CN113953673A - Method and equipment for scratching solar cell - Google Patents
Method and equipment for scratching solar cell Download PDFInfo
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- CN113953673A CN113953673A CN202011515733.0A CN202011515733A CN113953673A CN 113953673 A CN113953673 A CN 113953673A CN 202011515733 A CN202011515733 A CN 202011515733A CN 113953673 A CN113953673 A CN 113953673A
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- solar cell
- laser beam
- scribing
- laser
- resistant material
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- 238000000034 method Methods 0.000 title claims abstract description 24
- 238000006748 scratching Methods 0.000 title description 4
- 230000002393 scratching effect Effects 0.000 title description 4
- 239000000463 material Substances 0.000 claims abstract description 74
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 39
- 230000005540 biological transmission Effects 0.000 claims description 23
- 239000005388 borosilicate glass Substances 0.000 claims description 7
- NYRAVIYBIHCEGB-UHFFFAOYSA-N [K].[Ca] Chemical compound [K].[Ca] NYRAVIYBIHCEGB-UHFFFAOYSA-N 0.000 claims description 6
- 239000005354 aluminosilicate glass Substances 0.000 claims description 6
- 239000011521 glass Substances 0.000 claims description 6
- 238000002834 transmittance Methods 0.000 claims description 5
- 239000006112 glass ceramic composition Substances 0.000 claims description 4
- 238000010438 heat treatment Methods 0.000 claims description 4
- 239000002241 glass-ceramic Substances 0.000 claims description 3
- 238000009434 installation Methods 0.000 claims description 3
- 239000005307 potash-lime glass Substances 0.000 claims 1
- 239000002826 coolant Substances 0.000 description 11
- 230000007246 mechanism Effects 0.000 description 9
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 7
- 229910052593 corundum Inorganic materials 0.000 description 6
- 230000008569 process Effects 0.000 description 6
- 229910001845 yogo sapphire Inorganic materials 0.000 description 6
- 238000005336 cracking Methods 0.000 description 5
- YKTSYUJCYHOUJP-UHFFFAOYSA-N [O--].[Al+3].[Al+3].[O-][Si]([O-])([O-])[O-] Chemical compound [O--].[Al+3].[Al+3].[O-][Si]([O-])([O-])[O-] YKTSYUJCYHOUJP-UHFFFAOYSA-N 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 239000000203 mixture Substances 0.000 description 4
- 239000000377 silicon dioxide Substances 0.000 description 4
- 239000000835 fiber Substances 0.000 description 3
- 239000011810 insulating material Substances 0.000 description 3
- KKCBUQHMOMHUOY-UHFFFAOYSA-N Na2O Inorganic materials [O-2].[Na+].[Na+] KKCBUQHMOMHUOY-UHFFFAOYSA-N 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 2
- 230000009471 action Effects 0.000 description 2
- 239000000378 calcium silicate Substances 0.000 description 2
- 229910052918 calcium silicate Inorganic materials 0.000 description 2
- OYACROKNLOSFPA-UHFFFAOYSA-N calcium;dioxido(oxo)silane Chemical compound [Ca+2].[O-][Si]([O-])=O OYACROKNLOSFPA-UHFFFAOYSA-N 0.000 description 2
- 229910052681 coesite Inorganic materials 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 229910052906 cristobalite Inorganic materials 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000003475 lamination Methods 0.000 description 2
- 229910052682 stishovite Inorganic materials 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 229910052905 tridymite Inorganic materials 0.000 description 2
- BPQQTUXANYXVAA-UHFFFAOYSA-N Orthosilicate Chemical compound [O-][Si]([O-])([O-])[O-] BPQQTUXANYXVAA-UHFFFAOYSA-N 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000004093 laser heating Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000005368 silicate glass Substances 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 239000012780 transparent material Substances 0.000 description 1
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/362—Laser etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/067—Dividing the beam into multiple beams, e.g. multifocusing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
- B23K26/0869—Devices involving movement of the laser head in at least one axial direction
- B23K26/0876—Devices involving movement of the laser head in at least one axial direction in at least two axial directions
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/70—Auxiliary operations or equipment
- B23K26/702—Auxiliary equipment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/186—Particular post-treatment for the devices, e.g. annealing, impurity gettering, short-circuit elimination, recrystallisation
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
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Abstract
The invention provides a method for scribing a solar cell and scribing equipment thereof. The equipment adopted by the method mainly comprises: a fixing frame for mounting each component; a cell piece conveying part for transmitting the solar cell piece so that the solar cell piece moves relative to the focusing points of the first laser beam and the second laser beam along the splitting line path; the low-heat-conduction high-temperature-resistant material bearing table is used for bearing the battery piece; a laser assembly for generating a first laser beam and a second laser beam.
