic rods 72 connected with the supporting blocks 71, the two supporting devices 7 can stretch in opposite directions or back to back in the horizontal direction, rotatable clamping parts 73 are respectively arranged on the two supporting devices 7 and used for clamping the substrate 8 with the alignment marks 81, the clamping parts 73 are arranged on the telescopic rods 72, the clamping parts 73 comprise connecting blocks 731 connected with the telescopic rods 72, arc-shaped guide rails 732 connected with the connecting blocks 731, and clamping hands 733 connected with the arc-shaped guide rails 732 and provided with arc-shaped clamping ends, and the clamping hands 733 can move on the arc-shaped guide rails 732 through motor driving;
The alignment detection device 9 is arranged above the suction cup 5, is connected with the first vertical moving part b13, and is used for detecting alignment of the first template 3, the substrate 8 and the second template 6, and the alignment detection device 9 comprises a support arm 91 connected with the first vertical moving part b13 and a detection unit 92 connected with the support arm 91;
The device also comprises a controller, wherein the controller is a programmable controller, and the first alignment platform 1, the workbench 2, the second alignment platform 4, the sucker 5, the supporting device 7 and the alignment detection device 9 are all positioned in the shell 101.
The first template 3 is fixed on the workbench 2, the second template 6 is fixed on the sucker 5, the substrate 8 with the alignment mark 81 is fixed on the clamping part 73 on the supporting device 7, the relationship between the first template 3 and the second template 6 and the alignment mark 81 on the substrate 8 is detected through the alignment detection device 9, fine adjustment is performed through the first transverse moving part 11 and the second transverse moving part 41 controlled by the controller, the first template 3 and the second template 6 correspond to the alignment mark 81 on the substrate 8, the imprinting precision and the yield are improved, the workbench 2 and the sucker 5 are correspondingly driven to ascend and descend through the first vertical moving part a12 and the second vertical moving part a42, the imprinting glue on the first template 3 contacts the substrate 8 for imprinting, the second template 6 contacts the imprinting glue on the substrate 8 for imprinting, the double-sided imprinting is completed, the imprinting efficiency is improved, and the large-scale accurate mass production is realized.
The ultraviolet lamp 10 is located below the workbench 2 and connected with the second vertical moving part b43, and can emit ultraviolet light to irradiate the imprinting glue on the substrate 8 and the second template 6 through the first transparent plate 21 and the second transparent plate 51, so that the curing time of the imprinting glue is shortened and the efficiency is improved by curing the ultraviolet lamp 10.
Referring to fig. 1 and 8, the operation process includes the following steps:
s1: the devices return to the original position and are ready to begin imprinting.
S2: feeding material
1) Securing the substrate 8 to the support 7
The telescopic rod 72 drives the clamping hands 733 to move synchronously in opposite directions to a position slightly larger than the size of the substrate 8, the substrate 8 is placed between the clamping hands 733, the telescopic rod 72 continues to drive the clamping hands 733 to move synchronously in opposite directions, the clamping hands 733 are abutted against the edge of the substrate 8, and the substrate 8 is fixed between the workbench 2 and the sucker 5;
2) Fixing the first template 3 to the table 2
The imprinting structure on the first template 3 faces the sucker 5, four corners on the first template 3 correspond to the first positioning grooves 24, the nano structure of the first template 3 is positioned at the center of the workbench 2, the vacuum pump is turned on, and the first template 3 is fixed on the upper surface of the workbench 2 through negative pressure generated in the first vacuum groove 22;
3) Fixing the second template 6 on the suction cup 5
The imprinting structure on the second template 6 faces the workbench 2, four corners on the second template 6 correspond to the second positioning grooves 54, the nano structure of the second template 6 is positioned at the center of the sucker 5, a vacuum pump is turned on, and the second template 6 is fixed on the lower surface of the sucker 5 through negative pressure generated in the second vacuum groove 52;
S3: dispensing adhesive
The imprint resist is dropped at the center of the upper surface of the substrate 8 and the center of the upper surface of the first template 3, and the imprint resist dropped at the center of the substrate 8 and the first template 3 may be the same or different.
S4: alignment position
The clamping hand 733 can move on the arc-shaped guide rail 732 to enable the alignment mark 81 on the substrate 8 to reach a designated position, the driving workbench 2 and the sucker 5 corresponding to the first vertical moving part a12 and the second vertical moving part a42 are close to the substrate 8, the alignment detection device 9 is close to the sucker 5 under the driving of the first vertical moving part b13, the alignment mark 81 is observed through the second transparent plate 51 through the detection unit 92 and fed back to the controller, the controller controls the clamping hand 733 to adjust, the cross structure of the alignment mark 81 is parallel to the horizontal line, alignment information is fed back to the controller, the controller controls the first transverse moving part 11 and the second transverse moving part 41 to enable the right-angle sides on the first template 3 and the second template 6 to coincide with or be parallel to the cross sides on the substrate 8, and alignment actions are completed.
