CN113976537A - Ultrasonic cleaning device capable of running stably - Google Patents

Abstract

The utility model provides an ultrasonic cleaning device of steady operation, wades ultrasonic cleaning device technical field, solves the technical insufficiency that supersonic generator can not the steady operation, and technical scheme includes: the cleaning machine comprises a cleaning machine main body, an ultrasonic or megasonic generator and an operation controller, wherein a spraying cavity is arranged in the cleaning machine main body, one end of the cleaning machine main body is connected with a drainage part, a liquid storage cavity and a drainage pipeline are arranged in the drainage part, and the liquid storage cavity is communicated with the spraying cavity through the drainage pipeline; the drainage part is provided with a photoelectric sensor which extends into the drainage part through an opening at the upper part of the liquid storage cavity. The invention has the beneficial effects that: the washing liquid that sprays intracavity high frequency oscillation is introduced the in-process of stock solution intracavity by drainage tube, can be restricted by the opening of drainage tube horn mouth column structure and its less pipe diameter relatively and successively form the damping hole and flow and the laminar flow efflux state for the liquid level of the washing liquid that gets into the stock solution intracavity is more stable, does benefit to the sensor and stabilizes the sensing liquid level condition, makes supersonic generator can be continuous, steady operation, and abluent effect is better.

Description

Ultrasonic cleaning device capable of running stably

Technical Field

The invention relates to the technical field of ultrasonic cleaning devices, in particular to an ultrasonic cleaning device capable of continuously and stably operating.

Background

The ultrasonic cleaning device used in the field of semiconductor production and manufacture utilizes an ultrasonic generator to send out a high-frequency alternating current signal with ultrasonic or megasonic frequency, the high-frequency alternating current signal is transmitted to an ultrasonic transducer through a radio frequency line, the high-frequency alternating current signal is converted into high-frequency mechanical vibration of a piezoelectric component by the ultrasonic transducer, the high-frequency vibration of the piezoelectric component of the ultrasonic transducer is utilized to drive semiconductor cleaning liquid pumped into an injection cavity of a cleaning machine main body to acutely vibrate, the pumping pressure of the semiconductor cleaning liquid and the driving force of the ultrasonic transducer are utilized to inject the cleaning liquid out from an injection port of the injection cavity at high speed, and therefore the surface of a semiconductor device is efficiently cleaned.

The existing ultrasonic cleaning device is generally provided with a photoelectric sensor for detecting the liquid level change condition of cleaning liquid in a spraying cavity on a cleaning machine main body in order to carry out automatic control, reduce power consumption and prevent dry burning, and the photoelectric sensor is connected with an operation controller for controlling the operation of an ultrasonic generator and used for reporting a detection signal of the liquid level in the spraying cavity to the photoelectric sensor. When the photoelectric sensor detects that sufficient cleaning liquid exists in the spraying cavity, the operation controller can automatically control the ultrasonic generator to continuously operate so as to continuously superpose the kinetic energy of high-frequency oscillation on the cleaning liquid continuously pumped into the spraying cavity. When the photoelectric sensor detects that the content of the cleaning liquid in the spraying cavity is less or no cleaning liquid exists, the operation controller automatically controls the ultrasonic generator to stop, so that the continuous operation of the ultrasonic transducer under the condition of lacking the cleaning liquid is avoided, and the damage caused by dry burning is prevented.

However, most of the photoelectric sensors installed on the existing ultrasonic cleaning devices have their sensing probes directly installed in the spray chamber, and the cleaning liquid in the spray chamber will oscillate at a high frequency after being energized by the ultrasonic transducer, so that the liquid level of the cleaning liquid will fluctuate up and down, which seriously interferes with the stability and accuracy of the photoelectric sensors in detecting the liquid level of the cleaning liquid.

In addition, if the ultrasonic generator runs in a discontinuous and discontinuous abnormal state in the actual cleaning process, the cleaning liquid pumped into the spraying cavity in the shutdown period of the ultrasonic generator cannot be added with kinetic energy of high-frequency oscillation in time, so that the stability of the high-energy cleaning liquid flow sprayed by the cleaning machine main body is influenced, the sprayed cleaning liquid flow cannot be guaranteed to clean the surface of the semiconductor device at the same spray velocity and kinetic energy, the cleaning effect of the ultrasonic cleaning device is seriously reduced, and the purpose of cleaning the surface of the semiconductor device cannot be realized.

Accordingly, there is a need for improvements in existing ultrasonic cleaning devices to overcome the above-mentioned problems.

