CN113948947A - Laser beam position and angle control system and control method - Google Patents
Laser beam position and angle control system and control method Download PDFInfo
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- CN113948947A CN113948947A CN202111011261.XA CN202111011261A CN113948947A CN 113948947 A CN113948947 A CN 113948947A CN 202111011261 A CN202111011261 A CN 202111011261A CN 113948947 A CN113948947 A CN 113948947A
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- 230000007246 mechanism Effects 0.000 claims abstract description 32
- 238000012544 monitoring process Methods 0.000 claims abstract description 6
- 239000005350 fused silica glass Substances 0.000 claims description 5
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- 230000005540 biological transmission Effects 0.000 description 2
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/005—Optical devices external to the laser cavity, specially adapted for lasers, e.g. for homogenisation of the beam or for manipulating laser pulses, e.g. pulse shaping
- H01S3/0071—Beam steering, e.g. whereby a mirror outside the cavity is present to change the beam direction
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Abstract
The invention provides a laser beam position and angle control system, and relates to the technical field of lasers; the control system includes: the device comprises a laser, a first wedge-shaped quartz glass sheet, a second wedge-shaped quartz glass sheet, an adjusting mechanism, a camera and a controller; the first wedge-shaped quartz glass sheet and the second wedge-shaped quartz glass sheet are arranged on the light path of the laser; the first wedge-shaped quartz glass sheet is matched with the second wedge-shaped quartz glass sheet and used for adjusting the direction of an output light beam of the laser; the adjusting mechanism is connected with the first wedge-shaped quartz glass sheet and is used for adjusting the position and/or deflection angle of the first wedge-shaped quartz glass sheet; the camera is used for monitoring the positions of a first light spot and a second light spot of the output light beam reflected by the incident surface and the emergent surface of the second wedge-shaped quartz glass sheet; the controller is electrically connected with the adjusting mechanism and the camera respectively; the invention also provides a laser beam position and angle control method, which can effectively adjust the position and angle of the laser beam and solve the technical problem of unstable laser beam pointing.
Description
Technical Field
The invention relates to the technical field of lasers, in particular to a laser beam position and angle control system and a control method.
Background
Lasers have wide applications in the fields of micromachining, physics, biology, chemical control reactions, optical communications, and the like. The pointing stability of the output beam of a laser is an important indicator of the practical application of the laser. In the field of micromachining, the pointing stability of a laser beam affects the machining precision and effect; in the field of remote communication or detection, the position deviation of the laser beam can directly influence the communication or detection result; in high-precision physics experiments, the laser beam is also required to accurately and stably continuously generate physical effects with a target, and the target can not be missed due to the directional drift.
Even if the laser works in a laboratory condition with relatively stable environment, the laser beam directivity of the laser cannot be completely unchanged; in practical application environments such as outdoor, vehicle-mounted and airborne, the use effect is seriously influenced by the directional change of the laser beam. In addition, in actual use of a laser, there is a demand for real-time adjustment of parameters such as power, and the laser beam directivity of the laser changes during the laser parameter adjustment. Therefore, the technical problem of unstable laser beam pointing of the laser is solved, and the method has important significance.
Disclosure of Invention
The invention aims to provide a laser beam position and angle control system and a control method, which can effectively adjust the position and the angle of a laser beam and solve the technical problem of unstable laser beam pointing.
The invention provides a laser beam position and angle control system, comprising: the device comprises a laser, a first wedge-shaped quartz glass sheet, a second wedge-shaped quartz glass sheet, an adjusting mechanism, a camera and a controller;
the first wedge-shaped quartz glass sheet and the second wedge-shaped quartz glass sheet are sequentially arranged on a light path of the laser; the first wedge-shaped quartz glass sheet is matched with the second wedge-shaped quartz glass sheet and used for adjusting the direction of an output beam of the laser;
the adjusting mechanism is connected with the first wedge-shaped quartz glass sheet and is used for adjusting the position and/or deflection angle of the first wedge-shaped quartz glass sheet;
the camera is used for monitoring the positions of a first light spot and a second light spot of the output light beam reflected by the incident surface and the emergent surface of the second wedge-shaped quartz glass sheet in the camera;
the controller is respectively electrically connected with the adjusting mechanism and the camera and used for calculating a driving signal applied to the adjusting mechanism according to the deviation between the positions of the first light spot and the second light spot in the camera and a preset position so as to adjust the position and/or the deflection angle of the first wedge-shaped quartz glass sheet in real time, and the positions of the first light spot and the second light spot in the camera are coincided with the preset position.