S5: embossing
The first vertical moving part a12 and the second vertical moving part a42 correspondingly drive the workbench 2 and the sucker 5 to move in opposite directions, so that the imprinting glue on the first template 3 is slowly contacted with the substrate 8, the glue slowly expands outwards from the center to fill the nano structure, the second template 6 is slowly contacted with the imprinting glue on the substrate 8, the glue slowly expands outwards from the center to fill the nano structure, and imprinting is completed;
S6: ultraviolet curing
The second vertical moving part b43 drives the ultraviolet lamp 10 to move upwards, the ultraviolet light emitted by the ultraviolet lamp 10 is close to the workbench 2, and the imprinting glue between the substrate 8 and the first template 3 and the imprinting glue between the substrate 8 and the second template 6 are solidified through the second transparent plate 51;
S7: separation
The first vertical moving part a12 and the second vertical moving part a42 correspondingly drive the workbench 2 and the sucker 5 to synchronously move oppositely, the substrate 8 is separated from the first template 3, the substrate 8 is separated from the second template 6, and the solidified colloid is adhered to the substrate 8, so that double-sided imprinting is completed.
The foregoing is merely illustrative of the present invention, and the present invention is not limited thereto, and any person skilled in the art will readily recognize that variations or substitutions are within the scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.
Claims (1)
1. A double-sided nanoimprint apparatus, comprising: the first alignment platform is arranged at the bottom and comprises a first transverse moving part, a first vertical moving part a connected with the first transverse moving part and a first vertical moving part b; a workbench connected with the first vertical moving part a, a first transparent plate and a first vacuum groove connected with a vacuum pump are arranged on the workbench, and the first vacuum groove is positioned outside the first transparent plate so as to fix a first template on the upper surface of the workbench by generating negative pressure in the first vacuum groove;
The first vacuum grooves are rectangular, and first positioning grooves are respectively formed in the outer sides of the four right angles of the first vacuum grooves so as to position the first templates;
The second alignment platform is arranged above the workbench and comprises a second transverse moving part, a second vertical moving part a connected with the second transverse moving part and a second vertical moving part b;
A suction cup connected with the second vertical moving part a and opposite to the workbench, a second transparent plate and a second vacuum groove connected with the vacuum pump are arranged on the suction cup, so that the second template is fixed on the lower surface of the suction cup by generating negative pressure in the second vacuum groove;
The second vacuum grooves are rectangular, and second positioning grooves are respectively formed in the outer sides of the four right angles of the second vacuum grooves so as to position the second templates;
The two supporting devices are arranged between the workbench and the sucker in opposite arrangement, can stretch in opposite directions or back to back in the horizontal direction, and are respectively provided with rotatable clamping parts for clamping the substrate with the alignment mark;
the supporting device comprises a supporting block and a telescopic rod connected with the supporting block, and the clamping part is arranged on the telescopic rod;
the clamping part comprises a connecting block connected with the telescopic rod, an arc-shaped guide rail connected with the connecting block, and a clamping hand connected with the arc-shaped guide rail and provided with an arc-shaped clamping end;
The alignment detection device is arranged above the sucker, connected with the first vertical moving part b and used for detecting the alignment of the first template, the substrate and the second template;
the alignment detection device comprises a support arm connected with the first vertical moving part b and a detection unit connected with the support arm;
The ultraviolet lamp is positioned below the workbench, is connected with the second vertical moving part b and can emit ultraviolet light so as to irradiate the substrate and the imprinting glue on the second template through the first transparent plate and the second transparent plate;
The controller is a programmable controller, a first template is fixed on a workbench, a second template is fixed on a sucker, a substrate with an alignment mark is fixed on a clamping part on a supporting device, the relationship between the first template and the second template and the alignment mark on the substrate is detected through an alignment detection device, the first transverse moving part and the second transverse moving part are controlled by the controller to be in transverse fine adjustment, the first template and the second template correspond to the alignment mark on the substrate, the workbench and the sucker are correspondingly driven to be lifted by a first vertical moving part a and a second vertical moving part a, so that the imprinting glue on the first template contacts and imprints the substrate, and meanwhile, the second template contacts and imprints the imprinting glue on the substrate to complete double-sided imprinting;
The working process comprises the following steps:
s1: resetting each device to the original position, and preparing to start imprinting;
S2: feeding material
Securing a substrate to a support