Disclosure of Invention

In summary, the present invention aims to solve the technical deficiencies that the design of the existing ultrasonic cleaning device is unreasonable, the liquid level of the cleaning liquid oscillating at high frequency in the injection cavity interferes with the accurate detection of the photoelectric sensor, which further causes the fault or damage of the ultrasonic generator and the poor cleaning effect, and provides an ultrasonic cleaning device capable of accurately detecting the liquid level change of the cleaning liquid to realize continuous and stable operation in the using process.

In order to solve the technical defects provided by the invention, the technical scheme is as follows:

an ultrasonic cleaning device capable of stably running comprises a cleaning machine main body, an ultrasonic or megasonic generator and a running controller, wherein the running controller is electrically connected with the ultrasonic or megasonic generator to control the running of the ultrasonic or megasonic generator; the cleaning machine is characterized in that a spraying cavity used for pumping and spraying cleaning liquid is arranged in the cleaning machine body, and an energy converter electrically connected with an ultrasonic wave or megasonic generator is arranged on the spraying cavity and used for driving the cleaning liquid pumped into the spraying cavity to vibrate and spray out through a spraying opening of the spraying cavity; the cleaning machine is characterized in that one end of the cleaning machine main body is connected with a drainage part, a liquid storage cavity with an opening at the upper part is vertically arranged in the drainage part, a drainage pipeline communicated with the lower part of the liquid storage cavity is longitudinally arranged, and the drainage pipeline is correspondingly positioned at the outer side of the end part of the spraying cavity and communicated with the spraying cavity; the pipe diameter of the drainage pipeline is smaller than the inner diameter of the cavity of the liquid storage cavity, and the opening at one end of the drainage pipeline, which is communicated with the injection cavity, is of a bell mouth-shaped structure folded inwards and is used for smoothly draining the cleaning liquid in the injection cavity in an oscillation state into the liquid storage cavity; the vertical photoelectric sensor who is connected with one and operation controller electric connection on the drainage portion, photoelectric sensor's inductive probe one end stretches into through the opening on stock solution chamber upper portion for the liquid level change condition of sensing stock solution intracavity washing liquid sends the liquid level sensing signal to operation controller.

Furthermore, the upper end face of the drainage part is fixedly connected with an end cover part for plugging an opening at the upper part of the drainage part in a threaded manner, a fixed screw hole for fixedly plugging the photoelectric sensor is formed in the middle of the end cover part, and a soft rubber sealing ring at the periphery of the fixed screw hole is hermetically clamped between the end faces of the end cover part and the drainage part in a butting manner.

Furthermore, the bottom of the liquid storage cavity is provided with a tapered groove which is sunken downwards, and an opening of the drainage pipeline communicated with the liquid storage cavity is positioned at the joint of the tapered groove and the side wall of the liquid storage cavity.

Furthermore, the drainage part is of an L-shaped structure, one longitudinal end of the drainage part is fixedly connected to the cleaning machine main body through threads, the liquid storage cavity is arranged in the vertical end part of the liquid storage cavity, and the drainage pipeline is arranged in the longitudinal end part of the drainage pipeline.

Furthermore, the spraying cavity is longitudinally arranged along the length direction of the cleaning machine main body and is of a V-shaped strip cavity structure with a wide upper part and a narrow lower part, a liquid inlet for pumping cleaning liquid is longitudinally formed in the upper part of one side wall of the spraying cavity, a transduction port is longitudinally formed in the relatively wide upper part of the spraying cavity, the spraying port is longitudinally formed in the relatively narrow lower part of the spraying cavity, and the transducer is longitudinally covered on the transduction port in a sealing mode.

Furthermore, the spraying cavity is provided with an outward-expanding overflow cavity at one end corresponding to the drainage part, the transverse section width of the overflow cavity is larger than that of the V-shaped strip cavity structure of the spraying cavity, one end of the overflow cavity is communicated with the spraying cavity, and the other end of the overflow cavity is communicated with the drainage pipeline.

Furthermore, the injection port is longitudinally arranged on the lower end surface of the cleaning machine main body.

The invention has the beneficial effects that:

one end of an induction probe of the photoelectric sensor is not directly arranged in a spray cavity of a cleaning machine main body, but is arranged in a liquid storage cavity of a drainage part at one end of the cleaning machine main body, and cleaning liquid oscillating at high frequency in the spray cavity is introduced into the liquid storage cavity through a drainage pipeline. Then, the cleaning liquid enters the liquid storage cavity with the large cavity inner diameter from the drainage pipeline with the small pipe diameter in a laminar flow jet state, the transverse flow rate of the cleaning liquid is small at the moment, and the liquid level of the cleaning liquid can be kept in a relatively stable state, so that a photoelectric sensor can continuously, stably and accurately detect the change condition of the liquid level of the cleaning liquid in the liquid storage cavity, the operation of the ultrasonic generator can be continuously and stably controlled by an operation controller according to the real liquid level condition of the cleaning liquid in the use process of the device, the problem of intermittent repeated startup and shutdown of the ultrasonic generator caused by the fluctuation of the liquid level of the cleaning liquid in the liquid storage cavity in the operation process of the existing device is solved, the fault rate of the ultrasonic generator is favorably reduced, and the damage of the ultrasonic generator is prevented.

