CN113985511B - Color filter, preparation method thereof and display device - Google Patents

Color filter, preparation method thereof and display device Download PDF

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Publication number
CN113985511B
CN113985511B CN202111304395.0A CN202111304395A CN113985511B CN 113985511 B CN113985511 B CN 113985511B CN 202111304395 A CN202111304395 A CN 202111304395A CN 113985511 B CN113985511 B CN 113985511B
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China
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transparent substrate
metal nano
pore
metal
nano
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CN202111304395.0A
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CN113985511A (en
Inventor
林佑昇
文遥
陈坤霖
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Sun Yat Sen University
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Sun Yat Sen University
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G02B5/204—Filters in which spectral selection is performed by means of a conductive grid or array, e.g. frequency selective surfaces
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
    • G02F1/133509—Filters, e.g. light shielding masks
    • G02F1/133514—Colour filters
    • G02F1/133516—Methods for their manufacture, e.g. printing, electro-deposition or photolithography

Abstract

The application discloses a color filter, a preparation method thereof and display equipment, wherein the color filter comprises a transparent substrate and metal nano-pore structures arranged on the transparent substrate, wherein the metal nano-pore structures are periodically arranged to form a wire grid structure, and the metal nano-pore structures are nano-metal structures containing nano-pores. The preparation method comprises the following steps: preparing a first structure of a master template for nanoimprinting or a second structure of a master template for transfer printing; stamping a first structure on a transparent substrate by adopting nano stamping equipment, and evaporating metal and photoresist on the transparent substrate stamped with the first structure to form a color filter; or evaporating metal on the master template for transfer printing to form a metal nano-pore structure, and stripping the metal nano-pore structure from the master template for transfer printing and transferring the metal nano-pore structure onto a transparent substrate. The color filter in the embodiment of the application has high resolution, simple process and suitability for mass production, and can be widely applied to the technical field of display.