Description
Technical Field
The invention relates to a laser beam scribing and cracking processing technology for a solar cell, in particular to a scribing and cracking method for the solar cell. The invention also relates to special scribing equipment adopted in the scribing method.
Background
With the rapid popularization and application of the lamination assembly technology, the solar cell scribing small-piece technology is promoted to be rapidly developed. The most core technology in the lamination assembly technology is a cell splitting technology, and the existing cell splitting technology firstly cuts a crack on the surface of a cell by adopting a laser and then splits a solar cell by adopting a mechanical breaking mode; the present invention also discloses a solar cell cutting method and a solar cell cutting device (CN111151896A), wherein two lasers are used, one laser is used for cutting a cell sheet to form a dividing line, and the other laser is used for heating the dividing line of the cell sheet and then dividing the cell sheet under the action of a cooling medium, as disclosed in the patent of the applicant's patent application, "a solar cell cutting method and a solar cell cutting device" (CN111151896A), but in the process of dividing the cell sheet by applying the method of the patent technology, it is found that when the cooling medium acts on the heated cell sheet, on one hand, the surface of the cell sheet is stained, on the other hand, the stability of the cooling medium is difficult to control, and a dividing defect is formed at the dividing position of the cell sheet, and in addition, the existing bearing table cannot observe the dividing condition of the solar cell sheet from the back side of the laser dividing, and therefore, there is a need to invent a new technology for dividing the cell sheet without using the cooling medium.
Disclosure of Invention
The invention provides a method for scribing a solar cell and scribing equipment thereof, aiming at solving the technical problems in the prior art.
In order to avoid the problem that the battery piece is stained by adopting a cooling medium and overcome the technical problem that the battery piece is scratched and cracked due to the fact that the cooling medium is difficult to accurately control when the temperature difference is formed on the battery piece by utilizing the cooling medium, the invention adopts a new technology for scratching and cracking the battery piece without using the cooling medium.
The invention is realized by the following technical scheme.
Firstly, a first laser beam and a second laser beam act on the coincident position of a line to be split of a cell piece, then a bearing table made of low-heat-conduction high-temperature-resistant material of a cell piece transmission part bears the solar cell piece and passes through the first laser beam and the second laser beam, after the line to be split of the cell piece is ablated by the first laser beam to form a groove with a certain length, the line to be split of the cell piece is heated by the second laser beam along the groove and an extension line of the groove, the solar cell piece is broken along the line to be split, and the solar cell piece is scratched and split.
Further, the thermal conductivity coefficient of the low-heat-conduction material is less than 8W/mK, and the thermal expansion coefficient of the material at the normal use temperature is less than 7 x 10-6/° c, the softening temperature is greater than 900 ℃.
Further, the low thermal conductive high temperature resistant material is one of low thermal conductive high temperature resistant materials having the material characteristics as described above, such as alumina silicate refractory fiber, calcium silicate heat insulating material, quartz glass material, and the like.
Furthermore, in order to facilitate a worker to observe the scribing situation of the solar cell piece on the back of the scribing surface of the solar cell piece, the low-heat-conduction high-temperature-resistant material is a light-transmitting material, the visible light transmittance is greater than 70%, so that the worker can observe the scene on the back of the low-heat-conduction high-temperature-resistant material through the low-heat-conduction high-temperature-resistant material, the worker can observe the scribing situation of the solar cell panel from the back of the bearing table, and the light-transmitting material is one of a quartz glass material, a high-silica glass material, an aluminosilicate glass material, a borosilicate glass material, a potassium-calcium glass material and a glass ceramic material, wherein the silica content of the high-silica glass material is greater than 96%, and the SiO content of the aluminosilicate glass material is greater than 96%260 to 75 percent of Al2O310-15% of Na2O content of 10-15%, SiO of borosilicate glass material2The content is 70-80 percent, B2O3The content of Na is 6 to 15 percent24 to 10 percent of O and Al2O30-5% of SiO in potassium-calcium glass material260 to 75 percent of CaO, 5 to 12 percent of CaO, K2The content of O is 12-18 percent, and the glass ceramic material is SiO2SiO with-Al 2O3 as substrate255 to 65 percent of Al2O3The content of the material is 6 to 8 percent.