Moreover, the operation controller can accurately and instantly know the condition that the cleaning liquid is absent or not present in the spraying cavity through the photoelectric sensor, and timely control the ultrasonic generator to stop so as to prevent the transducer from being burnt, effectively protect the transducer, prolong the service life of the transducer and be beneficial to reducing the power consumption of the invention.

In addition, the liquid level stability of the cleaning liquid in the liquid storage cavity is high, and the cleaning liquid can be continuously, stably and accurately sensed by the photoelectric sensor, so that the operation controller can control the ultrasonic generator and the transducer to continuously and stably operate according to the received continuous, stable and accurate liquid level sensing signals, the stability and the continuity of the flow speed and the kinetic energy of the cleaning liquid flow sprayed by the cleaning machine main body in the cleaning process are ensured, and the cleaning effect is better.

Drawings

FIG. 1 is a schematic view of the overall structure of the apparatus of the present invention;

FIG. 2 is a schematic bottom view of the main body of the cleaning machine of the present invention;

FIG. 3 is a schematic longitudinal sectional view of the main body of the cleaning machine of the present invention;

FIG. 4 is a partially enlarged view showing the structure of a longitudinal section of the cleaning machine body according to the present invention;

FIG. 5 is a schematic view of a transverse cross-section of the main body of the cleaning machine of the present invention;

FIG. 6 is an exploded view of the main body of the cleaning machine of the present invention.

In the figure: 1. the cleaning machine comprises a cleaning machine main body, 101, a second fixing screw hole, 2, a megasonic generator, 3, an injection cavity, 31, an injection hole, 32, a liquid inlet, 4, a radio frequency line, 5, a transducer, 51, a resonance sheet, 52, a piezoelectric ceramic sheet, 53, a Teflon sealing ring, 6, a drainage part, 61, a liquid storage cavity, 611, a conical groove, 62, a drainage pipeline, 63, an end cover part, 631, a first fixing screw hole, 64, a soft rubber sealing ring, 65, a connecting screw tube, 7, a photoelectric sensor, 8, an energy conversion cavity, 81, a pressing mechanism, 9, a liquid distribution cavity, 10, a liquid injection pipeline, 11, an overflow cavity, 12, a sealing cover, 13, a cable plug and 14, and a quick-release connector of the liquid injection pipe.

Detailed Description

The structure of the present invention will be further described with reference to the accompanying drawings and preferred embodiments of the present invention.

Referring to fig. 1 to 2, the present invention:

an ultrasonic cleaning device capable of running stably comprises a cleaning machine main body 1, a megasonic generator 2 and a running controller (not shown in the figure), wherein the running controller is preferably arranged inside a casing of the megasonic generator 2, is electrically connected with a main control module of the megasonic generator 2 and is used for controlling the running of the megasonic generator 2.

Specifically, referring to fig. 3 to 5, the cleaning machine main body 1 is a rectangular parallelepiped structure, the interior of the cleaning machine main body is longitudinally provided with an injection cavity 3 for pumping and spraying out the cleaning liquid along the length direction, the upper part of the injection cavity 3 is provided with a transducer 5 electrically connected with the output end of the megasonic generator 2 through a plurality of radio frequency lines 4 (as shown in fig. 1), and the transducer is used for driving the cleaning liquid pumped into the injection cavity 3 to vibrate at high frequency and to be sprayed out at high speed through an injection port 31 which is arranged at the lower part of the injection cavity 3 and is longitudinally positioned at the lower part of the cleaning machine main body 1.

Specifically, as shown in fig. 3 and 4, the drainage portion 6 of an L-shaped structure is fixedly connected to the lower portion of the left end face of the cleaning machine body 1 through threads, a liquid storage cavity 61 with an upper opening is vertically arranged inside the vertical end of the drainage portion 6 of the L-shaped structure, a drainage pipeline 62 which is communicated with the lower portion of the liquid storage cavity 61 and correspondingly located on the outer side of the left end of the spray cavity 3 is longitudinally arranged inside the horizontal end of the drainage portion 6 of the L-shaped structure, and the liquid storage cavity 61 is communicated with the spray cavity 3 through the drainage pipeline 62.

Specifically, the pipe diameter of drainage pipe 62 is less than the cavity internal diameter of stock solution chamber 61, and drainage pipe 62 is the horn mouth column structure that draws in inwards with the one end opening that sprays chamber 3 intercommunication for the washing liquid that is the oscillation state in spraying chamber 3 smoothly drains stock solution chamber 61 in.