Description

Color filter, preparation method thereof and display device
Technical Field
The application relates to the technical field of display, in particular to a color filter, a preparation method thereof and display equipment.
Background
Color filters are important components of liquid crystal displays, and the performance requirements of liquid crystal displays on color filters generally include both high color purity and high contrast. The traditional color filter is realized by dispersing coating pigment and synthetic dye on a glass substrate, and can realize the display of colors such as red, green, blue and the like based on the selective absorption of the pigment to colored light. The conventional color filter is prepared by a pigment dispersion coating process, and is difficult to manufacture units with small size (micron level), has low resolution, and limits the application of the color filter in high PPI (Pixels Per Inch), such as devices of AR (Augmented Reality) or VR (Virtual Reality) and the like; in addition, the traditional color filter is not economical and environment-friendly to prepare and has complex process; the above problems have made pigment and dye-based color filters inadequate for the increasing demands of electronic devices.
Disclosure of Invention
Accordingly, an object of the embodiments of the present application is to provide a color filter, a manufacturing method thereof, and a display device, wherein the color filter has high resolution, simple process, and is suitable for mass production.
In a first aspect, an embodiment of the present application provides a color filter, including a transparent substrate and metal nano-pore structures disposed on the transparent substrate, where the metal nano-pore structures are periodically arranged to form a wire grid structure, and the metal nano-pore structures are nano-metal structures including nano-pores.
Optionally, the transparent substrate comprises a flexible transparent substrate.
Optionally, the material of the flexible transparent substrate includes any one of polydimethylsiloxane, polymethyl methacrylate, polyethylene terephthalate, polyimide, polycarbonate and hydrogel.
Optionally, the material of the metal nano-pore structure comprises any one of gold, silver, aluminum, copper, nickel, chromium and titanium.
In a second aspect, an embodiment of the present application provides a display device including the color filter described above.
In a third aspect, an embodiment of the present application provides a method for manufacturing a color filter, where the color filter includes a transparent substrate and a metal nanopore structure disposed on the transparent substrate, and the method includes the following steps:
preparing a master template for nanoimprinting or a master template for transfer printing, wherein the master template for nanoimprinting has a first structure, the master template for transfer printing has a second structure, the first structure and the metal nano-pore structure are complementary structures, and the second structure is identical to the metal nano-pore structure;
stamping the first structure on the transparent substrate by adopting nano stamping equipment, and evaporating metal and photoresist on the transparent substrate stamped with the first structure to form a color filter;
or evaporating metal on the master template for transfer printing to form the metal nano-pore structure, and stripping the metal nano-pore structure from the master template for transfer printing and transferring the metal nano-pore structure onto the transparent substrate.
Optionally, preparing a master template for nanoimprinting or a master template for transfer printing, specifically including:
selecting a hard base material as a base material for preparing a master template;
the first structure or the second structure is formed by photoetching through electron beam direct writing equipment.
The embodiment of the application has the following beneficial effects: the color filter comprises a transparent substrate and a metal nano-pore structure arranged on the transparent substrate; the metal nano-pore structure has the minimum size of submicron level, so that the metal nano-pore structure has extremely high resolution; in addition, the metal nano-pore structure is prepared by a master template or a master template for transfer printing through electron beam direct writing equipment, and the metal nano-pore structure is prepared by adopting the master template and adopting a nano-imprinting or transfer printing process, so that the color filter is prepared, the preparation process is simple, the cost is low, and the color filter is suitable for mass production in a large area.
Drawings
Fig. 1 is a schematic structural diagram of a color filter according to an embodiment of the present application;
FIG. 2 is a spectrum of color filters for RGB three primary colors according to an embodiment of the present application;
FIG. 3 is a graph showing spectral response of a color filter according to an embodiment of the present application at different stretching ratios;
FIG. 4 is a transmission spectrum diagram of a color filter corresponding to a substrate made of different materials according to an embodiment of the present application;
FIG. 5 is a schematic flow chart of steps of a method for manufacturing a color filter according to an embodiment of the present application;
fig. 6 is a schematic flow chart of steps of another method for manufacturing a color filter according to an embodiment of the present application.
Detailed Description
The application will now be described in further detail with reference to the drawings and to specific examples. The step numbers in the following embodiments are set for convenience of illustration only, and the order between the steps is not limited in any way, and the execution order of the steps in the embodiments may be adaptively adjusted according to the understanding of those skilled in the art.
As shown in fig. 1, an embodiment of the present application provides a color filter, including a transparent substrate 3 and metal nano-pore structures 1 disposed on the transparent substrate 3, where the metal nano-pore structures 1 are periodically arranged to form a wire grid structure, and the metal nano-pore structures 1 are nano-metal structures containing nano-pores 2.
It will be appreciated by those skilled in the art that the periodic metal nano-pore structures 1 and the gaps between the metal nano-pore structures 1 constitute a wire grid structure (row or column).
The working principle of the color filter is as follows: the principle that the electromagnetic response between the periodic metal nano-pore structure 1 and the medium transparent substrate 3 is color filtering is the surface plasmon interference of the periodic metal nano-pore structure 1; this can be understood as: the coupling process of converting an incident electromagnetic wave into a surface plasmon is excited by the coupling between the free surface charge of the metal nanopore structure 1 and the incident electromagnetic wave at the interface of the metal nanopore structure 1 and the dielectric transparent substrate 3.
It should be noted that the metal nano-pore structure in the color filter may be designed according to specific practical requirements, including but not limited to the metal nano-pore structure 1 in fig. 1.
Optionally, the material of the metal nano-pore structure comprises any one of gold, silver, aluminum, copper, nickel, chromium and titanium.
In particular, the metallic material of the metallic nanopore structure may provide free surface charge, thereby causing plasmonic interference to the surface of the periodic metallic nanopore structure, and electromagnetic response between the metallic nanopore structure and the dielectric transparent substrate.
It should be noted that the symmetrical nanostructure-based design in the embodiments of the present application has polarization insensitive characteristics, and can maintain consistent light output under incident light of various polarization angles.
Referring to fig. 2, fig. 2 is a transmittance spectrum diagram of a color filter, and as can be seen from fig. 2, the color filter has high transmittance for three colors of R (red), G (green), and B (blue), wherein the transmittance of the color filter for R and B is about 80%, and the transmittance of the stretchable color filter for G is about 60%. It can be seen that the stretchable color filter has high filtering characteristics for the three primary colors of GRB.
Optionally, the transparent substrate comprises a flexible transparent substrate.
In particular, in the process of applying the stretching force, the flexible transparent substrate has very small size of the metal nano hole structure, gaps exist among holes, and the wire grid part consists of periodic metal structures, so that the color filter can keep the shape well without being torn.