Further, the laser is a solid laser, a fiber laser, a semiconductor laser or a gas laser.
Further, the output beam of the laser is continuous output light or pulse output light.
Further, the wavelength range of the output light beam of the laser is an ultraviolet light band, a visible light band or an infrared light band.
Further, the wedge angle of the first wedge-shaped quartz glass sheet is 1-45 degrees.
Furthermore, the incident surface and the emergent surface of the first wedge-shaped quartz glass sheet are both plated with antireflection films.
Furthermore, the materials of the first wedge-shaped quartz glass sheet and the second wedge-shaped quartz glass sheet are respectively ultraviolet fused silica, N-BK7, JGS1 or K9.
Further, the wedge angle of the second wedge-shaped quartz glass sheet is 1-45 degrees.
Furthermore, the incident surface and the emergent surface of the second wedge-shaped quartz glass sheet are both plated with antireflection films.
The invention also provides a control method adopting the laser beam position and angle control system, which comprises the following steps:
monitoring the position of a first light spot and a second light spot of the output light beam reflected by the incident surface and the emergent surface of the second wedge-shaped quartz glass sheet in the camera;
and calculating a driving signal applied to the adjusting mechanism according to the deviation of the positions of the first light spot and the second light spot in the camera from a preset position so as to adjust the position and/or the deflection angle of the first wedge-shaped quartz glass sheet in real time, so that the positions of the first light spot and the second light spot in the camera are coincident with the preset position.
The technical scheme provided by the embodiment of the invention has the following beneficial effects: the laser beam position and angle control system in the embodiment of the invention comprises a laser, a first wedge-shaped quartz glass sheet, a second wedge-shaped quartz glass sheet, an adjusting mechanism, a camera and a controller; the first wedge-shaped quartz glass sheet and the second wedge-shaped quartz glass sheet are sequentially arranged on a light path of the laser, the controller is respectively and electrically connected with the adjusting mechanism and the camera, and the position and/or deflection angle of the first wedge-shaped quartz glass sheet is adjusted through the adjusting mechanism; when the wedge-shaped quartz glass sheet is used, the output light beam of the laser is sampled by the second wedge-shaped quartz glass sheet, and a first light spot and a second light spot of the output light beam of the laser reflected by the incident surface and the emergent surface of the second wedge-shaped quartz glass sheet are respectively imaged on the camera; calculating a driving signal applied to the adjusting mechanism according to a deviation of the positions of the first light spot and the second light spot in the camera from a predetermined position; the adjusting mechanism adjusts the position and/or deflection angle of the first quartz glass sheet in real time according to the driving signal, so that the positions of the first light spot and the second light spot are overlapped with the preset position, the second quartz glass sheet is matched with the first wedge-shaped quartz glass sheet, the position and the incident angle of the output light beam of the laser at a target point are kept unchanged, the pointing adjustment of the output light beam of the laser is realized, and the purpose of locking the output position and the angle of the output light of the laser is achieved; meanwhile, two positions of the first light spot and the second light spot reflected by the incident surface and the emergent surface of the second wedge-shaped quartz glass sheet are monitored simultaneously by using one camera, so that the cost of devices and the complexity of light paths are reduced; in addition, the direction of the output beam of the laser is adjusted by using the transmission type adjusting system, the output light does not need to be reflected and folded, the optical path does not need to be increased, and the size of the laser beam position and angle control system is reduced.
Drawings
FIG. 1 is a schematic diagram of a laser beam position and angle control system according to an embodiment of the present invention;
FIG. 2 is a schematic perspective view of an adjustment mechanism 7 of the laser beam position and angle control system of FIG. 1;
wherein, 1, a laser; 2. a first wedge-shaped quartz glass sheet; 3. a second wedge-shaped quartz glass sheet; 4. a camera; 41. a first light spot; 42. a second light spot; 5. a controller; 6. a target point; 7. an adjustment mechanism; 701. a mechanical clamp; 702. piezoelectric ceramics.