Specifically, vertical screw thread fixedly connected with one on drainage portion 6 and operation controller electric connection's photoelectric sensor 7, this photoelectric sensor 7's inductive probe one end stretches into through the opening on stock solution chamber 61 upper portion for the liquid level change condition of the washing liquid in the sensing stock solution chamber 61 sends liquid level sensing signal to operation controller.

In actual use, a semiconductor cleaning liquid, preferably ID water, is first pumped into the spray chamber 3 of the cleaning machine body 1 at a pressure of 0.35 MPa. And then the megasonic generator 2 is started, the running controller controls the running of the megasonic generator to generate high-frequency alternating current reaching the megasonic frequency, the generated high-frequency alternating current is transmitted to the energy converter 5 at the upper part of the spraying cavity 3 from the output end of the megasonic generator 2 through the radio frequency wire 4, and then the high-frequency alternating electric energy is converted into mechanical energy by utilizing the electrical and physical characteristics of the energy converter 5 so as to drive the cleaning liquid pumped into the spraying cavity 3 to vibrate violently. After the oscillation kinetic energy of megasonic frequency is superposed, the cleaning liquid is sprayed out from the jet orifice 31 below the cleaning machine main body 1 at a high jet speed and high kinetic energy under the action of pumping pressure, gravity and driving force of the transducer 5 to form high-energy cleaning liquid flow, so that pollutants on the surface of the semiconductor device are thoroughly removed.

In the in-service use process, in the washing liquid that the interior high frequency of jet cavity 3 was vibrate partly can enter into the stock solution chamber 61 of drainage portion 6 from the left end of jet cavity 3 via drainage tube 62, it is more stable to enter into its liquid level of the washing liquid in stock solution chamber 61, the stable and continuous its liquid level state change of detection of photoelectric sensor 7 that sets up on the drainage portion 6 of being convenient for, guaranteed the accuracy, stability and the continuity of the liquid level detection signal that photoelectric sensor 7 sent to the operation controller.

After the technical scheme is adopted, the invention has the following beneficial effects.

One end of an induction probe of the photoelectric sensor 7 is not directly arranged in the spray cavity 3 of the cleaning machine main body 1, but is arranged in the liquid storage cavity 61 of the drainage part 6 at one end of the cleaning machine main body 1, and the cleaning liquid with high frequency oscillation in the spray cavity 3 is introduced into the liquid storage cavity 61 through the drainage pipeline 62, because the pipe diameter of the drainage pipeline 62 is smaller than the inner diameter of the cavity of the liquid storage cavity 61, and the end of the drainage pipeline communicated with the spray cavity 3 is of a bell mouth-shaped structure folded inwards, a damping hole outflow structure is formed between the drainage pipeline 62 and the spray cavity 3, and the cleaning liquid with high frequency oscillation in the spray cavity 3 can be limited by the folded bell mouth-shaped structure to reduce the flow and oscillation frequency of the cleaning liquid, so that the cleaning liquid can flow into the drainage pipeline 62 relatively stably in a laminar flow state. Then, the cleaning liquid enters the liquid storage cavity 61 with the large cavity inner diameter from the drainage pipeline 62 with the small pipe diameter in a laminar flow jet state, the transverse flow rate of the cleaning liquid is small at the moment, and the liquid level of the cleaning liquid can be kept in a relatively stable state, so that the photoelectric sensor 7 can continuously, stably and accurately detect the change condition of the liquid level of the cleaning liquid in the liquid storage cavity 61, the operation of the ultrasonic generator can be continuously and stably controlled by the operation controller according to the real liquid level condition of the cleaning liquid in the use process of the ultrasonic generator, the problem of intermittent repeated startup and shutdown of the ultrasonic generator caused by the fluctuation of the liquid level of the cleaning liquid in the liquid storage cavity 61 in the operation process of the conventional device is solved, the fault rate of the ultrasonic generator is favorably reduced, and the ultrasonic generator is prevented from being damaged.

Moreover, the operation controller can accurately and instantly know the condition that the cleaning liquid is absent or not present in the spraying cavity 3 through the photoelectric sensor 7, and timely control the ultrasonic generator to stop so as to prevent the transducer 5 from being burnt, thereby effectively protecting the transducer 5, prolonging the service life of the transducer and being beneficial to reducing the power consumption of the invention.

In addition, the liquid level stability of the cleaning liquid in the liquid storage cavity 61 is high, and the cleaning liquid can be continuously, stably and accurately sensed by the photoelectric sensor 7, so that the operation controller can control the ultrasonic generator and the transducer 5 to continuously and stably operate according to the received continuous, stable and accurate liquid level sensing signals, the stability and the continuity of the flow speed and the kinetic energy of the cleaning liquid flow sprayed out of the cleaning machine main body 1 in the cleaning process are ensured, and the cleaning effect is better.