It should be noted that a stretchable effect is also achieved by using different metal nano-pore structures, including but not limited to the metal nano-pore structure in fig. 1.
The traditional color filter is difficult to realize flexible display, and the micro-nano structure color filter can maintain high-quality filtering characteristics under a certain stretching/bending ratio.
Referring to fig. 3, fig. 3 is a graph showing transmittance spectra of the stretchable color filter at different stretching ratios, and it can be seen from fig. 3 that when the stretching ratio is between 0% and 30%, the spectrum response is shifted, but the trend of the shift is relatively close, and the spectrum after the shift is still in the RGB color range. Therefore, under a certain stretching ratio, the output spectrum of the stretchable color filter only has small frequency shift, and high-quality color response can be still maintained.
Optionally, the material of the flexible transparent substrate includes any one of Polydimethylsiloxane (PDMS), polymethyl methacrylate (PMMA, polymethyl methacrylate), polyethylene terephthalate (polyethylene glycol terephthalate, PET), polyimide (PI), polycarbonate (PC), and hydrogel.
It should be noted that the flexible transparent substrate may be made of different materials, such as dielectric and semiconductor materials, and the materials of the flexible transparent substrate include, but are not limited to, polydimethylsiloxane, polymethyl methacrylate, polyethylene terephthalate, polyimide, polycarbonate, or hydrogel.
Referring to fig. 4, fig. 4 is a graph showing the transmittance spectrum of different flexible substrate materials, wherein the substrate materials include PDMS, PET (Polyethylene glycol terephthalate, polyethylene terephthalate), PI (Polyimide), PMMA (polymethyl methacrylate) and PC (Polycarbonate), and as can be seen from fig. 4, the transmittance spectrum of the color filter corresponding to the substrate of different materials has substantially the same trend, and has a certain offset.
The embodiment of the application has the following beneficial effects: the color filter in the embodiment of the application comprises a transparent substrate and a metal nano-pore structure arranged on the transparent substrate; the metal nano-pore structure can be in submicron size at minimum, so that the metal nano-pore structure has extremely high resolution.
The embodiment of the application also provides display equipment comprising the color filter.
Specifically, for example, the display device is a panel display, which is a color filter combined with an OLED (Organic Electroluminescence Display, organic electroluminescent device) display module and implemented using COE (Color Filter On Encapsulation) technology. The cog technology is to directly form a Color Filter (CF) including a Black Matrix (BM) and a Color Filter disposed along with the same layer on a packaging film layer or an alignment layer in a light emitting direction of an OLED device, and is used for aligning a top-emission display panel, that is, directly forming the Color Filter on the packaged OLED device by photolithography. The OLED panel has the advantages that the traditional polarizer technology is replaced, the reflectivity of the OLED panel is effectively reduced, the color purity is improved, the color gamut is increased, the thickness of the panel is reduced, and the brightness of a panel display is improved.
The embodiment of the application has the following beneficial effects: the color filter in the embodiment of the application comprises a transparent substrate and a metal nano-pore structure arranged on the transparent substrate; the metal nano-pore structure can be in submicron size at minimum, so that the metal nano-pore structure has extremely high resolution.
As shown in fig. 5, an embodiment of the present application provides a method for preparing a color filter, where the color filter includes a transparent substrate and a metal nano-pore structure disposed on the transparent substrate, and the method includes the following steps:
s100, preparing a master template for nanoimprint or a master template for transfer printing, wherein the master template for nanoimprint has a first structure, the master template for transfer printing has a second structure, the first structure and the metal nano pore structure are complementary structures, and the second structure is identical to the metal nano pore structure.
It should be noted that the master model plate material is a hard base material, which is convenient for embossing or transfer printing.
Those skilled in the art will appreciate that the specific dimensional parameters of the metal nanopore structure need to be determined according to the production process.
Specifically, as shown in fig. 6, in the embodiment of the present application, a silicon substrate is selected as a substrate of a master template, and the process for generating a color filter includes any one of nanoimprint and transfer; the nano-imprinting process firstly transfers the pattern of the first structure onto the substrate, and then metal evaporation and stripping are carried out according to the first structure on the substrate to form the color filter; the transfer printing process firstly carries out metal evaporation on the second structure to form a metal nano-pore structure, and then transfers the metal nano-pore structure onto the substrate.
Optionally, preparing a master template for nanoimprinting or a master template for transfer printing, specifically including:
s110, selecting a hard base material as a base material for preparing a master template;
s120, photoetching is carried out through electron beam direct-writing equipment to form a first structure or a second structure.
It will be appreciated by those skilled in the art that the first structure applies to the master template for nanoimprinting and the second structure applies to the master template for transfer printing.
And S200A, stamping the first structure on the transparent substrate by adopting nano stamping equipment, and evaporating metal and photoresist on the transparent substrate stamped with the first structure to form the color filter.
Specifically, if the nanoimprint technology is adopted, after the master template is prepared, transferring the pattern onto a flexible substrate, namely, imprinting a designed structure on the required flexible substrate by adopting nanoimprint equipment through an ultraviolet light curing means; then, operations such as metal vapor deposition, photoresist removal and the like are performed on the flexible substrate with the transferred structure, and the manufacturing of the color filter is completed.
S200B, or evaporating metal on the master template for transfer printing to form the metal nano-pore structure, and stripping the metal nano-pore structure from the master template for transfer printing and transferring the metal nano-pore structure onto the transparent substrate.
Specifically, if a direct transfer scheme is adopted, a metal structure is evaporated on a master template; and then, bonding the master template with the evaporated metal together by bonding with a flexible substrate or using a method of configuring the flexible substrate on the master template by using a solution, and stripping the metal from the master template and transferring the metal to the flexible substrate by using the difference of adhesion between the metal and the Si-based master template and between the metal and the flexible substrate so as to prepare the color filter.
The embodiment of the application has the following beneficial effects: the color filter comprises a transparent substrate and a metal nano-pore structure arranged on the transparent substrate; the metal nano-pore structure has the minimum size of submicron level, so that the metal nano-pore structure has extremely high resolution; in addition, the metal nano-pore structure is prepared by a master template or a master template for transfer printing through electron beam direct writing equipment, and the metal nano-pore structure is prepared by adopting the master template and adopting a nano-imprinting or transfer printing process, so that the color filter is prepared, the preparation process is simple, the cost is low, and the color filter is suitable for mass production in a large area.
While the preferred embodiment of the present application has been described in detail, the application is not limited to the embodiment, and various equivalent modifications and substitutions can be made by those skilled in the art without departing from the spirit of the application, and these equivalent modifications and substitutions are intended to be included in the scope of the present application as defined in the appended claims.