Further, in order to first scribe a groove having a certain length on one end surface of the cell piece, the first laser beam may be selected to be a pulse laser beam, and the scribe line may be performed on the cell piece.
Furthermore, in order to rapidly heat the cell splitting line, the second laser beam is a continuous thermal laser beam, and the cell splitting line and the extension line thereof are heated.
Further, in order to unify the reference, the first laser beam and the second laser beam are focused on the same starting point of the line to be split of the cell slice.
Further, the splitting line formed on the surface of the cell by the first laser beam is an intermittent or continuous splitting line along the direction of the line to be split of the cell.
Further, in order to enable the cell slice to be scratched in a pre-designed direction, the first laser beam and the second laser beam can move along the direction of a line to be scratched relative to the cell slice in the process that the first laser beam and the second laser beam act on the cell slice.
Further, in order to enable the cell to be scratched in a pre-designed direction, the cell can also move along the direction of a line to be scratched relative to the first laser beam and the second laser beam in the process that the first laser beam and the second laser beam act on the cell.
Further, in order to enable the two laser beams to respectively generate different effects on the cell, the distances from the first laser beam and the second laser beam to the inside of the cell to the surface of the cell are realized by adjusting the height position of the cell.
The invention also provides a scribing device for scribing the solar cell, which is used for realizing the scribing method of the solar cell, and the scribing device at least comprises the following components:
the fixing frame is used for bearing and mounting the transportation battery piece and parts for respectively generating the first laser beam and the second laser beam;
the cell piece transmission part is arranged on the fixing frame and used for transmitting the solar cell piece so that the solar cell piece moves relative to the focusing points of the first laser beam and the second laser beam along the path of the line to be split to realize the scribing of the cell piece;
the laser assembly is arranged on the fixing frame and positioned above the cell piece transmission part and used for generating a first laser beam and a second laser beam;
the low-heat-conduction high-temperature-resistant material bearing platform is arranged on the cell piece transmission part and used for enabling the heating part of the solar cell piece segment to be split to act on the low-heat-conduction high-temperature-resistant material at normal temperature after the solar cell piece segment to be split is heated by the laser beam, and high-low temperature difference is formed at the solar cell piece segment to be split at the extreme speed.
Furthermore, in order to enable the cell to be sequentially scratched by the laser beam, the structure of the cell transmission part at least comprises:
the horizontal driving assembly is arranged on the fixing frame base and used for driving the low-heat-conduction high-temperature-resistant material bearing table to reciprocate on the fixing frame base, so that the plurality of battery pieces sequentially and stably pass through the focusing points of the first laser beam and the second laser beam;
and means for adjusting the vertical distance of the first laser beam from the surface of the cell to the inside of the cell.
Further, the heat conductivity coefficient of the bearing table made of the low-heat-conductivity high-temperature-resistant material is less than 8W/mK, and the thermal expansion coefficient of the material at the conventional use temperature is less than 7 multiplied by 10-6/° c, the softening temperature is greater than 900 ℃.
Furthermore, the low-heat-conduction high-temperature-resistant material bearing platform is one of the low-heat-conduction high-temperature-resistant material bearing platforms with the material characteristics as described above, such as a quartz glass bearing platform, an aluminum silicate refractory fiber plate bearing platform, a calcium silicate heat-insulating material and the like.