As a further improvement of the technical means for solving the technical problems of the present invention, the following technical means are included.

Further, as shown in fig. 4 and fig. 6, an end cap 63 for sealing the upper opening of the drainage portion 6 is fixedly connected to the upper end surface of the drainage portion 6 by a screw, the outer dimension of the end cap 63 matches with the outer dimension of the drainage portion 6, a first fixing screw hole 631 for fixedly connecting the photoelectric sensor 7 with a screw thread is penetratingly formed at the middle position of the end cap, and the first fixing screw hole 631 faces the upper opening of the liquid storage cavity 61. A soft rubber sealing ring 64 positioned at the periphery of the first fixing screw hole 631 is also clamped between the end surfaces of the end cover part 63 abutting against the drainage part 6 in a sealing manner.

During actual assembly, the photoelectric sensor 7 is fixedly connected in the first fixing screw hole 631 in a downward thread sealing manner, so that one end of the sensing probe of the photoelectric sensor extends downward through the first fixing screw hole 631. Then, the end cover part 63 is fixedly connected to the upper end face of the drainage part 6 through a screw in a threaded manner so as to clamp and fix the soft rubber sealing ring 64, and one end of the sensing probe of the photoelectric sensor 7 extends into the liquid storage cavity 61.

The photoelectric sensor 7 is fixedly connected to the drainage part 6 in a sealing way through the end cover part 63, so that the installation and the disassembly are more convenient, the fixing screw holes arranged on the end cover part 63 are beneficial to adjusting the position of the sensing probe of the photoelectric sensor 7, the photoelectric sensor 7 can be conveniently screwed in or screwed out according to actual conditions, and the accuracy and the reliability of the detection are ensured. In addition, a soft rubber sealing ring 64 is hermetically clamped between the end cover part 63 and the drainage part 6, so that the sealing effect is good.

Specifically, referring to fig. 4 and 6, the drainage portion 6 of the present invention has a connection screw tube 65 with an external thread at one end extending horizontally and longitudinally, and a section of the drainage tube 62 is located in the connection screw tube 65. Matched with, set up the fixed screw 101 of second with spraying chamber 3 left end intercommunication on the left side terminal surface lower part position of cleaning machine main part 1, during the actual assembly connecting solenoid 65 screw thread fixed connection on drainage portion 6 is in the fixed screw 101 of second in to realize being connected between drainage portion 6 and cleaning machine main part 1 and will spray chamber 3 and stock solution chamber 61 intercommunication.

The drainage part 6 of the invention is fixedly assembled on the cleaning machine main body 1 through the connecting screw tube 65 and the second fixing screw hole 101, and has simple structure, convenient assembly and disassembly and high connection reliability.

Further, referring to fig. 4, the bottom of the reservoir 61 of the drainage part 6 of the present invention is provided with a tapered groove 611 recessed downward, the tapered groove 611 is coaxial with the reservoir 61, and the opening of the drainage pipe 62 communicating with the reservoir 61 is located at the connection position of the tapered groove 611 and the sidewall of the reservoir 61.

The tapered groove 611 arranged at the bottom of the liquid storage cavity 61 can further reduce the flow rate and the oscillation amplitude of the cleaning liquid flowing into the liquid storage cavity 61 from the drainage pipeline 62, further ensure the stability of the liquid level of the cleaning liquid in the liquid storage cavity 61, and further improve the precision, the stability and the continuity of the liquid level detection of the photoelectric sensor 7.

Further, referring to fig. 1, the washer body 1 of the present invention has a rectangular parallelepiped structure, and the spray chamber 3 is longitudinally provided at the front side of the inside thereof in the length direction thereof.

Specifically, referring to fig. 3 to 5, the spray cavity 3 is a V-shaped strip cavity structure with a wide top and a narrow bottom, a liquid inlet 32 for pumping the cleaning liquid into the cavity is longitudinally formed at a position on the upper portion of the rear sidewall close to the transducer 5, a transducer port (not shown) for driving the cleaning liquid to oscillate is longitudinally formed at a relatively wide top, the spray port 31 is longitudinally formed at a relatively narrow bottom, and the spray port 31 is opposite to the transducer port so that the cleaning liquid driven to oscillate by the transducer 5 can be sprayed at a high speed and high energy downwards through the spray port 31.

Specifically, as shown in fig. 5 to 6, a transduction cavity 8 is longitudinally arranged in the cleaning machine body 1, and is correspondingly located at the upper part of the jetting cavity 3 and communicated with the jetting cavity 3 through the transduction port, and the transducer 5 is fixedly connected to the bottom of the transduction cavity 8 through a pressing mechanism 81 and hermetically covers the transduction port.