Claims (5)

1. A method for manufacturing a color filter, the color filter comprising a transparent substrate and metal nano-pore structures disposed on the transparent substrate, the metal nano-pore structures being periodically arranged to form a wire grid structure, the metal nano-pore structures being nano-metal structures comprising nano-pores, the metal nano-pore structures being composed of a plurality of discrete metal nano-pore units, each of the metal nano-pore units comprising a void therebetween and also comprising a wire grid structure, the method comprising:
preparing a master template for nanoimprinting or a master template for transfer printing, wherein the master template for nanoimprinting has a first structure, the master template for transfer printing has a second structure, and the first structure and the second structure are complementary structures with the metal nano-pore structure;
stamping the first structure on the transparent substrate by adopting nano stamping equipment, and evaporating metal and photoresist on the transparent substrate stamped with the first structure to form a color filter;
or evaporating metal on the master template for transfer printing to form the metal nano-pore structure, and stripping the metal nano-pore structure from the master template for transfer printing and transferring the metal nano-pore structure onto the transparent substrate.
2. The method of manufacturing according to claim 1, wherein the transparent substrate comprises a flexible transparent substrate.
3. The method according to claim 2, wherein the material of the flexible transparent substrate comprises any one of polydimethylsiloxane, polymethyl methacrylate, polyethylene terephthalate, polyimide, polycarbonate, and hydrogel.
4. The method of claim 1, wherein the material of the metal nano-pore structure comprises any one of gold, silver, aluminum, copper, nickel, chromium, and titanium.
5. The method according to claim 1, wherein preparing a master template for nanoimprinting or a master template for transfer printing, specifically comprises:
selecting a hard base material as a base material for preparing a master template;
the first structure or the second structure is formed by photoetching through electron beam direct writing equipment.
CN202111304395.0A 2021-11-05 2021-11-05 Color filter, preparation method thereof and display device Active CN113985511B (en)

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CN113985511B true CN113985511B (en) 2023-09-19

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Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014026785A (en) * 2012-07-25 2014-02-06 Japan Display Inc Organic el display device

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014026785A (en) * 2012-07-25 2014-02-06 Japan Display Inc Organic el display device

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