Furthermore, in order to facilitate the staff to observe the scribing situation of the solar cell on the back of the scribing surface of the solar cell, the bearing table made of the low-heat-conductivity high-temperature-resistant material is a bearing table made of a transparent material, and the visible light transmittance is greater than 70%, such as a quartz glass bearing table, a high-silica glass bearing table, an aluminosilicate glass bearing table, a borosilicate glass bearing table, a potassium-calcium glass bearing table and a glass ceramic bearing tableWherein the silica content of the high silica glass material is greater than 96%, and the SiO content of the aluminosilicate glass material is greater than 96%260 to 75 percent of Al2O310-15% of Na2O content of 10-15%, SiO of borosilicate glass material2The content is 70-80 percent, B2O3The content of Na is 6 to 15 percent24 to 10 percent of O and Al2O30-5% of SiO in potassium-calcium glass material260 to 75 percent of CaO, 5 to 12 percent of CaO, K2The content of O is 12-18 percent, and the glass ceramic material is SiO2SiO with-Al 2O3 as substrate255 to 65 percent of Al2O3The content of the material is 6 to 8 percent.
Further, to realize the adjustment of the vertical distance from the surface of the cell to the inside of the cell, the device may be: and the lifting driving assembly is arranged at the end part of the horizontal driving assembly, and the driving end of the lifting driving assembly is positioned at the bottom of the bearing table.
Further, in order to realize the adjustment of the vertical distance from the laser beam reaching the inside of the cell to the surface of the cell, the device may further comprise: means for adjusting the position of the first laser beam generating means.
Further, in order to realize two bundles of laser and carry out the scratch to the battery piece, laser subassembly includes: a first laser generating a first laser beam; a second laser generating a second laser beam.
Further, in order to adjust the angle and the direction of the laser beam to the cell, the laser assembly further comprises: and a device for adjusting the angle and the irradiation position of the laser beams generated by the first laser and the second laser.
The invention has the technical effects that:
the bearing table of the cell transmission part is a low-heat-conduction high-temperature-resistant material bearing table, when the solar cell is borne by the low-heat-conduction high-temperature-resistant material bearing table and passes through the focus points of a first laser beam and a second laser beam, the laser beams act on the line sections to be split of the solar cell to perform scribing on the line sections to be split of the solar cell, the low-heat-conduction high-temperature-resistant material has the characteristics of extremely low heat absorption coefficient, extremely low heat conductivity, extremely low thermal expansion coefficient and the like, when the laser beams act on the lines to be split of the solar cell, the high temperature of the cell and the normal temperature of the low-heat-conduction high-temperature-resistant material bearing table form high and low temperature difference at the extremely high speed due to the high temperature of the laser, the material at the lines to be split of the cell is heated and expands due to the laser heating, the internal pressure stress in the heated area rises, meanwhile, the low-heat-conduction high-temperature-resistant material bearing table at the normal temperature enables the heated area to form a cooling area, and the tensile stress at the periphery of the heated area also increases accordingly, therefore, tangential tensile stress is formed at the section of the to-be-split line of the battery piece at the same time, and the battery piece is rapidly split along the to-be-split line in the to-be-split area overlapped by the two stress modes, so that the battery piece is split.
By adopting the method, the defects of the battery piece caused by adopting the cooling medium are avoided, and the technical problem that the battery piece is scratched and cracked due to the problem that the cooling medium is difficult to accurately control when the cooling medium is adopted to form temperature difference is solved. According to the invention, the bearing table made of the low-heat-conduction high-temperature-resistant material is adopted, so that the operation convenience is increased, and the scribing quality and efficiency of the battery piece are improved.
The invention also adopts a low-heat-conduction high-temperature-resistant material with good light transmission, such as quartz glass, and the light-transmission material enables a worker to observe the scribing state of the other side of the solar cell wafer in laser scribing from the back side of the bearing table made of the low-heat-conduction high-temperature-resistant material, so that the scribing process of the solar cell wafer can be comprehensively controlled.