Further, referring to fig. 5 to 6, the transducer 5 includes a resonant plate 51 hermetically covered on the transducer port, four piezoelectric ceramic plates 52 having a rectangular structure are longitudinally arranged on the upper surface of the resonant plate 51, and the four piezoelectric ceramic plates 52 are electrically connected to the output end of the megasonic generator 2 through a radio frequency line 4.

During actual assembly, one end of the radio frequency wire 4 electrically connected with the piezoelectric ceramic piece 52 is longitudinally arranged in the energy conversion cavity 8 and fixed, so that the radio frequency wire 4 is prevented from being disconnected and separated from the piezoelectric ceramic piece 52 when the radio frequency wire 4 is pulled by external force to expose out of the cleaning machine main body 1, and the connection reliability between the radio frequency wire 4 and the piezoelectric ceramic piece 52 is ensured.

Preferably, the resonator plate 51 is made of a titanium alloy material, so that the resonator plate 51 has high structural strength and rigidity and can effectively transfer the mechanical energy of the piezoelectric ceramic plate 52. And the titanium alloy material is acid and alkali resistant and corrosion resistant, has good water and electricity isolation effect, is used for plugging the energy conversion port, ensures the service life of the energy converter 5, and has higher reliability.

In practical use, the piezoelectric ceramic plate 52 receives the high-frequency alternating current generated by the megasonic generator 2 through the radio frequency line 4, converts the high-frequency alternating electric energy into mechanical energy by utilizing the electrical characteristics and physical characteristics of the piezoelectric ceramic plate to drive the resonant plate 51 to vibrate at the same frequency and high speed, and drives the cleaning liquid pumped in the injection cavity 3 to vibrate at high frequency through the vibration of the resonant plate 51 to energize the cleaning liquid.

Specifically, referring to fig. 5 to 6, the width of the piezoelectric ceramic piece 52 is smaller than the width of the resonant piece 51, a teflon sealing ring 53 located at the periphery of the transduction port is disposed between the bottom edge of the resonant piece 51 and the bottom surface of the transduction cavity 8, and during actual assembly, the pressing mechanism 81 is fixedly connected in the transduction cavity 8 by downward locking through a fastening member to tightly press the resonant piece 51 against the transduction port, and at the same time, the piezoelectric ceramic piece 52 is fixed and fastened to the resonant piece 51 in a limited manner. The pressing mechanism 81 fixes the edge portion of the bottom surface of the rear resonant plate 51 against the teflon sealing ring 53, so that the transduction cavity 8 is sealed and isolated from the ejection cavity 3 by the resonant plate 51 and the teflon sealing ring 53.

The piezoelectric transducer adopts the piezoelectric ceramic piece 52 as a piezoelectric component to convert electric energy and mechanical energy, has high sensitivity, good frequency stability, wide application range, small volume, no moisture absorption, strong anti-interference capability and long service life, and ensures the stability and the reliability of the transducer 5.

Meanwhile, the transduction cavity 8 and the injection cavity 3 are sealed and isolated through a Teflon sealing ring 53 and a resonance sheet 51 made of a titanium alloy material, the Teflon material has poor absorption capacity to sound waves, the loss of mechanical energy of the transducer 5 is effectively reduced, the vibration efficiency of the transducer 5 for driving cleaning liquid to vibrate is favorably improved, the titanium alloy material is high in strength, good in rigidity, good in chemical stability, corrosion-resistant and wear-resistant, the efficiency and the reliability of mechanical energy transmission of the resonance sheet 51 are guaranteed, high tolerance is realized on substances with chemical corrosivity in the cleaning liquid, and the reliability and the service life of the transducer 5 are improved.

Further, as shown in fig. 5, a liquid distribution chamber 9 which is correspondingly positioned at the upper part of the rear side of the injection chamber 3 and is communicated with the injection chamber 3 through the liquid inlet 32 is also longitudinally arranged in the cleaning machine main body 1, the liquid distribution chamber 9 is of an approximately inverted V-shaped strip-shaped cavity structure with a wide rear side and a narrow front side, four liquid injection pipelines 10 which are vertically arranged on the cleaning machine main body 1 are longitudinally arranged and communicated at the upper part of the cavity with a wide rear side of the liquid distribution chamber 9, and semiconductor cleaning liquid is pumped into the liquid distribution chamber 9 through the four liquid injection pipelines 10 in actual use. The front side of the liquid distribution cavity 9 has an arc-shaped upward-throwing structure at the end where the cavity is gradually tightened and narrowed, and the front side of the liquid distribution cavity and the opening communicated with the injection cavity 3 form the liquid inlet 32.