Detailed Description
The accompanying drawings, which are incorporated in and constitute a part of this application, illustrate preferred embodiments of the invention and together with the description, serve to explain the principles of the invention and not to limit the scope of the invention.
Referring to fig. 1, an embodiment of the present invention provides a laser beam position and angle control system, including: the device comprises a laser 1, a first wedge-shaped quartz glass sheet 2, a second wedge-shaped quartz glass sheet 3, an adjusting mechanism 7, a camera 4 and a controller 5;
the first wedge-shaped quartz glass sheet 2 and the second wedge-shaped quartz glass sheet 3 are sequentially arranged on the light path of the laser 1; the first wedge-shaped quartz glass sheet 2 is matched with the second wedge-shaped quartz glass sheet 3 and used for adjusting the direction of the output beam of the laser 1;
the adjusting mechanism 7 is connected with the first wedge-shaped quartz glass sheet 2 and is used for adjusting the position and/or deflection angle of the first wedge-shaped quartz glass sheet 2;
the camera 4 is used for monitoring the positions of a first light spot 41 and a second light spot 42 of the output light beam reflected by the incident surface and the emergent surface of the second wedge-shaped quartz glass sheet 3 in the camera 4;
the controller 5 is electrically connected with the adjusting mechanism 7 and the camera 4 respectively, and is used for calculating a driving signal applied to the adjusting mechanism 7 according to the deviation of the positions of the first light spot 41 and the second light spot 42 in the camera 4 and a preset position so as to adjust the position and/or the deflection angle of the first wedge-shaped quartz glass sheet 2 in real time, so that the positions of the first light spot 41 and the second light spot 42 in the camera 4 are coincident with the preset position.
Further, the camera 4 uses a CCD or CMOS sensor, the detection diameter is larger than 1 mm, the number of pixels is larger than 1MPixel, and image information can be output in real time; the controller 5 includes a PC controller or a single chip controller.
Further, the laser 1 is a solid laser, a fiber laser, a semiconductor laser or a gas laser; the output light beam of the laser 1 is continuous output light or pulse output light; the wavelength range of the output beam of the laser 1 is an ultraviolet light band, a visible light band, or an infrared light band.
Further, the wedge angle of the first wedge-shaped quartz glass sheet 2 and the second wedge-shaped quartz glass sheet 3 is 1-45 degrees; the incidence surface and the emergence surface of the first wedge-shaped quartz glass sheet 2 and the second wedge-shaped quartz glass sheet 3 are both plated with antireflection films; the material of the first wedge-shaped quartz glass piece 2 and the second wedge-shaped quartz glass piece 3 is respectively ultraviolet fused silica, N-BK7, JGS1 or K9.
The control method adopting the laser beam position and angle control system in the embodiment comprises the following steps:
the camera 4 monitors the position of a first spot 41 and a second spot 42 of the output light beam reflected by the entrance face and the exit face of the second wedge-shaped quartz glass plate 3 in the camera 4;
the controller 5 calculates the drive signal to be applied to the adjusting mechanism 7 in accordance with the deviation of the positions of the first spot 41 and the second spot 42 in the camera 4 from the predetermined position to adjust the position and/or the deflection angle of the first wedge-shaped quartz glass sheet 2 in real time so that the positions of the first spot 41 and the second spot 42 in the camera 4 coincide with the predetermined position.
Exemplarily, in the present embodiment, the laser 1 is a femtosecond pulse laser, specifically, the pulse repetition frequency is 100kHz, the center wavelength is 1030nm, and the pulse energy is 1 mJ; the laser 1 can adjust the pumping current through software operation to realize power adjustment, and the power adjustment range is 0-100W; the laser 1 can also realize pulse adjustment by operating and moving an optical device in the laser 1 through software, wherein the pulse width adjustment range is 400 femtoseconds to 10 picoseconds; the first spot 41 and the second spot 42 have a diameter of 2mm and a polarization state in the horizontal direction.