Drawings
FIG. 1 is a schematic diagram of a method of scribing a solar cell in accordance with the present invention;
FIG. 2 is a schematic axial side view of a solar cell scribing apparatus;
FIG. 3 is a schematic axial view of the first laser device and the fixing frame in FIG. 2,
FIG. 4 is a schematic axial view of the second laser device of FIG. 2 in a position relationship with the holder,
FIG. 5 is a schematic axial view of the battery plate transmission part and the fixing frame in FIG. 2,
figure 6 is a schematic axial view of another angle of a solar cell scribing apparatus,
FIG. 7 is a simplified schematic axial side view of the first and second lasers of the apparatus for scribing a solar cell in FIG. 2 and the position relationship between the solar cell to be cleaved on the solar cell transmission part,
fig. 8 is a simplified axial schematic diagram of the position relationship between the first laser and the second laser in fig. 7 after the cell to be split is split by the first laser and the second laser.
In the figure: the solar cell splitting device comprises a fixed frame 10, a laser assembly 20, a cell piece transmission part 30, a first laser 21, a second laser 22, a first laser vertical fine adjustment assembly 23, a first laser horizontal fine adjustment assembly 24, a second laser fine adjustment assembly 25, a first connecting plate 26, a second connecting plate 27, a stand column 28, a horizontal driving assembly 31, a lifting driving assembly 32, a low-heat-conduction high-temperature-resistant material bearing table 33, a solar cell piece 100 and a line to be split 100-1.
Wherein the splitting line actually consists of innumerable splitting points since the laser itself has its own frequency, and the splitting lines described in the following embodiments each include a splitting point.
Detailed Description
Embodiments of the present invention will be described below with reference to fig. 1 to 8.
The first embodiment is as follows:
fig. 1 illustrates a method for scribing a solar cell. In the embodiment, the economical efficiency and the material performance are comprehensively considered, and the low-heat-conduction high-temperature-resistant material bearing table is a quartz glass bearing table.
Firstly, acting a first laser beam and a second laser beam on a position coinciding with a to-be-split line of a cell, then enabling a quartz glass bearing table of a cell transmission part to bear the solar cell 100 to pass through the first laser beam and the second laser beam, wherein after the first laser beam ablates a groove with a certain length from the to-be-split line 100-1 of the cell, the second laser beam heats the to-be-split line of the cell along the split line and an extension line thereof, and the solar cell is broken along the to-be-split line to complete the scribing and splitting of the solar cell.
When a quartz glass bearing table bears a solar cell and passes through the focusing points of a first laser beam and a second laser beam, the laser beams act on the sections of the solar cell to be split, so as to ablate and heat the sections of the solar cell, the quartz glass has the characteristics of no heat absorption, no heat conduction and high light transmission, when the laser beams act on the sections of the solar cell to be split, the temperature difference between the cell and the normal temperature of the quartz glass bearing table is formed at a high speed due to the high temperature of the laser, the material at the sections of the cell to be split is heated and expanded by the laser, the internal pressure stress of the heated area rises, meanwhile, the quartz glass bearing table at the normal temperature enables the heated area to form a cooling area rapidly, the tensile stress at the periphery of the heated area is increased along with the high temperature of the laser, so that the sections of the cell to be split form tangential tensile stress at the same time, and the to be split areas superposed in two stress modes, and rapidly cracking the cell along the line to be cracked to finish the scribing and cracking of the cell.
Fig. 2 illustrates the structural composition of the shaft side of the solar cell scribing equipment. The fixing frame 10 is arranged at the bottommost part of the scribing equipment and is used for bearing, installing and transporting the solar cell piece 100 and parts for respectively generating the first laser beam and the second laser beam;
the cell piece transmission part 30 is installed on the fixing frame 10 and used for moving each solar cell piece 100 to be scratched relative to the focusing points of the first laser beam and the second laser beam along the path of the line 100-1 to be scratched so as to realize the scratching of the cell piece;
the laser assembly 20 is mounted on the fixing frame 10 and located above the cell sheet transmission part 30, and is used for generating a first laser beam and a second laser beam.
The quartz glass bearing table is arranged above the cell piece transmission part 30 and used for enabling the heating part of the segment to be split of the solar cell piece and the quartz glass to act on the segment to be split of the solar cell piece at normal temperature to form high and low temperature difference at the highest speed after the segment to be split of the solar cell piece is heated by the laser beam.