In practical use, the cavity structure of the liquid distribution cavity 9 can uniformly disperse the cleaning liquid pumped by four points downwards at the same time, the cleaning liquid is introduced into the cavity with the front side in an arc-shaped upward-throwing structure at a high speed, and then the cleaning liquid is thrown to the bottom of the transducer 5 on the transducer port through the liquid inlet 32 by utilizing the arc-shaped upward-throwing structure, so that the transducer 5 drives the cleaning liquid to oscillate at a high frequency.

The jet cavity 3 of the invention is designed into a V-shaped strip cavity structure with a wide upper part and a narrow lower part, the transducer 5 is hermetically covered on a transducer port at the upper part, when in practical use, cleaning liquid pumped into the transducer port at a high speed through the liquid inlet 32 is driven by the piezoelectric ceramic piece 52 and the resonator piece 51 of the transducer 5 to be energized and violently vibrate, and the cleaning liquid is pumped downwards to the lower part of the jet cavity 3 which is gradually narrowed under the action of the pumping pressure of the cleaning liquid, the driving force of the transducer 5 and gravity, so that the cleaning liquid is guided to be jetted out of the cleaning machine main body 1 from the jet port 31 in a high-frequency vibrating state by utilizing the cavity structure design of the jet cavity 3, thereby forming high-speed and high-energy cleaning liquid flow and having good cleaning effect.

Further, referring to fig. 4 and 6, the left end of the injection cavity 3 of the cleaning machine main body 1 corresponding to the drainage part 6 is further provided with an outward-expanding overflow cavity 11, the overflow cavity 11 is in a cylindrical cavity structure, the transverse section width of the overflow cavity 11 is larger than that of a 3V-shaped strip cavity structure of the injection cavity, the right end of the overflow cavity 11 is communicated with the injection cavity 3, and the left end is communicated with a second fixing screw hole 101 arranged on the cleaning machine main body 1, so that the overflow cavity 11 is communicated with the liquid storage cavity 61 through a drainage pipeline 62.

According to the cleaning machine, the transverse cross section width of the cavity of the overflow cavity 11 arranged in the cleaning machine main body 1 is larger than the transverse cross section width of the injection cavity 3, and compared with the end part of the injection cavity 3, the end part of the overflow cavity is in an outward-expanding structure, so that cleaning liquid in the injection cavity 3 can flow into the overflow cavity 11 in a jet flow state, the transverse flow rate and the longitudinal flow rate of the cleaning liquid are smaller and faster in the jet flow state, the cleaning liquid can easily form a rotational flow or a mixed turbulent flow after entering the overflow cavity 11 in the outward-expanding structure, oscillation generated in the partial directions of the cleaning liquid can be restricted and counteracted mutually, the oscillation frequency of the cleaning liquid is favorably reduced, the drainage pipeline 62 is favorably used for further buffering the cleaning liquid entering through the overflow cavity 11, the oscillation degree of the cleaning liquid is further reduced, and the liquid level of the cleaning liquid flowing into the liquid storage cavity 61 is more stable.

Specifically, referring to fig. 1 and 6, a sealing cover 12 for sealing an opening at the upper part of the transduction cavity 8 is fixedly connected to the front side of the upper end of the main body 1 of the cleaning machine by screw threads, four cable plugs 13 respectively corresponding to the four piezoelectric ceramic plates 52 are longitudinally arranged on the sealing cover 12, and the front ends of the four radio frequency wires 4 respectively extend into the transduction cavity 8 from the four cable plugs 13 and are locked and fixed by the cable plugs 13 during actual assembly.

The energy conversion cavity 8 is isolated from the air outside the cleaning machine main body 1 through the sealing cover 12, so that the effects of isolating the air and protecting the energy converter 5 are achieved, the corrosion and the oxidation of the external atmosphere to the energy converter 5 are favorably avoided or slowed down, the reliability of the energy converter 5 is favorably improved, and the service life of the energy converter is favorably prolonged. In addition, the cable connector 13 can effectively lock and fix the end of the radio frequency wire 4, so that the radio frequency wire 4 is prevented from being disconnected and separated from the piezoelectric ceramic piece 52 when being pulled by external force, and the reliability is higher.

Specifically, as shown in fig. 1, 5 and 6, four quick-release joints 14 for the filler pipe screwed to the upper openings of the four filler pipes 10 are provided at the rear side of the upper end surface of the washer body 1. In actual use, a cleaning liquid pumping device (not shown in the figure) is connected to the four liquid injection pipelines 10 through four liquid injection pipes (not shown in the figure) and is used for pumping the cleaning liquid into the liquid distribution chamber 9.