The output beam of the laser 1 first passes through a first wedge-shaped quartz glass plate 2; the diameter of the first wedge-shaped quartz glass sheet 2 is 12.7mm, the material is ultraviolet fused quartz, the thickness is 5mm, the wedge angle is 10 degrees, and the direction of the wedge angle is shown in figure 1; the distance between the first wedge-shaped quartz glass sheet 2 and the laser 1 is 50mm, and the incident plane of the first wedge-shaped quartz glass sheet 2 is vertical to the output light beam of the laser 1; the incident surface and the emergent surface of the first wedge-shaped quartz glass sheet 2 are respectively plated with an antireflection film with the transmissivity of more than 99 percent so as to reduce the power loss of the laser 1; the first wedge-shaped quartz glass sheet 2 is fixed on an adjusting mechanism 7 which is adjustable in position and deflection angle relative to the transmission direction Z of the output light beam of the laser 1, and the adjusting axis comprises the movement amount in the X direction, the movement amount in the Y direction, the deflection angle in the X direction and the deflection angle in the Y direction; the adjusting mechanism 7 adjusts the four shafts through four piezoelectric ceramics respectively.
It should be noted that the adjusting mechanism 7 may be applied to the present invention as long as it can achieve the movement amount of the first wedge-shaped silica glass piece 2 in the X direction, the movement amount in the Y direction, the deflection angle in the X direction, and the deflection angle in the Y direction.
Exemplarily, referring to fig. 2, in the present embodiment, the adjustment mechanism 7 includes a mechanical clamp 701 and four piezoelectric ceramics 702; the piezoelectric ceramic 702 and the first wedge-shaped quartz glass sheet 2 are both arranged on the mechanical fixture 701; the adjustment of the movement amount of the first wedge-shaped quartz glass sheet 2 in the X direction, the movement amount in the Y direction, the deflection angle in the X direction, and the deflection angle in the Y direction can be realized by the piezoelectric ceramic 702; the mechanical clamp and the piezoelectric ceramic are both in the prior art, and therefore, the detailed structure thereof is not described herein.
The output light beam of the laser 1 passing through the first wedge-shaped quartz glass sheet 2 passes through the second wedge-shaped quartz glass sheet 3; the diameter of the second wedge-shaped quartz glass sheet 3 is 12.7mm, the material is ultraviolet fused quartz, the thickness is 5mm, the wedge angle is 10 degrees, and the direction of the wedge angle is shown in figure 1; the distance between the second wedge-shaped quartz glass sheet 3 and the first wedge-shaped quartz glass sheet 2 is 50mm, and the position is fixed; the incident surface and the emergent surface of the second wedge-shaped quartz glass sheet 3 are both plated with an antireflection film with the transmittance of more than 99 percent; on the incident surface of the second wedge-shaped quartz glass plate 3, the incident angle of the output beam of the laser 1 is 30 degrees, and the reflection angle is 30 degrees; the incident light beam and the reflected light beam are in an XZ plane, and the light beam reflected by the incident surface is imaged on the camera 4 and is a first light spot 41; the second wedge-shaped quartz glass sheet 3 rotates by 45 degrees around the Z axis by taking the intersection point of the incident plane and the incident beam as the center; due to the existence of the wedge angle, the light beam reflected by the emergent surface of the second wedge-shaped quartz glass sheet 3 is not in the XZ plane and is imaged on the camera 4 as a second light spot 42; the diameter of the first light spot 41 and the second light spot 42 is 2mm, the distance Δ X in the horizontal (X) direction is 10mm, and the distance Δ Y in the vertical (Y) direction is 10 mm; the power of the first spot 41 and the second spot 42 is less than 1W; the output beam of the laser 1 passing through the second wedge-shaped quartz glass plate 3 continues to the target point 6.
Exemplarily, in the present embodiment, the camera 4 is a CCD camera with a power attenuation sheet, the effective detection size is 36 × 24mm, the pixel number is 15.7MPixel, and the communication mode is FireWire; the distance between the camera 4 and the second wedge-shaped quartz glass sheet 3 is 20mm, so that a first light spot 41 and a second light spot 42 of the incident surface and the emergent surface of the second wedge-shaped quartz glass sheet 3, which reflect the output light beams, are respectively imaged in the effective detection size of the camera 4; the camera 4 transmits the image signal to the controller 5.