Fig. 3 illustrates the mounting position and the structural composition of the first laser 21. The vertical column 28 is mounted on the fixed frame 10, the first connecting plate 26 is mounted on the vertical column 28 and can be adjusted up and down, the first laser up-and-down fine adjustment component 23 is mounted on the first connecting plate 26, the first laser horizontal fine adjustment component 24 is mounted on the first laser up-and-down fine adjustment component 23, and the first laser 21 is fixedly mounted at an adjusting end of the first laser horizontal fine adjustment component 24;
the vertical distance between the first laser 21 and the solar cell 100 can be roughly adjusted through the first connecting plate 26, then the first laser vertical fine adjustment assembly 23 is finely adjusted, the horizontal position of the first laser 21 can be finely adjusted through the first laser horizontal fine adjustment assembly 24, and the focus point of the first laser beam is located on the to-be-split line 100-1 of the solar cell 100.
Fig. 4 illustrates the mounting location and structural composition of the second laser 22. The second connecting plate 27 is mounted on the upright post 28 and can be adjusted up and down, the second laser fine adjustment component 25 is mounted on the second connecting plate 27, and the second laser 22 is fixedly mounted at the adjustment end of the second laser fine adjustment component 25;
the distance between the second laser 22 and the cell can be roughly adjusted through the second connecting plate 27, and then finely adjusted through the second laser fine adjustment assembly 25, so that the focusing point of the second laser beam is located on the to-be-split line 100-1 of the solar cell 100.
Fig. 5 illustrates the installation position and the structural composition of the cell transfer part 30. Wherein the content of the first and second substances,
the horizontal driving assembly 31 is fixedly arranged on the base of the fixing frame 10, the lifting driving assembly 32 is fixedly arranged at the driving end of the horizontal driving assembly 31, the quartz glass bearing table is arranged at the driving end of the lifting driving assembly 32 and is used for bearing the solar cell piece 100, so that when the line to be split 100-1 of the solar cell piece 100 passes through the laser assembly 20, the laser beam acts on the line to be split 100-1 of the solar cell piece to enable the solar cell piece 100 to be split;
the horizontal driving assembly 31 can reciprocate along the direction of the line 100-1 to be split, and the adopted mechanical structures include but are not limited to: a guide rail screw mechanism driven by a motor, a gear rack mechanism, a guide rail belt transmission mechanism or a cylinder transmission mechanism driven by compressed air;
the lifting driving assembly 32 can reciprocate in a direction perpendicular to the solar cell 100 and can reciprocate along the direction of the line to be split 100-1 under the driving of the horizontal driving assembly 31, and the adopted mechanical structure includes but is not limited to; a guide rail screw mechanism driven by a motor, a gear rack mechanism, a guide rail belt transmission mechanism or a cylinder transmission mechanism driven by compressed air;
the quartz glass bearing table fixes the solar cell piece 100 on the upper surface of the quartz glass bearing table in a vacuum adsorption mode, and ensures that the solar cell piece 100 does not change relative position in the transportation process.
Fig. 7 is a schematic diagram illustrating the movement direction of each component when the solar cell 100 is cut, the first laser 21 and the second laser 22 are fixedly arranged, and the cell conveying part 30 and the quartz glass carrying table above the cell conveying part carry the cell 100 to move according to the arrow direction, so as to complete the cutting of the cell.
Example two:
fig. 8 is a schematic diagram illustrating the moving direction of each component when the battery piece 100 is cut, and the difference between the second embodiment and the first embodiment is that the quartz glass bearing table and the battery piece 100 are fixedly arranged, and the first laser 21 and the second laser 22 can move in the direction of the arrow under the driving of the moving mechanism, so as to complete the cutting of the battery piece 100.
The working principle is as follows: manually adjusting the first laser up-down fine adjustment assembly 23 and the first laser horizontal fine adjustment assembly 24 to enable a laser focus point emitted by the first laser 21 to be located on a line 100-1 to be split in the middle of the solar cell piece 100; and manually adjusting the second laser fine adjustment component 25 to enable the focusing point of the laser emitted by the second laser 22 to coincide with the focusing point of the first laser.