The above examples are merely for the purpose of clarifying a specific embodiment of the present invention and are not intended to limit the scope of the present invention. It is obvious to those skilled in the art that other adjustments or modifications to the cleaning machine body 1, megasonic generator 2, operation controller, spray chamber 3, transducer 5, drain 6, reservoir 61, drain conduit 62, photoelectric sensor 7, etc. can be deduced according to the present invention, or other methods of use that are deduced based on the present invention are not listed here. Any modification, replacement or improvement made within the spirit and principle of the present invention should be included in the scope of the claims of the present invention.

Claims (7)

1. An ultrasonic cleaning device capable of stably running comprises a cleaning machine main body (1), an ultrasonic or megasonic generator and a running controller, wherein the running controller is electrically connected with the ultrasonic or megasonic generator to control the running of the ultrasonic or megasonic generator; the cleaning machine is characterized in that a spraying cavity (3) used for pumping and spraying cleaning liquid is arranged in the cleaning machine main body (1), and an energy converter (5) electrically connected with an ultrasonic or megasonic generator is arranged on the spraying cavity (3) and used for driving the cleaning liquid pumped into the spraying cavity (3) to vibrate and spray the cleaning liquid through a spraying opening (31) of the spraying cavity (3); the cleaning machine is characterized in that one end of the cleaning machine main body (1) is connected with a drainage part (6), a liquid storage cavity (61) with an opening at the upper part is vertically arranged in the drainage part (6), a drainage pipeline (62) communicated with the lower part of the liquid storage cavity (61) is longitudinally arranged, and the drainage pipeline (62) is correspondingly positioned at the outer side of the end part of the spraying cavity (3) and communicated with the outer side; the pipe diameter of the drainage pipeline (62) is smaller than the inner diameter of the cavity of the liquid storage cavity (61), and an opening at one end communicated with the spraying cavity (3) is of a bell-mouth-shaped structure which is folded inwards and used for smoothly draining the cleaning liquid in the spraying cavity (3) in a vibration state into the liquid storage cavity (61); the vertical photoelectric sensor (7) that is connected with one and operation controller electric connection on drainage portion (6), the inductive probe one end of photoelectric sensor (7) stretches into through the opening on stock solution chamber (61) upper portion for the liquid level situation of change of the interior washing liquid of sensing stock solution chamber (61) sends liquid level sensing signal to operation controller.

2. The ultrasonic cleaning device capable of stably running according to claim 1, wherein an end cover portion (63) for plugging an upper opening of the drainage portion (6) is fixedly connected to an upper end face of the drainage portion in a threaded manner, a fixing screw hole for fixedly plugging the photoelectric sensor (7) is formed in the middle of the end cover portion (63), and a soft rubber sealing ring (64) located on the periphery of the fixing screw hole is hermetically clamped between the end faces of the end cover portion (63) and the drainage portion (6) in a butting manner.

3. An ultrasonic cleaning device with stable operation according to claim 1, wherein the bottom of the liquid storage cavity (61) is provided with a tapered groove (611) which is concave downwards, and the opening of the drainage pipeline (62) communicated with the liquid storage cavity (61) is positioned at the connection part of the tapered groove (611) and the side wall of the liquid storage cavity (61).

4. An ultrasonic cleaning apparatus according to claim 1, wherein the drainage portion (6) is of an L-shaped configuration, one longitudinal end of which is fixedly connected to the cleaning apparatus body (1) by means of a screw thread, the reservoir (61) is disposed in the vertical end thereof, and the drainage pipe (62) is disposed in the longitudinal end thereof.

5. The ultrasonic cleaning device with stable operation according to claim 1, wherein the jet cavity (3) is longitudinally arranged along the length direction of the cleaning machine body (1) and has a V-shaped strip cavity structure with a wide upper part and a narrow lower part, a liquid inlet (32) for pumping cleaning liquid is longitudinally arranged at the upper part of one side wall of the jet cavity, a transducer port is longitudinally arranged at the relatively wide upper part of the jet cavity, the jet port (31) is longitudinally arranged at the relatively narrow lower part of the jet cavity, and the transducer (5) is longitudinally and hermetically covered on the transducer port.

6. An ultrasonic cleaning device for stable operation according to claim 5, wherein the spraying cavity (3) is provided with an outward-expanding overflow cavity (11) at one end corresponding to the drainage portion (6), the transverse cross-sectional width of the overflow cavity (11) is larger than that of the V-shaped strip cavity structure of the spraying cavity (3), one end of the overflow cavity (11) is communicated with the spraying cavity (3), and the other end is communicated with the drainage pipeline (62).

7. An ultrasonic cleaning apparatus with stable operation according to claim 5, wherein said jet port (31) is opened in a longitudinal direction on a lower end face of said cleaning machine body (1).

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