Exemplarily, in the present embodiment, the controller 5 is a microprocessor module based on an ARM architecture, and the module includes an image processing function, and is responsible for receiving an image signal of the camera 4, analyzing the image, calculating the positions of the first light spot 41 and the second light spot 42, and acquiring real-time variation information of the positions of the first light spot 41 and the second light spot 42 by repeatedly collecting the image, where the initial positions of the first light spot 41 and the second light spot 42 when the output light beam of the laser 1 passes through the target point 6 are predetermined positions; obtaining the position variation information of the first light spot 41 and the second light spot 42 according to the deviation of the positions of the first light spot 41 and the second light spot 42 after the movement and the preset position, and calculating the movement amount required by the four movement axes of the first wedge-shaped quartz glass sheet 2 through the controller 5; the controller 5 has a piezoelectric ceramic driving function, and sends a voltage corresponding to the calculated movement amount of the first wedge-shaped quartz glass piece 2 to the adjusting mechanism 7, and the adjusting mechanism 7 controls the movement of the first wedge-shaped quartz glass piece 2.
The output beam of the laser 1 is finally transmitted to a target point 6; the diameter of the light beam required by the target point 6 is 2mm, and the movement change range of the output light beam of the laser 1 is required to be less than 5 microns in the continuous working process of the laser 1; the target point 6 requires the angle of incidence of the output beam of the laser 1 to be 0 degrees, and requires the range of angular variation of the output beam of the laser 1 to be less than 100 μ rad during the continuous operation of the laser 1.
When the laser 1 performs pulse width modulation, the output beam inevitably generates position and angle deviation due to the movement of an optical device in the laser 1, and the output beam of the laser 1 deviates from the target point 6 without the laser beam position and angle control system, so that the use requirement is not met; the problem of pointing stability of the output beam of the laser 1 is even more serious when the laser 1 is power-regulated, especially when the laser 1 is in unstable working environments such as outdoors, on-board, onboard, etc.
When the laser beam position and angle control system is in an operating state and the output beam of the laser 1 generates position deviation in the X direction, the first light spot 41 and the second light spot 42 detected by the camera 4 will generate changes in the X direction at the same time, and the change amounts are the same or nearly the same; the controller 5 adjusts the voltage of the piezoelectric ceramic output to the adjusting mechanism 7 for controlling the displacement of the first wedge-shaped quartz glass piece 2 in the X direction according to the variation of the positions of the first spot 41 and the second spot 42 relative to the predetermined position at this time, changes the position of the first wedge-shaped quartz glass piece 2, and compensates the position deviation of the output beam of the laser 1 in the X direction, so that the position of the output beam of the laser 1 at the target point 6 is unchanged from the incident angle.
For example, first, the laser 1 is in a stable state, the position and the incident angle of the output beam of the laser 1 at the target point 6 meet the use requirements, and the camera 4 detects the first light spot 41 and the second light spot 42 and records the positions thereof; keeping the position of the second wedge-shaped quartz glass sheet 3 unchanged, and controlling the piezoelectric ceramic voltage of the displacement of the first wedge-shaped quartz glass sheet 2 in the X direction to be 50V; the voltage regulation range of the used piezoelectric ceramic is 0-150V, and the corresponding movement range is 2 mm; when the laser 1 becomes unstable and moves, and the beam moves 5 μm in the X direction, the first spot 41 and the second spot 42 detected by the camera 4 will simultaneously change to 10 μm in the X direction, and the output beam of the laser 1 moves 5 μm at the position of the target point 6; according to the formula, the moving amount of the first wedge-shaped quartz glass sheet 2 is 70 × the moving amount of the light spot, so that the first wedge-shaped quartz glass sheet 2 needs to move 700 μm; the voltage of the piezoelectric ceramic controlling the displacement amount of the first wedge-shaped quartz glass piece 2 in the X direction needs to be increased from 50V to 102.5V; the first spot 41 and the second spot 42 detected by the camera 4 will coincide with the predetermined position; the position and the incident angle of the output beam of the laser 1 at the target point 6 are also restored; the above description applies equally to the adjustment in the Y direction.