The lifting driving component 32 is driven by the horizontal driving component 31 to move to the front end of the equipment, the quartz glass bearing table 33 is lifted to the highest point to bear the solar cell piece 100 supplied from the previous station, when the solar cell piece 100 is placed on the quartz glass bearing table, the solar cell piece 100 is fixed in the center of the quartz glass bearing table, and the horizontal driving component 31 starts to drive the lifting driving component 32 and the quartz glass bearing table to move towards the rear of the equipment by at least one distance of the solar cell piece 100;
in the moving process, the focusing points of the first laser beam and the second laser beam sweep across the line to be split 100-1 of the cell, the line to be split of the cell is ablated and heated, and meanwhile, the section to be split of the heated cell forms a temperature difference at the highest speed under the action of normal-temperature quartz glass, so that stress in two directions of compressive stress and tangential stress is increased, and the solar cell 100 is scratched and split;
the scratched solar cell 100 is no longer fixed on the quartz glass bearing table 33, the solar cell 100 is handed over to the next station, the quartz glass bearing table is lowered to the low position, and the quartz glass bearing table is moved back to the front end of the equipment to wait for the next solar cell 100 to be scratched to arrive.
In addition, in other embodiments, the low thermal conductivity and high temperature resistant material bearing table 33 may be an aluminum silicate refractory fiber plate bearing table or an aluminum silicate heat insulating material bearing table, and the low thermal conductivity and high temperature resistant material bearing table 33 may be a quartz glass bearing table, a high silica glass bearing table, an aluminum silicate glass bearing table, a borosilicate glass bearing table, a potassium calcium glass bearing table, or a glass ceramic bearing table with good visible light transmittance.
Finally, it should be noted that: the above examples are only intended to illustrate the technical solution of the present invention, but not to limit it; although the present invention has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some or all of the technical features may be equivalently replaced; and the modifications or the substitutions do not make the essence of the corresponding technical solutions depart from the scope of the technical solutions of the embodiments of the present invention.
Claims (10)
1. A method for scribing a solar cell is characterized in that a first laser beam and a second laser beam are acted at the position where the solar cell coincides with a to-be-split line of the solar cell, then a low-heat-conduction high-temperature-resistant material bearing table of a cell transmission part bears the solar cell (100) and passes through the first laser beam and the second laser beam, after the to-be-split line (100-1) of the solar cell is ablated by the first laser beam to form a groove with a certain length, the second laser beam heats the to-be-split line of the solar cell along the groove and an extension line of the groove, the solar cell is broken along the to-be-split line, and scribing of the solar cell is completed.
2. The method of scribing a solar cell sheet as in claim 1, wherein the low thermal conductivity material has a thermal conductivity of less than 8W/mK and a thermal expansion coefficient of less than 7 x 10-6/° c, the softening temperature is greater than 900 ℃.
3. The method for scribing a solar cell panel as claimed in claim 1 or 2, wherein the low thermal conductivity and high temperature resistant material is a light-transmitting material, and the visible light transmittance of the low thermal conductivity and high temperature resistant material is greater than 70%, so that a worker can observe a scene on the back of the low thermal conductivity and high temperature resistant material through the low thermal conductivity and high temperature resistant material.
4. The method for scribing a solar cell panel as claimed in claim 3, wherein the low thermal conductivity and high temperature resistant material is one of a quartz glass material, a high silica glass material, an aluminosilicate glass material, a borosilicate glass material, a potassium calcium glass material, and a glass ceramic material.
5. A scribing apparatus for scribing a solar cell sheet, comprising at least:
a fixing frame (10) for carrying and mounting components for transporting the battery piece and respectively generating a first laser beam and a second laser beam;
a cell piece transmission part (30) installed on the fixed frame (10) and used for transmitting the solar cell piece (100) so that the solar cell piece (100) moves along the path of the line to be split (100-1) relative to the focusing points of the first laser beam and the second laser beam;
the laser assembly (20) is arranged on the fixed frame (10) and positioned above the cell piece transmission part (30) and is used for generating a first laser beam and a second laser beam;
and the low-heat-conduction high-temperature-resistant material bearing table (33) is arranged on the cell piece transmission part (30) and used for enabling the heating part of the segment to be split of the solar cell piece to act with the normal temperature of the low-heat-conduction high-temperature-resistant material after the segment to be split of the solar cell piece is heated by the laser beam, so that high and low temperature difference is formed at the extreme speed of the segment to be split of the solar cell piece.