The telescopic rod drives the clamping hands to synchronously move in opposite directions to a position slightly larger than the size of the substrate, the substrate is placed between the clamping hands, the telescopic rod continuously drives the clamping hands to synchronously move in opposite directions, the clamping hands are abutted against the edges of the substrate, and the substrate is fixed between the workbench and the sucker;
2) Fixing the first template on the workbench
The method comprises the steps that an imprinting structure on a first template faces a sucker, four corners on the first template correspond to a first positioning groove, the nano structure of the first template is located at the center of a workbench, a vacuum pump is turned on, and the first template is fixed on the upper surface of the workbench through negative pressure generated in the first vacuum groove;
3) Fixing the second template on the sucker
The imprinting structure on the second template faces the workbench, four corners on the second template correspond to the second positioning grooves, the nano structure of the second template is positioned at the center of the sucker, the vacuum pump is turned on, and the second template is fixed on the lower surface of the sucker through negative pressure generated in the second vacuum groove;
S3: dispensing adhesive
Dropping imprinting glue at the center of the upper surface of the substrate and the center of the upper surface of the first template, wherein the imprinting glue dropped at the centers of the substrate and the first template can be the same or different;
S4: alignment position
The clamping hand can move on the arc-shaped guide rail to enable the alignment mark on the substrate to reach a designated position, the driving workbench and the sucker corresponding to the first vertical moving part a and the second vertical moving part a are close to the substrate, the alignment detection device is driven by the first vertical moving part b to be close to the sucker, the alignment mark is observed through the detection unit through the second transparent plate and feeds back signals to the controller, the controller controls the clamping hand to adjust, the cross structure of the alignment mark is parallel to a horizontal line, the right-angle edges on the first template and the second template correspond to the cross edges on the substrate, alignment information is fed back to the controller, the controller controls the first transverse moving part a and the second transverse moving part a to be finely adjusted, and the right-angle edges on the first template and the second template are overlapped or parallel to the cross edges on the substrate, so that alignment actions are completed;
S5: embossing
The first vertical moving part a and the second vertical moving part a correspondingly drive the workbench and the sucker to move in opposite directions, so that the imprinting glue on the first template is slowly contacted with the substrate, the colloid slowly expands outwards from the center to fill the nano structure, and meanwhile, the second template is slowly contacted with the imprinting glue on the substrate, the colloid slowly expands outwards from the center to fill the nano structure to finish imprinting;
S6: ultraviolet curing
The second vertical moving part b drives the ultraviolet lamp to move upwards, the ultraviolet lamp is close to the workbench, ultraviolet light emitted by the ultraviolet lamp penetrates through the second transparent plate, and the imprinting glue between the substrate and the first template and the imprinting glue between the substrate and the second template are solidified;
S7: separation
The first vertical moving part a and the second vertical moving part a correspondingly drive the workbench and the sucker to synchronously move in opposite directions, the substrate is separated from the first template, the substrate is separated from the second template, and the solidified colloid is adhered to the substrate to finish double-sided imprinting.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111316493.6A CN113985699B (en) | 2021-11-09 | 2021-11-09 | Double-sided nano imprinting equipment |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111316493.6A CN113985699B (en) | 2021-11-09 | 2021-11-09 | Double-sided nano imprinting equipment |
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| CN113985699A CN113985699A (en) | 2022-01-28 |
| CN113985699B true CN113985699B (en) | 2024-07-30 |
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Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111933342A (en) * | 2020-08-07 | 2020-11-13 | 安徽航天电缆集团有限公司 | Control cable with alarm function for ships |
| CN214151370U (en) * | 2021-02-18 | 2021-09-07 | 青岛天仁微纳科技有限责任公司 | Nano-imprinting equipment capable of automatically carrying out double-sided imprinting |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101289337B1 (en) * | 2007-08-29 | 2013-07-29 | 시게이트 테크놀로지 엘엘씨 | Imprint lithography systm for dual side imprinting |
| TW202241687A (en) * | 2017-05-25 | 2022-11-01 | 美商麥吉克利普公司 | Double-sided imprinting method |
| CN210498048U (en) * | 2019-08-05 | 2020-05-12 | 浙江凌宇机械股份有限公司 | Feeding device of punching machine |
| CN210803965U (en) * | 2019-12-19 | 2020-06-19 | 苏州天仁微纳智能科技有限公司 | Uniform nano-imprinting equipment |
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Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111933342A (en) * | 2020-08-07 | 2020-11-13 | 安徽航天电缆集团有限公司 | Control cable with alarm function for ships |
| CN214151370U (en) * | 2021-02-18 | 2021-09-07 | 青岛天仁微纳科技有限责任公司 | Nano-imprinting equipment capable of automatically carrying out double-sided imprinting |
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