When the output beam of the laser 1 generates an angular offset in the X direction, the first light spot 41 and the second light spot 42 detected by the camera 4 will simultaneously generate a change in the X direction, and the change amounts are different; the controller 5 adjusts the voltage output to the piezoelectric ceramic for controlling the inclination angle of the first wedge-shaped quartz glass sheet 2 in the X direction according to the variation of the first light spot 41 and the second light spot 42, changes the angle of the first wedge-shaped quartz glass sheet 2, and compensates the angular offset generated by the output light beam of the laser 1 in the X direction; while adjusting the angle, the voltage output to the piezoelectric ceramic that controls the displacement of the first wedge-shaped quartz glass piece 2 in the X direction also needs to be adjusted; the angle and position of the first wedge-shaped quartz glass plate 2 are simultaneously changed so that the position and incident angle of the output beam of the laser 1 at the target point 6 are unchanged.
For example, firstly, the laser 1 is in a stable state, the position and the incident angle of the light beam at the target point 6 meet the use requirements, and the camera 4 detects the first light spot 41 and the second light spot 42 and records the positions thereof; keeping the position of the second wedge-shaped quartz glass sheet 3 unchanged, and controlling the voltage of the piezoelectric ceramic for controlling the displacement of the first wedge-shaped quartz glass sheet 2 in the X direction and the voltage of the piezoelectric ceramic for controlling the angle of the first wedge-shaped quartz glass sheet 2 in the X direction to be 50V; when the laser 1 becomes unstable and moves, and the output beam of the laser 1 angularly shifts 100 μ rad in the X direction, the first spot 41 detected by the camera 4 will generate a change in the X direction of 14.4 μm, the second spot 42 detected by the camera 4 will generate a change in the X direction of 13.1 μm, the output beam of the laser 1 at the target point 6 will shift 13.1 μm, and the angle shifts 100 μ rad; firstly, adjusting the displacement of the first wedge-shaped quartz glass sheet 2 in the X direction for position compensation, wherein according to a formula, the movement amount of the first wedge-shaped quartz glass sheet 2 is 63 multiplied by the movement amount of the second light spot 42, so that the first wedge-shaped quartz glass sheet 2 is required to move 830 micrometers; the voltage of the piezoelectric ceramic for controlling the X-direction displacement of the wedge-shaped quartz glass sheet is required to be increased from 50V to 112.25V; at this time, the second light spot 42 detected by the camera 4 will be restored to the original position, and coincide with the predetermined position; the first light spot 41 detected by the camera 4 moves by 13.1 μm and needs to move by 1.3 μm to recover the original position; then, adjusting the inclination angle of the first wedge-shaped quartz glass sheet 2 in the X direction to perform angle compensation, and obtaining the inclination angle of the first wedge-shaped quartz glass sheet 2, which is equal to 200 × the remaining movement amount of the first light spot 41, of 260 μ rad according to a formula; the voltage of the piezoelectric ceramic which needs to control the displacement of the first wedge-shaped quartz glass sheet 2 in the X direction is increased from 50V to 52.4V; the first spot 41 and the second spot 42 detected by the camera 4 will be restored to their original positions, coinciding with the predetermined positions; the position and the incident angle of the output beam of the laser 1 at the target point 6 are also restored; the above description applies equally to the adjustment in the Y direction.
The above is not relevant and is applicable to the prior art.
In this document, the terms front, back, upper and lower are used to define the components in the drawings and the positions of the components relative to each other, and are used for clarity and convenience of the technical solution. It is to be understood that the use of the directional terms should not be taken to limit the scope of the claims.
The features of the embodiments and embodiments described herein above may be combined with each other without conflict.
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the invention, and any modifications, equivalents, improvements and the like that fall within the spirit and principle of the present invention are intended to be included therein.