6. The scribing equipment for scribing a solar cell sheet according to claim 5, wherein the structure of the cell sheet transfer part (30) comprises at least:
the horizontal driving assembly (31) is arranged on the fixed frame base and used for driving the low-heat-conduction high-temperature-resistant material bearing table (33) to reciprocate on the horizontal driving assembly, so that the plurality of solar cells (100) sequentially and stably pass through the lower ends of the focusing points of the first laser beam and the second laser beam;
an apparatus for adjusting a vertical distance of a first laser beam from a surface of a solar cell (100) to an interior of the cell, comprising: a lifting driving component (32) which is arranged at the end part of the horizontal driving component (31) and the driving end of which is positioned at the bottom of the low heat conduction and high temperature resistant material bearing platform (33), or a device for adjusting the position of the first laser beam generating component.
7. The scribing installation for scribing a solar cell sheet according to claim 5, wherein said laser assembly (20) comprises:
a first laser (21) generating a first laser beam;
a second laser (22) generating a second laser beam;
and a device for adjusting the angle and the irradiation position of the laser beams generated by the first laser (21) and the second laser (22).
8. The scribing installation for scribing a solar cell panel according to claim 5 or 6, wherein the thermal conductivity of the low thermal conductivity and high temperature resistant material carrier table (33) is less than 8W/mK and the thermal expansion coefficient is less than 7 x 10-6/° c, the softening temperature is greater than 900 ℃.
9. The scribing equipment for scribing a solar cell sheet according to claim 8, wherein the low thermal conductive high temperature resistant material carrying table (33) is a low thermal conductive high temperature resistant material carrying table with a visible light transmittance of more than 70%.
10. The scribing apparatus for scribing a solar cell according to claim 9, wherein the low thermal conductivity and high temperature resistant material susceptor (33) is one of a quartz glass susceptor, a high silica glass susceptor, an aluminosilicate glass susceptor, a borosilicate glass susceptor, a potash-lime glass susceptor, a glass ceramic susceptor.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011515733.0A CN113953673A (en) | 2020-12-21 | 2020-12-21 | Method and equipment for scratching solar cell |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202011515733.0A CN113953673A (en) | 2020-12-21 | 2020-12-21 | Method and equipment for scratching solar cell |
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20020170896A1 (en) * | 2001-05-21 | 2002-11-21 | Samsung Electronics Co., Ltd. | Method and apparatus for cutting a non-metallic substrate using a laser beam |
| CN102285624A (en) * | 2011-06-03 | 2011-12-21 | 中国人民解放军国防科学技术大学 | Bonded wafer with thermal stress release structure and laser scribing process |
| CN104364208A (en) * | 2012-06-28 | 2015-02-18 | 旭硝子株式会社 | Glass-substrate-cutting method and glass-substrate production method |
| CN111725060A (en) * | 2020-05-12 | 2020-09-29 | 大族激光科技产业集团股份有限公司 | Battery piece cooling device and battery production system |
| CN214134493U (en) * | 2020-12-21 | 2021-09-07 | 宁夏小牛自动化设备有限公司 | Equipment for scratching solar cell |
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2020
- 2020-12-21 CN CN202011515733.0A patent/CN113953673A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20020170896A1 (en) * | 2001-05-21 | 2002-11-21 | Samsung Electronics Co., Ltd. | Method and apparatus for cutting a non-metallic substrate using a laser beam |
| CN102285624A (en) * | 2011-06-03 | 2011-12-21 | 中国人民解放军国防科学技术大学 | Bonded wafer with thermal stress release structure and laser scribing process |
| CN104364208A (en) * | 2012-06-28 | 2015-02-18 | 旭硝子株式会社 | Glass-substrate-cutting method and glass-substrate production method |
| CN111725060A (en) * | 2020-05-12 | 2020-09-29 | 大族激光科技产业集团股份有限公司 | Battery piece cooling device and battery production system |
| CN214134493U (en) * | 2020-12-21 | 2021-09-07 | 宁夏小牛自动化设备有限公司 | Equipment for scratching solar cell |
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