Claims (10)
1. A laser beam position and angle control system, comprising: the device comprises a laser, a first wedge-shaped quartz glass sheet, a second wedge-shaped quartz glass sheet, an adjusting mechanism, a camera and a controller;
the first wedge-shaped quartz glass sheet and the second wedge-shaped quartz glass sheet are sequentially arranged on a light path of the laser; the first wedge-shaped quartz glass sheet is matched with the second wedge-shaped quartz glass sheet and used for adjusting the direction of an output beam of the laser;
the adjusting mechanism is connected with the first wedge-shaped quartz glass sheet and is used for adjusting the position and/or deflection angle of the first wedge-shaped quartz glass sheet;
the camera is used for monitoring the positions of a first light spot and a second light spot of the output light beam reflected by the incident surface and the emergent surface of the second wedge-shaped quartz glass sheet in the camera;
the controller is respectively electrically connected with the adjusting mechanism and the camera and used for calculating a driving signal applied to the adjusting mechanism according to the deviation between the positions of the first light spot and the second light spot in the camera and a preset position so as to adjust the position and/or the deflection angle of the first wedge-shaped quartz glass sheet in real time, and the positions of the first light spot and the second light spot in the camera are coincided with the preset position.
2. The laser beam position and angle control system of claim 1, wherein the laser is a solid state laser, a fiber laser, a semiconductor laser, or a gas laser.
3. The laser beam position and angle control system of claim 1, wherein the output beam of the laser is either continuous output light or pulsed output light.
4. The laser beam position and angle control system of claim 1, wherein the output beam of the laser has a wavelength in the ultraviolet, visible, or infrared band.
5. The laser beam position and angle control system of claim 1, wherein the first wedge-shaped quartz glass piece has a wedge angle of 1-45 degrees.
6. The laser beam position and angle control system of claim 1, wherein the entrance face and the exit face of the first wedge-shaped quartz glass plate are coated with an antireflection film.
7. The laser beam position and angle control system of claim 1, wherein the first and second wedge quartz glass pieces are each uv fused silica, N-BK7, JGS1, or K9.
8. The laser beam position and angle control system of claim 1, wherein the second wedge-shaped quartz glass piece has a wedge angle of 1-45 degrees.
9. The laser beam position and angle control system of claim 1, wherein the entrance face and the exit face of the second wedge of quartz glass sheet are coated with an antireflective coating.
10. A control method using the laser beam position and angle control system according to any one of claims 1 to 9, comprising the steps of:
monitoring the position of a first light spot and a second light spot of the output light beam reflected by the incident surface and the emergent surface of the second wedge-shaped quartz glass sheet in the camera;
and calculating a driving signal applied to the adjusting mechanism according to the deviation of the positions of the first light spot and the second light spot in the camera from a preset position so as to adjust the position and/or the deflection angle of the first wedge-shaped quartz glass sheet in real time, so that the positions of the first light spot and the second light spot in the camera are coincident with the preset position.
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| CN109510059A (en) * | 2018-11-26 | 2019-03-22 | 中国科学院理化技术研究所 | Q-switched laser for outputting long pulse |
| JP2020027844A (en) * | 2018-08-10 | 2020-02-20 | 株式会社島津製作所 | Semiconductor laser device |
| CN112762863A (en) * | 2020-12-23 | 2021-05-07 | 中国科学院长春光学精密机械与物理研究所 | Four-degree-of-freedom laser pointing control system and control method thereof |
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2021
- 2021-08-31 CN CN202111011261.XA patent/CN113948947A/en active Pending
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| US20170085054A1 (en) * | 2014-06-06 | 2017-03-23 | Trumpf Lasersystems For Semiconductor Manufacturing Gmbh | Monitoring Laser Beams |
| JP2020027844A (en) * | 2018-08-10 | 2020-02-20 | 株式会社島津製作所 | Semiconductor laser device |
| CN109510059A (en) * | 2018-11-26 | 2019-03-22 | 中国科学院理化技术研究所 | Q-switched laser for outputting long pulse |
| CN112762863A (en) * | 2020-12-23 | 2021-05-07 | 中国科学院长春光学精密机械与物理研究所 | Four-degree-of-freedom laser pointing control system and control method thereof |
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